TWI256101B - An apparatus for clamping wafer with multiple groups of clamping fingers - Google Patents
An apparatus for clamping wafer with multiple groups of clamping fingersInfo
- Publication number
- TWI256101B TWI256101B TW94106760A TW94106760A TWI256101B TW I256101 B TWI256101 B TW I256101B TW 94106760 A TW94106760 A TW 94106760A TW 94106760 A TW94106760 A TW 94106760A TW I256101 B TWI256101 B TW I256101B
- Authority
- TW
- Taiwan
- Prior art keywords
- wafer
- clamping
- clamping fingers
- fingers
- multiple groups
- Prior art date
Links
Landscapes
- Cleaning Or Drying Semiconductors (AREA)
Abstract
The present invention discloses an apparatus for clamping wafer with multiple groups of clamping fingers. Two or more groups of clamping fingers clamp the wafer alternatively in different time intervals, such that the metal or photo-resist under the clamping fingers can be etched or rinsed completely without any residue. Multiple groups of clamping fingers are installed on the chuck. The fingers can move to clamp or release the wafer. Every group of the clamping fingers clamps the wafer in a time interval during etching or cleaning, and release the wafer after the other group of clamping fingers clamped the wafer, then etches the metal or photo-resist under the clamping fingers of the previous group. Then change to another group of clamping finger. Thus every part of the wafer can be etched or rinsed.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW94106760A TWI256101B (en) | 2005-03-07 | 2005-03-07 | An apparatus for clamping wafer with multiple groups of clamping fingers |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW94106760A TWI256101B (en) | 2005-03-07 | 2005-03-07 | An apparatus for clamping wafer with multiple groups of clamping fingers |
Publications (2)
Publication Number | Publication Date |
---|---|
TWI256101B true TWI256101B (en) | 2006-06-01 |
TW200633111A TW200633111A (en) | 2006-09-16 |
Family
ID=37614072
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW94106760A TWI256101B (en) | 2005-03-07 | 2005-03-07 | An apparatus for clamping wafer with multiple groups of clamping fingers |
Country Status (1)
Country | Link |
---|---|
TW (1) | TWI256101B (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI505904B (en) * | 2012-02-17 | 2015-11-01 | Beijing Sevenstar Electronics Co Ltd | Device for clamping planar disk-shaped articles |
-
2005
- 2005-03-07 TW TW94106760A patent/TWI256101B/en active
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI505904B (en) * | 2012-02-17 | 2015-11-01 | Beijing Sevenstar Electronics Co Ltd | Device for clamping planar disk-shaped articles |
Also Published As
Publication number | Publication date |
---|---|
TW200633111A (en) | 2006-09-16 |
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