1252789 九、發明說明： 【發明所屬之技術領域】 本項發明揭示一種多功能同軸式雷射喷嘴之雷射材 料加工裝置，應用之技術領域如雷射彼覆處理、三維快速 成形及雷射粉末銲接等精密加工製程。 【先前技術】 雷射披覆處理為雷射材料加工之重要製程技術，其應 用範圍主要包含材料表面改質（如增加工件之耐蝕或耐磨 性）與工件之再生（如破損工件之銲補及三維之快速成 形）。一般雷射彼覆處理，係添加合金粉末於基材表面（如 預敷、重力式送粉、流體式送粉），經由雷射照射使粉末 與表層基材熔融，形成冶金鍵結之表面塗層或銲補層。在 不同雷射彼覆處理製程中，以與雷射同軸或近似同軸之送 粉方式，配合多軸CNC機台，可進行三維金屬元件快速成 形製作或銲補。應用雷射同軸或近似同軸披覆加工技術， 適合少量多樣化組件之快速成形製造及高單價損傷零組 件之再生。由於雷射具有高能量密度特性，故雷射彼覆處 理較一般傳統製程有更低的熱輸入量，工件之熱影響區及 變形量可降至最低程度，且可獲得較細凝固組織之披覆 層。因此，雷射披覆處理製程在工業應用上已相當普及， 如各種閥座密封面之耐磨層之銲接、航空葉片低應力區之 成形銲補、葉片之快速成形製造或再生處理等。 以往發展之雷射披覆處理喷嘴，依設計之原理可區分 1252789 為重力式、近似同軸保護環氣式、同軸式、旋氣混粉式、 同軸單環氣切式及同軸式金屬堆積喷嘴等[參考Sulzer Irmotec ， HB/Laser Surface Engineering 05/20/97 技 術資料，J· Lin & W· Μ· Steen，Design characteristic and development of a nozzle for coaxial laser cladding ， Journal of Laser Applications 04/1998 ， P. 55-63及美國專利US 6534745 B1 ]。不同型式之雷射喷 嘴中，以同轴或近似同轴喷嘴，較迅速且有效率地進行三 維快速成形再生或銲補；其中以單環氣切式同軸喷嘴及同 軸式金屬堆積喷嘴之堆積效率最高，分別可達40%及43. 7°/〇 [J. Lin ^ A simple mode of powder catchment in coaxial laser cladding ， Optics & Laser Technology 31(1999)， P.233-238]。惟雷射噴嘴粉末之堆積效率，直接影響製程 效率與成本，因此設計一具有高堆積效率之雷射噴嘴為一 重要課題。 此外，雷射喷嘴於雷射粉末銲接之應用研究包括GE 公司、MTS 公司及 Trump 公司[US Pattern 5486676、US Pattern 6696664B2 及 J· Arnold and R. Volz， ， Laser powder technology for cladding and welding ， Journal of Thermal Spray Technology, Vol.8(2), June, 1999, P.243-248 ]均應用側向送粉原理進行寬間隙（Wide gap) 之結構組件雷射銲接，惟侧向送粉銲接過程具有方向性之 限制，應用上須耗費較高之成本建構雷射頭轉向系統。 1252789 【發明内容】 本發明之目的係提供一種多功能同轴式雷射喷嘴（第 一圖，該喷嘴係沿中心軸呈左右對稱之結構），使用雙環氣 及中心氣所形成之層流式氣束作用使粉末流束在喷嘴出口 具有拘束緊縮之作用，可大幅提昇粉末之集中性（減低散射 角度），進而增加雷射喷嘴之披覆處理及粉末銲接製程之粉 末堆積效率，提昇加工速度。本發明雷射多功能噴嘴藉由 喷嘴位置調整元件調整，使雷射焦點位於喷嘴内部或外 部，可進行雷射彼覆處理、三維快速成形或雷射粉末銲接 等雷射加工製程。本雷射喷嘴具備有多功能選擇性，其中 粉末流束、雷射喷嘴與雷射光束係為一共同軸。上述多功 能同軸式雷射喷嘴，其特徵在於包含有： (1) 噴嘴位置調整元件33,可調整喷嘴高低位置使雷 射光之聚焦焦點位於喷嘴内部或外部，係位於喷嘴 結構上方；及 (2) 具有雙環氣及中心氣所產生層流式氣束之喷嘴結 構，係以雙環氣及中心氣於喷嘴内產生層流式氣束 作用，其中，内環氣出口至外環氣出口在喷嘴中心 線之垂直距離範圍係大於0， 其中，喷嘴位置調整元件所調整喷嘴位置範圍為正負15 mm，係調整喷嘴高低位置使雷射焦點位於喷嘴内部或外 部，而該具有層流式氣束之喷嘴結構，更包含有：噴嘴鏡 座及外部管路入口分佈元件22,係連接喷嘴位置調整元件 33、支撐及固定隔離保護鏡片37、分配與連接粉末流道入 1252789 口 4 3、中心氣流道入口 4 9、環氣流道入口 4 5、保護氣流 道入口 47及喷嘴水冷流道32 ;粉末流道42，係引導流體 形式之粉末流束進入喷嘴且分佈於粉末流道及粉末流道出 口之通道；雙環氣束層流產生裝置及流道，為自喷嘴鏡座 及外部管路入口分佈元件上方環氣流道入口導引環氣，經 由内環氣束元件26、外環氣束元件30與内環氣層流流道 313組合排列將該輸入氣流隔離分為内環氣312及外環氣 314，其中，該内環氣層流流道係為外環氣束元件上，數量 包含一個以上之開槽或孔洞，且配合通過螺紋之平面間隙 所構成（第二圖）；中心氣層流產生元件及流道，為自喷嘴 鏡座及外部管路入口元件上方中心氣流道入口導引中心氣 經過中心氣層流流道340，其中，該中心氣層流流道位於 中心氣流道入口 49末端，並於中心氣出口與粉末流束及雙 環氣束產生交互作用，該中心氣層流流道更包含有數個孔 洞或通過螺紋之平面間隙所構成（第三圖）；及保護氣流 道，引導保護氣進入喷嘴，經由外部管路入口分佈元件與 外氣罩元件形成保護氣流道。 此外，於上述之多功能同軸式雷射喷嘴，經由增加一 組以上喷嘴外罩之冷卻水道元件56及配合喷嘴本體元件 66與外罩元件70表面喷銲絕熱塗層85 (第四圖），可於高 溫下進行坡覆處理或高溫粉末銲接等製程，其中，喷嘴外 罩之冷卻水道元件，其元件置於喷嘴外罩内，而喷嘴喷銲 之絕熱塗層85區分為介層及面層，介層（Bond coats)材 料為MCrAlY或鎳鋁粉末材料，其喷銲厚度為50〜250 /zm， -11 - 1252789 口及冷卻外環氣束元件30。 (14) 雙環氣束之外環氣束流道出口與喷嘴出口水平面 夾角14:影響粉末在喷嘴外部受環氣拘束之程度及 粉末焦點之變化。 (15) 喷嘴出口直徑18及雷射光束與粉末隔離元件28 出口直徑16:兩者直徑之變化影響粉末流束之集中 程度，並須與粉末流道42出口與喷嘴出口水平面 夾角10及雙環氣束之内、外環氣束流道出口與喷 · 嘴出口水平面夾角12、14互相匹配。 (16) 内環氣出口與外環氣出口距離20 :其影響粉末流 束之集中程度、粉末與雷射交互作用時間及彼覆製 程之堆積效率。 本發明多功能同轴式雷射喷嘴，藉由喷嘴位置調整元 件33調整噴嘴出口與雷射光焦點41之相對位置，進行不 同雷射加工製程之應用，如調整喷嘴使試片表面成為離焦 (Under focus)模式（即調整喷嘴位置使雷射焦點41位於 喷嘴内部，第五圖（a)所示），雷射光34與中心氣束50、 _ 粉末流束51及雙環氣束52在喷嘴内部即產生交互作用， 可進行不同工件之雷射彼覆處理（Laser cladding)或三 維快速成形；若調整喷嘴使試片表面為雷射聚焦點（Just focus)模式（即調整喷嘴位置使雷射焦點41位於喷嘴外 部，第五圖（b)所示），雷射光34與中心氣束50、粉末 流束51及雙環氣束52在喷嘴外部產生交互作用，可進行 不同工件之雷射粉末銲接。經由喷嘴位置調整元件33進行 -14- 1252789 喷嘴相對於焦點位置調整之範圍為正負15_(正號❹ over focus ;負號係指 under f〇cus)。 本發明中，具有雙環氣及中心氣所產生層流式氣束之 喷嘴結構’其層流式氣束產生機似仙分別敘述如下·· (1)雙環氣流之層流作用： 、對於傳統同軸式喷嘴（如第六圖（a))，粉末自粉末流 道42流出’通過噴嘴出σ 3⑽，因無環氣冷卻喷嘴之内緣， 因此以相同之喷嘴出口孔徑進行披覆處理易產生炼融粉末 寫黏附喷嘴出口 _内部之情況。本發明多功能同軸式 雷射喷嘴（第六圖㈦及第六圖（c))内環氣312可冷卻喷 嘴外環氣束元件3〇之内緣加上内環氣之層流緊縮作用，防 錄末之_时仙緣及^，由於冷卻效應與粉末流 束文到緊縮作用可縮小喷嘴之孔徑，並可獲得更集中之粉 末流束^3〇。另外’經由層流式内環氣312、外環氣314 及中。氣50之父互作用使粉末流束之直徑產生集中而具 =聚…作用（第，、圖⑷）。其中，更可經由變換雷射光束 /、粉，隔離元件28、内環氣束元件26、外環氣束元件3〇 及外氣罩το件24 (第-圖）之形狀進行調整内環氣出口至 外環氣出Π之距離2〇、雙環氣與嘴嘴出口水平面夾角（12 =4)及内環氣與粉末流道42出口之失角變化（爽角ι〇 …角12之值）拘束粉末流束之集中程度及濃度變化（即 2流束與雷射束交互作用之時間）。因此，内環氣出口 :喷嘴出口水平面夾角12角度變化可自40度至85度，外 環氣出口與喷嘴出口水平面夾角14角度變化可自20度至 -15· 1252789 80度。喷嘴出口直徑18範圍因加工製程需求及裝設雷射 種類之不同，可調整範圍自1· 5mm至i2mm，雷射光束與粉 末隔離元件28出口直徑16之調整範圍自1_至1〇_。 (2)中心氣流之層流作用： 導引進入喷嘴之中心氣，經由中心氣產生層流元件 進入具有傾斜角之喷嘴内部中心氣孔洞34〇,使中心 氣產生均勻層流式氣流冷卻保護鏡片，防止粉末進入嘴嘴 内部並保護銲道防止氧化（第三圖）。 此外，本發明喷嘴上方之聚焦鏡可視光道之設計不 同，使賴聚滅或透鏡式聚焦鏡，若採_聚焦鏡，則 可移動隔離保護鏡片（平光鏡）於铜聚集鏡之上方光道， 以隔離光道之冷卻氣與雷射披覆處理或粉^ 製^ 心氣。若使用透鏡式m則採用第—圖之導光方式配 置之隔離保護鏡片（平光鏡）。 【實施方式】1252789 IX. Description of the invention: [Technical field to which the invention pertains] The present invention discloses a laser material processing apparatus for a multi-functional coaxial laser nozzle, and the technical fields of application such as laser coating, three-dimensional rapid prototyping and laser powder Precision machining processes such as welding. [Prior Art] Laser coating treatment is an important process technology for laser material processing. Its application range mainly includes material surface modification (such as increasing the corrosion resistance or wear resistance of the workpiece) and workpiece regeneration (such as welding of damaged workpieces). And three-dimensional rapid prototyping). Generally, the laser is applied to the surface of the substrate (such as pre-coating, gravity feeding, and fluid feeding), and the powder and the surface substrate are melted by laser irradiation to form a surface coating of metallurgical bonding. Layer or solder fill layer. In different laser-spray processing processes, the multi-axis CNC machine can be used for rapid prototyping or welding of three-dimensional metal components by coaxial or near-coaxial powder feeding. Applying laser coaxial or near-coaxial coating technology, it is suitable for rapid prototyping of a small number of diverse components and regeneration of high unit damage components. Because of the high energy density of the laser, the laser treatment has a lower heat input than the conventional process, and the heat affected zone and deformation of the workpiece can be minimized, and the fine solidified structure can be obtained. Cladding. Therefore, the laser coating process has been widely used in industrial applications, such as the welding of the wear layer of various valve seat sealing faces, the forming repair of the low stress area of the air blade, the rapid prototyping manufacturing of the blade or the regeneration treatment. In the past, the development of laser coating nozzles can be distinguished according to the design principle: 1252789 is gravity type, similar coaxial protection ring gas type, coaxial type, rotary gas mixing type, coaxial single ring gas cutting type and coaxial metal stacking nozzle, etc. [Refer to Sulzer Irmotec, HB/Laser Surface Engineering 05/20/97 Technical Information, J· Lin & W· Μ· Steen, Design characteristic and development of a nozzle for coaxial laser cladding , Journal of Laser Applications 04/1998 , P 55-63 and US Patent US 6534745 B1]. In different types of laser nozzles, three-dimensional rapid prototyping or welding repair is performed quickly and efficiently with coaxial or nearly coaxial nozzles; among them, the stacking efficiency of single-ring gas-cut coaxial nozzles and coaxial metal-stacked nozzles The highest, up to 40% and 43. 7 ° / 〇 [J. Lin ^ A simple mode of powder catchment in coaxial laser cladding , Optics & Laser Technology 31 (1999), P.233-238]. However, the stacking efficiency of the laser nozzle powder directly affects the process efficiency and cost. Therefore, designing a laser nozzle with high stacking efficiency is an important issue. In addition, laser nozzle application research in laser powder welding includes GE, MTS and Trump [US Pattern 5486676, US Pattern 6696664B2 and J. Arnold and R. Volz, Laser powder technology for cladding and welding, Journal of Thermal Spray Technology, Vol. 8(2), June, 1999, P.243-248] uses the principle of lateral powder feeding to perform wide gap (Wide gap) structural component laser welding, but the lateral powder feeding welding process has The limitation of directionality requires the construction of a laser head steering system at a relatively high cost. 1252789 SUMMARY OF THE INVENTION The object of the present invention is to provide a multi-functional coaxial laser nozzle (first diagram, the nozzle is symmetrically arranged along the central axis), using a double-loop gas and a central gas to form a laminar flow The gas beam action causes the powder stream to have a restraining and contracting effect at the nozzle outlet, which can greatly improve the concentration of the powder (reduce the scattering angle), thereby increasing the powder deposition efficiency of the laser nozzle coating process and the powder welding process, and improving the processing speed. . The laser multi-function nozzle of the present invention is adjusted by the nozzle position adjusting element so that the laser focus is located inside or outside the nozzle, and laser processing such as laser coating, three-dimensional rapid forming or laser powder welding can be performed. The laser nozzle has multifunctional selectivity, wherein the powder stream, the laser nozzle and the laser beam are a common axis. The multi-functional coaxial laser nozzle has the following features: (1) a nozzle position adjusting component 33, which can adjust the nozzle height position so that the focus of the laser light is located inside or outside the nozzle, and is located above the nozzle structure; and (2 a nozzle structure having a laminar gas and a laminar gas stream generated by a central gas, wherein a double-loop gas and a central gas are used to generate a laminar gas beam in the nozzle, wherein the inner ring gas outlet to the outer ring gas outlet is at the nozzle center The vertical distance range of the line is greater than 0, wherein the nozzle position adjusting component adjusts the nozzle position range to be plus or minus 15 mm, and adjusts the nozzle height position so that the laser focus is inside or outside the nozzle, and the laminar flow type gas jet nozzle The structure further comprises: a nozzle mirror holder and an external pipeline inlet distribution member 22, a nozzle attachment position adjusting member 33, a support and fixed isolation protection lens 37, a distribution and connection powder flow passage into the 1252789 port 4 3, and a central air passage entrance. 4 9. Ring air channel inlet 4 5, protective air channel inlet 47 and nozzle water cooling channel 32; powder flow channel 42 is a powder flow for guiding fluid form a passage that enters the nozzle and is distributed at the outlet of the powder flow passage and the powder flow passage; the double-loop gas beam laminar flow generation device and the flow passage guide the annular gas from the inlet of the annular gas flow passage above the nozzle mirror seat and the external pipeline inlet distribution element, via The inner ring gas beam element 26, the outer ring gas beam element 30 and the inner ring gas laminar flow channel 313 are arranged in an array to divide the input gas stream into an inner ring gas 312 and an outer ring gas 314, wherein the inner ring gas layer flow The trajectory is an outer ring gas beam component, the number of which includes more than one slot or hole, and is matched by a plane gap of the thread (second diagram); the central gas laminar flow generating component and the flow channel are self-nozzle mirror mounts And the central airflow passage inlet center gas above the outer pipeline inlet element passes through the central gas laminar flow passage 340, wherein the central gas laminar flow passage is located at the end of the central airflow passage inlet 49, and is at the central air outlet and the powder flow And the double-ring gas beam interacts, the central gas laminar flow channel further comprises a plurality of holes or a plane gap formed by the thread (third figure); and the air flow path is protected to guide the shielding gas into the nozzle through An inlet conduit portion and the outer profile element forming the protective hood member flow channel. In addition, in the multi-functional coaxial laser nozzle described above, the heat insulating coating 85 (fourth figure) can be spray-welded on the surface of the outer cover element 70 via the cooling water channel member 56 and the matching nozzle body member 66 of the nozzle assembly. The process of slope treatment or high-temperature powder welding is performed at a high temperature, wherein the components of the cooling water channel of the nozzle cover are placed in the nozzle cover, and the heat-insulating coating 85 of the nozzle spray welding is divided into a layer and a surface layer, and the interlayer ( Bond coats) are MCrAlY or nickel-aluminum powder materials with a spray weld thickness of 50 to 250 /zm, -11 - 1252789 and a cooled outer ring gas beam element 30. (14) The angle between the exit of the outer ring gas beam passage and the horizontal surface of the nozzle outlet of the double-ring gas beam is 14: affecting the degree to which the powder is restrained by the atmosphere outside the nozzle and the change of the powder focus. (15) Nozzle outlet diameter 18 and laser beam and powder spacer element 28 outlet diameter 16: The change in diameter affects the concentration of the powder stream and must be at an angle 10 to the outlet of the powder channel 42 and the nozzle outlet level and the double-ring gas The inner and outer ring gas beam flow path outlets and the nozzle and nozzle outlet water level angles 12, 14 match each other. (16) Distance between the inner ring gas outlet and the outer ring gas outlet 20: it affects the concentration of the powder stream, the interaction time between the powder and the laser, and the stacking efficiency of the other processes. The multifunctional coaxial laser nozzle of the present invention adjusts the relative position of the nozzle outlet and the laser light focus 41 by the nozzle position adjusting component 33, and performs various laser processing processes, such as adjusting the nozzle to make the surface of the test piece defocus ( Under focus mode (ie, adjusting the nozzle position such that the laser focus 41 is located inside the nozzle, as shown in the fifth diagram (a)), the laser beam 34 and the center gas beam 50, the powder stream 51, and the double loop gas beam 52 are inside the nozzle. That is, interaction occurs, laser cladding or three-dimensional rapid profiling of different workpieces can be performed; if the nozzle is adjusted, the surface of the test piece is in a laser focus mode (ie, adjusting the nozzle position to make the laser focus) 41 is located outside the nozzle, shown in Fig. 5(b). The laser beam 34 interacts with the central gas beam 50, the powder stream 51 and the double-ring gas beam 52 outside the nozzle to perform laser powder welding of different workpieces. The nozzle position adjusting member 33 performs -14 - 1252789. The range of nozzle adjustment with respect to the focus position is plus or minus 15_ (positive sign ❹ over focus; minus sign means under f〇cus). In the present invention, the nozzle structure of the laminar flow gas beam generated by the double-ring gas and the central gas is described as follows: (1) The laminar flow of the double-ring gas flow: For the conventional coaxial Nozzle (as shown in Fig. 6(a)), the powder flows out from the powder flow path 42. σ 3 (10) is passed through the nozzle. Since the inner edge of the nozzle is not cooled by the annular gas, the same nozzle exit aperture is used for the coating process. Melt powder is written to the nozzle outlet _ internal condition. The multi-functional coaxial laser nozzle of the present invention (sixth figure (seventh) and sixth figure (c)) inner ring gas 312 can cool the inner edge of the outer ring gas beam element 3 of the nozzle and the laminar flow of the inner ring gas. At the end of the anti-recording period, the edge of the fairy and the ^, due to the cooling effect and the powder flow to the tightening effect can reduce the pore size of the nozzle, and obtain a more concentrated powder stream ^ 3 〇. In addition, it passes through the laminar inner ring gas 312, the outer ring gas 314, and the middle. The interaction of the father of the gas 50 causes the diameter of the powder stream to concentrate and has a function of poly (..., Fig. (4)). Wherein, the inner ring gas can be adjusted by changing the shape of the laser beam/, the powder, the spacer element 28, the inner ring gas beam element 26, the outer ring gas beam element 3〇, and the outer air hood member 24 (Fig. The distance from the outlet to the outer ring is 2〇, the angle between the double ring gas and the nozzle outlet level (12 = 4) and the outlet angle of the inner ring gas and the powder flow channel 42 (slow angle ι〇... angle 12) Limit the concentration of the powder stream and the concentration change (ie, the time between the 2 streams and the laser beam). Therefore, the inner ring gas outlet: the angle of the nozzle outlet horizontal angle 12 can vary from 40 degrees to 85 degrees, and the angle between the outer ring gas outlet and the nozzle outlet level 14 can vary from 20 degrees to -15 · 1252789 80 degrees. The diameter of the nozzle outlet 18 can be adjusted from 1·5 mm to i2 mm depending on the processing requirements and the type of laser installed. The adjustment range of the exit beam diameter 16 of the laser beam and the powder spacer element 28 is from 1 to 1 〇. (2) The laminar flow of the central airflow: guiding the central gas entering the nozzle, generating a laminar flow element through the central gas into the inner central air hole 34〇 of the nozzle having the inclined angle, so that the central gas generates a uniform laminar airflow cooling protection lens Prevents powder from entering the mouth of the mouth and protecting the weld bead from oxidation (figure 3). In addition, the design of the focusing mirror above the nozzle of the present invention is different, so that the focusing lens or the focusing lens can be moved, and if the focusing mirror is used, the isolation shielding lens (flat mirror) can be moved above the copper focusing mirror. , to isolate the cooling gas and laser coating treatment or powder control. If the lens type m is used, the isolating protective lens (flat mirror) configured by the light guide of the first figure is used. [Embodiment]
影響雷射披覆處理堆積效率’主要因素包含喷嘴粉: 集中程度及雷射與粉末交互作用時間之影響，就粉末集、 程度而言，該多功能同㈣雷射噴嘴之中心氣（例如.氨The main factors affecting the stacking efficiency of laser drape processing include nozzle powder: the degree of concentration and the interaction time between laser and powder. In terms of powder set and degree, the multi-function (4) laser nozzle center gas (for example. ammonia
與雙環氣（例如：氬氣）對粉末流束集中程度之示音I 如第七圖所示該圖顯*粉末由輪送=二' 出口（外氣罩元件繼，其發散切^體輪送=噴° 若粉末經輸送氣體及中心氣體共同作il束224相虽大 氣罩元件24)後，則呈現較為集中於乍士用流經喷嘴出口 〇 丁杨末流束222(即近似」 • 16 - 1252789 核氣切式粉末流束）。若粉末依本 一 氣體與雙環氣束作用流經喷嘴出^體、中心 現未發散且更為集中之粉末流束22q。' 70件24)後，呈 末流束照片如附件圖一所示。 而本發明之實際粉 再者’就氣體輸送流量對於粉太攻 作用之實驗，於2.5KW雷射作用下（IN6 雷射光束交互 能同轴式雷射噴嘴粉末流束在粉末輪送氣體粉末 心氣均為1.5升/分（lpm)之作用下，於支 |乳，、中 較低(約為Η』公尺/秒(m/s))，= 較高（最大值為22公斤/公尺3 (Kg/m3)) 粉末農度 與雷射能量交互作用估算粉末流速與粉末溫度_末:= 該粉末流速較慢，增加粉末與雷射交互作用之時間八 溫度達3航’且粉末集中性佳，故實測堆積達 82· 65%。若粉末流束以3升/分（LPM)粉末輪送氣、5升〆分 (LPM)環氣及5升/分（LPM)中心氣體流量作用時，粉末、、令束 自喷嘴出口向喷嘴中心產生集中，粉末流束中心速2為 3.4〜4.2公尺/秒（111/3)，且單位體積之最高粉末濃度變為 15公斤/公尺3 (Kg/·»3)，粉末溫度為2210°C，其粉末之堆 積效率 <達52%。若粉末流束以3升/分（LPM)粉末輪送氣、 5升/分（LPM)環氣及10升/分（LPM)中心氣體流量作用時， 其粉末之集中程度變化不大，惟導致粉末之流速增加（為 冬巧〜已^公尺/秒化/^”及粉末濃度下降^最大值為^公 斤/公尺3 (Kg/m3))，粉末因與雷射交互作用時間減少而 導致粉末溫度降低（約為2020°C)，使粉末之堆積效率變 -17- 1252789 為 46%。 為了解距噴嘴出口不同距離之粉末流束及 末父互作用直經之變化，以粉末流束影像量測裝置（第: 圖）進行距噴嘴出口不同距離之粉末流束及雷射盘粉末交 之變化量測。粉末量測裝置之組成包括：窄縫 面光源350經由橢圓鏡352聚焦成一細平行面光， 射於距喷嘴出u 24不同距離位置358之粉束 ， 由距喷嘴出"下方處架設高解析度之㈣、數位取像 裝置354，截取粉末流束影像，經影像處理後量測距喷嘴 出口不同距離之粉末流束橫斷面直徑。此外，以較強之聚 焦式技射光356投射於粉末與雷射交互作用之反應流束 36〇，並經由另一側面之高解析度微焦數位取像裝置354 取像後’經影像處理量測粉末與雷射交互作用流束360直 徑變化’即藉由上述粉末流束影像量測裝置量測粉末流束 距喷嘴不同高度（簡稱喷嘴出口距離，Stand-off distance ’簡稱幼）之直徑變化。以上述粉末流束影像量 測裝置量測噴嘴在（1)粉末輸送氣體（CG)，（2)粉末輸送氣 體加中心氣體（CG + COG)，（3)粉末輸送氣體、中心氣體 加雙環氣體（CG + COG + DSG)作用下，不同喷嘴出口距離 之粉末流束直徑與喷嘴出口直徑（Dp/Dn)比值關係，如第 九圖所示。由第九圖顯示在送粉氣流、中心氣流與雙環氣 流作用下，粉末流束直徑在喷嘴出口距離25mm以内，其 Dp/Dn比值小於1，且其d/D(披覆融池直徑/粉末流束直徑） 比值隨距噴嘴距離增加由小於1變化至接近1，即經雙環 -18- 1252789 氣束作用後粉末流束直徑較披覆融池直徑小或接近相 等’由此可知本發明雷射噴嘴具有優異之粉末流束集中 性。又經雷射與粉末交互作用測試，以影像處理量測裝置 量測DP/Dsl(粉末流束直徑/雷射與粉末作用之流束直徑） 比值與距喷嘴出口距離之關係，如第十圖所示，在喷嘴出 口距離25關以内’其Dp/Dsi比值經測試結果由大於1變化 至接近1與小於1，即粉束流束直徑由大於變為相近或稍 小於雷射光軸直彳Ρ φ此顯示本項發明之同軸式多功能雷 射喷嘴其進打披覆處理或三維快速成形，喷仙對於雷射 焦點位置調整可由喷嘴位置調整元件33進行調整，範圍 為正負15mm。經由上述結果顯示使用本發明之多功能同軸 式雷射喷嘴，集中之粉末流束自喷嘴出口即為雷射束所覆 蓋’因此粉末與雷射光束交互作用時間較長及粉末熔融量 亦較多。 在雷射披覆處理方面，以本發明之多功能同軸式雷射 喷嘴，進行不同功率及掃描速度之雷射披覆處理測試，披 覆處理測試雷射功率以1KW為基礎，雷射掃瞄速度分別為 300 mm/min·及180 mm/niin·為基準。披覆試片採用304不 銹鋼試片（厚1mm)，試片彼覆測試距離200_，彼覆粉末 使用IN625粉末（粒度45//πι〜90//Π1) ’粉末經輸送氣體 (carrier gas)由流體式送粉機送入多功能同軸式雷射喷 嘴，經坡覆測試結果如圖^ 所示，不同走速及距喷嘴不 同距離下其堆積效率之變化，整體而言其堆積效率平均值 高於50%以上，最高甚至可達70%。 -19- 1252789 在二維成形測試方面’以本發明之多功能同軸式雷射 喷嘴進行測试’測試所用之粉末為Η13模具鋼用粉末（粒 度範圍45//m〜75/zm)，成形區域為60mmx25mm，每道堆 銲寬度3mm，成形銲道重疊ι·2ιμι，每層成形堆銲厚度 0.67mm，經成形堆銲15層厚度i〇 〇5mm，送粉率7·86 g/min·，經由3D成形試片（附件圖二）成形前後重量變化 及成形過程所耗費時間計算本發明喷嘴之成形堆積效率 為74 %，遠高於Mathew等人發展之同軸式金屬堆積喷嘴 (美國專利US 6534745 B1)其三維成形堆積效率43· 了％。 在粉末銲接方面’應用多功能同軸式雷射噴嘴於22〇5 不銹鋼之粉末銲接，板厚為3腿]之22〇5不銹鋼試片以 3.5〜30雷射功率，走速11〇〇〜7〇〇111111/1114進行同軸送粉基 本走銲雷射銲接，噴嘴出Π相對雷射焦點位置為過焦（〇ver f〇CUS)15_，中心氣以氦氣或氮氣，其流量約15〜20LPM， 配合，加適量之_粉末進行粉末銲接（•接板厚而 之=量約為卜15g/min)，送粉鋅接後針對不同條件 试片^相肥粒鐵含量量測雜町ite〜e)量測肥 拉鐵3量’使鋅道肥粒鐵/沃斯田鐵減值為 之，性、衝擊勒性與延性，可大幅改善―般雷道 束知接，麵道產生過量肥粒鐵，而降 =子 等_::十二圖⑷所示為多功能同輛式性 〜孔以乳氧配合添加純鎳粉末進行22()5不〔之中 銲道之橫斷面巨觀金相照片，圖中可知鑰=末銲接 末之添加吸收部份雷射銲接能量，而使輝道 • 20 · 1252789 酒杯狀。若僅以雷射束進行鑰孔銲接之銲道橫斷面金相組 織（第十二圖（b))，顯示銲道產生過量之肥粒鐵相。應用 本發明噴嘴配合添加純鎳粉進行鑰孔粉末銲接之銲道橫斷 面光學金相（第十二圖（C))，顯示使用本發明喷嘴經由鎳粉 添加，經由雙環氣束及中心氣束之層流作用造成粉末集中 性，改變銲道肥粒鐵/沃斯田鐵比值為1，可改善雙相不銹 鋼之銲道特性。 以上所揭露者僅為本發明之應用實例，並非用以限定 本發明之應用範圍，任何更動與潤飾，在不脫離本發明之 基本精神下，均應屬於本發明之適用範圍，因此本發明之 保護範圍以申請專利範圍所界定者為準。 【圖式簡單說明】 第一圖：多功能同軸式雷射喷嘴結構圖。 第二圖：雙環氣層流之產生裝置。 第三圖：中心氣層流之產生裝置。 第四圖：多功能同轴式雷射喷嘴於高溫環境應用之結構圖。 第五圖：（a)為調整多功能同軸式雷射噴嘴使試片表面成 為離焦（Under focus)模式與（b)為調整喷嘴使試片 表面成為雷射聚焦（Just focus)模式。 第六圖：（a)傳統同軸式雷射喷嘴之粉末黏附喷嘴出口示 意圖，（b)多功能同軸式雷射喷嘴之内環氣束避免粉 末黏附喷嘴出口示意圖（粉末流道出口與内環氣出口 距離較長），（c)多功能同軸式雷射喷嘴之内環氣束 1252789 避免粉末黏附噴嘴出口示意圖（粉末流道出口與内環 氣出口距離較短）與（d)多功能同軸式雷射喷嘴之雙 環氣束使粉末集中效應示意圖。 第七圖··本發明多功能同轴式雷射喷嘴之粉末流束集中示 意圖。 第八圖：粉末流束影像量測裝置示意圖。 第九圖：DP/Dn(粉末流束直徑/喷嘴出口直徑）比值與距喷 嘴出口位置之關係。 第十圖：DP/Dsl (粉末流束直徑/雷射與粉末作用之流束直 徑）比值與距喷嘴出口位置之關係。 第十一圖：多功能同轴式雷射喷嘴在雙環氣束作用下，不 同組合之走速及工件距喷嘴出口距離之堆積效率。 第十二圖：（a)為應多功能同軸式雷射喷嘴中心氣以氦氣 配合添加純鎳粉末進行粉末銲接銲道之橫斷面巨觀 金相照片，（b)不添加粉末之雷射銲件之銲道金相 與（c)應用本發明喷嘴配合添加純鎳粉進行雷射粉末 銲接之銲道金相。 【主要元件符號說明】 10:粉末流道出口與喷嘴出口水平面夾角 12:雙環氣束之内環氣束流道出口與喷嘴出口水平面 夾角 14:雙環氣束之外環氣束流道出口與噴嘴出口水平面 1252789 16:雷射光束與粉末隔離元件出口直徑 18:喷嘴出口直徑 20:内環氣出口與外環氣出口之垂直距離 22:鏡座及外部管路入口分佈元件； 23:中心氣產生層流元件 24:外氣罩元件 26:内環氣束元件 28:雷射光束與粉末隔離元件 30:外環氣束元件 32:喷嘴水冷流道 33:喷嘴位置調整元件 34:雷射光束 36:雷射聚焦鏡 37:隔離保護鏡片 38:披覆處理銲道 39:粉末銲接銲道 40:披覆或粉末銲接處理工件 41:雷射焦點 42:粉末流道 43:粉末流道入口 44:環氣流道 45:環氣流道入口 46:保護氣流道 47:保護氣流道入口 1252789 48:中心氣流道 49:中心氣流道入口 50:中心氣束 51:粉末流束 52:雙環氣束 56:喷嘴外罩之冷卻水道元件 66:喷嘴本體元件 70:外罩元件 78:保護鏡片 85:喷嘴喷銲之絕熱塗層 220:中心氣體與雙環氣束作用之粉末流束 222:近似單環氣切式粉末流束 224:發散之粉末流束 300:喷嘴出口 306:熔融粉末黏附喷嘴出口 312:内環氣 313 :内環氣層流流道 314:外環氣 330:集中之粉末流束 340:中心氣層流流道 350:窄縫面光源 352:橢圓鏡 354:微焦數位取像裝置 356:聚焦式投射光 1252789 358:喷嘴出 口距離（Stand-off distance) 360:粉末與雷射交互作用流束 【附件簡單說明】 圖一：經雙環氣束作用後，粉末流束之實際照片。 圖二：多功能同轴式雷射喷嘴進行三維成形後，成形試片 之照片。The sound of the concentration of the powder stream with the double-ring gas (for example: argon) is as shown in the seventh figure. The powder is represented by the rounding = two' outlet (the outer hood element is followed by the divergent cutting body wheel) Send = spray ° If the powder is transported together with the central gas as the il beam 224 phase, although the atmosphere cover element 24), it is more concentrated in the gentleman's flow through the nozzle outlet 〇 杨 杨 end stream 222 (ie approximate) • 16 - 1252789 Nuclear gas cut powder stream). If the powder flows through the nozzle according to the gas and the double-ring gas beam, the powder stream 22q which is not diverged and concentrated in the center. After '70 pieces 24), the photo of the last stream is shown in Figure 1 of the attached figure. The actual powder of the present invention is further described in the experiment of the gas transmission flow rate for the powder attack, under the action of 2.5 KW laser (IN6 laser beam interactive energy coaxial laser nozzle powder stream in the powder wheel gas powder The heart is 1.5 l / min (lpm), in the branch | milk, medium and low (about Η 公 metric meters / sec (m / s)), = higher (maximum of 22 kg / gong Ruler 3 (Kg/m3)) Powder Farming and Laser Energy Interaction Estimate Powder Flow Rate and Powder Temperature _ End: = The powder flow rate is slower, increasing the interaction time between the powder and the laser. The temperature is up to 3 voyages' and the powder Concentration is good, so the measured stacking amount is 82.65%. If the powder stream is sent by 3 L/min (LPM) powder wheel, 5 liters of litter (LPM) ring gas and 5 L/min (LPM) center gas flow At the time, the powder, and the bundle are concentrated from the nozzle outlet to the center of the nozzle, the powder stream center speed 2 is 3.4 to 4.2 meters/second (111/3), and the highest powder concentration per unit volume becomes 15 kg/meter. 3 (Kg/·»3), the powder temperature is 2210 ° C, and the powder stacking efficiency < 52%. If the powder stream is supplied with 3 L / min (LPM) powder wheel When 5 liters per minute (LPM) of the ring gas and 10 liters per minute (LPM) of the center gas flow, the concentration of the powder does not change much, but the flow rate of the powder increases (for the winter, it has been metric meters per second). / / ^" and the concentration of the powder decreased ^ the maximum is ^ kg / metre 3 (Kg / m3)), the powder due to the reduction of the interaction time with the laser caused by the temperature of the powder decreased (about 2020 ° C), so that the powder The stacking efficiency is changed to -17-1252789, which is 46%. In order to understand the change of the powder flow and the final interaction between the nozzles at different distances from the nozzle outlet, the powder flow image measuring device (Fig.) is different from the nozzle outlet. The measurement of the variation of the powder flow and the laser powder is carried out. The composition of the powder measuring device comprises: the narrow slit surface light source 350 is focused into a thin parallel surface light by the elliptical mirror 352, and is incident at a different distance from the nozzle. The powder bundle of 358 is set up by the high-resolution (4) and digital image capturing device 354 from the lower side of the nozzle, and the powder stream image is intercepted, and the powder flow cross section of the nozzle at different distances from the outlet of the distance measuring nozzle is processed by the image processing. Diameter. In addition, with a strong focus technique The light 356 is projected on the reaction stream 36〇 of the powder and the laser interaction, and is imaged by the high-resolution micro-focal digital image capturing device 354 on the other side. 360 diameter change' is measured by the above-mentioned powder stream image measuring device to measure the diameter change of the powder stream from the different heights of the nozzle (referred to as the nozzle exit distance, the short-term distance). The device measuring nozzle is in (1) powder conveying gas (CG), (2) powder conveying gas plus center gas (CG + COG), (3) powder conveying gas, center gas plus double ring gas (CG + COG + DSG) Next, the relationship between the powder flow diameter and the nozzle outlet diameter (Dp/Dn) ratio of different nozzle exit distances is as shown in the ninth figure. From the ninth figure, the powder flow diameter is within 25 mm of the nozzle outlet distance under the action of the powder feed gas stream, the center gas flow and the double loop gas flow, and the Dp/Dn ratio is less than 1, and its d/D (coating melt diameter/powder) The diameter of the stream) varies from less than 1 to close to 1 as the distance from the nozzle increases, that is, the diameter of the powder stream after the double-ring-18-1252789 gas beam is smaller or nearly equal to the diameter of the coated pool. The jet nozzle has excellent powder stream concentration. Through laser and powder interaction test, the ratio of DP/Dsl (powder flow diameter/beam and powder flow beam diameter) to the nozzle exit distance is measured by image processing measuring device, as shown in the tenth figure. As shown, the Dp/Dsi ratio of the nozzle exit distance is less than 1 and the value of the Dp/Dsi ratio is changed from greater than 1 to close to 1 and less than 1, that is, the diameter of the bundle beam changes from greater than or slightly smaller than the laser axis. φ This shows that the coaxial multi-function laser nozzle of the present invention is subjected to a drape treatment or a three-dimensional rapid forming, and the adjustment of the laser focus position can be adjusted by the nozzle position adjusting member 33, and the range is plus or minus 15 mm. Through the above results, it is shown that the multi-functional coaxial laser nozzle of the present invention uses the concentrated powder stream to be covered by the laser beam from the nozzle outlet. Therefore, the interaction time between the powder and the laser beam is longer and the powder melting amount is also more. . In the laser coating treatment, the multi-function coaxial laser nozzle of the present invention performs laser coating treatment tests of different powers and scanning speeds, and the laser power of the coating treatment is based on 1 KW, and the laser scanning is performed. The speeds are 300 mm/min· and 180 mm/niin· respectively. The coated test piece is made of 304 stainless steel test piece (thickness 1mm), the test piece is covered with a test distance of 200_, and the powder is coated with IN625 powder (particle size 45//πι~90//Π1) 'powder by carrier gas The fluid type powder feeder is fed into the multi-functional coaxial laser nozzle. The results of the slope test are shown in Fig. 2. The stacking efficiency varies with different speeds and nozzles at different distances. More than 50%, the highest even up to 70%. -19- 1252789 The powder used in the test of the multi-functional coaxial laser nozzle of the present invention in the two-dimensional forming test is a powder for Η13 mold steel (particle size range 45//m~75/zm), forming The area is 60mmx25mm, the welding width is 3mm, the forming bead is overlapped by ι·2ιμι, the thickness of each layer is 0.67mm, and the thickness of the layer is 15〇〇 i〇〇5mm, the feeding rate is 7.86g/min· The forming stacking efficiency of the nozzle of the present invention is calculated to be 74% by the 3D forming test piece (Attachment Figure 2) before and after the weight change and the forming process, which is much higher than the coaxial metal stacking nozzle developed by Mathew et al. (US Patent US) 6534745 B1) The three-dimensional forming stacking efficiency is 43%. In powder welding, 'multi-functional coaxial laser nozzle is used for powder welding of 22〇5 stainless steel, plate thickness is 3 legs] 22〇5 stainless steel test piece with 3.5~30 laser power, running speed 11〇〇~7 〇〇111111/1114 performs the basic welding laser welding of coaxial powder feeding. The position of the nozzle is relatively over-focus (〇ver f〇CUS) 15_, the center gas is helium or nitrogen, and the flow rate is about 15~20LPM. , with the appropriate amount of powder to carry out powder welding (• thick plate and the amount is about 15g / min), after the powder zinc is connected to the different conditions of the test piece ^ phase fat iron content measured soya ite ~ e) Measure the amount of ferro-drawn iron 3' to make the zinc road ferrite iron/Worthian iron depreciated, sex, impact and ductility, which can greatly improve the "like-like beam", and the excess fertilizer is produced in the surface. Granular iron, and lower = sub-equivalent _:: Twelve (4) shows the multi-functional car-like type ~ hole with the addition of pure nickel powder with milk oxygen to carry out 22 () 5 no [the cross section of the weld bead Looking at the metallographic photograph, the figure shows that the key = the end of the weld is added to absorb part of the laser welding energy, and the Huidao • 20 · 1252789 wine glass. If the cross-section metallographic structure of the weld bead of keyhole welding is performed only with a laser beam (Fig. 12(b)), it is shown that the weld bead produces an excessive amount of ferrite phase. Applying the nozzle of the present invention with the addition of pure nickel powder for the keyhole powder welding of the cross-section optical metallography of the bead (Fig. 12(C)), showing that the nozzle of the invention is added via nickel powder via the double-ring gas beam and the central gas The laminar flow of the bundle causes the concentration of the powder, and the ratio of the ferrite iron/Worthian iron to the weld bead is 1 to improve the weld bead characteristics of the duplex stainless steel. The above disclosure is only an application example of the present invention, and is not intended to limit the scope of application of the present invention. Any modification and refinement should fall within the scope of application of the present invention without departing from the basic spirit of the present invention. The scope of protection is subject to the definition of the scope of patent application. [Simple description of the diagram] The first picture: the structure diagram of the multi-functional coaxial laser nozzle. Second figure: The device for generating a double-ring gas laminar flow. The third picture: the generating device of the central gas laminar flow. The fourth picture: the structure diagram of the multi-functional coaxial laser nozzle applied in high temperature environment. The fifth picture: (a) is to adjust the multi-function coaxial laser nozzle to make the surface of the test piece into an Under focus mode and (b) to adjust the nozzle to make the surface of the test piece into a Just focus mode. Figure 6: (a) Schematic diagram of the powder-adhesive nozzle outlet of a conventional coaxial laser nozzle, (b) Schematic diagram of the inner ring gas beam avoiding powder adhesion nozzle exit of the multi-functional coaxial laser nozzle (powder flow path outlet and inner ring gas) (E) Multi-coaxial coaxial laser nozzle inner ring gas beam 1252789 Avoid powder adhesion nozzle outlet schematic (small powder flow path outlet and inner ring gas outlet distance is short) and (d) multi-function coaxial The double-loop gas beam of the laser nozzle gives a schematic diagram of the concentration effect of the powder. Fig. 7 is a schematic illustration of the powder flow of the multifunctional coaxial laser nozzle of the present invention. Figure 8: Schematic diagram of the powder stream image measuring device. Figure 9: DP/Dn (powder flow diameter / nozzle outlet diameter) ratio and the distance from the nozzle outlet. Figure 10: DP/Dsl (powder beam diameter / beam diameter of the laser and powder) and the distance from the nozzle exit. Figure 11: Stacking efficiency of multi-functional coaxial laser nozzles under different double-loop gas beams, different combinations of running speed and workpiece distance from nozzle exit. Twelfth Figure: (a) is a cross-sectional giant metallographic photograph of a powder-welded bead of a multi-functional coaxial laser nozzle center gas with helium gas added with pure nickel powder, (b) no powdered thunder The weld bead metallurgy of the shot weldment and (c) the use of the nozzle of the invention in combination with the addition of pure nickel powder for the laser metallization of the weld bead. [Description of main component symbols] 10: Angle between the outlet of the powder flow passage and the horizontal plane of the nozzle outlet 12: The angle between the outlet of the inner ring gas beam passage of the double-ring gas beam and the nozzle outlet horizontal plane 14: the outlet of the annular gas beam outside the double-loop gas beam and the nozzle Outlet level 1252789 16: Laser beam and powder isolation element outlet diameter 18: Nozzle outlet diameter 20: Vertical distance between inner ring gas outlet and outer ring gas outlet 22: mirror seat and external pipe inlet distribution element; 23: center gas generation Laminar flow element 24: outer hood element 26: inner ring gas beam element 28: laser beam and powder isolation element 30: outer ring gas beam element 32: nozzle water cooling channel 33: nozzle position adjustment element 34: laser beam 36 : Laser Focusing Mirror 37: Isolation Protective Lens 38: Draped Treatment Weld Bead 39: Powder Welded Weld 40: Draping or Powder Welding Treatment of Workpiece 41: Laser Focus 42: Powder Flow Path 43: Powder Runner Inlet 44: Ring air channel 45: Ring air channel inlet 46: Protective air channel 47: Protective air channel inlet 1252789 48: Center air channel 49: Center air channel inlet 50: Center gas beam 51: Powder stream 52: Double ring gas beam 56: Nozzle Cooling water channel element 66 of the outer cover: spray Body member 70: cover member 78: protective lens 85: nozzle spray welded thermal insulation coating 220: central gas and double ring gas beam effect powder stream 222: approximately single ring gas cut powder stream 224: divergent powder stream 300: Nozzle outlet 306: molten powder adhesion nozzle outlet 312: inner ring gas 313: inner ring gas laminar flow channel 314: outer ring gas 330: concentrated powder stream 340: central gas laminar flow channel 350: narrow slit surface Light source 352: Elliptical mirror 354: Micro focus digital image capturing device 356: Focused projection light 1252789 358: Stand-off distance 360: Powder and laser interaction flow beam [A brief description of the attachment] Figure 1: The actual photo of the powder stream after the double-ring gas beam. Figure 2: Photograph of the formed test piece after three-dimensional forming of the multi-functional coaxial laser nozzle.
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