TWI252782B - Ultrasonic micro nozzle system - Google Patents

Abstract

This invention relates to an ultrasonic micro nozzle system, including: a first nebulization and a second nebulization micro nozzle system. The micro nozzle is a micro nozzle system made of material capable of resisting high temperature (such as: glass, silicon nitride, silicon carbide, silane, nickel, titanium, etc), and controls amount of medium (such as, water, fuel, alcohol, medicament, liquid metal, solution and etc.) to be nebulized and subject to pressurized air, flowing into a fluid storage tank vi a flow meter. While performing the nebulization process, the medium to be nebulized and nebulization impact gas flow towards a fluid passageway and a gas passageway via a liquid passageway manifold and a gas passageway manifold, respectively, to impact upon and collide with a separator for controlling changes of flow rate and flow direction of the medium to be nebulized and the nebulization impact gas. The converging and diverging design for passageway of the port causes the impact wave to interface and to generate seismic waves effects thereby enhancing the nebulization effect, so as to further enhance the nebulization, shattering and thin-film forming effect for the medium to be nebulized.

Description

1252782 Yongzheng

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a super-sound micro-nozzle system, and more particularly to a nozzle, which is designed to reduce the flow of gas and liquid fluid in a nozzle. $ Sonic wave effect f 'in order to improve the atomization effect, and the effect of the medium to be atomized: the enthalpy, the pulverization and the decimation are more remarkable, and the micro-nozzle system including the primary atomization and the secondary atomization is Improve the atomization effect. [Prior Art] In recent years, with the vigorous development of domestic industry and commerce, atomizers have been widely used = various aspects, from shower heads in daily life to high-tech too, rocket engines, such as the use of atomizing nozzles Combustion power system, other automotive industry, industrial combustion furnace, energy industry, turbine engine system, Hef engine, etc. need to use atomizing nozzle, even spray cooling, powder metallurgy and spray molding, Chenye Spraying insecticides, inkjet printers, and environmentally-friendly waste control and dust removal devices are also applied to atomizing nozzles. / In the conventional nozzle device, regardless of the use of gas impact atomization technology, liquid impact atomization technology or rotary atomization technology to produce spray, the range of twist distribution is quite large, especially in related industrial applications; In industrial applications such as powder metallurgy materials, where more fine powders and particle uniformity are required, the powder grading process is required to increase the cost of the k and reduce the yield of the product. Therefore, it is necessary to improve the existing nozzle technology. [Summary of the Invention]

1252782

V. INSTRUCTIONS (2) In view of this, the present inventors have made an improvement on the use of conventional nozzles in the use of not yet perfect, and thus developed the supersonic micro-nozzle system of the present invention, which is suitable for different fogs. The medium is transformed, and the shock wave effect of supersonic atomization is generated via the tapered and divergent flow channel 3, thereby improving the overall atomization effect. ^ Ming is a kind of supersonic micro-nozzle system, which includes one atomization and two; =:: mouth system. The micro-nozzle is a micro-nozzle made of high-temperature resistant villages (such as glass, arsenic fossil, carbonized stone kiln, carbonized stone crane, 2, 丄, etc.) The liquid flow is controlled by a high I (such as ... fuel, alcohol, medicine sword, liquid mj flowmeter to the reservoir: [::; gas (such as: nitrogen, helium, argon, hydrogen, empty tank; when When atomizing operation, ",":: ^= its gas flow to the gas storage through the liquid flow manifold, gas;::: mass and atomization impact gas splitting channel, touch # in control of the atomization flow The velocity of the flow of the liquid flow and the change of the gas and the flow direction of the bifurcated impact gas flow, so that the shock wave affects each other, and the atomization of the metal is caused by the taper of the spout. The effect of the second wave is improved, and the effect of improving the atomization effect and the film formation is more remarkable. Therefore, the main object of the present invention is

The first page nozzle system utilizes high temperature resistant materials to provide a supersonic micro-atomization and secondary atomization micro-nozzle=made micro-nozzles, which can include a design to generate shock shock waves. Convergence and divergence in the nozzle ------chemical response to directly increase the atomization impact Η 1252782 Case No. 93123577 曰 曰 五 、, invention description (3) gas momentum and its vibration frequency Increase the atomization efficiency. The effect of achieving the speed of sound and supersonic speed is improved. First, please refer to the single-number system of the first-speed micro-nozzle system, which is mainly composed of high-pressure gas 1, wait 4, and atomized impact gas. Pressing the medium to be atomized 2 is a liquid state of a metal, a solvent, etc., and the flow meter 3 is respectively used in the gas storage tank 4; the micro-nozzle 4 is made of silicon carbide (silicon carbide) and carbonization. Into one of the micro-nozzles 4, the high temperature resistant material is cleaned to avoid the adhesion of dust or grease. 2. The yellow light process: firstly, the dehydrating agent is applied to the coating of the surface characteristics of the high temperature resistant material, and the coating is increased. The adhesion of the photoresist and the choice of process are applied to the appropriate • · •, etc., and finally through the planar nozzle flow path required for exposure. 1 and 2 are schematic diagrams of the supersonic of the present invention. The micro-nozzle system A of the present invention is an atomizing medium 2, a flow meter 3, and a micro-nozzle, wherein: the medium to be atomized 2; for example, water, fuel, Alcohol, medicinal, liquid fluid, control fluid flow, gas flow to the storage tank 4 South temperature material tungsten, decane, production steps wash: the impact of its impact on the production of coated HMDS, temperature material and hydrophilicity . Then, according to the photoresist, such as development, clear, such as: glass, nickel, titanium · · · is: South temperature material quality first. It is the surface of the semiconductor factory, the water vapor is reversed to be lipophilic. It is required for the flow channel: S1818, SU8, hard-baked and other materials such as tantalum nitride, etc., and the photoresist has an aspect ratio and JSR. Place

Page 9 1252782 __ Case No. 93123577 ^ The date of the month is five, the invention description (4) Second, the 〃II. The formation of the channel and the formation of the runner can be selected by physical and chemical etching techniques, including wet etching, such as : BOE, HF, ferric chloride · · · and other etching solutions; dry etching, such as: ion etching, plasma etching · · ·, etc., as well as LIGA process, micro-discharge machining, excimer laser, X-ray and other processing methods It can be applied to the formation of the flow path and obtain the desired flow path depth. Fourth, to remove the photoresist: the light must be removed before the micro-nozzle can be combined. V. Micro-nozzle combination: The combination method can choose physical process or chemical process combination according to different materials, such as anodic bonding, hot-melt bonding, welding, gluing, etc., by combining micro-nozzles to create two-dimensional The array micro-nozzle combination (as shown in the tenth figure); and the micro-nozzle 4 has a liquid storage tank 4 1 and a gas storage tank 4 2, and at the appropriate place, a liquid inlet port 4 1 1 and an air inlet are provided. The port 42 1 is extended with a liquid flow channel manifold 412 and a gas flow channel manifold 422; ° The atomization impact gas 5 can be a gas such as nitrogen, helium, argon, hydrogen, air, carbon monoxide or the like. When the atomizing operation is performed, the medium to be atomized 2 and the atomizing impinging gas 5 flow to the liquid flow path 4 1 3 and the gas flow path via the liquid flow path manifold 4 1 2, the gas flow channel manifold 4 2 2, respectively. 4 2 3, collision with the control of the fog = 8 4 quality 2 and the atomization impact gas 5 flow speed and flow direction change of the clutch 4 3; and due to its mouth mouth 4 5 tapered and progressive flow path 4 4 Design = The shock wave interacts to produce a shock wave effect, thereby improving the atomization effect, and the effect of metalization, fragmentation, and thinning of the metal is more remarkable.

1252782 Case No. 93123577__年月』-ϋ______ V. Invention Description (5) * Please refer to the third figure, which is a schematic diagram of the atomization of the supersonic micro-heavy system of the present invention. A T-shaped mixing chamber 4 〇, the inner walls of the two sides are inclined, and is provided with a through liquid passage 4 1 3 for guiding the liquid to be atomized 2, and a guide for the atomizing impact gas 5 The gas flow path 4 2 3 is entered, the liquid flow path 4 1 3 is disposed at the center, and the gas flow path 4 2 3 is disposed at both sides, and the mixing chamber 40 and the separator 43 have a tapered shape. The flow path of the micro-nozzle 4 is a nozzle opening 45; the separator 43 is correspondingly disposed in the mixing chamber 40 of the micro-nozzle 4, and is disposed in the liquid flow path 4 1 3 and the gas flow path. 4 2 3 at the exit; the separator 4 3 is mainly designed as a three-dimensional block, so it can be a cone, a triangular cylinder, a diamond shape, a square cylinder or an irregular shape; by the separator 4 3 The shape is designed to correspondingly change the velocity of the flow of the atom to be atomized 2 and the atomized medicinal agent 5 in the micro-nozzle 4 and flow In order to change, the medium to be atomized 2 is collided with the atomized impinging gas 5 in a different chamber, and the particles after the atomization are more fine, so that the atomized nozzle is made to be fogged. After tearing the liquid of 4 again, it is waiting for the fog at this time, the impact, the medium is cracked in the nozzle, and the atomized body is fluidized, and then the mixture is mixed with 2, the mouth is 4, the micro-working channel is 4, the mass is 2, and the height is reduced by 5 meters. In time, 13 through the progressive expansion of the fog, the atomization medium 2 is guided into the micro-nozzle 4, into the mixing chamber 4 of the micro-nozzle 4, and the liquid flow path 4 1 3 is sprayed out to the outside of the gas flow channel 4 2 3 The design of the flow channel 4 of the atomizing medium 2 is subjected to impact, and the tapered and divergent flow channels on both sides thereof are impacted, so that the particles are broken and atomized, and the spray particles of the instant rice are further Liquid extraction

1252782 V. Invented 汍明案直9312^77 (6) _Year 曰 曰 物质 曰 曰 曰 续 续 续 续 续 续 续 续 续 续 续 续 续 续 续 参阅 参阅 参阅 参阅 参阅 参阅 参阅 参阅 参阅 参阅 参阅The atomization embodiment 'the separator 4 3 is connected to the liquid helium in the form of a branch, 'dead 1 Γ> at the upper flow path 4 1 3 'the liquid to be atomized 2 passes through the branched liquid flow path, the soil 3 Squirting out, at this time, through the gas flow passages 4 2 3 on both sides of the impact on the ί 3 ί, the quality 2, with the design of the tapered and divergent flow channel 4 4, 4 4 :::: 2 body produces high-speed atomization , on both sides of the tapered and gradually expanding the flow path, instantly tearing the sound? 4, 5 social impacts, so that the particles are shredded, atomized liquid material ^ 1 micron and sub-micron spray particles, and then enhance the effect. The performance of the matching staff will be described in the following section, which is the atomic schematic diagram of the supersonic micro-nozzle ΐίϊτί of the present invention. The wall is designed to be inclined, and is provided with a gas passage 423 for guiding the through-flow liquid passage 4 1 3 ' and a gas flow passage 423 for atomizing impact to be disposed in the middle water, the liquid flow path 413 is a mixing chamber 4 squid 2 and a gas flow channel 4 2 3 is correspondingly disposed on both sides, and the device 43 has a tapered and divergent flow channel 44, and the mouth of the micro nozzle is a nozzle opening 45; During operation, the medium to be atomized 2 is introduced into the mixing chamber 4 微 of the micro-nozzle 4 via the liquid flow path 4 1 3 that is guided into the micro-nozzle 4, and the liquid to be atomized 2 passes through the liquid flow path 4 therethrough. 1 3 is sprayed out, at this time, the atomizing medium 2 is impacted by the gas passages 4 2 3 on both sides, and the design of the tapered and divergent flow passages 4 4 is subjected to impact.

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The device 4 3 is connected to the high-speed atomization of the gas flow enthalpy 4 and the divergent flow channel 4 4 on both sides of the branched liquid through the branch 2, and the rain side impacts each other, and the benefit: 'make the medium to be atomized 2 4 0, nozzle mouth 4 5 1252782 __ 93123577_ day color five, invention description (7) to be atomized shell 2 to produce a south speed atomization 'the tapered flow path on both sides 4 4 at the nozzle mouth 4 5 At the mutual impact, and because the nozzle opening 45 is lengthened, the atomizing medium 2 forms another tapered and divergent flow passage 4 at the nozzle opening 45, thereby achieving the effect of secondary atomization. Continuation with reference to the sixth figure, which is a secondary atomization embodiment of the supersonic micro-nozzle system of the present invention, the separator 4 3 is connected to the liquid flow path 4 1 3 in a branched shape. The medium 2 is ejected outward through the branched liquid flow path 4 1 3 , and at this time, the atomizing medium 2 is impacted through the gas passages 4 2 3 on both sides, and the design of the tapered and divergent flow path 4 4 is made. The medium to be atomized 2 is subjected to high-speed atomization, and the tapered and divergent flow passages 4 on both sides thereof are again impacted at the nozzle opening 45, and the nozzle atom 45 is lengthened to make the medium 2 to be atomized in the nozzle At the mouth 45, another tapered and divergent flow path 44 is formed, thereby achieving the effect of secondary atomization. Continuation of the arrangement, as shown in the seventh figure, is another embodiment of the secondary spearming of the system. At the separated liquid flow path 4 1 3, the flow path 4 1 3 to be atomized is ejected outward. At this time, the atomizing medium 2 is subjected to impact by 3, and the gradual metering is applied to cause the impact to be atomized. The medium 2 is gradually tapered and expanded. 4 4 again, the nozzle chamber 4 5 is mixed with the chamber 40. A mixing chamber 4 〇, after the nozzle port 4 5 is ejected, and then the name a η is also given to the & City, Ben, ... 1252782 via the mixing chamber

_SS—93123577 一^-—— 1 V. Inventive Note (8) 0 The large feed range can be pulled at the tapered and divergent flow path 4 4, from the tapered and divergent flow path 4 4 to the nozzle port 4 5 There is sufficient expansion space, and the expansion ratio can be 6 to 12. The inclined surface in the mixing chamber 4 may be a straight line or a bell shape having a curvature. The lower the pressure, the higher the speed. Referring to the eighth and ninth figures, it is a schematic diagram of an array system of the supersonic micro-nozzle system of the present invention. The combination of the micro-nozzles 4 can select a physical process or a combination of chemical processes depending on the material, such as · Combination of anodic junction bonding, hot-melt bonding, soldering, gluing, etc., by means of micro-nozzle bonding, an array of micro-nozzle combinations can be fabricated, which can be ejected at the same time, thereby increasing the atomization output. The description is as follows: 1. The cavity of the present invention is designed to gradually increase, thereby increasing the demand of the wafer encapsulator in the liquid. 2 · The substance of the present invention is in accordance with the present invention to provide the atomized and mixed fruit industry. It will be appreciated that the present invention has the advantages of the following advantages through the arrangement of the separator and the effect of internal ultra-high speed atomization to facilitate the current high-tech metallurgical industry and the micro-nano-systems to be suitable for any liquid-like production needs. The separator is designed for the main speed, flow field and flow supersonic micro-nozzle system, and the flow path is reduced to achieve the atomization effect of the material, the worker, metal powder 〇

Page 14 Supersonic micro-nozzle system, multi-material atomization supersonic micro-nozzle system, centering medium to be atomized 1252782 __ case number 93123577 曰

January 5, invention description (9) change of direction to improve 4 · The supersonic cylinder, cone, and square of the present invention are mainly used to change the atomization speed to make the atomization to be atomized and then atomized. Impact 5 · In the different structures of the supersonic speed of the present invention, and atomized. 6 · The supersonic bevel of the present invention can also be an atomized effect of the curved surface design. The speed 4 hemport system, the separator can be a double-column cylinder, a diamond-shaped body or an irregular shape designed to impinge gas in the atomizing device and the shell is in a different case and a thin gas on the separator surface Atomization. / Speed micro-nozzle system, suitable for sonic speed and supersonic. Depending on the structure, it can be used for one atomization or two-speed micro-nozzle system. The inside of the mixing chamber is tilted to make the atomization effect. Looking at the above, the supersonic micro-nozzle system of the present invention, the atomization of the C effect is good... and can be practical; / / with its overall combination and space, it has not been seen in the same kind of products, and has not been seen before the application, sincerely Has met the statutory requirements of the patent law,: The law filed an invention patent application. The above is only the preferred embodiment of the present invention, and the equivalent changes and modifications made in the scope of the patent application scope of the present invention should not be implemented. Within the scope of the invention patent. χ

1252782 _Case No. 93123577_Yearly 曰 _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ It is easier for the reviewing committee to understand the production of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic diagram of a singular system of a supersonic micro-nozzle system of the present invention. Second Figure Schematic diagram of a single enlargement of the supersonic micro-nozzle system of the present invention. Third Figure Schematic diagram of primary atomization of the supersonic micro-nozzle system of the present invention. Fourth Figure A primary atomization embodiment of the supersonic micro-nozzle system of the present invention. Figure 5 is a schematic diagram of secondary atomization of the supersonic micro-nozzle system of the present invention.第六 Sixth Embodiment A secondary atomization embodiment of the supersonic micro-nozzle system of the present invention. Seventh Embodiment Another embodiment of secondary atomization of the supersonic micro-nozzle system of the present invention. Figure 8 is a schematic diagram of an array system of the supersonic micro-nozzle system of the present invention. Figure 9 is an enlarged schematic view of an array of supersonic micro-nozzle systems of the present invention. Figure 10 is a combination diagram of a two-dimensional array micro-nozzle of the supersonic micro-nozzle system of the present invention.

Brief description of the figure No. A micro nozzle system 2 to be fogged medium 4 micro nozzle 4 0, mixing chamber 4 11 inlet D 1 high pressure nitrogen 3 flow meter 4 0 mixing chamber 4 1 reservoir 4 12 liquid channel manifold

Page 16 1252782 Correction diagram simple description 4 1 ^ 13 2 2 4 5 4 4 4 4 5 Liquid channel inlet gas flow path tapered and divergent flow nozzle nozzle atomization impact gas 4 2 4 2 2 4 3 4 4' 4 5' Gas storage gas channel manifold separator tapered and divergent runner nozzle

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Claims (1)

1252782 -------- complex number 93123577_ year _g amendment six, the scope of application for patents "" one " ' ^ ---- ^ 1 · A supersonic micro-nozzle system, mainly by high-pressure gas , y chemical medium, flow meter, micro nozzle, atomized impact gas, Gan 4: Λ where. The gas pressure system is a pressurized medium to be atomized; the medium to be atomized may be a liquid fluid of water, fuel, alcohol, medicament, genus or solvent; the night grievance is used to control the liquid flow and the gas flow respectively. In the liquid storage tank; ~, the storage of the micro-nozzle is made of high temperature resistant material, which can be made of glass, nitridite reversed silicon carbide (carbonized carbide), tungsten carbide, germane, nickel or titanium; The manufacturing steps of the micro-nozzle are as follows: 1. Cleaning of high-temperature resistant materials: the material of high temperature resistance is first, supported, and 'dangered by the adhesion of dust or grease; '肖洗二,黄光工艺Firstly, HMDS is applied to coat the surface water vapor on the Naibei shell, and the surface characteristics of the high temperature resistant material are changed: the water content of the material is changed to 2 lipophilicity, so that the coating of the photoresist is enhanced, and the adhesion of the photoresist is increased. The pro-reagent can be coated with the appropriate 'agent' according to the aspect ratio and process choice required for the rogue. The photoresist can be S1818, SU8 or JSR, and finally through the exposure, visible resistance, cleaning, hard baking steps. Planar nozzle flow path formation required; 3, flow channel forming: the formation of the flow channel can be selected according to different materials, chemical and chemical etching technology, including · wet etching, can be ΒΟΕ, HF or gasified iron #刻液; dry etching, For ion etching or plasma etching, as well as LIGA process, micro-discharge machining, excimer laser or X-ray processing Page 18 1252782 _ Case No. 93123577_Years and Months _ Sixth, the scope of application for patents can be applied to the formation of the flow channel, and obtain the required flow channel depth; Fourth, to remove the photoresist: must remove the photoresist before the micro Nozzle combination; V. Micro-nozzle combination: The combination method can choose physical process or chemical process combination depending on the material. It can be combined with anode bonding, hot-melt bonding, welding or gluing. Two-dimensional array micro-nozzle combination; The micro-nozzle has a liquid storage tank and a gas storage tank, and is provided with a liquid inlet port and an air inlet port at appropriate places, and a liquid flow channel manifold and a liquid flow channel and a gas flow channel manifold are arranged. a gas flow path; further, a T-type mixing chamber is formed in the micro-nozzle, and the liquid flow path and the gas flow path are injected into the mixing chamber, and the mixing chamber is at the outlet of the liquid flow path and the gas flow path a separator is disposed, and a tapered and divergent flow passage is formed between the separator and the mixing chamber, and the tapered and divergent flow passage is connected to the nozzle opening of the micro nozzle; the atomized impinging gas system may be nitrogen, helium, a gas of argon, hydrogen, air or carbon monoxide; When the atomization operation is performed, the medium to be atomized and the atomized impinging gas flow to the liquid flow path and the gas flow path through the liquid flow manifold and the gas flow manifold, respectively, and the collision is located at the liquid flow path and the gas flow path outlet. The separator, due to the tapered and divergent flow path design between the separator and the mixing chamber, causes shock waves to interact with each other to generate a shock wave effect, thereby improving the atomization effect, thereby making the metal atomization, fragmentation, and thinning effect more Significant. Page 19 1252782 Case No. 93123577 Page 5