TWI238544B - Luminescence device with micro reflection structure - Google Patents
Luminescence device with micro reflection structure Download PDFInfo
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- TWI238544B TWI238544B TW92131876A TW92131876A TWI238544B TW I238544 B TWI238544 B TW I238544B TW 92131876 A TW92131876 A TW 92131876A TW 92131876 A TW92131876 A TW 92131876A TW I238544 B TWI238544 B TW I238544B
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- 238000004020 luminiscence type Methods 0.000 title abstract 5
- 239000010410 layer Substances 0.000 claims description 252
- 239000000463 material Substances 0.000 claims description 94
- 239000000758 substrate Substances 0.000 claims description 29
- 239000012790 adhesive layer Substances 0.000 claims description 26
- 229910001218 Gallium arsenide Inorganic materials 0.000 claims description 11
- 229910000980 Aluminium gallium arsenide Inorganic materials 0.000 claims description 9
- 229910002704 AlGaN Inorganic materials 0.000 claims description 8
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 claims description 8
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 claims description 7
- BCCOBQSFUDVTJQ-UHFFFAOYSA-N octafluorocyclobutane Chemical compound FC1(F)C(F)(F)C(F)(F)C1(F)F BCCOBQSFUDVTJQ-UHFFFAOYSA-N 0.000 claims description 6
- 235000019407 octafluorocyclobutane Nutrition 0.000 claims description 6
- 239000004642 Polyimide Substances 0.000 claims description 5
- 239000011521 glass Substances 0.000 claims description 5
- 229920001721 polyimide Polymers 0.000 claims description 5
- 229910052719 titanium Inorganic materials 0.000 claims description 5
- BEQNOZDXPONEMR-UHFFFAOYSA-N cadmium;oxotin Chemical compound [Cd].[Sn]=O BEQNOZDXPONEMR-UHFFFAOYSA-N 0.000 claims description 4
- 239000004020 conductor Substances 0.000 claims description 4
- 229910052737 gold Inorganic materials 0.000 claims description 4
- KYKLWYKWCAYAJY-UHFFFAOYSA-N oxotin;zinc Chemical group [Zn].[Sn]=O KYKLWYKWCAYAJY-UHFFFAOYSA-N 0.000 claims description 4
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 claims description 4
- 229910001887 tin oxide Inorganic materials 0.000 claims description 4
- 239000011787 zinc oxide Substances 0.000 claims description 4
- 229910020658 PbSn Inorganic materials 0.000 claims description 3
- 101150071746 Pbsn gene Proteins 0.000 claims description 3
- 239000000853 adhesive Substances 0.000 claims description 3
- 230000001070 adhesive effect Effects 0.000 claims description 3
- SKRWFPLZQAAQSU-UHFFFAOYSA-N stibanylidynetin;hydrate Chemical compound O.[Sn].[Sb] SKRWFPLZQAAQSU-UHFFFAOYSA-N 0.000 claims description 3
- 229910052718 tin Inorganic materials 0.000 claims description 3
- 229910052725 zinc Inorganic materials 0.000 claims description 3
- 239000011701 zinc Substances 0.000 claims description 3
- 239000002322 conducting polymer Substances 0.000 claims description 2
- 229920001940 conductive polymer Polymers 0.000 claims description 2
- 229910052709 silver Inorganic materials 0.000 claims description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims 1
- 239000001273 butane Substances 0.000 claims 1
- IJDNQMDRQITEOD-UHFFFAOYSA-N n-butane Chemical compound CCCC IJDNQMDRQITEOD-UHFFFAOYSA-N 0.000 claims 1
- OFBQJSOFQDEBGM-UHFFFAOYSA-N n-pentane Natural products CCCCC OFBQJSOFQDEBGM-UHFFFAOYSA-N 0.000 claims 1
- 229910052760 oxygen Inorganic materials 0.000 claims 1
- 239000001301 oxygen Substances 0.000 claims 1
- 229920000642 polymer Polymers 0.000 claims 1
- 238000000034 method Methods 0.000 description 20
- 239000002184 metal Substances 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 5
- UMIVXZPTRXBADB-UHFFFAOYSA-N benzocyclobutene Chemical compound C1=CC=C2CCC2=C1 UMIVXZPTRXBADB-UHFFFAOYSA-N 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 229910052804 chromium Inorganic materials 0.000 description 3
- 238000005530 etching Methods 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000005266 casting Methods 0.000 description 2
- 238000004512 die casting Methods 0.000 description 2
- 229910052763 palladium Inorganic materials 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 229910005540 GaP Inorganic materials 0.000 description 1
- 229910004205 SiNX Inorganic materials 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 238000013500 data storage Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- 229910052745 lead Inorganic materials 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 238000009423 ventilation Methods 0.000 description 1
Abstract
Description
12385441238544
發明技術領域 種具有微反射結 本發明係關於一種發光元件,尤其關於一 構層之發光元件。 發光元件之應用頗為廣泛,例如,可應用於光學顯示裝 置、雷射二極體、交通號誌、資料儲存裝置、通气穿置、 照明裝置、以及醫療裝置。在此技藝中,目前技術;員重 要課題之一為如何提高發光元件之發光效率。 先前技術 於美國專利公開第2〇〇 2/00 1 7652號中,揭露一種具有埋藏 式微反射結構A1 GalnP發光元件,如圖1所示,其利用蝕刻 技術’將一發光元件之磊晶層蝕刻成一微反射結構,該微 反射結構包含半圓球形、金字塔形或角錐形等,接著沈積 一金屬反射層於該磊晶層上,再將微反射結構磊晶層之頂 端與一導電載體(矽晶片)鍵結在一起,再移除原先磊晶層 之不透明基板,使得射向該不透明基板之光線可以射出。 該微反射結構可將射向反射結構之光線經由反射帶出,以 提高發光元件之亮度。由於該發光元件僅靠反射結構之頂 端與該載體局部相接合,接觸面積較小,此結構之機械強 度不夠強,易造成接合面剝離。 另外,對磊晶層進行蝕刻形成該微反射結構,因此 該磊晶層必須成長到足夠之厚度,否則蝕刻形成之微反射BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a light-emitting element, and more particularly to a light-emitting element having a structure layer. The application of the light-emitting element is quite wide, for example, it can be applied to optical display devices, laser diodes, traffic signs, data storage devices, ventilation, lighting devices, and medical devices. In this technique, current technology; one of the most important topics for the staff is how to improve the luminous efficiency of the light-emitting element. The prior art disclosed in U.S. Patent Publication No. 20002/00 1 7652 discloses an A1 GalnP light-emitting element with a buried micro-reflective structure. As shown in FIG. 1, it uses an etching technique to etch an epitaxial layer of a light-emitting element. A micro-reflective structure is formed. The micro-reflective structure includes a semi-spherical shape, a pyramidal shape, or a pyramidal shape, and then a metal reflective layer is deposited on the epitaxial layer. ) Are bonded together, and then the original opaque substrate of the epitaxial layer is removed, so that light directed at the opaque substrate can be emitted. The micro-reflective structure can bring out the light directed to the reflective structure through reflection to improve the brightness of the light-emitting element. Since the light-emitting element is only partially bonded to the carrier by the top end of the reflective structure, the contact area is small, the mechanical strength of this structure is not strong enough, and it is easy to cause the joint surface to peel. In addition, the epitaxial layer is etched to form the micro-reflective structure, so the epitaxial layer must be grown to a sufficient thickness, otherwise the micro-reflection formed by etching is
1238544 五、發明說明(2) 結構,無法達成光反射之功能,但是厚#曰@ 士 較長之時間,不僅耗時,成本也相對提高。 買 發明内容 述之問 件,該 利用壓 ,再利用一透 在一起 蝕刻該 目的。 疊層之 射器之 強度不 題時,認為若利用一 發光元件具有一微反 鑄、蝕刻或蒸鍍等技 明黏接層將微 。由於本發明不需如 磊晶層等步驟,因此 再者本發明以一透明 黏接在一起, 載體局部相接 缺點。 一表面 頂端與 夠強之 本案發明人於思考如何解決前 種具有微反射結構層之發光元 射結構層,該微反射結構層是 術’形成一金屬微反射結構層 反射結構層與一發光疊層黏接 習知技藝中成長厚的磊晶層再 可達到降低成本,提升亮度之 黏接層將微反射結構層與發光 而不是如前述習知技藝僅靠反 合’因此更可解決結構之機械 發明概要 本發明之主要目的在於提供一種具有微反射結構層之發光 凡件’ ^發光7C件具有一微反射結構層,該微反射結構層 之形成方法例如是利用壓鑄技術,以一具有預定圖案之母 模將一金屬反射層壓鑄成一微反射結構層,其中該微反射 、…構層^外型包含半圓球形、金字塔形或角錐形等幾何圖 案’接著再利用一透明黏接層將該微反射結構層與一發光 疊層黏接在一起;其中不需耗時進行磊晶程序,僅需對一 第6頁 12385441238544 V. Description of the invention (2) The structure can not achieve the function of light reflection, but the thicker time is not only time-consuming but also relatively expensive. Buying the problem described in the above description, the use of pressure, and then a through together to etch the purpose. When the strength of the laminated radiator is not a problem, it is considered that if a light-emitting element has a technique such as micro reverse casting, etching or evaporation, the adhesion layer will be small. Since the present invention does not require steps such as an epitaxial layer, the present invention has the disadvantage that the carriers are locally adhered together by a transparent bonding. A surface top and a strong enough inventor are thinking about how to solve the former light-emitting element structure layer with a micro-reflective structure layer. The micro-reflective structure layer is used to form a metal micro-reflective structure layer. The reflective structure layer and a light-emitting stack The thick epitaxial layer in the layer bonding technique can reduce the cost, and the adhesion layer that enhances the brightness will use the micro-reflective structure layer and light emission instead of relying on the combination of the conventional techniques, so it can solve the structure. Summary of mechanical invention The main object of the present invention is to provide a light-emitting component with a micro-reflective structure layer. ^ The light-emitting 7C component has a micro-reflective structure layer. The method of forming the micro-reflective structure layer is, for example, by using a die casting technology, The pattern master mold casts a metal reflective laminate to form a micro-reflective structure layer, wherein the micro-reflective, ... structure layer ^ includes a geometric pattern such as a semi-spherical shape, a pyramidal shape, or a pyramidal shape, and then a transparent adhesive layer is used to The micro-reflective structure layer is adhered to a light-emitting stack; no epitaxial process is required for the time-consuming process, only a page 61238544 is required.
因此可達 金屬層進行壓銹程序,來形成該特定幾何圖案 到降低成本,提升亮度之目的。 >、 ::明:另一目的在於提供一種具有微反射結構層之發光 牛,其利用該透明黏接層能與發光疊層各面緊密接合之 =性,使得微反射結構層、透明黏接層與發光疊層之間接 :強度增加,如此可以提升其機械強度,避免接合面剝 離,簡化製程,增加信賴度。 依本發明一較佳實施例一種具有微反射結構層之發光元 件包含一基板、形成於該基板上之一微反射結構層、形 成於該微反射結構層上之一第一反應層、形成於該第一反 應層上之一透明黏結層、形成於該透明黏結層上之一第二 反應層、形成於該第二反應層上之一透明導電層,其中, 該透明導電層之上表面包含一第一表面區域與一第二表面 區域、形成於該第一表面區域上之一第一接觸層、形成於 該第一接觸層上之一第一束缚層、形成於該第一束缚層上 之一發光層、形成於該發光層上之一第二束缚層、形成於 該第二束缚層上之一第二接觸層、形成於該第二表面區域 上之一第一接線電極、以及形成於該第二接觸層上之一第 一接線電極。 前述之基板,係包含選自於GaP、GaAs、GaAsP、InGaP、 AlGalnP、AlGaAs、Si、SiC、玻璃、BN、A1N 或 Ge 所構成Therefore, the metal layer can be rust-pressed to form the specific geometric pattern to reduce the cost and improve the brightness. >, :: Ming: Another purpose is to provide a light-emitting cow with a micro-reflective structure layer, which uses the transparent adhesive layer to tightly bond with each side of the light-emitting stack to make the micro-reflective structure layer, transparent and adhesive. The connection between the bonding layer and the light-emitting stack: the strength is increased, so that the mechanical strength can be improved, the peeling of the bonding surface can be avoided, the manufacturing process can be simplified, and the reliability can be increased. According to a preferred embodiment of the present invention, a light-emitting element having a micro-reflective structure layer includes a substrate, a micro-reflective structure layer formed on the substrate, a first reaction layer formed on the micro-reflective structure layer, and A transparent adhesion layer on the first reaction layer, a second reaction layer formed on the transparent adhesion layer, and a transparent conductive layer formed on the second reaction layer, wherein the upper surface of the transparent conductive layer includes A first surface region and a second surface region, a first contact layer formed on the first surface region, a first tie layer formed on the first contact layer, and formed on the first tie layer A light emitting layer, a second tie layer formed on the light emitting layer, a second contact layer formed on the second tie layer, a first wiring electrode formed on the second surface area, and forming A first wiring electrode on the second contact layer. The aforementioned substrate is composed of GaP, GaAs, GaAsP, InGaP, AlGalnP, AlGaAs, Si, SiC, glass, BN, A1N, or Ge
第7頁 1238544 五、發明說明(4) 材料組群中之至少一種材料;前述之透明氧化導電層係包 含選自氧化銦錫、氧化鎘錫、氧化銻錫、氧化鋅及氧化鋅 錫所構成材料組群中之至少一種材料;前述之微反射結構 層係包含選自 In、Sn、A1、Au、Pt、Zn、Ge、Ag、Ti、Page 7 1238544 V. Description of the invention (4) At least one material in the material group; the aforementioned transparent oxide conductive layer comprises a material selected from the group consisting of indium tin oxide, cadmium tin oxide, antimony tin oxide, zinc oxide, and zinc tin oxide. At least one material in the material group; the aforementioned micro-reflective structure layer comprises a material selected from the group consisting of In, Sn, Al, Au, Pt, Zn, Ge, Ag, Ti,
Pb、Pd、Cu、AuBe、AuGe、Ni、Cr、PbSn、AuZn 或氧化銦 錫所構成材料組群中之至少一種材料;前述之微反射結構 之外型包含選自半圓球形、金字塔形或角錐形等幾何圖案 所構成形狀中之至少一種形狀;前述第一束缚層,係包含 選自 AllnP、A1N、GaN、AlGaN、InGaN 及 AlInGaN 所構成材 料組群中之至少一種材料;前述發光層,係包含選自At least one material from the group of materials consisting of Pb, Pd, Cu, AuBe, AuGe, Ni, Cr, PbSn, AuZn, or indium tin oxide; the aforementioned micro-reflective structure includes a shape selected from a semi-spherical shape, a pyramid shape, or a pyramid At least one of the shapes formed by geometric patterns such as shapes; the first binding layer includes at least one material selected from the group consisting of AllnP, A1N, GaN, AlGaN, InGaN, and AlInGaN; the light-emitting layer, the Contains from
AlGalnP、GaN、InGaN及A1 InGaN所構成材料組群中之至少 一種材料;前述第二束缚層,係包含選自ΑΠηΡ、A1N、At least one material from the group of materials consisting of AlGalnP, GaN, InGaN, and A1 InGaN; the second binding layer includes a material selected from AΠηP, A1N,
GaN、AlGaN、InGaN及AlInGaN所構成材料組群中之至少一 種材料;前述第二接觸層,係包含選自SGaP、GaAs、At least one material from the group consisting of GaN, AlGaN, InGaN, and AlInGaN; the second contact layer includes a material selected from the group consisting of SGaP, GaAs,
GaAsP、InGaP、AlGalnP、AlGaAs、GaN、InGaN 及AlGaN 所 構成材料組群中之至少一種材料;前述第一接觸層,係包 含選自於GaP、GaAs、GaAsP、InGaP、AlGalnP、AlGaAs、At least one material from the group consisting of GaAsP, InGaP, AlGalnP, AlGaAs, GaN, InGaN, and AlGaN; the first contact layer includes a member selected from the group consisting of GaP, GaAs, GaAsP, InGaP, AlGalnP, AlGaAs,
GaN、InGaN及AlGaN所構成材料組群中之至少一種材料; 前述透明黏結層係包含選自於聚醯亞胺(ρι)、苯并環丁燒 (BCB)或過氟環丁烷(PFCB)所構成材料組群中之至少一種& 材料;前述第一反應層係包含選自KSiNx、n或^所構成 材料組群中之至少一種材料;前述第二反應層係包含選自 於SiNx、Ti或Cr所構成材料組群中之至少一種材料。 1238544 五、發明說明(6) 層或透明導電層之間之結合力。 請參閱圖3,依本發明另一較佳實施例一種具有微反 射結構層之發光元件2,包含一基板20、形成於該基板20 上之一微反射結構層2 1,該微反射結構層之形成方法與微 反射結構層11之形成方法相似、形成於該微反射結構層21 上之一第一反應層200、形成於該第一反應層2〇〇上之一透 明黏結層201、形成於該透明黏結層2〇1上之一第二反應層 2〇2、形成於該第二反應層2〇2上之一透明載體203、形成 於該透明載體203上之一透明導電層22,其中,該透明導 電層22之上表面包含一第一表面區域與一第二表面區域、 形成於該第一表面區域上之一第一接觸層23、形成於該第 接觸層23上之一第一束缚層24、形成於該第一束缚層24 上之一發光層25、形成於該發光層25上之一第二束缚層 、形成於該第二束缚層上之一第二接觸層27、形成於該 ^二表面區域上之一第一接線電極28、以及形成於該第二 ^觸層上之-第二接線電極29。前述之m層及第二 層之目的在於辅助該透明黏接層與反射層或第二載體 之間之結合力。 請參閱圖4,依本絡ΒΒ α Α 射結構層之發光元件3 =一較佳實施例一種具有微反 電基㈣上表面含;·導電基板30、形成於該導 之形成方法與微反射心=射結構層31 ’該微反射結構層 对…構層11之形成方法相似、形成於該At least one material from the group of materials consisting of GaN, InGaN, and AlGaN; the transparent adhesive layer includes a material selected from polyimide (ρι), benzocyclobutane (BCB), or perfluorocyclobutane (PFCB) The first reaction layer system includes at least one material selected from the group consisting of KSiNx, n, or ^; the second reaction layer system includes at least one material selected from SiNx, At least one material in the group of materials composed of Ti or Cr. 1238544 V. Description of the invention (6) The bonding force between layers or transparent conductive layers. Please refer to FIG. 3, according to another preferred embodiment of the present invention, a light-emitting element 2 having a micro-reflective structure layer includes a substrate 20 and a micro-reflective structure layer 21 formed on the substrate 20. The micro-reflective structure layer The formation method is similar to that of the micro-reflection structure layer 11, a first reaction layer 200 formed on the micro-reflection structure layer 21, a transparent adhesive layer 201 formed on the first reaction layer 200, and A second reaction layer 202 on the transparent adhesive layer 201, a transparent carrier 203 formed on the second reaction layer 202, and a transparent conductive layer 22 formed on the transparent carrier 203. The upper surface of the transparent conductive layer 22 includes a first surface region and a second surface region, a first contact layer 23 formed on the first surface region, and a first contact layer 23 formed on the first contact layer 23. A tie layer 24, a light emitting layer 25 formed on the first tie layer 24, a second tie layer formed on the light emitting layer 25, a second contact layer 27 formed on the second tie layer, One of the first wiring electrodes 28, And formed on the contact layer of the second ^ - a second wiring electrode 29. The purpose of the aforementioned m layer and the second layer is to assist the bonding force between the transparent adhesive layer and the reflective layer or the second carrier. Please refer to FIG. 4, according to the present invention, the light-emitting element of the Βα α Α structure layer 3 = a preferred embodiment, a microreflective substrate with an upper surface containing; a conductive substrate 30, a method for forming the conductive substrate, and a microreflection Heart = radiation structure layer 31 'The micro-reflective structure layer pair ... The formation method of structure layer 11 is similar to that of
1238544 --------- 五、發明說明(7) " 微反射結構層31上之一第一反應層3〇〇、形成於該第一反 ^層300上之一透明導電黏結層301、形成於該透明導電黏 結層301上之一第二反應層3〇2、形成於該第二反應層3〇2 上之一透明導電層32、形成於該透明導電層32上之一第一 接觸層3/、形成於該第-接觸層33上之-第-束缚層34、 形成於鑪第一束缚層34上之一發光層35、形成於該發光層 3_5上之第一束缚層36、形成於該第二束缚層36上之一第 二接觸層37、形成於該導電基板下表面上之一第一接線電 極38、以及形成於該第二接觸層37上之一第二接線電極 3 9 ° 則述之透明導電黏接層具有導電之功能;前述之第一 反應層及第一反應層之目的在於輔助該透明導電黏接層盥 微反射結構層或透明導電層之間之結合力,同時使其接^ 面形成歐姆接觸。 前述之二個實施例中’亦可於第二接線電極與第二接觸層 之間形成一透明導電層;前述之三個實施例中,母模之形 成方法亦可以一金屬基板,經由雷射加工後,形成該凸起 之半圓球形、金字塔形或角錐形等幾何圖案或其組合圖 案,另外其他於鑄造技術中母模之形成方法,亦可用來 造該微反射結構之母模;前述微反射結構層之形成方法除 了壓鱗方法外,亦可以㈣或*刻後再錢等方法形成.、 前述基板,係包含選自MGaP、GaAs、GaAsp、InGap、1238544 --------- V. Description of the invention (7) " One of the first reaction layer 300 on the micro-reflective structure layer 31 and one of transparent conductive adhesive formed on the first anti-layer 300 A layer 301, a second reaction layer 302 formed on the transparent conductive adhesive layer 301, a transparent conductive layer 32 formed on the second reaction layer 302, and one of the transparent conductive layer 32 formed The first contact layer 3 /, the -first-binding layer 34 formed on the first-contact layer 33, a light-emitting layer 35 formed on the first binding layer 34 of the furnace, and the first binding formed on the light-emitting layer 3_5 Layer 36, a second contact layer 37 formed on the second tie layer 36, a first wiring electrode 38 formed on the lower surface of the conductive substrate, and a second contact layer 37 formed on the second contact layer 37 The wiring electrode is 39 °, the transparent conductive adhesive layer has the function of conducting electricity; the purpose of the first reaction layer and the first reaction layer is to assist the transparent conductive adhesive layer between the micro-reflective structure layer or the transparent conductive layer. The bonding force, while making its interface ohmic contact. In the aforementioned two embodiments, a transparent conductive layer may also be formed between the second wiring electrode and the second contact layer; in the aforementioned three embodiments, the method of forming the master mold may also be a metal substrate through a laser After processing, geometric patterns such as hemispherical spheres, pyramids, or pyramids, or combinations thereof, are formed. In addition, other methods for forming the master mold in casting technology can also be used to create the master mold of the micro-reflective structure. The method for forming the reflective structure layer may be formed by a method other than a squeezing method, or a method such as engraving or engraving. The aforementioned substrate includes a material selected from the group consisting of MGaP, GaAs, GaAsp, InGap,
AlGalnP、AlGaAs、Si、SiC、玻璃、BN mwe 所構AlGalnP, AlGaAs, Si, SiC, glass, BN mwe
第11頁 1238544 五、發明說明(8) 材料組群中之i # m、, Si、GaAs^ /料;前述導電基板,係包含選自Page 11 1238544 V. Description of the invention (8) i # m,, Si, GaAs ^ in the material group; the aforementioned conductive substrate includes
Si 、 GaAs 、 S AlGaAs 、 BN 或AIN 它可代替之材料 SiC、Al2〇3或玻璃 述微反射結構層 Ti、Pb、Pd、Ge 、GaP、GaAsP、lnGap、A1GaInP、 斤&構成材料組群中之至少一種材料或其 月,J述透明載體,係包含選自KGap、 听構成材料組群中之至少一種材料;前 係包含選自 Sn、Al、Au、Pt、Zn、Ag、 .^ Cu、AuBe、AuGe、Ni、PbSn、AuZn 或氣 =錫所構成材料組群中之至少—種材料或其它可代替之 :枓;前述之微反射結構包含選自半圓球形、金字塔形或 錐开y所構成形狀中之至少一種形狀;前述之透明導電 層二係包含選自氧化銦錫、氧化鎘錫、氧化銻錫、氧化鋅 及氧化鋅錫所構成材料組群中之至少一種材料;前述第一 束缚層,係包含選自 A1InP、A1N、GaN、A1GaN、InGaN& A11 nGaN所構成材料組群中之至少一種材料;前述發光 層’係包含選自AlGalnP、GaN、InGaN及AlInGaN所構成材 料組群中之至少一種材料;前述第二束缚層,係包含選自 A1 InP、AIN、GaN、AlGaN、InGaN 及A1 InGaN 所構成材料組 群中之至少一種材料;前述第二接觸層,係包含選自於Si, GaAs, S AlGaAs, BN or AIN It can be replaced by SiC, Al203 or glass micro-reflection structure layer Ti, Pb, Pd, Ge, GaP, GaAsP, InGap, A1GaInP, Jin & constituting material group At least one of the materials or the month thereof, the transparent carrier described in J, includes at least one material selected from the group consisting of KGap and listening constituent materials; the former system includes selected from Sn, Al, Au, Pt, Zn, Ag,. ^ Cu, AuBe, AuGe, Ni, PbSn, AuZn, or at least one of the materials in the group of materials or other alternatives: 枓; the aforementioned micro-reflective structure includes a semi-spherical, pyramidal, or cone-shaped at least one of the shapes formed by y; the aforementioned second transparent conductive layer includes at least one material selected from the group consisting of indium tin oxide, cadmium tin oxide, antimony tin oxide, zinc oxide, and zinc tin oxide; The first tie layer includes at least one material selected from the group consisting of A1InP, A1N, GaN, A1GaN, InGaN & A11 nGaN; and the light-emitting layer includes a material selected from AlGalnP, GaN, InGaN, and AlInGaN. At least in the group A material; the second binding layer includes at least one material selected from the group consisting of A1 InP, AIN, GaN, AlGaN, InGaN, and A1 InGaN; the second contact layer includes a material selected from
GaP、GaAs、GaAsP、InGaP、AlGalnP、AlGaAs、GaN、 I nGaN及AlGaN所構成材料組群中之至少一種材料;前述第 一接觸層,係包含選自於GaP、GaAs、GaAsP、InGaP、 AlGalnP、AlGaAs、GaN、InGaN 及 AlGaN 所構成材料組群中 之至少一種材料;前述透明黏結層係包含選自於聚醯亞胺 (PI)、苯并環丁烷(BCB)或過氟環丁烷(PFCB)所構成材料At least one material from the group consisting of GaP, GaAs, GaAsP, InGaP, AlGalnP, AlGaAs, GaN, InGaN, and AlGaN; the first contact layer includes a material selected from the group consisting of GaP, GaAs, GaAsP, InGaP, AlGalnP, At least one material from the group of materials consisting of AlGaAs, GaN, InGaN, and AlGaN; the transparent bonding layer includes a material selected from polyimide (PI), benzocyclobutane (BCB), or perfluorocyclobutane ( (PFCB)
第12頁 1238544 五、發明說明(9) -~- 組群中之至少一種材料;前述第一反應層係包含選自於 Si Nx、Ti或Cr所構成材料組群中之至少一種材料;前述 二反應層係包含選自於Si Nx、Ti或Cr所構成材料組群中之 至少一種材料;前述之透明導電黏結層包含選自於自發性 導電高分子(Intrinsically conducting p〇lymer)或 ^ 八 子中摻雜導電材質所構成材料組群中之至少一種材料^二 述之^電材質包含選自於氧化銦錫、氧化鎘錫、氧化錄則 錫、氧化鋅、氧化鋅錫、Au&Ni/Au所構成材料組群 至少一種材料。 ,然士發明之發光元件已以較佳實施例揭露於上,然本發 明之範圍並不限於上述較佳實施例,例如微反射結構層之 法除了本發明揭露之壓鑄方法,亦可以蝕刻或:刻 俊,泰鍍等方法形成該微反射結構;因此應以下述申請專 範圍所界疋為準。因此任何熟知此項技藝者,在不脫離 發明之申請專利範圍及精神下,當可做任何改變。Page 12 1238544 V. Description of the invention (9)-~-At least one material in the group; the first reaction layer includes at least one material selected from the group of materials composed of Si Nx, Ti or Cr; The two reaction layers include at least one material selected from the group consisting of Si Nx, Ti, or Cr; the aforementioned transparent conductive adhesive layer includes a material selected from the group consisting of intrinsically conducting polymers or ^ At least one material in the group of materials composed of a medium-doped conductive material ^ The electrical material of the second description includes a material selected from the group consisting of indium tin oxide, cadmium tin oxide, tin oxide, zinc oxide, zinc tin oxide, Au & Ni / At least one material of the material group composed of Au. Although the light-emitting element of the invention has been disclosed in the preferred embodiment, the scope of the present invention is not limited to the above-mentioned preferred embodiment. For example, the method of the micro-reflective structure layer can be etched or etched in addition to the die-casting method disclosed in the present invention. : Carved Jun, Thai plating and other methods to form this micro-reflective structure; therefore, the following application scope should prevail. Therefore, anyone who is familiar with this technology can make any changes without departing from the scope and spirit of the patent application for the invention.
第13頁 1238544 圖式簡單說明 圖式之簡單說明: 圖1為一示意圖,顯示一習知技藝之埋藏式微反射器 A 1G a I η P發光元件; 圖2為一示意圖,顯示依本發明一較佳實施例之一種 具有微反射結構層之發光元件; 圖3為一示意圖,顯示依本發明另一較佳實施例之一 種具有微反射結構層之發光元件; 圖4為一示意圖,顯示依本發明又一較佳實施例之一 種具有微反射結構層之發光元件。Page 13 128544 Brief description of the diagrams Brief description of the diagrams: Fig. 1 is a schematic diagram showing a buried micro-reflector A 1G a I η P light-emitting element of a known technique; Fig. 2 is a schematic diagram showing a light emitting element according to the present invention. A light-emitting element with a micro-reflective structure layer according to a preferred embodiment; FIG. 3 is a schematic view showing a light-emitting element with a micro-reflective structure layer according to another preferred embodiment of the present invention; FIG. 4 is a schematic view showing A light emitting device having a micro-reflective structure layer is another preferred embodiment of the present invention.
符號說明 I 發光元件 10 基板 II 微反射結構層 100 第一反應層 101 透明黏結層 102 第二反應層 12 透明導電層 13 第一接觸層Explanation of symbols I Light-emitting element 10 Substrate II Micro-reflection structure layer 100 First reaction layer 101 Transparent adhesive layer 102 Second reaction layer 12 Transparent conductive layer 13 First contact layer
14 第一束缚層 15 發光層 16 第二束缚層 17 第二接觸層 18 第一接線電極14 First binding layer 15 Light emitting layer 16 Second binding layer 17 Second contact layer 18 First wiring electrode
第14頁 1238544 圖式簡單說明 19 第二接線電極 2 發光元件 20 基板 21 微反射結構層 200 第一反應層 201 透明黏結層 202 第二反應層 203 透明載體 22 透明導電層 23 第一接觸層 24 第一束缚層 25 發光層 26 第二束缚層 27 第二接觸層 28 第一接線電極 29 第二接線電極 3 發光元件 30 導電基板 31 微反射結構層 300 第一反應層 301 透明導電黏結層 302 第二反應層 32 透明導電層 33 第一接觸層Page 141238544 Simple illustration 19 Second wiring electrode 2 Light-emitting element 20 Substrate 21 Micro-reflective structure layer 200 First reaction layer 201 Transparent adhesive layer 202 Second reaction layer 203 Transparent carrier 22 Transparent conductive layer 23 First contact layer 24 First binding layer 25 Light-emitting layer 26 Second binding layer 27 Second contact layer 28 First wiring electrode 29 Second wiring electrode 3 Light-emitting element 30 Conductive substrate 31 Micro-reflective structure layer 300 First reaction layer 301 Transparent conductive adhesive layer 302 First Two reaction layers 32 transparent conductive layer 33 first contact layer
第15頁Page 15
1238544 圖式簡單說明 34 第一束缚層 3 5 發光層 36 第二束缚層 37 第二接觸層 38 第一接線電極 39 第二接線電極 ΙΙΙΗΙ 第16頁1238544 Brief description of the drawings 34 First binding layer 3 5 Light emitting layer 36 Second binding layer 37 Second contact layer 38 First wiring electrode 39 Second wiring electrode ΙΙΙΗΙ page 16
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