TWI238544B - Luminescence device with micro reflection structure - Google Patents

Luminescence device with micro reflection structure Download PDF

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Publication number
TWI238544B
TWI238544B TW92131876A TW92131876A TWI238544B TW I238544 B TWI238544 B TW I238544B TW 92131876 A TW92131876 A TW 92131876A TW 92131876 A TW92131876 A TW 92131876A TW I238544 B TWI238544 B TW I238544B
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layer
micro
reflective structure
light
group
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TW92131876A
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TW200516783A (en
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Min-Hsun Hsieh
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Epistar Corp
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Abstract

A luminescence device with micro reflection structure is provided. The device has a micro reflection structure layer. The light emitted from the luminescence layer is reflected and guided from the micro reflection structure to increase the luminescence efficiency of the luminescence device.

Description

12385441238544

發明技術領域 種具有微反射結 本發明係關於一種發光元件,尤其關於一 構層之發光元件。 發光元件之應用頗為廣泛,例如,可應用於光學顯示裝 置、雷射二極體、交通號誌、資料儲存裝置、通气穿置、 照明裝置、以及醫療裝置。在此技藝中,目前技術;員重 要課題之一為如何提高發光元件之發光效率。 先前技術 於美國專利公開第2〇〇 2/00 1 7652號中,揭露一種具有埋藏 式微反射結構A1 GalnP發光元件,如圖1所示,其利用蝕刻 技術’將一發光元件之磊晶層蝕刻成一微反射結構,該微 反射結構包含半圓球形、金字塔形或角錐形等,接著沈積 一金屬反射層於該磊晶層上,再將微反射結構磊晶層之頂 端與一導電載體(矽晶片)鍵結在一起,再移除原先磊晶層 之不透明基板,使得射向該不透明基板之光線可以射出。 該微反射結構可將射向反射結構之光線經由反射帶出,以 提高發光元件之亮度。由於該發光元件僅靠反射結構之頂 端與該載體局部相接合,接觸面積較小,此結構之機械強 度不夠強,易造成接合面剝離。 另外,對磊晶層進行蝕刻形成該微反射結構,因此 該磊晶層必須成長到足夠之厚度,否則蝕刻形成之微反射BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a light-emitting element, and more particularly to a light-emitting element having a structure layer. The application of the light-emitting element is quite wide, for example, it can be applied to optical display devices, laser diodes, traffic signs, data storage devices, ventilation, lighting devices, and medical devices. In this technique, current technology; one of the most important topics for the staff is how to improve the luminous efficiency of the light-emitting element. The prior art disclosed in U.S. Patent Publication No. 20002/00 1 7652 discloses an A1 GalnP light-emitting element with a buried micro-reflective structure. As shown in FIG. 1, it uses an etching technique to etch an epitaxial layer of a light-emitting element. A micro-reflective structure is formed. The micro-reflective structure includes a semi-spherical shape, a pyramidal shape, or a pyramidal shape, and then a metal reflective layer is deposited on the epitaxial layer. ) Are bonded together, and then the original opaque substrate of the epitaxial layer is removed, so that light directed at the opaque substrate can be emitted. The micro-reflective structure can bring out the light directed to the reflective structure through reflection to improve the brightness of the light-emitting element. Since the light-emitting element is only partially bonded to the carrier by the top end of the reflective structure, the contact area is small, the mechanical strength of this structure is not strong enough, and it is easy to cause the joint surface to peel. In addition, the epitaxial layer is etched to form the micro-reflective structure, so the epitaxial layer must be grown to a sufficient thickness, otherwise the micro-reflection formed by etching is

1238544 五、發明說明(2) 結構,無法達成光反射之功能,但是厚#曰@ 士 較長之時間,不僅耗時,成本也相對提高。 買 發明内容 述之問 件,該 利用壓 ,再利用一透 在一起 蝕刻該 目的。 疊層之 射器之 強度不 題時,認為若利用一 發光元件具有一微反 鑄、蝕刻或蒸鍍等技 明黏接層將微 。由於本發明不需如 磊晶層等步驟,因此 再者本發明以一透明 黏接在一起, 載體局部相接 缺點。 一表面 頂端與 夠強之 本案發明人於思考如何解決前 種具有微反射結構層之發光元 射結構層,該微反射結構層是 術’形成一金屬微反射結構層 反射結構層與一發光疊層黏接 習知技藝中成長厚的磊晶層再 可達到降低成本,提升亮度之 黏接層將微反射結構層與發光 而不是如前述習知技藝僅靠反 合’因此更可解決結構之機械 發明概要 本發明之主要目的在於提供一種具有微反射結構層之發光 凡件’ ^發光7C件具有一微反射結構層,該微反射結構層 之形成方法例如是利用壓鑄技術,以一具有預定圖案之母 模將一金屬反射層壓鑄成一微反射結構層,其中該微反射 、…構層^外型包含半圓球形、金字塔形或角錐形等幾何圖 案’接著再利用一透明黏接層將該微反射結構層與一發光 疊層黏接在一起;其中不需耗時進行磊晶程序,僅需對一 第6頁 12385441238544 V. Description of the invention (2) The structure can not achieve the function of light reflection, but the thicker time is not only time-consuming but also relatively expensive. Buying the problem described in the above description, the use of pressure, and then a through together to etch the purpose. When the strength of the laminated radiator is not a problem, it is considered that if a light-emitting element has a technique such as micro reverse casting, etching or evaporation, the adhesion layer will be small. Since the present invention does not require steps such as an epitaxial layer, the present invention has the disadvantage that the carriers are locally adhered together by a transparent bonding. A surface top and a strong enough inventor are thinking about how to solve the former light-emitting element structure layer with a micro-reflective structure layer. The micro-reflective structure layer is used to form a metal micro-reflective structure layer. The reflective structure layer and a light-emitting stack The thick epitaxial layer in the layer bonding technique can reduce the cost, and the adhesion layer that enhances the brightness will use the micro-reflective structure layer and light emission instead of relying on the combination of the conventional techniques, so it can solve the structure. Summary of mechanical invention The main object of the present invention is to provide a light-emitting component with a micro-reflective structure layer. ^ The light-emitting 7C component has a micro-reflective structure layer. The method of forming the micro-reflective structure layer is, for example, by using a die casting technology, The pattern master mold casts a metal reflective laminate to form a micro-reflective structure layer, wherein the micro-reflective, ... structure layer ^ includes a geometric pattern such as a semi-spherical shape, a pyramidal shape, or a pyramidal shape, and then a transparent adhesive layer is used to The micro-reflective structure layer is adhered to a light-emitting stack; no epitaxial process is required for the time-consuming process, only a page 61238544 is required.

因此可達 金屬層進行壓銹程序,來形成該特定幾何圖案 到降低成本,提升亮度之目的。 >、 ::明:另一目的在於提供一種具有微反射結構層之發光 牛,其利用該透明黏接層能與發光疊層各面緊密接合之 =性,使得微反射結構層、透明黏接層與發光疊層之間接 :強度增加,如此可以提升其機械強度,避免接合面剝 離,簡化製程,增加信賴度。 依本發明一較佳實施例一種具有微反射結構層之發光元 件包含一基板、形成於該基板上之一微反射結構層、形 成於該微反射結構層上之一第一反應層、形成於該第一反 應層上之一透明黏結層、形成於該透明黏結層上之一第二 反應層、形成於該第二反應層上之一透明導電層,其中, 該透明導電層之上表面包含一第一表面區域與一第二表面 區域、形成於該第一表面區域上之一第一接觸層、形成於 該第一接觸層上之一第一束缚層、形成於該第一束缚層上 之一發光層、形成於該發光層上之一第二束缚層、形成於 該第二束缚層上之一第二接觸層、形成於該第二表面區域 上之一第一接線電極、以及形成於該第二接觸層上之一第 一接線電極。 前述之基板,係包含選自於GaP、GaAs、GaAsP、InGaP、 AlGalnP、AlGaAs、Si、SiC、玻璃、BN、A1N 或 Ge 所構成Therefore, the metal layer can be rust-pressed to form the specific geometric pattern to reduce the cost and improve the brightness. >, :: Ming: Another purpose is to provide a light-emitting cow with a micro-reflective structure layer, which uses the transparent adhesive layer to tightly bond with each side of the light-emitting stack to make the micro-reflective structure layer, transparent and adhesive. The connection between the bonding layer and the light-emitting stack: the strength is increased, so that the mechanical strength can be improved, the peeling of the bonding surface can be avoided, the manufacturing process can be simplified, and the reliability can be increased. According to a preferred embodiment of the present invention, a light-emitting element having a micro-reflective structure layer includes a substrate, a micro-reflective structure layer formed on the substrate, a first reaction layer formed on the micro-reflective structure layer, and A transparent adhesion layer on the first reaction layer, a second reaction layer formed on the transparent adhesion layer, and a transparent conductive layer formed on the second reaction layer, wherein the upper surface of the transparent conductive layer includes A first surface region and a second surface region, a first contact layer formed on the first surface region, a first tie layer formed on the first contact layer, and formed on the first tie layer A light emitting layer, a second tie layer formed on the light emitting layer, a second contact layer formed on the second tie layer, a first wiring electrode formed on the second surface area, and forming A first wiring electrode on the second contact layer. The aforementioned substrate is composed of GaP, GaAs, GaAsP, InGaP, AlGalnP, AlGaAs, Si, SiC, glass, BN, A1N, or Ge

第7頁 1238544 五、發明說明(4) 材料組群中之至少一種材料;前述之透明氧化導電層係包 含選自氧化銦錫、氧化鎘錫、氧化銻錫、氧化鋅及氧化鋅 錫所構成材料組群中之至少一種材料;前述之微反射結構 層係包含選自 In、Sn、A1、Au、Pt、Zn、Ge、Ag、Ti、Page 7 1238544 V. Description of the invention (4) At least one material in the material group; the aforementioned transparent oxide conductive layer comprises a material selected from the group consisting of indium tin oxide, cadmium tin oxide, antimony tin oxide, zinc oxide, and zinc tin oxide. At least one material in the material group; the aforementioned micro-reflective structure layer comprises a material selected from the group consisting of In, Sn, Al, Au, Pt, Zn, Ge, Ag, Ti,

Pb、Pd、Cu、AuBe、AuGe、Ni、Cr、PbSn、AuZn 或氧化銦 錫所構成材料組群中之至少一種材料;前述之微反射結構 之外型包含選自半圓球形、金字塔形或角錐形等幾何圖案 所構成形狀中之至少一種形狀;前述第一束缚層,係包含 選自 AllnP、A1N、GaN、AlGaN、InGaN 及 AlInGaN 所構成材 料組群中之至少一種材料;前述發光層,係包含選自At least one material from the group of materials consisting of Pb, Pd, Cu, AuBe, AuGe, Ni, Cr, PbSn, AuZn, or indium tin oxide; the aforementioned micro-reflective structure includes a shape selected from a semi-spherical shape, a pyramid shape, or a pyramid At least one of the shapes formed by geometric patterns such as shapes; the first binding layer includes at least one material selected from the group consisting of AllnP, A1N, GaN, AlGaN, InGaN, and AlInGaN; the light-emitting layer, the Contains from

AlGalnP、GaN、InGaN及A1 InGaN所構成材料組群中之至少 一種材料;前述第二束缚層,係包含選自ΑΠηΡ、A1N、At least one material from the group of materials consisting of AlGalnP, GaN, InGaN, and A1 InGaN; the second binding layer includes a material selected from AΠηP, A1N,

GaN、AlGaN、InGaN及AlInGaN所構成材料組群中之至少一 種材料;前述第二接觸層,係包含選自SGaP、GaAs、At least one material from the group consisting of GaN, AlGaN, InGaN, and AlInGaN; the second contact layer includes a material selected from the group consisting of SGaP, GaAs,

GaAsP、InGaP、AlGalnP、AlGaAs、GaN、InGaN 及AlGaN 所 構成材料組群中之至少一種材料;前述第一接觸層,係包 含選自於GaP、GaAs、GaAsP、InGaP、AlGalnP、AlGaAs、At least one material from the group consisting of GaAsP, InGaP, AlGalnP, AlGaAs, GaN, InGaN, and AlGaN; the first contact layer includes a member selected from the group consisting of GaP, GaAs, GaAsP, InGaP, AlGalnP, AlGaAs,

GaN、InGaN及AlGaN所構成材料組群中之至少一種材料; 前述透明黏結層係包含選自於聚醯亞胺(ρι)、苯并環丁燒 (BCB)或過氟環丁烷(PFCB)所構成材料組群中之至少一種& 材料;前述第一反應層係包含選自KSiNx、n或^所構成 材料組群中之至少一種材料;前述第二反應層係包含選自 於SiNx、Ti或Cr所構成材料組群中之至少一種材料。 1238544 五、發明說明(6) 層或透明導電層之間之結合力。 請參閱圖3,依本發明另一較佳實施例一種具有微反 射結構層之發光元件2,包含一基板20、形成於該基板20 上之一微反射結構層2 1,該微反射結構層之形成方法與微 反射結構層11之形成方法相似、形成於該微反射結構層21 上之一第一反應層200、形成於該第一反應層2〇〇上之一透 明黏結層201、形成於該透明黏結層2〇1上之一第二反應層 2〇2、形成於該第二反應層2〇2上之一透明載體203、形成 於該透明載體203上之一透明導電層22,其中,該透明導 電層22之上表面包含一第一表面區域與一第二表面區域、 形成於該第一表面區域上之一第一接觸層23、形成於該第 接觸層23上之一第一束缚層24、形成於該第一束缚層24 上之一發光層25、形成於該發光層25上之一第二束缚層 、形成於該第二束缚層上之一第二接觸層27、形成於該 ^二表面區域上之一第一接線電極28、以及形成於該第二 ^觸層上之-第二接線電極29。前述之m層及第二 層之目的在於辅助該透明黏接層與反射層或第二載體 之間之結合力。 請參閱圖4,依本絡ΒΒ α Α 射結構層之發光元件3 =一較佳實施例一種具有微反 電基㈣上表面含;·導電基板30、形成於該導 之形成方法與微反射心=射結構層31 ’該微反射結構層 对…構層11之形成方法相似、形成於該At least one material from the group of materials consisting of GaN, InGaN, and AlGaN; the transparent adhesive layer includes a material selected from polyimide (ρι), benzocyclobutane (BCB), or perfluorocyclobutane (PFCB) The first reaction layer system includes at least one material selected from the group consisting of KSiNx, n, or ^; the second reaction layer system includes at least one material selected from SiNx, At least one material in the group of materials composed of Ti or Cr. 1238544 V. Description of the invention (6) The bonding force between layers or transparent conductive layers. Please refer to FIG. 3, according to another preferred embodiment of the present invention, a light-emitting element 2 having a micro-reflective structure layer includes a substrate 20 and a micro-reflective structure layer 21 formed on the substrate 20. The micro-reflective structure layer The formation method is similar to that of the micro-reflection structure layer 11, a first reaction layer 200 formed on the micro-reflection structure layer 21, a transparent adhesive layer 201 formed on the first reaction layer 200, and A second reaction layer 202 on the transparent adhesive layer 201, a transparent carrier 203 formed on the second reaction layer 202, and a transparent conductive layer 22 formed on the transparent carrier 203. The upper surface of the transparent conductive layer 22 includes a first surface region and a second surface region, a first contact layer 23 formed on the first surface region, and a first contact layer 23 formed on the first contact layer 23. A tie layer 24, a light emitting layer 25 formed on the first tie layer 24, a second tie layer formed on the light emitting layer 25, a second contact layer 27 formed on the second tie layer, One of the first wiring electrodes 28, And formed on the contact layer of the second ^ - a second wiring electrode 29. The purpose of the aforementioned m layer and the second layer is to assist the bonding force between the transparent adhesive layer and the reflective layer or the second carrier. Please refer to FIG. 4, according to the present invention, the light-emitting element of the Βα α Α structure layer 3 = a preferred embodiment, a microreflective substrate with an upper surface containing; a conductive substrate 30, a method for forming the conductive substrate, and a microreflection Heart = radiation structure layer 31 'The micro-reflective structure layer pair ... The formation method of structure layer 11 is similar to that of

1238544 --------- 五、發明說明(7) " 微反射結構層31上之一第一反應層3〇〇、形成於該第一反 ^層300上之一透明導電黏結層301、形成於該透明導電黏 結層301上之一第二反應層3〇2、形成於該第二反應層3〇2 上之一透明導電層32、形成於該透明導電層32上之一第一 接觸層3/、形成於該第-接觸層33上之-第-束缚層34、 形成於鑪第一束缚層34上之一發光層35、形成於該發光層 3_5上之第一束缚層36、形成於該第二束缚層36上之一第 二接觸層37、形成於該導電基板下表面上之一第一接線電 極38、以及形成於該第二接觸層37上之一第二接線電極 3 9 ° 則述之透明導電黏接層具有導電之功能;前述之第一 反應層及第一反應層之目的在於輔助該透明導電黏接層盥 微反射結構層或透明導電層之間之結合力,同時使其接^ 面形成歐姆接觸。 前述之二個實施例中’亦可於第二接線電極與第二接觸層 之間形成一透明導電層;前述之三個實施例中,母模之形 成方法亦可以一金屬基板,經由雷射加工後,形成該凸起 之半圓球形、金字塔形或角錐形等幾何圖案或其組合圖 案,另外其他於鑄造技術中母模之形成方法,亦可用來 造該微反射結構之母模;前述微反射結構層之形成方法除 了壓鱗方法外,亦可以㈣或*刻後再錢等方法形成.、 前述基板,係包含選自MGaP、GaAs、GaAsp、InGap、1238544 --------- V. Description of the invention (7) " One of the first reaction layer 300 on the micro-reflective structure layer 31 and one of transparent conductive adhesive formed on the first anti-layer 300 A layer 301, a second reaction layer 302 formed on the transparent conductive adhesive layer 301, a transparent conductive layer 32 formed on the second reaction layer 302, and one of the transparent conductive layer 32 formed The first contact layer 3 /, the -first-binding layer 34 formed on the first-contact layer 33, a light-emitting layer 35 formed on the first binding layer 34 of the furnace, and the first binding formed on the light-emitting layer 3_5 Layer 36, a second contact layer 37 formed on the second tie layer 36, a first wiring electrode 38 formed on the lower surface of the conductive substrate, and a second contact layer 37 formed on the second contact layer 37 The wiring electrode is 39 °, the transparent conductive adhesive layer has the function of conducting electricity; the purpose of the first reaction layer and the first reaction layer is to assist the transparent conductive adhesive layer between the micro-reflective structure layer or the transparent conductive layer. The bonding force, while making its interface ohmic contact. In the aforementioned two embodiments, a transparent conductive layer may also be formed between the second wiring electrode and the second contact layer; in the aforementioned three embodiments, the method of forming the master mold may also be a metal substrate through a laser After processing, geometric patterns such as hemispherical spheres, pyramids, or pyramids, or combinations thereof, are formed. In addition, other methods for forming the master mold in casting technology can also be used to create the master mold of the micro-reflective structure. The method for forming the reflective structure layer may be formed by a method other than a squeezing method, or a method such as engraving or engraving. The aforementioned substrate includes a material selected from the group consisting of MGaP, GaAs, GaAsp, InGap,

AlGalnP、AlGaAs、Si、SiC、玻璃、BN mwe 所構AlGalnP, AlGaAs, Si, SiC, glass, BN mwe

第11頁 1238544 五、發明說明(8) 材料組群中之i # m、, Si、GaAs^ /料;前述導電基板,係包含選自Page 11 1238544 V. Description of the invention (8) i # m,, Si, GaAs ^ in the material group; the aforementioned conductive substrate includes

Si 、 GaAs 、 S AlGaAs 、 BN 或AIN 它可代替之材料 SiC、Al2〇3或玻璃 述微反射結構層 Ti、Pb、Pd、Ge 、GaP、GaAsP、lnGap、A1GaInP、 斤&構成材料組群中之至少一種材料或其 月,J述透明載體,係包含選自KGap、 听構成材料組群中之至少一種材料;前 係包含選自 Sn、Al、Au、Pt、Zn、Ag、 .^ Cu、AuBe、AuGe、Ni、PbSn、AuZn 或氣 =錫所構成材料組群中之至少—種材料或其它可代替之 :枓;前述之微反射結構包含選自半圓球形、金字塔形或 錐开y所構成形狀中之至少一種形狀;前述之透明導電 層二係包含選自氧化銦錫、氧化鎘錫、氧化銻錫、氧化鋅 及氧化鋅錫所構成材料組群中之至少一種材料;前述第一 束缚層,係包含選自 A1InP、A1N、GaN、A1GaN、InGaN& A11 nGaN所構成材料組群中之至少一種材料;前述發光 層’係包含選自AlGalnP、GaN、InGaN及AlInGaN所構成材 料組群中之至少一種材料;前述第二束缚層,係包含選自 A1 InP、AIN、GaN、AlGaN、InGaN 及A1 InGaN 所構成材料組 群中之至少一種材料;前述第二接觸層,係包含選自於Si, GaAs, S AlGaAs, BN or AIN It can be replaced by SiC, Al203 or glass micro-reflection structure layer Ti, Pb, Pd, Ge, GaP, GaAsP, InGap, A1GaInP, Jin & constituting material group At least one of the materials or the month thereof, the transparent carrier described in J, includes at least one material selected from the group consisting of KGap and listening constituent materials; the former system includes selected from Sn, Al, Au, Pt, Zn, Ag,. ^ Cu, AuBe, AuGe, Ni, PbSn, AuZn, or at least one of the materials in the group of materials or other alternatives: 枓; the aforementioned micro-reflective structure includes a semi-spherical, pyramidal, or cone-shaped at least one of the shapes formed by y; the aforementioned second transparent conductive layer includes at least one material selected from the group consisting of indium tin oxide, cadmium tin oxide, antimony tin oxide, zinc oxide, and zinc tin oxide; The first tie layer includes at least one material selected from the group consisting of A1InP, A1N, GaN, A1GaN, InGaN & A11 nGaN; and the light-emitting layer includes a material selected from AlGalnP, GaN, InGaN, and AlInGaN. At least in the group A material; the second binding layer includes at least one material selected from the group consisting of A1 InP, AIN, GaN, AlGaN, InGaN, and A1 InGaN; the second contact layer includes a material selected from

GaP、GaAs、GaAsP、InGaP、AlGalnP、AlGaAs、GaN、 I nGaN及AlGaN所構成材料組群中之至少一種材料;前述第 一接觸層,係包含選自於GaP、GaAs、GaAsP、InGaP、 AlGalnP、AlGaAs、GaN、InGaN 及 AlGaN 所構成材料組群中 之至少一種材料;前述透明黏結層係包含選自於聚醯亞胺 (PI)、苯并環丁烷(BCB)或過氟環丁烷(PFCB)所構成材料At least one material from the group consisting of GaP, GaAs, GaAsP, InGaP, AlGalnP, AlGaAs, GaN, InGaN, and AlGaN; the first contact layer includes a material selected from the group consisting of GaP, GaAs, GaAsP, InGaP, AlGalnP, At least one material from the group of materials consisting of AlGaAs, GaN, InGaN, and AlGaN; the transparent bonding layer includes a material selected from polyimide (PI), benzocyclobutane (BCB), or perfluorocyclobutane ( (PFCB)

第12頁 1238544 五、發明說明(9) -~- 組群中之至少一種材料;前述第一反應層係包含選自於 Si Nx、Ti或Cr所構成材料組群中之至少一種材料;前述 二反應層係包含選自於Si Nx、Ti或Cr所構成材料組群中之 至少一種材料;前述之透明導電黏結層包含選自於自發性 導電高分子(Intrinsically conducting p〇lymer)或 ^ 八 子中摻雜導電材質所構成材料組群中之至少一種材料^二 述之^電材質包含選自於氧化銦錫、氧化鎘錫、氧化錄則 錫、氧化鋅、氧化鋅錫、Au&Ni/Au所構成材料組群 至少一種材料。 ,然士發明之發光元件已以較佳實施例揭露於上,然本發 明之範圍並不限於上述較佳實施例,例如微反射結構層之 法除了本發明揭露之壓鑄方法,亦可以蝕刻或:刻 俊,泰鍍等方法形成該微反射結構;因此應以下述申請專 範圍所界疋為準。因此任何熟知此項技藝者,在不脫離 發明之申請專利範圍及精神下,當可做任何改變。Page 12 1238544 V. Description of the invention (9)-~-At least one material in the group; the first reaction layer includes at least one material selected from the group of materials composed of Si Nx, Ti or Cr; The two reaction layers include at least one material selected from the group consisting of Si Nx, Ti, or Cr; the aforementioned transparent conductive adhesive layer includes a material selected from the group consisting of intrinsically conducting polymers or ^ At least one material in the group of materials composed of a medium-doped conductive material ^ The electrical material of the second description includes a material selected from the group consisting of indium tin oxide, cadmium tin oxide, tin oxide, zinc oxide, zinc tin oxide, Au & Ni / At least one material of the material group composed of Au. Although the light-emitting element of the invention has been disclosed in the preferred embodiment, the scope of the present invention is not limited to the above-mentioned preferred embodiment. For example, the method of the micro-reflective structure layer can be etched or etched in addition to the die-casting method disclosed in the present invention. : Carved Jun, Thai plating and other methods to form this micro-reflective structure; therefore, the following application scope should prevail. Therefore, anyone who is familiar with this technology can make any changes without departing from the scope and spirit of the patent application for the invention.

第13頁 1238544 圖式簡單說明 圖式之簡單說明: 圖1為一示意圖,顯示一習知技藝之埋藏式微反射器 A 1G a I η P發光元件; 圖2為一示意圖,顯示依本發明一較佳實施例之一種 具有微反射結構層之發光元件; 圖3為一示意圖,顯示依本發明另一較佳實施例之一 種具有微反射結構層之發光元件; 圖4為一示意圖,顯示依本發明又一較佳實施例之一 種具有微反射結構層之發光元件。Page 13 128544 Brief description of the diagrams Brief description of the diagrams: Fig. 1 is a schematic diagram showing a buried micro-reflector A 1G a I η P light-emitting element of a known technique; Fig. 2 is a schematic diagram showing a light emitting element according to the present invention. A light-emitting element with a micro-reflective structure layer according to a preferred embodiment; FIG. 3 is a schematic view showing a light-emitting element with a micro-reflective structure layer according to another preferred embodiment of the present invention; FIG. 4 is a schematic view showing A light emitting device having a micro-reflective structure layer is another preferred embodiment of the present invention.

符號說明 I 發光元件 10 基板 II 微反射結構層 100 第一反應層 101 透明黏結層 102 第二反應層 12 透明導電層 13 第一接觸層Explanation of symbols I Light-emitting element 10 Substrate II Micro-reflection structure layer 100 First reaction layer 101 Transparent adhesive layer 102 Second reaction layer 12 Transparent conductive layer 13 First contact layer

14 第一束缚層 15 發光層 16 第二束缚層 17 第二接觸層 18 第一接線電極14 First binding layer 15 Light emitting layer 16 Second binding layer 17 Second contact layer 18 First wiring electrode

第14頁 1238544 圖式簡單說明 19 第二接線電極 2 發光元件 20 基板 21 微反射結構層 200 第一反應層 201 透明黏結層 202 第二反應層 203 透明載體 22 透明導電層 23 第一接觸層 24 第一束缚層 25 發光層 26 第二束缚層 27 第二接觸層 28 第一接線電極 29 第二接線電極 3 發光元件 30 導電基板 31 微反射結構層 300 第一反應層 301 透明導電黏結層 302 第二反應層 32 透明導電層 33 第一接觸層Page 141238544 Simple illustration 19 Second wiring electrode 2 Light-emitting element 20 Substrate 21 Micro-reflective structure layer 200 First reaction layer 201 Transparent adhesive layer 202 Second reaction layer 203 Transparent carrier 22 Transparent conductive layer 23 First contact layer 24 First binding layer 25 Light-emitting layer 26 Second binding layer 27 Second contact layer 28 First wiring electrode 29 Second wiring electrode 3 Light-emitting element 30 Conductive substrate 31 Micro-reflective structure layer 300 First reaction layer 301 Transparent conductive adhesive layer 302 First Two reaction layers 32 transparent conductive layer 33 first contact layer

第15頁Page 15

1238544 圖式簡單說明 34 第一束缚層 3 5 發光層 36 第二束缚層 37 第二接觸層 38 第一接線電極 39 第二接線電極 ΙΙΙΗΙ 第16頁1238544 Brief description of the drawings 34 First binding layer 3 5 Light emitting layer 36 Second binding layer 37 Second contact layer 38 First wiring electrode 39 Second wiring electrode ΙΙΙΗΙ page 16

Claims (1)

1238544 六、申請專利範圍 1 · 種具有微反射結構層之發光元件,包含: 一基板; 一微反射結構層,形成於該基板之上,該微反射結構具 有幾何圖案之外型; 一透明黏接層,形成於該微反射結構層之上;以及 一發光疊層,形成於該透明黏接層之上,其中,藉由該 微反射結構層與透明黏接層之間緊密接合,以增加結構之 機械強度。 2·如申請專利範圍第1項所述之一種具有微反射結構層之 發光元件,其中於該反射層與該透明黏接層之間更包含一 第一反應層。 3 ·如申請專利範圍第1項所述之一種具有微反射結構層之 發光元件,其中於該透明黏接層與該發光疊層之間更包含 一第二反應層。 4 ·如申請專利範圍第1項所述之一種具有微反射結構層之 發光元件,其中於該發光疊層之同一正面形成一第一電極 及一第二電極。 5·如申請專利範圍第1項所述之一種具有微反射結構層之 發光元件,其中分別於該發光疊層之正面及基板反面形成 一第一電極及一第二電極。1238544 6. Scope of patent application 1. A light-emitting element with a micro-reflective structure layer, including: a substrate; a micro-reflective structure layer formed on the substrate, the micro-reflective structure having a geometric pattern outside; a transparent adhesive An adhesive layer is formed on the micro-reflective structure layer; and a light-emitting stack is formed on the transparent adhesive layer, wherein the micro-reflective structure layer and the transparent adhesive layer are tightly bonded to increase Mechanical strength of the structure. 2. A light-emitting device having a micro-reflective structure layer as described in item 1 of the scope of patent application, wherein a first reaction layer is further included between the reflective layer and the transparent adhesive layer. 3. A light-emitting device having a micro-reflective structure layer as described in item 1 of the scope of patent application, wherein a second reaction layer is further included between the transparent adhesive layer and the light-emitting stack. 4. A light-emitting element having a micro-reflective structure layer as described in item 1 of the scope of patent application, wherein a first electrode and a second electrode are formed on the same front side of the light-emitting stack. 5. A light-emitting element having a micro-reflective structure layer as described in item 1 of the scope of the patent application, wherein a first electrode and a second electrode are formed on the front surface of the light-emitting stack and the back surface of the substrate, respectively. 第17頁 1238544 六、申請專利範圍 6 · —種具有微反射結構層之發光元件,包含: 一基板; 形成於該基板上之一微反射結構層,該微反射結構具有 幾何圖案之外型; 形成於該微反射結構層上之一第一反應層; 形成於該第一反應層上之一透明黏結層; 形成於該透明黏結層上之一第二反應層; 形成於該第二反應層上之一透明導電層,其中,該透明 導電層之上表面包含一第一表面區域與一第二表面區域; 形成於该第一表面區域上之一第一接觸層; 形成於該第一接觸層上之一第一束缚層; 形成於該第一束缚層上之一發光層; 形成於該發光層上之一第二束缚層; 形成於該第二束缚層上之一第二接觸層; 形成於該第二表面區域上之一第一接線電極;以及 由 形成於該第二接觸層上之一第二接線電極,其中,藉 該微反射結構層、第一反應層與透明接 合,以增加結構之機械強度。 # θ m # 7· —種具有微反射結構層之發光元件, εί> 3 /基板, 該微反射結構具有 形成於該基板上之一微反射結構層 幾何圖案之外型;Page 17 1238544 6. Application patent scope 6-A light-emitting element with a micro-reflective structure layer, comprising: a substrate; a micro-reflective structure layer formed on the substrate, the micro-reflective structure having a geometric pattern; A first reaction layer formed on the micro-reflective structure layer; a transparent adhesion layer formed on the first reaction layer; a second reaction layer formed on the transparent adhesion layer; formed on the second reaction layer An upper transparent conductive layer, wherein the upper surface of the transparent conductive layer includes a first surface region and a second surface region; a first contact layer formed on the first surface region; formed on the first contact A first tie layer on the layer; a light emitting layer formed on the first tie layer; a second tie layer formed on the light emitting layer; a second contact layer formed on the second tie layer; A first wiring electrode formed on the second surface region; and a second wiring electrode formed on the second contact layer, wherein the micro-reflection structure layer, the first reaction layer and the transparent Engagement, to increase the mechanical strength of the structure. # θ m # 7 · —a light-emitting element having a micro-reflective structure layer, εί > 3 / substrate, the micro-reflective structure having a geometrical pattern of a micro-reflective structure layer formed on the substrate; 第18頁 1238544 六、申請專利範圍 形成於該微反射結構層上之一第一反應層; 形成於該第一反應層上之一透明黏結層; 形成於該透明黏結層上之一第二反應層; 形成於該第二反應層上之一透明載體; 形成於該透明載體上之一透明導電層,其中,該透明導 電層之上表面包含一第一表面區域與一第二表面區 % 域; 形成於該第一表面區域上之一第一接觸層; 形成於該第一接觸層上之一第一束缚層; 形成於該第一束缚層上之一發光層; 形成於該發光層上之一第二束缚層; Φ 形成於該第二束缚層上之一第二接觸層; 形成於該第二表面區域上之一第一接線電極;以及 形成於該第二接觸層上之一第二接線電極,其中,藉由 該微反射結構層、第一反應層與透明黏接層之間緊密接 合,以增加結構之機械強度。 8. —種具有微反射結構層之發光元件,包含: 一導電基板; 形成於該導電基板上之一微反射結構層,該微反射結構 φ 具有幾何圖案之外型; 形成於該微反射結構層上之一第一反應層; 形成於該第一反應層上之一透明導電黏結層; · 形成於該透明導電黏結層上之一第二反應層;Page 18 1238544 6. The scope of the patent application is a first reaction layer formed on the micro-reflective structure layer; a transparent adhesive layer formed on the first reaction layer; a second reaction formed on the transparent adhesive layer A transparent carrier formed on the second reaction layer; a transparent conductive layer formed on the transparent carrier, wherein the upper surface of the transparent conductive layer includes a first surface area and a second surface area A first contact layer formed on the first surface region; a first tie layer formed on the first contact layer; a light emitting layer formed on the first tie layer; formed on the light emitting layer A second tie layer; Φ a second contact layer formed on the second tie layer; a first wiring electrode formed on the second surface area; and a first contact electrode formed on the second contact layer A two-wire electrode, in which the micro-reflective structure layer, the first reaction layer, and the transparent adhesive layer are tightly bonded to increase the mechanical strength of the structure. 8. A light-emitting element having a micro-reflective structure layer, comprising: a conductive substrate; a micro-reflective structure layer formed on the conductive substrate, the micro-reflective structure φ having an outer shape of a geometric pattern; formed on the micro-reflective structure A first reaction layer on the layer; a transparent conductive adhesive layer formed on the first reaction layer; a second reaction layer formed on the transparent conductive adhesive layer; 第19頁 1238544 申請專利範圍 形成於该第一反應層上之一透明導電声· 形成於該透明導電層上之一第一接觸^ ; 形成於該第一接觸層上之一第一束缚^ ; 形成於該第一束缚層上之一發光声· 形成於該發光層上之一第二束缚^ 形成於該第一束缚層上之一^第二接觸声· 形成於該導電基板下表面上之一楚 二’ 形成於該第二接觸層上之一第-接::f線電極;以及 微反射結構層、第一反應層與透思中糟由该 合,以增加結構之機械強度。導電黏接層之間緊密接 9·如申請專利範圍第1項、第6項、第7項或第8項所述之 ;;有微反射結構層之發光元件,其中該微反射、G:; 2 係、包含選自半圓球形、金字塔形或角錐形所 構成形狀中之至少一種形狀或其他可替代之形狀。 1 0·如申請專利範圍第1項、第6項或第7項所述之一種具有 微反射結構層之發光元件,其中該基板,係包含選自於 GaP 、 GaAs 、 GaAsP 、 InGaP 、 AlGalnP 、 AlGaAs 、 Si 、 SiC、玻璃、bn、AIN或Ge所構成材料組群中之至少一種材 料或其他可替代之材料。 11 ·如申請專利範圍第8項所述之一種具有微反射結構層之 發光元件,其中該導電基板,係包含選自Si、GaAs、Page 19 1238544 The scope of the patent application is a transparent conductive sound formed on the first reaction layer. A first contact formed on the transparent conductive layer ^; a first binding ^ formed on the first contact layer; A light emitting sound formed on the first binding layer · A second binding sound formed on the light emitting layer ^ A second contact sound forming on the first binding layer ^ A second contact sound forming on the lower surface of the conductive substrate One Chu Er 'formed on the second contact layer is a first-connected: f-line electrode; and the micro-reflective structure layer, the first reaction layer, and the reflections should be combined to increase the mechanical strength of the structure. The conductive adhesive layers are in close contact with each other. As described in item 1, 6, 7, or 8 of the scope of patent application; light emitting elements with a micro-reflective structure layer, wherein the micro-reflective, G: 2 series, including at least one shape selected from the group consisting of a hemisphere, a pyramid, or a pyramid, or other alternative shapes. 1 · A light-emitting element having a micro-reflective structure layer as described in item 1, 6, or 7 of the scope of patent application, wherein the substrate comprises a member selected from the group consisting of GaP, GaAs, GaAsP, InGaP, AlGalnP, At least one of the materials in the group consisting of AlGaAs, Si, SiC, glass, bn, AIN, or Ge, or other alternative materials. 11 · A light-emitting device having a micro-reflective structure layer as described in item 8 of the scope of patent application, wherein the conductive substrate comprises a material selected from the group consisting of Si, GaAs, 1238544 六、申請專利範圍 SiC、GaP、GaAsP、InGaP、AlGalnP、A1GaAs、M 或A1N 所 構成材料組群中之至少一種材料或其它可代替之材料。 1 2.如申請專利範圍第7項所述之一種具有微反射結構層之 發光元件,其中該透明載體,係包含選自sGap、sic、 A1 203或玻璃所構成材料組群中之至少一種材料或苴它可 代替之材料。 ^ 1 一3.如中請專利範圍第μ、第6項、第?項或第8項所述之 :種具有微反射結構層之發光元件’其中該微反射結構 層,係包含選自 Sn、A1、Au、pt、Zn、Ag、n、pb、pd、 :、虹以、N 1、PbSn、AuZn或氧化銦錫所構成 材枓組群中之至少一種材料或其它可代替之材料。 ^. Λ申么專,利範圍第1項、第6項或第7項戶斤述之一種具有 發光元件,&中該透明黏結層係包含選自 於聚醯亞胺(ΡΙ)、芰並炉丁 a 、 τ ° Μ , ^ 本开% 丁烷(BCB)或過氟環丁烷(PFCB) 所構成材料組群中之至少一種材料或其它可代替之材料。 1 5 ·如申請專利範圍第2 一種具有微反射結構層之發来、f或第8項所述之/ 包含選自於simciM _其中該第一反應層係 料或其他可替代之材=所構成材料組群中之至少一種材1238544 6. Scope of patent application At least one of the materials in the group of materials composed of SiC, GaP, GaAsP, InGaP, AlGalnP, A1GaAs, M or A1N or other alternative materials. 1 2. A light-emitting element with a micro-reflective structure layer as described in item 7 of the scope of patent application, wherein the transparent carrier comprises at least one material selected from the group consisting of sGap, sic, A1 203, or glass Or, it can replace the material. ^ 1 3. If so, please ask for the scope of the patent, μ, item 6, and item? Item or item 8: A light-emitting element having a micro-reflective structure layer, wherein the micro-reflective structure layer comprises a member selected from the group consisting of Sn, A1, Au, pt, Zn, Ag, n, pb, pd,:, At least one of the materials in the group consisting of rainbow, N1, PbSn, AuZn, or indium tin oxide, or other alternative materials. ^. Λ Shen Mozhuan, one of the items described in items 1, 6, or 7 has a light-emitting element. The transparent adhesive layer in & contains a material selected from polyimide (PI), Combining furnace a, τ ° M, ^ at least one of the materials in the group consisting of butane (BCB) or perfluorocyclobutane (PFCB) or other alternative materials. 1 5 · As described in the scope of the patent application, the second type has a micro-reflective structure layer, described in f or item 8 / including selected from simciM _ wherein the first reaction layer material or other alternative materials = all At least one material in the group of materials 1238544 六、申請專利範圍 1 6 ·如申請專利範圍第3項、第6項、第7項或第8項所述之 一種具有微反射結構層之發光元件,其中該第二反應層係 包含選自於Si Nx、Ti或Cr所構成材料組群中之至少,種材 料或其他可替代之材料。 1 7·如申請專利範圍第8項所述之一種具有微反射結構層之 發光元件,其中該透明導電黏結層包含選自於自發性導電 兩分子(Intrinsically conducting polymer)或高分子中 摻雜導電材質所構成材料組群中之至少一種材 料或其它可代替之材料。 1 8 ·如申請專利範圍第丨7項所述之一種具有微反射結構層 之發光元件’其中該導電材質包含選自於氧化銦錫、氧化 锅锡、氧化錄錫、氧化鋅、氧化辞錫、Au&Ni/Au所構成 材料組群中之至少一種材料或其他可替代之材料。 1 9 ·如申請專利範圍第6項、第7項或第8項所述之一種具有 微反射結構層之發光元件,其中該第一束缚層,係包含選 自於A1 InP、AIN、GaN、AlGaN、InGaN 及A1 InGaN 所構成材 料組群中之至少一種材料或其他可替代之材料。 20·如申清專利範圍第6項、第7項或第8項所述之一種具有 二反射結構層之發光元件,其中該發光層,係包含選自於 a InP GaN、InGaN及A1 InGaN所構成材料組群中之至少1238544 6. Scope of patent application 16 · A light-emitting element having a micro-reflective structure layer as described in item 3, 6, 7, or 8 of the scope of patent application, wherein the second reaction layer At least one or more materials from the group of materials composed of Si Nx, Ti, or Cr. 17. A light-emitting device with a micro-reflective structure layer as described in item 8 of the scope of the patent application, wherein the transparent conductive adhesive layer comprises a conductive material selected from the group consisting of intrinsically conducting polymers or polymers doped with conductive materials. At least one of the materials in the group of materials or other replaceable materials. 1 8 · A light-emitting element with a micro-reflective structure layer as described in item 7 of the scope of the patent application, wherein the conductive material comprises a material selected from the group consisting of indium tin oxide, pot tin oxide, tin oxide, zinc oxide, and tin oxide. , Au & Ni / Au, or at least one of the materials in the group of materials or other alternative materials. 1 9 · A light-emitting element with a micro-reflective structure layer as described in item 6, 7, or 8 of the scope of the patent application, wherein the first binding layer comprises a material selected from the group consisting of A1 InP, AIN, GaN, At least one of the materials in the group consisting of AlGaN, InGaN, and A1 InGaN or other alternative materials. 20. A light-emitting device having a two-reflection structure layer as described in claim 6, 7, or 8 of the patent scope, wherein the light-emitting layer comprises a material selected from the group consisting of a InP GaN, InGaN, and A1 InGaN. Constitutes at least 六、申請專利範圍 一種材料或其他可替代之材料 2】.如申請專利範圍第6項、第7 微反射結構層之發光元件 ::第8項所述之-種具有 自於AllnP、A1N、GaN、Α]Γ^ ^第二束缚層,係包含選 料組群中之至少— a 、nGaN及AlInGalV所構成材 種材枓或其他可替代之材料。 22.如申請專利範圍第6項、 微反射結構層之發光元件,丨中項該戈第一8:所述之-種具有 於GaP、GaAs、GaAsP、In(JaP\Af τ p接觸層係包含選自 I广及_所構成材料組群中之二: 替代之材料。 種材科或其他可 23.如申睛專利範圍第6項、第7 微反射結構層之發丼开祙 次第8員所述之一種具有 自於Γ,Ρ、= 其中該第二接觸層,係包含選 f a S、GaAsP、InGaP、AlGalnP、AlGaAs、 所構成材料組群中之至少一種材料或 其他可替代之材料。 2上如申請專利範圍第6項、第7項或第8項所述之一種具有 ,反射結構層之發光元件,亦可於該第二接線電極與該第 一接觸層之間形成一透明導電層。 項、第8項或第24項所述之 2 5 ·如申請專利範圍第6項、第7 1238544 六、申請專利範圍 一種具有微反射結構層之發光元件,其中該透明導電層, 係包含選自氧化銦錫、氧化鎘錫、氧化銻錫、氧化辞或氧 化鋅錫所構成材料組群中之至少一種材料或其它可代替之 材料。Six, patent application scope of a material or other alternative materials 2]. As described in the scope of the patent application for the sixth, seventh micro-reflective structure layer of the light-emitting element: as described in the eighth-a type from AllnP, A1N, GaN, A] Γ ^^ The second binding layer includes at least -a, nGaN and AlInGalV in the material selection group, or other alternative materials. 22. The light-emitting element with a micro-reflective structure layer according to item 6 of the scope of patent application, which is described in item 1 of the above item 8:-a type having a contact layer system in GaP, GaAs, GaAsP, In (JaP \ Af τ p Contains two materials selected from the group consisting of I and _: Substitute materials. Seed materials or other materials. For example, the 6th and the 7th micro-reflection structure layer of the patent application scope, the 8th development The second contact layer described by the member has at least one material selected from the group consisting of fa S, GaAsP, InGaP, AlGalnP, AlGaAs, or other alternative materials. The light-emitting element having a reflective structure layer as described in item 6, 7, or 8 of the scope of patent application above, can also form a transparent between the second wiring electrode and the first contact layer. The conductive layer is described in item 8, item 8 or item 24. 5 · If the scope of patent application is No. 6, No. 7 1238544 6. The scope of patent application is a light-emitting element with a micro-reflective structure layer, wherein the transparent conductive layer, Is selected from the group consisting of indium tin oxide, cadmium tin oxide, antimony tin oxide, and oxygen At least one of the materials in the word group or zinc tin oxide group or other alternative materials. 第24頁Page 24
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