TWI232778B - Cleaning device - Google Patents

Cleaning device Download PDF

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Publication number
TWI232778B
TWI232778B TW93127743A TW93127743A TWI232778B TW I232778 B TWI232778 B TW I232778B TW 93127743 A TW93127743 A TW 93127743A TW 93127743 A TW93127743 A TW 93127743A TW I232778 B TWI232778 B TW I232778B
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Taiwan
Prior art keywords
cleaning
space
drying
washing
storage space
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TW93127743A
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Chinese (zh)
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TW200609045A (en
Inventor
Jung-Fa Li
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Yang Huca Industry Co Ltd
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Priority to TW93127743A priority Critical patent/TWI232778B/en
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Publication of TWI232778B publication Critical patent/TWI232778B/en
Publication of TW200609045A publication Critical patent/TW200609045A/en

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Abstract

This invention provides a cleaning device, particular one for cleaning and drying electronic components, including: a sealing device, a receiving base, a purging device and a drying device. The sealing device includes a sealed storage space therein, a receiving body bounded by the storage space, wherein the receiving body is formed with a hollow the penetrating receiving space through which a jig module mounted with electronic components may be vertically place. The sealed device is provided at its exterior with the purging device and the drying device, such that the purging device may inject water into the storage space to perform circulating cleaning operation, where the electronic components can be completely cleaned after water flow injects towards and clean the electronic components mounted on the vertical jig module and then dried by the drying machine via pressurized circulating operation.

Description

1232778 五、發明說明(1) 【發明所屬之 本發明係 電子零件之清 清洗垂直放置 建到徹底洗淨 【先前技術】 按,現今 與電子相關的 是由各種不同 發光二極體、 技術領域 會附著 除,則 镇壞, 凊潔處 在 ),係 帶B上 中之電 帶B將 <清洗 洗,對 ’容易 缺失。 而 有髒物 會影響 因此, 理,以 習知清 將電子 ,並由 子零件 治具A ,然習 於電子 在電子 提供一 洗裝置 之電子 電子零 電子科 物品例 的電子 電路板 或塵屑 電子零 在電子 使電子 洗電子 零件置 輸送帶 ,且治 送至烘 知電子 零件下 零件上 種清洗裝置,尤指使用於清洗 俾利用循環水流於密閉空間 零件’再予以高壓烘乾電子零件= 件之功效》 而 技時代 如電腦 零件所 等,而 ,若未 件之使 零件製 零件上 零件之 放於治 B上方 具A中 乾機D 零件之 方及極 殘留髒 的社會中, 、電視、音 組成,如晶 該等電子零 將電子零件 用品質,或 造成型後, 之髒物或塵 作業過程( 具A中,而 裝設噴水頭 電子零件經 中進行烘乾 清洗,只針 腳間隔處並 物或塵屑, 在生活 響、影 片、電 件在製 上之髒 者造成 必須將 屑去除 請參閱 將治具 C喷水 過清洗 ,而完 對電子 無法徹 清洗工 周遭有許多 碟機等,均 容、電阻、 造過程中, 物或塵屑清 電子零件的 電子零件做 〇 第八圖所示 A置於輸送 清洗治具A 後,以輸送 成電子零件 零件表面清 底充分洗淨 作具有諸多 在目前的電子零件清洗裝置中,如公告第五 〇1232778 V. Description of the invention (1) [This invention belongs to the invention of electronic parts cleaning and vertical placement to complete washing [prior art] Press, now related to electronics is made up of a variety of different light-emitting diodes, technical fields will If it is attached, it will be damaged, and clean and clean.), The electric band B on the band B will be washed and washed, and it is easy to lose. The presence of dirt will affect the electronic circuit board or dust electronics in the case of electronics, electronics, and electronics. The electronic makes the electronic washing electronic parts on a conveyor belt, and sends them to a cleaning device for the lower parts of the electronic parts, especially used for cleaning, using circulating water to flow through the enclosed space, and then drying the electronic parts under high pressure. 》 In the era of technology, such as computer parts, etc., if the parts are not made, the parts on the parts made of parts are placed on the top of the part B with the dryer A and the parts D and the society with extremely residual dirt, TV, sound composition For example, the quality of electronic parts such as crystals will be changed, or the dirt or dust will be formed after the molding process (with A, and the electronic parts with sprinkler heads will be dried and cleaned in the middle, and only the pins are combined at the interval). Or dust, which is caused by the dirty of life, movies, and electrical parts. You must remove the debris. There are many dishwashers around the electronics ca n’t be cleaned. During the process of equalization, resistance, and manufacturing, the electronic parts of the electronic parts are cleaned by dust or debris. The A shown in the eighth figure is placed after the cleaning fixture A is transported. The cleaning of the surface of the electronic parts has been fully cleaned. There are many in the current electronic parts cleaning devices, such as the fifth announcement.

第5頁 1232778 五、發明說明(2) 四六號『單片式晶 民國九十二年五月 四^---^四號’請參 晶片之入口 E 1及 液,並於裝置本體 F 2 ’並利用滾輪 F 2轉動,使晶片 對上滾輪F 1及_ ,然該清洗裝置E 1 、晶片或電子零 時,只清洗晶 零件的極腳夾 2、晶片及電子零 片或電子零件 腳,造成不良 上述習用晶片 晶片或電子零件, 業者所亟欲研究、 【發明内容】 片清洗裝置 一曰之專利 閱第九圖所 出口 E 2, E中設有一 驅動系統驅 由裝置本體 對下滾輪F 於使用時則 件在受到一 片或電子零 縫間,則無 件具有複數 清洗時,容 品率提局。 清洗裝置於 仍有待改善 改良之方向 』之發 公報,示,其 且於裝 對上滚 動該對 E之入 2清洗 具有諸 對上滚 件之表 法完全 細小極 易損及 清洗電 ,即為 所在。 明專利 申請案 係於裝 置本體 輪F 1 上滾輪 口 E 1 ’再由 多缺失 輪、一 面,對 洗淨。 腳,俾 晶片或 子零件 本發明 案,係公告於 號第九 置本體 一一〇 E設有 E内可儲存溶 及一對下滚輪 F 1及 進入後 出口 E 2輸出 ’如: 對下滾 於晶片 下滚輪 ’經一 輪清洗 或電子 當滾輪夾持 電子零件之極 B曰 時,容易損傷 人與從事此行 為達成上述目的及功效,本發明所採用之技術裝置及 其構造,茲繪圖就本發明之較佳實施例詳加說明其特徵與 功能如下,俾利完全瞭解。 ^ 本發明之主要目的為在於清洗裝置係包括容置座體、 密閉裝置、洗淨裝置及烘乾裝置所組成,該密閉裝置於内Page 5 1232778 V. Description of the invention (2) No. 4 and 6 "Single-chip type crystal May 4, 1992 ^ --- ^ No. 4" Please refer to the inlet E 1 and liquid of the wafer, and put it in the device body F 2 'and use the roller F 2 to rotate the wafer to the upper rollers F 1 and _. However, when the cleaning device E 1, the wafer or the electronic zero is used, only the pin clips 2 of the crystal part and the electronic part or the electronic part are cleaned. Feet, causing the above-mentioned conventional wafers or electronic components to be badly studied by the industry. [Summary of the Invention] A patent for a sheet cleaning device is exported at E 2 of the ninth figure, and a drive system is installed in the E to drive the device down. When the roller F is used, when the parts are subjected to a piece or an electronic zero slot, when no parts have multiple cleaning, the capacity rate is improved. "The cleaning device is still in the direction of improvement and improvement." It is shown that it also rolls the pair of E on the mounting pair. 2 The cleaning method with the pairs of rolling elements is completely small and extremely vulnerable and cleans the electricity. For where. The Ming patent application is based on the device body wheel F 1 and the upper roller port E 1 ′, which is then cleaned by multiple missing wheels and one side. The invention of the foot, the wafer or the sub-parts is announced in the ninth home body 110E, which is provided with an E storage unit and a pair of lower rollers F 1 and an exit E 2 after entering the output, such as: The roller under the wafer is cleaned by one round or electronically. When the roller holds the pole B of the electronic part, it is easy to damage people and engage in this behavior to achieve the above-mentioned purpose and effect. The technical device and structure adopted by the present invention are drawn here. The preferred embodiment of the invention will be described in detail in terms of its features and functions as follows. ^ The main purpose of the present invention is that the cleaning device is composed of a accommodating base, a sealing device, a cleaning device and a drying device.

第6頁 1232778 五、發明說明(3) 部呈密閉狀之收納空間供容置座體縱向置入 則於呈中空貫通狀之容置空 谷置座體 容置空間供垂直式置入裝設有並利用 =置外侧設置有洗淨裝置及烘乾裝置1可利用密閉 擠壓清洗垂直狀治具模組上之電 1;;;=以巧循” 烘乾,俾達徹底清洗電子零件之功效。 同循衣 【實施方式】 侧視=第一、二、三、四、五圖所示,係為本發明之 解容置座體之立體外觀圖、容置座體之立體分 外:圖IS之底Ϊ立體外觀圖、治具模組之底部立體 容置座俨!圖中可以清楚看*,本發明之清洗裝置為包括 :置二、㈣裝置2、洗淨裝置3及烘乾裝置4所組 門1 "ft置座體1為於内部設有容置空間1 1 ,且容置空 ‘可縱白ΐ則設有複數透孔111’而該容置空間1 1内 ί 台具;組12,且治具模組12底部呈鏤空 區間1 2 W °卩則设有複數分隔區間1 2 1 ,則複數分隔 隔區間可分別供治具1 3呈垂直狀插人,該複數分 。之間隔為大於治具13之厚度。 。該达、閉裝置2内部為具有可呈密閉狀之收納空間2 1 η y 裝置3為设置有抽水馬達 1係連接有於、、,^ 力輸适官3 2及回收管3 3 且抽水馬達3Page 6 1232778 V. Description of the invention (3) The closed storage space is used for the vertical placement of the housing, and the hollow valley-shaped housing is used for the vertical placement. A cleaning device and a drying device 1 are arranged on the outside, and the electricity 1 on the vertical jig module can be cleaned by hermetic squeeze; ;; [Implementation method] Side view = The first, second, third, fourth, and fifth figures are the three-dimensional appearance diagrams of the accommodating seat of the present invention, and the three-dimensional appearance of the accommodating seat: The three-dimensional appearance of the bottom of the IS and the three-dimensional receiving seat of the bottom of the fixture module! It can be clearly seen in the figure * that the cleaning device of the present invention includes: the second, the second device, the cleaning device 3 and the drying device. 4 sets of doors 1 " ft housing base 1 is provided with an accommodation space 1 1 in the interior, and the accommodation space 'can be vertical white is provided with a plurality of through holes 111', and the accommodation space 1 1 12; and the bottom of the fixture module 12 is a hollow section 1 2 W ° 卩 is provided with a plurality of divided sections 1 2 1, then a plurality of divided sections The jigs 1 and 3 are inserted vertically, and the plural points are separated. The interval is greater than the thickness of the jigs 13. The inside and the closing device 2 has a storage space 2 1 η y which can be closed. The device 3 is A pumping motor 1 is provided, which is connected to a pumping motor 3 2 and a recovery pipe 3 3 and a pumping motor 3

1232778 五、發明說明(4) 該烘乾裝置4則設 1為連設有導引管4 2 上述構件之容置座 1 3縱向插入治具模組 具模組1 2以垂直狀置 且使容置座體i以縱向 部,則可藉由密閉裝置 馬達3 1進行抽水注入 空間2 1内垂直狀排列 清洗作業,俾於清洗完 間2 1内部之水抽出, 乾裝置4以高壓風扇4 循環烘乾作業,而可將 件烘乾,使清洗電子零 徹底將電子零件上之辨 而該洗淨裝置3以 2注入密閉裝置2之收 注滿清洗水後,再以抽 空間2 1内之清洗水, 1中,而使水流在收納 水流擠壓之方式進行循 徹底清洗,而可將電子 電子零件上殘留髒物或 且洗淨装置3為於 置有南壓風 及連接管4 體1 ,為以 1 2的分隔 入容置座體 置入密閉裝 2外部連設 收納空間2 之治具1 3 成後,再由 然後利用密 1吹送風力 治具模組1 件之工作快 物塵屑清除 抽水馬達3 納空間2 1 水馬達3 1 且由輸送管 空間2 1内 環清洗作業 零件極腳間 塵屑。 輸送管3 2 扇4 1 3 〇 裝設有 區間1 1之容 置2之 的洗淨 1中, 上的電 抽水馬 閉裝置 進入收 2治具 速一次 〇 1抽水 ,俾於 以回收 3 2再 產生循 ,俾將 隔處完 ’且兩壓風扇4 電子零 2 1内 置空間 收納空 裝置3 藉由水 子零件 達3 1 2外部 納空間 1 3上 作業完 件之治具 ’再將治 1 1内, 間2 1内 利用抽水 流將收納 進行循環 將收納空 連設的烘 2 1進行 之電子零 成,同時 ’且由輸送管3 收納空間2 1中 管3 3抽取收納 注入收納空間2 環擠壓,則利用 垂直狀電子零件 全洗淨,避免在 上設有過濾器3 21232778 V. Description of the invention (4) The drying device 4 is set as 1 with a guide tube 4 2 as the receiving seat of the above-mentioned components 1 3 is inserted vertically into the fixture module module 1 2 If the housing body i is located in the longitudinal part, the sealing device motor 31 can be used to pump water into the space 21 and the cleaning operation can be arranged vertically, and the water can be sucked out in the cleaning room 21. The dry device 4 is a high-pressure fan 4. The drying operation can be circulated, and the parts can be dried, so that the cleaning electronics can completely identify the electronic parts, and the cleaning device 3 is filled with the sealing device 2 with 2 and filled with cleaning water, and then the space is pumped into the space 2 1 In the cleaning water, 1, the water flow is thoroughly washed in a way that the water flow is squeezed in the storage water flow, and the dirt or the cleaning device 3 can be placed on the electronic device. 1, for the 12 to separate the housing into the closed installation 2 externally connected with the storage space 2 fixtures 1 30%, and then use the 1 to blow the wind fixture module 1 work fast Dust removal suction motor 3 holding space 2 1 water motor 3 1 and duct space 2 1 Parts cleaning between jobs ring electrode pin dust. Conveying pipe 3 2 Fan 4 1 3 〇 Installed in the washing 1 of the compartment 2 of the compartment 1 1, the electric pumping horse closing device on it enters the receiving fixture 2 and pumps it once, and pumps it to recover 3 2 Regenerate the cycle, I will finish the partition ', and the two pressure fans 4 electronic zero 2 1 built-in space to store the empty device 3 by the water parts 3 1 2 external accommodation space 1 3 the finished fixture on the work, and then the rule In 1 1 and in 2 1, the storage space is circulated by pumping flow. The electronic storage of the storage space 2 which is connected continuously is zero, and at the same time, the conveying pipe 3 storage space 2 1 middle pipe 3 3 extracts the storage and injects the storage space. 2 ring squeeze, then use vertical electronic parts to fully clean, avoid having a filter on it 3 2

第8頁 1232778 五、發明說明(5) 而回收管3 3上則可設有淨水池3 3 1及過濾器3 3 2, 俾於抽水馬達3 1利用輸送管3 2、回收管3 3輸送洗淨 水時,可藉由過濾器3 2 1、3 3 2及淨水池3 3 1進行 過濾清潔,以將水中所含帶之髒物或塵屑、雜質等予以過 濾;且洗淨裝置3所使用之洗淨水可加入清潔用洗滌劑或 清潔劑,而使清洗過程更為清潔。 而烘乾裝置4則於導引管4 2上設有過濾器4 2丄, 且連接管4 3上亦設有過濾器4 3 1 ,即可在烘乾裝置* 之高壓風扇41抽風時,經由過濾器421、431將空 氣中之灰塵、雜質等過濾,俾產生乾淨之空氣進入收納$ 間2 1内,以進行循環烘乾作業。 二 再請參閱第六、七圖所示,係為本發明之較佳實施例 侧視剖面圖、另一實施例之側視剖面圖,本發明之清洗梦 置可利用不同的密閉裝置2分別連設洗淨裝置3、供乾^ 段4,且將容置座體1内之治具模組1 2以治具1 ^ ^讯 電子零件後,可將容置座體1先縱向置入密閉裝置 納空間2 1内,該密閉裝置2係連設有洗淨裝置3 , 、^ 利用洗淨裝置3以抽水馬達3 1抽水由輸送管3 2、、主 了 納空間2 1 ,同時再由抽水馬達3 χ利用回收管3 ' ^收 收納空間2 1内的水,使水流在收納空間2 i内 2取 ,並將治具1 3上之電子零件洗淨,且以抽水馬達;^壓 乾收納空間2 1内之洗淨水,則可將容置座體i由^ 1抽 置2取出後,重新將容置座體i縱向置入另一密閉裝 之收納空間2 1内,而此密閉裝置2則連設有烘乾^置2Page 8 1232778 V. Description of the invention (5) The recovery pipe 3 3 can be provided with a clean water tank 3 3 1 and a filter 3 3 2, which is connected to the pumping motor 3 1 using a conveying pipe 3 2 and a recovery pipe 3 3 When conveying the washing water, it can be filtered and cleaned through the filters 3 2 1, 3 3 2 and the clean water pool 3 3 1 to filter the dirt, dust, impurities, etc. contained in the water; The washing water used in the device 3 can be added with a cleaning detergent or a cleaning agent to make the cleaning process more clean. The drying device 4 is provided with a filter 4 2 丄 on the guide pipe 4 2, and a filter 4 3 1 is also provided on the connecting pipe 4 3. When the high-pressure fan 41 of the drying device * draws air, Dust and impurities in the air are filtered through the filters 421 and 431, and clean air is generated to enter the storage room 21 for circular drying operation. Secondly, please refer to the sixth and seventh figures, which are side sectional views of a preferred embodiment of the present invention, and a side sectional view of another embodiment. The cleaning device of the present invention can use different sealing devices 2 respectively After the cleaning device 3 and the drying section 4 are connected, and the fixture module 12 in the holder 1 is accommodated with the fixture 1 ^^ electronic components, the holder 1 can be placed longitudinally first. In the enclosed device receiving space 21, the enclosed device 2 is connected with a washing device 3, and the washing device 3 uses a pumping motor 3 1 to pump water from the conveying pipe 3 2, and the main receiving space 2 1, and then The water in the storage space 2 1 is collected by the pumping motor 3 χ using the recovery pipe 3 ′, so that the water flows in the storage space 2 i 2 and the electronic parts on the fixture 13 are washed, and the pumping motor is used; ^ After the washing water in the storage space 21 is compressed and dried, the receiving body i can be pulled out from ^ 1 and taken out, and the receiving body i can be longitudinally placed in another closed storage space 2 1. And the airtight device 2 is provided with a drying device 2

1232778 五、發明說明(6) :::1烘乾裝置4以高壓風扇4丄將高壓 42輸送入密閉裝u的收納空 =官 ”J用連接管43將收納空間21内之氣=壓:; =在收納空間2 !内循環,而將治具"上之電子零: 物 本發明之清洗裝置,為可將電子零件上附著之 一塵屑徹底洗淨,實際使用時為具有以下優點,如: 一、 治具裝設電子零件€ ’為以垂直狀插1232778 V. Description of the invention (6) ::: 1 The drying device 4 sends the high pressure 42 to the storage space of the closed installation with a high pressure fan 4 装. The connection pipe 43 will use the connecting pipe 43 to compress the gas in the storage space 21 = pressure: ; = Circulate in the storage space 2 !, and the electronic zero on the fixture: The cleaning device of the present invention can thoroughly clean one of the dust particles attached to the electronic parts, and has the following advantages in actual use Such as: I. Fixtures are equipped with electronic parts.

納空間内,㈣用循環水流以擠昼方式將電子零K 二、 淨,且再以高壓風進行烘乾,洗淨效果佳。 在閉裝置以水流清洗電子零件,不易傷及電子零件上 、:小的極腳,可保持電子零件之完整,不易形成不良 口 α 0 此卽2 &上所述僅為本發明之較佳實施例而已,並非因 二,本發明之專利冑圍,&舉凡運用本發明說明書及 :土:谷所為之簡易修飾及等效結構變應同 於本發明之專利範圍内,合予陳明。 能達發明上述之清洗裝置於使用日夺,為確實 ,$符二ί目的,故本發明誠為一實用性優異之發明 保障發明人辛苦之發明’倘若釣局 ’實感公便。 各來函札不,發明人定當竭力配合 1232778 圖式簡單說明 [ 圖 式 簡 單 說 明 ] 第 _丨丨— 圖 係 為 本發 明 之 側 視 剖 面 圖 〇 第 二 圖 係 為 本發 明 容 置 座 體 之 立 體 外 觀 圖 〇 第 二 圖 係 為 本發 明 容 置 座 體 之 立 體 分 解 圖 〇 第 四 圖 係 為 本發 明 容 置 座 體 之 底 部 立 體 外 觀 圖 第 五 圖 係 為 本發 明 治 具 模 組 之 底 部 立 體 外 觀 圖 第 六 圖 係 為 本發 明 之 較 佳 實 施 例 側 視 剖 面 圖 〇 第 七 圖 係 為 本發 明 另 一 實 施 例 之 側 視 剖 面 圖 0 第 八 圖 係 為 習知 清 洗 裝 置 之 側 視 剖 面 圖 0 第 九 圖 係 為 另一 種 習 知 清 洗 裝 置 之 側 視 剖 面 圖 [ 主 要 元 件 符 號 說 明In the receiving space, the electronic zero K is cleaned with a circulating water stream in a daytime mode, and then dried by high-pressure air, which has a good cleaning effect. In the closed device, the electronic parts are cleaned by water flow, which is not easy to damage the electronic parts. The small poles can keep the integrity of the electronic parts and prevent the formation of bad openings. Α 0 This is only the best of the present invention. The examples are only, not because of the second, the patent of the present invention, and the use of the description of the present invention and the simple modification and equivalent structural modification of the soil: valley are within the scope of the patent of the present invention, and are shared by Chen Ming . Nengda invented the above-mentioned cleaning device on the day of use. For the purpose of authenticity, the present invention is an invention with excellent practicability. The invention of hard work of the inventor is guaranteed. The correspondence is not, the inventor must try his best to cooperate with the 1232778 diagram. The diagram is a side cross-sectional view of the invention. The second diagram is a three-dimensional view of the housing of the invention. Appearance view. The second view is an exploded perspective view of the receiving seat of the present invention. The fourth view is the bottom perspective view of the receiving seat of the present invention. The fifth view is the bottom three-dimensional appearance of the fixture module of the present invention. Figure 6 is a side sectional view of a preferred embodiment of the present invention. Figure 7 is a side sectional view of another embodiment of the present invention. Figure 8 is a side sectional view of a conventional cleaning device. The ninth figure is a side sectional view of another conventional cleaning device

1、 容置座體 1 1 、容置空間 1 2 1 、分隔區間 1 1 1、透孔 1 3、治具 1 2、治具模組1. Receiving base 1 1. Receiving space 1 2 1. Dividing section 1 1 1. Through hole 1 3. Fixture 1 2. Fixture module

2、 密閉裝置 2 1 、收納空間 3、 洗淨裝置 3 1、抽水馬達 3 3、回收管2. Airtight device 2 1. Storage space 3. Washing device 3 1. Pumping motor 3 3. Recovery tube

第11頁 1232778 圖式簡單說明 3 2、輸送管 2 1 、過濾器 3 3 1、淨水池 3 3 2、過濾器Page 11 1232778 Simple illustration of the diagram 3 2. Conveying pipe 2 1. Filter 3 3 1. Clean water tank 3 3 2. Filter

第12頁Page 12

Claims (1)

1232778 六 2 3 、申請專利範圍 1 f q洗裝置’尤指使用於清洗電子零件且可同時予 t ^ Ϊ之清洗裝置,該清洗裝置為包括有容置座體、 =洗淨裝置、烘乾裝置等所組成,其中: 座體内部係設有可縱向收納治具模組之容置空 内部為= :為設有複數透孔,而治具模組 複數分隔區間之垂直置入之分隔區間,且使 ㈣L间之間隔為大於治具之厚 該迸閉裝置内部為具有丄 空間,而密閉#署冰Γ 置體向置入之收納 清洗作業之洗淨裝置,並 間進仃循裱 供收納空間進行循f # f 閉裝置外部另設有可提 如申睛專利範圍第i項所述之、,主 置 裝置為設有可循環送水之馬達:且:*其中該洗淨 於輸送管及回收管。 馬達為分別連接 如申請專利範圍第1項张、+、 、士 裝置為設有可循環抽風、2 = β洗^置’其中該烘乾 連接於導引管及連接管。、$之風車,並以風車分別 第13頁1232778 6 2 3, patent application scope 1 fq washing device 'especially a cleaning device used for cleaning electronic parts and can be simultaneously t ^ Ϊ, the cleaning device includes a containing seat, = washing device, drying device And other components, among which: the inside of the seat body is provided with a space that can accommodate the jig module longitudinally. The interior is =: a plurality of through holes are provided, and the jig module has a plurality of vertical intervals. And the interval between the ㈣L is larger than the thickness of the fixture. The inside of the 迸 closing device is provided with a 闭 space, and the closed # 部 冰 Γ is placed in the direction of the washing device for storage and cleaning operations. The space is cycled f # f The closed device is additionally provided with an external motor which can be used as described in item i of the patent application. The main device is a motor with recirculating water supply: and: * where the washing is carried out in the conveying pipe and Recycling tube. The motors are connected separately, such as the first patent application, Zhang, +,, and taxi. The device is equipped with recirculating air extraction, 2 = β washing, and the drying is connected to the guide tube and the connection tube. , $, Windmill, and windmill respectively Page 13
TW93127743A 2004-09-14 2004-09-14 Cleaning device TWI232778B (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112588692A (en) * 2020-12-23 2021-04-02 绍兴同芯成集成电路有限公司 Ultra-thin wafer belt cleaning device of high hydrophobicity
TWI813702B (en) * 2019-05-20 2023-09-01 鴻海精密工業股份有限公司 Production fixture cleaning management method,device and computer readable storage medium

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI595934B (en) 2014-04-09 2017-08-21 大同股份有限公司 Cleaning apparatus

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI813702B (en) * 2019-05-20 2023-09-01 鴻海精密工業股份有限公司 Production fixture cleaning management method,device and computer readable storage medium
CN112588692A (en) * 2020-12-23 2021-04-02 绍兴同芯成集成电路有限公司 Ultra-thin wafer belt cleaning device of high hydrophobicity

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