TWI232529B - Measuring method of shear bonding force between packaging material and mold surface - Google Patents

Measuring method of shear bonding force between packaging material and mold surface Download PDF

Info

Publication number
TWI232529B
TWI232529B TW92134000A TW92134000A TWI232529B TW I232529 B TWI232529 B TW I232529B TW 92134000 A TW92134000 A TW 92134000A TW 92134000 A TW92134000 A TW 92134000A TW I232529 B TWI232529 B TW I232529B
Authority
TW
Taiwan
Prior art keywords
mold
force
shear
bonding force
detection
Prior art date
Application number
TW92134000A
Other languages
Chinese (zh)
Other versions
TW200520127A (en
Inventor
Sheng-Jie Huang
Shiang-Jie Jang
Original Assignee
Sheng-Jie Huang
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sheng-Jie Huang filed Critical Sheng-Jie Huang
Priority to TW92134000A priority Critical patent/TWI232529B/en
Application granted granted Critical
Publication of TWI232529B publication Critical patent/TWI232529B/en
Publication of TW200520127A publication Critical patent/TW200520127A/en

Links

Landscapes

  • Investigating Strength Of Materials By Application Of Mechanical Stress (AREA)
  • Moulds For Moulding Plastics Or The Like (AREA)

Abstract

The present invention is related to a kind of measuring method of shear bonding force between packaging material and mold surface, a method available for measuring shear bonding force between the mold surface and the product. The data generated from the mentioned method of bonding force between the material and the material surface is for the related industrial engineers' design or fabrication references. This measuring method of shear bonding force of packaging material is suitable for use in the measurement of bonding force for either metal material (such as steel, iron, copper, aluminum, magnesium, titanium, lead, and tin), non-metal material (such as ceramic, polymer, fiber, plastic, and electronic material), or semiconductor material (element semiconductor, and compound semiconductor).

Description

1232529 修正 案號 92134000 五、發明說明(1) 【發明所屬之技術領域】 2明係為一種封裝膠料與模具表面之剪向黏著力之 =,二,,指一種可方便檢測出材料界面黏著力大小之 而蔣扯藉此里測出各材料表面界面所產生的黏著力數據, 而提供產製者於設計上、製造上一良好之參考指標數據 【先前 隨 的蓬勃 「輕、 不斷推 功能。 生許多 生。例 著的現 造成封 g (SEMI ( 技術】 著1C產品需求量的日益提昇,推動了電子封裝產業 ,展:而電子製造技術的不斷發展演進,在Ic晶片、 薄、短、小、高功能」的要求下,亦使得封裝技術 陳出新,以符合電子產品之需要並進而充分發揮其 而於電子封裝製程中,材料與材料之間的界面會產 黏著現象,而黏著力大小可能會導致許多問題4產 如封膠材料在熟化成型過程中會與模具表面產生黏 象’這種現象會影響到脫膜作業過程,進而可能會 膠失敗、生產良率降低與可靠度不佳等結果。 前針對剪向黏著強度的檢測方式在半導體測試標準 -Standard )中有三種方式,分別是: 1 )剪力測試法(S h e a r M e t h 〇 d ) 2 )拉力測試法(puli Method ) 3)三點彎曲測試法(Three_P〇int: Bending1232529 Amendment No. 92134000 V. Description of the invention (1) [Technical field to which the invention belongs] 2 Ming is a kind of shear adhesive force between the sealing compound and the surface of the mold =, two, refers to a type that can easily detect the interface adhesion of the material The strength of the force is used to measure the adhesive force data generated by the surface interface of each material, and to provide manufacturers with a good reference index data in design and manufacturing [the previous booming "light, continuous push function There are many births. The example of the current situation has resulted in the increasing demand for 1C products, which has promoted the electronic packaging industry, and the continuous development and evolution of electronic manufacturing technology, in the IC chip, thin, short "Small, small, high-function" requirements have also made the packaging technology new, in order to meet the needs of electronic products and then give full play to it. In the electronic packaging process, the interface between materials will produce adhesion phenomena, and adhesion The magnitude of the force may cause many problems. 4 Production such as the sealant material will stick to the mold surface during the curing process. This phenomenon will affect the stripping process. There may be results such as glue failure, reduced production yield, and poor reliability. There are three ways of testing the shear adhesive strength in the previous standard: (1) Shear force test method ( S hear M eth 〇d) 2) Puli Method 3) Three-point bending test method (Three_P〇int: Bending

Method ) 但 出模穴 此所測Method) but out of the cavity

第5頁 由於此三種實驗之量測方式都是將成型後之成品取 後再進行測試,所以對量測界面已經受到影響,因 得的實驗數據有待商碹 I232529Page 5 Because the measurement methods of these three experiments are to take the finished product and test it again, the measurement interface has been affected, and the experimental data obtained is yet to be discussed. I232529

1發明内容】 有鑑於此,本發明係針 表面之剪向黏著力之檢測方 之間接觸的剪向黏著力,且 • 之撿測者。 對此缺點研發封裝膠料與模具 法’用來即時量測材料與材料 本發明可因應各種材料黏著力 輪:測 之量 的剪 級成 楔與 力, )將 轉換 參考 及材 本發明係為一種封 方法,針對 測,提供一 向黏著力; ’於材料完 成品完全分 在成品與模 受到一反應 成力量單位 數據讓製造 料選用。 產業界 套量測 其特徵 成充模 離,再 具黏著 ,而該 ,而得 者可藉 裝膠料與模 對材料與材 方法,藉以 在於:藉由 之後,先藉 利用檢測模 面破壞的晴 推力再經由 知該剪向黏 此數據而因 具表面之剪向黏著力之 料界面間的剪向黏著力 量測出材料之間接觸時 模具早元及檢測模組之 由分段脫膜的方式將上 組向成品施加一剪向外 間,力規(Load Cell 分析軟體(LabVI EW ) 著力之大小,以提供一 應設計、製造時的考量1 SUMMARY OF THE INVENTION In view of this, the present invention relates to the shear adhesive force of contact between the testers of shear adhesive force on the surface of a needle, and the tester. To solve this shortcoming, the method of encapsulating compound and mold is used to measure materials and materials in real time. The present invention can respond to various material adhesion wheels: the measured shear level is formed into wedges and forces. A sealing method that provides consistent adhesion for measurement; 'Completely divides the finished product into a finished product and a mold, which reacts to a unit of force data to allow the manufacturing material to be selected. The industrial circle measures its characteristics as filling and separation, and then it has adhesion, and the winner can use the method of installing materials and materials on the material, so that after this, first use the detection of the damage of the mold surface. The clear thrust force then knows the data of the shear direction and the shear adhesion force between the material interface with the shear adhesion force on the surface is used to measure the mold early element and the detection module's delamination when the materials are in contact with each other. The upper group applies a shear to the finished product, and the load cell (Lab VI EW) focuses on the size of the force to provide a consideration when designing and manufacturing.

與斤羑疋,本發明之主要目的即在於:提供一種封裝膠料 邀从二表面之剪向黏著力之檢測方法,以方便檢測出材料 次#料間所產生的剪向黏著力數據的大小,進而提供數據 貝料使產製者可藉由數據推測去預防或解決問題為主要之 發月目的,進而提高加工製程之順暢程度。The main purpose of the present invention is to provide a method for detecting the shear adhesion of the encapsulating compound from the two surfaces, so as to facilitate the detection of the shear adhesion data generated by the material ## , And then provide data materials so that producers can prevent or solve problems through data speculation as the main purpose of the month, thereby improving the smoothness of the processing process.

12325291232529

案號 92134000 五、發明說明(3) 【實施方式】 首先,請配合參閱第一、二 ^ 裝膠料與模具表面之剪向二不’係為本發明之封 觀圖及模具剖視圖,係藉:提供一模法,模具立體外 組2 ;其中: ’、 、/、早疋1及一檢測模 該模具單元1包括有上模i i、 為三板模之設計及脫模4肖i 4 · 、 2、下杈1 3 料孔…,而中模i二:,,1 1上有偏心之進 計。 丄2有杈穴1 2 1與澆道i 2 2之設 該檢測模組2是使測| q y 〇 , 平狀態,隨著下模i 3 置於下模"上呈水 侧邊之適當高度。移動,該檢測棒2 2設置於模具 續請配合第 具表面之剪向黏 模及投料就緒後 溶化的原料 1 2 1 ’成型成 於加壓灌膠 器(如伺服馬達 向上位移一小段 行脫模(如第四 脫模銷1 4 上表面為止(如 於脫模銷1 三〜七圖所 著力之檢測 ,開始進行 由進料孔1 品a為布丁 成型固化後 、油壓缸或 距離’使成 圖所示); 向下位移一 第五圖所示 4就定位後 示,係為本發明封裝膠料與模 方法之檢測步驟一〜五,當合 灌膠成型作業; σ 1 1經由澆道1 2 2進入模穴 狀之設計(如第三圖所示); ,第一階段脫模開始。由致動 汽油增壓缸)帶動脫模銷丄4 a之上表面與脫模銷i 4先 α 小段距離,直到壓住成品 a之Case No. 92134000 V. Description of the invention (3) [Embodiment] First, please refer to the first and the second ^ The shear direction of the rubber material and the mold surface is not the seal view of the present invention and the sectional view of the mold. : Provide a mold method, mold three-dimensional outer group 2; Among them: ',, /, early die 1 and a detection mold The mold unit 1 includes an upper mold ii, a three-plate mold design and demolding 4 Xiao i 4 ·, 2. Lower hole 1 3 feed hole ..., while the middle mold i2: ,, 1 1 has eccentricity.丄 2 There are branches 1 2 1 and runners i 2 2 The detection module 2 is designed to make the measurement | qy 〇, flat state, as the lower mold i 3 is placed on the lower mold " the water side is appropriate height. Move, the detection rod 2 2 is set on the mold. Please continue to cooperate with the first surface shear mold and the melted raw material 1 2 1 'after molding is ready to be formed in the pressurized glue dispenser (such as the servo motor is moved upward for a short period of time. Mold (such as the upper surface of the fourth release pin 1 4) (such as the detection of the force of the three to seven pictures of the release pin 1, starting from the feed hole 1 product a after the pudding is cured, the hydraulic cylinder or the distance ' Make the figure shown); Displace downwards as shown in Figure 5 and Figure 4 after positioning. It is the detection steps 1 to 5 of the encapsulation compound and mold method of the present invention, when the potting molding operation is performed; σ 1 1 via The runner 1 2 2 enters the cavity design (as shown in the third figure); the first stage of demolding starts. The upper surface of the demolding pin 丄 4 a and the demolding pin are driven by actuating the gasoline booster cylinder. i 4 first α a small distance, until the finished product a

段脫模開始。由致Segment demolding begins. Sincerely

五、發明說明(4) 器(如伺服馬達、油壓缸或汽油增壓缸)帶動上 中模1 2向上位移一段距離,此時脫模銷i 4仍$ 2 品a之上表面,使成品a與試片2 i之間的黏面、不2成 壞(如第六圖所示); 者面不破破 脫模銷1 4向上位移一小段距離,使之完全 a之上表®,檢測模組2之致動器(如伺服馬達、:’^ 或汽油增壓缸)卩極慢之速度帶動檢測棒2 2 推缸 將測量成品a往剪向推動,並進行黏著力之測量作而 該黏著界面受到推力而破壞情況發生在〇· 〇1〜 秒 間(如第七圖所示)。 心的_ 在成品a與檢測模組2的黏著面破壞的瞬間,檢 組2中的力規(Load Cel 1 )將承受到一壓力,而該壓力、 係來自於檢測模組2與成品a之間之脫模阻力,也就模具 表面與成品a之間的剪向黏著力,而力規所輸出的訊號為 電壓值,,經由類比數位轉換器及分析軟體(LabvIEW)' 轉換成力ϊ單位,再將所量測到的力量除以量測面積即為 單位面積所承受之力,由此將可推算出剪向黏著力之大小 於置測時’檢測棒2 2的速度必須控制於2mm/mi η〜 10mm/min之間,且檢測棒2 2在推動試片時必須平行貼近 黏著界面’因此檢測棒2 2推動位置與黏著界面距離必須 低於1 m m。 1232529 _案號 92l34〇nn 五、發明說明(5) 知觀上述,我們 ’其分敘述如下: 1 ·本發明封裝 方法’係可精確的量 小,使產製者可確實 2 ·本發明封裝 方法’可藉由所得的 界面間剪向黏著力的 可確保加工製程更加 生。 修正 可以知道本發明具有下相述之優點 膠料與模具表面之剪向黏著力之檢 :f材料與材料界面的剪向黏著力大 的萃握材料性質。 :::模:表面之剪向黏著力之檢測 :向黏者力數據進而得知材料與材料 大小,來預防或解決製程上的問題, 的流暢’增加生產量及降低不良品產 生產:Ϊ 發明之特徵的確能提供-種可有效節劣 著力之檢物,以其整體之組合:特面=向黏 法定要件,要:土:公開,誠已符合專利法之 友疋要仵犮依法提出發明專利申請。 c 此者,僅為本發明之較佳實施例,當不能以 明專利之涵蓋範圍内。 飾白應仍屬本發 1232529 案號 92134000 年 月 曰 修正 圖式簡單說明 有 關 本發明 為 達 上 述 g 的 所 採 用 之 技 術 手 段 及 其 他 功效, 茲 舉較佳 可 行 實 施 例 並 配 合 圖 式 說 明 如 下 俾 使 審查委 員 更易於 瞭 解 本 發 明 之 產 生 • 圖式之 簡 單 說 明 第 一一 圖 係 本 發 明 封 裝 膠 料 與 模 具 表 面 之 剪 向 黏 著 力 之 檢 測 方 法 之 模 具 立 體 外 觀 圖 〇 第 二 圖 係 本 發 明 封 裝 膠 料 與 模 具 表 面 之 剪 向 黏 著 力 之 檢 測 方 法 之 模 具 剖 視 圖 〇 第 二 圖 係 本發 明 封 裝 膠 料 與 模 具 表 面 之 剪 向 黏 著 力 之 檢 測 方 法 之 檢 測 步 驟 一 〇 第 四 圖 係 本 發 明 封 裝 膠 料 與 模 具 表 面 之 剪 向 黏 著 力 之 檢 測 方 法 之 檢 測 步 驟 二 〇 第 五 圖 係 本 發 明 封 裝 膠 料 與 模 具 表 面 之 剪 向 黏 著 力 之 檢 測 方 法 之 檢 測 步 驟 二 〇 第 六 圖 係 本 發 明 封 裝 膠 料 與 模 具 表 面 之 剪 向 黏 著 力 之 檢 測 方 法 之 檢 測 步 驟 四 〇 第 七 圖 係 本 發 明 封 裝 膠 料 與 模 具 表 面 之 剪 向 黏 著 力 之 檢 測 方 法 之 檢 測 步 驟 五 〇 圖號之 簡 單 說 明 1 模 具 單 元 1 1 上 模 1 1 1 進 料 孔 1 2 中 模 1 2 1 模 穴 1 2 2 澆 道V. Description of the invention (4) A device (such as a servo motor, hydraulic cylinder or gasoline booster cylinder) drives the upper die 12 to move upward a certain distance, at this time the demolding pin i 4 is still $ 2 above the top surface of the product a, so that The adhesive surface between the finished product a and the test piece 2 i is not damaged (as shown in the sixth figure); the surface does not break the ejector pin 14 and is shifted up a short distance to make it completely a. The actuator of the detection module 2 (such as a servo motor, '^ or a gasoline booster cylinder) 卩 drives the detection rod 2 at a very slow speed. 2 The pushing cylinder pushes the measurement product a in the shear direction, and performs an adhesive force measurement. However, the adhesion interface was damaged by thrust in the range of 0.001 ~ second (as shown in the seventh figure). Heart_ At the moment when the adhesive surface of the finished product a and the detection module 2 is broken, the force gauge (Load Cel 1) in the inspection group 2 will be subjected to a pressure, which is derived from the detection module 2 and the finished product a The demolding resistance between them is also the shear adhesive force between the mold surface and the finished product a, and the signal output by the force gauge is the voltage value, which is converted into force by an analog digital converter and analysis software (LabvIEW) ' Unit, and then divide the measured force by the measured area to obtain the force per unit area. From this, the magnitude of the shear adhesive force can be calculated during the measurement. The speed of the detection rod 2 must be controlled at 2mm / mi η ~ 10mm / min, and the test rod 22 must be close to the adhesive interface in parallel when pushing the test piece. Therefore, the distance between the push position of the test rod 22 and the adhesive interface must be less than 1 mm. 1232529 _ Case No. 92l34〇nn V. Description of the invention (5) As mentioned above, we're divided into the following descriptions: 1. The packaging method of the present invention can be precise and small, so that the manufacturer can be sure. 2 The packaging of the present invention The method 'can ensure the production process by using the obtained shear adhesion between the interfaces. Correction It can be known that the present invention has the advantages described below. Inspection of shear adhesive force between the rubber and the mold surface: f. Properties of the extraction grip material with large shear adhesive force at the material-material interface. ::: Die: Detecting the shear adhesion of the surface: The data of the adhesive force can be used to learn the material and the size of the material to prevent or solve problems in the manufacturing process. The characteristics of the invention can indeed provide a kind of effective test object that can effectively reduce the inferiority, with its overall combination: special surface = mandatory requirements, soil: public, since it has been in line with the law of the Friends of the Patent Law. Invention patent application. c This is only a preferred embodiment of the present invention, and should not be covered by the patent. The white decoration should still belong to the present invention. 1232529 Case No. 92134000 Revised diagrams Briefly explain the technical means and other effects adopted by the present invention to achieve the above g. The following are the preferred and feasible embodiments and the diagrams. To make it easier for the reviewers to understand the production of the present invention. • Brief description of the drawings. The first diagram is the three-dimensional appearance of the mold for the method of detecting the shear adhesion between the sealing compound and the mold surface of the invention. The second diagram is the package of the invention. Sectional view of the mold for the method of detecting the shear adhesive force between the rubber material and the mold surface. The second image is the detection step of the method for detecting the shear adhesive force of the packaging rubber material and the mold surface of the present invention. The fourth image is the packaging adhesive of the present invention. Detection step of the method for detecting the shear adhesion between the material and the mold surface The fifth diagram is the detection step of the method for detecting the shear adhesion of the sealing compound and the mold surface of the present invention. The sixth diagram is the detection step of the method for detecting the shear adhesion of the sealing compound and the mold surface of the present invention. The seventh diagram is the detection step of the method for detecting the shear adhesion between the sealing compound and the mold surface of the present invention. 50. Simple description of the drawing number. 1 Mold unit 1 1 Upper mold 1 1 1 Feed hole 1 2 Middle mold 1 2 1 Mold cavity 1 2 2 runner

第ίο頁 1232529 案號92134000 年月日 修正 圖式簡單說明 1 3 下模 2 檢測模組 2 2 檢測棒 脫模銷 試片 成品Page ίο 1232529 Case No. 92134000 Modification of the drawing simple description 1 3 Lower mold 2 Detection module 2 2 Detection rod Demolding pin Test piece Finished product

第11頁Page 11

Claims (1)

1232529 案號 92134000 六、申請專利範圍 1 · 一種封裝膠 法’係猎由提供>^模 該模具單元包括 及脫模銷;該上模上 道之設計; 該檢測模組是使 著下模而移動;該檢 當完成充模後, 全分離,再藉由組設 剪向推力,在成品與 模組中的力規(Load 係來自於測量試片與 與成品之間的剪向黏 ’再經由類比數位轉 力量單位,再將所量 積所承受之力,由此 2 ·如申請專利 面之剪向黏著力之檢 材料(鋼、鐵、銅、 料(陶瓷、聚合物、 料(元素半導體、化 3 ·如申請專利 面之剪向黏著力之檢 速度必須控制於2mm/ 料,模具表面之剪向黏著力之檢測方 具單元及一檢測模組,·其中: 有上模、中模、下模為三板模之設計 有偏心之進料孔,而中模有模穴與洗 測量試片置於下模上呈水平狀態,隨 ’則棒設置於模具側邊之適當高度; 先以分段脫模的方式將上模與成品完 於模具侧邊的檢測模組對成品施予一 測量試片的黏著面破壞的瞬間,檢測 Cell)將承受到一壓力,而該壓力 成品之間之脫模阻力,也就模具表面 著力,而力規所輸出的訊號為電壓值 換器及分析軟體(LabVIEW)轉換成 測到的力量除以量測面積即為單位面 將可推算出剪向黏著力之大小。 範圍第1項所述之封裝膠料與模具表 測方法,其中:該測量試片可為金屬 鋁、鎂、鈦、鉛、錫等)、非金屬材 纖維、塑膠、電子材等)、半導體材 合物半導體等)之其中一種者。 範圍第1項所述之封裝膠料與模具表 測方法,其中:在量測時’檢測棒的 m i η〜1 〇 m m / m i η之間,且檢測棒在推1232529 Case No. 92134000 6. Scope of patent application1. A kind of encapsulation method 'provided by hunting > ^ mold The mold unit includes and release pin; the design of the upper mold on the road; the detection module is the lower mold And move; after the filling is completed, the inspection is completely separated, and then by setting shear thrust, the force gauge in the finished product and the module (Load is derived from measuring the shear adhesion between the test piece and the finished product ' Then, by analogy, the unit of force is converted into the unit of force, and then the measured force is subjected to the force. From this, the material (steel, iron, copper, material (ceramic, polymer, material, etc.) Elemental Semiconductor, Chemical 3 · If the patent application side has a shear adhesion inspection speed of 2mm / material, the mold surface shear adhesion detection unit and a detection module, of which: there are upper mold, The middle mold and the lower mold are three-plate molds with eccentric feed holes, while the middle mold has mold cavities and wash test pieces placed on the lower mold in a horizontal state, and the rod is set at an appropriate height on the side of the mold; First, the upper mold is made into a segmented release. The detection module completed on the side of the mold applies a pressure to the finished product when the adhesive surface of the test piece is broken, and the cell is subjected to a pressure, and the release resistance between the pressure products is also the surface of the mold. The signal output by the force gauge is the voltage value converter and analysis software (LabVIEW) converted into the measured force divided by the measured area to be the unit surface, which can be used to calculate the shear adhesive force. The range is described in item 1 The method of measuring the encapsulation compound and mold, where: the test piece can be metal aluminum, magnesium, titanium, lead, tin, etc.), non-metallic fiber, plastic, electronic materials, etc., semiconductor materials, semiconductors, etc.) One of them. The method for measuring the encapsulating compound and the mold described in the first item of the scope, wherein: during the measurement, the detection rod is between m i η to 100 m m / m i η, and the detection rod is pushed. 第12頁 1232529 案號92134000 年 曰 修正 六、申請專利範圍 動試片時必須平行貼近黏著界面,因此檢測棒推動位置與 黏著界面距離必須低於1 mm。 limiPage 12 1232529 Case No. 92134000 Amendment 6. Scope of patent application The moving test piece must be close to the adhesive interface in parallel, so the distance between the pushing position of the test rod and the adhesive interface must be less than 1 mm. limi
TW92134000A 2003-12-03 2003-12-03 Measuring method of shear bonding force between packaging material and mold surface TWI232529B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW92134000A TWI232529B (en) 2003-12-03 2003-12-03 Measuring method of shear bonding force between packaging material and mold surface

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW92134000A TWI232529B (en) 2003-12-03 2003-12-03 Measuring method of shear bonding force between packaging material and mold surface

Publications (2)

Publication Number Publication Date
TWI232529B true TWI232529B (en) 2005-05-11
TW200520127A TW200520127A (en) 2005-06-16

Family

ID=36320054

Family Applications (1)

Application Number Title Priority Date Filing Date
TW92134000A TWI232529B (en) 2003-12-03 2003-12-03 Measuring method of shear bonding force between packaging material and mold surface

Country Status (1)

Country Link
TW (1) TWI232529B (en)

Also Published As

Publication number Publication date
TW200520127A (en) 2005-06-16

Similar Documents

Publication Publication Date Title
TW200414476A (en) Optical sensor package
JP5065747B2 (en) Semiconductor package manufacturing method and manufacturing apparatus
CN107084661B (en) Structural adhesive curing stress testing device and testing method
TWI290092B (en) Resin casting mold and method of casting resin
TWI232529B (en) Measuring method of shear bonding force between packaging material and mold surface
CN201464348U (en) Adhesive force testing device for casting binder of molding sand
CN102431950A (en) Double-layer MEMS (micro-electro-mechanical systems) device stacked package and production method thereof
JP2010214874A (en) Device and method for forming pattern
WO2004023111A1 (en) Apparatus and method for bonding strength testing
CN1441471A (en) Semiconductor device and its producing and detecting method and equipment
CN108400217A (en) A kind of high efficiency LED chip flip-chip packaged method
JP2010045285A (en) Resin sealing apparatus and resin sealing method
TW208759B (en)
KR102455721B1 (en) A method for evaluating the fluidity of a resin composition, a method for screening a resin composition, and a method for manufacturing a semiconductor device
CN101417304B (en) Method for producing sample-piece mold using cement
JPWO2004052614A1 (en) Manufacturing method of base-integrated rubber
CN209079151U (en) Thin wall type shell gel-injection mould depth chamber Thickness sensitivity tooling
SG180138A1 (en) A process for manufacturing a molded leadframe
JP4042430B2 (en) Method and apparatus for detecting mold release force of molded product
JPS60257528A (en) Mold for semiconductor sealing
TWI221325B (en) Molding apparatus with a pressure sensor for semiconductor package
CN109203399A (en) Thin wall type shell gel-injection mould depth chamber Thickness sensitivity tooling and detection method
JPH09117941A (en) Mold release force measuring device
JP3248462B2 (en) Semiconductor device manufacturing apparatus and semiconductor device manufacturing method
JP2000271674A (en) Method for analyzing internal stress of inside die, and manufacture of model for stress inside die

Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees