1226375 A7 B7 五、發明說明（l ) 本發明係翮於彩色電視機或電腦的彩色顯示裝置用的遮 蔽遮罩（shadow mask)方式、孔柵（aperture gr丨11)方式 等任一方式的陰極射線管都可Μ使用的彩色陰極射線管用 之顏色識別用遮罩。 彩色電視、彩色顯示裝置用的陰極射線管，Κ使電子束 , 照射至指定的螢光體的方式使用顔色選擇用遮罩。顔色選 擇用遮罩上使用了設有多數小孔的金屬板所構成的遮蔽遮 罩，或者是設有多數狹鏠的孔檷。於電腦的彩色顯示裝置 ，有著可Μ顯示高解像度的影像的小間距的陰極射線管。 陰極射線管，在長時間使用時，遮蔽遮罩或是孔檷等顔 色識別用遮罩會因為受到被加速的電子的衝擊而被加熱， 由於熱膨脹而產生應變（s t r a i η )，漸次使電子束照射於螢 光面的位置產生偏移，而使得影像產生色偏。 在此，作為顏色識別用遮罩，被提出取代低碳鋼板，而 改採熱膨腯係數小的鍊合金鋼（invar)等的鎳鐵合金，防 止由於熱膨脹而導致色偏。 然而，鎳合金鋼等的合金，與含碳鋼板相比有著不易蝕 刻出微细孔的問題。 此外，作為顏色識別用遮罩，如在圖1所示的開孔部的 剖面，一般而言，由雙面蝕刻，在顔色識別用遮罩1的電 子線的入射側2與顏色識別用遮罩的顯示面側3，分別形成 小開孔4與大開孔5。而在小開孔與大開孔的交點部6被決 定電子線透過的孔徑。 在蝕刻時，不僅在深度方向進行蝕刻，在橫方向上也同 本紙張尺度過用中國國家標準（CNS)A4規格（210 X 297公釐） (請先閱讀背面之注意事項再填寫本頁)1226375 A7 B7 V. Description of the invention (l) The present invention is a cathode of any method such as a shadow mask method or an aperture gr11 method for a color display device of a color television or a computer. As the color tube, a color recognition mask for a color cathode ray tube can be used. For color televisions and cathode ray tubes for color display devices, a color selection mask is used so that an electron beam is irradiated to a specified phosphor. The color selection mask is a mask made of a metal plate provided with a large number of small holes, or a narrow hole provided with a large number of holes. The color display device for the computer has a small-pitch cathode ray tube that can display high-resolution images. For long-term use of a cathode ray tube, a mask for color recognition, such as a mask or a hole, is heated by the impact of accelerated electrons, and strain (strai η) is generated due to thermal expansion, which gradually causes the electron beam The position irradiated on the fluorescent surface is shifted, and the image is color shifted. Here, as a mask for color recognition, it has been proposed to replace low-carbon steel plates with nickel-iron alloys such as invar, which has a small thermal expansion coefficient, to prevent color deviation due to thermal expansion. However, alloys such as nickel-alloyed steels have a problem that they are less likely to etch fine pores than carbon-containing steels. In addition, as the color recognition mask, as shown in the cross section of the opening portion shown in FIG. A small opening 4 and a large opening 5 are formed on the display surface side 3 of the cover, respectively. On the other hand, at the intersection 6 between the small opening and the large opening, the aperture through which the electron rays pass is determined. When etching, not only etching in the depth direction, but also in the horizontal direction. The paper size has been used in China National Standard (CNS) A4 specification (210 X 297 mm) (Please read the precautions on the back before filling this page)
ϋ -1^ ϋ 一： 口、I ϋ 1B_— i_l I a— ϋ I 經濟部智慧財產局員工消費合作社印製 4 A7ϋ -1 ^ ϋ First: Mouth, I _ 1B_— i_l I a— ϋ I Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 4 A7
經濟部智慧財產局員工消費合作社印S 1226375 _B7 五、發明說明（2 ) 時進行著蝕刻，因為蝕刻的深度越溧向橫方向擴展的直徑 也越大，所以無可避免會形成口徑大的大開孔。 如果口徑大的開孔被形成為較必要的遷大的話，因為從 基材除去大量金屬的緣故，所Μ有顏色識別用遮罩的強度 降低的問題。 特別是隨著彩色陰極射線管的顯示畫面的大型化，顔色 識別用遮罩也大型化，進而，電視或者電腦用的顯示裝置 的製造是Μ世界規模在進行的，陰極射線管或者其構成構 件也是Μ地球規模進行長距雛蓮送。於大型陰極射線管的 長距離運送，有很高的可能性會受到輸送時的震動或者是 落下等大力衝擊，因此被要求可Κ承受輸送時所會受到的 震動等的影響。 陰極射線管受到大力衝擊的話，在穿孔柵等藉由框體保 持的伸展張設型顏色識別構件的場合，因為由上下伸展張 設的緣故，所Κ即使受到衝擊也僅有構件的震動而已引起 變形等的可能性很小，但是如遮蔽遮罩等在陰極射線管的 曲面形狀上施以壓製加工的顔色識別構件的場合，受到大 力衝擊的話，會在中央部的曲面的一部份引起無法回復的 變形。此外，随著大型陰極射線管的顯示畫面越大，陰極 射線管受到如此損傷的機會也跟著越大。在陰極射線管的 表面的曲率半徑增大的陰極射線管，或者是接近平面的陰 極射線管的場合，問題尤其嚴重。 進而，大孔徑的孔的口徑越大，會產生與鄰接的孔橫向 連接的危險，所Μ要縮小開孔間的間距是困難的。 本紙張又度過用中國國家標準（CNS)A4規格（210x297公釐） - 5 - (請先閱讀背面之注意事項再填寫本頁)Printed by the Consumers ’Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs S 1226375 _B7 V. Etching is performed at the time of the invention description (2), because the larger the depth of the etching is, the larger the diameter is in the horizontal direction, so a large opening will inevitably be formed. hole. If a large-diameter opening is formed so that it is necessary to be enlarged, there is a problem that the strength of a color recognition mask is reduced because a large amount of metal is removed from the substrate. In particular, as the display screen of a color cathode ray tube becomes larger, the mask for color recognition has also become larger. Furthermore, the manufacture of a display device for a television or a computer is being carried out on a world scale. The cathode ray tube or its constituent members Long-distance water lily delivery is also performed on the M earth scale. For long-distance transportation of large-scale cathode ray tubes, there is a high possibility that they will be strongly impacted by vibration or drop during transportation, so they are required to be able to withstand the impact of vibration during transportation. When a cathode ray tube is strongly impacted, in the case of a perforated grille, such as a stretched-type color recognition member held by a frame, it is stretched up and down, even if it is impacted, only the vibration of the member is caused. The possibility of deformation and the like is small, but when a color recognition member is pressed on the curved shape of the cathode ray tube such as a shadow mask, if it is strongly impacted, it will cause a failure in a part of the curved surface in the center. Deformation of the reply. In addition, as the display screen of a large cathode ray tube becomes larger, the chance of the cathode ray tube being damaged in this way also increases. The problem is particularly serious in the case of a cathode ray tube with an increased curvature radius on the surface of the cathode ray tube, or a cathode ray tube close to a flat surface. Furthermore, the larger the diameter of a large-diameter hole, the greater the risk of lateral connection with adjacent holes, and it is difficult to reduce the distance between the openings. This paper has passed the Chinese National Standard (CNS) A4 specification (210x297 mm)-5-(Please read the precautions on the back before filling this page)
1226375 A7 B7 五、發明說明（3 ) 另一方面，已知素材的結晶粒度越小，蝕刻後的開孔壁 面變得越光滑，因為不會使透過的電子線產生不要的輻射 ，所Μ可得高品質的顏色選擇用遮罩。然而，結晶粒度縮 小的話，蝕刻速度跟著降低，與軟鋼製的基材相比會有需 要長時間蝕刻的問題。此外，只縮小結晶粒度，所形成的 開孔形狀無法成為正圓形狀，而會有無法得到特性優異的 顔色選擇用遮罩的問題點。 進而，使用將材料的微量成份、表面清淨度或者結晶面 方位調整至特定方向的鎳鐵合金之遮蔽遮罩亦屬習知，但 是無法得到具有充分特性的遮蔽遮罩。 本發明，係Μ在低膨脹性的鎳鐵合金所構成的顔色識別 用遮罩，防止由於開孔形狀的惡化而導致顯示特性的劣化 ，同時除去隨著大開孔的口徑增大而導致強度降低、與鄰 接孔的橫向連接等微细間距化的障礙為課題。 圖面之簡翬說明 圖1係說明顔色識別用遮罩的開孔部的剖面之圖。 画2係說明最大粒徑的測定方法之圖。 經濟部智慧財產局員工消費合作社印裂 (請先閱讀背面之注意事項再填寫本頁) [元件編號之說明] 1 :顔色識別用遮罩 2 :入射側 3 :顯示面側 4 :小開孔 5 :大開孔 6 :交點部 本紙張me中國國家標準（CNS)A4規格αΐϋ X 297公釐） - 6 - 1226375 A7 B7 五、發明說明（4 ) (請先閱讀背面之注意事項再填寫本頁) Π :鎳鐡合金鑭板 1 2 :結晶粒 13 :壓延方向 1 4 :板厚方向 15 :直徑圓 發明槪要 本發明係彩色陰極射線管用的顏色識別用遮罩，係在_ 含量34〜38重量百分比的鎳鐵合金所形成的鎳鐵合金鋼板 *其結晶粒度在10K上，與壓延方向成直角的方向的剖面 之粒徑為50αιηΜ下，伸展方向的平均粒徑在30^ηιΜ下之 基材上設圖案並藉由蝕刻形成開孔部的顔色識別用遮罩。 較佳之實施形態 本發明係於顏色識別用遮罩，使用具有徼細的結晶粒度 ，同時在與材料的壓延方向成直角的剖面的粒徑在50 am Μ下的鏡鐵合金，可得熱膨脹係數小，開孔部形狀優異， 顯示面側的大孔徑的口徑縮小使開孔的間距縮小的可進行 高精度顯示的顔色識別用遮罩。 經濟部智慧財產局員工消費合作社印製1226375 A7 B7 V. Description of the invention (3) On the other hand, the smaller the crystal grain size of the known material, the smoother the wall surface of the opening after the etching is, because the electron beams transmitted will not generate unnecessary radiation. Get high-quality color selection masks. However, if the crystal grain size is reduced, the etching rate decreases, and there is a problem that it takes a long time to etch compared to a base made of mild steel. In addition, only by reducing the crystal grain size, the formed hole shape cannot be perfectly round, and there is a problem that a color selection mask having excellent characteristics cannot be obtained. Furthermore, it is known to use a mask made of a nickel-iron alloy in which the trace amount of the material, the surface cleanliness, or the orientation of the crystal plane is adjusted to a specific direction, but a mask having sufficient characteristics cannot be obtained. According to the present invention, a mask for color recognition made of a low-expansion nickel-iron alloy is used to prevent deterioration of display characteristics due to deterioration of the shape of openings, and at the same time, to reduce the decrease in strength due to the increase in the diameter of large openings, Obstacles to fine pitch such as lateral connection to adjacent holes are a problem. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a diagram illustrating a cross section of an opening portion of a mask for color recognition. Drawing 2 is a diagram illustrating a method for measuring the maximum particle size. Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs (please read the precautions on the back before filling out this page) [Explanation of component numbers] 1: Mask for color recognition 2: Incident side 3: Display surface side 4: Small opening 5: Large opening 6: Intersection of the paper Chinese National Standard (CNS) A4 size αΐϋ X 297 mm)-6-1226375 A7 B7 V. Description of the invention (4) (Please read the precautions on the back before filling this page ) Π: nickel-rhenium alloy lanthanum plate 1 2: crystal grain 13: rolling direction 14: plate thickness direction 15: diameter circle invention. The color recognition mask for color cathode ray tubes of the present invention is based on _ content 34 ~ Nickel-iron alloy steel sheet formed of 38 weight percent of nickel-iron alloys. Base material whose crystal grain size is at 10K, the particle diameter of the cross section in a direction perpendicular to the rolling direction is 50αιM, and the average particle diameter in the stretching direction is 30 ^ ηM. A mask for color recognition is provided with a pattern and an opening portion is formed by etching. Preferred Embodiment The present invention relates to a mask for color recognition. A mirror iron alloy having a fine crystal grain size and a cross-section at a right angle to the rolling direction of the material at a diameter of 50 am is used to obtain a small thermal expansion coefficient. The shape of the opening portion is excellent, and the diameter of the large-aperture hole on the display surface side is reduced to reduce the pitch of the openings, which is a mask for color recognition that can perform high-precision display. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs
亦即，藉由蝕刻除去的金屬並非均勻地被除去，而是沿 著結晶粒界被除去。因此，即使在結晶粒度小的金屬材料 上只要存在著大結晶粒的話，如果藉由蝕刻除去大結晶粒 ，表面形狀將會是沿著大結晶粒界而開孔形狀會惡化。 於本發明的顔色識別用遮罩，藉由ASTM Ε112 ( JIS G 0 55 1 )所規定的粒度測定方法所測得的結晶粒度，Μ數值 1 0Μ上者較佳，更佳者為11 Μ上。結晶粒度太小的話開孔 本纸張达/ί適冏中國國家標準（CNS)A4規格（2〗0 X 297公釐） -7 - 1226375 A7 B7 經濟部智慧財產局員工消費合作社印製 五、發明說明（5 ) 的真圓形狀將會惡化。 此外，結晶粒的大小，Μ 50 y ffiM下較佳，如果存在著 較50 y in更大的結晶粒的話，即使結晶粒度在10Μ上，也 會產生開孔的表面形狀惡化以及真圓度惡化的問題。 此外，伸展方向的平均粒徑Μ 30 /i ιηΜ下較佳。結晶粒 的大小上如果有向異性的話，會在一軸的方向上進行蝕刻 。因為遮蔽遮罩用的素材是藉由壓延製造的，所Κ結晶粒 多少朝向與板厚成直角的方向上伸展，而在伸展方向上蝕 刻優先進行。結果，與板厚方向相比，在板厚直角方向進 行蝕刻，產生大孔側的擴大的問題。 此外，真圓度是在開孔為圚形的場合才會提到的。在開 孔為狹鏠栅狀或者是溝槽狀的場合，藉由蝕刻形成的開孔 的直線性可Μ提高，同時形成於顯示面側的開孔的大小可 Μ縮小的緣故，所Κ可得將微細的開孔Μ小間距配置的高 精細顯示用的顏色識別用遮罩。 Μ下提出實施例說明本發明。 實施例1 含有36重量百分比的藉由規定於ASTM E 112(JIS G 055 1 )的粒度測定方法所測定的结晶粒度號碼為11之厚度0. 12mm 的鎳的鎳鐵合金板上塗布Μ水溶性駱蛋白光阻劑，乾燥後 ，使用在素材雙面的光阻劑描繪圖案的玻璃乾板形成指定 的光胆劑圖案。 接著，進行曝光、硬膜處理、烘焙處理，其後，於被圖 案化的光阻劑的雙面，Μ液溫601C，比重48° Beh ( 本纸張汶度適用中國國家標準（CNS)A4規格（2]0 X 297公釐） - 8 - (請先閱讀背面之注意事項再填寫本頁) ' Γ * · Bmmf 1 MmKf tmmm 1 ^ I Hi ^^1 11 ^^1 mmmKf tamm i^i I =口 % 經濟部智慧財產局員工消費合作社印裂 1226375 . A/ B7 五、發明說明（8 ) 於圖2說明最大粒徑的測定方法。 圖2U)，顯示將試料在垂直於壓延方向的切斷的剖面画 。構成鎳鐵合金鋼板11的結晶粒12藉由壓延而伸展於壓延 方向13，同時在板厚方向顯示被壓擠變形的形狀。 圓2 ( B )，係說明各個結晶粒的測定方法之圖，將描繪了 預先設定的直徑的圓15的磨玻璃載置於結晶粒12上來進行 測定。 將描繪直徑20、30、40K及50μι«的圓的磨玻璃載置於 結晶粒度測定試料土，在200〜500倍的倍率的顯微鏡下觀 察，於最大的結晶粒的中央載置50 mb的圓，確認超出圓 的區域是否有2處Μ上，存在著2處Μ上超出範圍的場合， 由超出的分別的區域的結晶粒界上的任意點取一條直線， 而取其長度成為最大者當作最大粒徑。並無2個Κ上超出 範圍的場合，依序改用40/isi、30/zm、20//ra改變成較小 的圓而同樣地測定最大粒徑。 5、伸展方尚的平均粒徑 伸展方向的平均粒徑，藉由Μ下的式（2)求得。 伸展方向的平均粒徑=dX Ν2式（2) 其中， d :平均粒徑 將測定到的结晶粒度假設藉由ASTM E112 (JIS G 055 1 ) 所規定的粒度測定方法所測得的結晶粒的形狀為正方形， 將其一邊的長度視為平均粒徑而從平均剖面積的平方根算 出。 本紙張中國國家標準（CNSM4規格（2]0 X 297公釐） ^~- 1 1 - ---1---.-------------tti>,-------^9— (請先閱讀背面之注意事項再填寫本頁) 1226375 A7 _B7_ 五、發明說明（9 ) N i :結晶粒的伸展方向上藉由直角的一定長度的線段（ 板厚方向亦即Z軸方向）所切斷的結晶粒的數目。 N2 :結晶粒的伸展方向上與平行的（壓延方向或者與壓 延方向成直角的方向，亦即X軸、Y軸方向）求得N:所用的 線段相同長度的線段所切斷的結晶粒的數目。 N t輿N 2，使用測定結晶粒度的試料進行最少5視野Μ上 的測定而使用其平均值。 本發明的彩色陰極射線管的顏色識別用遮罩，係使用結 晶粒度與結晶的粒徑在指定範圍內的低膨脹性鎳鐵合金板 形成圖案再藉由蝕刻形成開孔而製成者，在直線狀的開孔 部的場合，提高開孔部的直線性，在圓形形狀的開孔部的 場合，提高真圓度同時可Κ提高顯示面側的大孔徑的尺寸 精度，所Κ提高遮罩的強度，可得具有微细的間距的高精 細顯示用的遮罩。 -----------------------------^ (請先閱讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 本紙張又处这Α中國國家標準（CNSh-V!規格（210 X 297公釐） - 1 2 -That is, the metal removed by etching is not uniformly removed, but is removed along the grain boundary. Therefore, even if there are large crystal grains on a metal material with a small crystal grain size, if the large crystal grains are removed by etching, the surface shape will be deteriorated along the boundary of the large crystal grains. In the mask for color identification of the present invention, the crystal grain size measured by the particle size measurement method specified by ASTM E112 (JIS G 0 55 1), the value of Μ is preferably 10M, and more preferably 11M. . If the crystal size is too small, the perforated paper is up to the Chinese National Standard (CNS) A4 specifications (2〗 0 X 297 mm) -7-1226375 A7 B7 Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs Invention description (5) The true circular shape will deteriorate. In addition, the size of the crystal grains is better under M 50 y ffiM. If there are crystal grains larger than 50 y in, even if the crystal grain size is above 10M, the surface shape of the openings and the roundness deteriorate. The problem. The average particle diameter in the extension direction is preferably at M 30 / i ηM. If the size of the crystal grains is anisotropic, it will be etched in the direction of one axis. Since the material for masking is manufactured by calendaring, the crystal grains are stretched in a direction at right angles to the plate thickness, and the etching is preferentially performed in the stretching direction. As a result, compared with the plate thickness direction, etching is performed in the plate thickness right-angle direction, which causes a problem that the large hole side is enlarged. In addition, true roundness is only mentioned when the opening is 圚 -shaped. When the openings are narrow grids or grooves, the linearity of the openings formed by etching can be improved, and the size of the openings formed on the display surface side can be reduced. A mask for color recognition for high-definition display in which fine openings M are arranged at a small pitch must be obtained. Examples are presented below to illustrate the invention. Example 1 A nickel-iron alloy plate containing 36% by weight of nickel having a crystal grain size number of 11 and a thickness of 0.12mm measured by a particle size measurement method specified in ASTM E 112 (JIS G 055 1) was coated with a water-soluble polymer. After the protein photoresist is dried, the glass photoresist pattern on which the photoresist is drawn on both sides of the material is used to form the specified photobilitizer pattern. Next, exposure, hard film treatment, and baking treatment are performed. After that, on both sides of the patterned photoresist, the liquid temperature is 601C, and the specific gravity is 48 ° Beh. (This paper is covered by Chinese National Standard (CNS) A4. Specifications (2) 0 X 297 mm-8-(Please read the precautions on the back before filling this page) 'Γ * · Bmmf 1 MmKf tmmm 1 ^ I Hi ^^ 1 11 ^^ 1 mmmKf tamm i ^ i I =% of the employee's consumer cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs of the People's Republic of China 1226375. A / B7 V. Description of the invention (8) The method for measuring the maximum particle size is shown in Figure 2. Figure 2U) shows that the sample is perpendicular to the rolling direction. Cutaway profile drawing. The crystal grains 12 constituting the nickel-iron alloy steel sheet 11 are stretched in the rolling direction 13 by rolling, and at the same time show a shape deformed by the crushing in the plate thickness direction. Circle 2 (B) is a diagram illustrating a method for measuring each crystal grain. A ground glass, which has a circle 15 drawn in a predetermined diameter, is placed on the crystal grain 12, and the measurement is performed. Place ground glass depicting circles with diameters of 20, 30, 40K, and 50 μm on the soil for crystal grain size measurement, observe under a microscope at a magnification of 200 to 500 times, and place a 50 mb circle in the center of the largest crystal grain. To confirm whether there are 2 places on the area beyond the circle, and if there are 2 places outside the range, take a straight line from any point on the crystal grain boundary of each area that exceeds, and take the length of which is the largest. For maximum particle size. In the case where there is no out-of-range on two K, the maximum particle diameter is measured in the same manner by changing to 40 / isi, 30 / zm, and 20 // ra in order to change to a smaller circle. 5. Average particle diameter of the stretched side The average particle diameter of the stretched direction is obtained by the formula (2) under M. Average particle diameter in the stretching direction = dX Ν2 Formula (2) Where, d: average particle diameter The measured crystal grain size is assumed to be based on the crystal grain size measured by the particle size measurement method specified by ASTM E112 (JIS G 055 1). The shape is a square, and the length of one side is regarded as the average particle diameter and calculated from the square root of the average cross-sectional area. Chinese national standard for this paper (CNSM4 specification (2) 0 X 297 mm) ^ ~-1 1---- 1 ---.------------- tti >, --- ---- ^ 9— (Please read the precautions on the back before filling this page) 1226375 A7 _B7_ V. Description of the invention (9) N i: A certain length of line segment (sheet thickness at right angles) in the stretching direction of the crystal grains The direction is the number of crystal grains cut. N2: Calculate the extension direction of the crystal grains in parallel to the direction of rolling (or rolling direction or right angle to the rolling direction, that is, X-axis, Y-axis directions). N: The number of crystal grains cut by a line segment of the same length used. N t and N 2 are measured using a sample for measuring the crystal grain size over a minimum of 5 fields of view and the average value is used. The color cathode ray of the present invention The mask for color recognition of the tube is made by forming a pattern using a low-expansion nickel-iron alloy plate with a crystal grain size and crystal grain size within a specified range, and then forming an opening by etching. In the case, the linearity of the opening portion is improved. In the case of the circular opening portion, the roundness can be improved and the display can be improved. The dimensional accuracy of the large aperture on the front side increases the strength of the mask, and a mask for high-definition display with a fine pitch can be obtained. ------------------ ----------- ^ (Please read the precautions on the back before filling out this page) The paper printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs is under the China National Standard (CNSh-V! Specifications) (210 X 297 mm)-1 2-