TWI224205B - Optical signal processing device and fabrication method thereof - Google Patents

Abstract

An optical signal processing device is disclosed, which mainly comprises a fixed upper electrode, an insulation layer connected to the upper electrode, a lower electrode with a cantilever structure, a reflective mirror connected to the lower electrode, an insulation layer and a lower electrode whose corresponding side is connected in the way of well-known wafer bonding, die-bonding and flip-chip bonding. The feature of the present invention is that the upper electrode is disposed on a plane not parallel to the lower electrode, and the structural feature of the upper electrode is that the connection between the upper and lower electrode is tilted upward and becomes a tilted plane or a curved surface, whose distance with the lower electrode increases gradually. When an electrostatic attraction force is generated due to the potential difference between the upper electrode and the lower electrode, since the lower electrode with the moveable cantilever structure has a closer distance at the connection with the upper/lower electrode and insulation layer, the electrostatic attraction force is larger, thereby it moves upward before the other parts, and pulls the other parts at the same time to move upward sequentially so as to reduce the distance with the upper electrode, and also brings the reflective mirror connected to the lower electrode to move upward from the first static position along a trace to the second static position. Since the part of the lower electrode, which is closest to the upper electrode, can move before the other parts, and then move upward sequentially, so the potential difference between the two electrodes can be greatly reduced. On the contrary, when the potential difference and the electrostatic attraction force disappears, the reflective mirror can return to the first static position by the elastic restoring force to return to the first static position. Therefore, it can switch between the first static position and the second static position, so as to achieve the micro-actuation switching function of the optical signal processing device. And, the reflective mirror can also stay at any position of the trace. Thus, by blocking one part of the optical signal, the degree of attenuation of the optical signal passing through can be controlled, so as to obtain the function of modulating the optical attenuator, and to be applied in the optical communication network structure.

Description

1224205 V. Description of the invention [The current networked system of the invention will become the main target of communication requiring direct optical attenuators; not high performance 2. Essential components. Traditional switching machines are prone to wear and tear. Many of the signal processing during production are similar to half-degrees, reducing (1) technology. Because of the light, a type of optical signal structure that mainly deals with the low frequency of the same optical path for all frequency components. “The field of unified technical equipment such as optical path costs, conductor batch production] The rapid development of fiber optic communication” especially with the development of all-optical fiber optic communication, that is, the system that does not require optical / electrical conversion. Therefore, in the fiber-optic communication network, μJie's "Lu Lu itself", for example, the intensity of the light signal is dreamed to be dynamically and appropriately controlled by the road signal to maintain the performance and safety of the 4 light, and achieve a simplified system. Switching between heads relies on the optical switch device. Therefore, an optical signal processing device has become an indispensable heavy number processing device. Most of them continue to use the traditional mechanical structure as this type of mechanical switch. It cannot be mass-produced in batches, and has high cost and high accuracy. Calibration causes quantitative disadvantages. With the use of micro-electromechanical technology, micro-objects and micro-components that have not been manufactured have been produced for the production of light. Not only can the volume of components be greatly reduced, but also mass-production technology can be used for mass production, providing high production precision costs. [Previous technology] Micro-electro-mechanical optical signal processing device applied to the production of adjustable variable optical attenuators and optical switches' In the past, there are some production methods proposed, which are described as follows: 1) As Maxer # published in journai 〇f lightwave technology

1224205 May / Explanation of invention (2)

Vol. 17, No. 1, January 1 9 9 9 paper, plasma etching silicon mirror. Single-fiber micro-optical mechanical 2x2 switch with surface and electrostatic actuation, Mi cro-optomechanical 2x2 switch f—or single-mode fibers based on plasma-etched silicon mirror and electrostatic actuation), which uses two comb-shaped actuators (comb dr i ve) to move the reflecting mirror back and forth to switch the light path. The characteristics of its disclosure are as follows:

1 · Use S 0 I (si 1 ic ο η ο ninsu 1 at 〇r) wafer with deep silver engraving machine to make vertical reflecting mirror surface; 2 · Use " with index matching oil (inde X matching 〇i 1) Reduce the insertion loss; 3 · Use an external circuit to increase the input voltage of 5 V to about 60 V for driving comb-shaped actuators; Ring 4 · Through the radial arrangement, can provide 1 × n optical switches . Compared with the present invention, the technology of this thesis has the following disadvantages: 1. Using S01 (silicon on insulator) wafers to make vertical mirrors: limited by the limits of the process machine, only small vertical mirrors can be made, only Applicable to low-channel-number optical switches, with low scalability. 2 The existence of refractive index matching oil increases the difficulty of packaging and concerns about reliability. 2) Secondly, as developed by Zhang, U.S. Patent No. 6,229,640, Micro Electromechanical Optical Switch and Method of Manufacturing thereof, which uses a single comb shape A micro-actuator (combdrive) moves a connected mirror surface: and can cause the mirror surface to rest at an on position and an off position, thereby

1224205 V. Description of the invention (3) Switching the light path between waveguides. The conventional technology US patent discloses the following special black «1 · Optical switch has two sets of waveguides and a single comb micro-actuator. The initial position is an open position or a closed position. When a voltage is applied, it is a closed position or an open position. 2. Use a SOI wafer with a deep etching machine to make a vertical reflective mirror surface; 3. The vertical mirror surface must be at least 90 ° ± 〇6. , 70-8 0 um depth, 40-70um travel distance, surface roughness is less than 30nm; 4. The pitch and width of the finger structure of the comb microactuator are 2-4 / zm; -2 The only disadvantage is that it uses S 0 I (si 1 ic ο η ο ninsu 1 at 〇r) Wafer production of vertical mirror surface, limited by the limits of the process machine, can only produce smaller vertical mirror surface, only suitable for low-channel-number light. Switch , Expansibility is not high. 3) Also as developed by US Patent No. 5,208,880, Riza, etc., Microdyn am ical fiber-optic switch and method of switching using the same A piezoelectric material driver is controlled by voltage, which drives a mirror surface connected to move on a plane to achieve the function of 2x2 or 1xN light switch. This conventional technology US patent discloses the following features: 1 contains a piezoelectric actuator Actuator and an optical switch of a mirror surface, by adjusting the input voltage of the piezoelectric actuator, the position of the mirror surface is actuated by the piezoelectric actuator to determine the light path; 2.—input and an output port The distance is less than 50 # m, if the distance is greater than 50 # m, a lens is needed to focus; however, the disadvantage is that the manufacturing process of the piezoelectric material driver is difficult and it is not easy to compare with other systems.

Page 9! 2242〇5

5. Description of the invention (4) Process integration. 4) Then, as developed by U.S. Patent No. 6,205,27, Aksyuk, etc., an optical switch, which moves an optical shutter in an electrostatically driven manner, Together with the use of a circulator, a 1 x 2 optical switch switching function can be achieved, and a retrospective optical signal attenuator (V0A) and an optical plug multiplexer (〇ADM) can be applied. The conventional technology US patent reveals the following characteristics: 1. It consists of a set of head-to-tail optical fibers or waveguides, a parallel plate electrode electrostatic actuation sound, a reflecting mirror surface and a lever connecting the actuator and the reflecting mirror surface. One optical switch; 2 · Right-angle cutting when cutting the fiber, and coated with anti-reflection film; 3 · Actuators, mirrors, levers, etc. are all polycrystalline silicon materials; Compared with the present invention, this conventional technology has the following disadvantages ·· 1 · Circulator needs to be installed before it can be an optical switch, which increases the cost and insertion loss. 2. It is not easy to expand to 4x4 or 8x8 optical switch array, and the expansion is limited. 5) Second aligned vertical mirrors and V-grooves applied to self-latching matrix switches in fiber optic networks published by He e 1 i η et al. In MEMS 2 0 0 0 to a self-latching matrix switch for optical networks), which uses a 100 wafer to make a vertical mirror surface, and uses a cantilever beam of a layer of permanent magnet material and an external magnetic field to create a bistable optical signal processing device. . Compared with the present invention, its disadvantages are as follows: 1. An electromagnetic field needs to be applied, which is difficult to assemble and mass produce;

Page 10 1224205 V. Description of the invention (5) 2 · Special process technology capability of magnetic film is required. 6) Another example is Miller et al., Published in 1997, one of the Transducer 97 'An electromagnetic MEMS 2x2 fiber optic bypass switch, which is made on a 110 wafer—a vertical mirror surface, which is plated by one layer Compared with the present invention, a cantilever beam and an additional residual field of a permanent magnet material make an optical signal processing device, which has the following disadvantages: 1 · An external electromagnetic field is required, which is difficult to assemble and mass-produce; 2 · Requires a magnetic film manufacturing process Technical capabilities. [Invention Summary]

Therefore, the purpose of the present invention is to propose a progressive optical signal processing device and manufacturing method, which has the characteristics of easy manufacturing, can be manufactured in large batches, can reduce costs, and has good reliability and stability. As the distance between the movable cantilever structure electrode and the upper electrode of the progressive optical signal processing device of the present invention adopts a progressive distance design, since the YT pole can be moved closest to the upper electrode part, then other parts and then move upwards sequentially _ 1 Therefore, according to the present invention This kind of optical signal processing device can greatly reduce the potential difference between the two electrodes. In addition, with the use of micro-electromechanical technology, the progressive optical signal of the present invention is produced by Wang Lizhi. Its reflective mirror surface can be switched between an open position or a closed position, and can be stationary at two positions. At any one of the positions, the optical signal can be cut off from 0% to 100% from ~ j, and a drive control device can be used to apply adjustable positioning control to the device at the optical signal to indirectly move the mirror surface to thereby ~ Reason

Page 11

1224205 V. Description of the invention (6) Part of the optical signal, to achieve the adjustable optical attenuator function of this optical signal processing device. The structure and manufacturing method of the optical signal processing device of the present invention, as well as its detailed structure and manufacturing method, can be fully understood by referring to the following detailed description made with reference to the accompanying drawings. The ultra-micro group road is turned on and off, and the light is adjusted by the light and light method. The light can be turned off, and it can be turned off. It can be adjusted in an unavailable system. Weixun mentions all kinds of equipment. One . One procedure and one procedure can be used to reduce the supply of information in the supply and supply of the law by the system and the party, and it can also be used to control the signal. And a mesh-based system and the seed light, to set off set, set, a method of opening the package diameter as the caller number information in the processing of the processing head processing head mounted off the main charge passage of a bright daylight an optical system No. The issue number and the number 1 are the content control and the light that make the news and the news. The invention of the \ 1 is issued within the light and light. The reduction is due to the instinct and instinct. Cut work [Do not cut off between photosynthesis

If it is not listed, page 12 # 1224205 V. Description of Invention (7). The following describes the preferred method of the present invention, but the actual component manufacturing process, those skilled in the art can make various changes in the signal processing device under the surrounding t month conditions, and can only change the structure and achieve the same function . The producer of the optical signal processing device of the embodiment does not necessarily conform to the description without departing from the actual spirit and scope and modifications of the present invention. For example, the light process and structure described below are used to make similar junctions. The first preferred embodiment is shown in Fig. 1A, which is a side view of the optical signal processing device 10 according to the first preferred embodiment of the present invention. As shown in FIG. 1A, the optical signal processing device 10 of the first preferred embodiment includes an upper structure and a lower structure 12. The upper structure includes an upper substrate 1 1 1 and an upper substrate i.丨 丨 upper electrode u 2, an insulating layer 1 1 3 connected to the upper electrode 1 1 2 and lower structure 1 2 includes a lower substrate 1 2 1 and a lower electrode 1 2 2 connected to the lower substrate, which is a cantilever Beam structure, a mirror surface 1 2 3 connected to the lower electrode 1 2 2, the upper structure 1 1 and the lower structure 12 are connected to the insulating layer 1 1 3 and the left end 1 2 of the lower electrode 1 2 2 by wafer bonding (Wa fer bonding) method, die bonding method, or flip-chip bonding method, etc. to complete the connection operation; the present invention is characterized in that the upper electrode 1 1 2 is provided at On a plane that is not parallel to the lower electrode 1 2 2; in the first preferred embodiment, the upper electrode Π 2 runs from left to right, and leaves the left end 1 3 connected to the insulating layer 1 1 3 and the lower electrode 1 2 2 After 0, it is inclined upwardly to become an inclined straight surface 132, and the distance from the lower electrode 12 2 is greater as it goes to the right. At this time, the lower electrode 1 2 2 is in the unactuated state. A first stationary position 124.

Page 13 1224205 V. Description of the invention (8) Please refer to Fig. 1 B ', which is a top view of the AA section in Fig. 1 A. As shown in FIG. 1B, the optical signal processing device according to the first preferred embodiment of the present invention has a structure 12 below the Aa cross section and includes a lower substrate 1 2 丨 and an electrode 1 22 ′ connected to the lower substrate, which is a cantilever. Beam structure, a mirror surface 1 2 connected below the lower electrode 1 2 2 3, a hole array 1 2 9 provided on the lower electrode 1 2 2, which can increase the light of the first preferred embodiment by reducing the air damping effect Actuation speed of the signal processing device.

Jing refers to Figure 1A and Figure 1 at the same time. When a voltage is applied to the upper electrode 1 1 2 and the lower electrode 1 2 2 respectively, a potential difference occurs between the two electrodes, which generates an electrostatic attraction and force due to the upper electrode 1 1 2 is fixed on the upper substrate i 丨 丨, the lower electrode 122 is a movable cantilever structure, and corresponds to the inclined surface 13 2 the distance between the left part of the left lower electrode 1/2 and the upper electrode n 2 1 "than the middle 丨^ And the right part 1 2 8 are close, and the electrostatic attractive force between the corresponding upper electrode n 2 is also larger: 'so it can move upwards before the middle and right part; the current electrode / 2 2 left: side part At the same time moving up, it also drives the middle and right parts to move upwards in order to reduce the distance from the upper electrode 1 12 in turn, so the lower electrode 1 2 2: the middle and right parts can be attracted by the increasing static electricity from left to right in order. On the white of force / σ-the track 1 3 3 moves and is still at a second rest position 125, and the mirror surface 1 2 3 connected to the lower electrode 1 2 2 moves upwards along a track 1 3 3 'and vice versa When the voltages applied to the upper electrode 11 2 and the lower electrode 1 2 2 are cut off, electricity is supplied between the two electrodes. Both the difference and the electrostatic attractive force have disappeared. The reflecting mirror surface 1 2 3 can return to its first rest position 1 2 4 by the elastic restoring force of the lower electrode 1 2 2 material. Therefore, the present invention can be used between the first rest position and the second rest position. Switching to achieve the actuated switching function of the optical signal processing device.

Page 14 1224205 V. Description of the invention (9) Fibrillation Please refer to FIG. 1c, which is a bottom view of the optical signal processing device 20, which also has a variable attenuation function in the first preferred embodiment of the present invention. Including a first group of light is aligned by a first input fiber 2 0 1 a and a first round-out fiber 2 0 1 b It can be completely output from the first output fiber 201b, a second group of fibers, a core-second input fiber 2 0 2 a, and a second output fiber 2 0 2 b. A second input optical signal 204 is aligned and can be completely output from the second output fiber 202b. The first input optical signal 203 and the first input, and the input optical signal 204 are coplanar and perpendicular to each other. ; As shown in Fig. 1a and Fig. 1B, the optical signal processing device 10, 20 may include a lower electrode 2 06 linked and perpendicular to the first input optical signal 203 and the second input optical signal 2 04 is a mirror surface 207 defined by a plane; the mirror surface 20 7 is one of the first rest positions when not activated 1 2 4 are respectively located between the first input fiber 2 〇a and the first output fiber 2 0 1 between b, the second input fiber 202a, and the second round of embroidery μ%: and the 124th position of the reflecting mirror surface m: == the incident light signal 2 0 3 and the The two input optical signals 2 0 4 are incident at a 45 ° incident angle and then exhausted, and are respectively output from the second output fiber 20 2b and the first output fiber 20 lb, and complete the figure A—c, B — The optical switch function of D; when the mirror surface is actuated according to the electrostatic actuation method described above, it moves along a track ^ 3 toward Tian Shangzhong) and leaves the first input optical signal 20 for the first input signal. One of the 204 light paths, the second stationary position is 125 士, an input optical signal 2 0 3 and a second input optical signal 2 〇 4 are output from a ^ 2 fiber 2 0 1 b and a second output fiber 2 〇 2 b ， Complete the figure— = C of the light switch function; Furthermore, the mirror surface 207 from the first to the rest position

Page 15 1224205 V. Description of the invention (10) Two V: In the bottom view, move to the second stationary position part of the light A Λ trace U3 any one of the positions, so you can block the entrance into the flower 11, The attenuation degree of the first input optical signal 203 and the first input = m on the light-making path achieves an adjustable optical attenuator-(anable 〇ptical AUenuat〇r) in the communication network architecture. "Application The second preferred embodiment before: Please refer to FIG. 2, which is a view of a female & _ + device, as shown in the figure. As shown: the optical signal processing device of the preferred embodiment; In the first embodiment, the optical signal processing 10 features phase 1¾, that is, on the plane of the optical signal processing device of the upper electrode embodiment, one of the two preferred embodiments, which is not parallel to the electrode 122, is provided on the lower electrode. 3 2 2 is not shown in FIG. 2. One is described in the first preferred embodiment of the present invention when it is powered on. =: S3 32 is slanted. According to the principle of reflection WQ which is connected to one of the lower electrodes 3 2 2, it can be caused electrostatically. 3 2 4 moves up along a trajectory 3 3 3 to _brother _ _ 2λ3 'from a first rest position and the first-preferred embodiment light on Stop position 325 'may be accomplished variable optical attenuator function. 10th light switch function and both adjustable third preferred embodiment: Please refer to FIG. 3, which is the display of the wooden number processing device array 40; the third preferred embodiment 8x 8 optical signal a "▲ η 2 ® 'Picture Conventional Technology-Micro-lens array_ # 二 I One example of the optical signal processing device 10, 20 or the second quarter 乂 佳 贝 HER Example 30 of 64 氺Processing device 45_4 is composed of processing device, one of which is free of π reflection state, and the other is P0rt A, one lose

Page 16 1224205 V. Description of the invention (11)

Incoming port, including 4 1 a to 4 1 h eight-input fiber, P 0rt B series 〆 output, including 42a to 42h eight-input fiber, Port C series one take-out port, including 43a to 4 3 h eight-input fiber, P 〇rt D is a plug-in port, which contains 4 4 a to 4 4 h eight-input fiber. One of the input fibers 41 a of Port A can input an optical signal 401, which is reflected by the optical signal processing device 45a and output to one of the output fibers 42c of Port B to achieve the optical signal switching function. In addition, one of the port A is inserted into 41 g of the optical fiber, and an optical signal 402 can be input, and the optical fiber 43 g can be taken out from one of the Pori: C, and the optical signal can be taken out. In addition, Port D—plug in light _ 44g can be plugged into an optical signal 40 3 and output to one of port B optical fiber 4 2 g output to achieve the function of plugging in optical signals. Therefore, the optical signal processing device array 40 according to the third preferred embodiment of the present invention can achieve all the functions of the 'light flood number plug multiplexer (0ADM). The present invention discloses an electrostatically actuated optical switch, which is characterized in that its upper electrode system is arranged on an inclined surface or a curved surface that is not parallel to the lower electrode, and vice versa. The principle described in the Zth preferred embodiment can be used on an inclined surface or a curved surface that is not parallel to the upper electrode, or the upper electrode and the lower electrode are respectively disposed on an inclined: surface or a curved surface that are not parallel to each other. , Achieve the same function as the first and second preferred embodiments, and can be applied to the optical communication network architecture.

In summary, the optical switch with adjustable variable attenuation function of the present invention can effectively solve the first two shortcomings of the index matching oil and the low expansibility in the conventional technology, and the third) the conventional technology. Disadvantages of using piezoelectric materials in technology, 4) Circulators in conventional technology and the disadvantages of limited expandability, 5) and 6) In the conventional technology, an electromagnetic field and magnetic field are required.

The 17th purchase 1224205 V. Description of the invention (12) In addition to the shortcomings of the technical capabilities of the sexual film manufacturing process, it also has the following characteristics:

1 · As shown in FIG. 1A, the optical signal processing device of the first preferred embodiment of the present invention, the angle between the upper electrode 1 1 3 and the lower electrode 1 2 2 is based on the off-axis of a special (1 1 1) silicon wafer (Of f ax is), the off-axis angle standard is 4. According to different design requirements, different off-axis angles can also be ordered. When an anisotropic coin-cutting solution such as potassium hydroxide (K0Η) or tetramethyl ammonium hydroxide (TMAH) is used, the horizontal plane will be off-axis with the (1 1 1) plane. Angle becomes a bevel. In addition, the curved surface of the upper electrode 3 1 2 and the lower electrode 3 2 2 of the optical signal processing device of the second preferred embodiment of the invention shown in FIG. 1 can be engraved by the reactive ion surname (r I e, Reactive Ion Etching). In the case where the size of the photoresist opening is different, it is produced with different characteristics of the etching depth. 2 · The present invention discloses the use of sticky crystal technology to make the reflection or pass of the reflected light signal actuated with a progressive electrostatic attraction, and to make an appropriate photomask for a light (110) or (100) wafer. Anisotropic silicon etching solution for etching process selection. Than making it. Progressive electrostatically actuated optical switches should use mirrors to make plane movements by input switches; vertical reflective mirrors can be designed to pass through different broken lattice planes such as K0H or TMAH, etc.3. They have similar curved surfaces with small electrical displacement and displacement. Large amount; taking the electrostatic actuator as an example, the driving voltage is generally progressive electrostatic actuation photovoltaic features; the best of the extremely electrostatic actuator has a 100 / Z m spacing in parallel, which is used to actuate the conventional technical requirements Hundreds to thousands of volts, the driving point of the signal processing device, that is, the driving voltage is higher than that of the upper electrode and the lower electrode by parallel electrostatic actuation.

1224205 V. Description of the invention (13) 4 · The optical signal processing device with adjustable light attenuation function of the present invention can use the appropriate mask of (1 1 0) or (100) wafer due to the vertical mirror surface manufacturing method It is designed and manufactured, so the size of the vertical mirror can be the same as the thickness of the wafer, and it can easily obtain better optical signal quality, so it has good expandability. It can be expanded to one of the 8x 8 optical signal processing device arrays 40 shown in Figure 3, and has the function of an optical signal multiplexer, or it can be expanded to a larger number of optical signal processing device arrays. < 1 in the first preferred embodiment, the second preferred embodiment of the optical signal processing device and the third fourth preferred embodiment of the optical signal processing device array, any incident light optical signal and its reflected light optical signal are formed On any optical signal path, it can further include collimating lens, collecting lens, optical spherical lens (ban), cylindrical shape (: CyHnd ^ cal lens), refractive micro lens, such as micro Fresnel C Rr esne 1) Diffraction type of lens, killing ^ ^ Scout Umbrella and 々 社 '嘁 lens, other aspheric micro lenses and other prior learning το, for the sake of efficiency and improvement Efficiency, and can provide two =, the optical signal transmission in the management device can also pass through the appropriate refracted light path into the optical signal transmission Γ ^ line of light signal transmission, lost in the light signal lost Γ = = optical signal transmission, reducing optical signals In the examples, it should not be used to limit the present invention. It is described as part of the modification of the preferred implementation content of the present invention, and the scope of the present invention is not limited. In addition, the scope of the present invention is based on the scope of the present invention. 'Spiritual time' should be in public Publications' Please and therefore never before seen in ^ the present patent disclosure requirements of any step _ ", the so each: J practicality, novelty and into the requested application responsible committee allowed to dial out the review of the patent. Pray 1224205

Page 20 1224205 Brief description of the drawings Brief description of the drawings: Figure 1 is a side view of the optical signal processing device of the first preferred embodiment of the present invention. Fig. 1 is a top view of the A A section in Fig. 1A. Fig. 1C is a schematic diagram of an optical switch having a variable attenuation function in a first preferred embodiment of the present invention. FIG. 2 is a side view of an optical signal processing device according to a second preferred embodiment of the present invention. FIG. 3 is a schematic diagram of an array of an 8 × 8 optical signal processing device according to the present invention. Description of drawing number: 1 0, 20, 30-Optical signal processing device 1 1-Upper structure 12-Lower structure 111-Upper substrate 1 1 2, 3 1 2-Upper electrode 1 1 3-Insulating layer 1 2 1-Lower substrate 1 2 2, 2 0 6, 3 2 2-Lower electrode 1 2 3, 2 0 7, 3 2 3-Mirror surface 1 3 0-Insulating layer and left end of lower electrode 1 3 2-Slant straight surface 124, 324- A rest position 125, 3 2 5-a second rest position 1 2 6-the distance between the left part of the lower electrode and the upper electrode 1 2 7-the distance between the middle part of the lower electrode and the upper electrode

1224205 on page 21 Brief description of the drawing 1 2 8-Distance between the right part of the lower electrode and the upper electrode 1 2 9-孑 L-hole array 1 3 3-Mirror track 20 1 a- First input fiber 2 0 1 b- First output fiber 202a-second input fiber 2 0 2b-second output fiber 2 0 3-first input optical signal 2 0 4-second, second input optical signal 3 3 2- oblique curved surface 4 0-8x 8 optical signal processing Device array 4 0 1-first input optical signal 4 0 2-second input optical signal 4 0 3-first plugged optical signal 41a, 41b, 4 1 c ~ 41d, 41e ^ 41 f, 41g, 41h-input Optical fiber 4 2a, 42b, 42c ^ 42d, 42e, 42f, 42g, 42h-output fiber 43a, 43b, 4 3``, 43d, 43e, 43f, 43g, 43h-remove fiber 4 4 a ': 4 4 b, 4 4c, 44d, 44e, 44f, 44g, 44h-plugged into the fiber Port A- input port, including 4 1 a to 4 1 h eight-input fiber Port B- output port, including 4 2 a to 42h eight-output fiber Port C- Take-out port, including 4 3 a to 4 3 h

Port D-plug port, including 44a to 44h eight plug-in fiber 45a-reflective optical signal processing device

Page 22

Claims (1)

1224205 6. Patent application scope 1. An optical signal processing device, comprising: a first structure including a first substrate, an electrode connected to a first surface of the first substrate, and an insulating layer connected to the first electrode; and A second structure including a second substrate and a second electrode connected at one end to the second substrate, which is a cantilever structure, a reflecting mirror surface connected to the second electrode, and the second structure is connected to the first structure; The second electrode corresponds to the first electrode and the insulating layer, but the second electrode is not parallel to the first electrode, and when there is a potential difference between the first electrode and the second electrode, an electrostatic attractive force is generated, which can actuate the first electrode. The two-electrode cantilever structure moves in the direction of the first electrode sequentially, driving the reflecting mirror surface: from a first rest position to a second rest position. φ 2. The optical signal processing device according to item 1 of the scope of patent application, wherein the second electrode of the cantilever structure of the second structure is connected to one end of the second substrate and is connected to the corresponding portion of the insulating layer of the first structure. 3. For example, the optical signal processing device of the second scope of the patent application, wherein a portion of the second substrate corresponding to the insulating layer can be wafer bonded (die bond i ng), die bond (ng bond) And at least one of the sticking die technology methods such as the f 1 ip-chipb ο nding method. 4. The optical signal processing device according to item 1 of the scope of patent application, wherein the first electrode and the second electrode are respectively disposed on a first plane and a second plane. _ 5. The optical signal processing device according to item 1 of the scope of patent application, wherein the first electrode and the second electrode are disposed on a first plane and a second curved surface, respectively. 6. The optical signal processing device according to item 1 of the patent application scope, wherein the first power Page 23 1224205 6. Scope of patent application g Two planes. Among them, the first customer has two curved surfaces. The reflector and the second electrode are arranged on a first curved surface and a 7 respectively. For example, the optical signal processing device pole and the second electrode are arranged on a first curved surface and a 8. The first rest position and the second rest position of the optical signal processing device surface of the first patent application range are respectively the open position and the closed position of the optical signal processing device. The open position and the closed position are the activations of the optical signal processing device, respectively. Rear rest position and front rest position without actuation. _ 9. According to the optical signal processing device of the first patent application scope, the first and second rest positions of the reflecting mirror surface are the closed position and the open position of the optical signal processing device, respectively. The closed position and the open position are The rest position after activation of the optical signal processing device and the rest position before activation. 10. The optical signal processing device according to item 1 of the scope of patent application, wherein the material of the reflecting mirror surface can include all opaque materials, and the shape of the reflecting mirror surface can also include microstructures of various shapes, such as circles and triangles. , Quadrangles, geometric polygons, etc., and the structure of the cover can range from one to several < materials can include heating or applying a bias, causing the material properties to change from having light transmitting properties to those having opaque properties All kinds of materials. 1 1. The optical signal processing device according to item 1 of the scope of patent application, wherein the reflecting mirror surface can be still at any position on the track, and by blocking a part of a light path, the adjustable signal light of the optical signal processing device is provided. Signal attenuation function, and can be used in optical communication network architecture. 1 2. If the optical signal processing device of item 11 of the scope of patent application, wherein the number of reflecting mirrors can be one to several, the blocking range of the part of the optical signal blocked by each reflecting mirror can be from 0% ( No block) to 100% (full block) P.24 / 、, the scope of application for patents is broken) ^ + Please drive the control device with the patent scope. The optical signal processing device can be controlled by a second electrode and mirror surface of i f7 which can be controlled differently. The reflecting mirror is straight, so that it can block one of the movements of a flower and stay still on one of the tracks. "Can? Variable light signal attenuation" "J: Part of the" 4 provided optical signal processing device ", such as the function of the patent application. On the signal path, it can also be used as a light signal processing device for human items. The optical mirror, # -shaped mirror, refraction lens including collimator lens, condenser lens, optical spherical lens, micro lens, micro lens, such as Weaver In the rewinding system of the Lienier lens, ^ α ^ his aspheric microlenses and other optical components can improve the transmission efficiency and efficiency of the optical signal, and reduce the signal loss of the optical signal in the transmission field. The specular surface declares that the light signal processing device of the first item, wherein the reflective surface may include a plurality of optical elements. • Manufactured as the 1st t material for patent applications. Beizhijiu No. Λ processing device can use a single Π. For example, the scope of the patent application for the optical signal electrode far-field potential b / peak principle table where Jin Fanyi axis) _ Xu Yi substrate surface can be used (111) Silicon wafers with special off-axis and rff aXls angles are etched to form a local axis (off 2), such as the optical signal processing device 1 in the Guangming patent scope. The optical signal processing device is in a straight line. Including at least: '詈 i 之间 between the first rest position of the mirror surface and the second rest position of the output element.' • Let ’s talk about the input element and the optical signal wheel. Page 25, 1224205 VI. Patent application scope 19 · If the optical signal processing device of the first patent application scope, the reflection mirror can be produced using a (1 1 0) silicon wafer and a (1 0 0) silicon crystal At least one of the circles. 20. The optical signal processing device according to item 1 of the scope of patent application, further comprising: a first group of optical fibers, consisting of a first optical signal input element and a first optical signal output element, input from the first optical signal One of the component inputs is a first input optical signal that is aligned and can be completely output from the first optical signal output component; and a second group of optical fibers, consisting of a second optical signal input component and a second optical signal output component ' One of the second input optical signals input from the second optical signal input element is aligned and can be completely output from the second output element. The first input optical signal and the second input optical signal are coplanar and mutually perpendicular. When not actuated, one of the first rest positions of the mirror surface is between the first optical signal input element and the first optical signal output element, and 5 is between the second optical signal input element and the second optical signal output element. In between, the first rest position of the reflecting mirror surface allows the first input light signal and the second input light signal to be incident and re-reflected at an incident angle, respectively, and is output from the second output element and the first output, respectively. The output of the first input optical signal and the second input optical signal when the reflecting mirror is actuated along the track from the first rest position to the second rest position completely leaving the light path of the first input optical signal and the second input optical signal. The two input optical signals are output from the first optical signal output element and the second optical signal output element, respectively. 2 1. If the optical signal processing device of the 20th patent application scope, the first optical signal processing device Page 26 1224205 VI. Patent application scope The input ends of the signal input element and the second optical signal input element can be connected to the output ends of the first optical signal output element and the second optical signal output element respectively. At least one optical signal strength view The controller provides a feedforward signal or a feedback signal to the control circuit, and then controls the operation of the actuator to achieve the required signal attenuation strength. 2 2. If the optical signal processing device of the 20th scope of the patent application, an optical signal intensity viewer can be installed on at least one of the reflective mirror surface and the vicinity of the reflective mirror surface to detect blocking by the reflective mirror surface and reflecting the original The light intensity of the signal transmission path provides a feedforward signal or a feedback signal to the control circuit, and then controls the operation of the actuator to achieve the required light signal attenuation strength. 2 3. According to the optical signal processing device of the scope of patent application No. 20, wherein the input ends of the first 4 optical signal input elements and the second optical signal input elements and the first optical signal output elements and the second optical signal output elements At the output end, at least one light source and at least one signal viewer can be connected respectively to assist positioning. 24. If the optical signal processing device of the 20th scope of the patent application, the first optical signal input element, the second optical signal input element, the first optical signal output element and the second optical signal output element can be re-connected separately. A first optical fiber component, a second optical fiber component, a third optical fiber component, and a fourth optical fiber component. 2 5. If the optical signal processing device of the 20th patent application scope, the first optical signal input element, the second optical signal input element, the first optical signal output element and the second optical signal output element can be separately Connect a first optical waveguide, a second optical waveguide, a third optical waveguide, and a fourth optical waveguide Page 27 1224205 VI. Patent Application Waveguide. 26. The optical signal processing device according to item 20 of the patent application scope, wherein all of the optical signal input and output components may be at least one of various types of optical fibers or various types of optical waveguides. 27. If the optical signal processing device of item 1 or item 20 of the scope of patent application can be used for at least one of the optical switch array elements with adjustable light intensity attenuation function of single and multiple channels. 28. For the optical signal processing device in the first patent application scope, at least one of ceramic material, glassy material, semiconductor material and metal material can be used. Page 28