TWI222538B - Movable coupling moving fiber module - Google Patents

Abstract

A movable coupling moving fiber module includes suspending wires extends from the fix seat and activated by external driving force. The suspending wires links the receiving seat holds a fiber and then generates two axial plane parallel moving with non-inclination. This module applies multi-port fiber coupling and optical varying, products manufactures simple, convenient and decreased the cost.

Description

1222538 V. Description of the invention (l) Technical field to which the invention belongs] ... The present invention relates to a micro-actuated module, which is applied to a micro-electromechanical system

Micro Electro Mechanical System (MEMS) related optoelectronic industry ’is a fiber optic single-action coupling micro-actuated module that provides multi-port coupling and modulating optical attenuation. Prior technology] With the advancement of science and technology in the fields of electronics and machinery, it has brought benefits to the general public, especially the development of semiconductor manufacturing processes. In recent years, there have been major breakthroughs. In particular, the related research of micro-electromechanical systems (Micr ο E 1 ectr 〇 Mechanical System, MEM S), the traditional types of electrical components and mechanical structures, along with process innovation, make the volume of various types of parts more Coming smaller. Therefore, the extremely expensive technology products in the past, such as today, are not only more powerful and portable, but their prices are also relatively low and acceptable to the general public. For example, related applications in the field of light energy have the advantages of high-speed transmission and low attenuation, so many companies and research units have listed this as the focus of research and development. Behind these technology products, in fact, there are many technical problems that need to be broken. First, the problem of fiber coupling, such as "Compact Latching-Type Single-Mode-Fiber Switches Fabrication by a Fiber-Micromachining Technique and Their Practical Applications" (IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS, VOL. 5 NO. 1, JANUARY / FEBRUARY 1 9 9 9 pp. 3 6-4 5), please refer to "No. 1 1222538 V. Description of Invention (2)! Figure", which is a schematic diagram of a conventional optical fiber coupler. Its main composition is that the magnetically permeable sleeve 11 is sleeved on the optical fiber 10, and a magnetic field driving force is provided through the upper and lower coils 12 and the magnetic element 13, so that the magnetically permeable sleeve 1 1 is connected to the moving optical fiber 1 0 moves up and down the plane. At this time, the first optical fiber 15 and the second optical fiber 16 attached to the groove 14 respectively, and the optical fiber 10 is coupled to the An optical fiber 15 or a second optical fiber 16 produces the effect of a switch. However, the above-mentioned conventional methods have complicated magnetic circuit design, complicated optical fiber assembly and alignment technology, and are expensive, and are limited to one-to-two applications. The shortcomings have yet to be resolved. In addition to the application of light reduction, such as Maaty, H .; Bashir, Α ·; Saadany9 Β ·; Khalil, D. " Modeling and characterization of a VOA with different shutter thickness " (Photon i cs and Its Application at Egyptian Engineering Faculties and Institutes, 2002, pp. 117-122) and Olier, E. `` Optical MEMS devices based on moving waveguides "

Selected Topics in Quanturn Electronics, IEEE Journal on, Volume: 8 Issue: 1, Jan-Feb · 2002) Please refer to "Figure 2" for the first case, which is a schematic diagram of the conventional optical attenuator. A mobile metal shutter (Metallic Shutter 20) uses a piezoelectric actuator to link the metal shutter to generate the shielding of the 10 optical paths between two fixed optical fibers, so as to achieve the purpose of light volume modulation. Also as shown in Figure 3 " Is a schematic diagram of the second optical attenuator.

Page 7 1222538 V. Explanation of the invention (3) A cantilever beam optical waveguide 3 which can be moved left and right is used on the substrate 40, and the optical waveguide 3 is moved by the influence of electricity. 〇, and the same reached the amount of light modulation. However, the method proposed by Matty, H. is designed for a single-degree-of-freedom pressure actuator structure 'to achieve a light loss margin of 0.5 // m; sideways; and specifications of 0. 1 inclination, This makes the production of this actuator component incompatible with the semiconductor manufacturing process, and there is no mechanism for passive alignment of optical fibers on the component package, and it is limited to the application of optical attenuation. The methods provided by llier, E • have complex structural design, complicated semiconductor manufacturing processes for each component, low output power, high component environment requirements, and excessive light losses, which have yet to be overcome. ~ Summary of the invention] The present invention is to provide a fiber-optic movable coupling micro-actuating module to solve the above-mentioned conventional technical problems. The assembly can perform precise alignment and positioning and two-degree-of-freedom movement directions, and has the functions of precise light quantity adjustment and multi-port fiber switching. According to the optical fiber movable coupling micro-actuation module disclosed in the present invention, a fixed base is provided with a plurality of cantilever arms and connected to the receiving part, and a groove is provided on the base and the receiving part for receiving the optical fiber, and The optical fiber is firmly attached to the fixing base and the receiving part in multiple ways, and j G: the influence of the field interaction force 'makes the bearing' to produce a plane displacement of the thousand-plane or the inner thousand-plane, or the left and right planes, and then link the light.发明 'Invention description isalignment), and perform multi-port switching coupling or misalignment (obsessed with the purpose of light intensity modulation. The generating part has a greater rigidity than the connected cantilever, and the undertaking; = status cowaint) phenomenon, two 7¾ 姐 4 Λ exercise in an almost inclination-free manner. Furthermore, Gu ~, Yu Delong is provided with a plurality of plate-shaped bodies' When the receiving section is displaced ΐ ΐ = surrounding, from the above, the installation of the plate-shaped body prevents receiving two动 f dynamic displacement, which greatly improves the accuracy of optical fiber positioning. As for the driving method of the receiving part, static and dynamic thermal driving, electromagnetic actuation, piezoelectric power driving or other methods can be used to drive the coke. An optical fiber movable # 禺 合 微 acting module, a support structure of the 慙 #, and, and a driving force provided by the outside; and the optical fiber performs parallel and vertical movements on the plane or the left and right planes on the inner plane. The field of = has the advantages of small size, accurate positioning, and magnetic properties: easy, easy to install, high degree of freedom of movement, and low cost.... The purpose, structural features, and functions of the present invention are further advanced. Understanding of the paper matching diagram is described in detail as follows: [Embodiment] ^, a fiber-optic movable coupling micro-actuated mode disclosed in the present invention, and: various components used in the optoelectronic industry, such as optical switches (〇 pticai switch) and Variable 〇pUcal Attenuat ^) I222538

5. Description of the invention (5) and other components. Therefore, it can be seen from the above that the application range is very wide and the types are quite complicated. The i-knife includes several embodiments and is supplemented by illustrations. ^ Coupon 4 a…, Figure 4 "is a three-dimensional illustration of the first embodiment of the present invention 奄 m Jn ^ According to the optical fiber movable coupling micro" disclosed in the present invention, "Zhongyi f has a fixed seat 50, a cantilever 60 And the receiving part 70, = ^ ί 座 ^ The enclosing part 70 is respectively provided with a receiving groove 51 and a groove 71, and the inside and the bearing are in a "V" shape or a semi-circular concave shape, of course, it can be any complex shape. As long as the type can reach the accommodation fiber 10 and make it easy to attach (only shown in the illustration, the V "shape), it is necessary to add °.

The adhesive force of the fiber 10 can be fixed on the fixing base 50 and the receiving part 70, and the coating part of the joint is strong. There is a multi-layer adhesive on the coated part to prevent the optical fiber from leaving the receiving part 70 and fixing. Block 50 range. Furthermore, for the problem of the inclination angle in operation, a plurality of cantilever β β 〇 outward from the second phase t parallel to the parallel-parallel-like manner; = points = each other receiving part 70. At this time, because the receiving part U is tied to rs; :: ^, the right parallel movement. By making the receiving part 70 up and down or to the left with almost no inclination angle, the optical fiber can be 'formed 2z', and it is easy to know what is disclosed in the present invention ~

Department, more detailed later in the article 22 = composition of each element of the group and group of Pei ", this is the situation of the first application of the present invention. Please refer to ^ Light received in the joint 70. J: The operation of the example ® ’To make =! Xian fiber 1〇 This is enough to couple to multiple joints = bearing

Page 10 1222538

V. Description of the invention (6) ί There is a magnetic film on the surface of Λ160, and the magnetic drive is used to drive the article # Λ J The driver cantilever 60 generates a position, and the right = force drive 2 0 0 is not started, the receiving section 7 〇The accommodating optical fiber 10 is the light received by the joint 80 with the square joint. The magnetic field supplied by the control magnetic drive 200 is different. The strength of W can control the direction of the motion interaction force of the county arm 60 and further make the optical fiber 10 work in the same direction as the receiving part 70 and receive the optical fiber 81. For example, "the magnetic field provided by the connector 2 0 0 in the joint portion 80 of the first cuff, the first, the fifth, the two forces = and = several cantilever 60 are driven up and down by the magnetic force, so that the optical fiber is So that the actuator does not tilt at the receiving fiber t ,,, ## to the receiving fiber 81 or potential energy of the square. The operation of the switch or one-to-three optical switch is from the above; & Up and down movement Miao °, the cantilever 60 linkage with the receiving part 70 generates a plane ground direction, and can also perform in-plane ^ and is not limited to a single-degree-of-freedom motion diagram ", which is the parallel movement of the first lander f of the present invention, please refer to "The sixth force driver 2000 provides a top view of the magnetic seed embodiment. Similarly, the influence of the left / right / horizontal force on the inner plane of the magnetron enables the cantilever 60 to generate the movement of the receiving light 2 on the left, and then The driving optical fiber 10 can be coupled together, so that the optical fiber i 0f 8 1 or the receiving fiber 8 1 on the right side. Therefore, the total multi-port switching effect is combined in a plurality of receiving optical fibers 10 to achieve MEMS Swit Jh). 'Can be applied to micro-optical electromechanical switches (〇Ptical In addition, traditional optical transmission It is caused by the whole person's sufficiency. Due to the light cooperation, the offset is often too large or not. In order to effectively solve this problem, it can be fixed at 1222538.

5 0 and the receiving part 7 〇 respectively set the plate seat y… 叩 π 5 and low peach 7 Juya He 60 under the influence of the magnetic ρ 1 force to move, the plate can be opposed to each other, the action of the active part range. Please refer to "Figure 7", which is a schematic diagram of the example of the restricted receiving. The two ends of the fixed seat 50 are extended outward / but the brother = a kind of implementation of the supporting part 52 is installed inside a plurality of plates, divided into two = = 52 The upper positioning plate 520 and the upper side positioning plate 520 near the bottom are installed with corresponding upper joint plates 72 and the lower accessors J 'to receive the influence of external driving forces, so that the main board is accepted. 7 ^. At this time, the "r diagram": shows that in the second embodiment of the present invention, the joint plate 72i below the jm $ k receiving portion 70 is pressed against the display board 520, and the receiving portion 70 is restricted from being lifted up. Positioning on 卩 52 is more accurate for engaging. '\ Wait / enables the optical fiber 10 to be the second embodiment of the present invention. "As shown in the figure, the upper joint plate 72o abuts against the supporting portion 5. Without considering the figure, the receiving portion 70 and the receiving portion 70 move downward. When the position plate 52 restricts the movement, such as "the 9th fine", the "preparation receiving portion 70 is to the left 7 2 1 holding the support portion 5 2", and the connection plate 7 2 〇 and the lower connection plate such as " "Figure 9B" also shows the effect of the main sample six t to the limit of the range of movement; It is the same when moving to the direction, and it is not necessary to add anything here. It is not necessary to add that the support part 5 to the plate is not limited to the long plate body performance, the 2 position plate and the joint plate body of the receiving portion, as shown in "the 10th figure" ”:“ Of course, it can also be any type such as the function of triangular positioning for conflict resistance, but it is limited to the M 10B diagram ”, as long as it can remove the range of 70 activities of the multi-tracking connection section mentioned above. In addition to the application of dry switching, it can also be applied to 1222538. V. INTRODUCTION TO THE INVENTION (8) Optical MEMS Variable Attenunator needs to control the magnetic field size of the magnetic drive 2000, so it can control the displacement of 60 synchronously. To achieve the purpose of attenuation of light energy. It is disclosed here that “p and“ Figure 11B only makes the displacement of cantilever 60 0, rtn is transported to the Yuanwei & sad thief Waw you Fan disclosed another preferred embodiment. Please refer to " "Figure 11A" and "Figure 11B" are three-dimensional schematic diagrams of the third embodiment of the present invention, respectively, and the present invention is equivalent to the second embodiment of the present invention, which is the third embodiment of the present invention. Example A schematic cross-sectional view of a third embodiment. Based on the concept, an accommodating space is opened at the central portion of the fixed seat 50, and a plurality of cantilevers 60 are installed on the inner wall of one side of the accommodating space. It is connected to the receiving part 7 0. Similarly, receiving grooves 5 1 and grooves 7 1 are respectively provided on the upper side of the fixing seat 50 and the receiving part 7 q to receive the optical fiber 10. Of course In order to increase the optical fiber 丨 〇 attached to the fixed seat 5 〇 == 〇 'Multi-layer adhesive knees can be applied, so that light ^ ^ bears on the fixed seat 50 and the receiving portion 70. The process of yak solidification is as shown in Figure 2 = "Figure *" Λ "Here is a detailed description of the operation of this embodiment Bu ’s magnetic drive 2 0 0 (figure 5) produces a loss of 4 Γ ^ 小 官 仔 光光 1 〇 As mentioned above, with no inclination and lower e than the receiving fiber 81, the linkage control tension A is displaced downward. A false imitation of 1 mesh is generated, and the light-energy attenuation of the primary L-shaped receiving part 70 is misallgnment, and the present invention also reveals the s silk, 丨 > For m movable coupling / micro-actuating module, please refer to the different embodiments of 奄, +, and 四种, which are the four embodiments of the Ming 弟--the inside of the stand 2 and extend a plurality of cantilevers 6 inward. Take ^ 22538 V. Description of the invention (9) I pole is connected to the rain side of the receiving part 7G. This embodiment has a large restraint in the lateral direction, so it can effectively avoid the side from being disturbed by the outside and the phenomenon of lateral shock ： "Figure 12B" households show that when hanging 1 ^ 0 text to the influence of external forces, the linkage receiving part 70 produces another downward direction. 'In order to obtain better adjustment in structural rigidity, some geometrical bending designs can also be made on the cantilever 60, as shown in the "Figure", which is a schematic diagram of the fifth embodiment of the present invention . Among them, the cantilever 60 is composed of a flexible elastic material and has a geometric shape that continuously bends like a wave |, which makes the displacement of the receiving portion 7 0 elastic, so the range of movement | is more flexible. More here For a detailed description of the operation of this embodiment, please refer to "Figure 13", which is a schematic side view of the sixth embodiment of the present invention. At this time, the cantilever 60 is affected by the external force, and the linkage receiving portion 70 generates Displacement, so that the original optical fiber 10 is coupled to the first optical fiber 15 of the double-core glass head cover 9 0 (dua 1 core g 1 assferru 1 e), and the optical fiber 10 is handled by the movement of the receiving portion 70 It is combined with the second optical fiber 16 to achieve the effects of preventing lateral vibration and precise positioning. In addition to the above, it can be applied to optical switches and variable optical attenunators, as well as components such as modulators. That is to say, those skilled in the art can easily use various processes such as surface micromachining, volume micromachining, CMOS and LIGA-like processes to make integrations. 'With the photomask design, it is possible to make unilateral, bilateral bridge and other structures. With the size parameters and different materials 1222538 V. Description of the invention (ίο) The material can be applied to optical switches, adjustable attenuators, modulators, etc. More specifically, the differential structure design via the cantilever 60 , Can absorb the deformation of the rotation inclination, and can provide the left and right up and down movement of the receiving portion 70 parallel to the inner plane or the out plane. It should also be added that the Joule thermal driving method can also be used to make the cantilever 60 generate left and right motion of the inner plane. Of course, it can also be driven by means of electrostatic force, electromagnetic actuation, and piezoelectric power. The above are only the preferred embodiments of the present invention, and are not intended to limit the scope of implementation of the present invention; that is, all equivalent changes and modifications made in accordance with the scope of the patent application for the invention are covered by the scope of the patent for the invention .

Page 15 1222538 Brief description of the diagrams Figure 1 is a schematic diagram of a conventional optical fiber coupler; Figure 2 is a schematic diagram of a conventional optical attenuator; Figure 3 is a schematic diagram of a conventional second optical attenuator; Figure 4 is this A schematic perspective view of the first embodiment of the invention; FIG. 5 is a schematic diagram of the operation of the first embodiment of the invention; FIG. 6 is a top view of the first embodiment of the invention; 8A is a schematic diagram of actuation positioning above the second embodiment of the present invention, FIG. 8B is a schematic diagram of actuation positioning below the second embodiment of the present invention, and FIG. 9A is a schematic view of the second embodiment of the present invention Schematic diagram of left actuation positioning, FIG. 9B is a schematic diagram of right actuation positioning of the second embodiment of the present invention. Figures 1 〇 A ~ 1 〇 B is a schematic diagram of positioning action of the second embodiment of the present invention, FIG. 1 A This is a schematic perspective view of the third embodiment of the present invention; FIG. ΠB is a schematic side sectional view of the third embodiment of the present invention; FIG. 12A is a schematic perspective view of the fourth embodiment of the present invention; The figure shows the displacement of the fourth embodiment of the present invention. ; Fifth schematic view of a first embodiment of the present invention, graph 2C; and a second side 13 photo shows a sixth embodiment of the embodiment of the present invention is a cross-sectional schematic view of the actuator. [Schematic symbol description] 10 Optical fiber

1222538 Brief description of drawings 11 Magnetic sleeve 12 Coil 13 Magnetic element 14 Groove 15 First optical fiber 16 Second optical fiber 20 Metal shield 30 Cantilever optical waveguide 40 $ 夕 材料 50 Fixing seat 51 Receiving slot 52 bracket Part 520 upper positioning plate 521 lower positioning plate 60 cantilever 70 receiving portion 71 groove 720 upper joint plate 721 lower joint plate 80 joint portion 81 receiving optical fiber 90 double-core glass head cover 200 magnetic driver

Claims (1)

1222538 _Case No. 91137907_ Rev. _ VI. Scope of patent application 6. The fiber-optic movable coupling micro-actuation module described in item 1 of the patent application scope, wherein the receiving groove is a semi-circular inward recess. 7. The optical fiber movable coupling micro-actuated module according to item 1 of the scope of the patent application, wherein the fixed base is coated with multiple layers of adhesive to provide the optical fiber to be more firmly attached to the fixed base. 8. The optical fiber movable coupling micro-actuated module according to item 1 of the patent application scope, wherein the groove is a "V" -shaped concave type. 9. The optical fiber according to item 1 of the patent application scope Movable coupling micro-actuated module, wherein the groove is a semi-circular inward recessed type. 10. The optical fiber movable coupling micro-actuated module according to item 1 of the scope of patent application, wherein the receiving portion is coated with The multi-layer adhesive glue makes the # fiber more firmly attached to the receiving part. 1 1. The optical fiber movable coupling micro-actuation module according to item 1 of the scope of patent application, wherein the fixed seat includes A plurality of positioning plates. 12. The optical fiber movable coupling micro-actuated module according to item 11 of the scope of patent application, wherein the positioning plate is a long plate body. · 13. According to item 11 of the scope of patent application Optical fiber movable coupling micro-actuating module, wherein the positioning plate is a triangular plate body. 14. The optical fiber movable coupling micro-actuating module according to item 11 of the scope of patent application, wherein the positioning plate and the receiving portion correspond to the positioning plate. Contains the corresponding joint plate, when the receiving part is exposed When the i-parallel movement is performed under the influence of the driving force, the joint plate will abut the positioning plate of the fixed seat, thereby limiting the range of movement of the receiving part. 1 5. The optical fiber can be moved as described in item 14 of the scope of patent application Coupling Page 19 1222538 _ Case No. 91137907_ Month and year Amendment _ 6. Scope of patent application Movable module, where the joint plate is a long plate body. 16. The optical fiber movable coupling micro-actuating module according to item 14 of the scope of patent application, wherein the splicing plate is a triangular plate body. 1 7. The optical fiber movable coupling micro-actuation module according to item 1 of the scope of the patent application, wherein the surface of the cantilever is coated with a magnetic film, and a magnetic field interaction force is provided by an external magnetic driver to control the magnetic field. The cantilever generates displacements up and down or left and right on the plane. 1 8. The optical fiber movable coupling micro-actuation module according to item 1 of the scope of the patent application, wherein two ends of the fixed base include two supporting portions extending outward and parallel to each other. 19. The optical fiber movable coupling micro-actuation module according to item 18 of the scope of the patent application, further comprising a plurality of cantilever arms which are relatively parallel to each other, extending from the supporting portion and connected to both sides of the receiving portion. 20. The optical fiber movable coupling micro-actuation module according to item 1 of the scope of the patent application, wherein the cantilever is made of a flexible elastic material and has a continuous bending geometry. Page 20