TWD231625S - Part of the protective film frame - Google Patents

Part of the protective film frame Download PDF

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Publication number
TWD231625S
TWD231625S TW111301064F TW111301064F TWD231625S TW D231625 S TWD231625 S TW D231625S TW 111301064 F TW111301064 F TW 111301064F TW 111301064 F TW111301064 F TW 111301064F TW D231625 S TWD231625 S TW D231625S
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TW
Taiwan
Prior art keywords
view
advocated
case
design
diagram
Prior art date
Application number
TW111301064F
Other languages
Chinese (zh)
Inventor
簗瀨優
Original Assignee
日商信越化學工業股份有限公司 (日本)
日商信越化學工業股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商信越化學工業股份有限公司 (日本), 日商信越化學工業股份有限公司 filed Critical 日商信越化學工業股份有限公司 (日本)
Priority to TW111301064F priority Critical patent/TWD231625S/en
Publication of TWD231625S publication Critical patent/TWD231625S/en

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Abstract

【物品用途】;本設計物品為裝設於微影技術用光罩之防護薄膜框架。;【設計說明】;圖式所揭露之實線部分為本案主張設計之部分,圖式所揭露之虛線部分為本案不主張設計之部分。圖式中的一點鏈線係界定本案所欲主張之範圍,該一點鏈線本身為本案不主張設計之部分。;右側視圖與左側視圖對稱,故省略右側視圖。;仰視圖與俯視圖對稱,故省略仰視圖。;局部放大圖A為左側視圖中之A部分的局部放大圖。;立體圖中之實線部分為由圖式中之一點鏈線所界定的本案所欲主張之範圍。[Use of the article]; This design article is a protective film frame installed on a photomask used in lithography technology. ;[Design Description]; The solid line part disclosed in the diagram is the part of the design advocated by this case, and the dotted line part disclosed in the diagram is the part of the design not advocated by this case. The one-dot chain line in the diagram defines the scope advocated by this case, and the one-dot chain line itself is the part of the design not advocated by this case. ; The right side view is symmetrical with the left side view, so the right side view is omitted. ; The bottom view is symmetrical with the top view, so the bottom view is omitted. ; The partial enlarged view A is a partial enlarged view of the A part in the left side view. ; The solid line part in the three-dimensional view is the scope advocated by this case defined by the one-dot chain line in the diagram.

Description

防護薄膜框架之部分 Part of the protective film frame

本設計物品為裝設於微影技術用光罩之防護薄膜框架。 This design item is a protective film frame installed on the photomask used in lithography technology.

圖式所揭露之實線部分為本案主張設計之部分,圖式所揭露之虛線部分為本案不主張設計之部分。圖式中的一點鏈線係界定本案所欲主張之範圍,該一點鏈線本身為本案不主張設計之部分。 The solid line part of the diagram is the part of the design advocated by this case, and the dotted line part of the diagram is the part of the design not advocated by this case. The one-point chain line in the diagram defines the scope advocated by this case, and the one-point chain line itself is the part of the design not advocated by this case.

右側視圖與左側視圖對稱,故省略右側視圖。 The right view is symmetrical to the left view, so the right view is omitted.

仰視圖與俯視圖對稱,故省略仰視圖。 The bottom view is symmetrical to the top view, so the bottom view is omitted.

局部放大圖A為左側視圖中之A部分的局部放大圖。 The enlarged partial view A is an enlarged partial view of the A part in the left view.

立體圖中之實線部分為由圖式中之一點鏈線所界定的本案所欲主張之範圍。 The solid line part in the three-dimensional diagram is the scope of the case defined by a dotted line in the diagram.

TW111301064F 2018-10-08 2018-10-08 Part of the protective film frame TWD231625S (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW111301064F TWD231625S (en) 2018-10-08 2018-10-08 Part of the protective film frame

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW111301064F TWD231625S (en) 2018-10-08 2018-10-08 Part of the protective film frame

Publications (1)

Publication Number Publication Date
TWD231625S true TWD231625S (en) 2024-06-11

Family

ID=92591320

Family Applications (1)

Application Number Title Priority Date Filing Date
TW111301064F TWD231625S (en) 2018-10-08 2018-10-08 Part of the protective film frame

Country Status (1)

Country Link
TW (1) TWD231625S (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW201202047A (en) 2010-03-29 2012-01-16 Shinetsu Chemical Co Pellicle, mounting method therefor, pellicle-equipped mask, and mask

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW201202047A (en) 2010-03-29 2012-01-16 Shinetsu Chemical Co Pellicle, mounting method therefor, pellicle-equipped mask, and mask

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