TWD230594S - Processing chamber purge plate - Google Patents
Processing chamber purge plate Download PDFInfo
- Publication number
- TWD230594S TWD230594S TW111305355F TW111305355F TWD230594S TW D230594 S TWD230594 S TW D230594S TW 111305355 F TW111305355 F TW 111305355F TW 111305355 F TW111305355 F TW 111305355F TW D230594 S TWD230594 S TW D230594S
- Authority
- TW
- Taiwan
- Prior art keywords
- processing chamber
- purge plate
- chamber purge
- view
- plate
- Prior art date
Links
- 238000010926 purge Methods 0.000 title description 3
- 238000004140 cleaning Methods 0.000 description 7
- 238000000034 method Methods 0.000 description 2
Images
Description
立體圖1為處理腔室淨洗板之裝飾性設計的視圖。 Figure 1 is a perspective view of the decorative design of the process chamber purge plate.
立體圖2為立體圖1之處理腔室淨洗板的視圖。 The three-dimensional figure 2 is a view of the cleaning plate of the processing chamber in the three-dimensional figure 1.
右側視圖為立體圖1之處理腔室淨洗板的視圖。 The right side view is a view of the processing chamber cleaning plate in the three-dimensional figure 1.
左側視圖為立體圖1之處理腔室淨洗板的視圖。 The left side view is a view of the processing chamber cleaning plate in the three-dimensional figure 1.
後視圖為立體圖1之處理腔室淨洗板的視圖。 The rear view is a view of the processing chamber cleaning plate in the three-dimensional figure 1.
前視圖為立體圖1之處理腔室淨洗板的視圖。 The front view is a view of the processing chamber cleaning plate in the three-dimensional figure 1.
俯視圖為立體圖1之處理腔室淨洗板的視圖。 The top view is a view of the processing chamber cleaning plate in the three-dimensional figure 1.
仰視圖為立體圖1之處理腔室淨洗板的視圖。 The bottom view is a view of the processing chamber cleaning plate in the three-dimensional figure 1.
虛線顯示不構成主張設計之部分的環境與邊界。 Dashed lines show surroundings and boundaries that do not form part of the claimed design.
如同顯示與說明，本設計係主張處理腔室淨洗板的裝飾性設計。 As shown and described, this design is intended to be a decorative design for the process chamber purge plate.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US29/792,965 | 2022-05-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TWD230594S true TWD230594S (en) | 2024-04-01 |
Family
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Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWD211239S (en) | 2019-11-28 | 2021-05-01 | 日商國際電氣股份有限公司 | Wafer holder part |
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWD211239S (en) | 2019-11-28 | 2021-05-01 | 日商國際電氣股份有限公司 | Wafer holder part |
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