TWD229955S - 處理腔室泵送襯裡 - Google Patents
處理腔室泵送襯裡 Download PDFInfo
- Publication number
- TWD229955S TWD229955S TW112302047F TW112302047F TWD229955S TW D229955 S TWD229955 S TW D229955S TW 112302047 F TW112302047 F TW 112302047F TW 112302047 F TW112302047 F TW 112302047F TW D229955 S TWD229955 S TW D229955S
- Authority
- TW
- Taiwan
- Prior art keywords
- process chamber
- chamber pumping
- pumping liner
- liner
- lining
- Prior art date
Links
- 238000005086 pumping Methods 0.000 title description 2
- 238000000034 method Methods 0.000 title 1
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Description
本設計請求處理腔室泵送襯裡之外觀設計。
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US29/867,553 | 2022-10-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TWD229955S true TWD229955S (zh) | 2024-02-11 |
Family
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Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWD215398S (zh) | 2020-03-20 | 2021-11-21 | 美商應用材料股份有限公司 | 基板處理腔室的製程護罩 |
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWD215398S (zh) | 2020-03-20 | 2021-11-21 | 美商應用材料股份有限公司 | 基板處理腔室的製程護罩 |
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