TWD229907S - Mainframe of substrate processing system with integrated lid - Google Patents

Mainframe of substrate processing system with integrated lid Download PDF

Info

Publication number
TWD229907S
TWD229907S TW111304073F TW111304073F TWD229907S TW D229907 S TWD229907 S TW D229907S TW 111304073 F TW111304073 F TW 111304073F TW 111304073 F TW111304073 F TW 111304073F TW D229907 S TWD229907 S TW D229907S
Authority
TW
Taiwan
Prior art keywords
processing system
substrate processing
mainframe
integrated lid
design
Prior art date
Application number
TW111304073F
Other languages
Chinese (zh)
Inventor
麥可R 萊斯
麥可C 庫加爾
羅伯特M 麥克安卓
崔維斯 莫瑞
亞當J 懷爾特
歐佛 艾莫
蘇珊特S 柯西堤
安琪拉羅絲 西可
Original Assignee
美商應用材料股份有限公司 (美國)
美商應用材料股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 美商應用材料股份有限公司 (美國), 美商應用材料股份有限公司 filed Critical 美商應用材料股份有限公司 (美國)
Publication of TWD229907S publication Critical patent/TWD229907S/en

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Abstract

【物品用途】;本設計所請求係具有整合式蓋件的基板處理系統之框架。;【設計說明】;圖式所揭露之虛線部分,為本案不主張設計之部分。【Article Purpose】;This design is for a substrate processing system frame with an integrated cover. ;【Design Description】;The dotted line portion of the diagram is not a design claim of this case.

Description

具有整合式蓋件的基板處理系統之框架Frame for substrate handling system with integrated cover

本設計所請求係具有整合式蓋件的基板處理系統之框架。The proposed design is a frame for a substrate handling system with an integrated cover.

圖式所揭露之虛線部分,為本案不主張設計之部分。The dotted line parts revealed in the diagram are the parts that are not designed in this case.

TW111304073F 2022-02-28 2022-08-17 Mainframe of substrate processing system with integrated lid TWD229907S (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US29/828,766 2022-02-28
US202229828766 2022-02-28

Publications (1)

Publication Number Publication Date
TWD229907S true TWD229907S (en) 2024-02-11

Family

ID=85986918

Family Applications (3)

Application Number Title Priority Date Filing Date
TW111304073F TWD229907S (en) 2022-02-28 2022-08-17 Mainframe of substrate processing system with integrated lid
TW112303907F TWD231408S (en) 2022-02-28 2022-08-17 Mainframe of substrate processing system with integrated lid
TW112303908F TWD231409S (en) 2022-02-28 2022-08-17 Mainframe of substrate processing system with integrated lid

Family Applications After (2)

Application Number Title Priority Date Filing Date
TW112303907F TWD231408S (en) 2022-02-28 2022-08-17 Mainframe of substrate processing system with integrated lid
TW112303908F TWD231409S (en) 2022-02-28 2022-08-17 Mainframe of substrate processing system with integrated lid

Country Status (2)

Country Link
JP (3) JP1747668S (en)
TW (3) TWD229907S (en)

Also Published As

Publication number Publication date
JP1742488S (en) 2023-04-20
TWD231409S (en) 2024-05-21
JP1747668S (en) 2023-06-29
TWD231408S (en) 2024-05-21
JP1758527S (en) 2023-11-30

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