TWD219423S - Self-fastened low friction pad for a target assembly - Google Patents

Self-fastened low friction pad for a target assembly Download PDF

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Publication number
TWD219423S
TWD219423S TW110301984F TW110301984F TWD219423S TW D219423 S TWD219423 S TW D219423S TW 110301984 F TW110301984 F TW 110301984F TW 110301984 F TW110301984 F TW 110301984F TW D219423 S TWD219423 S TW D219423S
Authority
TW
Taiwan
Prior art keywords
target assembly
self
friction pad
view
friction
Prior art date
Application number
TW110301984F
Other languages
Chinese (zh)
Inventor
伊利亞 拉維斯基
凱斯Ａ 米勒
Original Assignee
美商應用材料股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by 美商應用材料股份有限公司 filed Critical 美商應用材料股份有限公司
Publication of TWD219423S publication Critical patent/TWD219423S/en

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Abstract

【物品用途】;本設計所應用之物品為「用於靶組件的自固定式低摩擦墊」。該自固定式低摩擦墊只需插入靶組件背板上的孔中而不需要透過外部緊固件即可固定，藉此降低半導體處理腔室中的靶組件與支撐靶組件的支撐構件之間的摩擦且增加墊的承載表面積。;【設計說明】;後視圖與前視圖相同因而省略。;右側視圖與左側視圖相同因而省略。[Use of item]; The item used in this design is "self-fixing low-friction pad for target assembly". The self-retaining, low-friction pad simply inserts into a hole in the backplate of the target assembly and can be fixed without the need for external fasteners, thereby reducing friction between the target assembly in the semiconductor processing chamber and the support member supporting the target assembly. Friction and increases the load-bearing surface area of the pad. ;[Design Description];The rear view is the same as the front view and is omitted. ;The right side view is the same as the left side view and is therefore omitted.

Description

用於靶組件的自固定式低摩擦墊 Self-Securing Low Friction Pads for Target Assemblies

本設計所應用之物品為「用於靶組件的自固定式低摩擦墊」。該自固定式低摩擦墊只需插入靶組件背板上的孔中而不需要透過外部緊固件即可固定，藉此降低半導體處理腔室中的靶組件與支撐靶組件的支撐構件之間的摩擦且增加墊的承載表面積。 The item applied in this design is "Self-Fixing Low Friction Pad for Target Assembly". The self-fixating low-friction pad can be fastened by simply inserting into the holes in the target assembly backing plate without external fasteners, thereby reducing the friction between the target assembly in the semiconductor processing chamber and the support member supporting the target assembly friction and increase the load bearing surface area of the pad.

後視圖與前視圖相同因而省略。 The rear view is the same as the front view and is therefore omitted.

右側視圖與左側視圖相同因而省略。 The right side view is the same as the left side view and thus omitted.

TW110301984F 2020-10-23 2021-04-20 Self-fastened low friction pad for a target assembly TWD219423S (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US202029755888 2020-10-23
US29/755,888 2020-10-23

Publications (1)

Publication Number Publication Date
TWD219423S true TWD219423S (en) 2022-06-21

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ID=78282495

Family Applications (1)

Application Number Title Priority Date Filing Date
TW110301984F TWD219423S (en) 2020-10-23 2021-04-20 Self-fastened low friction pad for a target assembly

Country Status (2)

Country Link
JP (2) JP1700630S (en)
TW (1) TWD219423S (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD706362S1 (en) 2013-04-03 2014-06-03 Innovation First, Inc. Pin connector component for a construction kit

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD706362S1 (en) 2013-04-03 2014-06-03 Innovation First, Inc. Pin connector component for a construction kit

Also Published As

Publication number Publication date
JP1700630S (en) 2021-11-29
JP1698396S (en) 2021-11-01

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