TWD204698S - Wafer processing machine for producing semiconductors - Google Patents

Wafer processing machine for producing semiconductors Download PDF

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Publication number
TWD204698S
TWD204698S TW108302477D01F TW108302477D01F TWD204698S TW D204698 S TWD204698 S TW D204698S TW 108302477D01 F TW108302477D01 F TW 108302477D01F TW 108302477D01 F TW108302477D01 F TW 108302477D01F TW D204698 S TWD204698 S TW D204698S
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TW
Taiwan
Prior art keywords
processing
showing
parts
case
design
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TW108302477D01F
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Chinese (zh)
Inventor
奥間惇治
坂本剛志
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日商濱松赫德尼古斯股份有限公司
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Publication of TWD204698S publication Critical patent/TWD204698S/en

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Abstract

【物品用途】;本案設計之物品係用於晶圓之切斷及槽之形成等加工之半導體製造用晶圓加工機。本物品具備2個加工部,自加工部之透明部照射雷射光且加工載置於載置部之晶圓。加工部如「顯示使用狀態與各部名稱之參考圖」所示,每個保持部上下及左右方向可動。載置部如「顯示使用狀態與各部名稱之參考圖」所示,沿前後方向可動。;【設計說明】;2個加工部之構成相同。圖式所揭露之虛線部分,為本案不主張設計之部分。圖式中一點鏈線所圍繞者,係界定本案所欲主張之範圍。於「顯示申請部分之參考圖1」及「顯示申請部分之參考圖2」中,著色為紅色之部分為本案主張設計之部分。;圖式所揭露之實線部分僅表示加工部,加工部以外全部用虛線表示。於「顯示申請部分與圍繞物之放大立體圖」、「加工部之放大立體圖1」及「加工部之放大立體圖2」中所示之細線均係表示立體表面形狀之線。於「顯示透明部與各部名稱之參考圖」中,施加有斜線之部分為透明。;本案設計係新穎獨特之樣式,藉由獨特地設計半導體製造用晶圓加工機,可顯現出先前技藝所未有之視覺效果。[Use of article]: The article designed in this case is a wafer processing machine for semiconductor manufacturing that is used for cutting wafers and forming grooves. This product has two processing sections. The transparent part of the processing section irradiates laser light and processes the wafer placed on the mounting section. The processing part is as shown in the "reference diagram showing the usage status and the names of each part", and each holding part is movable in the up and down and left and right directions. The placement part is movable in the front-to-back direction as shown in the "Reference Picture Showing Use Status and Names of Each Part". ;[Design Description];The two processing departments have the same composition. The dotted line parts revealed in the diagram are the parts for which design is not advocated in this case. What is surrounded by a chain line in the diagram defines the scope of the claim in this case. In "Reference Figure 1 showing the application part" and "Reference Figure 2 showing the application part", the parts colored in red are the parts of the proposed design of this case. ; The solid line part disclosed in the drawing only represents the processing part, and everything other than the processing part is represented by dotted lines. The thin lines shown in "Enlarged perspective view showing the application part and surrounding object", "Enlarged perspective view 1 of the processing part" and "Enlarged perspective view 2 of the processing part" are all lines showing the three-dimensional surface shape. In the "reference picture showing transparent parts and names of each part", the parts with hatched lines are transparent. ;The design of this case is a novel and unique style. By uniquely designing the wafer processing machine for semiconductor manufacturing, it can show visual effects unprecedented in previous technologies.

Description

半導體製造用晶圓加工機 Wafer processing machine for semiconductor manufacturing

本案設計之物品係用於晶圓之切斷及槽之形成等加工之半導體製造用晶圓加工機。本物品具備2個加工部,自加工部之透明部照射雷射光且加工載置於載置部之晶圓。加工部如「顯示使用狀態與各部名稱之參考圖」所示,每個保持部上下及左右方向可動。載置部如「顯示使用狀態與各部名稱之參考圖」所示,沿前後方向可動。 The article designed in this case is a wafer processing machine for semiconductor manufacturing used for wafer cutting and groove formation. This article is equipped with two processing parts, irradiates laser light from the transparent part of the processing part, and processes the wafer placed on the mounting part. The processing section is shown in the "Reference Map for Displaying the Status of Use and the Names of Each Section", and each holding section is movable in the vertical and horizontal directions. The mounting part is movable in the front-rear direction as shown in the "Reference diagram showing the use status and the names of each part".

2個加工部之構成相同。圖式所揭露之虛線部分,為本案不主張設計之部分。圖式中一點鏈線所圍繞者,係界定本案所欲主張之範圍。於「顯示申請部分之參考圖1」及「顯示申請部分之參考圖2」中,著色為紅色之部分為本案主張設計之部分。 The structure of the two processing parts is the same. The dotted line exposed in the diagram is the part that does not advocate design in this case. The circle surrounded by a dotted line in the diagram defines the scope claimed in this case. In "Reference Image 1 for Displaying the Application Part" and "Reference Image 2 for Displaying the Application Part", the part colored in red is the design part claimed in this case.

圖式所揭露之實線部分僅表示加工部,加工部以外全部用虛線表示。於「顯示申請部分與圍繞物之放大立體圖」、「加工部之放大立體圖1」及「加工部之放大立體圖2」中所示之細線均係表示立體表面形狀之線。於「顯示透明部與各部名稱之參考圖」中,施加有斜線之部分為透明。 The solid line part disclosed in the drawing only shows the processed part, and all the parts except the processed part are indicated by broken lines. The thin lines shown in "Enlarged perspective view showing the application part and surroundings", "Enlarged perspective view 1 of the processing section" and "Enlarged perspective view 2 of the processing section" are lines representing the shape of the three-dimensional surface. In "Reference map showing the transparent part and the name of each part", the part with diagonal lines is transparent.

本案設計係新穎獨特之樣式,藉由獨特地設計半導體製造用晶圓加工機,可顯現出先前技藝所未有之視覺效果。 The design of this case is a novel and unique style. By uniquely designing the wafer processing machine for semiconductor manufacturing, it can show the visual effects unprecedented in the prior art.

TW108302477D01F 2018-10-31 2019-04-30 Wafer processing machine for producing semiconductors TWD204698S (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2018-023978 2018-10-31
JPD2018-23978F JP1640600S (en) 2018-10-31 2018-10-31

Publications (1)

Publication Number Publication Date
TWD204698S true TWD204698S (en) 2020-05-11

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Application Number Title Priority Date Filing Date
TW108302477D01F TWD204698S (en) 2018-10-31 2019-04-30 Wafer processing machine for producing semiconductors

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JP (1) JP1640600S (en)
TW (1) TWD204698S (en)

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JP1640600S (en) 2019-09-02

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