TWD200230S - Semiconductor manufacturing equipment with animated graphical user interface - Google Patents

Abstract

[Use of article]; This article is a semiconductor manufacturing machine, used to process semiconductor wafers. The display part of the display machine part has functions such as moving the circular wafer displayed on the screen, so it can be used in the semiconductor manufacturing machine. A function that allows you to see at a glance the status of processing processes such as grinding, cleaning, and drying of semiconductor wafers. It has a function of displaying a semicircle-shaped image and a perfect circle-shaped image alternately in a frame that separates the processing processes for each processing process, thereby displaying the progress level of the processing process. The semicircular-shaped images in the "Front View", "Enlarged Front View Showing the Equipment Section" and "A-A, B-B Line Parts Enlarged Front View" show the start of a specific process of semiconductor wafers and the continuation of this process. The image of the function of the state, the image of the perfect circle in the "enlarged front view of the A-A, B-B line part of the changing state", is a state that shows the completion of the specific process and before moving to another process. The image of the function, the semicircle-shaped image in the "A-A, B-B line part enlargement of the changing state, refer to Figure 1", has the function of starting other processing processes of the semiconductor wafer from the state where the aforementioned specific processing is completed. , the image of the function that continues the state of the process, the image of a perfect circle in "The A-A, B-B line part of the changing state is enlarged, refer to Figure 2", is that other processes have been completed, and then moved to another process. An image of the function in its previous state. Furthermore, in this article, in the display unit of the display device unit, the shape of the frame for separating each process process can be set in accordance with the number of semiconductor wafers to be processed and the number of process processes. ;[Design Description];The dotted line part shown in the diagram is the part of this case that does not require design; the dotted chain line in the diagram shows the display screen of the application item of this case, which is the part of this case that does not advocate design. ;The enlarged front view of the A-A and B-B lines is an enlarged view of the A-A and B-B lines in the enlarged front view of the machine section. The enlarged front view of the A-A and B-B lines in the changed state is an enlarged front view of the A-A and B-B lines in the enlarged front view of the machine part showing the changed state.