TWD190811S - Substrate tray - Google Patents

Substrate tray

Info

Publication number
TWD190811S
TWD190811S TW106306289F TW106306289F TWD190811S TW D190811 S TWD190811 S TW D190811S TW 106306289 F TW106306289 F TW 106306289F TW 106306289 F TW106306289 F TW 106306289F TW D190811 S TWD190811 S TW D190811S
Authority
TW
Taiwan
Prior art keywords
substrate
substrate tray
tray
design
rotation
Prior art date
Application number
TW106306289F
Other languages
Chinese (zh)
Inventor
世平 郭
姜勇
陶珩
李可
志游 杜
Original Assignee
大陸商中微半導體設備（上海）有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 大陸商中微半導體設備（上海）有限公司 filed Critical 大陸商中微半導體設備（上海）有限公司
Publication of TWD190811S publication Critical patent/TWD190811S/en

Links

Abstract

【物品用途】;本設計是有關於一種基片托盤之設計，特別是有關於一種用於承載待加工基片，並與旋轉軸配合驅動托盤上的基片旋轉。;【設計說明】;無。[Use of article] This design is about a substrate tray, especially a substrate tray that is used to carry the substrate to be processed and cooperates with the rotation axis to drive the rotation of the substrate on the tray. ;[Design description];None.

Description

基片托盤Substrate tray

本設計是有關於一種基片托盤之設計，特別是有關於一種用於承載待加工基片，並與旋轉軸配合驅動托盤上的基片旋轉。The present design relates to the design of a substrate tray, and more particularly to a substrate for carrying a substrate to be processed and cooperating with a rotating shaft to drive the rotation of the substrate on the tray.

無。no.

TW106306289F 2017-07-11 2017-10-26 Substrate tray TWD190811S (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CN201730303482 2017-07-11
??201730303482.2 2017-07-11

Publications (1)

Publication Number Publication Date
TWD190811S true TWD190811S (en) 2018-06-01

Family

ID=89070839

Family Applications (1)

Application Number Title Priority Date Filing Date
TW106306289F TWD190811S (en) 2017-07-11 2017-10-26 Substrate tray

Country Status (1)

Country Link
TW (1) TWD190811S (en)

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