TWD181804S - 流體控制閥單元 - Google Patents

流體控制閥單元

Info

Publication number
TWD181804S
TWD181804S TW105302287F TW105302287F TWD181804S TW D181804 S TWD181804 S TW D181804S TW 105302287 F TW105302287 F TW 105302287F TW 105302287 F TW105302287 F TW 105302287F TW D181804 S TWD181804 S TW D181804S
Authority
TW
Taiwan
Prior art keywords
fluid
control valve
design
fluid control
side block
Prior art date
Application number
TW105302287F
Other languages
English (en)
Inventor
Kohei Shigyou
Takashi Hirose
Kouji Nishino
Ryousuke Dohi
Naofumi Yasumoto
Original Assignee
富士金股份有限公司
Fujikin Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 富士金股份有限公司, Fujikin Kk filed Critical 富士金股份有限公司
Publication of TWD181804S publication Critical patent/TWD181804S/zh

Links

Abstract

【物品用途】;本設計係有關於一種新穎的流體控制閥。;【設計說明】;本設計物品，在半導體製造裝置中是用於控制處理氣體等流體。如參考圖所示，在進行流體的控制之流體控制閥的入口側，配置有形成流體導入通道的入口側塊體，在同出口側，配置有形成流體排出通道的出口側塊體，從入口側塊體導入的流體係經由流體控制閥及出口側塊體排出。;本案圖式中以實線表現的部分為主張設計之部分，作為部分設計。
TW105302287F 2015-10-30 2016-04-28 流體控制閥單元 TWD181804S (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JPD2015-24300F JP1551476S (zh) 2015-10-30 2015-10-30

Publications (1)

Publication Number Publication Date
TWD181804S true TWD181804S (zh) 2017-03-11

Family

ID=56105169

Family Applications (1)

Application Number Title Priority Date Filing Date
TW105302287F TWD181804S (zh) 2015-10-30 2016-04-28 流體控制閥單元

Country Status (2)

Country Link
JP (1) JP1551476S (zh)
TW (1) TWD181804S (zh)

Also Published As

Publication number Publication date
JP1551476S (zh) 2016-06-13

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