TWD175848S - Heat insulator for substrate processing equipment - Google Patents
Heat insulator for substrate processing equipmentInfo
- Publication number
- TWD175848S TWD175848S TW104304614F TW104304614F TWD175848S TW D175848 S TWD175848 S TW D175848S TW 104304614 F TW104304614 F TW 104304614F TW 104304614 F TW104304614 F TW 104304614F TW D175848 S TWD175848 S TW D175848S
- Authority
- TW
- Taiwan
- Prior art keywords
- substrate processing
- processing equipment
- heat insulator
- strip
- heater
- Prior art date
Links
- 239000012212 insulator Substances 0.000 title abstract 4
- 239000000758 substrate Substances 0.000 title abstract 3
- 238000010438 heat treatment Methods 0.000 abstract 1
- 239000007788 liquid Substances 0.000 abstract 1
- 239000007787 solid Substances 0.000 abstract 1
Abstract
【物品用途】;本設計的物品是基板處理裝置用隔熱具，主要是在基板處理裝置中，在用來加熱處理液或處理氣體的配管的周圍，連同加熱源之帶狀加熱器安裝在一起使用的隔熱具。;【設計說明】;如「表示各部名稱之參考圖」所示，是以魔鬼氈進行對配管的固定。而且是藉由條狀的加熱器容器，將條狀加熱器固定於該隔熱具的其中一面(安裝於配管時成為內側的面)的構造。本物品的全長為3950mm，從正視圖右端起以150mm的單位形成三個可分別切離使用的單位，剩餘的3500mm是將兩個魔鬼氈與一個加熱器容器當作一個組合，該組合係連續反覆地形成。;圖式中各視圖中所表示的細線，用來表示立體表面的特定形狀。;圖式中省略的部分長度為3060mm。[Use of article] The article of this design is a heat insulator for substrate processing equipment. It is mainly used in substrate processing equipment. It is installed around the pipes used to heat the processing liquid or processing gas, together with the strip heater of the heating source. Insulators used together. ;[Design Description];As shown in the "reference drawing showing the names of each part", the piping is fixed with Velcro felt. Furthermore, it is a structure in which a strip-shaped heater is fixed to one surface of the heat insulator (the inner surface when it is installed on a pipe) through a strip-shaped heater container. The total length of this product is 3950mm. From the right end of the front view, three units are formed in units of 150mm that can be separately cut and used. The remaining 3500mm is a combination of two Velcro felts and a heater container. This combination is continuous. formed repeatedly. ;The thin lines shown in the various views of the drawings are used to indicate the specific shape of the solid surface. ;The length of the part omitted in the drawing is 3060mm.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JPD2015-3955F JP1535453S (en) | 2015-02-25 | 2015-02-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TWD175848S true TWD175848S (en) | 2016-05-21 |
Family
ID=54293781
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW104304614F TWD175848S (en) | 2015-02-25 | 2015-08-24 | Heat insulator for substrate processing equipment |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP1535453S (en) |
| TW (1) | TWD175848S (en) |
-
2015
- 2015-02-25 JP JPD2015-3955F patent/JP1535453S/ja active Active
- 2015-08-24 TW TW104304614F patent/TWD175848S/en unknown
Also Published As
| Publication number | Publication date |
|---|---|
| JP1535453S (en) | 2015-10-19 |
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