TWD174920S - 基板處理裝置用氣體供給噴嘴 - Google Patents

基板處理裝置用氣體供給噴嘴

Info

Publication number
TWD174920S
TWD174920S TW104301010D01F TW104301010D01F TWD174920S TW D174920 S TWD174920 S TW D174920S TW 104301010D01 F TW104301010D01 F TW 104301010D01F TW 104301010D01 F TW104301010D01 F TW 104301010D01F TW D174920 S TWD174920 S TW D174920S
Authority
TW
Taiwan
Prior art keywords
design
gas supply
substrate processing
processing equipment
supply nozzle
Prior art date
Application number
TW104301010D01F
Other languages
English (en)
Chinese (zh)
Inventor
Shinya Morita
Masahiro Miyake
Masato Terasaki
Naoki Matsumoto
Naonori Akae
Original Assignee
日立國際電氣股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日立國際電氣股份有限公司 filed Critical 日立國際電氣股份有限公司
Publication of TWD174920S publication Critical patent/TWD174920S/zh

Links

TW104301010D01F 2015-01-28 2015-02-26 基板處理裝置用氣體供給噴嘴 TWD174920S (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JPD2015-1516F JP1534651S (enrdf_load_stackoverflow) 2015-01-28 2015-01-28

Publications (1)

Publication Number Publication Date
TWD174920S true TWD174920S (zh) 2016-04-11

Family

ID=54238117

Family Applications (1)

Application Number Title Priority Date Filing Date
TW104301010D01F TWD174920S (zh) 2015-01-28 2015-02-26 基板處理裝置用氣體供給噴嘴

Country Status (3)

Country Link
US (1) USD771772S1 (enrdf_load_stackoverflow)
JP (1) JP1534651S (enrdf_load_stackoverflow)
TW (1) TWD174920S (enrdf_load_stackoverflow)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6320824B2 (ja) * 2014-03-31 2018-05-09 株式会社東芝 ガス供給管、およびガス処理装置
JP1547057S (enrdf_load_stackoverflow) * 2015-05-28 2016-04-04
JP1589673S (enrdf_load_stackoverflow) * 2017-04-14 2017-10-30
JP1605945S (enrdf_load_stackoverflow) * 2017-12-27 2018-06-04
USD888196S1 (en) * 2018-07-05 2020-06-23 Kokusai Electric Corporation Gas nozzle for substrate processing apparatus
JP1644261S (enrdf_load_stackoverflow) * 2019-03-20 2019-10-28
JP1684258S (enrdf_load_stackoverflow) * 2020-07-27 2021-04-26
JP1731676S (enrdf_load_stackoverflow) 2022-05-30 2022-12-08

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD322341S (en) * 1989-05-19 1991-12-10 Zito Richard R Nozzle for a CO2 snow cleaner
JP3076809B2 (ja) * 1990-09-26 2000-08-14 株式会社パウレック 洗浄ノズル
JP3298646B2 (ja) * 1995-07-18 2002-07-02 ボルトン，テレンス，ウィリアム 液体分配装置の改良
GB2337472B (en) * 1998-05-19 2001-07-18 Terence William Bolton Improvements in and relating to liquid dispensing apparatus
DE10063529A1 (de) * 2000-12-20 2002-06-27 Valeo Auto Electric Gmbh Düseneinrichtung
US6832734B2 (en) * 2001-04-25 2004-12-21 Southwest Research Institute Media discharge device
US7100844B2 (en) * 2002-10-16 2006-09-05 Ultrastrip Systems, Inc. High impact waterjet nozzle
US7080888B2 (en) * 2003-03-04 2006-07-25 Ash Equipment Company, Inc. Dual nozzle hydro-demolition system
USD554238S1 (en) * 2003-08-19 2007-10-30 Rehau Ag & Co. Component of a device for transport of liquid
USD617416S1 (en) * 2009-08-24 2010-06-08 Shin Tai Spurt Water Of The Garden Tools Co., Ltd. Water sprayer handle
USD638911S1 (en) * 2010-09-17 2011-05-31 Kmt Robotic Solutions, Inc. Long reach impingement nozzle
USD641830S1 (en) * 2010-11-17 2011-07-19 Fna Ip Holdings, Inc. Spray nozzle
USD693901S1 (en) * 2011-11-30 2013-11-19 Bayer New Zealand Limited Fluid dispenser
USD684662S1 (en) * 2012-08-24 2013-06-18 GelTech Solutions, Inc. Firehose handheld eductor nozzle
USD730487S1 (en) * 2013-04-15 2015-05-26 Cerlic Controls Ab Telescopic fixture with attachment

Also Published As

Publication number Publication date
JP1534651S (enrdf_load_stackoverflow) 2015-10-05
USD771772S1 (en) 2016-11-15

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