TWD174919S - 基板處理裝置用氣體供給噴嘴 - Google Patents

基板處理裝置用氣體供給噴嘴

Info

Publication number
TWD174919S
TWD174919S TW104301010F TW104301010F TWD174919S TW D174919 S TWD174919 S TW D174919S TW 104301010 F TW104301010 F TW 104301010F TW 104301010 F TW104301010 F TW 104301010F TW D174919 S TWD174919 S TW D174919S
Authority
TW
Taiwan
Prior art keywords
gas supply
substrate processing
processing equipment
supply nozzle
article
Prior art date
Application number
TW104301010F
Other languages
English (en)
Chinese (zh)
Inventor
Shinya Morita
Masahiro Miyake
Masato Terasaki
Naoki Matsumoto
Naonori Akae
Original Assignee
日立國際電氣股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日立國際電氣股份有限公司 filed Critical 日立國際電氣股份有限公司
Publication of TWD174919S publication Critical patent/TWD174919S/zh

Links

TW104301010F 2014-09-02 2015-02-26 基板處理裝置用氣體供給噴嘴 TWD174919S (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JPD2014-19294F JP1520999S (enrdf_load_stackoverflow) 2014-09-02 2014-09-02

Publications (1)

Publication Number Publication Date
TWD174919S true TWD174919S (zh) 2016-04-11

Family

ID=53507763

Family Applications (1)

Application Number Title Priority Date Filing Date
TW104301010F TWD174919S (zh) 2014-09-02 2015-02-26 基板處理裝置用氣體供給噴嘴

Country Status (3)

Country Link
US (1) USD771543S1 (enrdf_load_stackoverflow)
JP (1) JP1520999S (enrdf_load_stackoverflow)
TW (1) TWD174919S (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP1589673S (enrdf_load_stackoverflow) * 2017-04-14 2017-10-30
JP1731676S (enrdf_load_stackoverflow) * 2022-05-30 2022-12-08

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD322341S (en) * 1989-05-19 1991-12-10 Zito Richard R Nozzle for a CO2 snow cleaner
JP3076809B2 (ja) * 1990-09-26 2000-08-14 株式会社パウレック 洗浄ノズル
JP3298646B2 (ja) * 1995-07-18 2002-07-02 ボルトン，テレンス，ウィリアム 液体分配装置の改良
GB2337472B (en) * 1998-05-19 2001-07-18 Terence William Bolton Improvements in and relating to liquid dispensing apparatus
DE10063529A1 (de) * 2000-12-20 2002-06-27 Valeo Auto Electric Gmbh Düseneinrichtung
US6832734B2 (en) * 2001-04-25 2004-12-21 Southwest Research Institute Media discharge device
US7100844B2 (en) * 2002-10-16 2006-09-05 Ultrastrip Systems, Inc. High impact waterjet nozzle
US7080888B2 (en) * 2003-03-04 2006-07-25 Ash Equipment Company, Inc. Dual nozzle hydro-demolition system
USD554238S1 (en) * 2003-08-19 2007-10-30 Rehau Ag & Co. Component of a device for transport of liquid
USD617416S1 (en) * 2009-08-24 2010-06-08 Shin Tai Spurt Water Of The Garden Tools Co., Ltd. Water sprayer handle
USD638911S1 (en) * 2010-09-17 2011-05-31 Kmt Robotic Solutions, Inc. Long reach impingement nozzle
USD641830S1 (en) * 2010-11-17 2011-07-19 Fna Ip Holdings, Inc. Spray nozzle
USD693901S1 (en) * 2011-11-30 2013-11-19 Bayer New Zealand Limited Fluid dispenser
USD684662S1 (en) * 2012-08-24 2013-06-18 GelTech Solutions, Inc. Firehose handheld eductor nozzle
USD730487S1 (en) * 2013-04-15 2015-05-26 Cerlic Controls Ab Telescopic fixture with attachment

Also Published As

Publication number Publication date
JP1520999S (enrdf_load_stackoverflow) 2015-04-06
USD771543S1 (en) 2016-11-15

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