TWD172243S - 真空處理裝置用冷卻板 - Google Patents

真空處理裝置用冷卻板

Info

Publication number
TWD172243S
TWD172243S TW103304830D01F TW103304830D01F TWD172243S TW D172243 S TWD172243 S TW D172243S TW 103304830D01 F TW103304830D01 F TW 103304830D01F TW 103304830D01 F TW103304830D01 F TW 103304830D01F TW D172243 S TWD172243 S TW D172243S
Authority
TW
Taiwan
Prior art keywords
cooling plate
vacuum processing
processing device
cools
rectangular
Prior art date
Application number
TW103304830D01F
Other languages
English (en)
Chinese (zh)
Inventor
Junichi Yasuda
Shinji Furuya
Original Assignee
愛發科低溫泵股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 愛發科低溫泵股份有限公司 filed Critical 愛發科低溫泵股份有限公司
Publication of TWD172243S publication Critical patent/TWD172243S/zh

Links

TW103304830D01F 2014-02-24 2014-08-15 真空處理裝置用冷卻板 TWD172243S (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2014003699F JP1511421S (hr) 2014-02-24 2014-02-24

Publications (1)

Publication Number Publication Date
TWD172243S true TWD172243S (zh) 2015-12-01

Family

ID=52830742

Family Applications (1)

Application Number Title Priority Date Filing Date
TW103304830D01F TWD172243S (zh) 2014-02-24 2014-08-15 真空處理裝置用冷卻板

Country Status (2)

Country Link
JP (1) JP1511421S (hr)
TW (1) TWD172243S (hr)

Also Published As

Publication number Publication date
JP1511421S (hr) 2014-11-10

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TWD172243S (zh) 真空處理裝置用冷卻板