TWD160524S - 具有加熱器的基座 - Google Patents

具有加熱器的基座

Info

Publication number
TWD160524S
TWD160524S TW102301193F TW102301193F TWD160524S TW D160524 S TWD160524 S TW D160524S TW 102301193 F TW102301193 F TW 102301193F TW 102301193 F TW102301193 F TW 102301193F TW D160524 S TWD160524 S TW D160524S
Authority
TW
Taiwan
Prior art keywords
view
heater
design
enlarged
stereoscopic
Prior art date
Application number
TW102301193F
Other languages
English (en)
Inventor
Gaku Furuta
John M White
Robin L Tiner
Suhail Anwar
Soo Young Choi
Original Assignee
應用材料股份有限公司
Applied Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 應用材料股份有限公司, Applied Materials Inc filed Critical 應用材料股份有限公司
Publication of TWD160524S publication Critical patent/TWD160524S/zh

Links

Abstract

【物品用途】;本設計物品係具有加熱器的基座，用以承載一半導體基板時對其加熱。;【設計說明】;本設計之設計特點在於基座底部配置有加熱器。立體圖一及立體圖二是基座的等角立體圖。局部A的放大圖係將仰視圖中標示為A區塊的局部放大圖，而B-B’端面剖視放大圖係沿著俯視圖中之B-B’剖面線的端面剖視放大圖，以揭露放大後之孔洞外形輪廓。;1.後視圖與前視圖相同，故省略後視圖。;2.右側視圖與左側視圖相同，故省略右側視圖。
TW102301193F 2012-08-31 2013-02-08 具有加熱器的基座 TWD160524S (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US29/430,967 USD713200S1 (en) 2012-08-31 2012-08-31 Susceptor with heater

Publications (1)

Publication Number Publication Date
TWD160524S true TWD160524S (zh) 2014-05-11

Family

ID=51493694

Family Applications (1)

Application Number Title Priority Date Filing Date
TW102301193F TWD160524S (zh) 2012-08-31 2013-02-08 具有加熱器的基座

Country Status (2)

Country Link
US (1) USD713200S1 (zh)
TW (1) TWD160524S (zh)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD784276S1 (en) * 2013-08-06 2017-04-18 Applied Materials, Inc. Susceptor assembly
USD864134S1 (en) * 2018-10-24 2019-10-22 Asm Ip Holding B.V. Susceptor

Also Published As

Publication number Publication date
USD713200S1 (en) 2014-09-16

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