TWD134865S1

TWD134865S1 - Diaphragm valve

Info

Publication number: TWD134865S1
Application number: TW098300113F
Authority: TW
Inventors: Kenji Moriyama
Original assignee: Ｓｍｃ股份有限公司
Priority date: 2008-11-18
Filing date: 2009-01-12
Publication date: 2010-05-11
Also published as: USD609307S1

Abstract

【物品用途】本創作係一種「隔膜閥」，係作為半導體製造裝置等所使用之製程氣體之遮蔽閥來使用的隔膜閥。該隔膜閥係具有：本體；設置在該本體之左右兩側面的輸入輸出口；及設置在本體之上側的空氣壓制動器(參照參考圖(1))。本體係具備略圓筒狀之上部、及略長方體狀之下部。輸入輸出口係形成略圓筒狀(參照參考圖(2))，且從本體之下部突出。空氣壓制動器係形成略圓柱狀，在其上表面形成有氣體導入口，並且在其左右下部形成有缺口部。在使用時，在使製程氣體供給用及排出用之軟管或導管連結在輸入輸出口之狀態下，控制透過氣體導入口之氣體的導入，並使本體內部之未圖示的隔膜閥動作，藉此進行隔膜閥之開閉。【創作特點】本創作係有關於一種「隔膜閥」之外形設計。配合參考圖所示，本創作之本體係具有長方體狀之本體下部與形成於該本體下部之上端略具圓筒狀內縮頸狀之本體上部，同時在該本體上部之上方呈現兩側下具長方體狀切面形缺口部之圓柱形狀空氣壓致動器。並在空氣壓致動器頂面中央具有圓形孔狀之氣體導入口。上述本體下部之左右側面各具有圓筒狀栓形之輸入輸出口，該輸出輸入口之兩端係分別形成內縮端。如參考圖(1)及(2)所示係顯示本創作之各部件說明。顯示在各圖之表面部的略水平平行狀細線、略垂直平行狀細線、略傾斜平行狀細線及略圓弧狀細線皆係顯示立體表面之形狀的陰影線。由上述構成本創作整體造形精巧別緻，具新穎獨特之視覺效果及創作性。[Purpose of the item] This creation is a "diaphragm valve", which is a diaphragm valve used as a shielding valve for process gases used in semiconductor manufacturing equipment, etc. The diaphragm valve has: a main body; input and output ports arranged on the left and right sides of the main body; and an air pressure brake arranged on the upper side of the main body (refer to reference figure (1)). The main body has a slightly cylindrical upper portion and a slightly rectangular lower portion. The input and output ports are formed in a slightly cylindrical shape (refer to reference figure (2)) and protrude from the lower portion of the main body. The air pressure brake is formed in a slightly cylindrical shape, with a gas inlet formed on its upper surface, and notches formed on its left and right lower portions. When in use, the hoses or conduits for supplying and discharging process gases are connected to the input and output ports, and the introduction of gas through the gas inlet is controlled, and the diaphragm valve (not shown) inside the main body is actuated to open and close the diaphragm valve. [Features of the creation] This creation is related to the appearance design of a "diaphragm valve". As shown in the reference figure, the main body of the creation has a rectangular lower body part and a slightly cylindrical inward-contracted neck upper body part formed at the upper end of the lower body part, and at the same time, a cylindrical air pressure actuator with rectangular cross-sectional notches on both sides is presented above the upper body part. And there is a circular hole-shaped gas inlet in the center of the top surface of the air pressure actuator. The left and right sides of the lower part of the main body each have a cylindrical plug-shaped input and output port, and the two ends of the input and output port are respectively formed as inward-retracted ends. As shown in reference figures (1) and (2), the description of each component of this creation is shown. The slightly horizontal parallel thin lines, slightly vertical parallel thin lines, slightly inclined parallel thin lines and slightly arc-shaped thin lines shown on the surface of each figure are all shadow lines showing the shape of the three-dimensional surface. The overall shape of this creation composed of the above is exquisite and unique, with novel and unique visual effects and creativity.