TW595030B - OLED display panel and its manufacturing method - Google Patents
OLED display panel and its manufacturing method Download PDFInfo
- Publication number
- TW595030B TW595030B TW92118531A TW92118531A TW595030B TW 595030 B TW595030 B TW 595030B TW 92118531 A TW92118531 A TW 92118531A TW 92118531 A TW92118531 A TW 92118531A TW 595030 B TW595030 B TW 595030B
- Authority
- TW
- Taiwan
- Prior art keywords
- layer
- spacer
- film transistor
- thin film
- substrate
- Prior art date
Links
Landscapes
- Electroluminescent Light Sources (AREA)
Abstract
Description
595030 五、發明說明(l) 【發明所屬之技術領域】 本發明是有關於一種有機發光二極體(organic light emitting diode,0LED)顯示面板及製造方法,且 特別是有關於一種具有間隔物(spacer )或間隔物護層之 有機發光二極體顯示面板及製造方法。 【先如技術】 0LED顯示面板可以透過電流驅動(current dr i ven ) 或電壓驅動(voltage driven)之方式而自行發光,不需 如液晶顯示面板(liquid crystal display panel,LCD pane 1 ) —般,須於後方加上背光源。所以,〇LED顯示面 板具有自發光、廣視角及可全彩化等優點。其中,0LED顯 示面板更可被應用於行動電話及個人數位助理(personal digital assistant,PDA)等可攜性電子裝置上,成為現 今極具潛力的顯示面板。 請參照第1A圖,其繪示乃傳統之0LED顯示器的剖面 圖。在第1A圖中,0LED顯示器100包括0LED顯示面板104、 玻璃蓋102及框膠(sealant) 106,0LED顯示面板1〇4具有 一基板108及一半導體結構110,半導體結構11〇係形成於 基板108之上。一般業者會使用一π Π”字型之玻璃蓋1〇2或 金屬蓋罩住半導體結構110,並以框膠106黏接玻璃蓋102 之兩端及基板108之上表面,使得0LED顯示面板104被封裝 成一0LED顯示器100。一般而言,半導體結構110至少包括 數條掃描線(scan lines)及數條資料線(data lines595030 V. Description of the invention (l) [Technical field to which the invention belongs] The present invention relates to an organic light emitting diode (OLED) display panel and a manufacturing method thereof, and more particularly, to a method having a spacer ( spacer) or an organic light emitting diode display panel with a spacer protective layer and a manufacturing method therefor. [Such as technology] 0LED display panel can emit light by means of current driving or voltage driving. It does not need to be the same as liquid crystal display panel (LCD pane 1). A backlight must be added at the rear. Therefore, 〇LED display panel has the advantages of self-emission, wide viewing angle and full color. Among them, the 0LED display panel can be applied to portable electronic devices such as mobile phones and personal digital assistants (PDAs), becoming a display panel with great potential today. Please refer to FIG. 1A, which is a cross-sectional view of a conventional 0LED display. In FIG. 1A, the 0LED display 100 includes an 0LED display panel 104, a glass cover 102, and a sealant 106. The 0LED display panel 104 has a substrate 108 and a semiconductor structure 110. The semiconductor structure 110 is formed on the substrate. Above 108. Generally, a π Π ”-shaped glass cover 102 or a metal cover is used to cover the semiconductor structure 110, and the two ends of the glass cover 102 and the upper surface of the substrate 108 are bonded with a frame adhesive 106, so that the 0LED display panel 104 It is packaged into a 0LED display 100. Generally, the semiconductor structure 110 includes at least several scan lines and data lines.
IH8 觀25F(友達).ptd 第5頁 595030 五、發明說明(2) ),掃描線及資料線係定義出數個晝素(p i xe 1 s ),由於 各晝素内之結構係相同’故在此以單一晝素為例來說明 0 L E D顯示面板1 〇 4之較詳細的剖面結構。 請參照第1B圖,其繪示乃第1A圖之0LED顯示面板之單 一晝素的結構剖面圖。在第1B圖中,0LED顯示面板1〇4至 少包括掃描線122、資料線124、薄膜電晶體(thin fi im transistor,TFT ) 126、儲存電容(storage capacitor,Cs ) 128、外圍線路接墊(pad ) l3〇、陽極 (anode) 132 及保護層(passivation layer) 133。掃描 線122及貧料線124係交豐於一交錯區(χ — )i44,薄 膜電晶體1 2 6係形成於基板1 〇 8上,並具有一源極/沒極 (source/drain ) 126a。儲存電容128係形成於基板1〇8 上’並位於溥膜電晶體126及交錯區144之間,儲存電容 1 2 8及薄膜電晶體1 2 6之間具有一顯示區域1 4 6。外圍線路 接塾130係形成於基板1〇8上,並位於儲存電容128及交錯 區1 4 4之間。保遵層1 3 3係形成於基板1 〇 8之上,並覆蓋薄 膜電晶體1 2 6、儲存電容1 2 8、外圍線路接塾1 3 〇、資料線 124、掃描線122及交錯區144。保護層133具有一接觸孔, 用以於製程中暴露部分之源極/汲極丨2ga。陽極丨32係形成 於顯示區域146内之保護層133上,並藉由上述之接觸孔與 源極/汲極126a電性連接。 在陽極132及保護層133之上另可依序形成一電洞注入 層(hole injection layer)、一電洞傳輸層(h〇u transport layer)、一有機發光層(〇rganic emissi〇nIH8 Guan 25F (Youda) .ptd Page 5 595030 V. Description of the invention (2)), the scanning line and data line define several celestial elements (pi xe 1 s), because the structures in each celestial element are the same ' Therefore, a more detailed cross-sectional structure of the 0 LED display panel 104 is described here by taking a single day element as an example. Please refer to FIG. 1B, which is a structural cross-sectional view of a single daylight element of the 0LED display panel in FIG. 1A. In FIG. 1B, the 0LED display panel 104 includes at least a scan line 122, a data line 124, a thin film transistor (TFT) 126, a storage capacitor (Cs) 128, and a peripheral circuit pad ( pad) 130, anode 132 and passivation layer 133. The scanning line 122 and the lean material line 124 cross each other in a staggered region (χ —) i44. A thin film transistor 12 6 is formed on the substrate 108 and has a source / drain 126a. . The storage capacitor 128 is formed on the substrate 108 and is located between the diaphragm transistor 126 and the staggered region 144. The storage capacitor 128 and the thin film transistor 1 2 6 have a display area 1 46. The peripheral circuit connector 130 is formed on the substrate 108 and is located between the storage capacitor 128 and the interleaved region 144. The compliance layer 1 3 3 is formed on the substrate 1 08 and covers the thin film transistor 1 2 6, the storage capacitor 1 2 8, the peripheral circuit connection 1 3 0, the data line 124, the scan line 122, and the staggered area 144. . The protection layer 133 has a contact hole for exposing a part of the source / drain electrode 2ga in the manufacturing process. The anode 32 is formed on the protective layer 133 in the display area 146, and is electrically connected to the source / drain 126a through the above-mentioned contact hole. A hole injection layer, a hole transport layer, and an organic light emitting layer (〇rganic emissi〇n) may be sequentially formed on the anode 132 and the protective layer 133.
T^1125F(友達).ptd 第6頁 595030 五、發明說明(3) layer)、一電子傳輸層(electron transport layer) 及一陰極(cathode)。當陽極132及陰極被施加一電壓 時,電洞傳輸層及電子傳輸層將分別提供電洞及電子給有 機發光層。當電洞及電子於有機發光層中結合時,位於顯 示區域146上之有機發光層將可以發出光線至外界中。T ^ 1125F (友 达) .ptd page 6 595030 5. Description of the invention (3) layer), an electron transport layer and a cathode. When a voltage is applied to the anode 132 and the cathode, the hole transport layer and the electron transport layer will provide holes and electrons to the organic light emitting layer, respectively. When holes and electrons are combined in the organic light emitting layer, the organic light emitting layer located on the display region 146 can emit light to the outside.
目前0LED顯示面板104都是利用框膠1〇6與玻璃蓋102 或金屬蓋進行封裝,而框膠106只支撐玻璃蓋1〇2之邊緣, 且玻璃蓋102之中央區域及半導體結構11〇之間具有一間 距。在0LED顯示面板追求大尺寸之趨勢潮流下,上述之封 裝方式會導致0LED顯示面板上之大尺寸之玻璃蓋的中央區 域產生下陷的現象,以致於壓傷下方之〇LED顯示面板。 因此,Akira Ebisawa, Kouji Yasukawa, Hiroyuki Endo等人係於美國專利案號以· 6, 2 59, 304 bi中揭露一種 0LED顯示面板的封裝技術,如第2圖所示。在第2圖中, 0LED顯示器200包括0LED顯示面板2 04、封裝板(seaiing sheet) 202及間隔物(spacer ) 206 °〇LED顯示面板204 包At present, the 0LED display panel 104 is packaged with a frame adhesive 106 and a glass cover 102 or a metal cover, and the frame adhesive 106 only supports the edge of the glass cover 102, and the central area of the glass cover 102 and the semiconductor structure 11 There is a gap between them. Under the trend of 0LED display panels pursuing large size, the above-mentioned packaging method will cause the central area of the large-sized glass cover on the 0LED display panel to sag, which will crush the 0LED display panel below. Therefore, Akira Ebisawa, Kouji Yasukawa, Hiroyuki Endo, et al. Disclosed a 0LED display panel packaging technology in US Patent No. 6, 2, 59, 304 bi, as shown in FIG. 2. In the second figure, the 0LED display 200 includes an 0LED display panel 204, a sealing sheet 202, and a spacer 206 °. The LED display panel 204 packs
括一基板208及一半導體結構21〇,且半導體結構21〇係形 成於基板208上。〇1^0顯示面板204係藉由間隔物(邛&(^1· )一 2?6 與一封裝板(sealing sheet) 2 02 封裝成一 〇LED 顯 不器2 0 0。間隔物2 〇 6係以撒布之方式配置於半導體結構 21 之外,側的基板208上。在0LED顯示器200中,間隔物2〇6 之咼度係大於半導體結構21 〇之高度。然而,間隔物2 〇 6有 可能f撒布之過程中會落在〇LED顯示面板2〇4之顯示區域 内’落於顯示區域内之間隔物將於封裝板2〇2與基板2〇8結It includes a substrate 208 and a semiconductor structure 21o, and the semiconductor structure 21o is formed on the substrate 208. 〇1 ^ 0 display panel 204 is packaged into a 10 LED display 2 0 0 by a spacer (邛 & (^ 1 ·) 2-6 and a sealing sheet 2 02. The spacer 2 〇6 is arranged on the side of the substrate 208 outside the semiconductor structure 21 in a scattered manner. In the 0LED display 200, the height of the spacer 206 is larger than the height of the semiconductor structure 21 〇 However, the spacer 2 〇 6 It is possible that f will fall in the display area of the LED display panel 204 during the distribution process.
595030 五、發明說明(4) ά日守壓傷〇LED顯示面板2〇4,導致〇LED顯示面板204產生短 路現象’影響〇 L e D顯示面板2 0 4的運作性能。此外,此專 利所揭露之封裝方式亦會導致0LED顯示面板204上之大尺 寸之封裝板202的中央區域產生下陷的現象,以致於壓傷 下方之OLED顯示面板2〇4。 【發明内容】 有鑑於此’本發明的目的就是在提供一種有機發光二 極體(organic light emitting diode,OLED)顯示面板 及製造方法’其形成間隔物或間隔物護層之設計,可以增 加0LED顯示面板之結構的抗壓性,避免其結構被上方之封 裝板、玻璃蓋或金屬蓋壓傷,以維持〇LED顯示面板之良好 運作。 根據本發明的目的,提出一種有機發光二極體顯示面 板的製造方法。首先,提供一基板。接著,形成一薄膜電 晶體、/儲存電容、一資料線及一掃描線於基板上。資料 線與掃描線交疊於一交錯區,儲存電容係位於薄膜電晶體 及交錯區之間,薄膜電晶體及儲存電容之間具有一顯= 域,薄膜,晶體具有一源極/汲極。然後,形成一保護、1" 層,以覆盍薄膜電晶體、儲存,電容、資料線、掃描 錯區,保護層具有至少一接觸孔。接著,开)成一陽極於ς 示區域内之保護層上,陽極係藉由接觸孔與源極/没極雷頁 性連接。然後,形成一間隔物於顯示區域之外之保護層之595030 V. Description of the invention (4) The Japanese guards crushed 〇LED display panel 204, which caused 〇LED display panel 204 to have a short-circuit phenomenon, which affects the operating performance of LED display panel 204. In addition, the packaging method disclosed in this patent will also cause the central region of the large-sized package board 202 on the 0LED display panel 204 to sag, which may cause damage to the OLED display panel 204 below. [Summary of the Invention] In view of this, 'the purpose of the present invention is to provide an organic light emitting diode (OLED) display panel and a manufacturing method' whose design of forming a spacer or a spacer protective layer can increase 0LED The pressure resistance of the structure of the display panel prevents the structure from being crushed by the upper packaging plate, glass cover or metal cover, so as to maintain the good operation of the LED display panel. According to the purpose of the present invention, a method for manufacturing an organic light emitting diode display panel is proposed. First, a substrate is provided. Next, a thin film transistor, a storage capacitor, a data line and a scan line are formed on the substrate. The data line and the scanning line overlap in a staggered area. The storage capacitor is located between the thin film transistor and the staggered area. There is a display region between the thin film transistor and the storage capacitor. The thin film has a source / drain. Then, a protective layer 1 is formed to cover the thin film transistor, storage, capacitor, data line, and scan error area. The protective layer has at least one contact hole. Then, open) to form an anode on the protective layer in the display area, and the anode is connected to the source / electrode lightning via a contact hole. Then, a spacer is formed on the protective layer outside the display area.
595030 五、發明說明(5) " — ~~' "一"'' " _ 根據本發明的再一目的,提出一種有機發光二極體顯 示面板的製造方法。首先,提供一基板。接著,形成一薄 膜電晶體、一儲存電容、一資料線及一掃描線於基板上。 ,中’資料線與掃描線交疊於一交錯區,儲存電容係位於 薄膜電晶體及交錯區之間,薄膜電晶體及儲存電容之間具 有一顯示區域,薄膜電晶體具有一源極/汲極。然後,形 f 一,隔物護層於基板之上,以覆蓋薄膜電晶體、儲存電 、 ▼描線 > 料線及父錯區,間隔物護層具有一接觸 ί著,形成一陽極於顯示區域内之間隔物護層上,陽 極係精由此接觸孔與源極/汲極電性連接。 一:據本發明的另一目的,提出一種有機發光二極體顯 f:存電容至Κϊ基,、資料線、掃描線、薄膜電晶體、 a基板上:、並;疊及掃描線係形 板上,並具有-源極/没極電//係形成於基 並位於薄膜電晶體及交錯區谷^形成於基板上, 之間具有-顯示區域。 谷及薄膜電晶體 薄膜電晶體、儲存電容及^形成於基板之上,並覆蓋 陽極係形成於顯示區域内之^:保遵層具有一接觸孔。 極/汲極電性連接。間,、3層上,並藉由接觸孔與源 護層之上。 ^物係可形成於顯示區域之外之保 根據本發明的又—目的, 不面板,至少包括基板、 ®。種有機發光二極體顯 __ 資料線及掃描線係形成於595030 5. Description of the invention (5) " ~~ '" 一 "' '" _ According to still another object of the present invention, a method for manufacturing an organic light emitting diode display panel is proposed. First, a substrate is provided. Next, a thin film transistor, a storage capacitor, a data line and a scan line are formed on the substrate. The data line and scan line overlap in a staggered area. The storage capacitor is located between the thin film transistor and the staggered area. There is a display area between the thin film transistor and the storage capacitor. The thin film transistor has a source / sink. pole. Then, the shape of a spacer is formed on the substrate to cover the thin film transistor, the storage battery, the trace line and the parent region, and the spacer protection layer has a contact to form an anode on the display. On the spacer protective layer in the area, the anode system is electrically connected to the source / drain electrode through the contact hole. One: According to another object of the present invention, an organic light emitting diode display f: storage capacitor to κϊ, data line, scanning line, thin film transistor, a substrate: and parallel; stacked and scanning line system On the board, a -source / non-electrode // system is formed on the substrate and is located on the thin film transistor and the interlaced region valley is formed on the substrate with a -display region therebetween. Valley and thin-film transistors Thin-film transistors, storage capacitors, and capacitors are formed on the substrate and cover the anode: the compliance layer formed in the display area has a contact hole. Electrode / Drain Connection. On the 3 layers, and through the contact hole and the source protection layer. ^ Objects can be formed outside the display area. According to another aspect of the present invention, the panel does not include at least a substrate and a substrate. OLED display __ Data lines and scan lines are formed in
mV1125F(友達).ptd 第9頁 儲存電容、間隔物護層及陽=、、、貝料線、薄膜電晶體、 595030 五、發明說明(6) 基板上,資料線及掃描 係形成於基板上,並具 於基板上,並位於薄膜 薄膜電晶體之間具有一 板之上,並覆蓋薄膜電 及父錯區,間隔物護層 區域内之間隔物護層上 連接。 為讓本發明之上述 下文特舉一較佳實施例 下: 二2:豐於一父錯區。薄膜電晶體 儲存電容係形成 電日日體及父錯區之間,儲存電容及 t區域。間隔物護層係、形成於基 、儲存電纟、資料線、掃描線 具有一接觸孔。陽極係形成於顯示 ,亚藉由接觸孔與源極/汲極電性 目的、特徵和優點能更明顯易懂, ,並配合所附圖式,作詳細說明如 【實施方式】 本發:特別設計一有機發光二極體(0响t ;ng dlod;;0LED) , fa1 =,=广戈間隔物護層之設計,可以增續I)顯示 二;免其結構被上方之封裝板、玻璃蓋或金 屬盍£知,以維持0LED顯示面板之良好運作。 實施例一 之旦;5 Ξ :3A〜3C圖,其繪示乃依照本發明之實施例-r 2] 首^有機發光二極體顯示面板之製造方法的流 。首先,形成有機發光二極體顯示面板之電路元 ^ 3Α圖中,提供—基板3()8,且基板繼之上係可形mV1125F (友 达) .ptd Page 9 Storage capacitor, spacer protective layer and anode = ,,, shell wire, thin film transistor, 595030 5. Description of the invention (6) On the substrate, the data line and scanning system are formed on the substrate And is located on the substrate and is located on a board between the thin-film thin-film transistors and covers the thin-film electrical and parent regions, and is connected on the spacer-protective layer in the spacer-protective layer region. In order to make the above description of the present invention, a preferred embodiment is given below: 2: 2: Abundant to one parent error zone. The thin film transistor storage capacitor is formed between the electric solar element and the parent region, the storage capacitor and the t region. The spacer protective layer is formed on the substrate, the storage battery, the data line, and the scanning line have a contact hole. The anode system is formed on the display, and the purpose, characteristics, and advantages of the electrical properties of the contact holes and the source / drain electrodes can be more clearly understood, and in accordance with the accompanying drawings, detailed descriptions are as in [Embodiment Mode] Design an organic light-emitting diode (0 ring t; ng dlod ;; 0LED), fa1 =, = design of Guang Ge spacer cover can be added I) Display 2; its structure is not covered by the upper packaging board, glass Cover or metal cover to maintain the good operation of the 0LED display panel. Example 1; 5A: 3A to 3C, which are shown in accordance with the embodiment of the present invention -r 2] The first method of manufacturing an organic light emitting diode display panel. First, a circuit element of an organic light emitting diode display panel is formed. In the figure 3A, a substrate 3 () 8 is provided, and the substrate is shapeable.
595030 五、發明說明(7)595030 V. Description of invention (7)
成一薄膜電晶體(thin film transistor,TFT) 326、一 儲存電容(storage capacitor,Cs) 328、一外圍線路接 塾(pad) 330、一資料線(data line ) 324及一掃描線 (scan 1 ine ) 3 22。其中,資料線324及掃描線322係交疊 於一交錯區(X-over) 344,儲存電容328係位於薄膜電晶 體326及交錯區344之間,外圍線路接墊330係位於儲存電 容328及交錯區344之間。此外,薄膜電晶體326及儲存電 容328之間具有一顯示區域(display area) 346,且薄膜 電晶體326具有一源極/汲極(source/drain) 326a。 然後’形成一保護層(passivati〇n layer) 333於基 板308之上,保護層333係覆蓋薄膜電晶體326、儲存電容 328、外圍線路接墊33〇、掃描線322、資料線324及交錯區 3 44。保護層333具有至少一接觸孔(c〇ntact; hole ),用 以於製程中暴露部分之源極/汲極3 26&。接著,形成一陽 極(anode ) 332於顯示區域346内之保護層333上,並藉由 接觸孔與源極/汲極32 6a電性連接。 形成有機發光二極體顯示面板之間隔物,包括以下步Into a thin film transistor (TFT) 326, a storage capacitor (Cs) 328, a peripheral line pad (pad) 330, a data line (data line) 324, and a scan line (scan 1 ine ) 3 22. Among them, the data line 324 and the scanning line 322 are overlapped in an X-over 344, the storage capacitor 328 is located between the thin film transistor 326 and the staggered area 344, and the peripheral circuit pad 330 is located between the storage capacitor 328 and Between the staggered areas 344. In addition, a thin film transistor 326 and a storage capacitor 328 have a display area 346 therebetween, and the thin film transistor 326 has a source / drain 326a. Then a passivation layer 333 is formed on the substrate 308. The passivation layer 333 covers the thin film transistor 326, the storage capacitor 328, the peripheral circuit pad 33, the scan line 322, the data line 324, and the staggered area. 3 44. The protection layer 333 has at least one contact hole, which is used for exposing a part of the source / drain 326 in the process. Next, an anode 332 is formed on the protective layer 333 in the display area 346, and is electrically connected to the source / drain 32 6a through a contact hole. Forming a spacer for an organic light emitting diode display panel includes the following steps
:罐if:圖中’更形成一正光阻層352或-負光阻層於 曰缺仏之上’正光阻層352或負光阻層係覆蓋陽極 d d Z。然後,以 _ ^ η Γ Λ ^ 先罩354疋義正光阻層352之圖案並曝 光,如第3 Β圖所示,十,、,ρ ^ ) 或以另一光罩定義負光阻層之圖案並 二ΐ杏ίϊ,以—顯影劑去除部分之正光阻層352或部分 ^ ^ ^ ^ ^346 ^ ^ ^ 例如間隔物352a係形成於薄膜電晶體326 595030 五、發明說明(8) 之上,如第3C圖所示。當然,本發明亦可形成間隔物於儲 存電容328、掃描線322、資料線324或交錯區344之上。 在間隔物3 5 2 a及保護層3 3 3之上另可依序形成一電洞 注入層(hole injection layer )、一電洞傳輸層(hole transport layer)、一有機發光層(organic emission layer)、一電子傳輸層(electron transport layer) 及一陰極(cathode )。 實施例二 請參照第4A〜4D圖,其繪示乃依照本發明之實施例二 之具有間隔物之0LED顯示面板之製造方法的流程剖面圖。 本實施例之第4A圖與實施例一之第3A圖不同之處在於,本 實施例以蒸鍍法、賤鑛法、化學氣相沈積(仏㈣丨ca 1 vapor deposition,CVD)法或旋轉塗佈(spin c〇ating )法形成一間隔物材料層452於保護層333之上,間隔物材 料層452係覆盍陽極332。至於第4A圖之其他結構皆與實施 例一之弟3 A圖所示之結構相同,其製程也相同,在此不再 贅述。接著,形成一圖案化光阻層4 5 4於間隔物材料層4 5 2 上,其係以上光阻、曝光及顯影之方式完成,如第4 b圖所 示。 然後’以乾餘刻法或溼姓刻法去除所暴露之部分的間 隔物材料層4 5 2,以形成一間隔物4 5 2 a於顯示區域3 4 6之外 之保護層3 3 3之上,例如間隔物4 5 2 a係形成於薄膜電晶體 3 2 6之上,如第4 C圖所示。當然,本發明亦可以形成間隔 W5〇3〇: Can if: In the figure, a positive photoresistive layer 352 or a negative photoresistive layer is formed on top of the substrate. The positive photoresistive layer 352 or the negative photoresistive layer covers the anode d d Z. Then, _ ^ η Γ Λ ^ is used to cover and expose the pattern of the 354 positive photoresist layer 352, as shown in Fig. 3B. (10 ,,, ρ ^) or another photomask to define the negative photoresist layer. The pattern is combined with an apricot, to remove the positive photoresist layer 352 or part of the developer ^ ^ ^ ^ ^ 346 ^ ^ ^ For example, the spacer 352a is formed on the thin film transistor 326 595030. 5. Description of the invention (8) As shown in Figure 3C. Of course, the present invention can also form a spacer on the storage capacitor 328, the scan line 322, the data line 324, or the staggered area 344. A hole injection layer, a hole transport layer, and an organic emission layer may be sequentially formed on the spacer 3 5 2 a and the protective layer 3 3 3 in this order. ), An electron transport layer (electron transport layer) and a cathode (cathode). Embodiment 2 Please refer to FIGS. 4A to 4D, which are flow cross-sectional views showing a method for manufacturing a 0LED display panel with a spacer according to Embodiment 2 of the present invention. Figure 4A of this embodiment is different from Figure 3A of the first embodiment in that this embodiment uses the evaporation method, the base ore method, the chemical vapor deposition (CVD) method, or the rotation A spin coating method is used to form a spacer material layer 452 on the protective layer 333. The spacer material layer 452 is overlying the anode 332. The other structures in FIG. 4A are the same as those shown in FIG. 3A of the first embodiment, and the manufacturing process is also the same, and will not be described again here. Next, a patterned photoresist layer 4 5 4 is formed on the spacer material layer 4 5 2, which is completed by the above photoresist, exposure and development methods, as shown in Fig. 4b. Then, the exposed part of the spacer material layer 4 5 2 is removed by a dry-remnant method or a wet-surname method to form a spacer 4 5 2 a protective layer 3 3 3 out of the display area 3 4 6 For example, the spacer 4 5 2 a is formed on the thin film transistor 3 2 6, as shown in FIG. 4C. Of course, the present invention can also form the interval W503.
Hi電容328、掃描線322、資料線324或交錯區344之 耆,以一光阻剝離劑(stripper)去除圖案化 層454,如第4D圖所示。 此外,在間 一電洞注入層、 輪層及一陰極。 隔物452a及保護層333之上另可依序形成 一電洞傳輸層、一有機發光層、一電子傳 請參照第5A〜5D圖,其繪示乃依照本發明之實施例三 之具有間隔物護層之OLED顯示面板之製造方法的流程剖^ 圖。在第5A圖中,首先,提供一基板5〇8。接著,形成_ 閘極5 6 2於基板5 0 8上。然後,形成一閘極絕緣層5 6 4、一 非晶石夕(α-Si)通道層568及一重摻雜N型(N+)歐姆接 觸層570於基板508之上。其中,閘極絕緣層564係覆蓋閑 極5 6 2,非晶矽通道層5 6 8係形成於閘極絕緣層5 6 4上。N + 歐姆接觸層570係形成於非晶石夕通道層568上,非晶石夕通道 層568及N+歐姆接觸層570係位於閘極562之上方。接著, 形成一陽極5 3 2於N +歐姆接觸層5 7 0之一侧外之閘極絕緣声 5 64上。然後,形成一汲極526a及一源極526b於閘極絕緣 層564之上,没極526a及源極526b係覆蓋N+歐姆接觸層 5 70,汲極526a係與陽極532電性連接。其中,閘極562、 閘極絕緣層564、非晶矽通道層568、N +歐姆接觸層570、 汲極526a及源極526b係構成一薄膜電晶體526。需要注意 的是,掃描線、資料線及儲存電容係形成於基板5 0 8之The Hi capacitor 328, the scan line 322, the data line 324, or the interlaced region 344 are used to remove the patterned layer 454 with a photoresist stripper, as shown in FIG. 4D. In addition, there is a hole injection layer, a wheel layer and a cathode. On the spacer 452a and the protection layer 333, a hole transporting layer, an organic light emitting layer, and an electron transmission can be sequentially formed. Please refer to FIGS. 5A to 5D, which are shown in accordance with the third embodiment of the present invention. Process flow chart of a method for manufacturing an OLED display panel with a physical protection layer. In FIG. 5A, first, a substrate 508 is provided. Next, a gate 5 62 is formed on the substrate 508. Then, a gate insulating layer 564, an amorphous silicon (α-Si) channel layer 568, and a heavily doped N-type (N +) ohmic contact layer 570 are formed on the substrate 508. Among them, the gate insulating layer 564 covers the free electrode 5 6 2, and the amorphous silicon channel layer 5 6 8 is formed on the gate insulating layer 5 6 4. The N + ohmic contact layer 570 is formed on the amorphous stone channel layer 568, and the amorphous stone channel layer 568 and the N + ohmic contact layer 570 are located above the gate electrode 562. Next, an anode 5 3 2 is formed on the gate insulation sound 5 64 outside one side of the N + ohmic contact layer 5 7 0. Then, a drain electrode 526a and a source electrode 526b are formed on the gate insulating layer 564. The non-electrode 526a and the source electrode 526b cover the N + ohmic contact layer 5 70. The drain electrode 526a is electrically connected to the anode 532. Among them, the gate electrode 562, the gate insulating layer 564, the amorphous silicon channel layer 568, the N + ohmic contact layer 570, the drain electrode 526a, and the source electrode 526b form a thin film transistor 526. It should be noted that the scanning lines, data lines, and storage capacitors are formed on the substrate 508.
595030 五'發明說明(ίο) 上’只是本實施例之圖式沒有顯示而已,在此稍加說明一 下。 接著,形成一間隔物材料層5 5 2於閘極絕緣層5 6 4之 上’以覆蓋薄膜電晶體526及陽極532,並形成一圖案化光 阻層554於對應到薄膜電晶體526之部分的間隔物材料層 5 52上,如第5B圖所示。然後,去除所暴露之部分的間隔 物材料層552,以形成一間隔物護層552a於陽極532之外之 閘極絕緣層564之上,並覆蓋薄膜電晶體526,如第5C圖所 示。接著,以一光阻剝離劑去除圖案化光阻層554,如第 5D圖所示。此外,在間隔物護層55 2a及陽極532之上另可 依序形成一電洞注入層、一電洞傳輸層、一有機發光層、 一電子傳輸層及一陰極。 曰曰 然而,熟習此技藝者亦可以明瞭本發明之技術並不侷 限在此。例如,本發明亦可以在實施例一及實施例二中之 形成一薄膜電晶體32 6、一儲存電容328、一資料線324及 一掃描線3 2 2於基板3 0 8上之步驟後,直接形成一間隔物護 層652於基板308之上,此間隔物護層652係覆蓋薄膜電 體326、儲存電容328、資料線324、掃描線322及交錯區 3 44 ’如第6圖所示。其中,間隔物護層652具有一接觸 孔。然後’陽極3 3 2係形成顯示區域3 4 6内之間隔物護層 652上’並藉由此接觸孔與薄膜電晶體326之源極/汲極 3 2 6 a電性連接。 實施例四595030 The description of the five inventions (ίο) The above is just that the drawing of this embodiment is not shown, and it will be explained a little here. Next, a spacer material layer 5 5 2 is formed over the gate insulating layer 5 6 4 to cover the thin film transistor 526 and the anode 532, and a patterned photoresist layer 554 is formed corresponding to the portion of the thin film transistor 526. 5 52 on the spacer material layer, as shown in FIG. 5B. Then, the exposed spacer material layer 552 is removed to form a spacer protective layer 552a over the gate insulating layer 564 outside the anode 532, and cover the thin film transistor 526, as shown in FIG. 5C. Next, the patterned photoresist layer 554 is removed with a photoresist stripper, as shown in FIG. 5D. In addition, a hole injection layer, a hole transport layer, an organic light emitting layer, an electron transport layer, and a cathode may be sequentially formed on the spacer protective layer 55 2a and the anode 532 in this order. However, those skilled in the art can also understand that the technology of the present invention is not limited to this. For example, after the steps of forming a thin film transistor 326, a storage capacitor 328, a data line 324, and a scanning line 3 2 2 on the substrate 308 in the first and second embodiments of the present invention, A spacer protective layer 652 is directly formed on the substrate 308, and the spacer protective layer 652 covers the thin film electrical body 326, the storage capacitor 328, the data line 324, the scan line 322, and the staggered area 3 44 'as shown in FIG. 6 . The spacer protective layer 652 has a contact hole. Then, the "anode 3 3 2" is formed on the spacer protective layer 652 in the display area 3 4 6 ", and is electrically connected to the source / drain 3 2 6 a of the thin film transistor 326 through the contact hole. Example 4
翻turn
第14頁Page 14
Tim25F(友達).ptd 595030 五、發明說明(11) 請參照第7圖’其繪示乃依照本發明之實施例四之具 有間隔物瘦層之0 L E D顯不面板的部分剖面圖。在第7圖 中,01^1)顯示面板704係屬於低溫多晶石夕(1〇评Tim25F (友 达) .ptd 595030 5. Description of the invention (11) Please refer to FIG. 7 ′, which shows a partial cross-sectional view of a 0 L E D display panel with a thin spacer layer according to Example 4 of the present invention. In Figure 7, 01 ^ 1) display panel 704 belongs to low-temperature polycrystalline stone (10
temperature poly si 1 icon,LTPS ) 0LED 顯示面板,〇LED 顯示面板704包括一基板708、一薄膜電晶體726、一陽極 732及一間隔物護層752。薄膜電晶體726係形成於基板7〇8 上,間隔物護層752係形成於基板7 08之上,並覆蓋薄膜電 晶體72 6。其中,間隔物護層752具有一接觸孔,用以於 0LED顯示面板704之製程中暴露薄膜電晶體726之一端。陽 極732係形成於部分之間隔物護層7 52上,並覆蓋部分之薄 膜電晶體726 ’陽極732係藉由此接觸孔與薄膜電晶體72β 之一端電性連接。當然,本發明亦可以在陽極732所在之 顯不區域以外之基板7 0 8的上方形成至少一間隔物。此 外,在間隔物護層752及陽極732之上另可依序形成一電洞 注入層、一電洞傳輸層、一有機發光層、一電子傳輸層及 一陰極。 實施例五 請參照第8圖,其繪示乃依照本發明之實施例五之具 有間隔物護層之0LED顯示面板的部分剖面圖。在第8圖 中,0LED顯示面板804亦屬於LTPS 0LED顯示面板,〇LED顯 示面板804包括一基板8 08、一薄膜電晶體826、一陽極832 及一間隔物護層8 5 2。薄膜電晶體8 2 6係形成於基板8 〇 8 上,陽極832係形成於基板808之上,陽極832係與薄膜電temperature poly si 1 icon, LTPS) 0LED display panel, 0LED display panel 704 includes a substrate 708, a thin film transistor 726, an anode 732 and a spacer protective layer 752. A thin film transistor 726 is formed on the substrate 708, and a spacer protective layer 752 is formed on the substrate 708 and covers the thin film transistor 726. The spacer protective layer 752 has a contact hole for exposing one end of the thin film transistor 726 during the manufacturing process of the OLED display panel 704. The anode 732 is formed on a part of the spacer protective layer 7 52 and covers a part of the thin film transistor 726 ′. The anode 732 is electrically connected to one end of the thin film transistor 72β through the contact hole. Of course, the present invention can also form at least one spacer above the substrate 708 outside the display region where the anode 732 is located. In addition, a hole injection layer, a hole transport layer, an organic light emitting layer, an electron transport layer, and a cathode may be sequentially formed on the spacer protective layer 752 and the anode 732 in this order. Embodiment 5 Please refer to FIG. 8, which shows a partial cross-sectional view of a 0LED display panel with a spacer cover according to Embodiment 5 of the present invention. In FIG. 8, the 0LED display panel 804 also belongs to the LTPS 0LED display panel. The 0LED display panel 804 includes a substrate 8 08, a thin film transistor 826, an anode 832, and a spacer cover 8 5 2. The thin film transistor 8 2 6 is formed on the substrate 8 08, the anode 832 is formed on the substrate 808, and the anode 832 is
TW1125F(友達).ptd 第15頁 595030 五、發明說明(12) 晶體826之一端電性連接。此外,陽極832相對於薄膜電晶 體826之位置比第7圖之陽極732相對於薄膜電晶體726之位 置還要低。間隔物護層8 5 2係形成於基板8 0 8之上,並覆蓋 薄膜電晶體826及陽極832之兩端,以暴露部分之陽極 8 3 2。當然’本發明亦可以在陽極§ 3 2所在之顯示區域以外 之基板8 0 8的上方形成至少一間隔物。此外,在間隔物護 層852及陽極832之上另可依序形成一電洞注入層、一電洞 傳輸層、一有機發光層、一電子傳輸層及一陰極。TW1125F (AUO) .ptd Page 15 595030 V. Description of the invention (12) One end of the crystal 826 is electrically connected. In addition, the position of the anode 832 with respect to the thin film transistor 826 is lower than the position of the anode 732 with respect to the thin film transistor 726 in FIG. 7. The spacer protective layer 8 5 2 is formed on the substrate 8 0 8 and covers both ends of the thin film transistor 826 and the anode 832 to expose a part of the anode 8 3 2. Of course, the present invention may also form at least one spacer above the substrate 8 0 8 outside the display area where the anode § 32 is located. In addition, a hole injection layer, a hole transport layer, an organic light emitting layer, an electron transport layer, and a cathode may be sequentially formed on the spacer protective layer 852 and the anode 832.
實施例六Example Six
請參照第9圖,其繪示乃依照本發明之實施例六之具 有間隔物護層之0LED顯示面板的部分剖面圖。在第9圖 中’ 0LED顯示面板904亦屬於LTPS 0LED顯示面板,0LED顯 示面板904包括一基板908、一薄膜電晶體926、一陽極9 32 及一間隔物護層952。薄膜電晶體9 26及陽極932係形成於 基板908上,陽極932係與薄膜電晶體926之一端電性連 接。此外’陽極932相對於薄膜電晶體926之位置比第8圖 之陽極832相對於薄膜電晶體826之位置還要低。間隔物護 層952係形成於基板9〇8之上,並覆蓋薄膜電晶體926及陽 極932之兩端,以暴露部分之陽極9 32。當然,本發明亦可 以在陽極932所在之顯示區域以外之基板9〇8的上方形成間 隔物。此外,在間隔物護層952及陽極932之上另可依序形 成一電洞注入層、一電洞傳輸層、一有機發光層、一電‘ 傳輸層及一陰極。Please refer to FIG. 9, which shows a partial cross-sectional view of a 0LED display panel with a spacer cover according to Embodiment 6 of the present invention. In FIG. 9, the '0LED display panel 904 also belongs to the LTPS 0LED display panel. The OLED display panel 904 includes a substrate 908, a thin film transistor 926, an anode 9 32, and a spacer cover 952. The thin film transistor 92 and the anode 932 are formed on the substrate 908. The anode 932 is electrically connected to one end of the thin film transistor 926. In addition, the position of the anode 932 with respect to the thin film transistor 926 is lower than the position of the anode 832 with respect to the thin film transistor 826 in FIG. 8. The spacer protective layer 952 is formed on the substrate 908 and covers both ends of the thin film transistor 926 and the anode 932 to expose a part of the anode 9 32. Of course, in the present invention, a spacer may be formed on the substrate 908 outside the display area where the anode 932 is located. In addition, a hole injection layer, a hole transport layer, an organic light emitting layer, an electric 'transport layer, and a cathode may be sequentially formed on the spacer protective layer 952 and the anode 932.
TW1125F(友達).ptd 第16頁 595030 五、發明說明(13) 實施例七 請參照第1 0圖,其繪示乃依照本發明之實施例七之具 有間隔物護層之0LED顯示面板的部分剖面圖。在第1 〇圖 中,0LED顯示面板984係屬於LTPS 0LED顯示面板,QLED顯 示面板984包括一基板986、一薄膜電晶體988、一保護層 990、一平坦化層992、一陽極994及一間隔物護層996。薄 膜電晶體988係形成於基板986上,保護層990係形成於基 板986之上,並覆蓋部分之薄膜電晶體988。平坦化層992 係形成於保護層9 9 0上,且平坦化層9 9 2及保護層9 9 0係具 有相貫通之一接觸孔,此接觸孔用以於製程中暴露薄膜電 晶體988之一端。陽極994形成於部分之平坦化層992,並 藉由此接觸孔與薄膜電晶體988之一端電性連接。間隔物 護層996係形成於平坦化層992之上,並覆蓋陽極994之兩 端’以暴露部分之陽極9 9 4。當然,本發明亦可以在陽極 9 94所在之顯示區域以外之基板986的上方形成間隔物。此 外,在間隔物護層996及陽極994之上另可依序形成一電洞 注入層、一電洞傳輸層、一有機發光層、一電子傳輸層及 一陰極。 本發明藉由上述實施例所揭露之0LED顯示面板及製造 方法,具有下列優點: 1·形成間隔物之設計,可以增加〇LED顯示面板之抗壓 性,避免於與玻璃蓋或金屬蓋封裝時被玻璃蓋或金屬蓋壓 傷其内部結構,維持0LED顯示面板之良好運作。TW1125F (友 达) .ptd Page 16 595030 5. Explanation of the invention (13) Embodiment 7 Please refer to FIG. 10, which shows a part of the 0LED display panel with a spacer protective layer according to Embodiment 7 of the present invention Sectional view. In FIG. 10, the 0LED display panel 984 belongs to the LTPS 0LED display panel. The QLED display panel 984 includes a substrate 986, a thin film transistor 988, a protective layer 990, a planarization layer 992, an anode 994, and a spacer.物 护 层 996。 Physical protection layer 996. A thin film transistor 988 is formed on the substrate 986, and a protective layer 990 is formed on the substrate 986 and covers a portion of the thin film transistor 988. The planarization layer 992 is formed on the protection layer 990, and the planarization layer 992 and the protection layer 990 have a contact hole penetrating therethrough. This contact hole is used to expose the thin film transistor 988 during the manufacturing process. One end. The anode 994 is formed on a part of the planarization layer 992, and is electrically connected to one end of the thin film transistor 988 through the contact hole. A spacer protective layer 996 is formed on the planarization layer 992 and covers both ends of the anode 994 'to expose portions of the anode 9 94. Of course, the present invention can also form a spacer above the substrate 986 outside the display area where the anode 9 94 is located. In addition, a hole injection layer, a hole transport layer, an organic light emitting layer, an electron transport layer, and a cathode may be sequentially formed on the spacer protective layer 996 and the anode 994 in this order. The 0LED display panel and manufacturing method disclosed by the above embodiments of the present invention have the following advantages: 1. The design of forming a spacer can increase the compressive resistance of the LED display panel, avoiding packaging with a glass cover or a metal cover The internal structure is crushed by the glass cover or metal cover to maintain the good operation of the 0LED display panel.
595030 五、發明說明(14) 2·形成間隔物護層之設計,係可被整合於τρτ製 中,以作為護層之用,能夠省略傳統之保護層的製^ 綜上所述,雖然本發明已以較佳實施例: 其並非用以限定本發明’任何熟習此技藝者,在上ί 發明之保護範圍當視德附夕由咬u動與潤*,因此本 更辄W田視後附之申請專利範圍所 TW1125F(友達).ptd 第18頁 595030595030 V. Description of the invention (14) 2. The design of forming the protective layer of the spacer can be integrated into the τρτ system as a protective layer, and the traditional protective layer system can be omitted ^ In summary, although this The invention has been taken in a preferred embodiment: It is not intended to limit the present invention. 'Any person skilled in the art can protect the scope of the invention when the video is moved and moisturized by the bite. Therefore, this book is more relevant to the field. The attached patent application scope is TW1125F (AUO) .ptd Page 18 595030
595030 圖式簡單說明 層之0LED顯示面板的部分剖面圖。 圖式標號說明 100、200 :有機發光二極體(0LED )顯示器 102 :玻璃蓋 104 、 204 、 304 、404 、 504 、704 、 804 、 904 、 984 : OLED顯示面板 I 0 6 :框膠 108、208、308、508、708、808、908、986 :基板 II 0、2 1 0 :半導體結構 122、322 :掃描線 124、324 :資料線 126、326、5 26、726、826、9 26、988 :薄膜電晶體 (TFT ) 1 2 6 a、3 2 6 a :源極/沒極 128、328 :儲存電容 1 3 0、3 3 0 :外圍線路接墊 132、 332、532、732、832、9 32、994 :陽極 133、 333、990 ·保護層 144、344 :交錯區 146、346 :顯示區域 2 0 2 :封裝板 2 0 6 :間隔物 3 5 2 :正光阻層595030 Brief description of the drawings Partial sectional view of the layer 0LED display panel. Reference numerals 100 and 200: Organic light-emitting diode (0LED) display 102: Glass cover 104, 204, 304, 404, 504, 704, 804, 904, 984: OLED display panel I 0 6: frame adhesive 108, 208, 308, 508, 708, 808, 908, 986: substrate II 0, 2 1 0: semiconductor structure 122, 322: scan line 124, 324: data line 126, 326, 5 26, 726, 826, 9 26, 988: thin film transistor (TFT) 1 2 6 a, 3 2 6 a: source / impulse 128, 328: storage capacitor 1 3 0, 3 3 0: peripheral circuit pads 132, 332, 532, 732, 832 , 9 32, 994: Anodes 133, 333, 990Protective layers 144, 344: Staggered areas 146, 346: Display area 2 02: Package board 2 0 6: Spacer 3 5 2: Positive photoresist layer
TW1125F(友達).ptd 第20頁 595030 圖式簡單說明 352a、452a :間隔物 354 :光罩 452、552 :間隔物材料層 454、554 :圖案化光阻層 52 6a :汲極 5 2 6 b :源極 55 2a、652、752、8 52、952、9 96 :間隔物護層 5 6 2 :閘極 5 6 4 :閘極絕緣層 5 6 8 :非晶矽通道層 570 :N +歐姆接觸層 9 9 2 :平坦化層TW1125F (Youda) .ptd Page 20 595030 Brief description of the diagrams 352a, 452a: spacers 354: masks 452, 552: spacer material layers 454, 554: patterned photoresist layers 52 6a: drain 5 2 6 b : Source 55 2a, 652, 752, 8 52, 952, 9 96: Spacer cover 5 6 2: Gate 5 6 4: Gate insulating layer 5 6 8: Amorphous silicon channel layer 570: N + Ohm Contact layer 9 9 2: planarization layer
W1125F(友達).ptd 第21頁W1125F (友 达) .ptd Page 21
Claims (1)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW92118531A TW595030B (en) | 2003-07-07 | 2003-07-07 | OLED display panel and its manufacturing method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW92118531A TW595030B (en) | 2003-07-07 | 2003-07-07 | OLED display panel and its manufacturing method |
Publications (1)
Publication Number | Publication Date |
---|---|
TW595030B true TW595030B (en) | 2004-06-21 |
Family
ID=34076319
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW92118531A TW595030B (en) | 2003-07-07 | 2003-07-07 | OLED display panel and its manufacturing method |
Country Status (1)
Country | Link |
---|---|
TW (1) | TW595030B (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI467528B (en) * | 2013-10-30 | 2015-01-01 | Au Optronics Corp | Light emitting diode display panel and method of fabricating the same |
-
2003
- 2003-07-07 TW TW92118531A patent/TW595030B/en not_active IP Right Cessation
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI467528B (en) * | 2013-10-30 | 2015-01-01 | Au Optronics Corp | Light emitting diode display panel and method of fabricating the same |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
TWI729456B (en) | Display apparatus | |
CN100395892C (en) | Organic electroluminescent device and mfg. method thereof | |
KR101102261B1 (en) | Semiconductor device | |
US6849922B2 (en) | Organic electro-luminescent display device and method of fabricating the same | |
CN101154346B (en) | System for displaying images and method for fabricating the same | |
TWI500161B (en) | Hybrid thin film transistor and manufacturing method thereof and display panel | |
US8455893B2 (en) | Light-emitting apparatus and production method thereof | |
KR101158896B1 (en) | Substrate having thin film transistor and method for making the substrate, and liquid crystal display panel and electro luminescence display panel having the transistor | |
TWI248322B (en) | Organic electro luminescence device and fabrication method thereof | |
KR101100885B1 (en) | Thin film transistor array panel for organic electro-luminescence | |
US8008857B2 (en) | Organic light emitting display with reflective electrode | |
TW201220493A (en) | Organic light emitting display device and method of manufacturing the same | |
JP2019511831A (en) | TFT array substrate, method of manufacturing the same, display device | |
CN1779985A (en) | Active matrix type organic light emitting diode device and fabrication method thereof | |
CN104350532A (en) | Display device, semiconductor device, and method for manufacturing display device | |
CN102290442A (en) | Thin film transistor and display device | |
CN1761050A (en) | Thin-film transistor display panel and manufacture method thereof | |
CN103681696A (en) | Electrode lead-out structure, array substrate and display device | |
CN107516471A (en) | Luminescent panel | |
US9684217B2 (en) | Array substrate, method for manufacturing the same and liquid crystal display device | |
WO2022213420A1 (en) | Array substrate and preparation method therefor, and oled display panel | |
WO2021258458A1 (en) | Array substrate and manufacturing method therefor | |
WO2021227106A1 (en) | Display panel and manufacturing method therefor | |
TWI424531B (en) | Semiconductor device and method of manufacturing the same | |
CN100483233C (en) | Pixel structure of panel display device and method for fabricating same |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
MK4A | Expiration of patent term of an invention patent |