TW594013B - Pulse-type gas identification system and method thereof - Google Patents

Abstract

A pulse-type gas identification system and a method of pulse-type gas identification in a specific environment. When the sensor is located in a specific place, a variable pulse-modulated voltage is sent to the sensor, so that the sensor outputs a first signal to the processing device. The processing device compares the first signal to the chemical matter characteristics signals to determine the composition and concentration of each component in the gas, and determines a detection voltage according to the first signal. Then, a square-wave pulse with the detection voltage is sent intermittently to the sensor, so that the sensor outputs a second signal to the processing device. The processing device compares the second signal to the chemical matter characteristics signal to determine the concentration variation of each component of the gas.

Description

V. Description of the invention (l) The technical field to which the measurement system or specific complex invention belongs ... The present invention relates to a system and method, which is suitable for identifying the components of a number of volatile gases A known unity in space. Prior art · OK. A common gas sensing element 500 is generally provided with a main body 510, a voltage input terminal 520, and an output terminal 530, as shown in the figure. The main body 51 may include a substrate 512, an electrode 514, a sensing portion 516, and a heater 518, as shown in FIG. The sensing portion 516 is usually formed of a thin film of a metal oxide, for example, a thin film of tin dioxide (SnO2) to facilitate a catalytic reaction with a specific gas in the environment. When this gas sensing element 50 is used for concentration measurement, a voltage is input from the voltage input terminal 520, and the temperature of the thin film of the sensing portion 516 is changed through the heater 518 to reach a selected temperature value, for example, 400. ° C, so that the film reacts with a specific gas to be sensed in the environment, and changes the resistance value of the film, so that the voltage value output from the output terminal 530 changes, and an output signal is obtained. With the above-mentioned gas sensing element 500, when the concentration of a specific gas in the environment is different, the amount of reaction generated by the specific gas and the thin film of the sensing portion 516 is also changed due to the difference in the content of the gas molecules. Below the temperature, different sheet resistance values can be obtained.

0718-10159TWF (Nl); 10920009; calvin.ptd page 7 594013 5. Description of the invention (2) Example. Figure 2 Τ Π: gas sensing element 5 ° 〇 for concentration measurement-input different concentrations of gas' when the voltage is selected by the voltage and temperature, the film concentration of the sensor 516 is different Total: value 'for example 400 ° c; at this time, the resistance value of a :::: 4 film of a specific gas makes its output voltage value ^ ^^ ^-^ ^ ^ ^ ^ ^ The output value is usually 4, The temperature is set so that the temperature selected by the sensing unit 516 is an optimized temperature, and the output signal thereof reaches two sensitivity levels. For example, 400 ° C shown in Figure 2A is the optimal temperature for this particular gas. "# The above-mentioned conventional gas sensing element 500 has a thin film structure for gas sensing, and its cost is low, the measurement speed is fast, and the service life is long. Therefore, head A has been widely used. For example, U.S. Patent No. US 6,3 36,354 discloses that a known gas sensing element can use a heating control circuit so that the input voltage is modulated with a pulse (Pulse_M〇dulate (1, pM) signal type input 'In order to stabilize the signal and achieve the highest sensitivity of the output signal 0 However' The main field of the conventional gas sensing element 5 0 0 is the method of measuring the output signal with an input voltage against a known specific gas The concentration is measured. Therefore, under the condition that a specific gas is known in the environment, the conventional gas sensing element 500 can be used for measurement, and the determination of the specific gas based on the obtained output voltage signal Concentration. However, if it is known in the environment that there are specific gases that can be measured by several sensing elements at the same time, the output voltage will also be different due to the different gas components.

〇718-１０l59TWF (Nl); 10992009; calvin.ptd

594013 V. Description of the invention (3) Not the same 'Therefore, it is impossible to distinguish the type and type of rolling body in the environment by the output voltage signal alone, let alone to determine the concentration of each gas. In addition, if the specific gas contained in the ring is unknown, the conventional gas sensing element 50 0 cannot be used to discriminate its components. As mentioned above, the traditional gas sensing element can be used to measure the concentration of a specific gas. The method is to input a fixed voltage and change the temperature of the thin film of the sensing element to make the thin film and the specific gas to be sensed in the environment. A catalyst reaction is generated, and the resistance value of the film is changed. In this way, the output voltage can be changed, and an output signal can be obtained. For a specific concentration of a fixed gas, the traditional approach is to set the input voltage to optimize the film temperature; however, if the input voltage is changed to change the film temperature, the output signal will change accordingly. '' Please obtain a variety of unusually known gases such as carbon oxide (C4H10 is a 0.1 · 1% with a thin film output signal, picture 0, see the curve (C0), B) of the output value in Figure 2B, etc. The temperature change graphs are all shaped as their special 'displays to measure different gases with a gas sensing element. Figure 2B shows the measurement results of the same gas of hydrogen (Za), monoalcohol (c2h5oh), methane (Cij4), and butane. The sensing element used is a measuring element, and the concentration of various gases is controlled at U! 2: The picture can be * 'various different gases with the input: the change in voltage value), the loss of different animals presented by the household can therefore output a variety of different gases ^ ㈣ stomach material 1 ㈣ gas composition = if you will Figure 2B is compared to the words in Figure 2A. 'The gas concentration measurement shown in Figure 2A, the rolling body concentration measurement, and the rotation value of J are only for the same

V. Description of the invention (4) $ Membrane temperature (for example, gas-producing catalyst: output results, and gas 2 shown in Figure 2B, the output value of the measurement of gas output for all temperature ranges is only the first 2B, so the conventional technology makes a gas 2-compound, or the overall curve of the rotation value of several different gases with very similar properties; the function of substance identification. Therefore, this case issued a smart chemical substance identification system II =, For details, please refer to China ’s patented smart chemical substance identification system and method. The smart chemistry disclosed in the above patents, the gas sensing element known by t, uses output control to make the output signal for various non-output characteristics; In this way, after establishing a set of known, the identification of the tested chemical substance can be paired, and various specific gases can be identified. Specifically, the above-mentioned patent practice is to apply the overall curve shape of the value to the function. Therefore, it can be used to identify the composition diagram of gas and Fig. 3B, and to further improve the above patents. Fig. 3 A. Intelligent chemical substance identification. The power supply module 20 and one place can directly use the best sensing element value curve as shown in Figures 1A and 1B. The output sensing element of the figure is the same type of gas, which can be clearly explained. In the case of the application, the specific specific gas fruit and specific component species with the same discriminant voltage are classified as type 2B. In other words, the output value of the measurement at the time of the conventional temperature of the control device (in other words, the temperature of the conventional device) The one on the known value curve is suitable for the detection body; and Figure 2B is applied as a research study, and has applied for patent No. 91119779. The characteristics of the pulsed gas body of the identification system and even the map is not chemical Please specify below.

And the method is that the signal is variable and there are different databases to compare their concentrations. For mass identification of the same gas, refer to Section 3A, which has a sensing element 30. Sensing element 1 〇 Gas sensing element

594013

500, which has a voltage input terminal 52, an output terminal 53 and a sensing unit (main body) 5 10. The sensing portion may be formed of a thin film of a metal oxide, such as tin dioxide (SnO2), in order to perform a catalytic reaction with a gas or a volatile chemical substance. The pulse power module 20 is connected to the voltage input terminal of the sensing element 10 and is used to supply the operating voltage of the sensing element 10. The processing device 30 may be a computer, which has a database that stores a complex array of known chemical substance characteristic signals and related processing modules for pattern recognition, such as common pattern recognition. The body: the processing device 30 can receive the sensor The output of the output of the measuring element 丨 〇 needs to pass the sensing element to the pulsed electrical temperature of the sensing element, the thin catalyst reacts, for example, a change, the processing device compares, and the composition of the body is recognized. The unknown gas and known chemistry is Y. If X and the composition), the intelligent chemical substance identification system of the present invention can be used when the component 10 is placed in a specific space. At this time, the voltage input terminal of the pulse power module 20 pieces 10 sequentially inputs a variable pulse voltage. 10. In this way, the thin-film sensing part of the sensing element 10 will have a temperature change due to a compressible input. Here, the constant & membrane will be different from the specific gas to be sensed in the environment. The sensing element 1 〇 synchronously and sequentially outputs the pulsed voltage signal of the wheel output signal ^, and transmits it to the processing device σ k Ο Π gp -X. Id 0 'Then 30 can be determined based on the output signal and known chemical substances The result of the identification of gas in the space / type, or the concentration of each component of the gas, for example, gas, the figure assumes that specific (or volatile chemical substance) G is in a specific space, and you want to add + ^ substance X Compare with Y to know if the gas G = body ^ γ gas images are not completely overlapped (such as various in the 3rd ~ multi-cluster

594013 V. Description of the invention (6) To determine whether the G gas has an X or Y component, and to measure the individual concentrations of the X and Y components. At this time, you can use the above-mentioned intelligent chemical substance identification system for chemical substance identification. When the chemical substance identification is started, a sensing element 10 must first be provided (step S10), and the sensing element 10 is placed in a known chemical substance X and Y, respectively (step S20). Input a variable pulse voltage, such as the pulse variable voltage from low voltage to high voltage and then back to low voltage as shown in Figure 4A, so that the sensing elements can output the signals of known chemical substances SX and SY ( Step S 3 0), for example, two sets of different signals (ie, the output voltage of the sensing element 丨 0) shown in FIG. 4B and FIG. 4C, where FIG. 4B corresponds to a concentration of 2000 mouth 111 The formazan (cjj4), and Figure 4C corresponds to a hydrogen concentration of 200 ppm. These known chemical substance characteristics flood numbers sx and sy can be stored in a database (step S40) for identification and comparison of subsequent gas G. After: ^ Learning 4 material characteristic signals, the sensor element 10 can be placed in a specific space with rolling body φ ^ half S30 step, enter the same == secret), follow the similar steps to make Sensing element output pair; * at the gas G ^ impulse voltage to the sensing element 1 0 'At this point, you can use ";; = two output signals s" step shed ". Characteristic signal belly and SY with drawing number% Compare the identification result of gas G with a known chemical substance, and calculate whether it contains X or Y at the end, or χand). In a specific space, the unknown gas-Shanghai system and method, considering the components and concentrations of μ to be identified may be completely unknown, because 594013

V. Description of the invention (?) This can be applied to the space where the gas composition is easy to change, or it is easy to produce many different components. For example, the semi-open type requires only a single sensing element, and the space of the two bodies can be used. However, the effect of the component type and concentration of various specific gases is equal to that in the identification space. However, the gas sensing element is used for chemical wind treatment. There are still some problems, which are described below. The technology of negative identification of objects is currently generally used in gas sensing. 'Some occasions are closed specific several known compounds to measure one of a closed space, such as when a harmful gas is used in a laboratory or plant. The gas produced by applying gas sensation and the concentration of the field to be identified may be constantly changing for the composition; or although the class is limited to a specific few other unknown compounds. Due to the chemical substance identification system and method to identify the type and concentration, but using variable parts, scanning the full voltage range to identify the need to perform once, and has not repeatedly repeated the occasion for chemical substance identification occasions, or only need to In the environment: j, for example, when the concentration of the gas sensing element: f is changed, or the process response, it is expected that several elements will be generated to detect whether these harmful gases are in the mouth. In these cases, the type in a specific space is known, only the concentration will be unknown due to time and the type of the component, but the combination of the component type and the compound will not appear this. The pulse voltage input of the components to the gas sensing element is only necessary for the operation of the gas component type. As described above, when a conventional gas sensing element performs concentration measurement, a voltage is input to change the temperature of the thin film of the sensing part so that it reaches a selected temperature value. '# This can make the thin film and the environment Desires; specific

V. Description of the invention (8) 生 ί Catalyst reaction 1 Change the resistance value of the thin film. At T ^^, except for its own input = 稃!,:, The gas sensing element has a strong influence on Γ; In addition to the steep, it will also be affected by the low temperature environment of the outer ring, or the most obvious. For example, the degree will also decrease, such as] must = the film of the sensing part of the measuring element cannot be increased to the film caused by the selected greenhouse: the value corresponding to the input voltage becomes prime: can make rotation: :: Accuracy and stability of measurement. … Therefore there is an impact on the gas, the present invention _ chemical substance concentration measurement system and, ^ ,,-a voltage pulse quality identification system and method to improve ', so m; intelligent chemicals or only Need to target a certain number of closed spaces in the environment. In some cases, you can reduce the scan of the full voltage range to detect the situation immediately. At first glance: because of “simplification and save:” ::: a variety of specific gases for body movement. Types of ingredients and even effective identification space In addition, the other system and method of the present invention is aimed at the accuracy and stability of the measurement of the measuring element due to the loss of: =: 胄 乳 乳 体 感 0707-10159TWF (Nl) ; 10920009; calvin.ptd Page 14 V. Description of the invention (9) The present invention discloses a pulse power module for identifying a specific space, and a plurality of known signals are stored. When the pulse voltage reaches the sensing element The power source module of the device according to the component type of the gas passes an output signal and the concentration of the component through the sensing element. In addition, this test method is used to measure the component concentration. First, input the pulse Electricity output signal; then compare to get this to know the specific empty body composition. According to the test voltage value of each gas is greater than _ output a second output. When there is an electrical connection in the electrical space with the power mode of the material The sensor senses an output and every pressure input outputs a known chemical. The pressure of the pulsed chemical substance concentration gas is included in the pressure input terminal and the voltage input terminal. The characteristic signal is received and the output group receives the measurement through the voltage input terminal. A component output, a first output, a sensing output and one and one signal and a component of a known species input, an output substance, a specific substance concentration, a pulse square wave voltage processing device, and a signal signal. The voltage pulse measures a single 'in a specific space' to provide pressure to the output pulse signal of each output in the first specific space; ~ the sensing element is set so that the sensor signal and the chemical specific gas measuring element turn on and off The gas signal in the interval determines the voltage wave voltage and finally sets the characteristic of the component to at least a maximum value to the sensing element. The second output type is chemical or plural, which is the first of the specific measuring element material. Second, to test the electrical voltage value components, use the signal and measurement system, components, and set up the sensing unit; a physical device, a pulse output from the storage terminal can be input The change signal is determined by the processing signal; and when the pulse is sent to the sensing element, and a specific gas is spaced according to the concentration of each component, a clear signal identification result is produced. For each pressure value, for example, and In turn, this sense element t knows Mh

〇718.10159TW (Nl); i〇92〇〇〇09; calvir • Ptd Page 15 594013 V. Description of the invention (10) By comparing the quality characteristic signals, you can get the second identification result of the specific gas to understand this. The concentration of each gas component in a specific space. Specifically, in the voltage pulsed chemical substance concentration measurement method of the present invention, the pulse variable voltage is a Pulse-Modulated voltage signal 'and the first output signal is a pulsed output voltage signal. More specifically, in the voltage pulsed chemical substance concentration measurement system and method of the present invention, the step of the processing device determining the test voltage value according to the first output signal can be described as follows. First, based on the output in the first output signal The maximum voltage value determines the ideal voltage value of the pulse variable voltage corresponding to the maximum value of the wheel output voltage (if there is more than one output voltage maximum value, it is multiple ideal voltage values); then, a voltage greater than the ideal voltage value is used. Value to do the test voltage value. _ By using the technology of the present invention, a sensing element that can only test one gas # degree can be expanded into a multi-purpose sensing element that can detect multiple gases | At the same time, a pulse signal is used as input and output ^ 号 疋. The detection stability of the sensing element is increased. ° can be used to make one of the present invention: v, sign and advantages easy to understand 'The following specific several preferred embodiments are given, and will be described in detail in conjunction with them. As described in the conventional technique— ▼, the general gas sensing element is mainly a method of input voltage 'to obtain% according to its output voltage'. 1 It is called the concentration of the animal to be measured; Identification of known intelligent chemical substances ^ ^

594013 V. Description of the invention (11) The output signal pattern of various gases is used as its unique known chemical ^ characteristic signal to identify the type of the gas component, and the pulse ^ = pressure scan is used to identify the full voltage range to identify the gas Types of ingredients and concentrated production ^ The voltage pulsed chemical substance concentration measurement system and method used in the invention of electricity ^ The principle is based on the further derivation of this concept. Figure 5 shows a voltage pulsed chemical measurement system according to an embodiment of the present invention. The voltage pulse type chemical substance concentration of the present invention is used to identify the gas (or volatile chemical substance ',,,, and its structure in a specific space) and the conventional intelligent chemical substance identification shown in FIG. 3A The system is similar, with a sensing element 10, a pulsed power module 20, and a device 30. The sensing element 10 can be used as shown in Figure u and Figure 1β =, body sensing element 50 0, It has a voltage input terminal 52, an output terminal 53 / port, and a measuring section (body) 510. The sensing section may be formed of a thin film of metal oxide, such as tin dioxide (Sn == or volatile) described in the conventional technology. The chemical substance reacts with a catalyst. The pulsed power module / system ^ = the voltage of the sensing element 10 is input to the terminal, and Xiao supplies the sensing element. There is a complex array of signals of known chemical substance characteristics, and the phase is identified by the pattern. J = The output signal output from the output terminal of the measuring element 10. Set to 30 and can receive the following, please refer to Figures 4A ~ 4C and Figure 5, for Tailu Day and Day Differences of the Moon's Telematics System 1 ::: Test System and Custom Smart Chemistry Substance identified using a voltage pulse of the present invention chemical concentration measuring system,

594013 V. Description of the invention (12) The sensing element 10 needs to be placed in a specific space, and a pulse power voltage module 21 is inputted through the voltage input terminal of the sensing element 10 (this embodiment The figure shows the pulse modulation (Pulse_Modulated voltage signal) from 0v to 6V shown in Figure 4A to the sensing element 10. In this way, the thin film sensing part of the sensing element 10 will be variable due to the pulse. The temperature changes due to voltage input. At this constantly changing temperature, the thin slab and the specific gas to be sensed in the environment will produce different catalyst reactions, so that the sensing element 10 outputs one brother and one output signal. For example, a varying pulsed voltage signal 'is transmitted to the processing device 30. In this way, the processing device 30 can determine the gas in a specific space according to the comparison between the first output signal and the signal of a known chemical substance characteristic (for example, the characteristic signal of the courtyard in Figure 4B and the hydrogen in Figure 4C). The first identification result, for example, the type of the gas component, and the component concentration of each component type. However, in addition to the above-mentioned operation which is the same as the conventional smart chemical substance identification system, in this embodiment, the processing device 30 determines a test voltage value according to the first output signal while determining the first result. In short, the processing device 30 first finds the maximum value of the output voltage of the first output signal, and determines the pulse variable processing f at 3 ° according to the maximum value of the output voltage of the first output signal, which can be greater than the ideal voltage value. Of-voltage value: ί test voltage value. Wind is used as an example. When the maximum value of the output voltage is 5.8V, if the gas is pure methane, the pulse can be derived by changing the pulse. 6V can be used as the output of the methane. Corresponding ideal electric test M value in signal pressure;

When the body is pure hydrogen, it can be obtained that the pulse can be iron = the maximum value of the output voltage of the hydrogen according to the output signal of hydrogen,

That is to say, the ideal voltage value corresponding to = should be UV, and in this case, the first two 'mountain peak voltage value. If the gas contains both oxane and hydrogen values, then this time; the expulsion number should produce more than one round-out voltage with a maximum value, which is more than two corresponding ideal voltage values in a 5 2 pulse variable voltage. 〃 4 · 8V, and the test voltage value also has 6V and 5V human terminals, and the power module 20 can pass the voltage wheel of the sensing element 10 and the sensing element two. = One of the test voltage values. The pulse square wave voltage 220 is up to this point. For an example of the Weige-Pie / Pulse square wave voltage 22, see Figure 6A. As shown in the two pulses, 2 弋 = will output a second output signal, such as in Figure 6β, ^ ^ The first output signal is compared with the signal of the characteristics of known chemical substances. The second identification result is, for example, a change in the concentration of a component in which the gas precursor is a species. Reading Fan i i must explain the reason why a voltage value larger than the ideal voltage value is used for measurement. Please refer to Figure 2. Since the ideal voltage value corresponds to the maximum value of the output voltage of the signal, when the ideal voltage value = the input voltage, the output voltage of the sensing element 10 is the maximum value (A… (Occupy or point B) 'However' In actual operation, since the film temperature f of the sensing element is easily affected by the environment, if the ideal voltage value is used as the input voltage, the film sensing section cannot be heated to the desired temperature. Required film temperature. Therefore, if the input pulse square wave voltage is a test voltage value larger than the ideal voltage value, the film will be heated to a temperature that exceeds the required film temperature;

0718-10159TWF (Nl); 10920009; calvin.ptd page 19 594013 V. Description of the invention (14)

The temperature of the film is reduced due to the influence of small IM 丄, L. When a, a, μ can also be adjusted by the test voltage value, so that the f 2 test shirt can reach the required film temperature, so that the voltage can be guaranteed. It will reach the maximum value of eight points (or β point month a) along the curve in Figure 2. It can even cross point A (or point B), and then return to the maximum value due to the descending, westward, and fanning curve. Point A (or B point). S ~ the original ^ ordinary point) Therefore, using a value greater than the theoretical phase lightning value =-voltage value as the test voltage value, can reduce the impact of environmental temperature and other factors, making sensing The measurement accuracy of the element 10 is maintained. With reference to the flow chart in FIG. 7, an embodiment of the pulsed chemical substance concentration measurement method is further described with an example. This example assumes that a specific space has a The gas (or volatile chemical substance) to be identified G 'When the chemical substance identification is started, f must first be steps S10 to S40 in FIG. 3B, and the signal of the characteristic of the known chemical substance is first generated in order to identify and compare the gas G , Its content will not be repeated. After the characteristic signal, the sensing element i 〇 can be placed in a specific space with gas G (step S5 ()). According to a step similar to step S30 in FIG. 3b, a pulse variable voltage is input to the sensing element. 〇, make the sensing το output the output signal S (J1 (step si6〇)) corresponding to the gas G. At this time, the processing signal 30 is used to identify the output signal SG and the signal of a known chemical substance characteristic by image recognition, etc. The comparison operation is performed to obtain the component concentration of the gas G to the gas G. If the gas G is a mixture of a plurality of chemical species, the component types of the gas G and the concentration of each component type can be obtained. Then, The processing device 30 determines the

594013 V. Description of the invention (15) = = = Test 例如, for example, the foregoing is to determine the pulse variable voltage according to the maximum value of the voltage on the opposite bank iiif, and it is said to be greater than one of the ideal voltage value (S185). ^ ㊇ type voltage value (step by step, the pulse power supply module 20 can be driven by the electric sense element 10) "'Loss: one of the test voltage value pulse square wave voltage (for example Wave voltage) to the sensing element 10 ′ so that the sensing element 10 outputs a second output signal SG2 (step S190), such as a pulse-shaped voltage signal as shown in FIG. 6β, and transmits it to the processing device 30. Finally, processing The device 30 can compare the second output signal SG2 with a signal of a known chemical substance characteristic to determine the second identification result of the gas in the specific space, such as the change in the component concentration of each component type of the gas, etc. By the present invention Method, because each gas component uses the maximum value of the output voltage of the first output A 5 Tiger S G1 to determine an ideal voltage value corresponding to the maximum value of the output voltage in the pulse variable voltage, and is slightly larger than the ideal voltage value One of the voltage values is used as the test voltage value. Therefore, if the gas concentration does not change during the test, the measurement result (maximum value) will not change. Therefore, compared with the conventional continuous voltage signal, The pulse voltage signal can improve the measurement stability. By using the technology of the present invention, a sensing element that can only test one gas concentration can be expanded into a multi-purpose sensing element that can detect multiple gases; at the same time, using The form of pulse signals is used as input and output signals, which increases the detection stability of the sensing element.

594013 V. Description of the invention (16) Measuring system = for pulsed chemical substance concentration measuring element 1. Full range repeated detection of electric power 2 ::: to: two times of power transformer induction, so the pulse-variable voltage every-pulse time can be 'distance', such as 1 second to several times / using a short time pulse square wave voltage When each pulse is a pulse of square wave voltage, the time between impulses should be: one to one hour; the time interval from seconds to hundreds of microseconds 'but every-pulse = fixed "produced error' so can improve the sensing ί; : Stability; Accuracy: or the accuracy of identification of volatile chemicals and although the present invention has been specifically defined to limit the present invention, any of the above 5 routes is as above, but within the spirit and scope of the same, As long as it does not depart from the scope of the present invention, the attached two retouches are considered, so the definition of the target range of this invention < 曱% patent shall prevail. Page 22 0718-10159 ™ F (Nl); 10920009; calvin.ptd 594013 Brief description of the drawing 'Figure 1A is a schematic diagram showing a conventional gas sensing element. Figure 1B is a schematic diagram showing a conventional gas sensing element body structure. Figure 2A is a measurement using a conventional gas sensing element. A graph of the out-flow values of specific gases at different concentrations. Figure 2B is based on conventional gas sensing. The graph of the output value obtained by measuring different gases with components. Figure 3A shows a schematic diagram of a conventional smart chemical substance identification system. Figure 3B shows a flowchart of a conventional smart chemical substance identification method. Figure 4A A schematic diagram of an example of a pulsed variable voltage used in the conventional smart chemical substance identification method. Fig. 4B is a schematic diagram of a round signal obtained by methane with a concentration of 2000 ppm corresponding to the input voltage of Fig. 4A. Fig. 4C A schematic diagram of the hydrogen signal at a concentration of 200 ppm corresponding to the input voltage known in FIG. 4A. Intent FIG. 5 is a diagram showing the intelligent chemical substance identification system of the present invention. FIG. 6A is a pulsed square wave voltage. The schematic r of one embodiment shows: it is not intended to be a pulsed voltage signal (segment: flip-out signal) in Fig. 6A. Fig. 7 is a flowchart showing the voltage pulsed method of the present invention. To the first loss / Chenduli

594013 Symbols for simple illustration of the drawings \ 10 ~ sensing element; 20 ~ pulse power module 30 ~ processing device; 210 production ~ pulse variable voltage 220, ~ pulse square wave voltage 50 0, ~ gas sensing element 510 ^ ~ Main body; 520 output ~ voltage input terminal; 530 ~ output terminal; 512 ^ ~ substrate; 514, ~ electrode; 5 1 6 ~ sensor; 5 1 8 ~ heater; L1, L 2 ~ output curve

0718-10159TWF (Nl); 10920009; calvin.ptd Page 24

Claims (1)

594013 6. Scope of patent application1. A voltage pulsed chemical substance concentration measurement system for identifying a gas in a specific space. The voltage pulsed chemical substance concentration measurement system includes: A sensing element 'not placed in the In a specific space, the sensing element has a voltage input terminal, an output terminal, and a sensing section; a pulse power module connected to the voltage input terminal; and a processing device storing a plurality of signals of known chemical substance characteristics, and Receiving an output signal output from the output terminal; when the pulse power module inputs a ~ pulse variable voltage to the sensing element through the voltage input terminal, the sensing element outputs a first round of output signal to the processing device, and The processing device determines the component type of the gas and the component concentration of each component type according to the first output signal and the characteristics signal of the known chemical substance, and determines a test voltage value according to the first output signal; when the pulse power source When the module inputs a pulsed square wave voltage of the test voltage value to the sensing element through the voltage input terminal, the sensing A second output element output signal to the processing means, the processing means determines the type and concentration of each component of the gas according to the second output signal and the signal such known chemical properties. 2 · The voltage pulsed chemical substance concentration measurement system as described in item 1 of the scope of the patent application, wherein the processing device determines the pulse creep voltage corresponding to the pulse voltage according to the first round of output signal and the maximum value of the output voltage. An ideal voltage value, which is one of the maximum voltages output by the wheel, uses a voltage value greater than the ideal voltage value as the test voltage value. Electricity 594013 6. Scope of patent application 3. The voltage pulse type chemical substance concentration measurement system as described in item 1 of the scope of patent application, wherein the sensing unit includes a thin film of metal oxide. 4. The voltage pulse type chemical substance concentration measurement system as described in item 3 of the scope of patent application, wherein the metal oxide is tin dioxide (Sn02). 5 · A voltage pulsed chemical substance concentration measurement method for identifying a specific gas in a specific space, including the following steps: providing a sensing element; placing the sensing element in the specific space, inputting a Pulse a variable voltage to the sensing element, so that the sensing element outputs a first output signal; comparing the first output signal with a plurality of known chemical substance characteristic signals to obtain a first identification of the specific gas Result; determining a test voltage value according to the first output signal; inputting a pulsed square wave voltage of the test voltage value to the sensing element, so that the sensing element outputs a second output signal; and the second output The signals are compared with the signals of characteristics of the known chemical substances to obtain a second identification result of the specific gas. 6. The voltage pulsed chemical substance concentration measurement method according to item 5 of the scope of the patent application, wherein the first identification result and the second identification result include a component concentration of the specific gas. 7. The voltage pulsed chemical substance concentration measurement method as described in item 5 of the scope of the patent application, wherein the characteristic signal of the known chemical substance is generated by the following steps: placing the sensing elements on a plurality of known chemical substances, respectively. Input a variable pulse voltage to the sensing element, so that the sensing elements respectively output 0718-10159TWF (N1); 10920009; calvin.ptd page 26 594013 The known chemical substance characteristic signals; and storing the known chemical substance characteristic signals in a database. 8. The voltage pulse type chemical substance irradiance I measurement method as described in item 5 of the scope of the patent application, wherein the pulse voltage is a pulse-modulated (Pulse-Modulated) voltage signal. 9. The voltage pulsed chemical substance concentration measurement method according to item 5 of the scope of patent application, wherein the first output signal is a pulsed output 'signal. Love I 0 · The voltage pulsed chemical substance concentration measurement method according to item 9 of the scope of patent application, wherein the step of determining the test voltage value according to the first output signal includes: output voltage according to the first output signal The maximum value determines an ideal voltage value corresponding to the maximum value of the output voltage in the pulse variable voltage, and a voltage value greater than the ideal voltage value is used as the test voltage value. II · A voltage pulse type chemical substance concentration measurement method for identifying a plurality of specific gases in a specific space, including the following steps: providing a sensing element; placing the sensing element in the specific space, and rotating a Pulse a variable voltage to the sensing element, so that the sensing element outputs a first output signal; comparing the first output signal with a plurality of known chemical substance characteristic signals to obtain the first of the specific gases Identification result; determining at least one test voltage value according to the first output signal; inputting at least one pulse square wave voltage of the at least one test voltage value to the 0718-10159TWF (Nl); 10920009; calvin.ptd page 27 594013 VI. Patent-sensing sensing element, so that the sensing element outputs at least a second output signal; and the second output signal and The characteristic signals of known chemical substances are compared to obtain the second identification result of these specific gases. 1 2 · The voltage pulsed chemical substance concentration s measurement method as described in item 丨 丨 of the scope of patent application, wherein the first identification and result include the composition type of the specific known specific gas and the composition of each composition type concentration. 1 3 · The voltage pulsed chemical substance concentration measurement method as described in item 12 of the scope of patent application, wherein the second identification result includes the component wave length of each component type of the known specific gas. 1 4 · The voltage pulsed chemical substance concentration measurement method as described in item 11 of the scope of patent application, wherein the characteristic signal of the known chemical substance is generated by the following steps: The sensing elements are respectively placed in a plurality of known chemical substances. In the substance, a variable pulse voltage is input to the sensing element, so that the sensing element outputs the characteristics signal of the known chemical substance respectively; and the characteristics signal of the known chemical substance is stored in a database. 1 5. The voltage pulsed chemical substance concentration measurement method according to item 11 of the scope of patent application, wherein the pulsed chirp voltage is a pulse-modulated voltage signal. 16 · The voltage pulsed chemical substance concentration measurement method according to item 11 of the scope of patent application, wherein the first output signal is a pulsed output voltage signal. 1 7.Voltage pulse chemical as described in item 16 of the scope of patent application 594013 6. Method for measuring mass concentration in a patent application, wherein the step of determining the test voltage value according to the first output signal comprises: determining at least one output voltage maximum value of the first output signal to determine a corresponding value in the pulse variable voltage At least one ideal voltage value at the maximum value of the at least one output voltage; and a voltage value greater than the at least one ideal voltage value as the at least one test voltage value. 0718-10159TWF (Nl); 10920009; calvin.ptd Page 29