TW587205B - Method and system for pointing and stabilizing a device - Google Patents

Abstract

A method and system for pointing and stabilizing a device that needs to be pointed and stabilized with a desired direction, are disclosed, wherein current attitude measurement and attitude rate measurement of the device measured by an attitude producer, which includes an inertial measurement unit, and the desired direction information measured by a target coordinates producer are processed by a pointing controller to compute rotation commands to an actuator. An actuator rotates and stabilizes the device at the desired direction according to the rotation commands in the presence of disturbances and parametric uncertainties to account for the undesired vibration due to disturbances. A visual and voice device provide an operator with visualization and voice indication of the pointing and stabilization procedure of the device.

Description

587205 V. Description of the invention (l) Patent application for phase M This application is a formal application for a provisional application numbered 6/1/6 9, 501 which was filed on December 7, 1999. Description of the invention: This invention relates to a control method and system for azimuth measurement. Specifically, it is related to a method and system for stabilizing a component that needs to point in a certain direction. It makes the output data of an inertial measurement unit (Inertia ^ Measufemen1: ϋηΗ > ΙΜϋ) installed on the component and the number of rotation instructions required by the target; the actuator calculates and executes "and makes it stably point to this The determined method is as follows: the instruction to rotate this component is used to provide users with stable pointing operations: an audio and video device. Related audio and video # In many applications, users need to instruct a specific position. For example It is said that the on-board mobile communication device to stably point to a sniper grab in the hands of a certain police force soldier needs a complex communication target. The measurement element in a geodetic system must be pointed in the environment. Antennas or communication satellites 丄 · · · · 丄 丄 丄 · · · · · · · · · · · 特 特 特 特 特 特 特 特 特 特 特 特 特 特 特 特 特 特 特 特 特 Special hostile pieces need accurate and stable pointing to a certain direction β Traditional pointing and stabilization systems are only used in commercial equipment. Use a traditional energy-consuming $ weapon system or ^ accelerometer as a motion sensor. His large heavy-duty steel wheel gyro = energy consumption without It can be used in commercial applications such as a shift in the high cost, large volume of the emerging lines. Actuator array communication system

587205 V. Description of the invention (2) Conventional gyroscopes and accelerometers commonly used to detect the rotation and displacement of objects in inertial systems include: Floated Integrating GYROS (FIG), Dynamically-Tuned Gyros (DTG), Ring Laser Gyro (Ring

LASER Gyros (RLG), Fiber-optic Gyros (FOG), Electromagnetic Gyros (ESG), Josephson Juction Gyros (JJG), Hemisperical Resonating Gyros (HRG), Integrated Pulsed Integrating Pendulous Accelerometer (PIPA), Pendulous Integrating Gyro Accelerometer (PIGA), etc.

New breakthroughs are being made in the field of inertial sensing technology. In terms of navigation and control systems, Micro Electronic Mechanical System (MEMS) inertial sensors have greatly improved the price, volume, and reliability of traditional inertial sensors. It is well known that the birth of the first integrated circuit thirty years ago triggered the Silicon Revolution. Integrated circuits have actually changed every aspect of our lives. Over the past three decades, the integrated circuit industry has been characterized by an exponential increase in the number of components integrated into a small piece of silicon. The rapid increase in the number of components on a single silicon chip has led to continuous improvements in integrated circuit performance. Over time, valuable large, complex systems have been replaced by inexpensive, small, high-performance integrated circuits. Although the function of microelectronic circuits has been amazingly improved, in general, this improvement is affected by the chip's processing power.

Page 6 587205 V. Description of the invention (3) Restricted by force. Micro-electro-mechanical systems, or, more simply, micro-machines, are considered to be the next link in the semiconductor revolution. It is believed that this link will be more important than simply integrating more components onto the silicon. The semiconductor revolution in the next three decades will be characterized by the addition of new functions to the chip structure, which will enable the chip to have the ability to sense, process and communicate in addition to computing.

Micro-electro-mechanical systems use existing microelectronic architectures to build micron-scale complex machines. These machines are capable of many functions such as perception, communication and operation. Such components have been widely used in a range of commercial systems. Therefore, it is possible to invent a pointing and stabilization system based on the application of MEMS technology. Summary of the Invention The purpose of this invention is to provide a method and system for stably pointing components to a specific orientation. Calculate angular velocity and angular acceleration instructions based on the output signal and related direction information obtained from the inertial measurement unit and send them to the actuator. The actuator drives the component to rotate and stabilizes the component in the required direction according to these instructions.

Another object of this invention is to provide a method and system for stably pointing components to a specific orientation, in which audio and video devices are used to generate sound and image information to display pointed targets and prompt operating steps for stable pointing . Another object of this invention is to provide a means for stabilizing components

Page 7 587205 V. Description of the invention (4) The method and system for a certain orientation, in which the pointing and stabilizing system has higher accuracy so that the output direction of the system is closer to the direction required to be zero. In addition-the reason is to provide a method and system for stably pointing components to a specific orientation. The system's sensitivity to interference is greatly reduced. The system's output pointing direction and input pointing direction relationship fluctuations caused by changes in the internal conditions of the system are reduced. 〇Although the value of each component of the system changes continuously during its life cycle, the white correction parameters using its feedback value can minimize the impact of these changes. 0 The components that need to be pointed are usually due to structure or force. Motivated The characteristics of the disturbance in a certain task may change to make this problem more serious. Another object of this invention is to provide a method and system for stably pointing components to a specific orientation. The system Can reduce noise and distortion in the system through methods such as smoothness and filtering. The other big thing of this invention is to provide a method and system for stably pointing components to a specific orientation. The system has a wider perspective. 0 Here the system sees a series of frequencies or series of inputs that are defined as the system's ability to respond satisfactorily in the direction 0. Another g of this invention is to provide a component that can stably point the component to a specific orientation. Method and system The system is capable of stabilizing a wide variety of components Refers to > comprising • (a) a wireless communication; Yin〗 strip antenna system (b) ^ f up; gray bundle 1

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587205 V. Description of the invention (5) (c) Laser beam, (d) Barrel, including sniper rifle, machine gun, (e) Geodetic instrument drawing number description: 5-attitude generator 6-actuator 7-pointing controller 8-target coordinate generator 9-audio video device 7 1-measurement data processing module 7 2-target position estimation module 7 3-target position prediction module 7 3 1-target position extrapolation module 74-shooting control module 7 3 2 -Projectile time-of-flight calculation module

7 3 3-Church orientation and time determination module 7 5-Equipment control instruction calculation module C1- metal regular hexahedron C2- first circuit board C4- second circuit board C5-angular rate generator C6- angular increment and velocity increment Volume generator C7- Third circuit board C9- Control circuit board C10-Acceleration generator C15-Thermal sensitive generator C18-Temperature digitizer C20-Heater C21-X-axis vibration type angular rate detection unit C22-Y-axis acceleration Meter C23-First front-end circuit C24-First heat-sensitive generating unit

C25- First heater C30-Thermal processor C4 Y-axis vibration type angular rate detection unit C42-X-axis accelerometer C43-Second front-end circuit

Page 9 587205 V. Description of the invention (6) C44- Second heat-sensitive generating unit C45- Second heater C61- Angle amplifier circuit C62- Angle integration circuit C63- Speed analog / digital converter C65- Input / output interface circuit C66 an oscillator C67-acceleration amplifier circuit C68-acceleration integration circuit C69-speed analog / digital converter C71-Z-axis vibration type angular rate detection unit C72-Z-axis accelerometer C73-third front-end circuit C74-third thermal sensitive Production unit m C75_ Third heater C80-Position and attitude processor C8 1-Attitude and heading module C9 1-DSP chipset C92-ASIC chip C182-Analog / digital converter C82-Position, speed, attitude and heading module C183-Input / output interface circuit C231, C431, C731-Impedance conversion amplifier circuit C232, C43 2, C7 3 2-High-pass crossing wave circuit C301-First amplifier circuit C302-Second amplifier circuit C303-Digital / analog converter C304 -Analog / digital converter C305-Input / output interface circuit C306-Temperature controller C620-Angle integrator C630-Acceleration integrator C640-Resetter C650-Angle and speed increment measuring device C660 C665-Amplifier C802-Angular Rate Compensation Module C 8 1 1-Cone Error Compensation Module C 8 1 2-Angular Rate Compensation Module Page 10 587205 V. Description of the Invention (7) ~ '— C8 13-Acceleration Compensation Module C8 14-Horizontal leveling speed calculation module C 8 1 5-Alignment rotation vector calculation module C 8 1 6-Direction cosine Chen calculation module C 8 1 7-Attitude and heading angle extraction module C 8 1 8-Vertical damping calculation module c 8丨 9 —Northbound damping calculation module C9 1 1-Thermal control calculation module C9 12-Vibration processing module C921-Angle signal loop circuit C922-Vibration control circuit C9 2 5-Oscillator C8 110-Eastbound damping calculation module C 8 2 0 1 -Cone error compensation module C 8 2 0 2-Angular rate compensation module c 8 2 〇3-Acceleration compensation module C 8 2 Q 4-Horizontal leveling speed calculation module C 8 2 0 5-Alignment rotation vector calculation module C 8 2 0 6-Direction cosine Chen calculation module C8207-Earth and carrier velocity calculation module C8209-Attitude and heading angle extraction module C 8 2 0 8-Position speed update module C 9 1 2 1-Discrete fast Fourier transform module C9122-Frequency and Amplitude data storage array module C 9 1 2 3-Maximum value detection logic module C9124-Q value analysis and selection logic module C9125-Phase-locked loop C9211- Voltage amplifier circuit C9212-Amplifier and adder circuit C9 213-Demodulator C 9 2 2 2- High-pass filter C9221-amplifier and adder circuit

Page 11 587205 V. Description of the invention (8) C9223-Demodulator circuit C9224-Analog / digital converter C9225-Low-pass filter C9226-Digital analog converter C 9227-Amplifier C923 First amplifier circuit C9232-Analog / Digital converter C9233-Digital analog converter C9234- The second amplifier circuit shown in Figures 1 to 30 is a preferred implementation of a method and system for stably pointing components to a specific orientation. The rapid development in the field of micro-electro-mechanical systems (MEMS) has made it possible to make gyroscopes and accelerometers that are low in price, light in reset, small in size, and low in energy consumption. The term mems is an abbreviation of Micro Electro Mechanical Systems and is also used to mean integrated electromechanical components. Micro-electromechanical elements 2 to 2 = Integrate circuits to build controllable and movable mechanical and junction electronic components and integration of micromechanics: and rms :, accelerometers used in vehicle air bags, and mimic robots发展 Development of micro-electro-mechanical systems for the manufacture of electronic circuits on silicon. Micromechanics uses integrated circuit technology = technology has been obtained. Charge / cutting technology has been used to manufacture micro-sensors on silicon wafers. The processing points developed by the industry have been greatly reduced, and integrated electronics have been incorporated. , So that the entire system is built in a single shot enough to be integrated into the same piece of silicon but will bring traditional military and commercial field releases? Such a device cannot achieve the life expectancy of a small inertial sensor, but also produces no cheaper in navigation and control systems based on / new applications. Compared with traditional inertial sensors, the device has inertial sensing of monks and micro electromechanical systems.

587205 V. Description of invention (9) Great advantage. The applicant invented a micro Inertial Measurement Unit (IMU) micro and an ultra-miniature inertial measurement unit co remicro IMU and applied for patents on January 4, 2000 and January 25, 2000 (patent Application numbers are 0 9/4 7 7, 1 5 1 and 0 9/6 24, 3 6; Γ. Micro IMU and core micro IMU are the world's smallest inertial measurement unit το 'They are based on solid-state micro-electromechanical The combination of the inertial sensor of the system and the special application integrated circuit. Cremicr〇IM is a perfect motion sensor, which can provide three-axis angular increment, speed increment and basic clock 'and can withstand high frequency vibration and High acceleration. In the different navigation and control fields such as land navigation, automobiles, personal portable navigators, robots, navigation, unmanned aerial vehicles, etc., coremicr〇I MU is a commercial application that many traditional inertial measurement units cannot achieve. Conditions have been created. A coremicro IMU makes it possible to build a low-cost, light-weight, small-size component pointing and stabilizing system. The value is that, Of course, the coremicro IMU is used in this invention, but it is not only applicable to coremicr0IMU. The system based on this invention can use any inertial measurement unit that meets the requirements. The first picture is based on this item A component pointing and stabilizing system of the invention includes an attitude generator (5), a target coordinate generator (8) ', a pointing controller (?), An actuator (6), and an audio video device (9).

Page 13 587205 V. Description of the invention (ίο) The attitude generator (5) includes an Inertial Measurement Unit / Attitude and Heading Reference System (IMU / AHRS based component or global positioning unit) System (Global Positioning System, GPS) receiver, used to determine the current attitude and attitude change rate of the component (1). The target coordinate generator (8) measures the component to be pointed by the component (1) by capturing and tracking the target. The pointing controller (7) calculates the rotation instruction required by actuat〇r (6) according to the points to be pointed by the component (!) And the current attitude measurement data of the component (1), so that the component (!) Can be driven (丨). The stapler (6) drives the 7G device to make it point in the direction that needs to be pointed. Audio and video devices (9) (can be portable or head mounted, set) provide the operator with audio or video Information to help them decide, such as displaying the direction to be pointed and the current attitude of the component, marking the trajectory, pointing the program with sound prompts, etc. Etc. ~ r you, the invention of the pointing and stabilization system is a feedback control system. Cry 1 \ J (8) to capture and track the target to measure the direction to which the element, piece (1) is to be buckled. Inertial measurement The reference system (5) measures the elementary device # (1) in the second morning :: Ϊ and the direction of the square a 溆 -level from μ, the state of 妾. As needed, point to the current direction of the w-direction 70 device 1) The difference is that Shanghai A Fusheng 丨 () calculates the rotation finger 5 and sends it to the actuator. ) Change the current secondary energy of the component (1) ... also J rail orderer (6 is closer. The field-state of the field makes the dagger and the direction that needs to be pointed

587205 V. Description of the invention (π) Since the immediate disturbances and unnecessary fluctuations can occur in multiple aspects of the invention, the system of the invention must be able to reject or filter these fluctuations, and perform tasks with the required accuracy, while Point as precisely as you want. The pointing controller mentioned above implements these smoothness and filtering functions through different feedback methods, including: (a) angular attitude feedback (b) angular velocity and angular acceleration feedback target coordinate generator (8) includes an infrared (Infrared, IR ) Sensor, radio frequency (Radio Frequency, RF) radar, laser radar (LADAR) and charging couple device (Charge Couple Devices) camera, or a multi-sensor data fusion system. Multi-sensor _ Data fusion is a developing technology, somewhat similar to how humans integrate the data they continuously perceive (vision, hearing, smell, taste, and touch) and infer the cognitive process of the external world. In general, the advantages of using a multi-sensor data fusion system include: (1) improving the robustness of the system operation (2) expanding the spatial coverage (3) expanding the time coverage (4) improving the reliability (5) The ambiguous information is reduced (6) The detection performance is improved (7) The spatial resolution is improved # (8) The system's operation reliability is improved As shown in the second figure, the intelligent mechanism of this invention is optimized for optimal implementation Program

Page 15 587205 5. In the description of the invention (12), the user uses a target coordinate generator equipped with a radar and a laser range detector to determine the coordinates of the target. The coordinates of the target are sent to the pointing controller (7) by the electronic hand (audio and video device (9)). The actuator (6), including the organ grab, drives the pipe grab sight to precisely point at the target coordinates to prepare for firing. The audio and video device α) displays a target position and a pointing program. When the user selects the target from the display, the coordinates of the target and the current attitude of the component (1) (obtained from the inertial measurement unit / attitude and heading reference system) are automatically sent to the pointing controller (7). The actuator (6) (machine gun) cooperates with the pointing controller (7) to realize the firing control task. The smart machine gun realized by this invention must perform the task in the presence of interference, accuracy, and failure, and take into account the adverse vibration factors. The system in this invention integrates techniques such as signal image processing, modeling, analysis and synthesis of control systems. This invention balances and optimizes the signal processing and control strategies, algorithms and programs of the round-robin. As shown in the third figure, the pointing controller (7) includes: a measurement data processing module (71) measuring the target position data measured by the target coordinate generator i8) and corrected by the measurement noise from the coordinates of the target coordinate generator itself The system is converted to the local horizontal coordinate system. A target position estimation module (7 2) 'estimates the current pose of the target based on the measured target position. A target position prediction module (73) predicts the future trajectory of the target, and the position and time at which the projectile fired by the machine gun intersects the target. 587205 V. Description of the invention (13) A firing control module (7 4) is used to generate the azimuth and height of the rotary grab necessary to launch the projectile. A device control instruction calculation module (175) using the required azimuth and height of the rotating gun frame and the current attitude and attitude change rate of the rotating gun frame (1) (from the inertial measurement unit / attitude and heading reference system Obtain) Generate the control instructions required by the actuator (6), thereby eliminating interference and positioning and stabilizing the rotary grab frame at the required azimuth and height. Generally speaking, radar measurement data includes the range and rate of change of the target, the azimuth and the rate of change of the azimuth, and the rate of change of the altitude and altitude. The relationship between the target position and its speed and the radar measurement data can be expressed as:

rm = λ! χΤ + + -Γ ten VV1.; --Γ-) ten VV: λ / 乂 f Ψηι = tan 1 (~) + W3

Χγ Χγ Ή y T y T + ** Lower B T 4XT + yr + ζτ

Page 17

587205 V. Illustrated (14) dm -——; ~~; ~ :, / 2 2 ~ + W5 (xT -l · yT -l · zT) ^^ T + yj. YTXr -XTyr where (xT, > V, k) = real target position; (meaning ^, 乂, ^ / ·)-real target speed, measured target sight range and its rate of change;. In order to simplify the target position (κ) = measured target line-of-sight height and its change rate; n) = measured target line-of-sight azimuth and its change rate. Radar measurement data is a set estimate expressed in the radar antenna coordinate system. Module (72) is a specific implementation of the Kalman filter.

The software design of Kalman filter, the radar measurement data is sent back to the local orthogonal test system. The measurement data processing module (71) nonlinearly maps the radar measurement data expressed by the radar antenna coordinate system to the local orthogonal coordinate system. The relationship between the input and output data of the measurement data processing module (7 1) is: = cos (em) Q〇s {φη) = factory claw cos (0jsin〇pj ^ sin ((pm)

P.18 587205 V. Description of the invention (15) 4 c〇s (0Jcos〇p J-sin (0Jcos ((p-rm cos (0Jsin〇pm) 0m tr = dagger 〇s (0Jsin ((p J-cos (0Jsin ((j〇 十 ～ cos (0Jcos ((p = 乂 sin Θ J-cos (0 where

(& r,) W, G) = 1 converted target bearing data; (* m7 ·, nine Γ, ^ η7 ·) = converted target speed, in order to ensure the success of the shooting, the target's future must perform Be accurately predicted. Based on the predicted target orbit and projectile flight dynamics, the position and time at which the projectile meets the target can be calculated very well. The input of the target position prediction module (73) is the current target attitude estimation value from the target position estimation module to, including the target orientation and speed. The output of the target position prediction module (7 3) is the predicted rendezvous position and rendezvous time. As shown in the fourth figure, the target position prediction module (7 3) consists of a target orientation extrapolation module (7 3 1), a projectile time-of-flight calculation module (7 3 2), and a church orientation and time determination module (7 3 3) Made up.

The target azimuth extrapolation module (7 31) uses the current target attitude data (including target azimuth estimates and system dynamics matrix) to extrapolate the projectile's track:

Page 19 587205 V. Description of the invention (16) Where x (heart) 1 is the current target pose estimated by the target bearing estimation module (72); is predicted at time. The target attitude vector at the time of the dead body; where fenis must be much smaller than the step size of the Kalman waver =. 丨 projectile flight time calculation module (7 3 2) calculates the time required for the projectile to fly from the rotating gun frame to the intersection position . In the preliminary design of the projectile time-of-flight calculation module, the projectile's flight time is the line-of-sight distance divided by a desired projectile speed. The intersection orientation and time determination module (7 3 3) calculates the intersection orientation and time based on the predicted projectile steer and projectile flight time. After the target's predicted course is determined, the time 11 required for the projectile to fly from a rotating grab to any point on the predicted target course and the time t 2 required for the target to fly to that point can be calculated. In this way, the intersection position can be determined, because time 11 must be equal to time 12. The shooting control module (7 4) calculates the azimuth and height required for rotating the grab frame based on the intersection position and time given by the target azimuth prediction module (7 2). When the intersection azimuth is known, the required azimuth angle and height C of the component tip can be calculated using the following formula:

P.20 587205 V. Description of the invention (17) The heading (6) to be set is to keep the state of the visual description of this device; Intersection. The device control instruction calculates the module 媸 r 7, the component tip azimuth and treble, and uses the current attitude & and #measurement unit / attitude and required rotation instruction obtained from the reference system of the firing control module, while m changes Rate calculation of the required actuator position. < Remove interference to point and stabilize the rush mouth " Also, the control buckle calculation module (7 5) is a digital controller, which is the basis for precise pointing and stable performance and ensuring that the rotating grab frame does not vibrate. As a preferred line-of-sight solution for the audio and video equipment (9), the video equipment (9) is used to display 2 targets, projectiles, and targets flying in the rotating field during the rendezvous. As shown in the first to fourth figures, the pointing and stabilizing method in the above example of the present invention $ 平 ί1 1 E π includes the following steps. ^) Determine a target with the eye generator (8), etc. Need to point to the 9th coordinate of the South I field; the continuous rigidity unit and so on determine the current attitude of the component (2) 3) use the command ^ direction and the component controller (7), etc. according to the component's required field Finger of the attitude measurement value calculation component

Page 21 587205 V. Description of the invention (18) (4) Direction of using execution. (5) the current orientation of the video display *. ^ (6) generating the audio signal that is preferred in the present invention to the program) to drive the component to point in the direction that needs to be pointed, and the The meta-device presents the target sitting plan. Step (3) also includes the following steps to modify the target bearing amount \ generator (8) measured and measured voice to local horizontal coordinates ^ _ data is converted from the target coordinate generator body coordinate system 3.2 The target position measurement measured by the volume generator (8) using the full range of the target data to measure the target. 3.3 Prediction of the posture of the target 9 including the estimated target position. The intersection of the projectile and the target is large & ^ 十 算 ^ Turn # rack launch & W does not hurt knowing B #. Degree, >, ▼ Dip and time. • 4 azimuths required to generate a rotating grid * frame to launch projectiles and a height of 3 · / benefit, know the azimuth and height of the 1st robbery frame and the current robbery frame obtained from the inertial measurement unit / attitude and heading reference system The attitude and attitude change rate generate the control instructions required by the actuator, thereby eliminating interference and stabilizing the rotary grab at the required azimuth and height. In addition, step (3 · 3) further includes: 3 · 3 · 1 using the target's current attitude, including the target's current position estimate and the system's dynamic matrix, to extrapolate the projectile's future orbit; The time required for the object to fly from the rotating grab to the rendezvous position; and 587205 V. Description of the invention (19) 3 · 3 · 3 Use the predicted projectile orbit and flight time ^ ~ & rendezvous position and rendezvous time. 'α Calculation Interference The preferred inertial measurement unit / I test system [MU / AHRS 5] in this invention is a MEMS IMU with built-in orientation and attitude processing. The MU / AHRS is disclosed below. Machine Generally, an inertial measurement component is used to measure the operation of the carrier. In principle, the inertial measurement component relies on three orthogonal amps. Rate generator and three orthogonally mounted acceleration generators, media, velocity and acceleration signals. Three orthogonally mounted inertial angle fans Three orthogonally mounted acceleration generators and corresponding branch 2 circuits are traditionally called IMUs. Conventional dental, structural and mechanical components in flat two = t components and strapdown inertial measurement components. In the 11 2i inertial measurement module, the angular rate generator's attitude measurement of the body obtained in the production structure can be obtained directly from the platform. Moreover, the platform-type inertia = state ^ rate measurement cannot be controlled from the platform's moderate feedback loop. … The corresponding high-precision measurement platform must be compatible with the platform-type inertial measurement module. In the lame — _ ^, the angular rate is 4 ^ 4 # 1 strap-down inertial measurement module rate generator and speed generator The device is directly connected to the carrier, and the angular velocity generator i§ and the force velocity generator are included in the angular fan. The vector :: gS ^^^ is expressed in the coordinate system of the carrier. Λ 取 can be obtained through a series of calculations. The inertial measurement component uses different types of angular rates to produce 4 #%. Traditional angular rate generators include iron rotor gyroscopes and light

Page 23 587205 screw, power, Joseph device including gyro with pulse processing and large body with complex dynamic tuning pieces to maintain the inertia measurement of traditional inertia. These shortcomings are used in applications where the technology is out of the system. V. Description of the invention (20) Learn gyro, such as' liquid floating integral 1¾ gyro, fiber optic gyro, electrostatic gyro gyro, etc. Traditional angular rate generators, pendulum gyro accelerometers, etc. The sub-circuits of the conventional inertial measurement module are different from the traditional gyro and accelerometer with movable parts ’, so stable motion measurement is required. For example, a force rebalancing circuit to force the mobile part to retune the force of the gyro and accelerometer. Therefore, the usual features are:. Cost south. Large size (volume, weight:. Large power consumption. Short life. Long start time. Traditional inertial measurement components are used in some emerging commercial controllable array antennas, car navigation, And the new inertial inertial sensor technology (Microelectromechanical sensor, tuning gyro with traditional inertial sensors, ring laser gyro 'and hemispherical resonance impulse pendulum acceleration method, mechanical structure, electrical acceleration a are different. Consumption, feedback control loops in order to obtain the zero position of gyroscopes and accelerometers. Usually in group-based, using pulse-modulation measurement components have the following limitations which greatly limit their use, for example, mobile communication. Some handheld devices. Now. Adopt micro Inertial transmission of electromechanical systems (MEMS) technology greatly improves guidance, navigation,

Page 24 587205 V. Description of the invention (21) Cost, size and reliability of the control system. Sigma micro-electro-mechanical systems can be simply referred to as micro-mechanics. MEMS are considered to be the next logical step in the Guinea's revolution. This step is different and more important than integrating more transistors in silicon. In the next 30 years, the essence of the reverse field Shixi film revolution is to introduce a new revolution in the structure of silicon, making silicon not only testable, but also sensitive, perform actions, and communicate. At present, various MEMS angular rate sensors have been developed to meet the demand for high-speed sensors. The application field is from automotive to structural mode. 15 Based on the principle of line vibration, this J domain: axis MEMS angular rate sensors such as vibration ring. The principle of angular resonance is more sexual. At present, the rotation of a tension spring suspension is based on an electrostatically driven tuning tuning fork method. Most MEMS angular rate sensing pianos are g. Most MEMS accelerometers are t. For sense of sense and static electricity, Shi Liu Shi, L. feedback class], Afc to type, it can help to admire the public skill to make γ into 1VV = is, local oscillator, amplifier … The circuit. w Although available from the commercial market ..., and from the m-rate sensor and acceleration j; small size, low power and energy consumption of two inertial measurement groups are widely lacking in high performance, micro classification, MEMS devices use micro Electric ^ pieces. Tapping the underlying structure of the circuit to generate the device and the torque device includes a Zhang C meter, which is produced by the standard 3IM0S process. The company ’s MEMS plus and ## capacitor signal readers and local integrated multilayer sand structure package meters use on-chip demodulation and precision voltage reference 15 ’force feedback loop, and

587205 V. Description of the invention (22) Complex machinery with small size. These machines can have many functions, including sensitivity, communication, and execution. These MEMS devices can be widely used in various commercial systems. The difficulty in manufacturing small inertial measurement components is to use a low-cost, low-accuracy angular rate sensor and accelerometer to make an IMU that has:. Low cost. Small size. Light weight. Low power consumption.

.No damage period / long service life. Immediate starting characteristics. Large dynamic range. High sensitivity. High stability. South precision In order to achieve the above high performance, many difficulties need to be solved, such as: (1) can obtain a small angle Rate sensor and accelerometer. Currently, the smallest angular rate sensors and accelerometers are MEMS angular rate sensors and accelerometers. (2) The corresponding mechanical structure needs to be designed.

(3) The corresponding electronic circuit needs to be designed. (4) Meet the corresponding thermal design requirements in order to compensate the thermal effects of the MEMS sensor. (5) The size and power consumption of the corresponding electronic circuit should be greatly reduced.

Page 26 587205 V. Description of the invention (23) The IMU of this patent preferably uses an angular rate generator and an acceleration generator, for example, an ME MS angular rate device array or a gyro array in order to generate a triaxial angular rate signal of the carrier; An accelerometer array or an accelerometer array to generate a three-axis acceleration signal of the carrier. The motion measurements of the carrier, such as attitude and heading angle, are obtained by processing the three-axis angular rate signal from the angular rate generator and the three-axis acceleration signal from the acceleration generator. In this patent, the output signals of the angular rate generator and the acceleration generator are processed to obtain high-precision digital signals of the angle and velocity of the carrier, and further obtain the high-precision position velocity and attitude of the download body in a dynamic environment. And heading measurements.

As shown in the fifth figure, the small inertial measurement component of this patent includes an angular rate generator C5 to generate three-axis (X, Y, Z-axis) angular rate signals; an acceleration generator C10 to generate three-axis (X , Υ, ζ axis) acceleration signal; a corner increment and speed increment generator C6 is used to convert the tri-axis angular rate signal into a digital angular increment and the tri-axis acceleration signal into a digital velocity increment. Further, a position and attitude processor C 80 is included in the small inertial measurement unit of this patent, which uses three-axis digital angular increments and three-axis digital speed increments to calculate position, velocity, attitude, and heading measurements in order Provide rich motion measurement to meet the needs of different users.

The position and attitude processor C 80 further includes two optional execution modules: (1) an attitude and heading module C 8 1 for generating attitude and heading angle; (2) a position, speed, attitude and heading module C 8 2 To generate bits

Page 27 587205 V. Description of the invention (24) " A position, speed and attitude angle. Selecting the Attitude and Heading Module C 8 1 enables the small inertial measurement module to have an Attitude Heading Reference System

System (ARHS) function ^ Choose execution position, speed, attitude, and heading. The C82 makes small inertial measurement components have an inertial navigation system (inertiai).

Navigation System (INS) function.

Generally, the angular rate generator C5 and the acceleration generator (; 1 () are very sensitive to the environmental temperature. In order to improve the measurement accuracy, as shown in the sixth figure, this patent further includes a thermal control device to convert the angular rate The operating temperature of the generator, the acceleration generator CIO, and the angular and velocity incremental generators 〇6 are set at a set value. It is worth pointing out that if the angular rate generator C5 accelerates the generator 10 and the angular increments And the speed increase generator C6 works in a constant temperature environment, the thermal control device can be omitted. According to the solution of the small inertial measurement module of the present invention shown in Fig. 12, the thermal control device further Contains a thermal sensitive generator C, a processor c 2 0 and a thermal processor C3 0. The thermal sensitive generator C15 is in parallel with the angular rate generator C5, the acceleration generator and the angular increment and velocity increment generator. Work to generate temperature | k number: in order to keep the working temperature of the angular rate generator, acceleration output SCl0 and the angular and speed incremental generator C6 at a set value. The set temperature is a constant value, Optional Between 15 ° and 185 °, excellent

1 7 6 ° F (± 0 · 1 ° F). The temperature signal generated by the thermal sensitive generator C15 is output to the thermal processor C 3 0 ′ heat treatment c 3 〇 using the temperature signal, temperature scale coefficient and

Page 28 587205 V. Description of the invention (25) The predetermined operating temperature of the angular rate generator C5 and the acceleration generator C10 and the angular and speed increment generator C 6 are used to calculate the temperature control instruction and form the corresponding drive A signal is sent to the heater C20 to control the heater C20 to generate enough heat to maintain the predetermined operating temperature of the angular rate generator C5 and the acceleration generator C10 and the angular increment and speed increment generator C6. The temperature characteristic parameters of the angular rate generator C5 and the acceleration generator C10 can be obtained through a series of temperature characteristic parameter calibration processes of the angular rate generator and the acceleration generator.

As shown in the seventh figure, when there is no thermal processor C30 and heater C20, in order to compensate the angular rate generator and acceleration generator measurement errors caused by the ambient temperature change, the small inertial measurement component of the present invention may include a The temperature digitizer C18 is used to receive the temperature signal generated by the thermal sensitive generator C15, and output the digital temperature signal to the position, speed, attitude and heading module C 82. As shown in the sixteenth figure, the temperature digitizer C18 may be preferably an analog / digital converter C182. Further, the position, speed, attitude and heading module C82 uses the current operating temperature of the angular rate generator C5 and the acceleration generator C10 from the temperature digitizer C18, and queries the temperature characteristic parameters of the angular rate generator C5 and the acceleration generator C10. , Compensate the thermal effect error in the input digital angle increment and digital speed increment, and use the compensated digital angle increment and digital speed increment to calculate the attitude and heading angle in the attitude and heading processor C80.

In most applications, the output signals of the angular rate generator C5 and the acceleration generator C10 are analog voltage signals. The triaxial angular rate analog voltage signal generated by the angular rate generator C5 is directly proportional to the angular rate of the carrier.

Page 29 587205 V. Description of the invention (26) The three-axis acceleration analog voltage signal generated by the white acceleration generator is directly proportional to the acceleration of the carrier. 0 When the angular rate generator C5 and the acceleration generator C1 0 When the output analog voltage signal is too weak for the angular increment and velocity increment generator C 6 to read, the angular increment and velocity increment generator <: 6 as shown in Figures 23 and 24 Amplifiers C660 and C665 can be used in order to amplify the analog voltage signals output by the angular rate generator C5 and the acceleration generator C1 0 and compress the noise therein. As shown in the eighth figure, the angular increment and velocity increment generator C6 It further includes an angle integrator C620, — 丨 ― an acceleration integrator C 6 3 0, a resetter C640, an angular and speed increment measurer C650, and an angle integrator C620 and an acceleration integrator C630, which are respectively used at predetermined times. Inner product Divides the three-axis angular rate analog voltage signal and the three-axis acceleration analog voltage signal, so as to accumulate the two-axis angular rate analog voltage signal and the three-axis acceleration analog voltage signal to form an uncompensated original angular increment and velocity increment. The integration operation is In order to eliminate the noise signals in the three-axis angular rate analog voltage signal and the two-axis acceleration analog voltage signal that are not directly proportional to the carrier angular rate and acceleration, the signal-to-noise ratio is raised, and the three- Korea angular rate analog voltage signal and three High-frequency noise in the axis acceleration analog voltage signal 0 The signals in these two-axis angular velocity analog voltage signals and the three-axis acceleration analog voltage signals are directly proportional to the carrier angular velocity and acceleration. The reset device generates the angle reset voltage pulse and the speed reset voltage pulse, which are output as the angle and speed scales, and are output to the angle integrator C620 and the acceleration integrator C630.

Page 30 587205 V. Description of the invention (27) The angular increment and velocity increment measuring device C 6 50 uses the angle reset voltage pulse and the speed reset voltage pulse to measure the accumulated three-axis angular rate analog voltage signal and three-axis acceleration. The analog voltage signal is used to obtain the angular increment count and the speed increment count, which are correspondingly used as the digital quantities of the angular increment and the speed increment. 'In order to be able to output the actual angular and speed increments, as an output angle select speed, another option for increasing the voltage value output, the angular increment and speed selector C650 will be the angular increment and speed increment voltage Values are converted to actual ^ increments and speed increments. Used in the angle integrator C620 and the acceleration integration 1C63〇, the triaxial angle two or two pressure signals and the triaxial acceleration analog voltage signal are reset respectively, and 'accumulate from zero at the beginning of each predetermined time period. ^ As shown in the tenth figure, the resetter C 6 4 0 can be an oscillating EC66. ^ 2 pulses, as angle reset voltage pulse and speed reset voltage pulse. For some applications, the oscillator C66 is made with specific circuits, such as dedicated ASIC and printed circuit board. As shown in the picture of the first letter, the angular and velocity increments of the analog voltage signals used to measure the accumulated three-axis angular rate analog voltage and the two-axis acceleration analog voltage signal can be realized by an analog / digital converter c6so. In another way, the electric quantity sub-converter c65〇 actually digitizes the original angular increment and speed selection into digital quantities of angular increment and speed increment. As shown in Fig. 15 and Fig. 19, the angular increment and velocity increment produce the speed. ^ The large devices C 6 6 0 and C 6 6 5 can use the corner amplifier circuit C61 and C67 to access the circuit C 67 respectively. achieve. Angular amplifier circuit C 61 and acceleration amplifier circuit Large two-axis angular rate analog voltage signal and three-axis acceleration simulation

Page 31 587205 V. Description of the invention (28) The voltage signal forms an amplified three-axis angular rate analog voltage signal and a three-axis acceleration analog voltage signal. The angle integrator C620 and the acceleration integrator C630 of the angular increment and velocity increment generator C6 can be implemented by an angle integrating circuit c 62 and an acceleration integrating circuit C68, respectively. The angle integration circuit C62 and the acceleration integration circuit c 6 8 respectively receive and integrate the amplified three-axis angular rate analog voltage signal and the three-axis acceleration analog voltage signal from the angle amplifier circuit C61 and the acceleration amplifier circuit C67 to form an accumulated three-axis angle Rate analog voltage signal and triaxial acceleration analog voltage signal. The angular increment and velocity increment generator C6's analog-to-digital converter C650 further includes a corner analog / digital converter C63, a speed analog / digital converter _ converter C63, and an input / output interface circuit C65. The accumulated angular increment from the angle integrating circuit C 62 and the accumulated speed increment from the acceleration integrating circuit C 68 are output to the angular analog / digital converter C63 and the speed analog / digital converter C69, respectively. The accumulated angle increment is measured by the angle analog / digital converter C63 by using the angle reset voltage signal to form the angle increment count value 'as a form of the digital angle increment voltage. This angular increment count value is output to the input / output interface circuit C 65 to form a digital three-axis angular increment voltage value. The accumulated speed increment is measured by the speed analog / digital converter C63 by using the speed reset voltage signal to measure the accumulated speed increment so as to form a speed increment count value 'as a form of digital speed increment voltage. The speed increment count value is output to the input / output interface circuit C65 to form a number

Page 32 587205 V. Description of the invention (29) Three-axis speed in words and the voltage value in degrees. As shown in the sixth and twelfth figures, in order to realize the flexible adjustment of the heat treatment C30 with a thermal generator C15 having an analog voltage output and a heater C20 with an analog input, the thermal processor C30 As shown in the figure, a digital feedback control loop is implemented. As shown in the twelfth figure, the thermal processor C30 includes an analog / digital converter C304 connected to the heat sensitive generator C15, a digital / analog converter C3 0 3 connected to the heater C20, and a connection and analog / digital converter C3 0 4 and temperature controller C 3 0 6 for digital / analog converter C 3 0 3. The analog / digital converter C304 input generates a temperature voltage signal through the thermal sensitive generator C15. The analog / digital converter C304 samples the temperature voltage signal, digitizes the voltage signal, and outputs the digital temperature signal to a temperature. The controller C 3 06 temperature controller C306 uses the digital temperature voltage signal from the analog / digital converter C304, the temperature calibration coefficient, and the predetermined operating temperature of the above-mentioned angular rate generator and acceleration generator to calculate the digital temperature control. Instruct, order, and send the digital temperature control instruction to a digital / analog converter C 3 0 3. The digital / analog converter C303 converts the digital temperature control instruction from the digital temperature controller 0 6 into an analog signal. The analog signal is output to a heater C20 so as to generate appropriate heat to ensure a predetermined operating temperature of the IMU of the present invention. φ further 'as shown in the thirteenth figure, if the voltage signal generated by the thermal induction generator C15 is too weak, so that the analog / digital converter C304 does not

Page 33 587205 V. Description of the invention (30) Energy category 'Then heat treatment C 3 0 further includes a first amplifier circuit C301 connected between the thermal sensor C15 and the digital / analog converter C303. The sensing generator C 1 5 obtains a voltage signal, and inputs it to the first amplifier circuit C 3 01 to amplify, and suppresses noise in the voltage signal, improves the signal-to-noise ratio, and the amplified voltage signal is input to the analog / digital converter C304. ) In general, heater C 2 0 requires a special drive current signal. In this case, as shown in Figure 14, heat treatment C30 further includes a second amplifier connected between digital / analog converter C303 and heater C20. Circuit C302. The second amplifier circuit C 302 amplifies the input analog signal from the digital / analog converter C303 to the heater C 2 0. In other words, the digitized temperature command from the temperature controller C306 is converted into an analog signal in the digital / analog converter C303, and the signal is input to the amplifier circuit C302. As shown in the fifteenth figure, an input / output interface circuit C305 is sometimes required to connect the analog-to-digital converter C304 and the digital-to-digital converter C303 to the temperature controller C306. In this case, as shown in the fifteenth figure, the above-mentioned voltage signal is sampled by the analog / digital converter C304, and the sampled signal is digitized. Then, the digital signal is output to the input / output interface. The temperature controller C3 0 6 uses the digital temperature voltage signal from the analog / digital converter C 3 0 4, the temperature calibration coefficient, and the predetermined operating temperature of the above-mentioned angular rate generator and acceleration generator to calculate the digital temperature control instruction. And output the digital temperature control instruction to the input / output interface circuit C 305. Digital / analog converter C3 〇3 will come from the input / output interface

Page 587205, description of the invention (31) The digital temperature control instruction of the second circuit C 305 is converted into an analog signal, and the analog signal is output to a heater C20, so as to generate appropriate heat to ensure the predetermined Operating temperature. As shown in the sixteenth figure, as described above, on the other hand, the heat treatment C30 and the heater C20 in the sixth and twelfth to fifteenth figures can be connected to the analog / digital converter of the thermal generator C15. C182 is implemented to receive the voltage signal from the thermal generator C15. If the voltage signal generated by the thermal generator C15 is too weak to be read by the analog / digital converter C182, as shown in Figure 17, an additional amplifier circuit C 181 can be connected to the thermal generator C15 and The analog / digital converter C182 is used to amplify the signal, compress the noise in the signal, and improve the signal-to-noise ratio. The amplified signal is sent to the analog / digital converter C182. The input signal is sampled by the analog / digital converter C182, the amplified signal is digitized into a digital signal, and the digital signal is output to the attitude heading processor C80. On the other hand, an input / output interface circuit C 183 may be connected between the analog / digital converter C182 and the attitude heading processor C80. In this way, as shown in Figures 11 and 24, the amplified signal is sampled by the analog / digital converter C182, and the signal is digitized into a digital signal, which is output before being input to the attitude course processor C80. This digital signal is given to the input / output interface circuit C 183. As shown in the fifth figure, the digital triaxial angular incremental voltage value or true value and the triaxial digital velocity incremental voltage value or true value are generated and output by the angular increment and speed increment generator C6. To accommodate digital triaxial angles from the angular increment and velocity increment generator C6

Page 35 587205 V. Description of the invention (32) Incremental voltage value and digital three-axis speed incremental voltage value y As shown in the tenth lambda diagram, j Attitude heading processor C81 includes a cone error compensation module C 81 1, where The rate (short period) will be the digital three-axis angular incremental voltage value from the input / output circuit C65 of the angular incremental and velocity incremental generator C6, and the coarse angular velocity deviation of the angular velocity and acceleration generator calibration process. Set> Enter the C811 error compensation module. In this cone error compensation module, use the input three-axis angular incremental voltage value and coarse angular velocity offset to calculate the cone effect error. Output the above three-axis cone effect error and long period three-axis at a lower rate (long period). Angular incremental voltage value. Attitude and heading processor C81--Steps include--Angular rate compensation module C8 12 and _ Alignment rotation vector calculation module C81 5 0 Where 1 The angular incremental voltage value and the angular rate generator installation misalignment angle parameters from the above-mentioned angular rate and acceleration generator calibration process, the fine angular rate offset error term 1 the angular rate generator scale coefficient, and the cone correction scale coefficient are input to the above angles. Rate compensation module C8 12 in order to use the input cone effect error, the angular misalignment angle of the angular rate generator, the fine angular rate offset error term, and the positive correction factor of the round calibration cone to compensate the input three-sleeve cycle period incremental voltage The value uses the scale factor of the above-mentioned angular rate generator to convert the three-axis long-period angular increment lightning pressure value after the above compensation into the actual three-long-period angular increment. The above-mentioned value and the actual angle of the triaxial long period to increment the value of the - alignment rotation amount calculation module to C815. Attitude heading processor C81--Steps include--Acceleration compensation module C8 13 and horizontal leveling speed meter calculation module C814. Among them, the angular increase of white

Page 36 587205 V. Description of the invention (33) and speed increase:!: The three-axis speed increase voltage value of the input / output circuit C65 of the generator C6 'and the acceleration device from the above-mentioned angular rate generator and acceleration standard process The installation misalignment angle, acceleration bias error, and acceleration scale factor of the acceleration device are rolled into an acceleration compensation module C8 丨 3. The acceleration device scale factor is used to convert the input three-axis speed incremental voltage value into the actual three-axis speed. Incremental value, using the input accelerometer installation misalignment and acceleration offset error terms, to compensate for the deterministic error in the above-mentioned three-axis speed increment, and output the two-axis speed increment after the repairman to a horizontal leveling speed calculation Module C814. '

3. In the quasi-rotation vector calculation module C815, the three-axis angular increment from the above-mentioned angular rate is used to supplement the module C 812, the eastern damping angular increment from an eastbound damping calculation module C8110, and the northbound damping calculation module C819. Of the northbound damping angle increment, from the vertical damping angular rate of a vertical damping calculation module ⑶ ", updates a quaternion, the quaternion is a vector used to represent the rotation motion of the above carrier, the quaternion after the update The number is sent to a direction cosine Chen calculation module C8 丨 6 to calculate a direction cosine matrix using the updated quaternion. The calculated direction cosine Chen is output to a horizontal acceleration calculation module C8 14 and an attitude and heading Angle extraction module C817 to calculate the attitude and heading angle using a square cosine matrix from the direction cosine calculation module C 8 1 6.

The three-axis speed increment after compensation is output to the horizontal flattening speed calculation module C8 14: Among them, the three-axis speed increment from the above-mentioned acceleration compensation module c8U and the direction cosine-chen calculation from the above-mentioned direction cosine moment calculation module C816 are used Speed increment.

Page 37 JG / 205 V. Description of the invention (34) Horizontal speed C 8 11 1 0, of which, the horizontal speed C 8 1 9 in the north direction, in which the increase in the horizontal speed comes from the above angle and the increase in the vertical damping speed the amount. The eastward damping angular rate increment is used to dampen the attitude or, as shown in the real graph of the three-axis angular increment, C 8 1 1 is calibrated with the digital generator of the C6 generator. At this circular increment value and the thick angle (long period The output value is given to a corner from the above-mentioned two-sleeve cycle angle increment to be output to the eastward damping rate calculation module using the increment from the horizontal acceleration calculation module C814 to calculate the easting damping angular rate increment. The increment is output to the above-mentioned easting damping rate calculation module, and the easting from the above-mentioned horizontal acceleration calculating module c 8 丨 4 is used to calculate the northing damping angular rate increment. The f-state and heading angle extraction module C817 calculated the heading angle measured by the heading sensor C 9 0 and input it into the "leaf calculation module C 8 1 8 to calculate the vertical damping angular rate angular rate increment, and the northbound damping is fed back to The drift of the above-mentioned alignment rotation and heading angle errors. Adaptation comes from the angular increment and speed drop value and the digital triaxial speed increase rate (short period). The input comes from the biaxial angle increment value, and the coarse velocity angular rate deviation of the incoming journey. Set to the cone error compensation module, and make the speed offset calculation cone error. The above three-axis cone effect error rate compensation module C812. The magnitude of the cone error compensation module C81 1 and the angular velocity increment and vertical resistance vector calculation from the above. Module C815, the actual digital value of the incremental generator C6, such as the nineteenth angle increment and speed increment are produced by an angular rate and acceleration, and a cone error compensation module uses the three-axis angular difference entered above at a lower rate. And long-period triaxial angles increase the above cone effect error and angular rate and acceleration

Page 38 587205 V. Description of the invention (35) The angular rate generator installation misalignment angle parameter, the precise angular rate offset error term, and the cone correction scale coefficient during the calibration process are input into the angular rate compensation module C 8 1 2. Use the input cone effect error, the misalignment angle of the angular rate generator, the precise angular rate offset error term, and the positive correction factor of the circular calibration cone to compensate the three-axis long period angle increment value input above, and The above-mentioned actual three-axis long period angle increment value is output to an alignment rotation vector calculation module C815 °

The three-axis speed increment from the angular increment and velocity increment generator C6, and the installation misalignment angle and acceleration offset error of the acceleration device from the above-mentioned angular rate generator and acceleration generation calibration process are input to an acceleration compensation Module C813, use the input accelerometer to install the misalignment angular acceleration offset error term to compensate for the deterministic error in the above-mentioned three-axis speed increment, and output the compensated three-axis speed increment to a horizontal leveling speed calculation module C814 The following module uses the compensated angular increment value from the angular rate compensation module C 8 12 and the three-axis speed increment from the acceleration compensation module C 813 to calculate the attitude and heading angle. For the above processing modules, these subsequent processing modules are the same as those described previously.

If the temperature compensation method is used, in order to adapt to the digital three-axis angular incremental voltage value and digital three-axis speed incremental voltage value from the angular and speed incremental generator C6, as shown in the seventh, eighteenth and tenth Figure nine. Enter the digital three-axis angular incremental voltage value from the angular and speed increment generator C6 at a high rate (short cycle), and the coarse angular velocity offset from the calibration process of the angular rate and acceleration generator to one Conical error compensation module C 8 1 1

Page 39 587205 V. Description of the invention (36) In the cone error compensation module, the three-axis angular incremental voltage value and the coarse angular velocity offset entered above are used to calculate the cone effect error, and the above three are output at a lower rate (long period). Axial cone effect error and long-period three-axis angular incremental voltage value. Give an angular rate compensation module C812.

The above-mentioned cone effect error and the three-axis long period angle incremental voltage value from the above-mentioned cone error compensation module C811, and the angular rate generator installation misalignment angle parameters from the above-mentioned angular rate and acceleration generator calibration process, the fine angular rate offset The error term, the angular rate generator scale factor, the cone correction scale factor, and the digital temperature signal from the input-output interface circuit C 183 and the scale factor of the temperature sensor are input to the above-mentioned angular rate compensation module C812 to calculate the angular rate generator. The current temperature of the temperature; use the calculated current temperature of the angular rate generator to find the temperature characteristic data of the angular rate generator; use the input cone effect error, the installation misalignment angle of the angular rate generator, and the precise angular rate offset error term And the positive scale factor of the round calibration cone to compensate the input three-axis long-period angular incremental voltage value; using the scale factor of the angular rate generator to convert the three-axis long-period angular incremental lightning pressure value after the compensation into Actual three-axis long-period angular increment value, compensated using temperature characteristic data of angular rate generator Incremental shaft angle error in the long cycle due to temperature variations caused by the three-axis and said actual value of the long-period angular increment of rotation to an alignment vector computing module C 8 1 5.

The three-axis speed increment voltage value from the angular increment and velocity increment generator C6, and the installation misalignment angle of the acceleration device, the acceleration offset error, and the scale of the acceleration device from the above-mentioned angular rate generator and acceleration generation calibration process Coefficient, and digital temperature signal from the input-output interface circuit C 1 8 3

Page 40 587205 V. Description of the invention (37) and the scale coefficient of the temperature sensor are input to an acceleration compensation module C813 to calculate the current temperature of the acceleration generator; use the calculated current temperature of the acceleration generator to find the acceleration The temperature characteristic data of the generator; use the acceleration device scale coefficient to convert the input three-axis speed incremental voltage value into the actual three-axis speed increase f value. 'Use the input accelerometer installation error, angular acceleration offset error term, compensation The deterministic error in the above-mentioned three-axis speed increment; the temperature characteristic data of the acceleration generator is used to compensate the error caused by the temperature change in the three-axis long-period speed increase value, and the three-axis speed increment after compensation is output to A horizontal leveling speed calculation module C8l4. The following module uses the compensation from the angular rate compensation module C 8 1 2, the angular value and the three-axis speed increment from the acceleration compensation module c 813, the 2-liter attitude and the heading angle. For the above processing modules, these subsequent processing tasks are the same as those of the handle block described above. The centering cone effect is poor, at a lower rate (county Zhou Ru, Laoshan, ^ "-triaxial angle of the trivial cycle = triaxial circular miscellaneous effect clothing a 1 value to the angular rate compensation module ^ if used Temperature compensation method, in order to adapt to the actual value of the digital triaxial angular increment and the digital two-axis rapid production income from the angular increment and velocity increment generator C6, as shown in Fig. 7 ', Fig. 18 and Fig. 19 ;; == Hard C 8 1 can be further modified to input the digital three-axis angular increment value of the angular increment and velocity increment generator C6 at a high rate (short cycle), and from the angular rate The coarse angular deviation of the calibration process of the acceleration generator and the acceleration generator goes to a cone error compensation module C811. In the cone error compensation module two, the above-mentioned two-axis angular increment value and coarse angular velocity offset are used to calculate the circular deviation.

587205 V. Description of the invention (38) C812. -

The above-mentioned cone effect error and the three-axis long period angle increment value from the above-mentioned cone error compensation module C 8 1 1 and the angular rate generator installation misalignment angle parameters from the above-mentioned angular rate and acceleration generator calibration process, the fine angular rate The offset error term, the cone correction scale factor, and the digital temperature signal from the output interface circuit C 183 and the scale factor of the temperature sensor are input to the above-mentioned angular rate compensation module C 802 to calculate the current temperature of the angular rate generator; Use the calculated current temperature of the angular rate generator to find the temperature characteristic data of the angular rate generator; use the input cone effect error, the installation misalignment angle of the angular rate generator, the fine angular rate offset error term, and the circular cone Positive scale factor to compensate the three-axis long-period angular increment value entered above; use the temperature characteristic data of the angular rate generator to compensate for errors caused by temperature changes in the three-axis long-period angular increment value, and The actual three-axis long period angle increment value is output to an alignment rotation vector calculation module C81 5.

Three-axis speed increments from the input / output circuit C 6 5 and the installation misalignment angles, acceleration offset errors of the acceleration device from the above-mentioned angular rate generator and acceleration generation calibration process, and the numbers from the input-output interface circuit C 183 The temperature signal and the scale coefficient of the temperature sensor are input to an acceleration compensation module C 8 1 3 to calculate the current temperature of the acceleration generator; use the calculated current temperature of the acceleration generator to find the temperature characteristic data of the acceleration generator; Use the input accelerometer to install the misalignment angular acceleration offset error term to compensate for the deterministic error in the above-mentioned three-axis speed increment; use the temperature characteristic data of the acceleration generator to compensate for the temperature change in the three-axis long-period speed increment value The error caused will be compensated for the subsequent three-axis speed

Page 42 587205 V. Description of the invention (39) Degree increment output to a horizontal leveling speed calculation module C 8 1 4. The following module uses the compensated angular increment value from the angular rate compensation beam block c 8 丨 2 and the three-axis speed increment from the acceleration compensation module C 813 to calculate the attitude and heading angle. For the above processing modules, these subsequent processing modules are the same as those described previously. As shown in the twentieth chart, the position speed and attitude processing module C82 includes: a cone error compensation module C 8 2 0 1, which is the same as the cone error compensation module c 8 1 1 of the attitude heading processor C 8 1. An angular rate compensation module C8202 is the same as the angular rate compensation module c 8 1 2 of the attitude heading processor C 8 1. An alignment vector calculation module C 825 is the same as the angular rate compensation module C815 of the attitude and orientation processor C81. One direction cosine Chen calculation module C 8 2 0 6 is the same as the angular rate compensation module c 8 1 6 of the attitude heading processor C 8 1. An acceleration compensation module C 8 203 is the same as the acceleration compensation module C 8 丨 3 of the attitude and heading processor C 8 1. A horizontal leveling speed calculation module C 8 2 0 4 is the same as the horizontal leveling speed calculation module c 8 丨 4 of the attitude heading processor C 8 1. An attitude and heading angle extraction module C 8 2 0 9 is the same as the attitude and heading angle extraction module c 8 丨 7 of the attitude and heading processor C81. A position speed update module C 8 2 0 8 receives the horizontal leveling speed calculation module C 8 2 0 4 and calculates the position and speed. Lu Yi Earth and carrier rate calculation module C82 〇7, this module receives the position and speed update module C8208 position and speed, calculate the carrier from the navigation coordinates

Page 43 587205 V. Description of the invention (40) The rotation angular rate of the system to the inertial coordinate system, and the input of the rotation angular rate is aligned with the rotation vector calculation module C8 2 0 5. In order to meet the requirements of different application systems, as shown in Figure 15 and Figure 31, according to the format required by external users, such as rS-232 application communication standard 'RS-42 2 application communication standard, PCI / ISA Bus standards, 1 5 5 3 bus standards' in input / output interface circuit C65 and input / output interface circuit Cj05A, assemble digital triaxial angle incremental voltage signal, digital triaxial speed incremental voltage signal, and digital temperature signal.

In order to meet the requirements of different application systems, please refer to Figure 15 and Figure 3 + —Figures according to the format required by external users, such as RS-23 2 application communication standard = 'RS-4 2 2 application communication standard, PCI / ISA bus standard, 1 5 5 3 bus standard 'in the turn-in / output interface circuit C 6 5 and input / output interface circuit 205 order, assembling digital triaxial angle incremental voltage signal, digital triaxial speed increasing summer voltage signal, and Digital temperature signal. As mentioned above, one of the key technologies of the present invention to achieve a small I MU is to use a micro angular rate generator. Among them, the micro angular rate generator using M EMS technology and the corresponding mechanical structure and circuit board layout are as follows: One of the key technologies of the invention to achieve a small IMU is to design a small circuit with very low power consumption. Among them, traditional ASIC technology can be used to reduce complex circuits to a silicon chip.

Existing MEMS technology for manufacturing tiny angular rate generators uses vibrating inertial masses to sense the angular velocity of the carrier through the Creoles effect. The Creoles effect is the working principle of general vibration angular rate sensors.

Page 44 587205 V. Description of the invention (41) The Creoles effect can be interpreted as the application of an angular velocity to a translational and vibrating sexual mass, which produces Creoles force. When an angular velocity is applied to the axis of the inertial mass and oscillates, the teeth of the inertial mass receive the Creoles force. This Creoles force produces a torque in the axial direction of the sensor. This torque is proportional to the applied angular velocity. Furthermore, the angular rate can be measured.

The Creoles force or acceleration is named after the French physicist and mathematician, Gaspard de Creoles (1792-1843). He assumed its Creoles force in 1835 as a correction to the rotation of the earth during trajectory calculations. Creoles acceleration acts on an object moving around a point at a fixed angular rate and moving radially. The basic equation of the Creoles force can be expressed as ^ Coriolis = Coriolis = ^ 171 ^ X ^ OscUlation) where * is the detected Creoles force; m is the mass of the inertial mass;, c. " Heart is the generated Creoles acceleration; ^ is the input angular velocity; is the oscillation speed of the inertial mass;

The resulting Creoles acceleration is proportional to the product of the mass of the inertial mass, the input angular velocity, and the oscillation speed of the inertial mass. The direction of the oscillating speed of the inertial mass is orthogonal to the direction of the input angular velocity. The main problems with vibration-type rate generators are poor accuracy, sensitivity, and

Page 45 > 87205 V. Description of the invention (42) Stability. Unlike MEMS, it ’s far crying, it ’s not easy to connect, r ♦ • go to l,. ”F generator ί !; =; 感 -ί = The pieces should be: Use the existing ones in a mouthful way, early I Τ ΜΙΙ λα rain hand produces an angular rate measurement of 15 冋, which is required for small IMUs. Therefore, in order to obtain the vibration type angular rate detection unit k, the vibration drive signal must first be fed into the vibration type angle. = Vibration of the gauge block and can maintain the inertial mass: strange 2 drive signals ...-_ Angle rate generator such as Figure 21 and Figure 22 respectively show the small inertial measurement assembly of the present invention Mechanical structure and electrical system: View and section view. The small inertial measurement component includes a first circuit board, a second circuit board C4, Xuezheng Liu, and a control circuit board C 9. in a transparent body ci. Electrical circuit board C7 The first circuit board C1 is connected to the third circuit board C7, and generates a y-axis · sensitive signal and a Y-axis acceleration-sensitive signal to the control circuit board cg. The second circuit board C4 is connected to the third circuit board C7 to generate γ-axis, sensitive signals and X-axis acceleration-sensitive signals to the control circuit board C 9. The third speed circuit board C7 is connected to the control circuit board C9 to generate z-axis ... sensitive signals and z-axis acceleration sensitive signals to the control circuit board C9. The speed control circuit board C9 is connected to the first-circuit board two through the third circuit board C7 Circuit board C4 is connected to process the X, Y, and Z-axis angular rate-sensitive signals and χ 1 Li from the first circuit board C2, flute- *, and the C4 and third circuit boards C7.

^ 7205 V. Description of the invention (43) Axis acceleration sensitive signals to generate digital angular increment, velocity increment, position, velocity, attitude and heading measurements. θ As shown in the twenty-third figure, the angular rate generator C5 of the preferred solution of the small inertial measurement component of the present invention includes: an X-axis vibration type angular rate detection early element C21 and a first element connected to the first circuit board C 2 A front-end circuit C23; a y-axis vibration type angular rate detection unit C41 and a second front-end circuit 43 connected to the second circuit board C4; a Z-axis vibration type angular rate detection unit C71 connected to a third circuit board C7 and The third front-end circuit C73;

Three corner signal loop circuits C 9 2 1 are provided for the first circuit board C2, the second circuit board C 4, and the third circuit board C 7 respectively, and are contained in the ASIC chip C92 connected to the control circuit board C9. ; I three vibration control circuits C922, which are the first circuit board C2, the second circuit board C4, the third circuit board [7 settings, included in the ASIC chip C92 connected to the control circuit board C9; The vibrator C925 is used for the X-axis vibration type angular rate detection unit C2i, the γ-axis vibration type angular rate detection unit C41, the Z-axis vibration 蜇 angular rate detection unit C 71, the angular signal loop circuit and the vibration control circuit c 922 Provide a reference pickup signal;

Three vibration processing modules C9 1 2 are provided for the first circuit board C2, the second circuit board C 4, and the third circuit board C7, and run on a DSP (digital signal processor) chipset connected to the control circuit board C9. C91. First front-end circuit C 23, second front-end circuit C 43, and third front-end circuit

Page 47 587205 V. Description of the invention (44) C73 is consistent in structure, and is used to organize the output signals of X, γ, and z-axis vibration-type angular rate detection units. Each front-end circuit includes: an impedance conversion amplifier circuit C231, C431, and C731, which are respectively connected to the corresponding X, Y, and Z-axis vibration-type angular rate detection units C2i, € 41, and C71, and are used to impedance the vibration motion signal, From a very high level, greater than 100 megaohms, to low impedance, less than 100 ohms, in order to obtain two vibration displacement signals, which are AC voltage signals representing the displacement between the inertial mass and the anchor comb. Two vibration displacement signals are input to the vibration control circuit C 9 2 2; a high-pass filter circuit C2 3 2, C43 2 and C7 3 2 are respectively connected to the corresponding X, Y, and z-axis vibration-type angular rate detection units C 2 1, C 4 1 and C 7 1 are used to remove the residual vibration drive signal and noise from the vibration displacement differential signal so as to form a filtered vibration displacement differential signal to the angular signal loop circuit C921 〇 X, Υ, Z axis vibration type Angular rate detection units C21, C41, and C71, except that their sensitive axes are orthogonally arranged. 'The structurally consistent axial vibration type angular rate detection unit C 2 1 is used to detect the angular velocity of the carrier along the X axis and the yaw axis vibration. Angular rate detection unit C21 is used to detect the angular rate of the carrier along the Z axis' Z axis vibration type angular rate detection unit C 2 1 is used to detect the angular rate of the carrier along the Z axis ° X, Υ, and Z axis vibration type angular rate detection unit C21, C41, and C71 are all vibration-type devices, including at least one set of vibrating inertial masses, including tuning tuning forks and corresponding supporting structures and devices, such as capacitive signal readout devices. Angular rate.

Page 48 587205 V. Description of the invention (45) Each X, Y, Z axis vibration type angular rate detection units C21, C41 and C71 receive the following signals: (1) a vibration drive signal from a vibration control circuit C 9 2 2 In order to maintain the vibration of the inertial mass; (2) The carrier reference oscillation signal from the vibrator C925, including the capacitive readout excitation signal. The X, Y, and Z-axis vibration-type angular rate detection units C21, C41, and C71 respectively use the kinetics (Clioris force) to detect the X, Y, and z axis angular rates of the carrier, and output the following signals: (1) caused by the angular rate The signal includes the angular rate displacement signal modulated on the carrier reference oscillation signal, and the signal is output to the high-pass filter circuits C2 3 2, C43 2 and C7 32 of the first, second and third front-end circuits C23, C43 and C73; 2 ) The vibration signal of the inertial mass includes a vibration displacement signal, which is output to the impedance conversion amplifier circuits C231, C431 & C731 of the first, second and third front-end circuits C23, C43 and C73; a vibration control circuit c 9 2 2 respectively Receive the vibration bits, inertia masses of the inertial mass blocks C21, (: 41, and (: 71) from the χ, γ, and z-axis vibration rate detection units, and the inertial mass of the phase of the reference pickup signal from the oscillator C 9 2 5 The displacement signal of the block. The stem has been generated; Γ41 = from X, Υ, Z axis vibration type angular rate detection unit. 21,

The dynamic displacement signal of the inertial mass of the inertial mass is converted into a vibration displacement of 3%, which is easy to handle. The vibration control circuit eg includes: an amplifier and adder circuit C 9221, connected to the first, two,

587205 V. Description of the invention (46) The impedance conversion amplifier circuits C231, C431 and C731 of the three front-end circuits C23, C43, and C73 amplify the two vibration displacement signals by more than ten times in order to improve the sensitivity. The signals of the side anchor combs are subtracted to combine the two vibration displacement signals to form a vibration displacement differential signal; a high-pass filter circuit C 9 2 2 2 is connected to the amplifier and adder circuit C9221 so as to differentiate from the vibration displacement The residual vibration driving signal and noise are removed from the signal to generate a filtered vibration displacement differential signal. A demodulator circuit C 9223 is connected to the high-pass filter circuit C9222, and uses the capacitor detection excitation signal received from the oscillator C925 as a phase reference. Signal, receiving the filtered vibration displacement differential signal 'from the high-pass filter C 9 2 2 2 and extracting the in-phase portion of the transitional vibration displacement differential signal to generate a displacement signal of the inertial mass with a known phase; a low The pass filter C9225 is connected to the demodulator circuit c 9 2 2 3 to remove high-frequency noise from the input inertial mass displacement signal. To form a low-frequency inertial mass displacement signal; * An analog / digital converter C9224 connected to a low-pass filter C 9 2 2 5 to convert the analog low-frequency inertial mass displacement signal to a digital low-frequency inertial mass displacement signal And output to the vibration processing module C912; Λ a digital-to-analog converter C 9 2 2 6 processes the signal amplitude selected from the vibration processing module C 9 1 2 to form a vibration drive signal with the correct amplitude. Amplifiers C9227, based on the correct frequency and amplitude vibration drive signal ’are X, Y, and Z-axis vibration-type angular rate detection units (; 21, C41, and

587205 V. Description of the invention (47) C71 generates and amplifies vibration driving signals. X, Y, and Z-axis vibration-type angular rate detection The vibrations of the inertial masses in Zhuoyuan C21, C41, and C71 are driven by high-frequency sinusoidal signals with precise amplitude. The high-performance vibration drive signals provided to the X, Y, and Z-axis vibration-type angular velocity detection units C21, C41, and C7 1 play a very important role in the sensitivity and stability of the X, Y, and Z-axis angular rate measurement values. The vibration processing module C9 1 2 receives a digitized low-frequency inertial mass block displacement signal of known phase from the analog / digital converter C 9 2 2 4 of the vibration control circuit C9 2 2 in order to: (1) search for the highest quality factor ( Q) the frequency of the value; (2) lock the frequency; (3) lock the amplitude to generate a vibration drive signal, including a high-frequency sinusoidal signal with a precise amplitude, for the X, γ, and Z axis vibration-type angular rate detection unit C 2 1 , C 4 1 and C 7 1 in order to cause the inertial mass to vibrate at a predetermined resonance frequency. The vibration processing module C912 searches and locks the vibration frequencies and amplitudes of the inertial masses of the X, Y, and Z-axis vibration-type angular rate detection units C 2 1, C 4 1 and C 7 1. Therefore, the digital low-frequency inertial mass block displacement signal is first expressed in the frequency spectrum by discrete fast Fourier transform.

The discrete fast Fourier transform is an effective algorithm for computing the discrete Fourier transform, which greatly reduces the computational load of the discrete Fourier transform. The discrete Fourier transform is used to approximate the discrete Fourier transform ^ A Fourier transform or frequency spectrum of a continuous signal is defined as: ”W Z (加) =“ ΛτΟ’ύίί

587205 V. Description of the invention (48) The discrete Fourier transform of N samples of the leave signal X (nT) is given by: χ ^ ω) ^ Σχ (ηΤ) β ^ Μ n «0 Sampling interval. The essence of FFT is to distinguish the waves of different frequencies that belong together. After the digital low-frequency inertial mass block displacement signal is expressed on the frequency spectrum by discrete fast Fourier transform, Q analysis is applied to the frequency spectrum so that the stomach can determine the frequency with the global maximum Q value. Locking the X, Y, and Z-axis vibration-type angular rate detection units C21, C41, and C71 at the frequency of the global maximum value can reduce power consumption and eliminate many factors that affect the% 0 type of excitation. The Q value is a function of the basic geometrical dimensions of the inertial mass, the material properties, and> environmental conditions. A phase-locked loop and digital-to-analog converter are further used to control and stabilize the selected frequency and amplitude. ~ As shown in Figure 30, the vibration processing module C912 further includes a discrete Fast Fourier Transform (FFT) module C91 21, a frequency and amplitude data storage array module C9 122, a maximum value detection logic Module C 9 1 2 3 and a Q value analysis and selection logic module C 9 1 2 4 in order to find the frequency with the maximum Q value. Discrete Fast Fourier Transform (Fast Fourier Transform,

587205 V. Description of the invention (49) FFT) module C9121 converts the digitized low-frequency inertial mass block displacement signal from the analog-to-digital converter C 9 2 2 4 of the vibration motion control circuit C9 2 2 to form the input inertial mass block displacement Amplitude data on the amplitude of a signal. The frequency and amplitude data storage array module C91 23 receives amplitude and spectrum data to form an amplitude and spectrum data array. The maximum value detection logic module c 9 丨 2 3 divides the frequency spectrum of the spectrum data array from the amplitude and spectrum data array into some frequency bands, and selects the frequency with the largest amplitude from the local frequency band. The Q value analysis and selection logic module C9124 performs a Q value analysis on the selected frequency 'by selecting the frequency and the amplitude by calculating the ratio of the amplitude and the bandwidth. Among them, the frequency band width used for calculation is between plus and minus one-half of the maximum value of each maximum frequency point. Further, the vibration processing module C9 1 2 includes a phase-locked loop C9 1 25, which is used as a very narrow band-pass filter to exclude noise of a selected frequency and generate and lock a vibration drive signal of the selected frequency. The two angular signal loop circuits C 921 receive the numbers caused by the angular rates from the X, γ, and z-axis vibration-type angular rate detection units C21, C41, and C71, and the reference pickup signal from the oscillator C 9 2 5 The angular rate-induced signal is transformed into an angular rate signal. Each corner signal circuit C92 1 of the first circuit board C2, the second circuit board C2, and the second circuit board C7 includes a voltage amplifier circuit C9211 for placing / receiving one, two, and three front-end circuits C23, C43, and C73i ^ ii, ^ rt # ^ ld 冋 pass filter The signal caused by the transitional angular rate of the lightning circuit C232 to a level of at least 丨 00 millivolts, to

Page 53 587205 V. Description of the invention (50) Form the signal caused by the amplified angular rate; An amplifier and adder circuit C 9212 is used to extract the difference of the amplified angular rate signal to generate a differential angular rate signal. A demodulator C9213, connected to the amplifier and adder circuit C9212, to read the excitation signal from the differential angular rate signal and the capacitor from the oscillator C925 to extract the electrical amplitude of the in-phase differential angular rate signal " A low-pass filter C9214 is excited and connected to the demodulator C9213 to remove the high-frequency noise of the amplitude signal of the in-phase differential angular rate signal to form the angular rate signal and output it to the angular increment and velocity increment generator C6 As shown in Figures 14 to 16, the acceleration generator Ci0, which is the preferred solution of the small inertial measurement module of the present invention, includes: an X-axis accelerometer C42, which is located on the second circuit board C4 and controls The angular increment and velocity increment generator of the ASIC chip C92 in the circuit board C9 [6 are connected; ^ a Y-axis accelerometer C22, which is located on the first circuit board C2 and is connected to the ASIC chip C92 in the control circuit board C9 The angular increment and velocity increment generator eg are connected; a Z-axis accelerometer C72, which is located on the third circuit board C7 and is connected to the angular increment and velocity increment generator of the ASIC chip C92 in the control circuit board C 9 Connected.

As shown in FIG. 6, FIG. 12, and FIG. 23, the heat-sensitive generator c 1 5 of the preferred solution of the small-scale inertial measurement module of the present invention further includes: a first heat-sensitive generating unit C24 ′ for Sensitive X-axis angular velocity

Page 54 587205 V. Description of the invention (51) The temperature of the rigidity detecting unit C 2 1 and the Y-axis accelerometer C 2 2; the second heat-sensitive generating unit C44, which is used to sensitively detect the Y-axis vibration-type angular rate residual unit C41 and The temperature of the X-axis accelerometer C42; The third heat-sensitive generating unit C74 is used to sense the temperature of the Z-axis vibration-type angular rate detection unit C71 and the Z-axis accelerometer C72; as shown in the sixth and twenty-third figures It is shown that the heater C20 of the preferred solution of the small-scale inertial measurement module of the present invention further includes: a first heater C25, which is connected to the X-axis vibration type angular rate detection unit C21, the Y-axis accelerometer C22, and the first front-end circuit C23, It is used to maintain the predetermined operating temperature of the χ-axis vibration-type angular rate detection unit C21, the y-axis accelerometer C22, and the first front-end circuit C 23; 'The second heater C45, which is in combination with the γ-axis vibration-type angular rate detection unit C4 1 The axis accelerometer C42 and the second front-end circuit ¢ 43 are connected to maintain the predetermined operating temperature of the γ-axis vibration-type angular rate detection unit C41, the X-axis accelerometer C42 and the second front-end circuit C43; & third heating C75, which vibrates with the z-axis The angular rate detection unit C71, the axis accelerometer C72, and the third front-end circuit C73 are connected to maintain the predetermined operating temperature of the shaft vibration type angular rate detection unit C71, the Z-axis accelerometer C72, and the signature circuit C73. As shown in the sixth, fifteenth, sixteenth, sixteenth, twenty-fifth and twenty-sixth figures, the preferred solution of the small inertial measurement module of the present invention ^ The processor C30 further includes the same The thermal control circuit C 923 and the thermal control calculation module C91 1 in the DSP chipset C91. As shown in Figures 23 and 29, each thermal control circuit is 587205. 5. Description of the Invention (52): " ^ C 9 2 3 Steps-Includes:, an amplifier circuit C 9231, which It is connected to the corresponding X, Y, and Z axis heat-sensitive generating units C24, C44, and C74, and is used to amplify the signals from the corresponding X, Y, and Z-axis heat-sensitive generating units C24, C44, and C74 and compress its ten noises. Improve the signal-to-noise ratio; 1. An analog / digital converter C9232 is connected to the amplifier circuit 2 3 L 'to sample the temperature voltage signal, and digitize the sampled temperature voltage signal into a digital signal, and output it to the thermal control calculation module C. 9 11; A digital-to-analog converter C9233 is used to convert the digital temperature command from the 埶 control calculation module cm into an analog signal; ", system ten different pseudo-transformation ίΓΐII, circuit C92 34, used to receive and amplify from The digital analog signal converts the analog signal of C9233 in order to drive the corresponding first, second and third heaters C25, C45, C75 and the closed temperature control loop. The number of one ^ Ϊ 2 Ϊ change block C91 1 uses the analog / Digitizer C 92 3 3 The number of ▲ degree voltage signals, the temperature calibration coefficient, the operating temperature of the generator and the acceleration generator to calculate the speed and send: the number: temperature command to a digital / analog converter C 9 2 3;: Type 7 inertial measurement The preferred scheme of the module is the first electric circuit board C: the third circuit board C7 and the control circuit board C9. 4: The excellent electric epoxy resin sealed in the small inertial measurement module of the present invention will be the third circuit board C7. Adhesion to the mobile J f:: = conductive epoxy resin will be the first circuit board C2, the first-Ray: structure using non-Leyi circuit board C4 and control circuit 587205 V. Description of the invention (53) The circuit board C9 is parallel to The third circuit board C7 is bonded. In other words, the first circuit board C2, the second circuit board C4, and the control circuit board C9 are bonded to the third circuit board C7 in this manner, and the third circuit board C7 is used as Internal connection board, therefore, the need for internal connection wires can be avoided in order to reduce the size. The first circuit board C 2, the second circuit board C 4 and the control circuit board C 9, and the third circuit board C7 are assembled in a common ground manner. Form a circle so that the conductive epoxy resin and the support structure can form a continuous ground . This reduces electronic noise levels and thermal gradients. Moreover, such assembly methods may also be reduced due to the change in acceleration IMU structural deformation caused due to the misalignment angle.

Page 57 587205 Brief description of the diagrams Schematic diagrams Figure 1: A preferred implementation of an actuator of the system of the invention. Second figure: An organization equipped with the preferred implementation scheme of the system of the present invention. Figure 3: Pointing controller grabbed by an organization equipped with the preferred implementation of the system of the present invention. Fourth figure: The target prediction device in the preferred implementation scheme of the system of the present invention. Fifth Figure: A processing module showing a preferred embodiment of the small inertial measurement module of the present invention.

FIG. 6 shows a processing module and a corresponding thermal control processing module of the preferred embodiment of the small inertial measurement module of the present invention. Fig. 7 shows a processing module and a corresponding thermal compensation processing module of the preferred embodiment of the small inertial measurement module of the present invention. FIG. 8 shows the angular increment and velocity increment generators of the preferred scheme of the small inertial measurement module of the present invention, which are used to process the output voltage signals of the angular rate generator and the acceleration generator. Fig. 9 shows another angular increment and velocity increment generator of the preferred embodiment of the small inertial measurement module of the present invention, which is used to process the output voltage signals of the angular rate generator and the acceleration generator.

Figure 10: shows another angular increment and velocity increment generator of the preferred solution of the small inertial measurement module of the present invention, which is used to process the output voltage signals of the angular rate generator and the acceleration generator

P.58 587205 Schematic simple description No. Fig. 11 shows another angular increment and velocity increment generator of the preferred scheme of the small inertial measurement module of the present invention, which is used to process the voltage signals output by the angular rate generator and the acceleration generator. Figure 12: A thermal processor showing a preferred solution of the small inertial measurement module of the present invention, which is used to process the analog voltage signal output by the thermal sensitive generator.

Figure 13: Another thermal processor showing a preferred embodiment of the small-scale inertial measurement module of the present invention for processing an analog voltage signal output from a heat-sensitive generator. Fig. 14 shows another thermal processor, which is a preferred solution of the small-scale inertial measurement module of the present invention, for processing an analog voltage signal output from a heat-sensitive generator. Figure 15: A processing module showing a preferred embodiment of the small inertial measurement module of the present invention. Figure 16: A temperature digitizer showing the preferred solution of the small inertial measurement module of the present invention, which is used to process the analog voltage signal output from the heat-sensitive generator.

Figure 17: shows another temperature digitizer of the preferred embodiment of the small inertial measurement module of the present invention, which is used to process the analog voltage signal output from the thermal sensor. Figure 18: The processing module and the corresponding thermal compensation processing module of the preferred solution of the small inertial measurement module of the present invention

P.59 587205 Schematic description block. Figure 19: An attitude and heading processing module showing a preferred embodiment of the small inertial measurement module of the present invention. Figure 20: A position and velocity processing module showing a preferred embodiment of the small inertial measurement module of the present invention. Figure 21: A perspective view showing the mechanical structure and circuit board layout of the preferred scheme of the small inertial measurement module of the present invention. Figure 22: A sectional view showing the preferred scheme of the small inertial measurement module of the present invention. Figure 23: A connection diagram between four internal circuit boards of the preferred embodiment of the small inertial measurement module of the present invention. Figure 24: A block diagram showing the front-end circuits of the first, second, third, and fourth circuit boards of the small inertial measurement module of the present invention. Twenty-fifth figure: A block diagram showing an ASIC chip of a third circuit board, which is a preferred embodiment of the small inertial measurement module of the present invention. Figure 26: A processing module running in the DSP of the third circuit board of the preferred embodiment of the small inertial measurement module of the present invention. Twenty-seventh figure shows the corner signal of the ASIC chip of the third circuit board, which is the preferred solution of the small inertial measurement module of the present invention.

587205 Schematic description block diagram of No. loop circuit. Figure 28: A block diagram showing the jitter motion control circuit of the AS 1C chip of the third circuit board of the preferred scheme of the small inertial measurement module of the present invention. Figure 29: A block diagram showing the thermal control circuit of the AS 1C chip of the third circuit board of the preferred embodiment of the small inertial measurement module of the present invention. Figure 30: Shows the jitter motion control processing module running in the DSP of the third circuit board of the preferred solution of the small inertial measurement module of the present invention. ♦

Page 61

Claims (1)

587205 __Case No. 90in4Qfi1 VI. Scope of patent application 1 · A method for pointing and stabilizing a component consisting of the following steps: (a) The target coordinate generator provides a coordinate value to determine the component to be pointed to Direction; (b) determining the current posture of the component by using an attitude generator; (c) calculating the component's current position based on the required pointing direction of the component and the current posture of the component measured by the pointing controller. A rotation instruction; (d) using an actuator to rotate the component to the direction that needs to be pointed; (e) a video showing the target, the direction to be pointed and the current direction of the component. 2. The method according to item 1 of the scope of the patent application, wherein '' has a step (f) after step (e) to provide an audio prompter indicating a pointing operation procedure. 3. The method according to item 1 of the patent application park, wherein the step (c) is further composed of the following steps: c. 1 the target obtained by measuring the target coordinate generator and corrected by measurement noise The azimuth measurement data is converted from the target coordinate generator body coordinate system to the local horizontal coordinate system; c · 2 uses the target azimuth measurement data measured by the target coordinate generator to calculate the current attitude of the target, including the target azimuth estimation Value; c · 3 predicts the future execution of the target and calculates the azimuth and time at which the projectile emitted from the component meets the target; c. 4 the azimuth required to generate the component to emit the projectile And high Page 63 587205 ___Case No. 90104961 VI. Patent application scope angle, C. 5 Use the component's azimuth and height angle and the component when the unit / attitude and heading reference system obtained # 次 ^ and attitude change The control commands required by the actuators are generated from the " while the M disturbance will stabilize the components at the required azimuth and height angles. The method as described in item 2 of the scope of patent application, wherein step (c is again composed of the following steps: ~ c · 1 the target obtained by measuring the target coordinate generator and corrected by measuring the miscellaneous% The azimuth measurement data is converted from the target coordinate generator body to the local horizontal coordinate system; c · 2 calculates the current pose of the target using the target azimuth measurement data measured by the target coordinate generator, including the target azimuth estimated value; <, c · 3 predicts the future trajectory of the target and calculates The azimuth and time at which the projectile emitted by the component meets the target; c · 4 generates the azimuth and altitude required by the component to emit the projectile, ° c · 5 uses the azimuth and height of the component Angle and the current attitude and attitude change rate of the components obtained from the inertial measurement unit / attitude and heading reference system generate control instructions required by the actuator, thereby eliminating interference that stabilizes the components at the required azimuth and altitude Horner. 5. The method according to item 3 of the scope of patent application, wherein step (c. 3) is further composed of the following steps: c. 3.1 uses the current pose of the target, including the estimated current position of the target and System dynamics matrix, extrapolating future execution of the projectile Page 64 587205 __ _MM_90104961_____ year 〆 month _ correction _____ VI. Patent application scope '^ ~' Road; c · 3.2. Calculate what is needed for the projectile to fly from the component to the intersection position Time; and c · 3 · 3 using the predicted projectile trajectory and time of flight to measure the paternity position and rendezvous time. 6. The method according to item 4 of the scope of patent application, wherein step (c · 3) is composed of the following steps: c · 3.1 uses the current attitude of the target, including the current position estimate of the target and the system dynamics matrix, to extrapolate the future performance of the projectile; c · 3 · 2 calculates the projectile from the The time required for a component to fly to the rendezvous position; and c · 3 · 3 to calculate the rendezvous position and rendezvous time using the predicted projectile orbit and flight time. 7. The method as described in any one of items 1 to 6 of the scope of patent application, the mentioned attitude generator is an inertial measurement unit (MU). 8. The inertial measurement unit mentioned in the method described in item 7 of the scope of the patent application is / inertial measurement unit / attitude and heading reference system. 9. A system for pointing and stabilizing a component, including a gesture generator for determining the current attitude and attitude change rate of the component; The device reads a pointing beam coordinate generator pointing in the direction; / an actuator for rotating the component to the required direction; Page 65 587205 -90104961 A calculation of the direction control of the rotation instruction required by the actuator based on the required orientation of the component and the element ^ _ _; ^ ^ Ann: described in item 9 of the scope of patent application The system is pure, and it can also include a player and a video device to help the user determine the audio and video methods: · See the audio i in the system described in item 10 of the patent application. There is no need to point the direction, and the current attitude amount of the component i 'target track can also be pointed to the programmer by audio. 1 _2 'The actuator in the system described in item 丨〗 of the patent application scope is changed. 疋 The current posture of the device makes it closer to the direction to be pointed. 1 3. The system described in item 11 of the scope of patent application can use the angle, angular velocity, and angular acceleration feedback of the pointing controller to selectively reject ^ 2 noise and wavers. k 14. In the system described in item 11 of the scope of the patent application, the target seatpost generator includes a radar and laser range detector, and the target is transmitted to the target through audio and video equipment. Pointing at the controller. π ΛΛ 15 · In the system described in item 11 of the scope of patent application, the actuator includes a mechanical pipe grab driver to drive the rotating gun holder to point the precise coordinates of the target, the audio And the video device display the position of the target and prompt the pointing program, so once the watch on the display is selected, its coordinates and the components obtained from the attitude generator ^ the current attitude measurement values are both It is automatically transmitted to the controller. 16. The pointing controller in the system according to item 9 of the scope of patent application, further comprising: a measurement data processing unit for converting the target coordinate generator i _ page 66 587205 _ case number 901049fn_ 于Afternoon month-correction --- 6. The target bearing measurement data obtained from the measurement of the patent application and corrected by the measurement noise is converted from the target coordinate generator body coordinate system to the local horizontal coordinate system; a target bearing An estimation unit estimates the current attitude of the target including the estimated value of the target orientation based on the target orientation measurement data; a target orientation prediction unit predicts the future orbit of the target and calculates the projectiles emitted by the components and The azimuth and time at which the targets meet; a firing control unit that generates the azimuth and altitude required for the component to fire a projectile; a component control instruction calculation unit that uses the azimuth required by the component And the components measured by the height angle and attitude measuring unit generate the actuator when other attitudes and attitude change rates The required control instructions, so as to eliminate the interference to direct the component to the required azimuth and height angle. 17. The pointing controller in the system according to item 11 of the scope of patent application, further comprising: a speculative data processing unit for measuring the target obtained by the target coordinate generator and corrected by the measurement noise Azimuth measurement data is converted from the target coordinate generator body coordinate system to a local horizontal coordinate system; a target azimuth estimation unit estimates the current attitude of the target including the target azimuth estimation value according to the target azimuth measurement data; a target An orientation prediction unit that predicts the future orbit of the target and even calculates the position and time of the projectile emitted by the component and the target father's meeting; Page 67 587205 ^ S_901〇4961 VI. Scope of patent application The azimuth required by a shooting control order and the higher azimuth and height angle required by a component to control the current attitude and attitude change order, thereby eliminating interference and southerly Horner. 18 · If the patent scope device is used as the target position estimation 19 · If the patent scope application is the target position estimation unit 20. If the patent scope processing unit will map the radar sky to the intersection of the local level 21 · If the patent scope processing unit will be used The radar sky is mapped to the intersection of the local level 2 2. If the patent application range prediction unit further includes: an outlier value of the target bearing and the system dynamics matrix to project the future orbit of the projectile; A calculation unit, which uses the components measured by the component measurement unit to generate the control finger required by the actuator to stably point to the required azimuth element, and generates a projection from the component Object angle; instruction meter and attitude ratio are produced by the Kalman filter unit in the system described in item 16. The system described in item 17 uses a Ka 1 man furnace wave device as the system described in item 18, wherein the measurement data represented by the line coordinates of the radar measurement data are non-linearly coordinated. In the system described in item 19, the radar measurement data represented by the line coordinates of the measurement data is nonlinearly coordinated. In the system described in item 16, 'the target position push module uses the throw time calculation module to extrapolate the target position estimate and the target's current attitude data to calculate the projectile from the intersection location The time required; and Page 68 587205 ___ case number '90104961 noon; ^ month,] s _ _ _ six, the scope of the patent application a meeting position and time calculation module, using the predicted projectile orbit and projectile flight time to calculate the meeting position And time, once the target's course is predicted, the module first calculates the time required for the projectile to fly from the component to any point on the predicted target course, and then calculates the target's flight to the target. The time required for a point. If the time that the projectile flies to a point is equal to the time that the target flies to that point, that point is the person who meets the azimuth. 2 3. In the system described in item 17 of the scope of the patent application, the target bearing prediction unit further includes: a target bearing extrapolation module that uses the target bearing estimated value and the system dynamic matrix and the target current attitude data Extrapolate the future direction of the projectile; a projectile time-of-flight calculation module that calculates the time required for the projectile to fly from the component to the intersection; and an intersection position and time calculation module that uses The predicted projectile orbit and projectile flight time calculate the intersection position and time. Once the target's orbit is predicted, the module first calculates the projectile's flight from the component to the predicted target orbit. The time required for a point, and then calculate the time required for the target to fly to that point. If the time that the projectile flies to a point is specific to the time that the target flies to that point, that point is the person who meets . 24. In the system described in item 22 of the scope of the patent application, the shooting control module uses the rendezvous azimuth and time given by the target azimuth prediction module to determine the azimuth and height angle required by the component . 587205 --f 车 〆 月 q _ VI. Patent Application Fan Garden *) " — 25 · In the system described in the scope of the patent application No. 23, the shooting control module uses the target bearing prediction module to give Intersection azimuth and time determine the azimuth and height angles required for the components. 2 6 · In the system described in item 24 of the scope of patent application, the component control instruction calculation module 'according to the azimuth and height angle required by the component tip provided by the shooting control module, and the The attitude generator measures the current attitude of the component and the attitude change rate, calculates an instruction to point the component to eliminate interference and stably point to the required orientation, and sends the instruction to the actuator. 2 7 · In the system described in item 25 of the scope of patent application, the component control instruction calculation module, according to the azimuth and height angle required by the component tip provided by the shooting control module, and all The posture generator measures the current posture of the component and the attitude change rate, calculates an instruction to point the component to eliminate interference and stably point to the required orientation, and sends the instruction to the actuator. 28. According to the system described in item 26 of the scope of patent application, the component control instruction calculation unit is a digital controller, which is a fundamental device for eliminating interference and stably pointing the component. 2 9. According to the system described in item 27 of the scope of patent application, the component control instruction calculation unit is a digital controller, which is the fundamental device that eliminates interference and stably points the component. 30. According to the system described in item 11 of the scope of patent application, the audio and video equipment is used to show the target in the dynamic field of view of the component and the projectile and the projectile during the rendezvous process. Target flight path I ° 587205 __MM 9mn4QRi 6. Scope of patent application 31. In the system described in item 29 of the scope of patent application, the audio and video equipment is used to display the target in the dynamic field of view of the component and during the rendezvous process The orbiter of the projectile and the target. 3 2. In the system described in item 9 of the scope of patent application, the attitude generator may be an inertial measurement unit (IMU). 33. In the system described in item 11 of the scope of patent application, the attitude generator may be an inertial measurement unit (MU). 34. In the system described in item 29 of the scope of patent application, the attitude generator may be an inertial measurement unit (MU). 3 5. In the system described in item 11 of the scope of patent application, the attitude generator may be a Global Positioning System (GPS) attitude receiver. 36. In the system described in item 29 of the scope of patent application, the attitude generator may be a Global Positioning System (GPS) attitude receiver. 37. In the system described in item 11 of Shen Qing's patent scope, the audio and video equipment is a portable device. 3 8. In the system described in claim 29 of the patent scope, the audio and video equipment is a portable device. 39. The system according to item 32 of the patent application scope, or item 33, or item 34, wherein the inertial measurement component is a small inertial measurement component including: an angular rate generator for An acceleration generator is used to generate an angular increment and a velocity increment to generate an angular rate signal and convert it into a digital angular accretion X 'Y' Z-axis angular rate signal; generate X, Y, and Z-axis acceleration signals; the generator is used to Accelerating the X, γ, and Z axes and accelerating the X, γ, and Z axes Page 71 587205-Case number 90104 4 cars > Month J Amend Degree signal is converted to digital speed increaser. 40. The system described in claim 39, wherein said small inertial measurement component further includes a thermal control device for generating said angular rate generator, acceleration generator, and angular increment and velocity increment. The working temperature of the device is maintained at the set value. 41. The system according to item 40 of the scope of patent application, wherein the thermal control device further comprises a heat sensitive generator, a heater and a heat processor, wherein the heat sensitive generator and the angular rate generator, The acceleration generator and the angular and speed increment generators work in parallel to generate a temperature signal 'in order to maintain the operating temperature of the angular rate generator, the acceleration generator and the angular and speed increment generators at a set value, The set temperature is a constant value and can be selected between 150 T and 185 T. The temperature signal generated by the thermal sensitive generator is output to the thermal processor. The thermal processor uses the temperature signal, the temperature scale coefficient and the The predetermined operating temperature of the angular rate generator and the acceleration generator and the angular increaser and the speed increment generator are used to calculate a temperature control command and form a corresponding driving signal to the heater to control A to generate enough heat to maintain the Predetermined operating temperature of angular rate generator and accelerated production generator and angular increase and speed increase generator 42. The system according to item 40, wherein the X, Y, and Z axis angular rate signals generated by the angular rate generator are analog voltage signals, which are directly proportional to the angular rate of the carrier and are generated by the acceleration generator. The X, γ, and z axis acceleration signals are analog voltage signals that are directly proportional to an acceleration of 1. 587205 ～ _ __ Case No. 90104961% Revised Year / Month / Date ___ VI. + Please Patent Scope " 'One-One 4 3 · The system as described in Item 41 of the scope of patent application, in which the rate from the corner fan The X, Y, and Z axis angular rate signals generated by the generator are analog voltage signals that are directly proportional to the angular rate of the carrier. The X, Y, and Z axis acceleration signals from the acceleration generator are analog voltage signals that are directly proportional to the carrier. Accelerator. 4 4 · The system described in item 43 of the scope of patent application, wherein the angle increment and velocity increment generator includes: The angle integrator and acceleration integrator are respectively used to integrate the X, Y, and Z axis angular rate analog voltage signals and the X, Y, and Z axis analog voltage signals within a predetermined period of time, so as to accumulate the X, γ, and Z axis angular rates. The analog voltage signal and the X, Y, and Z-axis acceleration analog voltage signals form an uncompensated original angular increment and speed increment, where the integration operation is to eliminate the analog voltage signal and the X, γ, and ζ axis angular velocity analog signals. , Γ, and Z axis acceleration analog voltage signals make the noise signals that are not directly proportional to the angular velocity and acceleration of the carrier, improve the 仏 5 tiger noise ratio and eliminate the analog voltage signals and X, High-frequency noise in the Y, Z-axis acceleration analog voltage signals; the resetter generates angle reset voltage pulses and speed reset voltage pulses, which are output as angle and speed scales to the angle integrator and acceleration integrator; The angular increment and velocity increment measurer uses the angle reset voltage pulse and speed reset voltage pulse to measure the accumulated χ, γ, and Z axis angular rate analog voltage signals and the X, Y, and Z axis acceleration analog voltage signals to obtain The angular increment count value and the speed increment count value are correspondingly used as the digital measure of the angular increment and the speed increment. & 9 Page 587 205 4 5 · The system according to item 44 of the scope of the patent application, wherein the angle increment and speed increment measuring device converts the accumulated X, Y, and Z axis angle increment and speed increment voltage values Are the actual X, γ, and z axis angle increments and ^ degree increments, where 'in the angle integrator and acceleration integrator, the X, γ, and Z axis ^ rate analog voltage signals and χ, γ, The z-axis acceleration analog voltage signal is reset not to accumulate from zero at the beginning of each predetermined period of time. 46. The system according to item 45 of the scope of patent application, wherein the resetter includes an oscillator, and the angle reset voltage pulse and the speed reset voltage pulse are realized by timing pulses generated by the oscillator. By. 47. The system according to item 46 of the scope of patent application, wherein the angular increment sum of the X, Y, and Z axis analog rate voltage signals and the X, γ, and z axis acceleration analog voltage signals are measured. Speed increment measurer, including an analog / digital converter to actually digitize the original X, γ, Z axis angle increment and speed increment voltage values into X, γ, Z axis angle increments and speed Incremental digital measurer. 48. The system according to item 47 of the scope of patent application, wherein the angle integrator of the angle increment and speed increment generator includes an angle integration circuit that receives and integrates the amplified signal from the angle amplifier circuit. The X, γ, and 2 axis angular rate analog signals form an accumulated X, Υ, and Z axis angular incremental signals. The acceleration integrator of the angular and speed increment generator includes an acceleration integrating circuit to receive and integrate signals from all sources. The acceleration X, Υ, and Z-axis acceleration analog signals of the acceleration amplifier circuit are described to form accumulated X, Υ, and Z-axis speed increase signals. Page 74 587205 __Case No. 90104961 绦 月 日 绦 正 _ VI. Scope of patent application > '49. The system as described in item 48 of the scope of patent application, wherein the angular increment and velocity increase The volume generator further includes an angle amplifier circuit for amplifying the X, Y, and Z axis angular rate analog voltage signals to form an amplified X, γ, and z axis angular rate analog signals, and an acceleration amplifier circuit for amplifying the X, γ , Z-axis acceleration analog voltage signal, forming the amplified X, Y, z-axis acceleration analog signal. 50. The system according to item 49 of the scope of the patent application, wherein the angle integrator of the angle increment and speed increment generator includes an angle integration circuit that receives and integrates the amplification from the angle amplification circuit. The subsequent X, γ axis angular rate analog signals form the accumulated X, γ, and Z axis angular incremental signals. The acceleration integrator of the angular and velocity increment generator includes an acceleration integration circuit to receive and integrate signals from all sources. The amplified X, Y, and Z-axis acceleration analog signals of the acceleration amplifying circuit form the accumulated X, γ, and z-axis speed increase signals. 51. The system as described in claim 50 of the scope of patent application, wherein the analog / digital converter of the angular increment and speed incremental generator further comprises an angular analog / digital converter and a speed analog / digital converter And an input / output interface circuit, wherein the angular increment accumulated from the angular integration circuit and the accumulated speed increment from the acceleration integration circuit are output to the angular analog / digital converter and the speed analog, respectively / Digital converter 'accumulated angular increment is measured by the angular analog / digital converter by using the angle reset voltage signal to measure the accumulated angular increment so as to form an angular increment count value' as a digital angular incremental voltage A form in which the angular increment count value is output to the input / output interface circuit so as to form a digital X, γ, Z axis P.75 587205 ---- Case No. 90104961 〇Θ 年 〆 月 \ Γ Revision n VI. Patent application scope / Angle increment voltage value, the accumulated speed increment is determined by the speed analog / digital converter, Measure the accumulated speed increment by using the speed reset voltage signal to form a speed increment count value as a form of the digital speed increment voltage. The speed increment count value is output to the input / output interface circuit to form a digital X, Y, Z axis speed increment voltage value. 52. The system of claim 51, wherein the thermal processor comprises an analog / digital converter connected to the heat sensitive generator, and a digital / analog converter connected to the heater. And a temperature controller connected to the analog / digital converter and the digital / analog converter, wherein 'the analog / digital converter inputs a temperature voltage signal generated by a thermal sensitive generator and is converted by the analog / digital converter The device samples the temperature voltage signal, digitizes the voltage signal, and outputs the digital temperature signal to the temperature controller. The temperature controller uses the digital temperature voltage signal from the analog / digital converter, and the temperature calibration coefficient. And the predetermined operating temperature of the angular rate generator and acceleration generator to calculate a digital temperature control instruction, and send the digital temperature control instruction to the digital / analog converter, which will be from the above The digital temperature control instruction of the digital temperature controller is converted into an analog signal, and the analog signal is output to the heater To produce the appropriate operating temperature by a predetermined small IMU inertial measurement unit of heat. Λsuit # m & 53. The system described in item 52 of the scope of the application for patent application ^. The processor further includes: ,,,, and "," connected to the above-mentioned thermal generator and digital / analog amplifier circuit, Among them, from the thermal sensing 587205 ___ prime number 90104961 / month 丨 1 q positive __ VI. Patent application range number is input to the first amplifier circuit to amplify, and suppress noise in electrical signals, improve signal-to-noise ratio 'amplified The voltage signal is input to the analog / digital converter. The second amplifier circuit is connected between the digital / analog converter and the heater, and is used to amplify the input analog signal from the digital / analog converter and provide the analog signal to the analog / digital converter. Mentioned heaters. 54. The system according to item 53 of the scope of patent application, wherein the thermal processor further comprises an input / output interface circuit connected between the analog digital converter and the digital converter and the temperature controller, wherein , Sampling the voltage signal through the analog / digital converter, and digitizing the sampling signal 'then' to output the digital signal to the input / output interface circuit, and the temperature controller uses the analog from the input / output interface circuit / Digital converter's digital temperature voltage signal, temperature calibration coefficient and predetermined operating temperature of the above-mentioned angular rate generator and acceleration generator to calculate a digital temperature control instruction, and feed back the digital temperature control instruction to the input / output interface Circuit, the digital / analog converter converts the digital temperature control instruction from the input / output interface circuit into an analog signal, and outputs the analog signal to the heater to generate appropriate heat to ensure the small inertial measurement component The predetermined working temperature. 5 5. The system according to item 39 of the Shenwei patent scope, wherein the small inertial measurement component is a ^ rr r ^ n ^ ^ _ kind of a first circuit board, a second Circuit board circuit board and control circuit board, ②, the-circuit board and the third head, 'Generate X-axis angular rate sensitive signals and γ-axis acceleration sensitive signals Page 77 587205 / Monthly case number 90104961 6. Scope of patent application = control circuit board, the second circuit board is connected to the third circuit board to generate Y = sensitive signals and X-axis acceleration sensitive signals to the control circuit board, the second circuit The control board and the control circuit board ㈣ generate ζ-axis angular velocity-sensitive and Z-axis acceleration-sensitive signals to the control circuit board. The control circuit board is connected to the first circuit board and the second circuit board, and the circuit board is used to communicate with After the first-electrical, board, second circuit board, third circuit board's χ, γ, 2 axis sense signals and ί, Υ, and Z axis acceleration sensitive signals, position increments, speed increments, position, Speed, attitude and 56. The system as described in item 55 of the scope of patent application, the rate generator includes: Bajia, the angular velocity is connected to the first front-end circuit of the χ-axis vibration type of the first circuit board; Hand detection of early Wu and the second front-end circuit of the γ-axis vibration type angular velocity connected to the second circuit board; inspection of early Wu Liang and the second Z-axis vibration-type angular velocity of the third circuit front-end connected to the third circuit board Circuit; check 'then early and three corner signals back Circuits, which are two circuits, Γ circuit board settings, connected to the control circuit = circuit board, third circuit board settings, included in; iC, the second device for X-axis vibration type angular rate detection: unit = Dynamic variable angular rate detection unit, z-axis vibration type angular rate detection unit, Y-axis > Vibration quotient circuit and vibration control circuit provide reference pickup signal 疋, angular signal Page 78 587205 half case number 90104961 6. Application for patent scope Three vibration processing modules are respectively provided for the first circuit board, the second circuit board, and the third circuit board, and are connected to the control circuit board. 57. The system according to item 56 of the scope of patent application, wherein the velocity generator includes: 'ϋ speed-X-axis accelerometer, which is located on the second circuit board and the angular increase and speed increase of the control circuit board A Z axis accelerometer is located on the first circuit board and is connected to the angular and velocity increment generator of the control circuit board. A Z axis accelerometer is located on the third circuit board and is connected to the control. The circuit board's angular increment and velocity increment generator are connected. 58. The system according to item 57 of the scope of application for a patent, wherein the front-end circuit, the second front-end circuit, and the third front-end circuit are respectively used to organize the output signals of the VJ: human-type angular rate detection unit, each- The front-end circuit includes: vibration; large circuit, connected to the corresponding X, Υ, 2 axis evaluation and early detection, used to change the impedance of the vibration motion signal from two to: two is greater than 100 Mega ohms, converted to low impedance, less than 100 ohms, the vibration displacement signal, which represents the mass of inertia and: to the vibration control IS current voltage signal, two vibration displacement signals are transmitted to the vibration; electricity '^^ respectively connected to the corresponding X, Y, and Z axis residues to remove residual signals in the vibration displacement differential signal: == signal and noise in order to form a filtered vibration displacement differential I. Watch for the circuit of the corner loop. Face 1 ^ · Page 79 587205 Correction 丄 -11, ^ 90104961 + year / day VI, patent application scope j9 · The system described in Shen Qing patent scope item 58, wherein the X, _, and Z axis vibrations Type angular rate detection units are all vibration-type devices, including at least ^ vibrating inertial masses, including tuning tuning forks and corresponding support structure devices such as capacitive signal readout devices, and the angle of the carrier is detected using the Creoles effect II. Rate, each X, γ, and z-axis vibration-type angular rate detection unit receives the vibration drive signal from the corresponding vibration control circuit, so as to hold the vibration of the inertial mass block and the carrier reference oscillation from the vibrator =, Including, the excitation signal can be read out, and the X, γ, and ζ-axis vibration-type rate detection units use the dynamics (Clioris force) to detect the angular velocity of the load 4, γ, and ζ axes, respectively. The signal includes the angular rate displacement signal on the reference oscillation signal of the J f wave, the signal output, the impedance conversion amplifier circuit of the σ = 2, 2, and 3 front-end circuits, and the vibration of the inertia block. The signal includes a vibration displacement signal, and the signal is output to a high-pass filter circuit of a music, a, or two front-end circuit. 60. The system according to item 59 of the scope of the patent application, wherein the above three types receive vibration displacement signals from the χ, γ, and ζ-axis vibration-type angular rate detection: 丨 and the known phase of the participants from the oscillator The digital signal of the displacement of the inertial mass block 'female a vibration control circuit includes: an amplifier and an adder circuit, an impedance conversion amplifier circuit connected to the first, second and second' circuit, which shifts the two vibrations by two times or more, to To improve the sensitivity, by subtracting the signal from the center-comb signal u and the signal from the side-comb to combine the two vibration displacement signals, ^ ^ shift the differential signal; 乂 form the vibration position Side I Page 80 587205 Amend _ ^ No. 901049fi1 6. Scope of patent application f:: f f ί? 4 'Connected to the amplifier and adder circuits to remove the residual vibration drive signal and noise from the 1 ^ Μ 4 motion k, to generate a filtered vibration displacement differential signal; 51 你: ΐ 5 周 器 电 4' Connected to the high-pass filter circuit to detect the excitation signal from the oscillation i ί: T as a phase reference signal,% high-pass filter vibration displacement differential ㈣, and extract the filtered shared displacement of the in-phase part of the vibration displacement differential number Signal; inertial mass with a known phase :: low-pass wave g, connected to the demodulator circuit to remove high-frequency noise t from the input inertial displacement ί and displacement ^ to form a low-frequency inertial mass _ B: The ratio-to-digital converter is connected to a low-pass filter, and is used to convert the measuring block bite kernel = mass block displacement signal into a digitalized low-frequency inertial mass block displacement #bluff, and output it to the vibration processing module; Envy: ί: analog converter '_from the signal selected by the vibration processing module, and geography, so as to form vibration drive letters with the correct amplitude & γ = large device, based on the correct frequency and amplitude of the drive signal = tough Indole iΖ axis vibration type angular rate detecting unit generates vibration and amplified by • The number of movable stalks. γ, ..., the system described in claim 60 of the scope of the patent application, wherein χ, is driven by a high-frequency sinusoidal signal of a precise amplitude of ^ 7 in a dynamic angular rate detection unit, The vibration processing module receives a signal from an analog / digital converter of a vibration control circuit. Page 81 587205 Amendment Six Case No. 90104961 Application for Patented Digital Phase Low Frequency Inertial Mass Block Displacement Signal with Known Phase, used to search for the frequency with the highest quality factor (Q) value, lock the frequency, lock the amplitude, and generate a vibration drive signal It includes a high-frequency sinusoidal signal with a precise amplitude, and X, Y, and Z-axis vibration-type angular rate detection units so that the inertial mass can vibrate at a predetermined resonance frequency. The system according to item 61 of the stated patent scope, wherein the vibration processing module further includes a discrete fast Fourier transform (Fast Τϊ ^ η3ί〇Γΐη, FFT) module, and a frequency and amplitude data is stored and displayed. ^ f, a maximum value detection logic module and a Q value analysis and selection logic, block to find the frequency with the maximum value, where the discrete fast Fourier transform module is used to convert analog digital converters from vibration motion control The displacement of the digitized low-frequency inertial mass block: In order to form the input inertial mass block displacement signal, the amplitude on the frequency of the inertial mass block is opened at the rate of J: I field data storage array module, which receives the amplitude and spectrum data to form an amplitude and Spectral data array; Spectral number G, the frequency from the amplitude and spectral data array and the female JL i will be some spectral segments, and the frequency with the largest amplitude is selected from the local spectral segment; Calculate and calculate the logic module of the two choices to perform the Q value straightening on the selected frequency, which is called the calculation of the ratio of the degree and the bandwidth, and select the frequency Amplitude, #, - ^ eight bandwidths each take the maximum value of the maximum frequency point between one of the positive Chen's knife. 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