經濟部智慧財產局員工消費合作社印製 >72797Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs > 72797
、發明說明( 域： 本發明係關於一種水錘清洗機，移除附著、沉澱以及 殘留於管線内部之外來物質，特別是移除殘留在半導體製 程線之細部管線，例如冷卻晶圓清洗裝置之細部管線，或 是半導體製程線之清洗裝置；特別是此水錘清洗機，藉由 穿過混和氣體的清洗液體之水錘現象，用以清洗管線的内 部’且此混和氣體經過具有化學清洗氣體之水錘清洗機間 歇地壓縮而成；藉以提高整個半導體產品的產率。‘ 背景： 管線為液體流動之通道，依據液體之種類可分類為氣 體管線、水管線、油管線或是化學管線。當管線之設計連 接至裝置時，根據此管線本身之材質、液體及此裝置之使 用’則外來物質必然會產生於此管線的内部。 這些外來物質殘留於管線内部，容易降低裝置系統的 效率’尤其可能嚴重降低半導體製程線產率。假使外在物 質在半導體製程線之裝置的管線之内部形成，則裝置很可 说會被污染，甚至停止操作。如此將造成嚴重的經濟損 失。另外移除這些外來物質、以及重新使裝置正常操作將 花費很長的時間。 為了克服這些缺點，先前建議為將清洗液體流入管線 内部’藉由自然的清洗力清洗管線，或是將人為設備安裝 於管線内部，藉以移除這些外來物質。但是應用這些方法 藉以清洗管線卻耗費太多時間；或者由於機械性摩擦，導 第5頁 本紙張尺度適用中國國家標準(CNS)A4規格(U^297公釐)---—-- i請先閱讀背面之注意事項#瑱寫本買)Description of the invention (Domain: The present invention relates to a water hammer cleaning machine, which removes adherence, precipitation and foreign substances remaining inside the pipeline, especially removes detailed pipelines remaining on the semiconductor process line, such as cooling wafer cleaning equipment Detail pipeline or cleaning device for semiconductor process line; especially this water hammer cleaning machine is used to clean the inside of the pipeline through the water hammer phenomenon of the cleaning liquid passing through the mixed gas, and the mixed gas passes through the chemical cleaning gas. The water hammer cleaning machine is intermittently compressed to improve the yield of the entire semiconductor product. 'Background: Pipelines are channels for liquids to flow. They can be classified into gas lines, water lines, oil lines or chemical lines according to the type of liquid. When the design of the pipeline is connected to the device, according to the material of the pipeline itself, the liquid and the use of the device, 'foreign material will inevitably be generated inside the pipeline. These foreign materials remain inside the pipeline and it is easy to reduce the efficiency of the device system' In particular, it is possible to severely reduce the yield of semiconductor process lines. The internal formation of the pipeline of the device of the line, the device can be said to be contaminated, and even stop operation. This will cause serious economic losses. In addition, the removal of these foreign substances and the normal operation of the device will take a long time In order to overcome these shortcomings, it was previously suggested to clean the pipeline by flowing the cleaning liquid into the pipeline by natural cleaning force, or install artificial equipment inside the pipeline to remove these foreign substances. However, the application of these methods to clean the pipeline is It takes too much time; or due to mechanical friction, page 5 of this paper applies the Chinese National Standard (CNS) A4 specification (U ^ 297 mm) ----- i Please read the precautions on the back # 瑱Buy this book)
572797 A7572797 A7
管、泉内部的損壞，因此發生比外來物質殘留於管線内部 更嚴重的問題。 口 發的及概沭： 因此，為克服習知技術的缺點，本發明之一目的在提 2 一種水錘清洗機，本裝置不會損壞管線内部，同時可以 清洗管線内部的外來物質。 本發明之另一目的，即清洗管線内部的外來物質時， 可縮短其清洗時間。 為了達成本發明之目的，提供一種水錘清洗機，其包 括閉合環路，藉以讓清洗液體循環於清洗液體槽（4〇 ) 及必須清洗之可洗式管線（P4 )之間；此閉合環路包括： 一供給管線（P2)，其中藉由幫浦（3〇)壓縮該清洗氣體； 一氣體管線（P1 )，在其中的一部份安裝一氣體壓縮機 (1 〇 )，而另一部份連接到清洗氣體的供給管線（P2)， 藉以連接到清洗液體槽（40 )及必須清洗之可洗式管線 (P4 ) •，一個自動開關活栓（Vm )，選擇式地自動操作 於第位置及罘一位置之間’此第一位置位在管線（P1) 上，可關閉該氣體管線（P1 )，而第二位置則開啟；一水 鐘裝置（20) ’安裝於氣體壓縮機（1〇)及自動開關活栓 (Vm )之間，可依據事先所設定之數值，調節該自動開 關活栓（Vm)至第二位置，則中斷由該氣體壓縮機（1〇) 所噴出的壓縮氣體，藉以間歇性或非間歇性地將此氣體流 入該氣體管線（P 1 );控制裝置，操控自動開關活栓（Vm )、 第6頁 本紙張尺度適用中國國家標準(CNS)A4規格(210X297公釐) (請先閲讀背面之注意事项再填寫本頁jThe internal damage of pipes and springs causes a more serious problem than the foreign matter remaining inside the pipeline. Oral and general: Therefore, in order to overcome the shortcomings of the conventional technology, one object of the present invention is to provide a water hammer cleaning machine. The device does not damage the inside of the pipeline and can clean foreign substances inside the pipeline. Another object of the present invention is to shorten the cleaning time of foreign materials inside the pipeline. In order to achieve the purpose of the present invention, a water hammer cleaning machine is provided, which includes a closed loop, so that the cleaning liquid is circulated between the cleaning liquid tank (40) and the washable pipeline (P4) that must be cleaned; the closed loop The circuit includes: a supply line (P2), in which the purge gas is compressed by a pump (30); a gas line (P1), in which a gas compressor (10) is installed in a part, and the other Partly connected to the supply line (P2) of the cleaning gas, so as to connect to the cleaning liquid tank (40) and the washable line (P4) which must be cleaned. • An automatic switch (Vm) is automatically operated in the Between the position and the first position 'This first position is located on the pipeline (P1), which can close the gas pipeline (P1), and the second position is opened; a water clock device (20)' is installed on the gas compressor ( Between 10) and the automatic opening and closing valve (Vm), the automatic opening and closing valve (Vm) can be adjusted to the second position according to the preset value, and the compressed gas ejected by the gas compressor (10) will be interrupted , Which will be intermittent or non-intermittent The gas flows into the gas pipeline (P 1); the control device controls the automatic opening and closing valve (Vm), page 6 This paper size is applicable to China National Standard (CNS) A4 specification (210X297 mm) (Please read the precautions on the back first) Fill out this page j
經濟部智慧財產局員工消費合作社印製 572797 A7 B7 五、發明説明（） 水錘裝置（20)，並且根據前置作業程序選擇性調節活栓 位置。 (請先閲讀背面之注意事項再填寫本頁) 圖式餘簞說明= 下列敘述的相關圖示係為增進對本發明的瞭解，且為 說明書之一部分，並以下列圖示描述本發明之實施例以及 詳細說明，藉以詳細說明本發明的原理。圖示包括： 第1圖為根據本發明的水錘清洗機之分佈示意圖。 圖號齎照說明= 10 氣體壓縮機 20 水錘裝置 30 幫浦 40 清洗液體槽 50 第一壓力表 60 第二壓力表 70 操作器 P0 清洗液體注入管 P1 氣體管線 P2 供給管線 P3 支管 P4 可洗式管線 VI 第一活栓 V2 第二活栓 V3 第三活栓 V4 第四活栓 V5 第五活栓 V6 第六活栓 CV1 第一抑制活栓 CV2 第二抑制活栓 VM 自動開關活栓 經濟部智慧財產局員工消費合作社印製 發明詳細說明： 本發明的較佳實施例將於往後之說明文字中輔以下 第7頁 本紙張尺度適用中國國家標準(CNS)A4規格(210X297公釐） 572797Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 572797 A7 B7 V. Description of the invention () Water hammer device (20), and selectively adjust the position of the stopcock according to the pre-operation procedure. (Please read the precautions on the back before filling out this page) Illustrations of the diagrams = The related illustrations below are for improving the understanding of the present invention, and are part of the description. The following illustrations describe the embodiments of the present invention And detailed description, so as to explain the principle of the present invention in detail. The diagram includes: FIG. 1 is a schematic diagram of a water hammer cleaning machine according to the present invention. Drawing number description: 10 Gas compressor 20 Water hammer device 30 Pump 40 Cleaning liquid tank 50 First pressure gauge 60 Second pressure gauge 70 Manipulator P0 Cleaning liquid injection pipe P1 Gas line P2 Supply line P3 Branch pipe P4 Washable Type pipeline VI The first stopcock V2 The second stopcock V3 The third stopcock V4 The fourth stopcock V5 The fifth stopcock V6 The sixth stopcock CV1 The first stopcock CV2 The second stopcock VM Automatic switch stopcock Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs Detailed description of the invention: The preferred embodiment of the present invention will be supplemented in the following explanatory text on page 7. This paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm) 572797
、發明説明( 列圖形做更詳細的闡述。 第1圖為根據本發明的水錘清洗機之分佈示意圖。 凊參照第1圖’水錘清洗機之組成，係安裝一個水錘 裝置（20 )連接到清洗液體供給管線（p2 )，根據先前所 設定之時間，中斷由氣體壓縮機（丨〇 )所提供之氣體管線 (P1)’藉以在短時間之内利用水錘現象移除那些附著、 沉澱以及堆積的殘留外來物質（即外來物質），而不會對 管線内部造成損傷。 殘留於管線内部的外來物質包括鋼鐵黏污物、生鏽、 有機物及非有機物。 清洗液體供給管線（P2 )，經由循環清洗液體來清洗 可洗式管線（P4)，包括··一個幫浦（30)，藉以壓縮該 清洗液體，將之儲存於清洗液體槽（40 )，經循環之後， 移除殘留在可洗式管線（P4)内部的外來物質。為了將清 洗液體從外部儲存到清洗液體槽（40 )，提供一支管（P3 ) 連接此幫浦（30)至清洗液體槽（40)，此支管（P3 )包 含一個第一活栓（V1 )，藉以中斷來自外部的清洗液體之 流入物。 清洗液體供給管線（P2 )，連接清洗液體槽（40 )之 尾端，包括：第二活栓（V2)以及第三活栓（V3)，而且 依據清洗管線（P4 )的清洗程序，這些活栓（V2 ) ( V3 ) 可以自動開關或由人工操作。另外，清洗液體供給管線 (P2)，位於幫浦（30)以及可洗式管線（P4)之間，其 包括第四活栓（V 4 )，可以啟動或關閉流入可洗式管線 第8頁 本紙張尺度適用中國國家標準(CNS)A4規格(210X297公釐) (請先閲讀背面之注意事項再填、寫本頁) 、一一'口 經濟部智慧財產局員工消費合作社印製(Explanation of the invention (column graphics will be explained in more detail. Figure 1 is a schematic diagram of the distribution of the water hammer cleaning machine according to the present invention. 凊 Refer to Figure 1 for the composition of the water hammer cleaning machine, which is equipped with a water hammer device (20) Connected to the cleaning liquid supply line (p2), according to the previously set time, interrupt the gas line (P1) 'provided by the gas compressor (丨 〇), so as to remove those attached, Precipitated and accumulated residual foreign matter (ie foreign matter) without causing damage to the inside of the pipeline. Foreign materials remaining inside the pipeline include iron and steel contamination, rust, organic and non-organic materials. Cleaning liquid supply lines (P2) The washable pipeline (P4) is cleaned by circulating the cleaning liquid, including a pump (30), by which the cleaning liquid is compressed and stored in the cleaning liquid tank (40). After the circulation, the remaining Foreign matter inside the washable line (P4). In order to store the cleaning liquid from the outside to the cleaning liquid tank (40), a pipe (P3) is provided to connect this pump (30) to the cleaning The body tank (40), the branch pipe (P3) contains a first stopcock (V1) to interrupt the inflow of the cleaning liquid from the outside. The cleaning liquid supply line (P2) is connected to the tail end of the cleaning liquid tank (40). Including: the second stopcock (V2) and the third stopcock (V3), and according to the cleaning line (P4) cleaning procedures, these stopcocks (V2) (V3) can be automatically opened or manually operated. In addition, the cleaning liquid supply line ( P2), located between the pump (30) and the washable pipeline (P4), which includes the fourth tap (V 4), which can start or stop the flow into the washable pipeline. Page 8 This paper applies Chinese national standards ( CNS) A4 specification (210X297 mm) (Please read the notes on the back before filling out and write this page), printed by the Consumer Consumption Cooperative of the Intellectual Property Bureau of the Ministry of Economy
()的清洗液體之流入物，而且可以如上所言，根據清 洗程序自動開關或由人為操作。此外，為了切斷由氣體管 線（P1)壓縮出來的壓縮氣體造成清洗液體的回流，第一 抑制活栓（CV1 )裝置於幫浦（3〇 )及第四活栓（V4 )之 間。 清洗液體注入管（P0 )連接至清洗液體供給管線 (P2) ’包括·第六活栓（V6)安裝於此注入管上，藉以 將清洗液體從外部注入可洗式管線（P4 )，或是將清洗液 體儲存於清洗液體槽（40)。如同上述之其他活栓，第六 活栓（V 6 )可經由控制裝置自動開啟或關閉。 為形成一清洗液體的水錘以達到更理想地清洗管 線，在氣體壓縮機（10)處之一氣體管線（P1)之一尾端， 連接於清洗液體供給管線（P2 )之第四活栓（V4 )及可洗 式管線（P4)的尾端部分之間。提供一水錘裝置（20)， 憑藉實際產生水錘來清洗液體，係安裝於氣體壓縮機 (10)及氣體管線（P1)的另一尾端之間，而第一壓力表 (50)裝置於氣體壓縮機（10)及水錘裝置（20)之間， 藉以顯示從氣體壓縮機（10)噴出之氣壓。通常自氣體壓 縮機（10)喷出之理想氣壓為7-8kgf/cm2。 根據先前未說明之控制裝置所設之程序，水錘裝置 (20)之A.W.H.A活塞每秒往復運動1-10次。而自氣體 壓縮機（10)噴出之氣體在流經水錘裝置（20)時受到控 制，結果該氣體壓縮機規律地供應間歇壓力到流經清洗供 給管線（P2 )内部的清洗氣體，於是水錘在清洗液體中形 第9頁 本紙張尺度適用中國國家標準(CNS)A4規格(210X297公釐) (請先閱讀背面之注意事項再填寫本頁) -訂· 經濟部智慧財產局員工消費合作社印製 572797 經濟部智慧財產局員工消費合作社印製 五、 A7 _____B7_發明説明（） 另一方面，在所具備的壓力之下，為了保持壓縮氣體 流入清洗液體供給管線（P2 )之壓力狀態，提供一操作器 (70)連接至第二壓力表（60)，安裝於水錘裝置（2〇) 及氣壓管線（P1)的另一尾端之間，且根據可洗式管線 (P4 )的狀態，此壓力值可隨著控制裝置而改變。自動開 關活栓（Vm)藉由控制裝置自動中斷整個氣體管線（ρι)， 此開關活栓安裝於操作器（70)以及氣體管線（Pi)的另 一尾端，第五活栓（V5)，可經由自動開關或由人為操作， 裝置於自動開關活栓（Vm)以及氣體管線（P1)的另一 尾端。 自動開關活栓（Vm )如上所述，在第一位置以及第 一位置之間自動操作’此第一位置一般而言是關閉氣體管 線（P1)的基本位置，而第二位置則根據控制装置的訊號 開啟氣體管線（P1 )。另外，為了避免清洗液體回流至氣 體管線（P1) ’第一抑制活检（CV2)安裝於自動開關活 栓（Vm )及第五活栓（V5 )之間。 根據本發明之水錘清洗機的操作關係可詳見於表！， 而本結構可作不同的修正與操作，不必受限於以下所述之 操作關係。 第10頁 本紙張尺度適用中國國家標準(CNS)A4規格(210X297公釐) (請先閱讀背面之注意事項再填寫本頁} -訂· 線 572797 A7 —_ B7 五、發明説明（） <表1> 幫浦 清洗過程 VI V2 V3 V4 V5 V6 --- 幫浦 幫浦 清洗液體引入 開 關 關 關 關 開 51入關 完成關 清洗液體循環 關 開 開 開 關 關 完成關 清洗液體引入，嘴出 (V6) (V4) 關 關 關 開 關 開 引入開 完成關 清洗液體循環，噴出 (V3) (V4) 水錘喷出（V5) 關 開 開 開 開 關 (請先閱讀背面之注意事項再填寫本頁) -訂. 1 · 清洗液體引入 清洗液體從清洗液體供給工具通過清洗液體注入管 (P0)，進入清洗液體供給管線（P2)，然後被幫浦（30: 壓縮，最後儲存於清洗液體槽（40)之内，在此第四活栓 (V4)是關閉狀態。 2· 清洗液體循環 經濟部智慧財產局員工消費合作社印製 清洗液體係位於清洗液體供給管線（P2 )以及可洗式 管線（P4)内部’藉由幫浦（30)的操作系統，經循環之 後進入清洗液體槽（40)。 3. 清洗液體引入，喷出 第一，清洗液體充滿於清洗液體供給管線（P2 )及可 洗式管線（P4)之内。 第11頁 本紙張尺度適用中國國家標準(CNS)A4規格(210X297公釐) 572797 A7 B7 經濟部智慧財產局員工消費合作社印製 五、發明説明（） 4. 清洗液體循環’喷出 清洗液體循環於閉合環路及可洗式管線（P4 )之間’ 此可洗式管線由清洗液體洗淨，而於此產生水錘。 當清洗過程結束，可經由打開第二活栓（V2 )及第六 活栓（V6 )或是開啟幫浦（30 )，將清洗液體排出此裝置 之外。 本發明可有效利用由水錘形成的清洗液體洗淨殘留 於管線内部的外來物質，該水錘現象是經由水錘裝置的中 斷步驟將氣體實行壓縮，影響壓縮清洗液體，進而產生其 作用，如此一來可經由水錘產生之脈衝波或震動有效地進 行清洗程序。 一般而言，清洗半導體裝置需耗費6-8個鐘頭的時 間。然而依照本發明之應用，只需要3 0分鐘的時間即可 完成清洗程序，值得一提的是’本發明之整體清洗作業採 取全自動清洗程序，即具備容易操作的優點。 如熟悉此技術之人員所瞭解的，以上所述僅為本發明 之水錘清洗機而已，並非用以限定本發明之申請專利範 圍。凡其它未脫離本發明所揭示之精神下所完成之等效改 變或修飾，均應包含在下述之申請專利範圍内。 第12頁 本紙張尺度適用中國國家標準(CNS)A4規格(210Χ四7公复）一 ---- (請先閲讀背面之注意事項再填寫本頁} 、τ 線The inflow of the cleaning liquid () can be switched on or off manually according to the cleaning procedure, as mentioned above. In addition, in order to cut off the backflow of the cleaning liquid caused by the compressed gas compressed by the gas line (P1), the first stopcock (CV1) is installed between the pump (30) and the fourth stopcock (V4). The cleaning liquid injection pipe (P0) is connected to the cleaning liquid supply line (P2). 'Includes the sixth stopcock (V6) is installed on this injection pipe, so that the cleaning liquid is injected into the washable line (P4) from the outside, or The cleaning liquid is stored in the cleaning liquid tank (40). Like the other stopcocks mentioned above, the sixth stopcock (V 6) can be automatically opened or closed by the control device. In order to form a water hammer for the cleaning liquid to achieve a more ideal cleaning line, a tail end of a gas line (P1) at the gas compressor (10) is connected to a fourth stopcock of the cleaning liquid supply line (P2) ( V4) and the end portion of the washable pipeline (P4). A water hammer device (20) is provided to clean the liquid by actually generating water hammer. It is installed between the gas compressor (10) and the other end of the gas line (P1), and the first pressure gauge (50) device Between the gas compressor (10) and the water hammer device (20), the air pressure emitted from the gas compressor (10) is displayed. Usually, the ideal gas pressure ejected from the gas compressor (10) is 7-8 kgf / cm2. The A.W.H.A. piston of the water hammer device (20) reciprocates 1-10 times per second according to the procedure set by the control device not described previously. The gas discharged from the gas compressor (10) is controlled while flowing through the water hammer device (20). As a result, the gas compressor regularly supplies intermittent pressure to the cleaning gas flowing inside the cleaning supply line (P2), so the water Hammer in the cleaning liquid page 9 This paper size applies Chinese National Standard (CNS) A4 specifications (210X297 mm) (Please read the precautions on the back before filling this page) Printed 572797 Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs. A7 _____B7_ Description of Invention () On the other hand, to maintain the pressure of compressed gas flowing into the cleaning liquid supply line (P2) under the pressure, Provide an operator (70) connected to the second pressure gauge (60), installed between the water hammer device (20) and the other end of the pneumatic line (P1), and according to the washable line (P4) State, this pressure value can be changed with the control device. The automatic shut-off valve (Vm) automatically interrupts the entire gas line (ρι) by the control device. This switch stop valve is installed on the operator (70) and the other end of the gas line (Pi). The fifth stop valve (V5) can be passed through The automatic switch may be operated manually, and it is installed on the other end of the automatic switch (Vm) and the gas line (P1). The automatic opening and closing valve (Vm) is automatically operated between the first position and the first position as described above. This first position is generally the basic position for closing the gas line (P1), and the second position is based on the control device's The signal opens the gas line (P1). In addition, in order to avoid the return of the cleaning liquid to the gas pipeline (P1), the first suppression biopsy (CV2) is installed between the automatic opening and closing valve (Vm) and the fifth valve (V5). The operating relationship of the water hammer cleaning machine according to the present invention can be seen in detail in the table! However, this structure can be modified and operated differently, without being limited to the operation relationship described below. Page 10 This paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm) (Please read the precautions on the back before filling this page}-Order · Line 572797 A7 —_ B7 V. Description of the invention () < Table 1 > Pump cleaning process VI V2 V3 V4 V5 V6 --- Pump pump cleaning liquid introduction switch off close off on 51 into the closed completion of the cleaning liquid cycle off on switch off completion of the cleaning liquid introduction, mouth out ( V6) (V4) Turn off the switch. Turn on the switch to complete the cycle of cleaning liquid. Spray (V3) (V4) Water hammer spray (V5) Turn on the switch (Please read the precautions on the back before filling this page) -Order. 1 · Introduce the cleaning liquid from the cleaning liquid supply tool through the cleaning liquid injection pipe (P0), enter the cleaning liquid supply line (P2), and then be pumped (30: compressed, and finally stored in the cleaning liquid tank (40 ), Here the fourth stopcock (V4) is closed. 2 · Cleaning liquid The cleaning liquid system printed by the Consumers ’Cooperative of the Intellectual Property Bureau of the Ministry of Recycling Liquid is located in the cleaning liquid supply line (P2) and the washable line (P4) ) Internal 'By the operating system of pump (30), it enters into the cleaning liquid tank (40) after circulation. 3. The cleaning liquid is introduced and sprayed first, and the cleaning liquid is filled in the cleaning liquid supply line (P2) and washable. Type pipeline (P4). Page 11 This paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm) 572797 A7 B7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 5. Description of the invention () 4. Cleaning Liquid circulation 'The spray cleaning liquid is circulated between the closed loop and the washable line (P4)' This washable line is cleaned by the wash liquid, which generates water hammer. When the cleaning process is completed, the The second and the sixth pistons (V2 and V6) or the pump (30) are turned on and the cleaning liquid is discharged out of the device. The invention can effectively use the cleaning liquid formed by the water hammer to wash the foreign residues remaining inside the pipeline. The substance, the water hammer phenomenon, compresses the gas through the interruption step of the water hammer device, affecting the compression and cleaning liquid, and then produces its effect. In this way, the pulse wave or vibration generated by the water hammer can effectively enter the water hammer. Cleaning procedure. Generally speaking, it takes 6-8 hours to clean a semiconductor device. However, according to the application of the present invention, it only takes 30 minutes to complete the cleaning procedure. It is worth mentioning that the 'the whole of the present invention The cleaning operation adopts a fully automatic cleaning program, which has the advantage of being easy to operate. As understood by those skilled in the art, the above is only the water hammer cleaning machine of the present invention, and is not intended to limit the scope of patent application of the present invention. All other equivalent changes or modifications made without departing from the spirit disclosed by the present invention shall be included in the scope of patent application described below. Page 12 This paper size is applicable to China National Standard (CNS) A4 specifications (210 × 4 7 rep.) 1 ---- (Please read the precautions on the back before filling this page}, τ line