TW561072B - Cleaning nozzle - Google Patents

Abstract

This invention is to provide a cleaning nozzle with which gaseous fine particles contained in a jetted cleaning liquid are made small sized, have high density and are uniformized. This cleaning nozzle possesses a stirring section having at least a cleaning liquid supply port and a liquid discharge port and a mixing section communicating with the stirring section through the liquid discharge port and having a gas supply port and a cleaning liquid jetting port. In the stirring section, the cleaning liquid supplied from the cleaning liquid supply port is stirred and collides with the inside wall of the stirring section to produce the gaseous fine particles and the liquid containing the gaseous fine particles is discharged from the liquid discharge port. In the mixing section, the liquid supplied from the liquid discharge port and containing the gaseous fine particles is mixed with gas supplied from the gas supply port and jetted from the cleaning liquid jetting port.

Description

561072 Printed A7 B7 by the Consumer Cooperative of Intellectual Property Bureau of the Ministry of Economic Affairs 5. Description of the Invention (彳) [Technical Field to which the Invention belongs] The present invention relates to precision for cleaning flat panel displays, semiconductor-related parts, and light-related parts. Nozzle for cleaning parts. [Know-how] For the cleaning of precision parts such as flat panel displays, semiconductor-related parts, and light-related parts, it is necessary to completely remove fine dust and particles. For example, in the fields of flat panel displays and semiconductor-related parts, in recent years, due to the advancement of higher accumulation and higher density, the cleaning of these precision parts will remove submicron-level particles. In order to clean such precision parts, it is required that the surfaces of the precision parts with fine patterns and the like not be damaged. Therefore, the cleaning liquid is mixed with the gas by using a high-pressure cleaning nozzle, so that the cleaning liquid becomes fine particles, and the micronized cleaning liquid is sprayed onto the object to be cleaned, or Wash the surface by brushing it with a brush. Fig. 5 is an explanatory view showing an example of a cleaning nozzle used in such a cleaning process. The cleaning nozzle 50 is provided with a mixing chamber 2 for mixing a cleaning liquid and a gas therein. The mixing chamber 2 is provided with a cleaning liquid supply port 3, a gas supply port 5, and a cleaning liquid ejection port 6. During rinsing, a cleaning liquid such as a solvent, a cleaning agent, and pure water is supplied from the cleaning liquid supply port 3, and a gas such as compressed air is supplied from the gas supply port 5. The cleaning liquid and the gas are mixed in the mixing chamber 2 by the supply pressure of the gas, and the particles are made into particles. The micronized washing liquid is sprayed onto the washing target from the washing liquid discharge port 6 to wash the washing target. This paper size applies to China National Standard (CNS) A4 (210X297 mm) — " -4- (Please read the precautions on the back before filling this page)

561072 A7 B7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 5. Description of the invention (2) [Questions to be solved by the invention] However, this cleaning nozzle has been used for the cleaning of high-precision precision parts in recent years. Some disadvantages. In other words, most of the motive power for this cleaning nozzle to atomize the cleaning solution and spray it out depends on the supply pressure of liquid or gas. Therefore, in order to reduce the fine particles of the washing liquid to a very fine size, the liquid is ejected at a required discharge pressure, and a very high supply pressure of liquid or gas is required. Therefore, a high-pressure pump of 80 kg or more is required, which may increase the cost of the cleaning operation. In the cleaning nozzle as described above, there are disadvantages that the size of the particles of the sprayed cleaning solution is too large, the density of the particles is insufficient, and the particles of the sprayed cleaning solution are not uniform. Therefore, when cleaning high-precision precision parts in recent years, it is impossible to completely remove submicron-sized dust or particles adhering to fine patterns, and the desired cleaning effect cannot be obtained. In order to obtain a sufficient cleaning effect, if the supply pressure of the gas is further increased, the fine patterns of precision parts may be damaged. Increasing the supply pressure of the gas will waste additional cleaning solution and make the cleaning cost too high. In addition to the nozzle, there are disadvantages to using a brush to clean the surface, and the residue of particles in the brush can hurt the surface. Although the low-frequency ultrasonic waves can remove the dirt of more than micrometers, and the high-frequency waves can remove the sub-micrometers of dirt, it will damage the washings, and cause damage to the ultrasonic vibrator and vibrating head, and the cost will increase Shortcomings. The purpose of the present invention is to improve the shortcomings of the above-mentioned conventional cleaning nozzles, so that the size and paper size of the gas particles contained in the sprayed cleaning liquid can be adapted to the Chinese National Standard (CNS) A4 (210X297) Li) (Please read the notes on the back before filling in this page)

-5- Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 561072 A7 _; _ B7 V. Description of the invention (3) The size is small, which makes the amount of particles large and uniform. [Means for solving the problems] The present invention for solving the above problems is a cleaning nozzle, which is characterized by comprising a stirring chamber having at least a cleaning liquid supply port and a liquid discharge port, and the above The liquid discharge port communicates with the stirring chamber, and has a mixing chamber having a gas supply port and a washing liquid ejection port; the stirring chamber stirs the washing liquid supplied from the washing liquid supply port, and makes it Gas particles are collided by collision with the inner wall of the agitation chamber, and the liquid containing the gas particles is discharged from the liquid discharge port. The mixing chamber discharges the liquid containing the gas particles supplied from the liquid discharge port and the liquid supplied from the gas supply port. The gas is mixed to spray the cleaning liquid from the cleaning liquid ejection port. By having a stirring chamber capable of agitating the cleaning liquid to generate gas particles, the gas can be supplied even if the supply pressure of the gas is lower than the conventional cleaning nozzle. The gas in the cleaning solution is atomized to a very fine size and can be supplied to the object to be cleaned at a required spray pressure. In the beginning, the gas in the cleaning solution was micronized in the stirring chamber. Therefore, the particle size of the generated gas in the cleaning solution is finer, denser and more uniform than in the past. Wash effect. As a result, parts, components, etc. having a fine precision pattern can be cleaned uniformly and with high accuracy. In addition, since the gas particles in the cleaning liquid are smaller in size than in the past, the surface of precision parts will not be damaged, and additional cleaning liquid will not be wasted. In this case, the agitating chamber mentioned above has a partition with an opening. The paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm) (Please read the precautions on the back before filling this page)

-6- 561072 A7 B7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economy V. Invention Description (4) It is better to be divided into plural segments. By dividing the stirring chamber into a plurality of sections, the efficiency of atomizing the gas in the cleaning liquid can be further improved, and the cleaning liquid containing minute gas particles can be sprayed toward the object to be cleaned at the ejection port. . It is preferable that the cleaning liquid ejection outlet, the liquid discharge outlet, and the opening are slit-shaped. If the above-mentioned cleaning liquid ejection outlet and the liquid discharge outlet and the opening are slit-shaped, the cleaning liquid will be uniformly ejected from the cleaning liquid ejection outlet, and at the same time, a relatively wide range can be cleaned. Therefore, it is particularly suitable for cleaning substrate-like objects to be cleaned, such as flat-panel displays. In this case, the opening area of the cleaning liquid ejection outlet, the liquid discharge outlet, and the opening portion in the order from the upper stage of the stirring chamber to the cleaning liquid ejection outlet of the mixing chamber becomes smaller and smaller. As the opening through which the micronized cleaning solution passes is made from the upstream side to the downstream side, that is, the cleaning liquid ejection outlet from the upper section of the stirring chamber to the mixing chamber, the area is made smaller and smaller, and It can efficiently generate minute gas particles, and can supply the cleaning liquid to the object to be cleaned at a sufficient discharge pressure. The mixing chamber is provided with a plurality of gas supply ports, and a plurality of types of gases supplied from the gas supply port are mixed with a liquid containing gas particles supplied from the gas discharge port, and the cleaning liquid is removed from the above. The cleaning liquid is sprayed out. By providing a plurality of gas supply ports in the mixing chamber, a plurality of gases can be mixed with a liquid containing gas particles, and according to the purpose of cleaning, this paper size applies the Chinese National Standard (CNS) A4 specification (210X29? ) '' (Please read the notes on the back before filling this page)

561072 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 ____B7 V. Invention Description (5) Use the required mixed gas for the cleaning process. In this case, the mixing chamber is a singular or plural solid supply port, and is one or plural kinds of solids that can be supplied from the solid supply port, and a liquid containing gas particles supplied from the liquid discharge port. They are mixed and the cleaning liquid is ejected from the cleaning liquid ejection port. By providing a solids supply port in the mixing chamber, the required solids can be mixed with the washing liquid according to the purpose. Therefore, if, for example, fine particles, powders, or the like made of synthetic resin are mixed in a cleaning solution, the cleaning power can be enhanced as necessary. The solid supply port can also be used to supply solids with gas or liquid. The cleaning liquid supply port, gas supply port, and solid supply port can supply the cleaning liquid, gas, and solid to which fluctuations are applied. By supplying the cleaning liquid, gas, and solid to which fluctuations are applied, the interaction of these fluctuations can be used to improve the cleaning effect. [Inventive embodiment] Next, an embodiment of the present invention will be described with reference to the drawings, but the present invention is not limited to this. Fig. 1 is an explanatory view showing an example of a cleaning nozzle of the present invention. Inside the cleaning nozzle 10 of the present invention, there are two spaces in which a stirring chamber 1 and a mixing chamber 2 are provided. The stirring chamber 1 is provided with a washing liquid supply port 3 and a slit-shaped washing liquid discharge port 6 and communicates with the stirring chamber 1 through a liquid discharge port 4. The area of the cleaning liquid discharge port 6 is smaller than that of the liquid discharge port 4. However, sometimes the area of the cleaning liquid ejection outlet 6 is the size of this paper applicable to the Chinese National Standard (CNS) A4 specification (210X297 mm 1 (please read the precautions on the back before filling this page)

-8- Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 561072 A7 B7 _ ^ _ 5. The description of the invention (6) will also be larger than the area of the liquid discharge port 4. The feature of the cleaning nozzle 10 of the present invention is that “apart from the mixing chamber 2 provided in the conventional cleaning nozzle 50 shown in FIG. 5”, a cleaning liquid can be stirred to separate the gas particles. As shown in Fig. 5, the conventional cleaning nozzle is mixed with the cleaning liquid directly supplied with the gas in the mixing chamber 2. Therefore, in the cleaning liquid generated in the mixing chamber 2, The size of the gas particles is based on the supply pressure of the gas supplied from the gas supply port 5, and its size is relatively large, and uneven gas particles are generated. Therefore, in order to obtain smaller-sized gas particles that meet the demand, a very large gas supply pressure is required. On the other hand, in the cleaning nozzle of the present invention, as shown in FIG. 1, first, in the stirring chamber 1, the cleaning liquid supplied from the cleaning liquid supply port 3 is stirred to cause collision. The inner wall of the chamber 1 generates gas particles. The cleaning liquid supplied from the cleaning liquid supply port 3 at a flow rate of about 200 L / m i η is stirred in the stirring chamber 1 and may collide with the inner wall and be disturbed. The scrambled washing liquid is stirred and mixed in the stirring chamber 1 together with the gas dissolved in the washing solution and the air and the like existing in the stirring chamber 1 to generate gas particles. The liquid containing the gas particles is sent to the mixing chamber 2 which is communicated from the slit-shaped liquid discharge port 4. In the mixing chamber 2, the liquid containing the gas fine particles is mixed with the gas supplied from the gas supply port 5, and is mixed with the gas from the slit-shaped washing liquid discharge port 6 to be discharged as a washing liquid. In the cleaning nozzle 10 of the present invention, in the stirring chamber 1 at the front stage of the mixing chamber, the cleaning liquid has been micronized by the gas. Therefore, unlike the conventional cleaning nozzles, only the paper size applies the Chinese National Standard (CNS) A4 specification (210 ×: Z97 mm) (please read the precautions on the back before filling this page)

-9- 561072 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 B7 V. Description of the invention (7) The pressure of the supplied gas is used to atomize the cleaning solution, so there is no need to excessively increase the pressure of the supplied gas. In addition, since the cleaning liquid containing gas particles is mixed with the gas and supplied to the object to be cleaned, the cleaning liquid becomes a uniform gas mixed liquid, and the size of the particles can be made finer than before. Therefore, it is possible to rinse with high washing efficiency, and to prevent damage to the object to be cleaned. Since the pressure of the supplied gas can be reduced, the flow rate of the cleaning liquid used can be reduced, and the cleaning cost can be reduced. Although the cleaning nozzle 10 shown in FIG. 1 is provided with two gas supply ports 5, it is not necessary to supply the same type of gas, and it can be used according to the actual use purpose, for example, from one of the gases The supply port supplies compressed air, and the other gas (carbon dioxide) is supplied from the other gas supply port. The two are mixed with the liquid containing the gas particles supplied from the liquid discharge port 4 and then they are removed from the washing liquid. The ejection port 6 ejects. The supplied gas can also be supplied from the same supply port as a mixed gas (for example, air and carbon dioxide). Alternatively, another gas supply port is provided, and plural kinds of gases may be supplied for mixing and use. The cleaning liquid is discharged from the slit-shaped cleaning liquid discharge port 6 and is supplied to the object to be cleaned. The cleaning liquid discharge port 6 has a slit shape, so that even when cleaning substrate-shaped objects such as flat panel displays and semiconductor-related parts, a wide range can be cleaned uniformly. When the cleaning solution reaches the object to be cleaned, the gas in the cleaning solution containing gas particles is crushed on the surface of the object to be cleaned, and a weak ultrasonic wave is generated at the same time, which can effectively remove the particles and dirt attached to the surface. Things will not cause damage to delicate patterns. Fig. 2 is a view showing another form of the cleaning nozzle of the present invention. The Bank's "Zhang scale is applicable to the Chinese National Standard (CNS) A4 specification (210X 297 mm) (Please read the precautions on the back before filling out this page)

-10- Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 561072 A7 B7 V. Description of the Invention (8) In this type, the stirring chamber 1 is divided into a plurality of sections by a partition plate 7 having an opening 8. The cleaning liquid ejection port 6 and the liquid discharge port 4 are formed in the same slit shape as the cleaning nozzle 10 in Fig. 1, and are formed in the same slit shape as the opening portion 8. The opening 8, the liquid discharge port 4, and the cleaning liquid ejection port 6 are preferably formed from the lowermost stage (upstream section) of the stirring chamber 1 to the cleaning liquid ejection port 6 of the mixing chamber 2 so that the opening area increases. The smaller. When washing with the cleaning nozzle 20, first, the cleaning liquid is supplied from the cleaning liquid supply port 3 to the lower side of the stirring chamber 1 divided by the partition plate 7, as shown in FIG. In the same manner, the cleaning nozzle is made by disturbing and agitating the cleaning liquid and colliding with the inner wall of the stirring chamber 1 on the lower side to generate gas particles. The liquid containing the gas particles is moved from the opening portion 8 of the partition plate 7 to the upper stage side of the stirring chamber 1, and the same stirring and collision operations as the lower stage side are performed repeatedly here. On the upper side of the stirring chamber 1, the cleaning liquid that already contains gas particles on the lower side is stirred and collided to obtain a cleaning liquid that becomes finer particles. The liquid containing such finer gas particles is discharged from the slit-shaped liquid discharge port 4 which is smaller than the opening 8 and is mixed with the gas in the mixing chamber 2 to be ejected toward the object to be cleaned. In the form of the second figure, although the stirring chamber 1 is divided into two sections by one partition plate 7, a plurality of partition plates 7 may be provided to divide the mixing chamber into more sections. Even in this case, it is preferable that the opening portion 8 is made smaller and smaller from the upper portion to the lower portion, so that the cleaning liquid can be efficiently mixed with the gas particles and sprayed. Fig. 3 is an explanatory view showing another form of the cleaning nozzle of the present invention. In this mode, a solid supply port 9 is provided in the mixing chamber 2. When this paper size applies to Chinese National Standard (CNS) A4 specification (210X297 mm) (Please read the precautions on the back before filling this page)

-11-Printed by the Employees' Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 561072 A7 B7 V. Description of the invention (9) When washing, the granules will be granulated from the solid supply port according to the state of the object to be washed and the purpose of cleaning. Or powdery solids are supplied into the mixing chamber 2. Accordingly, for example, when it is desired to enhance the cleaning power, a powdery synthetic resin or the like is mixed into the cleaning solution to enhance the cleaning power. Alternatively, other gases or solids may be separately supplied to a plurality of gas supply ports and solid supply ports, and they may be used in combination. The solid and gas may be supplied from separate supply ports, or they may be mixed in advance and then supplied to the mixing chamber 2. The cleaning liquid, gas, and solids supplied to the cleaning nozzle of the present invention are not necessarily supplied at a constant pressure. For example, a batch pump or the like is used to supply a cleaning liquid while giving a wave, and a gas supplied from a gas supply port is also supplied while a wave is supplied. The interaction of these waves can improve the cleaning effect. Fig. 4 is an explanatory view showing another example of the cleaning nozzle of the present invention. In this configuration, the stirring chamber 1 is provided inside the mixing chamber 2. The cleaning nozzle 40 is the same as the cleaning nozzles of FIGS. 1 to 3 described above, and the cleaning liquid supplied from the cleaning liquid supply port 3 to the mixing chamber 1 in the mixing chamber 2 is The stirring chamber 1 becomes a liquid containing gas particles, and the liquid containing the gas particles is discharged from the nozzle-shaped liquid discharge port 4 to the mixing chamber 2 and is mixed with the gas supplied from the gas supply port 5 to be washed from The clean liquid discharge port 6 is discharged. The invention is not limited to the embodiments described above. As shown in the example, the above-mentioned embodiment has a structure that is substantially the same as the technical idea described in the patent application scope of the present invention, and a structure that can achieve the same effect, but is included in the technical scope of the present invention in any case. This paper size applies the Chinese National Standard (CMS) A4 specification (210X297 mm) (. Please read the precautions on the back before filling this page)

-12- Printed by the Employees' Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 561072 A7 B7 V. Description of the Invention (10) For example, in the above, although the cleaning liquid ejection outlet, liquid discharge outlet, and opening are in the form of a slit It should be noted that the present invention is not limited to this, and may be a circular or square orifice shape. In the drawing, although the example in which the discharge port is directed upward is described, in the usage mode, the discharge port may be directed downward or may be oriented in the lateral direction. [Effects of the Invention] As described in detail above, the cleaning nozzle of the present invention can increase the discharge pressure of the final cleaning liquid even with the same gas supply amount as in the past. Since the cleaning liquid contains uniform gas particles of a smaller size than in the past, it is possible to perform a very uniform and efficient cleaning of flat panel display related parts and semiconductor related parts having fine patterns in recent years. In addition, the amount of cleaning liquid used can be reduced. [Description of Drawings] Fig. 1 is an explanatory view showing an example of a cleaning nozzle of the present invention. Figure 2 is an explanatory view showing another example of the cleaning nozzle of the present invention. Figure 3 is an explanatory view showing another example of the cleaning nozzle of the present invention. Figure 4 is a view showing the cleaning nozzle of the present invention. FIG. 5 is an explanatory diagram showing an example of a conventional cleaning nozzle. This paper size applies to China National Standard (CNS) A4 specification (210X297 mm) I -13: (Please read the precautions on the back before filling this page}

Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 561072 A7 B7 V. Description of the invention (H) [Illustration of drawing number] 1: Mixing chamber 2: Mixing chamber 3: Washing liquid supply port 4: Liquid discharge port 5: Gas supply port 6: Washing liquid discharge port 7: Separator 8: Opening 9: Solid supply port 10, 20, 30, 40, 50: Washing nozzle This paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm) ) (Please read the notes on the back before filling this page)

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Claims (1)

561072 A8 B8 C8 D8 6. Scope of patent application 1 1 · A cleaning nozzle is a cleaning nozzle, which is characterized by: It has at least a cleaning liquid supply port and a liquid discharge port (please read first Note on the back, please fill in this page again) Mixing chamber, and the mixing chamber that communicates with the stirring chamber through the liquid discharge port, and has a gas supply port and a cleaning liquid ejection port; the above stirring chamber will clean from the above The cleaning liquid supplied from the liquid supply port is agitated, and it is made to collide with the inner wall of the stirring chamber to generate gas particles, and the liquid containing the gas particles is discharged from the liquid discharge port; the mixing chamber is discharged from the liquid discharge port. The supplied gas-containing microparticle-containing liquid is mixed with the gas supplied from the gas supply port, and the cleaning liquid is ejected from the cleaning liquid ejection port. 2. The cleaning nozzle according to item 1 of the patent application range, wherein the stirring chamber is divided into a plurality of sections by a partition having an opening. 3. The cleaning nozzle according to item 1 of the scope of the patent application, wherein the cleaning liquid ejection port, the liquid discharge port, and the opening are slit-shaped. 4. The cleaning nozzle according to item 2 of the patent application scope, wherein the cleaning liquid ejection port, the liquid discharge port, and the opening are narrow slits. Printed by the Employees ’Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs5. If the cleaning nozzle of item 1 of the scope of the patent application is applied, the opening, the liquid discharge port, and the cleaning liquid discharge port are in accordance with the upstream section from the mixing chamber The order of the openings of the cleaning liquid to the mixing chamber is smaller and smaller. 6. The cleaning nozzle according to item 2 of the scope of the patent application, wherein the opening, the liquid discharge port, and the cleaning liquid ejection port are in accordance with the cleaning liquid ejection port from the upper section of the stirring chamber to the mixing chamber. In sequence, the opening area is getting smaller and smaller. 7 · If the cleaning nozzle in item 3 of the scope of patent application, the above paper size is applicable to the Chinese National Standard (CNS) A4 specification (210X297 mm) -15-561072 A8 B8 C8 D8 々, scope of patent application 2 (please (Read the precautions on the back before filling in this page.) The openings, liquid discharge ports, and cleaning liquid ejection ports follow the order from the upper section of the mixing chamber to the cleaning liquid ejection port of the mixing chamber. Coming smaller. 8. The cleaning nozzle according to item 4 of the scope of the patent application, wherein the opening, the liquid discharge port, and the cleaning liquid ejection port are in accordance with the cleaning liquid ejection port from the upper section of the stirring chamber to the mixing chamber. In sequence, the opening area is getting smaller and smaller. 9 · If the cleaning nozzles in the scope of patent application No. 1, 2, 3, 4, 5, 6, 7, or 8 are provided, the mixing chamber has a plurality of gas supply ports and is supplied from the gas supply ports. A plurality of types of gas are mixed with a liquid containing gas particles supplied from the liquid discharge port, and the cleaning liquid is ejected from the cleaning liquid ejection port. 1 ◦. For the cleaning nozzles in the scope of patent application No. 1, 2, 3, 4, 5, 6, 7, or 8, wherein the mixing chamber has a singular or plural solid supply port, the solid supply port The supplied one or more kinds of solids are mixed with the liquid containing gas particles supplied from the liquid discharge port, and the washing liquid is ejected from the washing liquid ejection port. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 1 1. If the cleaning nozzle of item 9 of the scope of the patent application is applied, the mixing chamber has a singular or plural solid supply port, which is a type supplied from the solid supply port Or a plurality of kinds of solids are mixed with a liquid containing gas particles supplied from the liquid discharge port, and the cleaning liquid is ejected from the cleaning liquid ejection port. 1 2 · If the cleaning nozzle No. 1, 2, 3, 4, 5, 6, 7, or 8 of the scope of the patent application is applied, the above-mentioned cleaning liquid supply port and gas supply are applicable to China National Standard (CNS) A4 Specifications (210X297 mm) -16-561072 A8 B8 C8 D8 ___ Sixth, the scope of patent application 3 The supply port and the solid supply port are used to supply the cleaning liquid, gas, and solid to which fluctuations are respectively applied. 1 3. The cleaning nozzle 'according to item 9 of the scope of the patent application, wherein the cleaning liquid supply port, gas supply port, and solid supply port' are used to supply cleaning liquid, gas, and solid to which fluctuations are respectively applied. 1 4 · The cleaning nozzle ′ of item 10 of the scope of the patent application, wherein the above-mentioned cleaning liquid supply port, gas supply port, and solid supply port ′ supply cleaning liquid, gas, and solid to which fluctuations are respectively applied. 1 5 · The cleaning nozzle ′ according to item 11 of the scope of the patent application, wherein the cleaning liquid supply port, gas supply port, and solid supply port ′ are used to supply cleaning liquid, gas, and solid to which fluctuations are respectively applied. (Please read the notes on the back before filling out this page) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs This paper applies the Chinese National Standard (CNS) A4 specification (210X297 mm) -17-