TW554078B - Method for manufacturing metallic foil - Google Patents

Method for manufacturing metallic foil Download PDF

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Publication number
TW554078B
TW554078B TW90118853A TW90118853A TW554078B TW 554078 B TW554078 B TW 554078B TW 90118853 A TW90118853 A TW 90118853A TW 90118853 A TW90118853 A TW 90118853A TW 554078 B TW554078 B TW 554078B
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Taiwan
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lead
metal
concentration
anode
electrolysis
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TW90118853A
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Chinese (zh)
Inventor
Akihiro Kato
Hideji Nakamatsu
Yoshiya Baba
Tamio Ishikawa
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Permelec Electrode Ltd
Furukawa Circuit Foil Taiwan C
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Abstract

This invention is to reduce the consumption of an electrode coating in a method of manufacturing metallic foil by electrolysis from a sulfuric acid acidic solution using an anode having the coating containing a platinum group metal or metal oxide. In the method of manufacturing metallic foil by electrolysis from a sulfuric acid acidic solution, by adding a lead carbonate into the sulfuric acid acidic solution of electrolyte while using the anode having the coating of a platinum group metal or platinum group metal oxide, electrolysis is performed in the state of maintaining the lead concentration in the electrolyte at >= 10 ppm.

Description

554078 五、發明說明(1) 【發明之詳細說明】 【發:所屬之技術領域】 唁笪二Γ,要係關於一種在印刷電路配線板等所使用之銅 y的金屬落之連續製造方法。 【先前技術】 之製造:之ί造方法’配合其材質或者用途,而有各種 之^溶、液柞炎猎由壓延而進行製造之方法和以金屬化合物 行製造之電解:::而藉由電解以便於電鍍在陰極上之進 法。 / ’係為具代表性之金屬箔之製造方 由電解而製::Γ3上所使用之銅箔幾乎都是藉 廉價之鋼廢料作二料造㈣0夺’即使是使用 未析出的成分不會轉移至銅荡銅析出電位 物含有量少之銅笛。中因此,亦可以得到不純 呈均勻卜厚而’,具有容易得到擴及寬廣面積皆 適合在形成電子電路之目的而析;^屬組織 刻之特徵。 易進灯大縱検比之蝕 圖1係為說明藉由電解而進行製造之銅 一例子之圖式。正如圖i之剖面圖所顯 2二之某 置係為在電解槽2内之電解浴3中,、f主5 4製造裝 型陰極圓筒4作為陰極,以不溶;其中之大 \\312\2d-code\90-10\90118853.ptd 第4頁 554078 五、發明說明(2) 圓;4邊之使/Λ屬連續地電鑛在圓筒之表面上,-邊由陰極 冋之表面連續地剝除所析出之金屬銅7之方法; 得二:C之電流值或者圓筒旋轉速度’而容易控制所 銅泊8之平均厚度;具有容易製造薄箔之特徵。 鉛電極Ϊϋί度:係通常為1〇〜數,過去是使用 女品、i ^ 、° 5金電極作為陽極,但是,由於陽極之消耗 w成陽極和陰極圓筒間之電極間距離 ^質不,電解電壓會上而且,也會對於所得到之Μ 作為陽s :i影響。因此,演變為使用不溶解金屬電極 ==屬之基體上,被覆含有始族金屬或者翻ί金屬 虱化物之電極觸媒物質之被覆。 但疋,在使用形成鉑族金屬或者鉑族金屬氧化物之被 二不巧屬t㈣為陽極之情开),比域用㉟電極之情 ^, P使疋比較能夠大幅度地延長陽極壽 =用該陽極…,要求能夠減少不溶解金屬電= ,篁並且可以長時間地使用之金屬羯之製造方法。 【發明所欲解決之問題】 屬❸’係為在藉由電解而製造電解銅箔等之金 .^ ^使用形成有鉑族金屬或者鉑族金屬氧化物 屬::ΐ m金屬電㉟’進行經過長時間仍然穩定之金 屬泊之電解製造。 【解決問題之手段】 可以藉由以下之製造方法,而解決本發明之問題:一種 第5頁 \\312\2d-code\90-10\90118853.ptd 554078 五、發明說明(3) 藉f電解而製造金屬箔之製造方法,係在由硫酸酸性溶液 而製造金眉炫a 族金屬負之方法中,藉由使用形成有鉑族金屬或者鉑 二錯:::被覆之陽極’並在電解液之硫酸酸性溶液 π卿以上之人二鹽,以便:在電解液中之錯濃度保持於 又狀態下進行電解。 屬:外係:ΪΪ藉由電解而製造金屬箱之製造方法中之金 【發明之實施形態】 為在藉由電解而製造金屬猪之製造中,由於 成於不溶解m或者氟離子等之存在,會導致形 本發明人活性被覆之消耗量變大。 議以下之方法;、藉由 活性被覆h形成穩定之=成“而在電極 造金屬箔之方法。 、°之被後’同時,電解製 此外’在金屬箔之製造中, 产 行數PPm至數十ppm為止之濃度:二=向續特性’因此,進 脲和纖維素等之添加劑 >、骨膠(glue)、硫 前述之任何-種之添加知道:不論是 金屬氧化物之電極活性物質之被、乍為陽極且含有鉑族 壽命。在電解處理中而析出於陽極之消耗’而縮短陽極之 緩和像這樣之添加劑之不良麥響d上之二氧化鉛,係具有 得電解液中之鉛濃度成為2二值==果,因此,必須要使 \\312\2d-code\90-10\90118853.ptd 第6頁 554078 五、發明說明(4) 本發明人們,係在就鉛濃度而進行檢討之時,社 到:在8pPm鉛濃度無法達到延長陽極壽命之了 : 必須至少成為lOppm以上。 果金0浪度 :以藉著溶解由原料中之所導入之錯、電解液中之金屬 或者各種之鉛化合物,而調整電解液中之鉛 :旦f’:有所謂電解液中之錯遭度由於電解液中之根 溶解度積而受到限制之問題發生。在就硫酸 =解:中之錯成分濃度而進行檢討之時,發 =浴中^成分濃度並不容易上升至數ppm左右之濃度 以上,7〜8ppm左右之濃度係為限度。 因此:本發明人們,係在就能夠提高電解液中之鉛 :二=過長時間也可以穩定地維持錯成分濃度之方法 冰王^ l、行檢付之時,結果,發現到:雖然在硫酸酸性 /合液’合解釔叙末、二氧化鉛、硫酸鉛等之情形下,即使 ^ /辰度,時地變向,也無法經過長時間而穩定地保持錯濃 又,但是\在使用鉛之碳酸鹽之狀態下,可以使得鉛成分 之濃度,穩定地維持在1〇ρρπι以上。 作為金α之炭酉夂鹽,係可以使用碳酸錯()、驗式 碳酸鉛(2PbC03 · Pb (〇H ) 2 )等。 這二叙I之反S文鹽,係在硫酸酸性之電解液中,一邊產生 二二化碳「?溶解;雖然並不確定其提高鉛濃度之理由, >ί一疋推測疋=於鉛之碳酸鹽溶解於硫酸酸性浴中之溶解 過程,發揮提而電解液中之鉛濃度之作用。 在本發明中,可以將要添加於電解液中之鉛之碳酸鹽,554078 V. Description of the invention (1) [Detailed description of the invention] [Development: Technical field to which it belongs] The second Γ relates to a continuous manufacturing method of copper metal y used in printed circuit wiring boards and the like. [Previous technology] Manufacturing: The manufacturing method 'matches its material or use, and there are various methods of manufacturing, rolling, and electrolyzing using metal compounds ::: Electrolysis to facilitate plating on the cathode. / 'It is a representative metal foil produced by electrolysis: Almost all copper foils used on Γ3 are borrowed from cheap steel scraps as secondary materials. Even if the unprecipitated ingredients are not used, Transfer to a copper flute with a small amount of copper precipitation potential. Therefore, it is also possible to obtain impure materials with uniform thickness, and it is easy to obtain a wide area, which is suitable for the purpose of forming electronic circuits; ^ is a characteristic of tissue carving. Erosion of Easy-to-Lamp Large Longitudinal Ratio Figure 1 is a diagram illustrating an example of copper manufactured by electrolysis. As shown in the sectional view of Fig. I, a certain arrangement of 2 is that in the electrolytic bath 3 in the electrolytic cell 2, the main cathode 4 is manufactured as a cathode cylinder 4 to be insoluble; \ 2d-code \ 90-10 \ 90118853.ptd Page 4 554078 V. Description of the invention (2) Circle; 4 sides make / Λ belong to the continuous power ore on the surface of the cylinder,-the side is the surface of the cathode 冋The method of continuously stripping out the precipitated metallic copper 7; Obtaining two: the current value of C or the rotation speed of the cylinder 'makes it easy to control the average thickness of the copper 8; it has the characteristics of being easy to manufacture thin foil. The degree of lead electrode is usually 10 to several. In the past, women's products, i ^, and 5 gold electrodes were used as anodes. However, due to the consumption of anodes, the distance between the anode and the cathode cylinder is not good. , The electrolytic voltage will be increased, and it will also affect the obtained M as a positive s: i. Therefore, it has evolved to use an insoluble metal electrode == a substrate that is covered with an electrode catalyst material containing a metal of the original group or a metal lice. However, 疋, in the case of using platinum group metal or platinum group metal oxides, which is unfortunately t ㈣ as the anode), compared with the field ㉟ electrode ^, P makes 疋 can greatly extend the anode life = With this anode ..., a manufacturing method of a metal plutonium that can reduce the amount of insoluble metal and can be used for a long time is required. [Problems to be Solved by the Invention] The genus ❸ 'is used for producing gold such as electrolytic copper foil by electrolysis. ^ ^ Using a platinum group metal or a platinum group metal oxide genus :: ΐ mmetal electrode ㉟' Electrolytic manufacturing of metal poises that remain stable over a long period of time. [Means for solving problems] The following manufacturing methods can be used to solve the problems of the present invention: a kind of page 5 \\ 312 \ 2d-code \ 90-10 \ 90118853.ptd 554078 V. Description of the invention (3) Borrow f The method for manufacturing metal foil by electrolysis is in the method of manufacturing Jinmeixuan Group A metal negative from a sulfuric acid acid solution, by using a platinum group metal or platinum dioxo ::: coated anode 'and electrolyzing The sulphuric acid acid solution of the liquid is more than bismuth, in order to: perform the electrolysis while maintaining the wrong concentration in the electrolyte. Affiliation: Outer system: 金 Gold in the manufacturing method of manufacturing metal boxes by electrolysis [Embodiment of the invention] In the manufacture of metal pigs by electrolysis, due to the presence of insoluble m or fluoride ions, etc. Will cause the consumption of active coatings of the present inventors to increase. The following methods are recommended; a method of forming a stable == by "active coating h" method of forming metal foil on the electrode. After the coating of °, at the same time, electrolytic production; and in the production of metal foil, the number of production lines is PPm to Concentrations up to several tens of ppm: 2 = continuous characteristics' Therefore, additives such as urea and cellulose >, bone glue, sulfur, any of the above-mentioned additions are known: whether it is an electrode active material of a metal oxide It is an anode and contains a platinum group life. In the electrolytic treatment, the consumption of the anode is reduced, and the anode is reduced to alleviate the adverse effects of additives such as this. Lead concentration becomes 2 binary value == fruit, therefore, it is necessary to make \\ 312 \ 2d-code \ 90-10 \ 90118853.ptd page 6 554078 V. Description of the invention (4) The inventor is concerned with lead concentration At the time of the review, the agency learned that at 8 pPm lead concentration, the anode life could not be extended: it must be at least 10 ppm or more. Fruit gold 0 range: In order to dissolve the errors introduced from the raw materials, the electrolyte Metal or various lead compounds Lead in the electrolyte: Denier f ': There is a problem that the so-called error in the electrolyte is limited due to the root solubility product in the electrolyte. When reviewing the sulfuric acid = solution: concentration of the wrong component The hair concentration in the bath is not easy to rise to a concentration of about several ppm, and a concentration of about 7 to 8 ppm is the limit. Therefore: the inventors can improve the lead in the electrolyte: two = over A method that can stably maintain the concentration of the wrong component over a long period of time. At the time of inspection, it was found that although the sulfuric acid / liquid solution, the yttrium solution, lead dioxide, lead sulfate, etc. In some cases, even if the temperature changes from time to time, the concentration cannot be stably maintained over a long period of time. However, in the state of using lead carbonate, the concentration of the lead component can be stably maintained at 10 ρρπι or more. As the carbon salt of gold α, carbonic acid (), oxidized lead carbonate (2PbC03 · Pb (〇H) 2), etc. can be used. In sulfuric acid-based electrolyte, carbon dioxide is produced. Dissolve; Although there is no reason to increase the lead concentration, > 疋 a speculate 疋 = the dissolution process of lead carbonate dissolved in sulfuric acid acid bath, to play a role in improving the lead concentration in the electrolyte. In the present invention In the lead carbonate to be added to the electrolyte,

554078554078

將100g/l之稀硫酸,加溫至60〇c 錯。每天採取!次之溶液而藉由膜渡器:^ 碳: 著,使用感應式電漿發光分光分析裝^d分j 及定量鉛濃度。 ^阳刀祈 中Warm 100 g / l of dilute sulfuric acid to 60 ° C. The solution was taken every day and the membrane was passed through the membrane: ^ carbon: ,, using an inductive plasma luminescence spectroscopy device ^ d j and quantitative lead concentration. ^ Yang Dao Qi

將該實施例1之結果和比較例丨之結果,一起顯示在表1 _實施例2 在銅濃度80g/l、硫酸濃度95g//1、鉛濃度切㈣、明膠 濃度lOppm之銅箔電解液之銅溶解槽中,投入碳酸鉛,其 中以雜重量換算,每一公升之電解液中斜重量〇 · 2克。 電解槽,係正如圖1所顯示的,而配置2片之陽極;該2 片之陽極,係對於直徑2 m之鈦圓筒型陰極,設置電極間距 離10mm並且由圓弧型鈦板之所組成之電極基體上,藉由熱 分解形成由銥:鈕以70 ·· 30 (莫爾數比)而含有之複合氧 化物之所組成之電極觸媒被覆。The results of Example 1 and the results of Comparative Example 丨 are shown in Table 1 _ Example 2 Copper foil electrolyte at a copper concentration of 80 g / l, a sulfuric acid concentration of 95 g // 1, a lead concentration, and a gelatin concentration of 10 ppm. In a copper dissolving tank, lead carbonate was added, in which the oblique weight was 0.2 g per liter of electrolyte in terms of miscellaneous weight. The electrolytic cell, as shown in Figure 1, is equipped with two anodes. The two anodes are for a titanium cylindrical cathode with a diameter of 2 m, the distance between the electrodes is set to 10 mm, and the arc-shaped titanium plate is used. An electrode catalyst composed of a composite oxide containing iridium: button at 70 ·· 30 (mole number ratio) is formed on the electrode substrate formed by thermal decomposition.

554078554078

士在電解液中之鉛濃度由4ppm開始上升而達到12ppm之 日守’於50 °C電解浴溫度中,以陽極電流密度40A/dm2的條 件^而開始進行電解。將電析出來的銅,捲繞成為箔狀^ ,時’相同於實施例1,分析電解液中之鉛濃度。此外, 可以在1 0個月間,並無交換陽極,而持續運轉。 比較你丨Ί 除了使用二氧化鉛而取代實施例1之碳酸鉛之方面之 外’其餘係相同於實施例1,而進行分析。該結果係顯示 在表1。 · ’、 比較^ 除了使用硫酸鉛而取代實施例1之碳酸鉛之方面之外, 其餘係相同於實施例丨,而進行分析。該結果係顯示在表 1 ° 比較你丨3 *除了使用平均粒徑45 之金屬鉛粉末而取代實施例i之 碳酸鉛之方面之外,其餘係相同於實施例1,而進行分 析。該結果係顯示在表J。 比較例4 士相對每一公升電解液,投入平均粒徑45 /zm之金屬鉛粉 末〇·2克,在鉛濃度由4ppm開始上升而達到叶卵之時,相 同於實施例2,開始進行電解;將電析出來的銅,捲繞成 為结狀,同時,相同於實施例1,分析電解液中之錯濃 度;該分析結果係顯示在表1。 ° / 在經過6個月之運轉之後,於銅箔之寬方向上,產生厚 554078 五、發明說明(7) 度不均勻之分布,以致於無法捲繞銅箔。此外,在由電解 槽取下陽極而進行調查之時,可以確認到:原因係為部分 地消耗電極觸媒被覆,並且,由於該電極觸媒被覆之消 耗,而在銅箔厚度上,產生不均勻。The lead concentration in the electrolyte started to rise from 4ppm to 12ppm. At the temperature of 50 ° C electrolytic bath, electrolysis was started at an anode current density of 40A / dm2 ^. When the electro-precipitated copper was wound into a foil shape, the same was used as in Example 1, and the lead concentration in the electrolytic solution was analyzed. In addition, the anode can be continuously operated without exchanging anodes in 10 months. Comparison You are the same as Example 1 except that lead dioxide is used instead of the lead carbonate of Example 1 for analysis. The results are shown in Table 1. · ', Comparison ^ Except that lead sulfate was used instead of lead carbonate in Example 1, the rest were the same as in Example 丨 and analyzed. The results are shown in Table 1 ° Comparison with yours * 3 The analysis is performed in the same manner as in Example 1 except that the lead carbonate of Example i is used instead of the lead carbonate of Example i. The results are shown in Table J. Comparative Example 4 For each liter of electrolyte, 0.2 g of metal lead powder having an average particle diameter of 45 / zm was added. When the lead concentration started to rise from 4 ppm and reached the leaf egg, it was the same as in Example 2 and electrolysis was started. ; The electrodeposited copper was wound into a knot shape, and at the same time, the error concentration in the electrolytic solution was analyzed in the same manner as in Example 1. The analysis results are shown in Table 1. ° / After 6 months of operation, a thickness of 554078 is produced in the width direction of the copper foil. 5. Description of the invention (7) The degree of uneven distribution makes it impossible to wind the copper foil. In addition, when the anode was removed from the electrolytic cell and investigated, it was confirmed that the reason was that the electrode catalyst coating was partially consumed, and that the thickness of the copper foil was not changed due to the consumption of the electrode catalyst coating. Even.

C:\2D-C0DE\90-10\90118853.ptd 第10頁 554078 五、發明說明(8) 【表1】 稀硫酸中之鉛濃度之變化 實施例 1 實施例 2 比較例 1 比較例 2 比較例 3 比較例 4 時間 碳酸鉛 碳酸鉛 二氧化 鉛 硫酸鉛 金屬鉛 粉末 金屬鉛 粉末 1曰 10.4 1.9 0.9 1.2 7.8 2曰 8.8 10.7 9.3 5.0 8.4 9.3 3曰 12.2 9.2 5.6 9.3 4曰 1 1.9 7.1 5.3 10.4 6曰 10.4 6.6 8.0 6.8 7.6 7曰 11.8 6.6 8.0 6.8 8曰 11.1 11.5 6.4 8.4 7.0 7.9 9曰 11.3 6.9 7.1 5.9 13曰 1 1.6 7.6 15曰 11.3 7.5 22曰 1 1.2 8.4 27曰 1 1.7 7.6 29曰 12.1 7.6 34曰 11.8 7.2 41曰 12.2 8.1 43曰 12.1 8.6 画圓關 第11頁 C:\2D-CQDE\90-10\90118853.ptd 554078 五、發明說明(9) 【發明之效果】 可以藉由添加鉛之碳酸鹽,而使得電解液中之鉛濃度, 高度地維持在lOppm以上,並且,還能夠藉由像前述這 樣,而在不溶解金屬電極上,迅速地析出穩定之二氧化 鉛。該二氧化鉛,係可以發揮作為氧產生之電極觸媒之功 能,而顯著地延長陽極之壽命。 【元件編號之說明】 1 2 3 4 5 6 7 8 銅箔製造裝置 電解槽 電解浴 陰極圓筒 陽極 電解液供應用縫隙 金屬銅 銅箱C: \ 2D-C0DE \ 90-10 \ 90118853.ptd Page 10 554078 V. Description of the invention (8) [Table 1] Changes in lead concentration in dilute sulfuric acid Example 1 Example 2 Comparative example 1 Comparative example 2 Comparison Example 3 Comparative Example 4 Time Lead Carbonate Lead Carbonate Lead Dioxide Lead Sulfate Metal Lead Powder Metal Lead Powder 1 10.4 1.9 0.9 1.2 7.8 2 8.8 10.7 9.3 5.0 8.4 9.3 3 12.2 9.2 5.6 9.3 4 1 1 1.9 7.1 5.3 10.4 6 10.4 6.6 8.0 6.8 7.6 7 y 11.8 6.6 8.0 6.8 8 y 11.1 11.5 6.4 8.4 7.0 7.9 9 y 11.3 6.9 7.1 5.9 13 y 1 1.6 7.6 15 y 11.3 7.5 22 y 1 1.2 8.4 27 y 1 1.7 7.6 29 y 12.1 7.6 34 Said 11.8 7.2 41 Said 12.2 8.1 43 Said 12.1 8.6 Draw Circles Page 11 C: \ 2D-CQDE \ 90-10 \ 90118853.ptd 554078 5. Description of the invention (9) [Effects of the invention] The effect of the invention Carbonate allows the lead concentration in the electrolyte to be maintained at a high level of 10 ppm or more, and it is also possible to rapidly precipitate stable lead dioxide on the insoluble metal electrode as described above. The lead dioxide can exert the function as an electrode catalyst for oxygen generation, and significantly prolong the life of the anode. [Explanation of component number] 1 2 3 4 5 6 7 8 Copper foil manufacturing equipment Electrolytic cell Electrolytic bath Cathode cylinder Anode Gap for electrolyte supply Copper copper box

C:\2D-OODE\90-10\90118853.ptd 第12頁 554078 圖式簡單說明 圖1係為說明金屬箔之製造裝置之圖式。 第13頁 C:\2D-CODE\90-10\90118853.ptdC: \ 2D-OODE \ 90-10 \ 90118853.ptd Page 12 554078 Brief Description of Drawings Figure 1 is a drawing explaining the manufacturing equipment of metal foil. Page 13 C: \ 2D-CODE \ 90-10 \ 90118853.ptd

Claims (1)

54078,, 公告本 · 六、申請專利範圍 1. 一種金屬箔之製造方法,其係由硫酸酸性溶液而製造 金屬箔之方法,其特徵為··藉由使用形成有鉑族金屬或者 鉑族金屬氧化物之被覆的陽極,並在電解液之硫酸酸性溶 液中添加鉛之碳酸鹽,以便於在電解液中之鉛濃度保持於 1 0 p p m以上之狀態下進行電解。54078 ,, Announcement 6. Application Patent Scope 1. A method for manufacturing a metal foil, which is a method for manufacturing a metal foil from a sulfuric acid acid solution, characterized by the use of a platinum group metal or platinum group metal formed by using The anode is covered with an oxide, and lead carbonate is added to the sulfuric acid acid solution of the electrolytic solution, so that the electrolysis can be performed while the lead concentration in the electrolytic solution is maintained above 10 ppm. \\312\2d-code\90-10\90118853.ptd 第14頁\\ 312 \ 2d-code \ 90-10 \ 90118853.ptd Page 14
TW90118853A 2000-08-02 2001-08-02 Method for manufacturing metallic foil TW554078B (en)

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US20060191798A1 (en) * 2003-04-03 2006-08-31 Fukuda Metal Foil & Powder Co., Ltd. Electrolytic copper foil with low roughness surface and process for producing the same

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