TW552601B - Method to manufacture dry negative foil of Aluminum electrolyte capacitor - Google Patents

Method to manufacture dry negative foil of Aluminum electrolyte capacitor Download PDF

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Publication number
TW552601B
TW552601B TW91112947A TW91112947A TW552601B TW 552601 B TW552601 B TW 552601B TW 91112947 A TW91112947 A TW 91112947A TW 91112947 A TW91112947 A TW 91112947A TW 552601 B TW552601 B TW 552601B
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Taiwan
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foil
aluminum
layer
vapor deposition
dry
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TW91112947A
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Chinese (zh)
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Wen-Guei Liou
Tsuen-Shian Ke
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Liton Technology Corp
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Abstract

A method to manufacture dry negative foil of Aluminum electrolyte capacitor is disclosed, which is provided for avoiding the problem that the electrical characteristics (quality) of the wet electro-chemically etched Aluminum foil in the processing method of the prior art cannot be kept stable, and the problem of handling the waste acid and handling cost after using acid solution massively. In the manufacturing method of dry negative foil using physical vapor deposition, proper conductive layer is deposited continuously on the surface of the proper Aluminum foil material, so as to achieve electron conduction effect with even higher efficiency, and obtain more stable surface characteristics. It is the best choice for the negative electrode material, and not only the electrical conductibility of the surface conduction layer is higher than that of the current commercial product, but also the mechanical performance of the Aluminum foil material is not affected, which is advantageous for the winding process of capacitor.

Description

552601552601

【技術領域】 本發明係關於' 一種铭電解雷六突4 k i ,轉別3共 裡站电鮮電谷器乾式負極箔製造方法 特曰一種可提升電容器表面電氣 至少兩倍的靜電容量'並達到 / 及挺冋 之方法者。 j有效k间表面電子傳導速率 鋁電解電 大主流, 天穩定度 質已達到 第一圖所 公告第4 採用姓刻 化酸水溶 係利用含 一段後處 餘刻液之 填酸、硫 質吸附物 及(e ) 水溶液為 化膜穩定 述方式仍 容器產品, 而目前該產 較差的缺失 瓶頸; 示’習用鋁 0 3 9 2 3 的方式,包 液清除鋁原 銘離子之名虫 理,係利用 殘餘離子清 酸及醋酸等 清除掉,並 第三段後處 處理液,並 成長,而成 有許多缺失 且 ϊΆ )人 疋目刖 品因為 ,及在 電解電 號專利 含如下 羯表面 刻液, 硝酸水 洗乾淨 水溶液 在陰極 理,係 配合施 為鋁電 :乃在 容器陰 案(下 步驟: 的污染 以增大 溶液為 ;(d ) 為處j里 箱上作 利用己 加直流 解電容 於因為 【先前技術】 低阻抗的 備使用上的'一 學電蝕箔的先 法突破,其品 再者,如 方法係如我國 ),其主要是 理,係利用氧 )餘刻處理, 面積;(C )第 飯刻處理後的 處理,係利用 刻孔洞内的雜 化膜的準備; 次亞磷酸銨等 陰極箔上的氧 绪;然透過上 及未來在電器設 受限於濕式電化 材料的選用上無 極箔製造 稱引證案 (a )前處 物;(b 蝕刻有效 處理液將 第二段後 液再把蝕 好長出氧 二酸銨、 電源,使 器用陰極 蝕刻鋁箔 552601 五、發明說明(2) 而要f麵液酸液來對鋁原箔進行濕式的電化學蝕刻動作後 、、’接著再進行安定化的處理;一來由於在必須大量使用酸 液之後相對所形成的廢酸處理及處理成本問題,二來由於 ’舌^高的叙箔表面因酸液所造成無可避免的氧化問題,即 1^表面的電氣特性(品質)穩定度受到材料特性的 解ϊ =無法保持一定,相對使得品質無法提昇,故該鋁電 电谷Is陰極箔的製造方法實不甚理想。 一 另外’習知技術亦有鋁箔電極之相關製造方法,如圖 —:不,其係採用物理氣相沉積鋁箔電極的乾 原、毕(:.)(=:里係”氧化酸水溶液清2 述物理“ 成乾式鋁落電極成品者;惟上 性的條件下,因此,比二針對電極厚度及特 不適用於紹電解電容器; 而 因此,12 解電容器的電極要求,· 點,乃亟思加以改_如紅^ ~用万法所何生的各項缺 ,終於成功研發完:本件二”心孤諸潛心研究後 ,其欲利用不同於濕式雷分與電各器乾式負箔製造方法 面進行表面鏟層處理:以=乾式物理方法’在紹箱表 並且得到穩定的表達f更,效率的電子傳導作用, 特性者。 、 不叉外在環境的影響及改變[Technical Field] The present invention relates to a method for manufacturing a dry negative foil for electrolyzers and electric valleyrs of Mingli Electrolytic Lightning 6 ki, which is specifically described as an electrostatic capacity that can at least double the surface of capacitors. Ways to reach / and stand up. The effective surface electron conduction rate between j and aluminum is the mainstream of aluminum electrolytic electricity. The stability of the product has reached the number 1 announced in the first figure. 4 The use of water-soluble acidic water-soluble system utilizes acid-filled sulfur and sulfur adsorbate containing a period of remaining liquid. And (e) the aqueous solution is still a container product for the stable method of the chemical film, and the current lack of production is the lack of bottlenecks; the method of "custom aluminum 0 3 9 2 3" is used to clear the name of the original aluminum ion by the liquid encapsulation, which is used Residual ions, such as acetic acid and acetic acid, are removed, and the third stage is followed by the treatment solution, which grows, and there are many defects and ϊΆ) because of human eyebrows, and the electrolytic solution patent contains the following 羯 surface engraving solution, The cleaned aqueous solution of nitric acid is treated at the cathode, which is combined with the application of aluminum: it is in a container case (the next step: the contamination is to increase the solution as; [Prior technology] The breakthrough of the first method of low-resistance preparation of 'Electrical Etching Foil', the quality of which is, for example, the method is as in our country), the main reason is the use of oxygen), and the area is processed in a moment; C) The treatment after the first engraving process is to use the preparation of the hybrid film in the engraved holes; the oxygen thread on the cathode foil such as ammonium hypophosphite; etc .; Select the electrodeless foil to make the former (c) before the citation case; (b) Etching the effective treatment liquid, and then etch the second liquid, and then ammonium oxalate, the power source, and the cathode are used to etch the aluminum foil 552601. 5. Description of the invention (2) After the f-surface liquid acid solution is used to perform a wet electrochemical etching operation on the original aluminum foil, then the stabilization process is performed; once the acid solution is relatively used, a relatively large amount of waste is formed. The problem of acid treatment and treatment cost. Second, due to the inevitable oxidation problem caused by the acid solution on the surface of the foil, the electrical characteristics (quality) stability of the surface is solved by the material characteristics. Keeping it constant, the quality can not be improved, so the method of manufacturing the aluminum cathode cathode foil is not ideal. One other 'known technology also has related manufacturing methods for aluminum foil electrodes, as shown in Figure —: No, it uses Dry vapor deposition of aluminum foil electrode by physical vapor deposition (:.) (=: Inside series "oxidized acid aqueous solution clear 2 physical" into the finished product of dry aluminum drop electrode; under the above conditions, therefore, the ratio of electrode thickness to electrode thickness is 2 Special requirements are not applicable to electrolytic capacitors; therefore, the electrode requirements and points of the 12-capacitor capacitors are eager to be modified _ such as red ^ ~ the various shortcomings of using the method, and finally successfully developed: this second "After careful research, Xingu wanted to use a different surface from the wet miner and the dry negative foil of the electric appliance to perform the surface shovel treatment: = dry physical method 'in the box table and got a stable expression f more , The efficiency of electron conduction, and those who are characteristic. The impact and change of external environment

第5頁 552601 __ 丨 "" _ 五、發明說明(3) 【發明目的. 一種鋁電解電容器乾式負極箔製造太、、 冷理,以it Μ利用乾式物理方法在鋁箔表面進行声法’其 處理^達到更高效率的電子傳導作用, 仃表面鍍層 電氣表面特性,而不受外在環】= 二::得到穩定的 步提升鋁電解電容器的品質者。 a 交特性,進一 本發明之-種銘電解電容器乾式 次一 2的係在降低鋁電解電容器適用的^造方法,其 及提咼該鋁電解電容器的負極箔材料矣、11、冶材料厚度、 元件輕、薄、短、小之要求者。,、面積,使有效達到 【技術内容】 如圖三所示,鋁電解電容器具備 容器元件1 ,和連接於該電容器元件—中所收納之電 箱體3之開口部予以彌封之封口元件之導$ 2 ,以及將 藉由使正極箔和負極箔間介有分離器 i電容器元件1係 線2包括連接於陽極箔片和陰極辖^回捲而形成;該導 導線2,該對導線2分別貫通封D元^各別=一端之一對 體3的外侧被拉出;其中鋁電解電=巧4之貫通孔而自箱 常為電解質,然而鋁電解電容器的;的負極箱材質通 552601 五、發明說明(4) 1 1 1 - CT c + C - CT :叙電解電容器總電容量 C + ··正極箔材質電容量 C - ··負極箔材質電容量 A C a — d C : 電容量 A : 導電層的面積 d ·· 介電層的厚度Page 5 552601 __ 丨 " " _ V. Description of the invention (3) [Objective of the invention. An aluminum electrolytic capacitor for the manufacture of dry negative foil, cooling, and it is used to perform acoustic method on the surface of aluminum foil by dry physical method ' Its treatment ^ achieves higher efficiency of electron conduction, and 仃 the surface of the electrical coating surface, without being affected by the external ring] = two :: get a stable step to improve the quality of aluminum electrolytic capacitors. a cross-characteristics of the dry type of the electrolytic capacitor of the present invention-the second method is to reduce the aluminum electrolytic capacitor manufacturing method, and to improve the anode foil material of the aluminum electrolytic capacitor, Light, thin, short and small components are required. , Area to make it effective [Technical content] As shown in Figure 3, the aluminum electrolytic capacitor is provided with a container element 1 and a sealing element connected to the opening of the electric box 3 housed in the capacitor element—the sealed element. The conductor 2 is formed by a separator 2 between the positive foil and the negative foil. The capacitor element 1 is connected to the anode foil and the cathode 2 and is rolled. The conductor 2 is the conductor 2 Through the seal D element ^ each = one side of one pair of body 3 is pulled out; of which aluminum electrolytic electricity = Qiao 4 through holes and the box is often the electrolyte, but aluminum electrolytic capacitors; the material of the negative box is 552601 V. Description of the invention (4) 1 1 1-CT c + C-CT: total capacitance of electrolytic capacitors C + ·· capacitance of positive foil material C-·· capacitance of negative foil material AC a — d C: capacitance A: Area of conductive layer d ·· Thickness of dielectric layer

其電氣特性要求如下: —,靜電容量(C):目前濕式電化學方法製造之A 電合里’依不同使用規格大致從90 //f/cm 2〜450 /^/(:^The requirements for its electrical characteristics are as follows: —, electrostatic capacity (C): The current A Electrochemical Lithium manufactured by the wet electrochemical method ’is approximately 90 // f / cm 2 ~ 450 / ^ / (: ^

電解質相容性高··一一與EG or GBL系列的電解 界面能右々\ ^ =兄物安定,並有效提高表面電子傳導的速率 向電氣穩定度:--目前濕式電化學方法製造之 -UL jjKji / ’由於鋁金屬箔對氧活性高,使表面極易產生 膜’而且因環境的不同而有不同的氧化膜狀態,High electrolyte compatibility. One by one with the electrolytic interface of EG or GBL series. ^ = Brother stability, and effectively improve the rate of surface electron conduction to electrical stability: --- -UL jjKji / 'Because the aluminum metal foil has high oxygen activity, it is easy to produce a film on the surface', and there are different oxide film states due to different environments,

第7頁 552601 五、發明說明(5) 容器的電氣特性因此而不夠穩定 低厚度(d ): 一一因為負榀% 士 n & ;,達到要求的電氣特性及傳導之功 越能達到輕薄短小的要求; 、 上,厚度是越低 如圖四、圖五所示 容器乾式_製造方*,有銘電解電 ^法,而是利用物理氣相沉積(PVD 、電化:的 原笛材料表面’連續式沉積鍵上適合的導\在適 品之導雷ί *面導電層不但比目前商業用 利;^ t a又冋而不衫響底材鋁原箔的機械性能,更有 引於電容器之捲繞製程,其處理流程如下: 艮有 a )前處理4 1 ,係利用氧化酸水溶液清除鋁原箔5 i ( 厚度:15 〜80 //m,純度:99· 0 %〜99. 9 % )油脂 表面的粗化; b )第一層氣相沉積處理4 2,係在該鋁原箔5 1上以控 制沉積速率(真空度>10-5torr、Ar、溫度>2000。〇)來 形成一層具有複數個孔洞5 2 1之厚度0· 1 〜3. 〇 βπι鈦金屬5 2 (Ti )或石墨(c)的導電層,以有效增 大其表面積,且有效地把電子傳導出來; c )第二層氣相沉積處理4 3,係在該鈦金屬5 2上以控 制沉積速率來形成一層厚度〇· 〇1 #„!〜〇· 5 的氮化鈦 5 3 ( T i N ),以避免負極箔產生氧化作用,而成為鋁Page 7 552601 V. Description of the invention (5) The electrical characteristics of the container are not stable enough due to its low thickness (d): one by one because of the negative 榀% ± n & Short requirements;, the lower the thickness is, as shown in Figures 4 and 5, the container is dry type_manufacturing method *, with the electrolysis method, but using physical vapor deposition (PVD, electrochemical: the original flute material surface ' The suitable guide on the continuous deposition key is the guide of the right product. The surface conductive layer is not only more profitable than the current commercial use; ^ ta, but also the mechanical properties of the original aluminum foil, which is more attractive to capacitors. The winding process includes the following steps: a) Pre-treatment 4 1, which uses aluminum oxide foil to remove 5 i (thickness: 15 ~ 80 // m, purity: 99 · 0% ~ 99. 9% ) Roughening the surface of grease; b) the first layer of vapor deposition treatment 4 2 is placed on the aluminum original foil 51 to control the deposition rate (vacuity > 10-5torr, Ar, temperature > 2000.) To form a layer having a plurality of holes 5 2 1 with a thickness of 0 · 1 to 3. 〇βπι titanium metal 5 2 (Ti) or graphite c) a conductive layer to effectively increase its surface area and conduct electrons effectively; c) a second layer of vapor deposition treatment 4 3, which is formed on the titanium metal 52 to control the deposition rate to form a layer thickness. · 〇1 # „! ~ 〇 · 5 of titanium nitride 5 3 (T i N) to prevent the negative electrode foil from oxidizing and become aluminum

552601 五、發明說明(6) 電解電容器用負極箔材料5者; 、一藉由上述乾式的負極箔製造方法,在鋁原箔5 1表面 n ^亍表面鍍層處理,即可避免使用大量的酸液之後的氧化 題’也由於不會產生氧化作用,相對使得鋁原箔5 1表 $的,氣特性(品質)穩定度提昇(即C _不會受外在環 ^的影響而改變特性),且由於利用物理氣相沉積(PVD ) 積3式’亦可在適當的鋁原箔5 1介電層表面,連續式沉 二ΐ上具有複數個孔洞5 2 1的導電層,同時可增大其有 表面積,藉以提高靜電容量者。 【特點及功效】 本發明所提供之銘電解電容器乾式負極笛製造方法, 一,、他習用技術相互比較時,更具有下列之優點: 1、 可提升電容器表面電氣的穩定性。 2、 可提高至少兩倍的靜電容量。 3、 可有效提高表面電子傳導速率。 4、 具工商界及產業界上利用價值。 唯以上所述者,僅為本發 不能以之限定本發明實施之範 利範圍所作之均等變化與修飾 之範圍内。 明之一較佳實施例而已,當 圍,即大凡依本發明申請專 ’皆應仍屬本發明專利涵蓋 綜上所述 本發明確實已達 到所欲增進之功效,此技552601 V. Description of the invention (6) 5 negative electrode foil materials for electrolytic capacitors; 1) By using the above-mentioned dry-type negative electrode foil manufacturing method, the surface of the aluminum primary foil 51 is coated with n ^ 亍 to avoid the use of a large amount of acid Since the oxidation problem after the liquid does not cause oxidation, the relative stability of the gas characteristics (quality) is improved because the aluminum foil is 51% (that is, C _ will not be changed by the external ring). Moreover, since the use of physical vapor deposition (PVD) product type 3 'can also be used on the surface of an appropriate aluminum original foil 51 1 dielectric layer, a continuous conductive layer with a plurality of holes 5 2 1 can be simultaneously added, Those who have a large surface area to increase the electrostatic capacity. [Features and effects] The method for manufacturing the dry type negative electrode flute for electrolytic capacitors provided by the present invention has the following advantages when compared with other conventional technologies: 1. It can improve the electrical stability of the capacitor surface. 2. It can increase the electrostatic capacity by at least twice. 3. It can effectively improve the surface electron conduction rate. 4, with industrial and commercial and industrial use value. However, the above are only within the scope of equal changes and modifications made by the present invention which cannot limit the scope of implementation of the present invention. This is only one of the preferred embodiments of the present invention. In the context, that is, anyone who applies for the invention according to the present invention should still be covered by the present invention. In summary, the present invention has indeed achieved the desired effect.

第9頁 552601 五、發明說明(7) 術思想具為高度之發明,並將目前油壓系統之大誤差完全 予以摒除,除了具有產業利用性、並備有他人未曾思及之 發明;再者,本發明申請前未曾公開、且已達其功效,其 所具之進步性、發明性,顯已符合發明專利之申請要件, 爰依法提出發明申請。Page 9 552601 V. Description of the invention (7) The invention of technology is highly advanced, and the large errors of the current oil pressure system are completely eliminated, except for those that have industrial applicability and have inventions that have not been considered by others; The invention has not been disclosed before the application of the invention, and its effectiveness has been achieved. Its progressiveness and inventiveness obviously meet the application requirements of the invention patent, and the invention application is filed according to law.

第10頁 552601 圖式簡單說明 【圖示說明】 第一圖係習用鋁電解電容器陰極箔製造方法之流程示意圖 〇 第二圖係習用電池負極材料之乾式製造方法之流程示意圖 0 第三圖係鋁電解電容器之正面的斷面圖。 第四圖係本發明負極箔製造方法之流程示意圖。 第五圖係本發明負極箔之製程剖面圖。 【圖號說明】 1 ··電容器元件 2 · ·導線 3 · ·箱體 4 · ·封口元件 4 1 · ·前處理 42·•第一層氣相沉積處理 4 3 ··第二層氣相沉積處理 5 ··負極箔材料 5 1 · ·銘原f白 521·•孔洞 5 2 . ·欽金屬 5 3 · ·氮化鈦Page 10 552601 Brief description of the drawings [Illustration] The first diagram is a schematic diagram of the manufacturing method of a conventional aluminum electrolytic capacitor cathode foil. The second diagram is a schematic diagram of the dry manufacturing method of a conventional battery anode material. The third diagram is aluminum Sectional view of the front side of an electrolytic capacitor. The fourth diagram is a schematic flowchart of a method for manufacturing a negative electrode foil according to the present invention. The fifth figure is a cross-sectional view of the manufacturing process of the negative electrode foil of the present invention. [Illustration of drawing number] 1 ·· Capacitor element 2 · · Lead 3 · · Box 4 · · Sealing element 4 1 · · Pre-treatment 42 · · First layer of vapor deposition 4 4 · · Second layer of vapor deposition Treatment 5 ·· Negative electrode foil material 5 1 ·· Mingyuan f white 521 ·· Hole 5 2. · Chin metal 5 3 ·· Titanium nitride

Claims (1)

552601 々、申請專利範圍 1、一 物理氣相沉 積鍍上導電 理流程如下 (a )前處理 粗化; =2 :解電容器乾式負極箔製造方法,係利用 、、 式’在適當的紹箔材料表面,逵續式沉 層,以提昇鋁箔表面的電氣特性穩定度,、其處 ,係利用氧化酸水溶液清除鋁原箔油脂表面的 (b )第一層 率(真 厚度0. ,以增 (Ο第二 層 率來形 ,而成 氣相沉積處理,係在該鋁原箱上以控制沉積速 空度>10〜5t〇rr、Ar、溫度>2000。〇來形成一層 l//m〜3·〇#πι的鈦金屬(Ti)或石墨(〇導電層 大有效面積者; 氣相沉積處理,係在該鈦金屬上以控制沉積速 成一層厚度0.01/ΖΠ1〜0.5#m的氮化鈦(TiN) 為紹電解電容器用負極箔材料者。 乾式負極ΐ專利申請範圍第1項所述之一種鋁電解電容器 、难製造方法,其中該導電層具有複數個孔洞者了552601 申请, application scope of patent 1, a physical vapor deposition plating conductive process is as follows (a) roughening pre-treatment; = 2: solution capacitor dry-type negative electrode foil manufacturing method, using the "," type in the appropriate foil material Surface, continuous sink layer to improve the stability of the electrical characteristics of the aluminum foil surface, where it is the use of an oxidizing acid aqueous solution to remove the surface of the aluminum original foil grease (b) the first layer rate (true thickness 0., to increase ( 〇 The second layer rate is formed to form a vapor deposition process, which is formed on the aluminum original box to control the deposition velocity and space velocity > 10 ~ 5t〇rr, Ar, temperature > 2000. m ~ 3 · 〇 # πι titanium metal (Ti) or graphite (〇 conductive layer with a large effective area; vapor deposition process, is deposited on the titanium metal to control the deposition rate of a layer of 0.01 / ZΠ1 ~ 0.5 # m of nitrogen Titanium oxide (TiN) is a material for a negative electrode foil for electrolytic capacitors. An aluminum electrolytic capacitor described in item 1 of the patent application scope of dry-type negative electrodes, a difficult-to-manufacture method, in which the conductive layer has a plurality of holes 第12頁Page 12
TW91112947A 2002-06-13 2002-06-13 Method to manufacture dry negative foil of Aluminum electrolyte capacitor TW552601B (en)

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