552394 五、發明說明（1) 〔發明所屬技術領域〕 本發明係關於連續燒成爐（亦有稱爲徐冷爐），特別是 有關於其連續燒成爐之徐冷區域，係燒成包含玻璃基板 的平板狀工作件（例如，電漿顯示面板）及進行繼續於此 的徐冷。 〔先前之技術〕 於包含玻璃基板的電漿顯示面板等之工作件，在熱處 理中產生歪曲時就成爲顯示裝置之歪曲，故以規定之溫 度條件加熱後，特別的要求按照規定溫度型態以均勻溫 度分布予以徐冷工作件。爲了獲得規定之溫度形態將於 徐冷區域進行冷卻在燒成區域所加熱的工作件。於專利 文獻1，揭示有爲了徐冷，從設在沿爐本體頂壁之爐寬 方向延伸導入管的吹出噴嘴，及設在側壁的噴嘴吹進冷 卻空氣於爐內。 〔專利文獻1〕 日本國特開2 0 0 1 - 1 4 7 0 8 3號公報。 〔發明欲解決的課題〕 在專利文獻1著，因將冷卻空氣從設於沿天花板之爐 寬方向延伸的導入管吹出噴嘴，及設在側壁的噴嘴吹出 ，故因應於工作件或組合處理條件之變動，未能柔軟地 調整爐寬方向之冷卻能力，欲獲得均勻的工作件之爐寬 方向溫度分布，有極爲困難的問題。又，直接導入冷卻 空氣於爐內，故欲防止塵埃之混入爐內或污染工作件， 要使用淸潔空氣作爲冷卻空氣，同時爲了確保冷卻能力需 552394 五、發明說明（2) 要予大量淸潔空氣流。有運轉成本高的問題。 本發明之目的在於提供連續燒成爐，能對應於種種之 溫度型態，而且未以淸潔空氣能夠使用通常空氣，可以 抑制於低運轉成本。 〔爲了解決課題之手段及發明效果〕 依本發明的連續燒成爐，係沿爐本體內之工作件搬運 方向設置燒成區域及徐冷區域，其特徵爲，於徐冷區域 ，爐寬中央部具有冷卻能高於兩側部的間接空冷裝置係 平行地設置於工作件搬運面者。 依本發明之連續燒成爐，由爐寬中央部具有冷卻能高 於兩側部的間接空冷裝置工作件，故確實地進行冷卻不 易冷卻的工作件中央部，確保於軸方向均勻的溫度分布 。而且由於作成爲間接之空冷裝置，能使用非淸潔的通 常空氣，可抑制於低運轉成本。 用來徐冷燒成後工作件之徐冷區域有複數，而作爲上 述之構成的徐冷區域，亦可爲所有的冷卻區域，又亦可 爲一部分區域。搭載在安裝器的工作件可爲1段或多段 ，但多段裝載時有上段之工作件不易冷卻的傾向，而成 爲更有效果者。雖爲1段裝載者而上下方向具有層構造 或裝配構造之工作件時，有上側之溫度不易降下的傾向 ，能獲得與多段裝載時同樣效果。 作爲爐寬中央部具有冷卻能高於兩側部的間接空冷裝 置，例如，具有設在爐本體頂壁之寬中央部的冷卻管陣 列，及分別設於爐本體頂壁兩側部的箱型冷卻器者即可 552394 五、發明說明（3) 。冷卻管爲不銹鋼等之耐熱鋼管’並由於配置爲並排複 數之冷卻管且直接露出於爐內，可以增大管內之冷卻氣 體流量，及與爐內的傳熱面積。側部比中央部，不要求 高於冷卻能，因爲，將側部之間接空冷裝置，作爲在不 銹鋼等之耐熱鋼板之箱內部流動冷卻空氣的箱型冷卻器 ，而能夠作適當的冷卻，亦可以抑制成本。間接冷卻裝 置並不限定於此組合者，只要是爐寬中央部具有冷卻能 高於兩側部者，就能採用種種之構成者。例如作成中央 部及兩側部爲同樣形式之冷卻器（冷卻管陣列或箱型冷 卻器），亦可藉通路數、及流於各通路的風量、以及在 通路有無配置散熱片等方式，而成爲不同者。 間接空冷裝置爲設置在爐本體之頂壁寬中央部的冷卻 管陣列時，其冷卻管之軸方向爲沿著搬運方向者爲理想 。如此作成爲，則能夠強性地控制爐寬方向之溫度。 將間接空冷裝置設置在爐本體之頂壁時，設置加熱裝 置於爐本體之底壁。與此相反，亦即設置間接空冷裝置 在爐本體之底壁，同時設置加熱裝置於爐壁之頂壁亦可 以。理想者爲將加熱裝置設於爐本體之底壁。由於倂用 冷卻裝置及加熱裝置，可滿足所要之溫度形態，且能確 實地實現溫度均勻地在分布爐寬方向。 〔發明之實施形態〕 以下參照圖面說明本發明實施之形態。於以下之說明 第1圖之左右稱爲左右，第1圖之紙面表側、第2圖之 下及第3圖之左分別稱爲後，第1圖之紙面背側，第2 552394 五、發明說明（4) 圖之上及第3圖之右分別稱爲前者。 第1圖及第2圖表示連續燒成爐之徐冷區域，連續燒 成爐之徐冷區域（1)具備有：爐本體（2)、底壁（2a)、頂壁 (2b)及左右側壁（2c);搬運裝置（3)於爐本體（2)內搬運載 量工作件（w)的安裝器（4)於前後方向；中央部冷卻裝置 (5) ，設於爐本體（2)之頂壁（2b)寬中央部；測部冷卻裝置 (6) ，設於爐本體（2)之頂壁（2b)左右側部；以及加熱裝置 (7) ，設於爐本體（2)之底壁（2a)。 爐本體（2)之底壁（2a)及左右側壁（2c)係內貼耐熱玻璃 等之防麈壁。在爐本體（2)沿著前後方向（長度方向）設置 複數之區域（長度方向之溫度控制單位）。集複數之溫度 控制單位，分別予以構成預燒成區間、燒成區間及徐冷 區間。第3圖係表示該連續燒成爐之區域構成，能夠設 定的溫度形態之一例者。表示在圖上的區域構成，係施 予斜線的1個四角對應於1個區域（Z)。而在本側，工 作件（W)係預熱工作件（W)至規定溫度（例如400°C )用來 進行脫黏合劑等處理之預燒之區間（S 1 )，繼續於其再將 工作件（W)加熱至高溫度（例如600°C )經過爲了進行本燒 成之燒成區間（S2)後，於徐冷區間（S3)以規定之比率於 1分鐘徐徐地冷卻。 爐本體（2)內係以成左右對稱地3分割寬方向，作成左 側部及右側部爲同構成。 各冷卻裝置（5)(6)非爲直接吹予空氣者’由與作爲流 通於設在冷卻裝置（5)(6)通路內的空氣之熱交換，作成 552394 五、發明說明（5) 爲冷卻爐本體（2)內的間接冷卻裝置。而爐寬中央部之中 央部冷卻裝置（5)，乃爲了確保高冷卻能由不銹鋼等之耐 熱鋼管所成，且延伸於長度方向的複數水平冷卻管（5 a) ，作爲在寬方向隔以規定間隔配置的冷卻管陣列，側部 冷卻裝置（6)係由在不銹鋼等之耐熱鋼板所成箱之內部， 由流冷卻空氣的箱型冷卻器（6a)形成。中央部冷卻裝置 (5)係直接露出複數之冷卻管（5a)於爐本體（2)內，作成能 取大的管內冷卻氣體之流量及傳熱面積之構造者。側部 冷卻裝置（6)，係作成相對於箱型冷卻器（6a)之工作件（W) 下面爲傳熱面，與全面作爲傳熱面的冷卻管（5a)比較， 相對地冷卻能不好。中央部冷卻裝置（5)，左側部冷卻裝 置（6)及右側部冷卻裝置（6)，係作成分別互相能夠獨立 地調整者。 在中央冷卻裝置（5)之前後端，設置有入口側岐管（8) 及出口側岐管（9)，藉由此岐管（8)(9)連通垂直狀入口管 (10)及出口管（11)與所有之並排狀冷卻管（5 a)。對入口管 (10)係依鼓風機及配管等所成空氣供給裝置（12)，供給 有通常之空氣。對箱型冷卻器（6a)，係從與供給於入口 管（1 〇)同樣空氣源藉由具阻尼器或調整閥的配置，供給 冷卻用空氣。欲供給空氣於各冷卻裝置（5)(6)，係以加 壓或吸收之任一都可以。而對各冷卻裝置（5)(6)之空氣 供給裝置’係省略鼓風機或阻尼器等亦爲僅供給空氣於 配管者，或是，由變流器等以能夠調整空氣流量者亦可 以，並不限定於其構成者。又，當然亦可使入口與出口 552394 五、發明說明（6) 爲逆配置者。 加熱裝置（7) ’係於寬方向具有配置爲規定間隔的複數 (例如4個）之面狀加熱器（7a)，並由此，作成於寬方向 能夠調整輸出。 1個徐冷區域，亦即屬於徐冷區間的長度方向之溫度 控制單位，係於搬運方向，持規定之長度（第3圖以L 表示），中央部冷卻裝置（5)係典型上，在每一此長度設 置2個。亦即，在1個徐冷區域沿搬運方向設置1個中 央部冷卻裝置（5)。對於左右之側部冷卻裝置（6)亦爲同 樣者。並由此，不但是爐寬方向，沿搬運方向其工作件 (W)之均勻的溫度分布亦成爲更容易確保者。而且小型 化冷卻裝置（5)(6)，亦具有容易處理的優點。加熱裝置 (7)亦在每一長度設置在2個。 依上述連續燒成爐，工作件（W)係於燒成區間由設在 底壁及頂壁的加熱器，由於自上下兩面加熱受到規定之 燒成處理後，搬運於徐冷區間。在徐冷區間爲了獲致規 定之溫度形態，同時與由加熱裝置（7)的加熱從燒成區間 以工作件（W)及安裝器（4)帶進的熱，由冷卻裝置（5)(6) 施予用來解熱的冷卻。並由此，工作件（W)就隨著如第 3圖所示的溫度形態遍及前後方向及左右方向全體，受 到均勻的處理後搬運至冷卻區域。 又，加熱裝置（7)不一定要設置徐冷區間在所有之徐冷 區域，以能獲得規定之溫度形態地，亦可以適宜選擇設 置加熱裝置的徐冷區域。無論如何，依本發明之構成， 552394 五、發明說明（7) 亦對 應 於 處理條件或工作件種類之變動，可以確實地 發 現滿 足 了 所要之溫度形態而且均勻的溫度分布於爐寬 方 向。 又 於 上 述方向實施形態，係表示3分割於寬方向的 例 子， 但 是 並不限定於此者，因應於必要再細分化各部 ， 也能 夠 在 全體上4分割或5分割於寬方向。又，分割 1 個區 域 內 之搬運方向亦不限定在2分割，亦可分割爲 3 以上 又 不分割亦可以。又，在中央部及側部冷卻裝 置 (5)(6)之爐外側，因應於必要亦可設置絕熱外屬。 〔圖 式 之 簡單說明〕 第 1 圖 係本發明的連續燒成爐之垂直橫剖面圖。 第 2 圖 依本發明的連續燒成爐之冷卻裝置平視圖£ 5 第 3 圖 依本發明的連續燒成爐之區域構成，及表示 所得 溫 度 形態之一例圖。 〔符 號 說 明〕 元件 號 數 2 爐本體 2a 底壁 2b 頂壁 5 中央部冷卻裝置（間接空冷裝置） 5a 冷卻管 6 側部冷卻裝置（間接空冷裝置）. W 工作件 -9-552394 V. Description of the invention (1) [Technical Field of the Invention] The present invention relates to a continuous firing furnace (also known as a Xu cold furnace), and particularly to a Xu cold region of the continuous firing furnace. Plate-shaped work pieces (for example, plasma display panels) and the spin-cooling that continues here. [Previous technology] Workpieces such as plasma display panels including glass substrates become distorted when they are distorted during heat treatment. Therefore, after heating under specified temperature conditions, special requirements are required according to the specified temperature profile. The uniform temperature distribution is used to cool the work piece. In order to obtain a predetermined temperature profile, the work piece heated in the firing area will be cooled in the Xu cold area. Patent Document 1 discloses that cooling air is blown into the furnace from a blowing nozzle provided in an introduction pipe extending in the width direction of the furnace along the top wall of the furnace body, and a nozzle provided on the side wall for cooling. [Patent Document 1] Japanese Unexamined Patent Publication No. 2 0 1-1 4 7 0 8 [Problems to be Solved by the Invention] In Patent Document 1, cooling air is blown out from a nozzle provided on an inlet pipe extending in a width direction of a ceiling and a nozzle provided on a side wall, so it depends on a work piece or a combination of processing conditions. The change cannot change the cooling capacity in the furnace width direction softly, and it is extremely difficult to obtain a uniform temperature distribution in the furnace width direction of the work piece. In addition, the cooling air is directly introduced into the furnace. Therefore, in order to prevent dust from being mixed into the furnace or contaminating work pieces, clean air is used as cooling air. In order to ensure cooling capacity, 552394 is required. 5. Description of the invention (2) A large amount is required. Clean air flow. There is a problem of high running cost. An object of the present invention is to provide a continuous firing furnace which can respond to various temperature patterns, and that ordinary air can be used without clean air, which can suppress low operating costs. [Means for solving problems and effects of the invention] The continuous firing furnace according to the present invention is provided with a firing area and a Xu cold area along the conveying direction of the work pieces in the furnace body. It is characterized by being located in the Xu cold area and the center of the furnace width. The indirect air-cooling device having a cooling energy higher than both sides is provided in parallel on the work piece conveying surface. According to the continuous firing furnace of the present invention, the central part of the furnace width has indirect air-cooling device working parts whose cooling energy is higher than that of the two sides, so the central part of the working part which is difficult to cool is surely cooled, ensuring uniform temperature distribution in the axial direction . Furthermore, since it is an indirect air-cooling device, non-clean ordinary air can be used, and low operating costs can be suppressed. There are a plurality of Xu-cooling areas used for the work after the Xu-cooling firing, and the Xu-cooling area constituted as described above may be all the cooling areas or part of the areas. The work piece mounted on the installer can be one or more pieces, but the work piece in the upper section tends to be difficult to cool during multi-stage loading, making it more effective. Although it is a one-stage loader and the work piece has a layer structure or an assembly structure in the up-down direction, the temperature on the upper side tends not to be lowered easily, and the same effect as in the case of multi-stage loading can be obtained. As an indirect air-cooling device having a cooling energy higher than both sides of the furnace center, for example, a cooling tube array provided at a wide center portion of the furnace body top wall, and a box type provided at both sides of the furnace body top wall The cooler can be 552394 V. Description of the invention (3). The cooling pipe is a heat-resistant steel pipe such as stainless steel, and since a plurality of cooling pipes are arranged side by side and directly exposed in the furnace, the cooling gas flow in the pipe and the heat transfer area in the furnace can be increased. The side part is not required to have higher cooling energy than the center part, because an air cooling device is connected between the side parts as a box-type cooler for cooling air flowing in the box of a heat-resistant steel plate such as stainless steel, and can be appropriately cooled. Costs can be suppressed. The indirect cooling device is not limited to this combination, as long as the central part of the furnace width has a cooling energy higher than that of both sides, various components can be used. For example, the same type of cooler (cooling tube array or box-type cooler) can be made at the center and both sides. The number of channels, the amount of air flowing through each channel, and the presence or absence of heat sinks in the channels can be used. Be different. When the indirect air-cooling device is an array of cooling tubes provided at the wide central portion of the top wall of the furnace body, the axial direction of the cooling tubes is preferably along the conveying direction. By doing so, the temperature in the furnace width direction can be strongly controlled. When the indirect air cooling device is installed on the top wall of the furnace body, the heating device is installed on the bottom wall of the furnace body. In contrast, it is also possible to provide an indirect air cooling device on the bottom wall of the furnace body and a heating device on the top wall of the furnace wall. Ideally, the heating device is provided on the bottom wall of the furnace body. Thanks to the use of a cooling device and a heating device, the required temperature profile can be met, and the temperature can be evenly distributed in the width direction of the distribution furnace. [Embodiments of the invention] Embodiments of the invention will be described below with reference to the drawings. In the following description, the left and right sides of the first figure are referred to as left and right, the front side of the paper face of the first figure, the bottom of the second figure, and the left side of the third figure are referred to as the rear, the back side of the first figure, 2 552394 Explanation (4) Above the figure and right of the third figure are called the former. Figures 1 and 2 show the cooling area of the continuous firing furnace. The cooling area (1) of the continuous firing furnace includes: the furnace body (2), the bottom wall (2a), the top wall (2b) and the left Side wall (2c); a carrying device (3) in the furnace body (2), a mounting device (4) for carrying a load-bearing work piece (w) in the front-rear direction; a central cooling device (5) provided in the furnace body (2) The top wall (2b) has a wide central part; the cooling device (6) for the measurement part is provided on the left and right sides of the top wall (2b) of the furnace body (2); and the heating device (7) is provided for the furnace body (2). Bottom wall (2a). The bottom wall (2a) and the left and right side walls (2c) of the furnace body (2) are screed-proof walls with heat-resistant glass and the like inside. A plurality of regions (length-wise temperature control units) are provided in the furnace body (2) along the front-rear direction (length-direction). A plurality of temperature control units are respectively composed of a pre-firing interval, a firing interval and a cold cooling interval. Fig. 3 shows an example of the temperature configuration of the continuous firing furnace which can be set. The area structure shown in the figure is such that one corner of the diagonal line corresponds to one area (Z). On this side, the work piece (W) is the pre-burned section (S 1) that preheats the work piece (W) to a predetermined temperature (for example, 400 ° C) for debonding and other treatments. The work piece (W) is heated to a high temperature (for example, 600 ° C), and after passing through the firing section (S2) for the present firing, it is slowly cooled in the cool section (S3) at a predetermined ratio for 1 minute. The inside of the furnace body (2) is symmetrically divided into three directions in the width direction, and the left and right sides have the same structure. Each cooling device (5) (6) is not directly blown to the air 'by heat exchange with the air flowing in the passage provided in the cooling device (5) (6), and it is made 552394. 5. Description of the invention (5) is Indirect cooling device in the cooling furnace body (2). The central cooling device (5) in the middle of the furnace width is to ensure that high cooling energy can be made of stainless steel and other heat-resistant steel pipes, and a plurality of horizontal cooling pipes (5 a) extending in the longitudinal direction are used as a partition in the wide direction. In the array of cooling tubes arranged at predetermined intervals, the side cooling device (6) is formed by a box-type cooler (6a) inside the box made of heat-resistant steel plate such as stainless steel and flowing cooling air. The central part cooling device (5) is a structure that directly exposes a plurality of cooling tubes (5a) in the furnace body (2) and can take a large flow of cooling gas in the tube and a heat transfer area. The side cooling device (6) is made relative to the work piece (W) of the box-type cooler (6a). The heat transfer surface is below. Compared with the cooling pipe (5a), which is the heat transfer surface, the cooling energy is relatively lower. it is good. The central cooling device (5), the left cooling device (6) and the right cooling device (6) are designed to be independently adjustable from each other. An inlet-side manifold (8) and an outlet-side manifold (9) are provided at the front and rear ends of the central cooling device (5), and the vertical inlet pipe (10) and the outlet are communicated through the manifold (8) (9). The tube (11) and all the cooling tubes (5a) are arranged side by side. The inlet pipe (10) is an air supply device (12) formed by a blower, a piping, etc., and supplies normal air. The box-type cooler (6a) is supplied with cooling air from an air source similar to that supplied to the inlet pipe (10) through an arrangement with a damper or a regulating valve. To supply air to each of the cooling devices (5) (6), either pressurization or absorption can be used. The air supply devices for each cooling device (5) (6) are those that omit the blower or damper and also only supply air to the piping, or those that can adjust the air flow by a converter or the like, and Not limited to its constituents. In addition, of course, the entrance and exit can be made 552394 V. Description of the invention (6) is reversed. The heating device (7) 'is a planar heater (7a) having a plurality (e.g., four) of planar heaters arranged at predetermined intervals in the width direction, and the output can be adjusted in the width direction. 1 Xu cold area, which is the temperature control unit in the longitudinal direction of the Xu cold section, is in the transport direction and has a predetermined length (shown as L in Figure 3). The central cooling device (5) is typically Set 2 for each length. That is, one central cooling device (5) is provided in one slow cooling area along the conveying direction. The same applies to the left and right side cooling devices (6). As a result, not only the furnace width direction, but also the uniform temperature distribution of the work piece (W) in the conveying direction becomes easier to ensure. In addition, the miniaturized cooling devices (5) and (6) also have the advantage of being easy to handle. Heating devices (7) are also provided in two at each length. According to the continuous firing furnace described above, the work piece (W) is connected to the bottom wall and the top wall by the heaters in the firing section. After heating from the upper and lower sides, the workpiece is subjected to a predetermined firing treatment, and then transported in the Xu cold section. In order to obtain a predetermined temperature profile in the Xu-cooling section, the heating device (7) and the heat brought in by the work piece (W) and the installer (4) from the firing section are heated by the cooling device (5) (6). ) Apply cooling to defuse heat. As a result, the work piece (W) is uniformly processed throughout the front-rear direction and the left-right direction according to the temperature profile shown in FIG. 3, and is then transported to the cooling area after uniform processing. In addition, the heating device (7) does not necessarily need to set the cooling zone in all the cooling zones so as to obtain a predetermined temperature profile, and may also appropriately select the cooling zone of the heating device. In any case, according to the composition of the present invention, 552394 V. Description of the invention (7) also responds to changes in processing conditions or types of work pieces, and it can be surely found that the desired temperature form is satisfied and the uniform temperature distribution is in the width direction of the furnace. In the above-mentioned direction, the embodiment is an example of 3 divisions in the width direction, but it is not limited to this. As necessary, the division can be further divided into 4 divisions or 5 divisions in the width direction. In addition, the transportation direction in one area is not limited to two, and it can be divided into three or more without division. In addition, if necessary, heat-insulated external members may be provided outside the furnace of the central and side cooling devices (5) and (6). [Brief Description of the Drawings] Fig. 1 is a vertical cross-sectional view of the continuous firing furnace of the present invention. FIG. 2 is a plan view of the cooling device of the continuous firing furnace according to the present invention. FIG. 3 is a diagram showing an example of the structure of the area of the continuous firing furnace according to the present invention and the obtained temperature form. [Description of Symbols] Component No. 2 Furnace body 2a Bottom wall 2b Top wall 5 Central cooling device (indirect air cooling device) 5a Cooling tube 6 Side cooling device (indirect air cooling device). W Workpiece -9-