TW552155B - Y-shaped filtering device - Google Patents

Abstract

This invention provides a Y-shaped filtering device. The Y-shaped filtering device comprises an elongated conduit for connecting to a fluidic system, such as a wet purging device or coolant system used in a semiconductor industry; a typical conical filter housing, extending from the elongated conduit in an angle relation with respect to the elongated conduit; a typical removable conical filter, received in the filter housing; and a release valve provided at an end of the filter housing for periodically discharging particles from the filter.

Description

552155 V. Description of the invention (1) Field of the invention: The present invention relates to a y-shaped filter device, particularly a y-type filter and device (Automatic Flush y Strainer) that can be automatically flushed. Background of the invention: Y-shaped filter devices are used in systems that require waste filtering, such as wet scrubbers in conventional exhaust gas treatment systems or conventional cooling water systems. Filter waste. For the sake of explanation, please refer to FIG. 1A and FIG. 1B, respectively, which are schematic diagrams of a system architecture of a wet scrubber of a conventional exhaust gas treatment system having a y-shaped filtering device, and a conventional cooling water having a y-shaped filtering device. The system architecture diagram of the system. As for the structural schematic diagram of the conventional y-shaped filter device used in the above wet scrubber and cooling water system, please refer to the figure as shown in FIG. 1A. The wet scrubber in the conventional exhaust gas treatment system mainly includes a Washing tower 1 0 0, a pump 1 0 2, a y-shaped filter device 1 0 4, a drain pipe 1 0 6, a return pipe 10 6 ′, a plurality of nozzles 108 and a water collecting tank 1 0 9. The process of the waste gas treatment operation is mainly as follows: · After the waste gas to be treated enters the washing tower 100 through the air inlet (as shown by the thick arrow a), a plurality of

552155 V. Description of the invention (2) '~~ —, the nozzle 108 starts to spray water to clean the exhaust gas in the washing tower 100, and the washing medium / spoon &c; c gas becomes clean gas after being cleaned, and Flow out through the orifice to the outside of the washing tower 100 (as shown by the thick arrow b). : After the exhaust gas in the above-mentioned washing I ^ 100 is hit by the water sprayed from the nozzle 108, the waste will be generated and dropped into the water collecting tank 109 located below the washing tower. 'Er 2 will drive the water flow in the water drain line 1 0 6 to transport the waste in the water collecting tank i 0 9 through the U-shaped filter device 104 (as shown in the thin' head c '). The Na filter device 104 has the function of filtering waste, and the waste is left in it. As for the water flowing into the waste, it is driven by the pump 102 through the return pipe 106. Two aterretur η 1 ine) flow to the plurality of nozzles} 〇8 (as indicated by the thin arrow), for recycling to the plurality of nozzles 108 and re-watering. As shown in FIG. 1B, the conventional cooling water system mainly includes a cooling chamber 120, a pump 122, a Υ-shaped filter device 124, a drain pipe 126, a heat exchanger, 128, a return pipe 126, and A collection sink 129. The main tasks of the cooling water are as follows: Pump i 2 2 drives the drain pipe 1 2 6 into the heat exchanger 1 28 (such as a thin arrow ^ ^ water after heat exchange treatment 'head and heat exchanger The inside of 128 will be driven by pump 122, and = will rise Λ, and the higher temperature water flow 128 (eg, thin arrow: dry) is cooled by Λ 2 heat sink 130 The higher temperature water flow in the heat sink in the chamber 120 is as follows: 22, 6), at this time the heat sink 130 130, and since the cooling chamber m =: use: to transfer heat to the air outside the heat sink v Air holes enter the cooling chamber 1 2 〇

Page 5 552155 V. Description of the invention (3) (as shown by thick arrow a) and blown to the heat sink 1 3 0 due to the rotation of the fan 1 32 in the cooling chamber 1 2 0, so the heat sink 1 3 0 The heat absorbed by the higher temperature water flow will flow out of the cooling chamber 1 2 0 through the air outlet as the fan 1 2 2 rotates (as shown by the thick arrow b). Therefore, the water flow from the heat sink 130 has become cold water (because part of the heat of the higher temperature water stream is transferred to the heat sink 1 3 0 through heat conduction, and the heat sink 1 30 is obtained from the higher temperature water stream. The heat is also taken out of the cooling chamber 12 (as the fan 1 32 rotates), and the cold water can flow into the water collecting tank 129 and be introduced into the heat exchanger 128 through the return pipe 126 '. However, since the outside air entering the cooling chamber 120 may contain waste, or debris may fall off from the heat sink 130, the cold water flowing from the heat sink 130 may contain waste, so the heat sink Before entering the heat exchanger 1 2 8, the cold water flowing out at 130 needs to be introduced into the y-shaped filter device 1 2 4 through the drainage pipe 1 2 6. At this time, the y-shaped filter device 1 2 4 is used to filter waste. Function of the product, leaving waste in it.

As shown in FIG. 2, the conventional y-shaped filtering device 2 0 0 mainly includes: a y-shaped hollow body 2 0 1 and a typical cylindrical filter 2 0 8, wherein the y-shaped hollow body 2 0 1 is composed of a substantially cylinder The filter housing 202 is composed of an elongated tube 2 0 4, and two ends of the elongated tube 2 0 4 are equipped with end flanges 2 2 0, which are respectively used for the Y-shaped filtering device. 2 0 0 The drain pipe 10 6 and the return pipe 10 6 ′ connected to the wet scrubber shown in FIG. 1A or FIG. 1 B

552155 V. The drain pipe 1 2 6 and the return pipe 1 2 6 ′ of the cooling water system shown in the description of the invention (4), the filter housing 2 0 2 is angled from the extended duct 2 0 4, and The filter 208 is housed in the filter housing 202 and extends into the elongated duct 204 so as to filter and flow the water flow through the elongated duct 204 to make waste particles in the stream (not shown) ) Is blocked from accumulating in the filter 2 0; a cap 2 0 6 is disposed on the filter housing 2 0 2 and is periodically removed to facilitate the removal of the waste in the filter 2 0 8 Particles (not shown). Although the conventional y-shaped filter device 200 shown in FIG. 2 can be installed in a system requiring transitional waste (such as the system described in FIG. 1A and FIG. 1B), the filtration exists in The purpose of the waste in the system, but unfortunately, the conventional y-shaped filter device 200 can easily cause the following defects: (1) The conventional y-shaped filter device installed in the system shown in FIG. 1A The filter is generally fixed in the filter housing 202, so that it is extremely difficult to completely remove the waste particles in the filter housing 202, and the filter often has residual waste. Therefore, the subsequent waste removal efficiency is reduced and the load of air pollution in the system shown in FIG. 1A is increased. In addition, when cleaning filters and filters, the system must be shut down to remove obstructions, which interrupts production and causes system operating costs. Incrementally. The B1 diagram of the Central System of the Institute is shown in the installation \) / 2 The system of the external system of the filter system in the middle of the filter shape y plugged by the air blocker was dropped by the easy heat of the containment tank. In the device, the tower of the cold system is still abandoning the low-waste land.

552155 V. Description of the invention (5) Heat exchange efficiency and water flow into the heat exchanger. In addition, when the filter is cleaned, the system must be shut down to remove obstructions. This will cause production interruption and increase system operating costs. Therefore, how to solve the above problems becomes very important. Purpose and summary of the invention: The main object of the present invention is to propose a y-shaped filter device which can be automatically washed, so as to spray the waste that causes the y-shaped filter device to pile up and block out of the y-shaped filter device by the spraying principle of water column. In order to achieve the purpose of easily and quickly removing the accumulated obstruction of the filter in the y-shaped filter device without shutting down the equipment or system having the y-shaped filter device in operation. The present invention proposes an auto-washable y-shaped filter device, wherein the y-shaped filter device includes at least: an elongated tube connected to a liquid flow system, such as a wet scrubber or cooling water used in semiconductor manufacturing System; a typical conical filter housing extending from the elongated conduit in a direction of rotation relative to a longitudinal axis of the elongate conduit; a typical removable conical filter housed in the filter housing Inside; and a drain valve device, which is provided on one end of the filter housing for periodically discharging particulate matter from the filter.

552155 V. Description of the invention (6) The present invention also provides a wet scrubber. The drain pipe of the wet scrubber is equipped with the y-shaped filter device of the present invention which can be automatically washed. Wherein, liquid pressure monitors may be provided at both ends of the y-shaped filter device to monitor the pressure of the liquid flowing into and out of the y-shaped filter device. When the liquid pressure of the y-shaped filter device gradually increases, it means that the particulate matter in the filter of the y-shaped filter device has accumulated excessively and needs to be removed. A power supply and a controller can be connected to the pressure monitors and the drain valve device of the y-shaped filter device in order to respond to the increasing liquid pressure and automatically control the filter's flushing operation. Furthermore, the present invention further provides a cooling water system. The drain pipe of the cooling water system is equipped with the y-shaped filter device of the present invention which can be automatically washed. Wherein, liquid pressure monitors may be provided at both ends of the y-shaped filtering device to monitor the pressure of the liquid flowing into and out of the y-shaped filtering device. When the liquid pressure of the y-shaped filter device is gradually increasing, it means that the particulate matter in the filter of the y-shaped filter device has accumulated excessively and needs to be removed. A power supply and a controller may be connected to the pressure monitors and the drain valve device of the y-shaped filter device in order to automatically control the flushing operation of the filter in response to the increasing liquid pressure. Detailed description of the invention: The present invention provides a Y-shaped filter device capable of automatic washing, which is

552155 V. Description of the invention (7) Used in systems that require waste filtering, such as in wet scrubbers of exhaust gas treatment systems or cooling water systems. It can also be widely used for liquid filtration in various industrial and product applications. Herein, a preferred embodiment details the present invention as follows: Please refer to FIG. 3 and FIG. 4, which are respectively a schematic diagram and a schematic diagram of one of the proposed y-shaped filtering devices according to a preferred embodiment of the present invention. Part of the schematic diagram of its filter, top cover and drain valve device. As shown in FIG. 3, the present invention proposes a y-shaped filter device 300 that can be automatically washed, wherein the y-shaped filter device 300 includes at least: a y-shaped hollow body 301 and a filter 308, wherein The y-shaped hollow body 3 0 1 is composed of a filter housing 3 0 2 and an elongated duct 3 0 4. One end of the elongated duct 3 0 4 can be respectively equipped with a flange 3 2 0 to attach the The y-shaped filter device 300 is connected to a drain pipe and / or a return pipe, or the y-shaped filter device 300 may be integrally formed with the drain pipe and / or the return pipe or otherwise connected, and The filter housing 3 0 2 may be conical, and angle downwardly from the 304 extension tube, and communicate with the interior 307 of the 304 extension tube. The elongated tube 3 0 4 is defined as a liquid inlet arm 3 0 3 on one side of the filter housing 3 0 2 π and is defined as a liquid outlet arm on the other side of the filter housing 3 0 2 π 3 0 5. As shown in FIG. 4, the longitudinal axis 9 of the filter housing 3 02 is disposed at an obtuse angle (about 95 to about 175 degrees) with the longitudinal axis 13 of the liquid inlet arm 3 0 3, and the setting At an acute angle (about 5 to about 85 degrees) with the longitudinal axis 1 1 of the liquid outlet arm 3 0 5. The end of the filter housing 3 0 2 can

Page 10 552155 V. Description of the invention (8) Use a valve seat to take over 309. The filter 3 0 8 is removably assembled in the filter housing 3 2 and can be conical. FIG. 5 is a side view of the filter 3 0 8. The filter 3 8 includes a frame 1 9 A sieve 10 is provided on the frame 19, and the sieve size of the sieve 10 is selected as required. When the filter 3 0 8 is assembled in the filter housing 3 2, the wide rear end 15 of the filter 3 8 (as shown in FIG. 5) extends into the interior of the extension duct 3 7 and connects with the extension The inner surface of the duct 3 0 4, and the narrow front end 17 (shown in FIG. 5) of the filter 3 0 8 is arranged adjacent to the valve seat to take over the tube 3 0 9. As shown in Fig. 4, a cover opening 304C is provided at the extension tube 3 0 4 facing the vessel housing 3 0 2, and a cover 30 6 is removably connected to the extension tube 3 0 The outer faces of 4 are joined. Alternatively, the cap 3 06 is articulatedly attached to the elongated tube 3 0 4 so as to removably close the cap opening 3 0 4C. Therefore, by removing the top cover 3 0 6 of the elongated catheter 3 0 4, the opening 3 0 4C can be easily removed from the filter housing 3 0 2 for cleaning or replacement. Broken filter 3 0 8. As shown in FIG. 3, a drain valve device 3 10 includes a valve housing 3 1 1 and a valve driver 3 1 2. The valve housing 3 1 1 is disposed at the narrow and thin end of the filter housing 3 0 2. The valve seat takes over the pipe 309, and the valve driver 3 1 2 is connected to the valve housing 3 1 1 through a connector, which is used to control the opening and closing of the drain valve device 3 1 0 so that liquid flows through The valve channel or inhibits liquid flow through the valve channel.

552155 V. Description of the invention (9) The valve driver 3 1 2 includes an electric solenoid valve driver, a pneumatic valve driver or a hydraulic valve driver. The structure design of the drain valve device 3 1 0 shown in FIG. 3 is only an example of a valve suitable for discharging particulate matter from the y-shaped filter device 3 0, and other types of applicable valves may also be used in the present invention. In the above-mentioned automatic flushing y-shaped filtering device 3 0 0 proposed by the present invention, any system that intends to filter and waste by the automatic flushing y-shaped filter 3 300, such as wetness A scrubber (as shown in Figure 6) or a cooling water system (as shown in Figure 7) is a water stream containing the waste flowing through the elongated duct of the auto-washable y-shaped filter and device 300 3 0 4, as shown by the thick arrow in FIG. 3, as the water flows into the liquid inlet arm 3 0 3 of the elongated duct 3 4, the waste particles will be blocked by the filter 3 0 8 and left behind. In the above-mentioned filter 308 (here, the selection of the material and size of the filter 308 is usually related to the amount of water passing through the filter 308 and the size of the y-shaped filter device 300, respectively. As for the filter The selection of the size of the filter holes in 3 0 8 is related to the lower limit of the size of the waste to be pre-filtered), so that the water flow through the liquid outlet arm 3 0 5 is substantially free of particles. Under the normal operation of the wet scrubber or cooling water system and the filtering operation of the y-shaped filtering device 300, as shown in Figure 4, it can be seen that the amount of water Q2 at the outlet of the elongated duct 3 0 The inlet water quantity Q1 of 3 0 4 is equal. Moreover, the water pressure at the entrance of the extension duct 3 0 4 is greater than the water pressure at the exit of the extension duct 3 0 4 (so that water can flow from the entrance of the extension duct 3 0 4 to the extension Exit of the duct 3 0 4), and these two

Page 12 552155 V. The water pressure difference of the invention description (ίο) usually decreases with the increase of the amount of waste left in the filter 3 08 (because the amount of the waste left in the filter 3 08 increases, this The flow rate between the two places will slow down, which means that the water pressure difference between the two places is reduced). Therefore, as long as the water pressure difference between the two places is set in the valve driver 3 1 2 (from the water pressure difference between the inlet pressure monitor 8 2 and the outlet pressure monitor 83 as shown in FIG. 6 and FIG. 7 (Knowledge) is reduced to a reference value, for example at least about 5 ps i (when the water pressure difference between the two places is reduced to this reference value, it means that the filter 3 0 8 has been accumulated by the waste and the filter 3 0 8 needs to be washed away Waste particles may affect the normal operation of the waste filtering system), that is, the drain valve device 3 1 0 is opened (at this time, in the drain pipe of a wet scrubber or cooling water system, the The water flow in the Y-shaped filter device 300 and the return pipe is still flowing and circulating), then because the water pressure at the end of the filter housing 300 connected to the elongated conduit 3 0 4 is much higher than the valve seat connection 3 The water pressure at 〇9 is large (because the shape of the filter housing 3 02 is the cone described above). Therefore, according to the spraying principle, the water flow will be phased from the filter housing 3 002 to the elongated duct 304. The end of the connection is sprayed out of the nozzle of the valve seat takeover 309 The waste particles previously staying in the filter 308 can be collected as one nanometer as the flushing water flow is sprayed out of the valve seat to take over the nozzle 309 outside the tear filter 308. Inside a container (not shown). Among them, when the drain valve device 3 10 is opened to flush the filter 3 08, the water spray quantity Q3 sprayed from the valve seat to take over 309 is much less than the water quantity Q2 at the outlet of the extension duct 304. Therefore, the opening of the valve device 3 10 will not affect the system's positive operation status. Basically, the flushing water flow and waste particles continue to flow out of the cold valve device, until the waste particles in the sac

Page 13 552155 V. Description of the invention (11) The drain valve device 3 1 0 is closed only when it is removed. Also, as shown in FIGS. 6 and 7, a power supply 80 and a control panel 81 can be provided to be connected to the drain valve device 3 1 0, the inlet pressure monitor 8 2 and the outlet pressure monitor 8 3. In order to facilitate measuring that the water pressure at the inlet pressure monitor 8 2 is greater than the water pressure at the outlet pressure monitor 8 3 to a predetermined value, the filter 3 0 8 can be automatically flushed. In addition, the opening of the above-mentioned drain valve device 3 1 0 can also be controlled by a programmable logic controller (PLC), and there are three ways to control the PLC: (1) the pressure valve is used to control the drain valve device 3 The opening and closing operation of 1 0, (2) the opening and closing operation of 3 10 is controlled by the operating time, (3) the opening and closing operation of 3 0 is controlled by the pressure difference and the operating time. With the closing action, when the pressure difference or the operating time is reached, the drain valve device 3 1 0 is automatically opened or closed. Furthermore, when the filter 3 0 8 is damaged, it is only necessary to open the top cover 3 0 6 to take out the broken 3 0 8 filter, and insert a new, intact filter into the filter housing 3 2 2 . Therefore, the y-shaped filter device capable of automatic washing provided by the present invention

Page 14 552155 V. Description of the invention (12) 3 0 0, can use the spraying principle of the water column to spray the waste that causes the y-shaped filter device 3 0 0 to pile up and block out of the y-shaped filter device 3 0 0, In order to achieve the purpose of removing the accumulated obstruction in the y-shaped filter device 300 without shutting down the equipment or system having the y-shaped filter device 300 therein. The above description is only the preferred embodiments of the present invention, and any other equivalent changes or modifications made without departing from the spirit disclosed by the present invention shall be regarded as the protection scope of the present invention. The scope of patent protection of the present invention depends on the scope of patent application and its equivalent fields.

Page 15 552155 Brief description of the drawings Figure 1A is a schematic diagram of the conventional system for wet cleaning of a conventional exhaust gas treatment system with a y-shaped filter device, and Figure 1B is a conventional cooling water system with a y-shaped filter device The system architecture is not intended, FIG. 2 is a schematic diagram of a conventional y-shaped filter device; FIG. 3 is a schematic diagram of an auto-washable y-shaped filter device according to an embodiment of the present invention; Part of the y-shaped filter device removes the filter, the top cover and the drain valve device; Figure 5 is a side view of the filter; Figure 6 is a wet scrubber using the automatic y-shaped filter device of the present invention; Figure 7 shows the cooling water system using the y-shaped filter device with automatic flushing of the present invention. Drawing number part:

Page 16 552155 The diagram briefly explains the washing tower 100; the pump 102; the y-shaped filter device 104; the drainage pipe 106; the return pipe 106 '; the plurality of nozzles 108; the water collecting tank 1 0 9; cooling chamber 1 2 0; pump 1 2 2;

Y-shaped filter device 1 2 4, 2 0 0, 3 0 0; drain pipe 1 2 6; return pipe 1 2 6 '; heat exchanger 1 2 8; water collecting tank 1 2 9; heat sink 1 3 0; fan 1 3 2; y-shaped hollow body 2 0 1; auto-washable y-shaped hollow body 3 0 1; filter housing 2 02;

Filter housing 302; extension duct 204; extension duct 304; liquid inlet arm 303; liquid outlet arm 305; cap opening 304C;

Page 17 552155 Schematic description cap 2 0 6; cap 3 0 6; filters 2 0 8 and 3 8; drain valve device 3 1 0; valve driver 3 1 2; valve housing 3 1 1; extension Inside the duct 3 0 7; longitudinal axis 9, 1 1, 1 3; screen 10; narrow narrow front end of the filter 17; wide rear end 15 of the filter; frame 19; power supply 8 0; control panel 8 1; inlet pressure monitor 8 2; outlet pressure monitor 8 3; flanges 2 2 0, 3 2 0.

Page 18

Claims (1)

552155 6. Application patent scope 1. A y-shaped filtering device, at least comprising: an elongated duct; a filter housing, which extends from the elongated duct in a direction of rotation with respect to a longitudinal axis of the elongated duct; a filter , Which is contained in the filter housing; and a drain valve device, which is arranged on the filter housing. 2. The y-shaped filter device according to item 1 of the patent application scope, wherein the filter is removably received in the filter housing. 3. For example, the y-shaped filter device of the scope of patent application, wherein the shape of the filter housing and the filter is a substantially cone. The system is equipped with a shell item that has been installed in the inner state of the body. The third and / or Haiwei LI S can be included in the unit, such as i 4 and can be included in the installed item 2 Fan Li specially requested that the cover 5 and cover D be replaced and removed in order to extend with the inner tube guide. The cover α of the device 遽 the body of the c crustal inverse filter It should be connected with Vr. The mouth is extended to open the cover and the top is closed. The top is closed VJ, T ··· 丄 b Page 19 552155 6. Scope of patent application 6. The y-shaped filter device according to item 5 of the scope of patent application, wherein the shape of the filter housing and the filter is a substantially cone. 7. The y-shaped filter device according to the first patent application scope, further comprising a pair of flanges, wherein the pair of flanges are respectively provided in each end of the elongated conduit. 8. The y-shaped filter device according to item 7 of the application, wherein the shape of the filter housing and the filter is a substantially cone, and the filter is removably received in the filter housing, and The y-shaped filtering device further includes a top cover opening and a top cover, wherein the top cover opening is provided in the elongated duct for removing and replacing the filter in the filter housing, and the top cover is connected with the filter. The elongated catheter is engaged to reversibly close the cap opening. 9. The y-shaped filter device according to item 1 of the patent application scope, wherein the y-shaped filter device is used in a wet scrubber. 10. The y-shaped filter device according to item 1 of the patent application scope, wherein the y-shaped filter device is used in a cooling water system. 1 1. The y-shaped filtering device according to item 4 of the scope of patent application, wherein the wide rear end of the filter extends into the inside of the elongated conduit and connects with the inner surface of the elongated conduit. Page 20 552155 6. Application for patent scope 1 2. The y-shaped filter device according to item 4 of the patent application scope, wherein the drain valve device includes a valve housing and a valve driver, and the valve housing is disposed in the filter housing. On the narrow and thin end of the body, the valve driver is connected to the valve housing through a connector, and is used to control the opening and closing of the drain valve device so as to allow liquid to flow through the valve channel or inhibit liquid from flowing through the valve channel. 1 3. The y-shaped filter device according to item 12 of the patent application scope, wherein the valve driver comprises an electric solenoid valve driver, a pneumatic valve driver, and a hydraulic valve driver. 1 4. A wet scrubber, comprising at least: a washing reaction chamber; a fluid discharge pipe for communicating the fluid in the washing reaction chamber; an elongated duct having a first end and a second end, wherein The first end is used to communicate the fluid of the fluid discharge pipe, and the second end is spaced from the first end; a fluid return pipe is used to communicate the fluid of the second end of the elongated conduit; a filter housing, which It extends from the elongated conduit in a direction of rotation relative to a longitudinal axis of the elongated conduit; a filter is housed in the filter housing; and a drain valve device is arranged on the filter housing. i Page 21 552155 6. Scope of patent application 1 5. The wet scrubber according to item 14 of the scope of patent application, wherein the filter is removably contained in the filter housing. 16. The wet scrubber according to item 15 of the patent application scope, further comprising a top cover opening and a top cover, wherein The top cover opening is provided in the elongated conduit to remove and replace the filter in the filter housing, and the top cover is engaged with the elongated conduit to reversibly close the (reversib 1 y) The top cover is open. 1 7. The wet scrubber according to item 16 of the patent application, wherein the shape of the filter housing and the filter is a substantially cone. 18. The wet scrubber according to item 14 of the scope of patent application, further comprising a first pressure monitor, a second pressure monitor and a controller, wherein The first pressure monitor is provided on the fluid discharge pipe to measure a first fluid pressure; the second pressure monitor is provided on the fluid return pipe to measure a second fluid pressure; the controller is connected to the fluid pressure pipe; The first pressure monitor, the second pressure monitor, and the drain valve device, when the first fluid pressure measured by the first pressure monitor exceeds the second fluid pressure measured by the second pressure monitor When a predetermined value is reached, it is used to actuate the drain valve device. Page 22 552155 VI. Application scope of patent 1 9. The wet scrubber according to item 18 of the scope of patent application, wherein the predetermined value is at least about 5 p s i. 2 0. A cooling water system, which at least comprises: a cooling tower; a drain pipe for communicating water of the cooling tower; an elongated duct having a first end and a second end, wherein the first end The second end is spaced from the first end to communicate with the water of the drain pipe; a return pipe is connected to the water of the second end of the elongation duct; a filter housing is connected to the elongation. A longitudinal direction of a longitudinal axis of a duct extends from the elongated duct; a filter is housed in the filter housing; and a drain valve device is arranged on the filter housing. 2 1. The cooling water system according to item 20 of the patent application scope, wherein the filter is removably received in the filter housing. 2 2. The cooling water system according to item 21 of the scope of patent application, further comprising a top cover opening and a top cover, wherein the top cover opening is provided in the elongated duct for removing and replacing the filter. The filter in the housing, the top cover is engaged with the elongated conduit, and Page 23 552155 6. Scope of patent application Close the top cover opening reversibly (r e v e r s i b 1 y). 2 3. The cooling water system according to item 22 of the patent application scope, wherein the shape of the filter housing and the filter is a substantially cone. 2 4. The cooling water system according to the scope of application for patent No. 20, further comprising a first pressure monitor, a second pressure monitor and a controller, wherein the first pressure monitor is provided on the drain pipe, For measuring a first water pressure; the second pressure monitor is provided in the return pipe for measuring a second water pressure; the controller is connected to the first pressure monitor, the second pressure monitor and the The drain valve device is used to actuate the drain valve device when the first water pressure measured by the first pressure monitor exceeds the second water pressure measured by the second pressure monitor and reaches a predetermined value. 25. The cooling water system according to item 24 of the patent application scope, wherein the predetermined value is at least about 5 p s i. Page 24