TW548893B - Piezoelectric axis-pushing ultrasound motor - Google Patents

Abstract

There is provided a piezoelectric axis-pushing ultrasound motor, which comprises a disc piezoelectric device (buzzer sheet) used as a driving stator of motor. An AC voltage is applied into the electrode of the piezoelectric device. The piezoelectric ceramic generates a push/pull force due to the expanding and contracting relation of the reverse piezoelectric effect, so as to drive a metal back-plate to generate a vibration for producing a mechanical elastic waves. The driven rotator utilizes a power transmission bearing seat arranged on the stator to transfer power by friction and directly engaging the rotation axis to the bearing seat. When the motor is driven by power having AC voltage of 74 kHz, amplitude of ± 0V and current of 0.2A, the motor has a speed of 3000 rpm, and a starting torque of about 0.003N*m, so as to provide a capability to drive a device similar to CD turntable.

Description

V. Description of the Invention (-3722 548893 [Technical Field]. The Shuming Department is about a piezoelectric axis push-type ultrasonic motor, which can avoid the electromagnetic interference effect generated when the traditional electromagnetic motor is running, and then overcome the normal ultrasonic motor. 3. The output torque is unbalanced during reversal, and the speed 5 can be increased to 3000_ or more, and can be used for biomedical engineering actuators or computer CPU cooling fans. [Previous technology] Λ is set at f Medium. Piezoelectric ceramics: £ plays a pivotal role. The strength of the piezoelectric characteristics determines the performance of the actuator. In recent years, as piezoelectric materials have evolved into piezoelectric actuators, they have to be piled up. This type of actuator is widely used in precise positioning control, and the g-sonic actuator (ultrasonic Act) of the present invention is a double-actuated-spear super wave motor combination type, which uses unimorph type piezoelectric materials. The concept of sonic motor was first proposed by former Soviet scientists, a. The original experimental model of ultrasonic motor was designed in ⑽W4 by μ. E. Arch piano lskl J, line b V.Lavrlnenk0⑷ and others. Later, ultrasonic Motor research collar The published literature explores the direction and variety of research, but most of them are directed to the county where the ring-shaped impulse county was studied. Recent research can be classified into the following subtleties: 5_7], deformation and improvement of the structure according to the principle of rotation [8-11]), and the use of finite element method to analyze the vibration mode [ΐ2—I, etc.… Study on the mathematical model of% -type ultrasonic motors [5], 〇leg Yu. A㈣ proposed to use a traveling ultrasonic motor as a research county, and set a theoretical basis to calculate the rotor speed, speed q, and energy conversion efficiency. Finite element vibration mode = analysis [9] 'K 和 和; .WaUschek via Α_ Software simulation of vibration mode 1 This paper size is applicable—home 1 ^ NS) A4 X Vision 548893 A7 V. Description of invention (of) J3U1.1WH-4122 Printed by the Consumers ’Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs [14]. In terms of structural deformation and improvement, τ · Yamazaki's non-contact ultrasonic motor [15] uses surface ultrasonic waves to pass through the gap between the stator and the rotor, driving the rotor to rotate, and breaking the speed limit of traditional contact ultrasonic motors. Anita M. Flynn uses MEMS technology to manufacture several millimeters of motor stator elements and micro-actuators in micro-electro-mechanical systems on silicon wafers. The application is to apply ferroelectric thin dreams to piezoelectric and electric ultrasonic motors [16] 〇 [Objective of the Invention] The purpose of the present invention is to provide a piezoelectric axial push type ultrasonic motor, which greatly breaks the limitation of the traditional ultrasonic motor which must rely on a two-phase drive power in the design, to construct the traveling wave and the high amplitude input pulse wave. A secondary object of the present invention is to provide a piezoelectric axial push type ultrasonic motor, which can avoid the electromagnetic interference effect generated during the operation of a conventional electromagnetic motor, and further overcome the imbalance of the output torque during normal and reverse rotation of a general ultrasonic motor. Situation. .. Another object of the present invention is to provide a piezoelectric axis push type ultrasonic motor, which can increase the motor speed to more than 3000 rpm, and can be used for actuators or electrical brains in biomedical engineering. CPU heat fan. [Technical content] The piezoelectric axial push type ultrasonic motor that can achieve the above-mentioned object of the invention is mainly composed of a disc piezoelectric element as a driving stator of the motor, and the accumulated nails on the stator are used as power transmission bearings. The driven rotor is directly connected to the bearing by the shaft center to give power by friction. The design and production of the motor include stator vibration mode observation and simulation, piezoelectric material admittance frequency response measurement, travel wave mechanism design, system, first anger, farewell, equivalent circuit derivation, and speed torque test, etc. . The currently completed paper size _ 5 (Please read the notes on the back first and then this page) K-suite 10 15 20 Order · • Line 548893 V. Description of the invention (^) The prototype motor has an AC voltage of 74kHz, amplitude ± 10V and current With a drive of about 〇2A, the motor can reach a speed of 3,000 rpm and a starting torque of about 0.003N · m. It can be used to promote the ability of similar CD turntables, biomedical engineering actuators, or Computer CPU on the fan. 5 [Brief description of the drawings] Please refer to the following detailed description of a preferred embodiment of the present invention and its attached Θ to further understand the technical content of the present invention and its purpose and effectiveness; the drawings related to this embodiment are: 's (a) is the basic structure of the disc element 10 (buzzer) of the piezoelectric axis push type ultrasonic motor according to the present invention; FIG. 1 (b) is a mechanism diagram of the piezoelectric axis push type ultrasonic motor; (2U) is an exploded view of the piezoelectric axis push type ultrasonic motor of the present invention; FIG. 2 (b) is a three-dimensional assembly of the piezoelectric axis push type ultrasonic motor of the present invention; FIG. 15; FIG. 2 (C) is the present invention Side view of a piezoelectric axial push-type ultrasonic motor; Figure 3 is a schematic diagram of toner being electrostatically adsorbed on a piezoelectric actuator; Figure 4 is a 20 kHz toner development pattern when the boundary of the piezoelectric buzzer is free; Figure 4 (b) shows the 20-dimensional image developed by 74kHz toner when the boundary of the piezoelectric buzzer is free. Figure 5 (a) is a simulation of ANSYS at 20kHz when the boundary of the piezoelectric buzzer is free. Figure 5⑻ shows the piezoelectric buzzer. Simulation diagram of boundary free ANSYS at 20 kHz; 548893 A7 B7 ΡΑϋ Ι03ϋ I TWP-0/22 5. Description of the invention Printed in Figure 6 of the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economics is the admittance and frequency response diagram; Figure 7 (a) is the toner development diagram when the screw is fixed; Figure 7 (b) is the ANSYS simulation diagram when the screw is fixed; Figure 8 (a) is a 5 ^ shadow image of the toner with three 120 ° screws separated on the stator; Figure 8 (b) is an ANSYS simulation diagram with three 120 ° screws separated on the stator; Motion diagram; Figure 10 is a schematic diagram of the preferred placement of the screws; Figure 11 is the Bode diagram and analog output signal diagram of the system after gain compensation; Figure 12 is the equivalent circuit diagram of the stator when the motor is working; and Figure 13 shows the relationship between motor speed and time. 15 [Representative symbols of main parts] -11 Piezoelectric ceramic sheet 12 Metal back plate 203 Fixing frame 204 Board 205 Bearing 206 Bearing 207 Shaft 208 Stator 209 Heavy disc 蠡 --------; ------ install --- (Please read the precautions on the back page first) --Order · 丨 Line-This paper size applies to Chinese national standards (CNS ) A4 specification (210 X 297 public love) 548893 A? B7 V. Description of invention (f) 21 Nail 210 vibrating sheet 22 rotor 31 carbon powder 32 charge [preferred embodiment], the piezoelectric buzzer provided by the present invention has a single piezoelectric buzzer, the outer part of which is provided with a flexible gold plate 1227 sheet 1 Since the piezoelectric flake 11 has a smaller f and its structure is shown in Fig. 1 (a), it has a small current drain and a more stable vibration action. 10 • The piezoelectric axis push-type super The sonic motor should be electrically driven by the set screw on the Jinyu board. The guide bow I can be turned out, which constitutes a red "electric buzzer to be closely face to face, and symmetrical to the outer circle of the disc sheet. Three screws are tightened at a 2: 1 'angle and _ screws are locked at the eccentric position of the disc sheet as the driving body. The rotor is formed by the center of a circular iron plate penetrating through an axis (as shown in Figure 1). ^ Consumer Consumption of the Ministry of Economic Affairs and Intellectual Property Bureau of Zuosha Company 15 Please refer to Figure 2 (a), Figure 2 (b), and Figure 2 (b). The piezoelectric axial push-type ultrasonic motor of the present invention includes a hollow shape. The housing body (which can be composed of the fixing frame 203 and the base plate 204), the body has a rotor bearing 205 and a stator bearing seat 206 on the upper and lower sides respectively for holding and supporting the rotor shaft center 207, and the rotor shaft center 207 is vertical A counterweight disk 209 is connected, and a bearing seat 206 at the bottom end of the shaft center is arranged on the sheet stator 208. It is characterized in that a vibrating sheet is provided on the lower side of the casing body to allow the rotor shaft center 207 to support the weight disk. 209 free rotation, the pulsed signal drives the thin-plate stator to vibrate at the audio and ultrasonic frequencies, which can make the rotor shaft 207 rotate freely and guide the vibration energy output, and the optimal working frequency of the input AC power Fan circle is supplementary _ 548893 A7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs. 5. Description of the invention (6) IU〇u,., Vvr.0, i 20kHz ~ 200kHz. The vibration of the disc can be roughly divided into traveling wave and standing wave modes. In the related literature, the laser modal observation is mainly concerned with the vibration mode observation, but the present invention uses the toner development to observe the fluctuation on the metal back plate. The working principle is based on the existing capacitance characteristics of the polarized 5 piezoelectric material. As shown in Figure 3, when a high-frequency electric field is supplied to the disc piezoelectric sheet, the carbon powder 31 is scattered on the metal back plate 12. The energy of the charge 32 accumulated at the instant of the electric field establishment is used to adsorb the carbon powder on the metal back plate 12. In the standing wave mode, the toner is concentrated to the nodal circle & nodal diameter line, as shown in Figure 4 (a), Figure 4 (b), and Figure 7 10 ( As shown in Figure 7, Figure 7 (b), Figure 8 (a), and Figure 8 (b), the modal patterns composed of antinodes and nodes can be directly observed. With dedicated; Zhen's comparison of dynamic modal methods. The development method used in this research, combined with the direct fuU field observation function, is a clean and effective method; the toner development method is used to observe circles. The vibration of the disk can be judged by the clarity of the toner pattern first. You can roughly determine whether the main vibration mode on this sheet is the traveling wave mode or the standing wave mode (the toner will display dynamics as the wave moves in the direction of the wave). Pattern); At the same time, you can also observe the distribution pattern of the toner to learn that when the traveling wave encounters a reflective screw with a solid material, the toner at the node will leave a standing wave distributed in the direction of reflection on the disc. Pattern pattern, which proves the existence of reflected waves. By comparing the ultrasonic vibration modal patterns simulated by the finite 20 element method, the out-of-plane amplitude of the metal back plate and the in-piane displacement (expansion) can be compared with The direction of deformation is calculated. Many mathematical equations about the ultrasonic motor have been published, but because the physical model of the ultrasonic actuator is usually very complicated, and when the structure changes

(Please read the Precautions on the back page first. --- f page) 价 ^ τ ·, line · 548893

The mathematical formulas printed by the employees ’cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs have changed. Therefore, the finite element analysis (FEA) software ANSYS is used to simulate and analyze the behavior of ultrasonic actuators. rapid. The dynamic response mode of the metal back plate driven by piezoelectric waves can also be known from the ANSYS analysis. This can be used to verify the basic design principles of the driver. 5 To guide the direction of structural design, finite element analysis is necessary. . In other words, the main purpose of computer simulation with ANSYS finite element analysis software is to: g) achieve the optimal design of ultrasonic actuators in the least amount of time, (2) simulate the design of ultrasonic actuators with different material properties (3) can clearly understand the variation of fluctuations on the metal backplane. 10 · Finite element analysis can be divided into two parts: Modgl: analysis and Harmonic analysis ° H odal analysis can find and obtain the natural resonance frequency of the piezoelectric sheet; Harmonic to solve the dynamic response of alternating current-wheel in, as shown in Figure 5 Show. When the frequency of the input voltage is transferred to the ultrasonic resonance frequency% of the piezoelectric sheet, the piezoelectric # can obtain the maximum output power. And the obtained simulated 15 mode shape (mode shape), as shown in Figure 6, can be compared with the graph obtained by toner development 幵 > 'as shown in Figure 5 (a) and Figure 5 (b), compared with each other Correct. In order to verify the correctness of the parameters of the piezoelectric material, the natural resonance and anti-resonance of the finite element analysis software 4 heteropiezoelectricity> are compared, and compared with the values measured by the rubidium impedance analyzer; if the results show The natural resonance frequency calculated by the finite element method is not much different from the value measured with an impedance analyzer, which indicates that the piezoelectric coefficient of the plate is very close to the actual value. The calculation instructions are as follows: · The definition of the input admittance is: (Please read the back. Note before filling in this page).

Size of this paper is 297 mm) 548893 A7

548893 A7

modes, and the vibration of the disc piezoelectric ceramics has a radial direction and a thickness direction. When a voltage is applied, the 'disc sheet will extend in the R direction, and because of the Pusong ratio, it will decrease in the thickness direction, so it can be reduced. On the disk slice, you can see _circle ring nodes (⑽circle). The number of ring nodes will increase due to the increase of the frequency. The position of the ring nodes is almost the same as the solution value of the Bessel function, as shown in the figure. The wave equations on the 疋 子 disk shown in Figure 5 and Figure 5⑹ are described as non-axisymmetric free vibrations. Generally speaking, the vibration form of the disk slice is Radial: 62 ⑴ 10 * 1. If a is circular The disk radius can be obtained by using the separation variable method and known boundary conditions, such as the formula (2). · ‘..,.; · • * ·. ·%. ^ Θ? 〇 ^ ιΛ (α, ν / μ ^ ί " 1 <: 〇δ " θ

c2 sinnG (2) 15 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs where n is the number of radial nodal diameter lines (number 〇f nodal diameter line). In the case of non-axisymmetric free vibration, the wave equations on the disk are not all zero-order Bessel functions, and the order is determined by n in equation (2). The Bessel function is an oscillating function with decreasing amplitude and almost periodicity. The characteristics of periodic oscillation are similar to those observed with the use of toner ", page ~. Once the vibration plane forms a standing wave in the arc direction, this The time η value is determined by the number of knot lines.

Utilizing the aforementioned derivation results in combination with the toner development experiments and the patterns observed in the finite element dynamic simulation 20, it is possible to boldly infer that the type of the wave equation belongs to the first in the case of non-axisymmetric vibration of the disc piezoelectric sheet. Bessel function of order __η. I i The standing wave mode obtained from the toner development experiment and FEM simulation can be divided into two ^; 548893 A7 The same boundary condition is discussed: ⑷ The frequency from the frequency to the ultrasonic vibration mode when the boundary is free ⑹, the ⑹ boundary is supported and has Variation of the vibration mode of the piezoelectric sheet when the screws are installed (a) Boundary free situation (Figure 4 (3) and _〇)) is a standing wave toner pattern produced under the range of sound-sensitive ultrasonic waves when the boundary is free Fig. 5⑷ and 振动 = are the corresponding m vibrations = coffee-shaped 'cause carbon can be found that the figure under audio can only be vaguely = the point position' and the ring can be clearly seen at the ultrasonic frequency Shaped node ^: When the buzzer works in the audio range, it is shortened because the power output from vibration is small, and the wave is raised, and the energy required for the household to move to the node is proportional to the distance. Proportionally, so the shorter the wavelength, the longer the toner travel distance. This explains the obvious reason for the ultrasonic image generation: The clearness of the carbon shape is not only the effect of technical skills, but the key is the power output due to vibration. Therefore bee; .. In addition to the development of the slave powder, the surface fluctuation can be clearly observed. The driving voltage that is expected is tens of versions. Because it has a large output power, it passes through the air outlet. (B) Boundary support: Figure Figure 7 (a) and Figure 7 (b) are the graph and simulation of the toner attached to the screw. In addition to the picture can be ::: Li ', when the amplitude is zero 2. ::: ™ distribution of points. == Storing: = Green movement,-forming a ring-shaped loop distribution for traveling in the radial direction = arc traveling forming a radial pitch distribution. Because the screw pin is ^ / 〇 as a reflector (relative to the density of the medium), the reflection is ^ 'for the wave = _ obvious' and with the screw located in the radial direction: a different standing wave pattern is generated. It can be seen that at our peak, the paper ruler ^ The screw changes the thin plate vibration (CNS) ATi ^ Ti ^ Page 10 Order -12- 297 ^ 7 Printed by the Consumers ’Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 548893 A7 [Explanation of the invention] " One 丨 丨 Eight U 丨 coffee. 丨, _ 丨 meaning of the design of the piezo actuator dynamic diagram,) and Figure VIII are three phases _; reflection screws Under the configuration, the nodes are distributed on the board. The thrust of the rotor must be transmitted by the wave A of the mass point on the stator. Therefore, the position of the contact must be set at the place with the largest amplitude. The power transmission of 5 of the contact points is also on the metal back plate. When the stator is connected with the pulse wave signal, the screw will receive thrust from three directions in sequence, causing the screw to eccentrically swing as shown in Figure 9. When viewed from the screw itself, it can be assumed that there is a perimeter of the screw-there is a traveling wave. So Figure 10 is a schematic diagram of the ideal contact point setting. The basic work is described as follows: The L-chip is used as a medium for converting electrical energy to mechanical energy. When an AC voltage is applied to the piezoelectric sheet, the piezoelectric ceramics generates a push-pull force due to the inverse piezoelectric effect due to the inverse piezoelectric effect ^ expansion and contraction, resulting in mechanical expansion and contraction of the metal plate, and is transmitted in the forward and solitary directions. Because the material of the screw is different from the metal back plate made of nickel alloy, the screw becomes a reflection point in the wave transmission. Utilizing the reflection points formed by the three surrounding screws, the reflection waveguide can be returned to the center of the circle to swing the eccentric screw 15 nails, and the toner development diagram and simulation diagram are shown in Figure 8 (a) and Figure 8 (b). Reflected waves travel at different distances, resulting in phase differences in travel between each other upon arrival. Selecting an appropriate driving point 'can be formed there-a three-phase driving wave around that point is used to make a three-phase driving purpose to provide torque to The rotating shaft drives the rotor to rotate. Because piezoelectric materials still have a few variables such as temperature 20 liters, fluctuations, etc. in the current cognition, the effects have not been clarified. Therefore, if the existing complex physical model is still used to construct this system, it will not be complete and correct. Tracing will show the dynamics of the motor. The design of this experiment is to obtain the voltage and current signals at both ends of the piezoelectrically actuated stator when the motor is in operation, and use the system identification method to find the dynamic transfer function of the system. The basis of effective circuit derivation.

548893 A / B7 V. Description of the invention (KAUΊ Uou I. | vVH-Ι 4 / 2ζ The sampling frequency of 1MHz is used to capture the input voltage and output current signals, which can fit the first order (5/5) The discrete transfer function G (B) is expressed as Equation (3) ... 0 0926-0.2304 ^ + 0 0316 ^ 2 + 0 0810 ^ 3 + 0 1 〇43 ^ 4-〇14655s 1-0 22905-0.7128 million 2- 0 38.88 million + 0 8177 ugly 4 + 〇〇〇〇〇55 (3) Use partial fractions to expand (3) into (4), and the correlation coefficient is:

G (B) = B JΣ · = 1

Si + Κ = 0.0926 (4) Part (C) in the table is also a first-order transfer function. Since the piezoelectric ceramics itself is an electric valley material, it is estimated that this first-order function will have another .5 dynamic mode. May be caused by the characteristics of ceramic capacitors. (B) The resonance frequency of the partial λ μ dynamic mode is approximately the same as that of the 72kHz resonant region of the piezoelectric ceramics. It is inferred that this dynamic mode should represent the performance of this common selective region 眭 10. (Please read the Zhuyin on the back? Matters later on this page) Dynamic mode (a) λ 1,2 (b) λ 3,4

λ 0.8794 ± 0.3735i 0.0031 ± 0.0075i

-0.7177 b 0.6437i -0.0185 ± 0.0051 Printed natural frequency (fn) Turning frequency (fb) fc -383. 69 kHz fn = 64. 33 kHz " 625 kHz damping ratio Γ (damping ratio) 0.0152 0.1129

Private paper scales are in accordance with Chinese standards (CNS) A4 x as publicly available 548893 A7 B7 V. Description of the invention (/,) ΡΑ01ϋ ^ ϋ 1. IWP-15/22 (a) Part of the λ u dynamic mode with its resonance frequency of 383 · 69kHz and The working frequencies of motors are very different, and this dynamic mode is not the key to affect the stability of this system. Remove the 2 dynamic modes and retain the "and 5 dynamic modes" that have a greater correlation with the system characteristics. The original system dynamic transfer function can be modified as (5): G (B) = · 2 ^ 2 ^ ι〇.3263 10,000+ 0.3723 furnace—m with》 /? 3 1 -1.66445 + 0.746952 + 0.086153 (5) 10 15-· 〃 According to the DC gain value of the system transfer function before and after order reduction (B = UW = 0), three can be calculated. Compensation—The DC gain of M21. The _Na function G * ⑻ after compensation can be obtained in the substitution formula, as shown in the formula: G * (B) ^ 0 ^ 116 ^ 02913 ^ 1 ^ 〇3566 ^ 2 ^ Q. 1576 ^ 3 ·· 1 -1.66445 丨 + 〇746952 + 0.086153 图 · .Figure 10-For this system simulation of this transfer function, the actual output of the current output interface as shown in the figure has no error. ..Change, secret, transfer of square continuous system through bilinear (biH_) conversion: Li Qingqing in the partial t)) number two type, y knife like 别, ⑼, (⑻ 三The formula shows: ο (β) = -ρΛΙZΗΐ, 〇00625-0.01105β2, not scared by the factory (end mold (please read the precautions on the back before filling out this page)-¾ order-• line · Ministry of Economic Affairs intellectual property Bureau employee elimination Printed by the cooperative (7) " ⑷ ('^ 1 ^ 394 xlO6 "2.416χ1〇6 (8) H (h, 〇 + & + 9.500 xl〇45 + 1.678 ^ 10 ^ (9) 20 H (S) ~ 0.0716 (DC gain unchanged) (1〇) Post) 5:) (f), the final dynamic transfer function is shown by the following formula x 0 S + 3.973x10u5 + 4.〇54x1〇17 This paper "548893 A7

、 Explanation of the invention (/ 么) " Π57Ώ- The results of the above formula can be used to derive the board type of the equivalent circuit of the ultrasonic motor of Shizhuangqing, each of which has 70 pieces of values: derating lion, 渉 之 n Cm = 89.6nF ^ Rml = 37.3Q ^ Rm2 = -9. 943 Ω ^ ^ = 48. 8 u E ^ RL = ~ not ./5i ?. Since the piezoelectric ceramics itself has the function of positive piezoelectricity, it can convert the vibration of the stator into a voltage output. Because of the characteristics of the voltage feedback in the first series, the material of the negative resistance accurately reflects the particles of negative resistance. The characteristics of the circuit are unpredictable by the physical mode of piezoelectrics. The speed and torque of the ultrasonic motor is calculated from the start of the rotor, stable operation to brake stop, and the relationship between the speed and time is shown in Figure 13. · From the figure, you can see that the rotor starts to rotate. It moves to the period of stable operation; its speed change has a curve relationship with time, which means that its speed should be during the period of variable acceleration forging to stop the brake. The straight line indicates that the deceleration is constant. The occurrence of this variable acceleration γ proves that the duck force transmission is in accordance with the characteristics of the dry friction model, that is, when the ultrasonic motor is operating, the piezoelectric defector uses the friction generated by Mueller to rotate the shaft or the pinned rotor 15. Therefore, as the rotor speed increases, the area where the stator is relatively faster than the rotor decreases: the thrust and resistance tend to be balanced, and the torque output is 0; when the motor stops, the stator does not ride on the material to provide swing reduction, only Residual force and its value is constant. < The pressure-f sister ultrasonic motor of the present invention breaks through the limitation that traditional ultrasonic motors must have in their design. Hehe, constructs the traveling high-amplitude input pulse wave. In the construction of the equivalent circuit, if we can further explore the meaning of the respective electric power in the circuit corresponding to the respective electric power itself, it will be possible to suppress the temperature rise effect generated when the motor is running, and In order to overcome the imbalance of the positive and negative% output torque of the motor, it can also be used in biomedical engineering actuators or electricity. 10 20 This paper is suitable for financial countries -16- x%) —

Order ------ Line ----- ΊΓ! (Please read the precautions on the back first, then Ifk page) 548893 A7 V Invention description (/ ^) on the CPU of the brain CPU. [Features and effects] The piezoelectric shaft push type ultrasonic motor provided by the present invention has the following advantages when compared with other conventional technologies ... 1. The piezoelectric shaft push type ultrasonic motor of the present invention breaks the tradition The design of the ultrasonic motor must rely on the limitations of two-phase power supply to construct the traveling wave and high amplitude input pulse. 2. This month's piezoelectric axial push-type ultrasonic motor can avoid the effects of electromagnetic interference generated during the operation of traditional electromagnetic motors, and thus overcome the general situation of unbalanced output torque of ultrasonic motors during forward and reverse rotation. 3. The push-pump-type ultrasonic motor. The motor can rotate the motor speed to more than 3_ chat. It can be activated by the biomedical engineering or the CPU of the brain. The above detailed description is directed to the specific milk of the feasible embodiment of the present invention, but this fact is not intended to limit the scope of the patent of the present invention, which is outside the scope of the patent of the technical spirit of the present invention. In addition, all of them should be included in the above, as described above, "but it is technically tangible, and can improve the above-mentioned multiple effects over white articles. You should post the patent requirements of *, according to the law ;;: Γ = For this invention patent application, to encourage invention, to the sense of virtue ^ 5 (Please read the precautions on the back before this page) Electricity% -------- Order «I ϋ n 15 20 Say- --- Line. This paper ruler '548893 A7 B7 V. Description of Invention (/ έ) ΡΆ01Ό30ΤΊ Reference printed by the Consumer Cooperative of Intellectual Property Bureau of the Ministry of Economic Affairs [1] Kenji Uchino, Piezoelectric Actuators and Ultrasonic Motors, Kluwer Academic Publishers, 1997. 5 [2] Toshiiku Sashida, Takashi Kenjo, An Introduction to Ultrasonic Motors, Clarendon Press Oxford, 1993. [3] V. Snitka, V. Mizariene, D. Zukauskas, "The Status of Ultrasonic Motors in the former Soviet Union ", Ultrasonics, Vol. 34 (1996) pp. 247-250 10 [4] S. Ueha, Y. Tomikawa, M, Kurosawa and N. Nakamura, Ultrasonic Motors-Theory and Applications, Clarendon Press Oxford, 1993. [5] Oleg Yu. Zharii, "Modeling of a model conv ersion: ··.. ultrasonic motor iruthe regime of slip ”, IEEE Trans. Ί5 Ultrasion ^ Ferroelec. & Freq. contr, vol. 40, no. 4 (1993) ρρ · 414 ~ 417:... 6] NW Hagood * fV and · AJ Mcfarlarid, Modeling of a piezoelectric- rotary ultrasonic motor ”IEEE Trans · Ultrason. Ferroelec. &Amp; Ferq. Contr, vol. 42, no. 2 (1995) 2〇pp210 ~ 224 '[ 7] H. Hirata and S. Ueha, “Design of a traveling wave type ultrasonic motor”, IEEE Trans. Ultrason. Ferroelec. &Amp; Ferq. Contr, vol. 42, no. 2 (1995) pp. 225-231 [ 8] Kentaro Nakamura, Minora Kurasawa, Hisayuki 25 Kurebayashi and Sadayuki Ueha, "An Estimation of Load Characteristic of An Ultrasonic Motor by Measuring Transient Responses", IEEE Trans. Ultrason. Ferroelec. &Amp; Freq. Contr., Vol. 38. no5 (1991) [9] Kazumasa Ohnishi, "A Novel Ultrasonic Actuator", 30 IEEE Trans. Ultrason. Ferroelec. &Amp; Freq. Contr., Pp206- 212. [10] Riccardo Carotenuto, Nicola Lamberti, Antonio Iula and Massimo Pappalardo “A New Low Voltage Piezoelectric Micromotor Based on Stator 35 Precwssional Motion”, IEEE Trans. Ultrason. _ -18- ------ T--WI --- „—install --- (Please read the note on the back first Matters again! |||: This page) I 丨 Order: .line. This paper has been used in China National Standard (CNS) A4 specification (210 x 297 public love A7 ΡΑϋιυ ^ υΠ WH-W22 548893 Β7 V. Description of the invention (//)

Ferroelec. &Amp; Freq. Contr., Vol. 45. no. 5 (1998) pp. 1427-1434.

[11] Nicola Lamberti, Antonio Iula and Massimo Pappalardo, “A Piezoelectric Motor Using Flexural Vibration of 5 a Thin Piezoelectric Membrane”, IEEE Trans. Ultrason. Ferroelec. &Amp; Freq. Contr., Vol. 45 · no · 5 (1998 ) pp · 14 ??? · [12] A. Daugela and H. Fujii, “FEM Modeling of multilayered piezoactive structures”, ANSYS 1994 Conference in Japan 10 [13] Su-Hyun Jeong, Hung-Kyu Lee, Hyun-Hoo Kim, and Kee-Joe Lim, “Vibration Analysis of The Stator in Ultrasonic by / IEEE (1997) pp. 1091-1094 [14] JW Krome and J. Wallaschek, Novel Disk Type Ultrasonic Traveling Wave Motor for High Torque”, 15 IEEE Ultrasonic Symposium Π997) pp385-39 [15] T. Yamazaki, J. Hu, N. Nakamura, and S. Ueha, "Trial Construefion of a Noncontact Ultrasonic * · Motor with · an Ultrasonically Levitated Rotor ^, Japan Journal. Of Apply Physics, vol. 35 (1996) 20 pp.3286-3288 [16] Anita M. Flynn, Lee S. Tavrow, Stephen F. Bart, Rodney A. Brooks, Daniel J. Ehrich, KR Udayakumar, and L. E. Cross, "Piezoelectric Micromotors for Microrobots", Journal of Micro-electromechanical 25 System, vol. 1 (1992) pp. 44-51 [17] Xu Yishi Compilation, Basics of Ultrasonic Motors, Wen Sheng Book Company, 1995. [18] M. Ouyang and F. L. Wen, "Observations of Ultrasonic

Vibration Mode and Finite Element Analysis for Piezoelectric Membrane Discs ", IEEE 30 Trans. Ultrason. Ferroelec. &Amp; Freq. Contr. (Submitted) [19] B. Piranda, W. Steichen, and S. Ballandras," Model Updating Applied Ultrasound Piezoelectric, ', IEEE Ultrasonic Symposium (1998) .pp 1057-1059.

[20] N. Guo, P. Cawley, and D. Hitchings, "The finite 35 element analysis of vibration characteristic of ____-19- Secret of Lai Jiaxian (CNS) A4 (210 x 297)) -(Please read the precautions on the back before filling in the information page) «Printed by the Consumer Property Cooperative of the Intellectual Property Bureau of the Ministry of Clothing and Economy A7 ΡΑύ 1030 I .TWP-20/22 548893 B7 V. Description of Invention (^) piezoelectric discs, Journal of sound and vibration (1992) [21] Edited by He Hai, Engineering Mathematics (Part 1), Cai Kunlong Book Company, 1992. [22] Edited by Wu Lang, Electronic Ceramics-Piezoelectricity, Quanxin Science and Technology Book, 1994. 5 [23] CM Liaw, MS Ε. Ε., And Μ. Ouyang, “Model

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Claims (1)

548893 J '3 ^ -.... | 91 12, 10 Apply for profit 2. 10 3- 15 4 · 5. Printed by the Intellectual Property Workers' Cooperative of the Ministry of Economic Affairs 20 ^ piezo-axis push-type ultrasonic motor, which includes a hollow-shaped casing body, which has one upper and one lower side respectively The rotor bearing and the stator bearing seat are used for clamping and supporting the rotating shaft. This rotating shaft is vertically connected with a counterweight turntable, and the bottom end of the rotating shaft is a thrust bearing seat arranged on the sheet stator. It is characterized by the lower device of the casing body-thin | electric The component as a stator can freely rotate the weighted turntable supported by the rotating shaft. The pulsed wave signal drives the thin-plate stator to vibrate at audio and ultrasonic frequencies, which can freely rotate the rotating shaft to guide and output vibration energy. * For the piezoelectric axis push-type ultrasonic transporter described in item 1 of the profit-seeking range, the hollow casing body can be replaced with an L-shaped casing body. For example, the piezoelectric axial push-type ultrasonic motor described in item 1 of the scope of the patent application, which supports the hollow-shaped housing, the two ends of the skeletal clamp frame are connected at 90 degrees to the rotor axis representing the vertical axis. Orthogonal. 4, 4 As described in the scope of the patent application, the electric dust type ultrasonic wave can be used. The upper end of the hollow casing body supports the rotating shaft mechanism ring with a bearing. ^ As described in the patent application_item i ♦ 2 ♦, the best working frequency range of the eighth current power supply is 20kHz ~ 200kHz. Please read the notes of Sf first, and then fill in the Kui fing line. The K degree of this paper is applicable to China National Standard (CNS) A4lii ^ J7 ^