TW544758B - Lighting optical device, exposure system, and production method of micro device - Google Patents

Abstract

The object of the present invention is to provide a lighting optical device and an exposure system, which reduce the number of optical members such as lenses while preventing a reduction in light quantity, can enhance a light utilization efficiency even in the case of modified lighting such as annular lighting, and can reduce the running costs. To achieve the object, revolvers (4, 5), and a zoom optical system (6) are disposed in that order on the optical path of a light flux supplied from a light source (1). The revolvers (4, 5) are provided with diffraction optical elements for converting the light flux supplied from the light source (1) into one having a specified section shape, a plurality of diffraction optical elements having different conversion characteristics for different section shapes of light fluxes to be converted being provided. The zoom optical system (6) changes the optical intensity distribution of a light flux having the section shape thereof converted by diffraction optical elements, and consists of up to five lenses (6a-6d) with a variable power ratio of up to 2.3.

Description

544758 A7 _______B7_____ V. Description of the Invention (彳) Technical Field The present invention mainly relates to a lighting optical device using a lithography technology to manufacture a semiconductor element, a liquid crystal display element, a photographic element, a thin-film magnetic head, and other micro-devices. An exposure device including the illumination device and a method for manufacturing a micro device using the exposure device. 2. Description of the Related Art An exposure device is used in a lithography process for one of semiconductor device, liquid crystal display element, photographic element, thin film magnetic head, and other microdevice manufacturing processes: a multi-image mask or a single-image mask (hereinafter collectively referred to as these, collectively The pattern of the photomask is transferred to a wafer, a glass plate, or the like that is coated with a photoresist such as a photoresist (hereinafter collectively referred to as a substrate). A development process is performed on the substrate to which the pattern formed on the photomask is transferred, so that a photoresist pattern corresponding to the transferred pattern is formed on the substrate. Thereafter, various processes such as an etching process for the substrate and a wiring formation process are performed using the photoresist pattern formed on the substrate as a mask, and a process for forming a pattern corresponding to the mask pattern on the substrate is performed. A photosensitizer is applied again on the patterned substrate, and the process is repeated several times to several tens of times. In the lithography process, the light intensity of the light from the illuminating mask and then irradiated on the substrate has a varying distribution in the reticle or the substrate surface. The light amount of the light irradiating on the substrate changes according to the intensity distribution, so it is formed in the reticle. The pattern line width changes according to the amount of change. Since the line width of the pattern formed on the substrate varies according to the amount of light being irradiated, in order to form a fine pattern, in-plane: the mask needs to be illuminated with illumination light that has substantially no light intensity distribution (constant light intensity). Therefore, the exposure device is provided in the illumination optical system in order to irradiate light

544758 A7 B7 Fifth invention description (2) Optical integrator (optical integrate) for uniform light intensity distribution of the hood. Most optical integrators use, for example, fly (s eye iens) or rod integrators. Hereinafter, the compound eye The case of the lens is taken as an example to explain the reason for using an optical thinner to uniformize the intensity distribution of the illumination light irradiated on the photomask. Figure 29 is a schematic diagram of an optical system using a conventional fly-eye lens. In Figure 29, The light beam emitted from the light source 101 is converted into a substantially parallel light beam by the optical system 102, and then is introduced into the fly-eye lens 103. The light beam incident on the fly-eye lens 03 is divided by the wavefront of most unit lenses of the fly-eye lens 103. The rear focal plane of each unit lens forms a majority of secondary light sources. An aperture stop 104 is arranged at the rear focal plane position of this unit lens. Among the light beams, the light beam passing through the aperture lens 104 passes through a condenser lens 105 and is introduced into the irradiated surface (the mask surface in the exposure device) 1 06. Here, the compound eye is formed The incident surface and illuminated surface of each early element lens of the transparent lens 10 3 are different from each other optically. Therefore, the light beam incident on the fly-eye lens 1 0 3 is divided by the unit lens unit of the fly-eye lens 103. Are superimposed on the illuminated surface 106. Therefore, even if the incident surface of the fly-eye lens 103 has a distribution with a large difference in light and dark, such as a Gaussian distribution, the unit lens unit of the fly-eye lens ι03 is not very The large scale is overlapped with each other and averaged, and an extremely uniform illumination distribution can be obtained on the illuminated surface 106. The optical system using a fly-eye lens as an optical integrator has been described above, but it is known in the past An optical device: By setting two fly-eye lenses along the optical axis direction, the wavefront segmentation and superposition process are repeated twice. Hereinafter, an optical device with only one fly-eye lens is called a single fly-eye lens system, which is -5. -This paper size applies to China National Standard (CNS) A4 (210X 297mm)

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544758 A7 ____B7 V. Description of the Invention ^) '~-The optical system with two fly-eye lenses is a double-eye lens system. Fig. 30 is a diagram showing a > schematic configuration of an example of an exposure apparatus including an illumination optical system using a binocular lens system. In FIG. 30, the light beam from the light source hi such as an excimer laser is transformed by the beam expander ιΐ2 into an arbitrary cross-sectional shape, and then transmitted through a mirror 丨 3 and a crystal prism to reduce the polarization of the beam 丨14 is incident on a first fly-eye lens 115 composed of a plurality of lens elements. The light beam incident on the first fly-eye lens 5 is divided by the wavefront of its lens element, and most secondary light source images are formed on its exit side. The light beams radiated from most of these secondary light sources are condensed by a relay lens 116, as shown in FIG. 31, which illuminate the incident surface of the second fly-eye lens 1 1 7 uniformly and overlappingly. FIG. 31 is a diagram showing a state in which a light beam incident on the second fly-eye lens 7 is irradiated to the second fly-eye lens 117. When the second fly-eye lens 117 is illuminated, the number of lens elements corresponding to the first fly-eye lens m (m is a natural number of 2 or more) and the number of lens elements n of the second fly-eye lens (n is 2 or more) are formed on its exit surface. Most natural light source images of the number mXn product. The light beam from this tertiary light source is limited in diameter by the aperture stop 118, and is condensed by the lens groups 119, 12 1 to uniformly illuminate the photomask 12 3 which depicts the pattern exposed by projection. Here, a field stop 120 is arranged in the lens groups 11 9 and 12 1 to determine the illumination range. Then, according to the uniformly illuminated illumination light, the pattern image formed on the mask 123 is projected on the substrate 125 through the projection optical system 124. The features of the double fly-eye lens system described above for the single fly-eye lens system are as follows: (1) Regarding the effect of uniformizing the illumination illuminance of the lighting mask, the more the number of fly-eye lens divisions (number of lens elements) increases, the more its effect, but the compound Lens-6-This paper size applies to China National Standard (CNS) A4 (210X297 mm)

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544758 V. Description of the invention (5 The numerical aperture of the «Ming Department's observation of the matter 'must be at least illuminated" is as follows: Figure 2 30: Shown in terms of the compound eye lens system, in order to count: Hole ::: 二:? Ge 118 The diameter is as light as the camera ’s light, and it ’s OK-OK: It ’s possible to change the diaphragm. But 'only the aperture diaphragm 118 is changed: When the diaphragm diameter is changed to a small diameter, the beam is shielded: large = reduced. This exposure device Decreased illuminance will reduce production capacity: as a result, the manufacturing cost of manufactured microdevices will increase. Among the 7L + conductors of microdevices, 'especially about the benefits of each of memory' products such as RAM (random access memory) Very few, so the manufacturing cost is a particularly important item. Therefore, "illumination" has become one of the important items in the various specifications of the exposure device, and the reduction of the illumination needs to be avoided as much as possible. In order to prevent the reduction of the illumination, the double-eye lens system described with reference to Fig. 30 Therefore, it is proposed to formulate an irradiation area of the incident surface of the second fly-eye lens 117 that is variable in accordance with the aperture diameter of the aperture stop 118. This method uses the relay lens 116 in FIG. 3 as the focal distance. Variable variable focal length lens (z00m) ... For example, when reducing the diameter of the aperture stop 118, shorten the focal length of the variable focal length lens, and conversely increase the diameter of the aperture stop 118 In this case, the focal length of the variable focal length lens is increased. In this way, the light beam is concentrated near the center of the incident surface of the second fly-eye lens 117, so even if the aperture diameter of the aperture stop is small, it is almost The illuminance of the light beam blocked by the diaphragm 18 will hardly decrease. In addition, in recent years, an aperture diaphragm having an aperture shape other than a circle has been used as the aperture diaphragm 1 1 7. Fig. 32A shows the formation of an annular zone Aperture diaphragm 1 1 8a as an example of a conventional aperture diaphragm with an aperture other than a circle ____ -8- This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) binding 544758 A7 B7 V. Description of the invention (6) Fig. 32B is a diagram showing an example of an aperture stop 11 8b having a plurality of apertures as a conventional aperture stop having an aperture other than a circular shape. Below, referring to Fig. 3 2A, Fig. Aperture stop 118a shown in 32B 118b is briefly explained. If the pattern formed on the mask becomes subtle, and exposure is performed near the analysis limit of the device, then only the light emitted from the aperture stop of the lighting system is helpful for analysis. The light emitted from the central portion of the aperture only has the effect of reducing the contrast of the image. In other words, when the information of the mask is transmitted to the substrate, only the light emitted from the periphery of the aperture stop is emitted from the central portion of the aperture. Speaking of light only generates noise. Therefore, it can be said that it is best not to emit light from the central portion of the aperture stop. From this configuration, an aperture stop 11 8a having an annular band-shaped aperture as shown in FIG. 32A is formed. The aperture stop 11 8b shown in Fig. 32B is a diaphragm when the pattern to be further analyzed is limited to the vertical line and the horizontal line. In this case, the light emitted from the top and bottom and left and right of the aperture stop will only become noise again, so the top and bottom, left and right of the aperture stop will further block light. When a circular aperture stop 11 8a, 1 8b other than the above-mentioned one is used, the focal length of the variable focal length lens is also variable according to the shape (size) of the aperture formed in the aperture stop 11 8a, 11 8b. However, the focal point distance of the variable focal length lens is made variable, and the light beam cannot be prevented from reaching the central part of these diaphragms. For example, if the conventional first fly-eye lens 1 1 5 shown in FIG. 30 is used, as shown in FIG. 33, when the second fly-eye lens 1 1 8 is disposed with the annular aperture stop 1 1 8a, it will be comprehensive. Since the second fly-eye lens 118 is irradiated, there is a problem that the light amount loss becomes large. Fig. 33 is a diagram showing the relationship between the cross-sectional shape of a light beam incident on the second fly-eye lens 118 and the shape of the aperture stop 118a. In addition, JP-A-Heisei 5-206007 -9-This paper size applies to China National Standard (CNS) A4 (210X297)

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544758 A7 B7 V. Description of the invention (8 If the output power of the light source is increased, the life of the light source will be reduced. If the output power of the light source is increased, more light can be obtained, then the life of the light source will be shortened. Significance of increase in output power. However, even if the output power of the light source is increased, the amount of light obtained is also the same. There is no meaning to increase the output power of the light source, and the operating costs required for maintenance and the like are incurred. Disadvantages of rising. Although the relay lens 116 (variable focal length lens) is illustrated as a component in FIG. 30, the actual variable focal length lens considers a variable focal length range with a large variable magnification ratio. And aberrations are constituted by lenses of about 0. In addition, the lens groups 1 19 and 121 arranged between the field diaphragm 12 and the mask 123 are also constituted by 10 lenses, especially the lens group. The 12 series is provided for the optical conjugate relationship between the field diaphragm 120 and the mask 123. As the number of optical members such as a lens increases, the overall transmittance decreases due to the foregoing reasons. Therefore, it is necessary to reduce the number of optical members such as lenses in order to prevent the transmittance from decreasing and increase the efficiency as much as possible. DISCLOSURE OF THE INVENTION The present invention has been made in view of the above problems, and an object thereof is to provide a reduction in the number of optical members such as lenses and prevent a decrease in light quantity. At the same time, when deformed lighting such as annular lighting is performed, the light utilization efficiency can be increased, and a lighting optical device capable of reducing operating costs, an exposure device including the lighting optical device, and a manufacturing method of a micro device using the exposure device can be achieved. In order to solve the above problems, the illumination optical device according to the first aspect of the present invention illuminates the illuminated surface (R, W), which is characterized by including a light source section (丨): a supply beam; a beam conversion mechanism (4, 4 a ~ 4m, 5, 5a-5m '11, 12 " 11-544758 A7 ________ B7 V. Description of the invention (9), 15, 20, 20a, 20b, 2b 22, 40): the light beam from the aforementioned light source section ⑴ A light beam converted into a predetermined cross-sectional shape; and a variable magnification optical system (6, 30): In order to change the aforementioned light beam conversion mechanism (4, 4a to 4m, 5, 5 & ~ 5 claws, etc.) (1, 12, 15, 20, 20a, 20b, 21, 22, 40) The light intensity of the converted beam is split, and the variable focal length is less than 2.3 times the variable focal distance. The aforementioned beam converter bridge (4, 4a ~ 4m) , 5,5a ~ 5m, 11,12,15,20,20a, 20b, 21,22,40) including most conversion optical elements (4a ~ 4m, 5,5a ~ 5m, 20a, 20b, 40): each The types of beam cross-sections to be converted have different conversion characteristics; and the setting section (4, 5, 11, 12, 15, 20, 21, 22): the conversion optical elements (4a to 4m, 5a to 5m, 20a, 20b, 40) is set in the light path. According to the present invention, after the light beam supplied from the light source is converted into a light beam having a predetermined cross-sectional shape using a conversion optical element, its intensity distribution is changed by a variable magnification optical system. Here, the conversion optical element is provided with many types of conversion surveyors having different cross-sectional shapes, and the conversion optical element can be used to obtain a light beam having a rough intensity distribution necessary. Therefore, it is necessary to change the variable range of the intensity distribution of the variable magnification optical system to be narrower than before. Therefore, the variable range of the focal distance of the variable magnification optical system may be narrower than ever. As a result, the structure of the variable magnification optical system can be simplified, so that it is possible to prevent a reduction in the amount of light of the light beam passing through the variable magnification optical system. In addition, the conversion optical element can be converted into a light beam that is deformed for illumination such as endless belt lighting. Therefore, the efficiency of light utilization can be improved when deformed illumination such as endless belt and lighting is performed. Furthermore, 'simplify the structure of the variable magnification optical system and effectively use the light -12 _ This paper scale is applicable to China National Standard (CNS) A4 specifications (210 X 297 mm)' --- 544758 A7 ______B7 V. Description of the invention ( 1〇) As a result of the beam supplied by the source, # 丄 ,, ^ In order to ensure the necessary amount of light, the output power of the light source must also be increased, so the light source can be used for a longer period of time than in the past. In addition, the optical power can be simplified. The structure of the system reduces the chance of photochemical reactions occurring on the surfaces of the optical components constituting the variable magnification and optical system, so that the deterioration of the photocathode component can be suppressed, and the optical components constituting the variable magnification optical system can be used longer. As a result, the operation result can be reduced. In order to solve the above problems, the illumination optical device according to the second aspect of the present invention illuminates the illuminated surface (R, W), which includes a light source unit (丨): a supply beam; a beam conversion mechanism (4, 4a to 4m); , 5, 5a-5m, u, 12, 15, 20, 20a, 20b, 2b, 22, 4)): converts the light beam from the light source unit 成 into a light beam with a predetermined cross-sectional shape; and a variable magnification optical system ( (6, 3〇) In order to change the light intensity of the light beam converted by the aforementioned beam conversion mechanism (4, 4a to 4m, 5, 5a to 5m, 11, 12, 15, 20, 20a, 20b, 21, 22, 40) The distribution 'is composed of 5 or less optical members, and the aforementioned beam conversion mechanism (4, 4a to 4m, 5, 5a to 5m, 11, 12, 15, 20, 20a, 20b, 21, 22, 40) includes most conversion optics Element (4a ~ 4m, 5, 5a ~ 5m, 20a, 20b, 40): each kind of beam cross-section shape to be converted has different conversion characteristics; and the setting section (4, 5, 1 1, 12, 15, 20 , 21, 22): One of the conversion optical elements (4a to 4m, 5a to 5m, 20a, 20b, 40) is set in the optical path. According to the present invention, the same as the illumination optical device according to the first aspect of the present invention, the light beam supplied from the light source is converted into a light beam having a predetermined cross-sectional shape by a conversion optical element, and then its intensity distribution is changed by a variable magnification optical system. _ -13- The size of this paper is in accordance with China National Standard (CNS) A4 (210 X 297 mm)

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Here, the conversion optical element is provided with a large number of conversion surveyors having different kinds of cross-sectional shapes, and the conversion optical element can be used to obtain a light beam having a rough intensity distribution necessary. Therefore, the variable range of the intensity distribution that needs to be changed by the variable magnification optical system may be a narrower range than before. Therefore, the number of optical members constituting the variable magnification optical system may be smaller than the conventional number. As a result, the configuration of the variable magnification optical system can be simplified, so that it is possible to prevent a reduction in the amount of light of the light beam transmitted through the variable magnification optical system. In addition, the conversion optical element can be converted into a light beam that is subjected to deformed illumination such as ring-shaped illumination. Therefore, it is also possible to improve light utilization efficiency when deformed illumination such as annular lighting is performed. Order

Furthermore, as a result of simplifying the structure of the variable magnification optical system and effectively utilizing the light beam supplied from the light source, in order to ensure the necessary amount of light and increase the output power of the light source, the light source can be used for a longer period of time than before. In addition, the number of optical components constituting the variable magnification optical system is reduced, and the probability of photochemical reactions occurring on the surfaces of the optical components constituting the variable magnification optical system is reduced. Therefore, the deterioration of the optical components can be suppressed, and the structure can be used for a longer period of time than before. Optical component of a variable magnification optical system. As a result, it is possible to reduce the operation result.

In addition, the 'illuminating optical device according to the first aspect and the second aspect of the present invention' further includes an optical integrator (7, 31), which is disposed on the variable magnification optical system (6, 30) and the illuminated surface. (R, w) uniformly illuminates the illuminated surface (R, W) and the condensing optical system (10, 32): disposed on the optical integrator (7, 31) and the illuminated surface (R , W) ”to direct the light from the aforementioned optical integrator (7, 3 1) to the aforementioned illuminated surface (R ______ ^ -14- This paper size applies to China's national A4 specification (21〇X 297 mm) ~ " '544758 A7 B7

5. Description of the invention (12, W) 〇 In addition, the "illuminating optical device according to the first and second aspects of the present invention" includes the optical components (6a to 6d) of the variable magnification optical system (6, 30), The total number of 30a to 30d) and the above-mentioned condensing optical system (10, 32) and optical structure # (6a to 6d, 30a to 30d) is preferably 10 or less. In addition, according to the "illuminating optical device according to the first aspect and the second aspect of the present invention", it is preferable that the variable magnification optical system (6, 30) includes at least one optical element having an aspherical surface. _ Furthermore, the 'illuminating optical device according to the first aspect and the second aspect of the present invention' is characterized in that the aforementioned beam conversion mechanism (4, 4a to 4in, 5, 5a to 5m, 11, 12, 15, 20, 20a, 20b, 21, 22, 40) At least two of the beams having a circular cross-sectional shape, a beam having a% π cross-sectional shape, or a majority of the beams eccentric to the reference optical axis are converted from the light beams from the aforementioned light source (1). Kind of beamer. The illumination optical device according to the first aspect and the second aspect of the present invention is characterized in that the setting section (4, 5, η, 12, 15, 20, 2m, 22) includes a holding member (4, 5, 22): holding the majority of the aforementioned conversion optical elements such as ~ 4m, 5a ~ 5101, pass, 201}, 4〇); and the driving part (11, 12, 21): the holding member (4, 5 , 22) Rotate or move. In addition, according to the first aspect and the second aspect of the present invention, the setting unit (4, 5, ", December, July: 22) includes a first holding member (4): holding the majority of the conversion optics Element (4 \ ~ 4m) —part; second holding member (5): holding the remainder of most of the aforementioned conversion optical element (5a ~ 5m) _; and the driving part 12, 12 广 使 -15- 544758 A7 B7 5. Description of the invention (13) The aforementioned first and second holding members (4, 5) are rotated or moved. In addition, according to the first aspect and the second aspect of the present invention, the illumination optical device is characterized in that when the variable magnification ratio of the aforementioned variable magnification optical system (6, 30) is Z, 8 persons are satisfied . ° In addition, the illumination optical device according to the first aspect and the second aspect of the present invention is characterized in that the beam conversion mechanism is a conversion optical that converts a beam from the light source unit into a plurality of beams that are deviated from the reference optical axis. The element includes an interchangeable optical element that is changed as the amount of eccentricity of each light beam in a first direction orthogonal to the reference optical axis and the amount of eccentricity in a second direction orthogonal to the reference optical axis and the first direction are different. In order to solve the above problems, the illumination optical device according to the third aspect of the present invention illuminates the irradiated surface (R, w), which is characterized by including a light source unit 供应 ·· supplying a light beam and a 'beam conversion mechanism ····· such as the illumination light The pupil plane becomes a majority of the beams decentered with respect to the reference optical axis (AX), and the beam from the light source unit is converted as described above. The beam conversion mechanism includes a conversion optical element. The amount of deflection of the illumination pupil plane in the direction is different from the amount of decentering of the illumination pupil plane in a first direction that is orthogonal to the reference optical axis and the first direction. According to the present invention, since the light source supplied by the light source is converted into a majority of light beams eccentric to the reference optical axis by the conversion optical element on the illumination pupil surface, the number of optical components on the optical path can be extremely reduced, and as a result, the illumination photo-system can be prevented. The amount of light is reduced. In addition, according to a third aspect of the present invention, there is provided an illumination optical device, characterized in that: an illumination optical device disposed between the beam conversion mechanism and the illumination pupil surface

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544758 A7 B7 V. Description of the invention (14) Optical system. Here, it is preferable that the optical system has a predetermined fixed magnification or a variable magnification optical system for changing the light intensity distribution of a light beam converted by the light beam conversion mechanism. -In addition, the illumination optical device according to the first to third aspects of the present invention is characterized in that the light beam conversion mechanism includes a conversion optical element group composed of a plurality of conversion optical elements, and the plurality of conversion optical elements are not to change the first The beam eccentricity in one direction switches the beam eccentricity in the second direction in stages, and sets the conversion characteristics in the second direction to different characteristics. In addition, the illumination optical device according to the first to third aspects of the present invention is characterized in that the beam conversion mechanism includes a group of conversion optical elements composed of a plurality of conversion optical elements, and the plurality of conversion optical elements maintain the first In a state of a ratio of the beam eccentricity in the direction and the beam eccentricity in the second direction, in order to gradually switch the eccentricity with respect to the reference optical axis, the conversion characteristics of the first direction and the second direction are set to People with different characteristics. The illumination optical device according to the first aspect to the third aspect of the present invention is characterized in that the light beam conversion mechanism includes a conversion optical element group composed of a plurality of conversion optical elements, and the plurality of conversion optical elements maintain the light beam with respect to the foregoing In the state of the eccentricity amount of the reference optical axis, in order to switch the eccentricity amount in the first direction and the eccentricity amount in the second direction in stages, the conversion characteristics of the first direction and the second direction are set to different characteristics. The exposure device of the present invention is characterized by including the above-mentioned illumination optical device. -17- The paper size is applicable to the Chinese National Standard (CNS) A4 specification (210X297 mm).

Line 544758 A7 B7 V. Description of the invention (15 sets) and 'projection optical system (PL); those that project the pattern of the light and cover (R) arranged on the illuminated surface onto the photosensitive substrate (w). The method for manufacturing an inventive microdevice is characterized by comprising an exposure process (S 14): exposing a pattern formed on the aforementioned photomask (R) to a photosensitive substrate (W) using the above-mentioned exposure device; and, developing Manufacturing process (S16): The exposed photosensitive substrate (W) is developed. Brief Description of Drawings Fig. 1 shows an illumination optical device according to a first embodiment of the present invention and an illumination optical device including the first embodiment of the present invention. Figure 2 shows the schematic structure of the exposure device. Figure 2 is a perspective view showing an example of converter 4, 5. Figure 3 A is a front view showing an example of converter 5--Figure 3 B is a front view showing an example of converter 4 Fig. 4A is a view showing cross-sectional shapes of the diffractive optical elements 4a to 41 and the diffractive optical elements 5a to 51 as viewed from the X direction. Fig. 4B is a view showing the incidence of the diffractive optical elements 4 & ~ 41 and the diffractive optical elements 5a to 51. A graph of beam diffraction. Figure 4C Far field pat terns-examples of light diffracted by diffractive optical elements 43 to 41 and diffractive optical elements 5 a to 51 are shown. Fig. 5A is a view showing a case where a light beam is incident on the diffractive optical element 4a as an example. Fig. 5B is a cross-sectional view of the case where the light beam is incident on the diffractive optical element 乜 from the X direction as an example. Fig. 5C is an example of the light beam being incident on the diffractive optical element z from the z direction as an example. China National Standard (CNS) A4 Specification (210X297 Public Love)

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Line 544758 A7 B7 V. Sectional view of the case of the invention description (16). FIG. 6 is a diagram illustrating the illuminating area of the diffractive optical element 4a formed on the incident surface of the fly-eye lens 7. As shown in FIG. FIGS. 7A and 7B are diagrams showing an example of an illumination area formed on the incident surface of the fly-eye lens 7 by the diffractive optical elements 5 a to 51. Figs. 8A to 8E are diagrams showing other examples of the shape of the cross section of the light beam when the light beams are decentered with respect to the optical axis AX by using the diffractive optical elements 5a to 51. FIG. 9 is a diagram showing an example of an illumination area where a 5 m beam of light passing through the aperture-claw is formed on the incident surface of the fly-eye lens 7. FIG. 10A and 10B are side views showing a specific structure of the variable focal length optical system 6. As shown in FIG. 11A and 11B are diagrams showing changes in the irradiation area on the incidence surface side of the fly-eye lens 7 when the focus distance or focus position of the variable focus optical system 6 is adjusted by the driving device 13. 12A to 12C are diagrams showing changes in the irradiation area on the incident surface side of the fly-eye lens 7 when the focus distance or focus position of the variable focus optical system 6 is adjusted by the driving device 13. Fig. 13 is a diagram showing the configuration of an illumination optical device according to a second embodiment of the present invention and an exposure apparatus according to the second embodiment of the present invention. Fig. 14 is a diagram showing the configuration of an illumination optical device according to a third embodiment of the present invention and an exposure apparatus according to the third embodiment of the present invention. Fig. 15 is a perspective view showing a refractive optical element that can be used instead of diffractive light, and the optical elements 4a to 41 or 5a to 5b are diffractive optical elements 20a, 20b, .... FIG. 16 is a front view showing a first modification of the diffractive optical element exchange mechanism. ______- 19- This paper size applies to China National Standard (CNS) A4 (210 X 297 mm)

FIG. 17 is a top view, FIG. 18 is a top view, FIG. 19 is a top view, FIG. 20 is a top view, FIG. 20 is an illumination area of FIG. 22, FIG. 23 is a diffractive optical view, FIG. 24 is a diffractive optical view, and FIG. Fig. 0 shows a front view of a second modification example of the diffractive optical element exchange mechanism. Fig. 0 shows a front view of a third modification example of the diffractive optical element exchange mechanism. ^ Front view of four modification examples.

A front view showing a fifth modification of the diffractive optical element exchange mechanism. A front view showing a sixth modification of the diffractive optical element exchange mechanism. This figure shows an example of the layout according to the transfer pattern on the wafer_pattern IA. … A diagram illustrating element conversion characteristics provided in the illumination optical system according to the fourth embodiment of the present invention. Order

A diagram illustrating element exchange characteristics provided in an illumination optical system according to a fourth embodiment of the present invention. A diagram illustrating element conversion characteristics provided in an illumination optical system according to a fourth embodiment of the present invention. Fig. 27 shows a schematic configuration of an illumination optical device according to a fifth embodiment of the present invention and an exposure apparatus including the illumination optical device according to the fifth embodiment. Fig. 27 is a flowchart showing a method for obtaining a semiconductor device as a microdevice. FIG. 28 is a flowchart of a method for forming a predetermined pattern on a board by using the exposure apparatus of this embodiment to get a liquid crystal display element as a microdevice. FIG. 29 is a schematic diagram of an optical system using a conventional fly-eye lens. Figure 3 0 shows the ____ -20- & Zhang Ruler_Zhongguanjia Standard (CNS ·) A4 Specification _ χ 297 public love) equipped with an illuminating optical system using a binocular lens system 544758 A7 _B7 V. Description of the invention ( 18) A schematic configuration of an example of an exposure device. Fig. 31 is a diagram showing a state in which a light beam incident on the second fly-eye lens 17 is irradiated to the first fly-eye lens 114. Fig. 32A is a view showing an example of an aperture stop 118 & having a circular band-shaped aperture as a conventional aperture stop having an aperture other than a circular shape. Fig. 32B is a view showing an example of an aperture stop 118b having a plurality of apertures as a conventional aperture stop having an aperture other than a circular shape. Fig. 33 is a diagram showing the relationship between the cross-sectional shape of a light beam incident on the first fly-eye lens 118 and the shape of the aperture stop 118a. Embodiments of the Invention Hereinafter, a manufacturing method of an illumination optical device, an exposure device, and a micro device according to embodiments of the present invention will be described in detail with reference to the drawings. Also, Γ is explained below. When the XYZ orthogonal coordinate system is shown in the figure, the positional relationship of each member between the drawings will be described with reference to the XYZ positive X coordinate system. The XYZ orthogonal coordinate system added to the drawing sets the X-axis and the γ-axis so as to be parallel to the wafer W as the photosensitive substrate, and sets the z-axis to the direction of the fork with respect to the wafer w. The XYZ coordinate system in the figure actually sets the χγ plane on a plane parallel to the horizontal plane, and sets the Z axis in the vertical direction. [First embodiment] Fig. 1 is a diagram showing a schematic configuration of an illumination optical device according to a first embodiment of the present invention and an exposure apparatus provided with the illumination optical device according to the first embodiment of the present invention. First, referring to Fig. 1, the entire configuration of the illumination optical device according to the first embodiment of the present invention and the exposure apparatus according to the first embodiment of the present invention will be described, and then the embodiment of the characteristic part of the present invention will be described in detail. In Figure 1 —_ -21- The paper size is applicable ~ 544758

The medium / light source is a light source such as a nitrogen fluoride excimer laser that emits ttW skin length 248 _ laser light, which corresponds to a light source unit that supplies the so-called light beam of the present invention. A substantially parallel light beam emitted from the light source 1 in the z direction has a rectangular cross-section extending along the length of the beam, and is incident on the light composed of a pair of cylindrical lenses. The paired cylindrical lenses provided in the beam expander 2 have a negative refractive index and a positive refractive index in the paper plane (in the YZ plane) of FIG. ^, And include the optical axis AX in a plane orthogonal to the paper plane (in the χζ plane). ) Acts as a parallel plane plate. Therefore, the light beam incident on the beam expander 2 is enlarged in the paper surface of FIG. 1 and formed into a light beam with a predetermined cross section, for example, a light beam with a square cross section. The light beam that has passed through the beam expander 2 as the shaping optical system is deflected in the Υ direction by the bending mirror 3 and then incident on the diffractive optical element (DOE: Diffractive Optical Element) provided on the converter 4 or the converter 5 Diffractive optical element. These diffractive optical elements convert an incident light beam into a predetermined cross-sectional shape, for example, a light beam having a circular cross-sectional shape, a light beam having a ring-shaped cross-sectional shape, and at least two types of light beams eccentric to the optical axis Aχ which is a reference optical axis. Is equivalent to a conversion optical element forming part of the so-called beam conversion mechanism of the present invention. Further, a case will be described in which the present embodiment is provided with a diffractive optical element capable of converting incident light to any one of light beams having a cross-sectional shape. In addition, FIG. 1 illustrates a case where a diffractive optical element converted into a light beam having an endless cross-sectional shape is disposed on the optical axis AX. The converters 4 and 5 correspond to the so-called first and second holding members of the present invention, and the so-called holding members of the present invention are collectively referred to as these converters 4 and 5. Rpm -22- This paper size applies to China National Standard (CNS) A4 (210X 297 mm) m order

k 544758 V. Description of the invention (20 A7 B7

The switches 4, 5 are driven by the rotary driving devices 11, 12, respectively, and their rotation angles are set under the control of the main control system 15. The rotary driving devices 丨 丨, 丨 2 correspond to the so-called driving section of the present invention, and the rotary driving apparatuses n and 12 and the main control system 15 correspond to the so-called setting section of the present invention. &quot; A light beam transformed into a predetermined shape by a diffractive optical element provided in the converters 4, 5 is incident on a variable focal length optical system 6 which is the most characteristic part of the present invention. This variable focal length optical system 6 corresponds to the so-called "variable magnification optical system" of the present invention, and is provided for changing the light intensity of a light beam whose cross-sectional shape is changed by a diffractive optical element. This variable focal length optical system 6 is composed of 5 or less optical members' and the focal length is set to be variable at a variable magnification ratio of 2 · 3 or less. The variable magnification ratio of the variable magnification optical system is determined by dividing the longest focal distance &amp; of the variable magnification optical system by the value (fT / fw) of the shortest focal distance fW of the variable magnification optical system. << Therefore, five optical components included in the variable focal length optical system 6 are used to prevent the reduction of the wavelength of light emitted from the light source; the amount of transmitted light of the variable focal length optical system 6 is reduced. In addition, it is to reduce the number of surfaces to reduce the occurrence rate of photochemical reactions on the surface of the optical component, reduce the degradation of the optical component, and maintain performance while reducing the number of operations required to exchange the optical component. ㈣ It is to form fine patterns on the wafer to obtain better lighting conditions. The variable range of the focal distance can be ensured under the magnification of 3 times or less (under 2.3 times g). In addition, the reason why the car is variable. That is, in the past, μ is less than or equal to 3 times, and the number of diffractive optical elements with different emission characteristics is described by the following g. #

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Line 544758 A7 _B7 V. Description of the Invention (21) The light intensity distribution of a beam that changes the cross-sectional shape of any of the diffractive optical elements is changed by using a variable focal length optical system with a variable focal distance in a wide variable range. That is, in the past, in order to change the light intensity of a light beam, a few types of diffractive optical elements and a wide variable range of variable focal length light were used to study the system. However, the variable range of the focal length of the variable focal length optical system has a wide variable range, the number of spectroscopic components will increase, and the structure will need to be complicated in order to minimize the aberrations that match the focal distances. The number of optical components of the zoom optical system has increased. Therefore, in this embodiment, a plurality of diffractive optical elements having different types of converted beam cross-sectional shapes and different conversion characteristics are provided in the converters 4 and 5, and one of the diffractive optical elements is fine-tuned using a simple variable focal length optical system 6. The light intensity distribution of a light beam whose cross-sectional shape is transformed. Here, when the manufacturing errors and position adjustment errors of the lenses 6a to 6d included in the variable focal length optical system 6 are small, the variable magnification ratio of the variable focal length optical system 6 may be designed to be 2 or less. Therefore, in order to simplify the structure of the variable magnification optical system such as the variable focal length optical system 6, it is preferable that the variable magnification ratio of the variable magnification optical system is 2 or less. In order to further simplify the variable magnification optical system, The structure 'is preferably such that the variable magnification ratio of the variable magnification optical system is 1.8 or less. At this time, in order to simplify the structure of the variable magnification optical system to the limit while suppressing the number of beam conversion elements, it is preferable that the variable magnification ratio of the variable magnification optical system is limited to 丨. 2 or more. Here, if the lower limit of the variable magnification ratio of the variable magnification optical system is taken into consideration and the variable magnification ratio of the variable magnification optical system is Z, then the variable magnification ratio of the variable magnification optical system is 2 to -24-ϋ Zhang scale applies Chinese National Standard (〇Ν8) Αθλ ^^ 〇 × 297mm) ----

Binding m-line 544758 A7 —.__ _B7 5. In the description of the invention (22), it is better to satisfy the range of 1.22 $ 2, and when the variable magnification ratio of the variable magnification optical system is less than 1.8, it is better to satisfy 12 £ 2 ^ 18 range. In addition, at least one lens surface of the lenses 6 a to 6 d included in the variable focal length optical system 6 is preferably formed as an aspheric surface to minimize the remaining aberration. The structure and operation of the variable focal length optical system 6 will be described in detail later. The lenses 6b to 6d provided in the cross-focus optical system 6 are driven by the driving device 13 'to adjust the position in the γ-axis direction under the control of the main control system 15 to set the optical focal distance. -Uniform illumination by overlapping the light beams of the variable focal length optical system 6 as uniform illumination provided on the single-image mask surface (pattern-forming surface) of the single-image mask (reticle) R and then on the wafer W (wafer surface) Incidence surface of the fly-eye lens 7 of the optical integrator. Also, the single image mask surface and the wafer surface correspond to the irradiated surface referred to in the present key. The fly-eye lens 7 is composed of a plurality of unit lenses having positive refractive power arranged vertically and horizontally along the optical axis. In addition, the surface on the incident side of each unit lens constituting the fly-eye lens 7 has a spherical shape with the convex surface facing the incident side, and the surface on the exit side has a spherical shape with the convex surface facing the exit side. Therefore, the light beam incident on the fly-eye lens 7 is two-dimensionally divided by a plurality of unit lenses, and a plurality of light source images are respectively formed on the rear focal planes of the unit lenses incident on the light beam. In this way, a secondary light source having the same cross-sectional shape as the cross-sectional shape of the light beam incident on the incident surface of the fly-eye lens 7 is formed on the rear focal plane of the fly-eye lens 7. A light beam from an endless belt-shaped secondary light source formed on the focal surface on the rear side of the fly-eye lens 7 is incident on an aperture stop 8 arranged in the vicinity thereof. This aperture stop 8 is supported on a rotating plate (not shown in Fig. 1) rotatable around a predetermined axis parallel to the optical axis AX. In addition, the shape of the aperture stop 8 is set at the converter _____-25-This paper size is applicable to the S standard (CNS) A4 specification (210 X 297 public love) --- 544758 A7 B7 V. Description of the invention (twenty three

The cross-sectional shape of the beam transformed by the diffractive optical elements of 4, 5 is selected. The light beam from the surface light source on the exit side of the fly-eye lens 7 is emitted: after the shape of the light beam, it is deflected by the mirror 9 in a z-direction and the optical system 10 is first. The light beam transmitted through the condensing optical system 10 overlaps and illuminates the patterned single-image mask R. Here, in FIG. 15, the condensing optical system 10 is simplified as a lens, but the total number of optical components included in the aforementioned variable focal length optical system 6 and the condensing optical system 10 is set to 0 or less.

The conventional double-eye lens system shown in FIG. 30 is disposed between the condenser optical system i 19 and the mask 123 to determine a field diaphragm 120 ′ for determining the illumination range of the single-image mask R. In order to make this field diaphragm 12 and The single-image mask surface of the single-image mask R is optically conjugated, and a relay optical system 12 1 needs to be installed in the optical path between the field diaphragm i 20 and the single-image mask R. Therefore, since many optical members are provided between the fly-eye lens 7 and the single-image mask R, it is not desirable from the viewpoint of a reduction in the amount of transmitted light. On the other hand, in the present embodiment, a single-image mask stretch plate RB serving as a field stop is arranged near the upper surface of the single-image mask R, thereby eliminating the relay optical system, and as a result, the fly-eye lens 7 and the single-image light can be simplified. Structure between hoods R. As a result, the amount of transmitted light from the secondary light source formed on the focal plane on the rear side of the fly-eye lens 7 can be increased. The single-image mask baffle RB is driven by the driving device 14 and the illumination area of the single-image mask r is set under the control of the main control system 15. The single-image mask guard is uniformly illuminated in an overlapping manner, and the pattern image formed on the single-image mask r is projected onto the wafer w through the projection optical system PL, thereby transferring the pattern of the single-image mask R to the wafer W. In addition, the pupils and illumination of the projection optical system pl -26- This paper size applies to China National Standard (CNS) A4 (210 X 297 mm)

Line 544758 A7 ___ B7 V. Description of the Invention (24) The pupil surface of the optical device, that is, the surface on which the aperture light beam 8 is arranged is optically set to be conjugated. In this way, the wafer w is driven and controlled two-dimensionally in a plane (χΥ plane) orthogonal to the optical axis Ax of the projection optical system pL, and one exposure or scanning exposure is performed, thereby exposing each exposed area of the wafer w. The pattern of the single image mask R is gradually exposed. Another 'exposure is based on the so-called step and repeat method', which exposes the mask pattern to each exposure region of the wafer W once. In this case, the shape of the illumination region on the single-image mask R is a rectangle close to a square, and the cross-sectional shape of each unit lens of the fly-eye lens 7 also becomes a rectangle close to a square. On the other hand, the scanning exposure is based on a so-called step and scan method. While the single image mask r and the wafer w are relatively moved with respect to the projection optical system PL, the exposure areas of the wafer w are formed on The pattern scanning exposure of the single image mask R. In this case, the shape of the illumination region on the single-image mask R is a rectangle having a short side to long side ratio of, for example, 1: 3, and the cross-sectional shape of each unit lens of the fly-eye lens 7 also becomes a rectangle similar to this. In addition, the light source 1 described above, the beam expander 2, the bending mirror 3, the converters 4, 5 with a plurality of diffractive optical elements, the variable focal length optical system 6, the fly-eye lens 7, the aperture stop 8, and the mirror 9 The condenser lens 10, the single-image mask baffle RB, and the rotation driving devices 11, 12 constitute the illumination optical device of the present invention. This illumination optical device and a single-image mask stage on which the single-image mask R is placed (illustrated) (Omitted), the projection optical system PL, and the wafer stage (not shown) on which the wafer W is placed constitute the exposure apparatus of the present invention. In the above, the outline of the overall structure of the illumination optical device according to the first embodiment of the present invention and the exposure apparatus according to the first embodiment of the present invention has been described, and then _ 27-This paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm) ) &quot; &quot; * &quot; 544758 A7 ______B7 V. Description of the Invention (25 ~) &quot; The structure of the converters 4, 5 and the variable focal length optical system 6 with most diffractive optical elements will be explained in detail. Fig. 2 is a perspective view showing an example of the converters 4, 5 and Fig. 3 is a front view thereof. As shown in FIG. 2, the converters 4 and 5 are configured as follows: the rotation axis is arranged parallel to the optical axis AX and eccentric from the optical axis AX, and most of the diffractive optical elements and apertures provided in the converter 4 are arranged. One of the plurality of diffractive optical elements and the aperture provided in the converter 5 is arranged on the optical axis. FIG. 3A is a front view showing an example of the converter 5, and FIG. 3B is a front view showing an example of the converter 4. As shown in Fig. 3A, the converters 5 are arranged along the circumferential direction 'of the diffractive optical elements 5a to 51 and the aperture 5m in the circumferential direction. The diffractive optical elements 5a to 51 diffract the incident light beam and convert it into a plurality of light beams eccentric with respect to the optical axis αx so that each diffraction characteristic (for example, a diffraction angle) is different. -Similarly, in the converter 4 along the circumferential direction, the diffractive optical elements 4 a to 41 and the aperture 4 m are arranged in the circumferential direction. These diffractive optical elements 4 a to 4 i diffract the incident light beam and transform it into a ring-shaped cross-sectional shape. The light beam is set to have different diffraction characteristics (for example, a diffraction angle). The apertures 4m and 5m are provided so as not to change the cross-sectional shape of the incident light beam and only transmit it. When the beam cross-sectional shape is converted into a beam having a circular cross-sectional shape, both the aperture 4m and the aperture 5m are arranged on the optical axis AX. In addition, when the majority of the beams are decentered with respect to the optical axis AX, any one of the aperture 4m and the diffractive optical elements 5a to 51 is arranged on the optical axis AX. In addition, when converted into a light beam having a ring-shaped cross-sectional shape, any of the diffractive optical elements 4a to 41 and the aperture 5m are arranged on the optical axis AX. The diffractive optical elements 4a to 41 and the diffractive optical elements 5a to 51 are phase-type diffraction -28- The paper scale is applicable to the Chinese National Standard (CNS) A4 specification (210X297 mm) '------

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Line 544758 A7 __B7 V. Description of the invention (26) The optical element is composed of a plurality of minute phase patterns and transmittance patterns. 4A is a view showing cross-sectional shapes of the diffraction prior elements 4a to 41 and the diffractive optical elements 5a to 51 as viewed from the X direction, and FIG. 4B is a view showing diffraction incident on the diffractive optical elements 4a to 41 and the diffractive optical elements 5a to The diagram of the case of the 51 beam 'is a far fieldp at tern showing light diffracted by the diffractive optical elements 4a to 41 and the diffractive optical elements 5a to 51-an example. Of the light incident on any of the diffractive optical elements 4a to 41 and the diffractive optical elements 5a to 51, the phase of the light transmitted through the portion indicated by A is zero, and the light transmitted through the portion indicated by b is opposite to the light transmitted through A. , The phase is only π slower. Therefore, in wave optics, the two lights cancel each other out, as shown in Figure 4B, there is no zero-order light (directly transmitted light). Therefore, the light transmitted through any of the diffractive optical elements 4a to 41 and the diffractive optical elements 5a to 51 is diffracted as a tertiary light (or a tertiary light) and is incident on the variable focal length optical system 6. Further, as shown in FIG. 4C, the illumination having a function-like intensity distribution I on a certain straight line in the predetermined irradiation surface P becomes illumination. By utilizing this phenomenon, a diffractive optical element added with variously changing phase patterns or transmittance patterns can achieve a desired light intensity distribution on the irradiation surface p, that is, the incident surface of the fly-eye lens 7. The above-mentioned diffractive optical element refers to all elements that diffract light by differences in phase, transmittance, refractive index, and the like. FIG. 5A is a perspective view showing a case where a light beam is incident on the diffractive optical element 4a as an example. FIG. 5B is a sectional view when a light beam is incident on the diffractive optical element 4a as an example when viewed from the X direction. FIG. 5C is a view from z as an example. A cross-sectional view of a case where a light beam is incident on the diffractive optical element 4 a when viewed in a direction. Here, the angle formed in the YZ plane and the optical axis AX is 0y, and the angle formed in the χγ plane and the optical axis αχ. -29- The paper mark scale applies the Chinese National Standard (CNS) A4 specification (210X297 public love)

A7 B7 5. The angle of the invention description (27) is 0X. The incident light is diffracted by the diffraction angle Q ^ X0 X 1, 0 M to Θ y 1 due to the diffraction characteristics of the diffractive optical element 4a, and the cross-sectional shape of the diffracted light becomes a slightly annular shape. Further, an optical intensity distribution in the shape of an annular band is formed on the incident surface of the complex eye opening ′ 7 through the variable focal length optical system 6. FIG. 6 is a diagram illustrating an irradiated area of the diffractive optical element 4a formed on the incident surface of the fly-eye lens 7. FIG. As shown in FIG. 6 ', when the diffractive optical element 4a is used, the cross-sectional shape of the diffracted light beam becomes a slightly annular shape. Further, the light beam passing through the variable focal length optical system 6 forms a substantially uniform light intensity distribution on the incident surface of the fly-eye lens 7 only in the road-strip-shaped illumination area IA indicated by the diagonal line. Here, 'an opening area aa formed by the aperture stop 8 arranged corresponding to the diffractive optical element 4a is shown by a circled line indicated by a dotted line. As is also clear from FIG. 6, since the endless belt-beam formed by the optical element 4 a and the variable focal length optical system 6 can be used to illuminate only the unit lens 7 a ′ corresponding to the shape of the aperture stop 8 and the fly eye lens 7, it can be extremely polarized. The amount of light from the light source 1 is used efficiently. In addition, in order to further improve the lighting efficiency, the lighting may be performed along the contour of the unit lens that only contributes to the light beam passing through the annular aperture stop 8. In this case, a diffractive optical element that sets the diffraction angles 0 χ, 0 y to illuminate only the unit lens 7a that helps to pass the light beam passing through the annular aperture stop 8 is set as, for example, the diffractive optical element 4b, while finely adjusting the variable zoom The magnification of the optical system 6 is sufficient. In the above, the case of converting into a light beam having an endless belt-shaped cross-sectional shape has been described, and the case of converting into a plurality of light beams eccentric to the optical axis Ax has been described next. In this case, the main control system 5 controls the rotary driving device Η to rotate the converter 4 and arrange the aperture 4m (refer to Figure 3B) on the optical axis. -___________ ~ 30-The standard of this paper is applicable to the Chinese national standard (CNS) A4 specification (2ι〇 × 297) 嫠 544758 A7 ________B7 V. Description of the invention (28 ~~ &quot; At the same time, the converter 5 is rotated by controlling the rotation driving device 12, and any one of the diffractive optical elements 5a ~ 51 is rotated. It is arranged on the optical axis αχ. In addition, in the case of converting most of the beams eccentric to the optical axis AX, it is replaced with a beam shape adapted to the conversion aperture optical frame_ 8. The diffractive optical elements 5a to 51 will diffract the beam cross section. The shape is transformed into a shape separated in four directions. Furthermore, after passing through the variable focal length optical system 6, the incident surface of the fly-eye lens 7 is formed into an illumination area IA having a quadrupole light intensity distribution as shown in FIG. 7. FIG.-7A 7B is a diagram showing an example of an illumination area formed on the incident surface of the fly-eye lens 7 by the diffractive optical element 52-51. When the diffractive optical elements 5a to 51 having such diffraction characteristics are used, as shown in FIG. 7A, it is not useless. illumination The cross-shaped area in the center of the fly-eye lens 7 can greatly improve the illuminance efficiency. It is better to use one of the quadrupole shapes in a polygonal shape, especially the pentagonal shape as shown in FIG. 7B. The 7-inch size of the Zhuoyuan lens of the compound eye transparent lens 7 can maintain the uniformity of the illuminance and improve the illuminance efficiency. In addition, the exposure device, especially in the step-scan method, is configured as a wavefront split-type optical Most unit lenses of the fly-eye lens 7 of the integrator are rectangular in various shapes. In this case, 'if the edge direction of the illumination area formed on the fly-eye lens 7 is in the direction corresponding to the scanning direction of the majority unit lens 7a (typically, Along the direction along the short side of the unit lens 7a), the illuminance distribution on the wafer W may not be a desired distribution in the scanning orthogonal direction. Therefore, it is best to use the diffractive optical element 5 when performing quadrupole illumination. a to 5 1 and the variable focal length optical system 6 make the edge directions of the four illumination areas formed on the incident surface of the fly-eye lens 7 correspond to and constitute Fly-eye lens 7 is more-31- The paper size is applicable to the Chinese National Standard (CNS) A4 specification (210 X 297 mm) '&quot; ~ 544758

The direction corresponding to the scanning direction of the digital unit lens 7a, that is, the short-side direction of the unit lens is inclined. 8A to 8E are diagrams showing other examples of beam cross-sectional shapes when the diffractive optical elements 5a to 5] are used to convert a majority of the beams decentered with respect to the axis AX. Fig. 8a shows an example in which the four illumination areas formed on the incident surface of the fly-eye lens 7 are considered to be oval. Fig. 8B is a diagram showing the relationship between the recognition of these majority illumination areas and the incidence plane of the majority unit lens 7 constituting the fly-eye lens 7. In this mood, the edge of the illumination area IA becomes a continuously inclined direction with respect to the direction corresponding to the scanning direction of the unit lens. As can also be seen from FIG. 8B, the edges of the elliptical illumination area IA are not at the same position for most of the unit lenses 7a, so the unevenness of the illuminance distribution on the illuminated surface can be reduced (the bias from the desired distribution). It is the non-uniformity of the scanning orthogonal direction. -In this case, even if the aperture stop 8 on the exit side of the fly-eye lens 7 is not used to shield the unit lenses whose edges of the illumination area in most of the unit lenses 7a intersect, it is possible to obtain the effect of reducing uneven illumination. Furthermore, even in the case where the aperture stop 8 is not used (or in the case of the largest aperture), the effect of reducing uneven illumination can be obtained. Therefore, even if the relay lens 8 is a variable focal length optical system and the positions of most of the illumination areas IA are continuously changed, it is not necessary to continuously change the position of the aperture portion of the aperture stop 8 corresponding to these illumination areas IA. In addition, as shown in FIG. 8C, the shape of the four illuminated areas may be circular. From the standpoint of improving imaging performance, the shape of most of the illuminated area IA is oval as shown in Fig. 8a. For example, Fig. 8C is circular, which can make the light quantity distribution of the secondary light source on the exit side of the fly-eye lens 7 away from the light. Shaft, better. Exposure device in the step-and-scan method ’even if the edge direction of most illuminated areas is -32- This paper size applies the Chinese National Standard (CNS) A4 specification (210X297 public love)

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Line M4758 V. Description of the invention (30 and the scanning orthogonal direction are in the same direction, and the exposure is integrated along and interpolated, so you can also :: the uneven illumination of the direction is also a sweep so 'just diffractive optical element 5a ~ 51 ^ This body The shape of most of the illuminated area IA is + 夂 ..., and it forms an angular shape from the optical system 6. If === is a six-thin direction as shown by _, and the edges of the illuminated area 1A are diagonally crossed, then Reduce the unevenness of the illuminance caused by I. If it is set to be oblique to the edge of the lighting area recognized in the direction corresponding to the unit ^ 2: the direction of the universal direction, the shape of the area: ',,' It is not limited to a hexagonal shape, but may be other shapes. For example, as shown in the illustration, the shape of the illumination area IA may be rectangular. In addition, the surface is even ... the shape of the bright area is hexagonal or rectangular [its edges and and When the directions corresponding to the scanning directions of the unit lenses 7a are parallel (for example, when each lighting area ja shown in FIG. 3 is rotated around its center of gravity as a center of 30 °, etc.), the effect of reducing the uneven illumination is also reduced, which is not good. In addition, the above example is based on the premise of quadrupole illumination and four illumination areas IA are formed at the entrance of the fly-eye lens 7. However, the above principle can also be applied to multi-pole illumination such as octapoles. That is, 'the illuminance can be adjusted by tilting the edge directions of the respective illumination regions constituting the evening pole illumination formed on the incident surface j of the fly-eye lens 7 to the directions corresponding to the scanning directions of the evening-number unit lens 7 a constituting the fly-eye lens 7. The uniformity of the distribution is improved. In the above, the description is made of the case of converting into a plurality of light beams which are decentered with respect to the optical axis Ax '. Next, the description is given of the case of converting into a light beam having a circular cross-sectional shape. In this case, the main control system 15 controls the rotary driving device 11 to rotate the converter 4, and the aperture 4m (refer to FIG. 3B) is arranged on the optical axis, X 297 mm) B7 V. Description of the invention (31 At the same time, the rotation drive device 12 is controlled to arrange the aperture 5m (refer to FIG. 3A) on the optical axis. In this case, the beam shape of the aperture stop 8 that is adapted to change the aperture stop 8 is the aperture stop having a circular aperture. Since the light beam from the light source 1 passes through a circular aperture 4m and an aperture 5m, its cross-sectional shape is circular. In addition, since it is approximately parallel to the optical axis, it passes through the variable focal length optical system 6 and the diameter also changes, but the circular shape The shape of the cross section remains almost unchanged. Fig. 9 is a diagram showing an example of a light-bright area formed on the incident surface of the fly-eye lens 7 by light beams having apertures of 4m and 5m. As shown in Fig. 9, the aperture 4m and the aperture 5m are arranged on the optical axis. In the case of αχ, an illumination area j A having a slightly circular light intensity distribution is formed on the incident surface of the fly-eye lens 7. In addition, in this embodiment, it is obtained when the apertures 4m and 5m are arranged on the optical axis AX. In the case of a circular cross-section beam, For example, it is better to provide a converter. • A diffractive optical element that forms a large number of apertures with different diameters or has a plurality of beams that are converted into a circular cross-sectional shape and has different diffraction characteristics. For the device, for example, a diffractive homogenizer disclosed in US Patent No. 5,850,300 (homogenize I ·) or disclosed in Japanese Patent Application Laid-Open No. 200l-74615 (and the corresponding Goto application for the US on April 14, 2000) US Patent Application No. 09 / 549,720) diffractive optical integrator (Optical Integrator). Here, US Patent No. 5,85,300 and US Patent No. 09/549, No. 72〇 is cited as a reference. Next, the structure of the varifocal optical system 6 will be described. Fig. 10a and 10B are side views showing the specific structure of the varifocal optical system 6. Figs. 10A and 10B The illustrated variable focal length optical system 6 is packaged in order from the converter 5 side -34- This paper · size applies to China National Standard (CNS) A4 specifications (210 X 297 male directors ^ ---- 544758 A7 B7 V. Description of the invention (32 Aperture diaphragm ASI, convex plano lens 6a, two concave lens complements, two convex lens centers, and a positive meniscus lens (four optical members of meniscus W) that are convex toward the fly-eye lens 7 side. Also, FIGS. 10A and 10B The plane p indicates the entrance surface of the compound eye lens. Next, the specifications of the variable focal length optical system 6 will be described. Table 1 shown below is a table showing the specifications of an example of the variable focal length optical system 6. Table 丨 shows The unit of the numerical value is millimeter, rounded down to 4 decimal places. The following table i is an example when using a fluorinated excimer laser emitting laser light with a wavelength of 248 nm as the light source 1, from the aperture diaphragm ASI to the compound eye The length of the incident surface p of the lens 7 is set at 450 mm. In addition, the aperture diaphragm ASI has a diameter of 30 mm and a maximum incident angle of 4.5 degrees. The glass material of each lens was synthetic quartz, and the refractive index of the above wavelength was 150839. -In Table 1, the number "left" is the order of the lens surface from the aperture stop A SI side "r is the curvature radius of the lens surface, and d is the interval from this lens surface to the next lens surface. In addition, in Table 1, in order to easily arrange each lens, glass materials from the lens surface to the next lens surface are shown. In addition, the "image plane" in Table 丨 shows the incident surface p of the fly-eye lens 7 shown in Figs. 10A and 10B. [Table 1] d Glass material 10.0000 Glass material 9.000 Quartz d3. 5.0000 Quartz d5 Surface number r 1: Aperture stop 2: 60.0000 3: 0.0000 4: -57.1000 5: 63.0000 -35-^ The paper wave scale is applicable to Chinese national standards ( CNS) A4 size (2ΐ〇χ297mm)

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Line 544758 A7 B7 56: 652.4917 15.0000 Quartz 7: -137.8161 d7 8: -2394.6785 15.0000 Quartz 9: -187.0000 d9 Image plane: 0.0000 0.0000 Description of the invention (33 The variable focal length optical system shown in Figure 10 is at a variable magnification The focal length is variably lower than 1.75 times. When the variable focal length is changed, the lenses 6b to 6c are moved in the Y direction to make the lens transparent. The distance between 6a and lens 6b, the distance between lens 6b and lens 6c, and the lens. The interval between 6c and lens 6d, and the interval between lens 6d and incident surface P of fly-eye lens 7. Figs. 10A and 10B show the aperture stop ASI and incident surface P when the variable focal length optical system 6 is set at different focal distances, respectively. An example of the positional relationship between each lens 6a to 6d. In the above Table 1, the distances between the lens 6_b, the lens 6c, the lens 6d, and the incident surface P are represented by d3, d5, d7, and d9, respectively. The relationship between these distances d3, d5, d7, and d9 is shown in Table 2 below. [Table 2] Focus distance 340 mm 425 mm 510 mm 595 mir d3: 43.6691 46.7064 46.0065 46.1574 d5: 82.5478 59.1430 34.0876 8.2351 d7: 109.5967 19 9.8824 268.0768 317.8294 d9: 160.1864 90.2681 47.1192 23.7781 It is shown in Table 2 above to set the focal distance of the varifocal optical system 6 between the lenses d3, d5, d7, and the incident surface P between the 340 mm, 425 mm, 510 mm, and 595 mm. An example of the interval d3, d5, d7, d9. -36- This paper size applies to China National Standard (CNS) A4 (210 x 297 mm)

544758 A7 _____B7 V. Description of the invention (34) Secondly, the function of the varifocal optical system 6 will be described. The variable focal length optical system 6 of this embodiment can appropriately adjust the focal distance and the focal position. When adjusting the focal position of the varifocal optical system 6, the main control system "moves the agitation device 13 / moves any one of the lenses 6b to 6d toward the optical axis in eight directions. On the other hand, adjusts the varifocal optical system 6 When the focal distance of the lens is adjusted, the driving device 13 is operated to adjust the distances d3, d5, d7, and d9 between the lenses, the heart, the lenses, and the incident surface p. To increase the focal distance, it is mainly to increase the distance between the lens 6c and the lens 6d. Conversely, to shorten the focal distance, it is mainly to shorten the distance between the lens 6c and the lens 6d. Fig. 11A, Fig. IIB, and Fig. 12A, Fig. 12: Adjusting the focus distance or focus position of the variable focal length optical system 6 using the driving device 13 for display Figure 1 shows the change in the illuminated area at the entrance surface side of the compound eye 4¾ 7 at the time. Figure 丨 丨 a shows the initial illumination area IA! Which is circular, and Figure 1 1B shows the illumination area IA after adjusting the focus distance or focus position. The device 13 adjusts the focal distance or the focal position of the variable focal length optical system 6, and changes the size of the lighting area IA to a slightly larger lighting area 18 to 2 to fine-tune the size of the lighting area. Also, shortening the size of the lighting area When the focal length of the zoom optical system 6 is adjusted, the adjusted lighting area is smaller than the original lighting area IAi. Figure 12 A shows the initial lighting area IA3 in the shape of a ring, and Figure 丨 2B shows the lighting area IA4 after adjusting the focus distance. Fig. 12C shows the illumination area IA5 after adjusting the focus position. As can be clearly seen from comparing Figs. 2A and 12B, the drive device 13 can be used to adjust the focal length of the optical system and the focal distance of the system 6 to change to a similarly enlarged and smaller illumination area. The lighting area IA4 of the IAs. That is, the inside diameter and the outside diameter of the endless belt illumination are proportional, and the overall size can be appropriately changed.

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Line _____ -37- H-scale research national standards (CNS) M specifications (21〇 × 297 mm)

Description of the invention: As is clear from comparison between FIG. 12A and FIG. 12C, the driving device 13 can be used to adjust the focus position of the focal length optical system 12 to obtain the illumination area IAs that changes the% V ratio of the illumination area IA3. That is, the interval between the inner side and the outer-side of the endless belt illumination can be appropriately changed. [Brother-Performance Form] Next, an illumination optical device according to a second embodiment of the present invention and an exposure apparatus according to the second embodiment of the present invention will be described. Fig. 13 is a schematic view showing the configuration of an illumination optical device according to a first embodiment of the present invention and an exposure apparatus according to a second embodiment of the present invention. The illumination optical device according to the first embodiment has the following structure. A plurality of diffractive optical elements 4b and 41 are provided in the converter 4, and a plurality of diffractive optical elements 5a to 51 are provided in the converter 5. Furthermore, the diffractive optical chirped element arranged on the optical axis AX is exchanged by controlling the rotation angles of the converters 4, 56 and -38-

1 a 51 Even if the variable magnification optical system 6 has a variable magnification ratio of 2 · 3 or less, it is not too wide and can realize various lighting conditions. The illumination optical device according to the second embodiment of the present invention shown in FIG. 13 replaces the converters 4 and 5 in FIG. 1 and supplies a light beam to the fly-eye lens 7 through a variable focal length optical system 6, and the light beam is stored in a box 2. Among most of the diffractive optical elements 20a, 20b, ..., the required diffractive optical element is selected and arranged on the optical axis Ax, thereby converting the cross-sectional shape into a desired shape. As shown in Fig. 3, a box 20 is provided to house a plurality of diffractive optical elements 20a, 20b, ...; a transportation path 21: a box 20 is connected to the diffractive optical elements 20a, 20b, ... Either one is carried; and the support member 22 is received by the diffractive optical element 2 carried by the carrying path 21 and supported. The selection of the diffractive optical element taken out of the box 20 is controlled by the main control system 15. A7 B7 V. Description of the invention (36 Guaranteed borrowing error> 2 $ Ή 'The upper support member 22 is equivalent to the so-called holding device of the present invention: pieces: the conveying path 21 is equivalent to the so-called driving unit of the present invention. In addition, other than private The box 20 and the main control system 15 are equivalent to the Han Chinese Department of Benji. The box 20 stores most of the diffracted light beams with a different diffraction characteristic. The box 20 is based on the master. The output of the control system 15 outputs the number of diffractive optical elements stored in the box 20] ^^, 2 flutter, ... man ^ king ... different optical elements corresponding to the specified conditions, the transport path 2 1 uses the box 2 〇 The sent diffractive optical element is transported to the optical path of the illumination light. The optical element of the transport path 21 is transported to the support member 22 and fixed on the optical axis AX of the illumination light. It is held in the support member 22 The unused diffractive optical element is exchanged for "the previous removal from the optical axis AX", that is, before removing the new diffractive optical element that should be moved to the optical path from the box 20, the original diffractive optical element that should be removed from the optical path Diffractive optics, that is, diffractive optics 7C held in a support member M It is stored in the box 20 through the conveying path 21. Here, the box 20 can be detached and can be replaced by the parent. In this case, the following structure can also be formed: the optical elements 20a, 20b, ... Many boxes of different types are automatically selected as desired and connected to the conveyance path 21. It is clear that when the box 20 as described above is used, the intensity distribution of the fly-eye lens 7 increases. For example, even when the diffraction characteristics of the ring shape are also used By combining various maximum divergence angles and minimum divergence angles, various ring-shaped illuminations can also be performed. In this way, by increasing the intensity distribution change on the fly-eye lens 7, variously adjust the ring-shaped aperture light placed on the exit side of the fly-eye lens 7. The shape of the diaphragm and the pupil distribution of the photo "will be fine-tuned, and the amount of illumination light will not be wasted. Also, the above is a ring photo 39- The standard of this paper is Chinese National Standard (CNS) Α4 (210 X 297 public love) 544758 A7 B7 V. Explanation of the invention (37), but it also has the same effect for the case of circular illumination and four eyelet shape illumination. Support for holding the diffractive optical element on the optical axis AX The component 22 is a support chamber sealed by a cover glass 23 from the surroundings. The support chamber is preferably first purged with an inert gas such as nitrogen, helium (He) gas, etc. In this case, it can be protected. The diffractive optical element prevents the attachment of impurities caused by gas or the like generated outside the support member 22, and the deterioration of the transmittance can be restored only by exchanging an inexpensive glass cover 23. In addition, since the transport path 2 1 extended from the support member 22 The freely attachable and detachable box 20 is not only a countermeasure against blurring of impurities, but also facilitates maintenance of the diffractive optical elements 20a, 20b, .... Furthermore, the illumination optical device of this embodiment includes the same variable focal length optical system as the first embodiment. 6. The intensity distribution of the light beam whose cross-sectional shape is transformed by the diffractive optical element located on the optical axis AX on the ζ + plane is variably formed. This embodiment differs only in the point that the diffractive optical element arranged on the optical axis Ax is interchangeably formed by using the box 20, the conveying path 21, and the branch 22. Most types of diffraction having different conversion characteristics are provided in the types of beam cross-section shapes for each conversion. The optical element has the same structure as the first embodiment in the point that the light intensity distribution of the light beam whose cross-sectional shape is changed by any element of this diffractive optical element is fine-tuned by the variable-focus material system 6 having a simple structure. The illumination optical device of the second embodiment uses the bending mirror 3 as a vibration mirror. Therefore, the configuration is as follows: a driving device 24 for driving the bending mirror 3 is provided, which can make the folding mirror 3 three-dimensionally move or make it slightly rotate β χ around the axis perpendicular to the optical axis AX, in order to reduce interference Noise, diagram of driving mechanism that changes angle of bending mirror 3 during exposure time

544758 A7 B7 V. Description of the invention (38 is omitted, but it is separately provided with the driving device 24 in FIG. 13. In this embodiment, the driving device is driven under the control of the main control system 15 to make at least one of the lenses 6a to 6d. ZX movement or ZX tilt (Y axis is parallel to the optical axis AX), the illumination area formed by the diffractive optical element arranged on the optical axis AX and the incident surface of the fly-eye lens 7 can be aligned. In addition, this embodiment can also be used The driving device 24 tilts the bending mirror 3XY to align the illumination area. By appropriately operating the driving devices 13 and 24 as described above, the single image mask surface or wafer of the single image mask R can be adjusted with high accuracy. Illumination unevenness and telecentricity of the wafer surface of W. Here, the term "telecentricity" means that the tilt of the illumination beam incident on the wafer W and the like is small, which means that the imaging direction of the wafer exposure surface and the like Homogeneity. Illumination unevenness or telecentricity can be adjusted by moving or tilting the optical elements of the condensing optical system 10 contained in the rear section of the fly-eye lens 7, but by combining and constituting a variable-focus optical system provided in the front section of the fly-eye lens 7. The lens 6a to 6d of 6 can be adjusted in combination with fine adjustment, so that the second embodiment of the present invention will be described. The second embodiment is related to the use of the mechanism composed of the box 20, the conveying path 21, and the support member 22. An embodiment in which one diffractive optical element arranged on the optical axis AX can be replaced by X. However, a converter provided with a plurality of diffractive optical elements (equivalent to converter 4 or converter 5 in FIG. 1) may be used. Most are housed inside the box 20 and form a converter interchangeably. In the case of this structure, the diffracted light provided by the converter arranged on the optical path. When all the elements do not have the required diffraction characteristics, and diffractive optics with the diffraction characteristics are provided The converter of the element is exchanged. In addition, the second embodiment described above makes the diffractive optical element '20b-41-this paper conforms to the Chinese National Standard (CNS) M specification (Moses 297) 544758 A7 B7 V. Invention Explanation (40) The beam with a changed cross-section passes through the lens 30 and the integrators 30b and 30c to transform the intensity distribution in the ZX plane, and then passes through the lens 30 and overlaps. Illumination of the incident surface of the rod integrator 31. Here, the reason that the incident surface of the rod integrator 31 is illuminated with a lens -30d is formed near the entrance end of the rod integrator 31 in order to expand the quality and quality. The area of the light source surface (virtual image) eases the unevenness of the illumination. In addition, the output of the rod integrator 3 丨 is equivalent to a single image mask reticle blind, and the single image mask R is optically conjugated. The third embodiment of the present invention has been described above. The third embodiment is the same as the first embodiment, and the case where the converters 4 and 5 are rotated to exchange the diffractive optical elements arranged on the optical axis AX is taken as an example. Instructions. However, in order to exchange the optical elements arranged on the optical axis AX, the mechanism composed of the box 20, the conveying path 21, and the supporting member 2_2 described in the second embodiment may be interchangeably configured. In addition, a plurality of converters provided with a plurality of diffractive optical elements may be housed in the case 20, and the converter itself may be configured to be exchangeable. [Modifications of the first embodiment to the third embodiment] The foregoing description has been made of the illumination optical device and the exposure device according to the first to third embodiments of the present invention. The first to third embodiments described above are exemplified by a case where the diffractive optical elements 4a to 41 and the diffractive optical elements 5a to 51 are provided as conversion optical elements. However, in the present invention, it is also possible to replace the diffractive optical elements 4a to 41 and the diffractive optical elements 5a to 51 by using a wavefront division type integrator as a conversion optical element. Here, the so-called wavefront splitting type integrator includes a fly-eye lens: a structure in which a large number of optical elements (refractive (lens) elements, diffractive elements, and mirror elements) are integrated into a matrix; or, a micro lens array: where light is transmitted The substrate is multi-43 using etching and other methods. The paper size is applicable to the Chinese National Standard (CNS) A4 specification (21 × 297 mm).

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Line 544758 A7 B7 V. Description of the invention (41) The number of micro lens surfaces (reflection surfaces) are arranged in a matrix. For example, a refractive optical element shown in Fig. 15 may be used.

Fig. 15 is a perspective view of a refractive optical element that can be used instead of the diffractive optical elements 4a to 41 or 5a to 51, tf, and the diffractive optical elements 20a, 20b. In the foregoing embodiment, the case where the phase-type diffractive optical element is used as the diffractive optical element 4a to 4 丨 and the diffractive optical element 5a to 51 is described as an example, but the refractive optical element 40 may also be used: the bottom surface 41a is provided parallel to its axis. The face is cut into, for example, a hexagonal cymbal 41. -ij ▲ Here, the reason why the bottom surface 41a of 切割 41 is cut into hexagons is to make the bottom surface 4 1 a of 稜鏡 41 densely arranged as shown in the figure. Although the light beam from the light source j is incident on the bottom surface 41a, the bottom surface 4la of the 稜鏡 41 thus formed is flat, so that defects such as changing the refraction angle when refracting the incident light beam from the light source 丨 do not occur. It is also possible to provide a light-shielding portion: instead of cutting into a shape other than that shown in Fig. 15, a hexagonal opening is formed on the bottom surface of the conical prism, for example. In this case, as the incident light beam may generate a light beam which is not helpful as the illumination light, it is still preferable to arrange them densely as shown in FIG. 15. Although the refractive optical element 40 is formed using a conical ridge in FIG. 15, a conical ridge such as a triangular pyramid prism or a quadrangular pyramid prism can be used. In addition, in the above-mentioned first embodiment and the third embodiment, the configurations of the diffractive optical elements 4a to 41 and the diffractive optical elements 5a to 51 arranged on the optical axis Ax are switched by using two converters 4, 5 as examples. Although the number of converters arranged on the optical axis AX is arbitrary, it is sufficient. If the number of converters arranged on the optical axis Ax is increased, the number of types of diffractive optical elements that can be arranged on the optical axis Ax can be increased, so that the configuration of the variable focal length optical system 6 can be further simplified. -44-This paper size applies the Chinese National Standard (CNS) A4 specification (21〇X 297 public love) ---- A7-一 .————__ B7 V. Description of the invention (42) The following will be implemented in the first The modification example of the X-change mechanism of the form to the first case will be described, but the modification space to be used is appropriately selected. The diffractive optical element described in the third embodiment is clear. In addition, although most of the following shows that the exposure device (illumination optics system, Fig. 16 is a front view of the first modification of the exchange mechanism for displaying optical elements, the modification shown in Fig. 16 is shown in Fig. 16): There are 24 diffractive light pre-elements along the outer periphery (the same number of diffractive optical elements as the total number of diffractive optical elements provided in converters 4 and 5). _Converters 50 are arranged on the optical axis Hachi The converter 50 is driven (rotated) around the rotation axis C1 by an unseen rotation drive device (for example, a motor), and the diffractive optical element 0 arranged on the optical axis Ax is exchanged. FIG. 17 shows a second exchange mechanism of the diffractive optical element. The modified example is a front view and an upper view. The modified example shown in FIG. 17 is provided with two converters each having j two diffractive optical elements in the same manner as the converters 4 and 5 of the first and second embodiments. 51a, 51b. These converters 51a, 51b are driven by the rotation driving devices 52a, 52b and rotate around the rotation axes C2 and C3. The converters 51a, 51b and the rotation driving devices 52a, 52b are arranged side by side with respect to the optical axis AX 'to Rotary drive The moving device 52a and the converter 5 1 a are integrally formed and can be moved forward and backward with respect to the optical axis AX, and the rotation driving device 521) and the converter 51b are integrated and can be moved forward and backward with respect to the optical axis AX. In the mechanism shown in FIG. 17, a converter having a diffractive optical element to be arranged on the optical axis AX is first arranged on the optical axis AX, while other converters are hidden from the optical axis AX, and then driven (rotated) and arranged on The converter on the optical axis AX is used to match the desired diffractive optical element -45- This paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm)

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Line 544758 A7 ___B7 I. Description of the invention (43 ^ is placed on the optical axis AX. FIG. 18 is a front view and a top view showing a third modification of the exchange mechanism of the diffractive optical element. This third modification is shown in FIG. 8 The two converters 53a and 53b each having 12 diffractive optical elements are arranged opposite to each other. Since the converters 53a and 53b are arranged opposite to each other, each of the rotary driving devices 54a and 54b is arranged opposite to each other on Tongle. In this configuration, since the installation area in the front direction (direction along the optical axis AX) is only the area of one converter, it is best to limit the installation area in the plane orthogonal to the optical axis AX. The arrangement shown in Fig. 18 is formed. Fig. 19 is a front view and a top view showing a fourth modification of the exchange mechanism of the diffractive optical element. The modification shown in Fig. 19 is the same as that of Fig. 18, and the converter 53a, 53b is arranged opposite, but the rotation drive device 54a is configured differently to drive the converter 53a. As shown in FIG. 19, a bevel gear 55 is provided on the rotation shaft of the converter 53a, and an umbrella is provided on the rotation shaft of the rotation drive device 54a. Gear 56, The rotation axis of the rotary drive device 54a and the converter 53a are formed at an angle of approximately 90 degrees. The converter 53a is also rotatably constituted by the rotary drive device 54a. In the example shown in FIG. 19, only the arrangement of the rotary drive device 54a is different. , But if necessary ', it may be arranged so that only the arrangement of the rotation driving device 54b is different or the arrangement of both the rotation driving devices 54a and 54b is different (the rotation axes of the converters 53a and 54a and the rotation axes of the rotation driving devices 54a and 54b (Approximately orthogonal). Fig. 20 is a front view showing a fifth modification example of the diffractive optical element exchange mechanism. The modification example shown in Fig. 20 is structured as' the majority of diffractive optical elements 60 are conveyed by a conveyor belt. That is, A conveyor belt 59 'is bridged between the rotating drum 57 and the rotating drum 58. Here, the conveyor belt 59 is provided with most diffractive optical elements 60, -46- The standard of this paper is Chinese National Standard (CNS) A4 (210 X 297 mm)- --- Staple

Line 544758 A7 ---------- B7 V. Description of the invention (44) By adjusting the rotation angles of the rotating drums 57 and 58, the desired diffractive optical element 60 is arranged on the optical axis eight. The example shown in FIG. 20 is a case where the optical axis AX is set along the moving path of the conveyor 59 of the diffractive optical 7C 60 and the position between the rotating drums 57 and 58 is set as an example. Δχ can be set at an arbitrary position along the moving path of the conveyor 59 of the diffractive optical element 60. 'Fig. 21 is a front view showing a sixth modification of the exchange mechanism of the diffractive optical element. In this modification, four child converters 62a to 62d each having six types of diffractive optical elements are mounted on the mother converter 61. The mother converter 61 is driven by a rotation driving device (not shown). The mother converter 61 rotates around the rotation axis C4, and in accordance with the rotation of the mother converter 61, the child converters 62a to 62d also rotate around the rotation axis C4. The sub-converters 62a to 62d are each rotatably formed around the rotation axes C5 to C8. In addition, the sub-converters 62a to 62d only need to control the rotation angles around the rotation axes C5 to C8 when they are arranged on the optical axis Ax. Therefore, it is not necessary to separately provide a rotation driving device for each of the sub-converters 62a to 62d. Therefore, in order to simplify the structure of the device, it is preferable to form the following structure: for example, a screw groove is formed on the periphery of each of the sub-converters 62a to 62d, and a rotary drive device is provided near the optical axis AX. In the case of this structure, when any one of the sub-converters is arranged on the optical axis AX by the rotary mother converter 61, the outer periphery of the sub-converter is in contact with the rotation axis of a rotation driving device provided near the optical axis AX. The rotation force of the rotation driving device is transmitted to the sub-converter, and only the rotation angle of the sub-converter disposed on the optical axis AX is controlled. [Fourth embodiment] __ -47- The paper scale is applicable to China National Standard (CNS) A4 specification (210X 297 mm) binding

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Next, the illumination optical device according to the fourth embodiment of the present invention and the exposure apparatus according to the fourth embodiment of the present invention will be described. The above-mentioned first embodiment and the first embodiment are described by taking, as an example, the following cases: As a diffractive optical element that converts a strong beam into a majority beam (quadrupole illumination) decentered with respect to the optical axis AX, as shown in FIG. 8A to As shown in FIG. 8E, the four illumination areas formed on the incident surface of the fly-eye lens 7 are provided with a supplementary optical element that diffracts incident light like a vertex of a square. However, according to the shape of the pattern transferred to the wafer W, Due to a phenomenon called an optical proximity effect (OPE: Optical Proximity Effect), the illumination light arranged on the slender rectangular apex using the illumination area IA is better than the illumination light arranged on the apex of the square using the IA illumination area. The so-called light Proximity effect, which is the generalization of the miniaturization of the pattern size, the phenomenon that the resolution size deviates from the standard size and becomes an abnormal line width, the phenomenon that the photoresist pattern degrades the fidelity of the single image mask pattern, and the pattern type correlation of the resolution Significant phenomena, etc. Fig. 22 is a diagram showing an example of changing the arrangement of the four-pole illuminated area IA according to the pattern shape transferred to the wafer w. Thinking, as shown in FIG. 22, the pattern formed on the single-image mask R? 1 is a slender pattern in a certain direction (the direction in which a symbol is added in FIG. 22) and is arranged at a predetermined pitch in a direction orthogonal to the length direction of the pattern. In the case of the pattern of the direction (the direction in which the sign is attached in FIG. 22). In quadrupole illumination of this pattern P1, if the illumination area IA is used to illuminate the rectangular vertex whose length direction is set in the direction of the additional symbols, a pattern closer to the design value is transferred to the wafer Wjl. In the following, the illumination area IA is arranged in the quadrupole illumination of the slender rectangular apex in this specification, that is, the first party ____ -48- This paper size is in accordance with the Chinese National Standard (CNS) A4 specification (i ^ _X297 Public Love 3 544758 A7 B7 V. Description of the invention (46) (the direction with the symbol dl in FIG. 22), the eccentricity from the optical axis AX (the reference optical axis) and the second direction orthogonal to the first direction (the direction with the symbol d2 in FIG. 22) A quadrupole illumination having a different eccentricity from the optical axis AX is called a deformed quadrupole illumination. In this embodiment, a diffractive optical element for achieving such a deformed quadrupole illumination is provided as a conversion optical element. However, as described above, in order to prevent the amount of transmitted light The number of lenses and the like and the variable magnification constituting the varifocal optical system 6 are reduced and limited. Therefore, in this embodiment, a plurality of diffractive optical elements having different conversion characteristics for deformed quadrupole illumination are provided. In addition, this embodiment The structure other than the diffractive optical element of the modified quadrupole illumination is substantially the same as that of the first embodiment and the second embodiment described above. The conversion characteristics of the diffractive optical element of the quadrupole illumination are mainly described. The description of other structures is omitted. FIGS. 23 to 25 are diagrams illustrating the conversion characteristics of the diffractive optical element provided in the illumination optical system according to the fourth embodiment of the present invention. The diffractive optical element of this embodiment is classified into a diffractive optical element group including a plurality of diffractive optical elements corresponding to the type of conversion characteristic, and the diffractive optical element included in each diffractive optical element group is formed in a fly-eye lens in FIGS. 23 to 25. 7 The illuminated area on the incident surface is shown in a different graph. "In addition, in Figs. 23 to 25, the circle with the symbol K1 shows the maximum value 1"), and the circle with the symbol K2 shows "0.5". σ value. Here, j = refers to the aperture diaphragm diameter / the pupil diameter of the projection optical system or the illumination photon system, the first numerical aperture on the exit side / the numerical aperture technique on the incident side of the projection optical system. Multipole such as quadrupole illumination In the case of lighting, the diameter of the aperture lighthouse becomes A4 size (2_

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-49- 10 &gt; &lt; 297 mm) — 544758 A7 B7 V. Description of the invention (47 A circle size or diameter of a multipolar illumination light beam or a multipolar light source image formed on a pupil of a projection optical system. Figure 23 It shows the conversion characteristics of a diffractive optical element group that changes the σ value and stepwise without changing the eccentricity with respect to the optical axis AX in the X direction. This diffractive optical element group includes diffractive optical elements forming the Ei domains IA11 to IA14, The diffractive optical elements of the illumination areas IAn-IA24 are formed. When the diameter of each of the illumination areas IAu to IAi4, IAn to IA24, 183 to 1800 is 34, the diameter of the maximum σ is 0, which is about 0.150. By exchanging the diffractive optical element having such a conversion characteristic, the amount of decentering of the illumination area with respect to the optical axis AX in the ζ direction can be increased without changing the amount of decentering of the optical axis AX in the X direction, so for example, as shown in FIG. 22 When the pattern P 1 is transferred to the wafer W, the line width in the direction of the symbol d 1 does not change, and the line width in the direction with the symbol d 2 can be intentionally changed.-Figure 24 shows the optical axis without changing the X direction. The amount of eccentricity of Αχ and the deviation from the optical axis AX in the z direction Conversion characteristics of a diffractive optical element group in which the σ value is changed stepwise by the ratio of heart weights. It includes diffractive optical elements forming the illumination area IA4 to ˜α ”, diffractive optical elements forming the illumination area IAS1 to IA54, and forming the illumination area ΙΑό1 to IA "diffractive optical element. In addition, the diameter of each illumination area is set to about 0,150, as in the illumination area shown in Fig. 23. By using this diffractive optical element group, the diffractive optical element is exchanged, for example, 2 with a similar relationship. The optimal α value of the anamorphic quadrupole illumination can be obtained for each pattern. Fig. 25 shows the conversion characteristics of the diffractive optical element group in which the eccentricity of the optical axis in the X direction and the 2 direction is changed without changing the cj value. This diffractive optical element The group contains diffractive optical elements that form the illumination area IA "~ IA74, and form -50. This paper size applies the Chinese National Standard (CNS) A4 specification (210X297 public love)

Line 544758 A7 ______ — —_B7 V. Description of the invention (48) Diffractive optical element of the illumination area ΙΑγΙΑ &quot;, a diffractive optical element forming the illumination area 189-91.894, and the diameter of each illumination area is as shown in Fig. 23 The lighting area is also set to a certain level of 0.5. If this diffractive optical element group is used, the eccentricity with respect to the optical axis AX in the χ direction and the 2 direction can be changed deliberately without changing the σ value.

The line width in the direction of number dl and the direction in which the symbol d2 is attached can control the line width in each direction. Order

23 to 25 are simplified illustrations and explanations, and each diffractive optical element group includes three diffractive optical element groups. However, the number of diffractive optical elements included in one diffractive optical element group is arbitrary. can. The diameter of the illumination area formed in the fly-eye lens 7 can be appropriately set in consideration of the number of diffractive optical elements included in the diffractive optical element group and the variable magnification constituting the variable focal length optical system · 6. In addition, the case where the illumination area is switched at the stage (third order) is illustrated in FIG. 23 to FIG. 25 as an example. However, as long as the number of diffractive optical elements (converters) in the illumination optical system is allowed by the installation space, It is better to increase, and it is better to switch continuously. In addition, as the mechanism for switching the diffractive optical element (the diffractive optical element arranged on the optical axis AX), the mechanism described in the first embodiment, the second embodiment, and these modifications can be used. Furthermore, a wavefront division type integrator may be used instead of the diffractive optical element. [Fifth Embodiment] Fig. 26 is a diagram showing a schematic configuration of an illumination optical device according to a fifth embodiment of the present invention and an exposure apparatus provided with the illumination optical device according to the fifth embodiment of the present invention. Illumination optical device and diagram of the first embodiment of the present invention shown in FIG. 1 ______ -51-This paper size is applicable to China National Standard (CNS) A4 specification (210 X 297 mm) 544758 A7 -_____ Β7 ____ 5. Description of the invention (49) The difference between the illumination optical device according to the fifth embodiment of the present invention shown in (5) is the following: a translucent structure 70 having a fixed magnification optical system having a predetermined fixed magnification is used instead of the variable focal length optical system in FIG. 1 System 6. The magnification and magnification of the lens 70 is set to a certain value ranging from, for example, 1 to 2 times. In order to prevent the amount of transmitted light of the variable focal length optical system 6 from being reduced, the first to fourth embodiments are provided with a plurality of diffractive optical elements, which are conversion optical elements that convert a light beam from the light source 1 into a light beam having a predetermined cross section. Instead of reducing the number of lenses and the like constituting the variable focal length optical system 6, the variable magnification ratio is limited. In this embodiment, in order to further reduce the number of optical members arranged on the optical axis Ax such as a lens, only one lens 70 is provided. Although FIG. 26 illustrates the case where the diffractive optical elements 4a to 41 and the diffractive optical elements 5a to 51 shown in FIGS. 3A and 3B are provided between the lenses 70 of the bending mirror 3, it is illustrated because It is preferable that the lens 70 having a fixed magnification be provided with more diffractive optical elements having different conversion characteristics. In particular, it is preferable to provide a diffractive optical element group for transforming the conversion characteristics of the quadrupole illumination described using FIG. 23 to FIG. 25. Although the embodiments of the present invention have been described above, the present invention is not limited to the above embodiments, and can be freely modified within the scope of the present invention. For example, in the above-mentioned embodiment, a case where the erbium fluoride excimer laser (248 nm) is provided as the light source 1 is described as an example, but an ultra-high pressure mercury lamp may also be provided as the light source 1 ′ and it is necessary to select the wavelength selective oscillator 6 G-line (43 6 nm) light, h-line (405 nm) and i-line (365 nm) light. In addition, if a shorter wavelength is required, an argon fluoride excimer laser (193 nm) and a fluorine laser (157 nm) may be provided as the light source 1. These lasers J ____- 52- _ Paper Size Adaptation® National Standard (CNS) Mindfulness (21Q X 297 Public Love) One -----

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Line 544758 A7 B7 V. Description of the invention (50) Laser light emitted. When using a wavelength of 200 nm or less as the exposure light, it is preferable to form the diffractive optical elements 4a to 41 and 5a to 51 with the following materials: fluorite, fluorine-doped stone, glass, and fluorine-and-hydrogen-doped Quartz glass, structure-determined temperature of 1200 K ° or less and hydroxyl group concentration of 1000 ppm or more, structure-determined temperature of 1200 K ° or less and hydrogen molecule concentration of 1 X 1017 molecules / cm3 or more, structure-determined temperature 1200 K. Quartz glass with a chlorine concentration below 50 ppm and its structure are determined—temperature 1200 K. The following is selected from the group of quartz glass having a hydrogen molecule concentration of IX 107 molecules / cm3 or more and a chlorine concentration of 50 ppm or less. Here, the temperature of the structure is 1200 K. The following quartz glass having a hydroxyl group concentration of 1,000 ppm or more is disclosed in the applicant's patent publication No. 27-7〇224, and the structure-determining temperature is 1200 K. Quartz glass having a hydrogen molecule concentration of IX 10 molecules / cm3 or more and having a structure-determining temperature of 12,000 κ0 or less and a chlorine concentration of 50 ppm or less having a structure-determining temperature of 12,000 K. The following quartz glass with a hydrogen molecule concentration of χ 丨 17 molecules / cm 3 or more and a chlorine concentration of 50 ppm or less is disclosed in Patent No. 2 6 8 of the applicant of the present application. In the first to third embodiments described above, a plurality of unit lenses are assembled to form the fly-eye lens 7 '. However, these may be micro fly-eye lenses. The so-called miniature fly-eye lens is a light-transmitting substrate in which most of the micro lens surfaces are arranged in a matrix shape by means such as last name engraving. Regarding the point of forming most light source images, there is virtually no functional difference between fly-eye lenses and microlens barriers ’but the aperture size of a unit lens (microlens surface) can be extremely reduced.

-Binding

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p can significantly reduce manufacturing costs, and can make the thickness in the optical axis direction very thin (points, miniature fly-eye lenses are more advantageous. In addition, in the upper Makoto ^. Coins 1 to 3 implementations of the system will be the most unit lens Collection · The fly-eye lens 7 is formed in a two-dimensional moment p shape, but these may be cylindrical fly-eye lenses: · A first cylindrical lens array (cyhndncal lens array) and The first cylindrical lens array is arranged along a second direction orthogonal to the first direction. Here, the first and second cylindrical lens arrays may be arranged in the following structure or the first and second The two cylindrical lens array includes a third cylindrical lens array arranged along the first direction and a fourth cylindrical lens array arranged along the second direction on the rear side. The third and fourth cylindrical lenses are arranged along the second direction. The array can also be integrated. In addition, the first and second (and third and fourth) cylindrical transparence arrays can also be formed on the light and bio-substrates using methods such as cutting. This situation can be greatly reduced. Pitch of each cylindrical lens array or direction of optical axis The thickness has become very thin and greatly caused the cost. In addition, in the aforementioned first embodiment and the second embodiment, the compound eye is used as a light pre-integrator, but instead of this, the following embodiment d may be used. A rod-shaped integrator with a polygonal column or a cylindrical inner reflecting surface such as a corner column or a corner column. In addition, in the first and second embodiments described above, the single image mask # 板 RB for determining the single image mask R Illumination Fan® It is arranged near the upper surface of the single-image mask r, but it may have the following structure ... A relay optical system is provided between the single-image mask baffle RB and the single-image mask R to make the single-image mask b The vicinity of RB and the single-image reticle R are optically conjugated. -54- This paper size applies the Chinese National Standard (No.297 Public Love)

544758 A7

Binding m #; five

In the pattern forming process S20 in FIG. 28, a so-called optical lithography process is performed: using the present; ye-shaped exposure device, the pattern of the photomask is transferred and exposed on a photosensitive substrate (a glass substrate coated with a photoresist) Wait). By this optical lithography process, a predetermined pattern including a plurality of electrodes and the like is formed on a photosensitive substrate ^, and then the exposed substrate is subjected to various processes such as a development process, a # engraving process, and a single-image mask peeling process. A predetermined pattern is formed on the substrate, and it is transferred to the next color filter forming process S22. ~ In the process, a color filter forming process S22 is formed, and the three dot groups corresponding to r (red), G (green), and B (blue) are mostly arranged in a matrix or three of R, G, and B are formed. The streak color filter group is mostly arranged in a horizontal scanning line direction. Then, the unit combination process S24 is performed after the color filter formation process S22. In the unit combination process S24, a combination liquid crystal panel (liquid crystal cell) such as a substrate having a predetermined pattern obtained in the pattern forming process S20 and a color filter obtained in the color filter forming process S22 is used. In the cell combination process S24, for example, liquid crystal is injected between a substrate having a predetermined pattern obtained in the pattern forming process S20 and a color filter obtained in the color filter forming process s22 to manufacture a liquid crystal panel (liquid crystal cell). After that, in the module assembly process S26, components such as a circuit and a backlight for performing display operation of the combined liquid crystal panel (liquid crystal cell) are installed to complete the device as a liquid crystal display element. According to the above-mentioned method for manufacturing a liquid crystal display element, a liquid crystal display element having an extremely fine circuit pattern can be obtained with good productivity. -56- This paper size applies to China National Standard (CNS) A4 (210X 297mm)

Claims (1)

D8. Patent application scope 1-An illumination optical device for illuminating the illuminated surface, which is characterized in that it includes a light source unit: a supply beam; a beam conversion mechanism: converts the light beam from the light source unit into a beam having a predetermined cross-sectional shape; And, a variable magnification optical system: In order to change the light intensity distribution of a light beam converted by the light beam conversion mechanism, the variable magnification ratio is a variable focus distance of 2.3 times or less. The light beam conversion mechanism includes a plurality of conversion optical elements: The types of beam cross-sectional shapes have different conversion characteristics; and a setting unit: one of the conversion optical elements is set in an optical path. 2. The illumination optical device according to item 1 of the patent application scope, further comprising an optical integrator: arranged between the aforementioned variable magnification optical system and the aforementioned-irradiated surface to uniformly illuminate the aforementioned illuminated surface; and, 3. 4. Concentrating optical system: disposed between the optical integrator and the illuminated surface, and directing light from the optical integrator to the illuminated surface. For example, the total number of optical components included in the aforementioned variable magnification optical system and the optical components included in the aforementioned optical optical system is 10 or less. For example, the illumination optical device according to item 2 of the patent application, wherein the aforementioned magnification optical system includes at least one optical element having an aspherical surface. Another example is the illumination optical device of the scope of application for a patent, wherein the aforementioned beam conversion mechanism transforms a beam having a circular: plane shape according to the beam from the aforementioned light source source, a beam having a cross-sectional shape of a ring zone, or a reference At least two of the majority of the beams whose optical axis is eccentric. -57- 5. The illumination optical device according to item 5 of the patent application, wherein the light beam switching mechanism includes a conversion optical element that converts a light beam from the light source unit into a plurality of light beams that are eccentric to the reference optical axis. A conversion optical element that transforms the amount of decentering of each light beam in a first direction orthogonal to the reference optical axis and the amount of decentering in a second direction orthogonal to the reference optical axis and the first direction. 7. The illumination optical device according to item 6 of the patent application, wherein the beam conversion mechanism includes a conversion optical element group composed of multi-education conversion optical elements, and the majority of the conversion optical elements are in order not to change the light beam in the first direction. The amount of eccentricity is to switch the amount of eccentricity of the light beam in the second direction in stages, and the conversion characteristics in the second direction are set to different characteristics. 8. The illumination optical device according to item 6 of the application, wherein the aforementioned beam conversion mechanism includes a group of conversion optical elements composed of a plurality of conversion optical elements, and the majority of conversion optical elements maintain the aforementioned first direction = the aforementioned beam eccentricity In a state of a ratio with the amount of eccentricity of the light beam in the second direction, in order to switch the amount of eccentricity to the reference optical axis in stages, the conversion characteristics of the first direction and the second direction are set to different characteristics. 9. The illumination optical device according to item 6 of the patent application, wherein the aforementioned light beam conversion mechanism includes a group of conversion optical elements composed of a plurality of conversion optical elements, and the majority conversion optical element is maintained while maintaining the aforementioned optical axis; the reference optical axis In the state of the amount of eccentricity, in order to switch the amount of eccentricity in the first direction and the amount of eccentricity in the second direction in stages, the first party -58- C8 D8 Patent application scope The conversion characteristics of the W direction and the second direction are set to different characteristics. The illuminating optical device claimed in item 5 of the patent scope, wherein the setting portion includes a holding member that holds the plurality of conversion optical elements; and a driving portion that rotates or moves the holding member. 1 L The illumination optical device according to item i in the patent application range, wherein the setting section includes a holding member: holding the plurality of conversion optical elements; and a driving section: rotating or moving the holding member. 12. The illumination optical device according to item i of the application, wherein the setting portion G; the first holding member: holds a part of the majority of the conversion optical elements, and the second holding member: holds a part different from the foregoing part of the majority of the conversion optical elements; And, the driving unit: rotates or moves the first and second holding members. · 1 3 · If the scope of patent application is the first! Item of the illumination optical device, wherein when the variable magnification ratio of the aforementioned variable magnification optical system is z, 12 $ ζ ^ 2 or 1.2 $ ZS 1.8 〇14 · -type illumination optical device is used to illuminate the illuminated surface. It is characterized by including a light source unit and a supply beam; a beam conversion mechanism that converts the light beam from the light source unit into a light beam having a predetermined cross-sectional shape; and a variable magnification optical system. To change the light of the light beam converted by the light beam conversion mechanism The intensity distribution is made up of 5 or less optical members, and the beam conversion mechanism includes a plurality of conversion optical elements: each type of the beam cross-section shape to be converted has different conversion characteristics; and the setting unit: sets one of the conversion optical elements on an optical path Insider. · -59- This paper size applies to China National Standard (CNS) Α4 specification (210X297 public love) AB c D 544758 6. Application scope of patent 22. For example, the illumination optical device of the scope of application for patent No. 21, wherein the aforementioned beam conversion mechanism includes a group of conversion optical elements composed of a plurality of conversion optical elements, and the majority of the conversion optical elements are not changed. The beam eccentricity in the first direction is switched stepwise to switch the beam eccentricity in the second direction, and the conversion characteristics in the second direction are set to different characteristics. 23. The illumination optical device according to item 21 of the patent application, wherein the light beam conversion mechanism includes a group of conversion optical elements composed of a multi-element conversion optical element, and the majority of the conversion optical elements maintain the light beam eccentricity in the first direction. In a state of a ratio of the amount and the beam eccentricity in the second direction, in order to gradually switch the amount of eccentricity to the reference optical axis, the conversion characteristics of the first direction and the second direction are set to different characteristics. 24. The illumination optical device according to claim 21, wherein the light beam conversion mechanism includes a group of conversion optical elements composed of a plurality of conversion optical elements, and the plurality of conversion optical elements maintain an eccentricity of the light beam with respect to the reference optical axis. In order to switch the amount of eccentricity in the first direction and the amount of eccentricity in the second direction in stages, the conversion characteristics of the first direction and the second direction are set to different characteristics. 25. The illumination optical device according to claim 19, wherein the setting portion includes a holding member that holds the plurality of conversion optical elements; and a driving portion that rotates or moves the holding member. 26. For the illumination optical device of the scope of application for patent No. 14, wherein the aforementioned setting section includes a holding member: to hold the majority of the aforementioned conversion optical elements; and drive -61-This paper size is applicable to China National Standard (CNS) A4 specifications (210X297) %) The aforementioned holding member rotates or moves. The lighting of item 14 of Lingming Patent I includes a first holding member. The holding device is divided into two parts; the second holding member: the holding buckle number conversion optical element is oddly held and the frontmost majority. Transform different parts of the optical component and the ten-sharp component, and, if the light-replacement element is under-replaced, keep the component rotating or moving. Shao made the aforementioned first and second 28. The lighting optics of Item 14 of the patent application park—12: Variable magnification ratio ..., which satisfies [_ or 29 · — a kind of lighting optical device, which illuminates the illuminated surface, which It is characterized in that it includes a light source unit and a supply beam; and a beam conversion mechanism that converts the light beam from the light source unit like a majority of light beams decentered from the reference light axis on the illumination pupil surface, and the light beam conversion mechanism includes conversion optics. Element: as described above, the eccentricity of the illumination pupil plane in a first direction orthogonal to the reference optical axis along each light beam and the foregoing in a second direction orthogonal to the reference optical axis and the first direction The amount of eccentricity of the illumination pupil plane changes differently. 30. The illumination optical device according to item 29 of the application, wherein the light beam conversion mechanism includes a group of conversion optical elements composed of a plurality of conversion optical elements, and the plurality of conversion optical elements are not to decenter the light beam in the first direction. The amount of decentering of the light beam in the second direction is switched step by step, and the conversion characteristics in the second direction are set to different characteristics. 31. If the illumination optical device according to item 29 of the patent application scope, wherein the aforementioned light beam -62- this paper size is applicable to the Chinese National Standard (CNS) A4 specification (210X297 mm) 544758 A8 B8 C8 D8 A group of conversion optical elements constituted by a plurality of conversion optical elements, which are switched in stages while maintaining a ratio-of the beam eccentricity in the first direction and the beam eccentricity in the second direction. The eccentricity of the reference optical axis sets the conversion characteristics of the first direction and the second direction to different characteristics. 32. The illumination optical device according to item 29 of the application, wherein the light beam conversion mechanism includes a conversion optical element group composed of a multiple-number conversion optical element, and the majority of the conversion optical elements maintain the light beam with respect to the reference optical axis. In the state of the eccentricity amount, in order to switch the eccentricity amount in the first direction and the eccentricity amount in the second direction in stages, the conversion characteristics of the first direction and the second direction are set to different characteristics: 33. The illumination optical device according to item 29 of the patent includes an optical system disposed between the beam conversion mechanism and the illumination pupil surface. 34. The illumination optical device according to item 33 of the application, wherein the aforementioned optical system has a predetermined fixed magnification. 35. The illumination optical device according to item 33 of the patent application, wherein the optical system includes a variable magnification optical system for changing a 2 intensity distribution of a light beam converted by the light beam conversion mechanism. 36. An exposure device, comprising: an illumination optical device: any one of items No. 丨 to 35 of the scope of patent application; and a projection optical system: projecting a pattern formed on a photomask disposed on the illuminated surface For photosensitive substrates. -63- 544758 AB CD VI. Patent application scope 37. A method for manufacturing a microdevice, characterized in that it includes an exposure process: the exposure device contained in item 36 of the patent application scope is used to expose the pattern formed on the aforementioned photomask to photosensitivity A substrate; and, a development process: developing the exposed photosensitive substrate. 3 8. An exposure method, characterized in that it includes an illumination process: using the illumination optical device contained in any of items 1 to 35 of the scope of patent application to illuminate the pattern formed on the photomask disposed on the illuminated surface; And,-a projection process: a person who projects the aforementioned pattern of the aforementioned photomask onto a photosensitive substrate using a projection optical system. -64- This paper size applies to China National Standard (CNS) A4 (210X297 mm)