5447TS A7 ______B7 五、發明說明（1 ) 〔發明之技術領域〕 本發明係關於例如作爲光化學反應用之紫外線光源所 使用之放電燈之一種，由電介質障壁放電燈形成受激準分 •子，利用從上述受激準分子所放射之光線包括所謂電介質 障壁放電燈之光源裝置。 〔先行技術〕 作爲揭示關於相關本發明之電介質障壁放電燈之技術 之技術文獻，例如有日本特開平2 - 7 3 5 3號公報。在 該公報，記載有在放電電容器塡充形成受激準分子之放電 用氣體，藉電介質障壁放電形成受激準分子，從上述受激 準分子取出所放射之光線之放射器（參照電介質障壁放電 :另名臭氧發生器（ozonizer)龙電或無聲放電，電氣學 會發行改定新版「放電手冊」1989年6月再版7刷發 行第2 6 3頁）。 在電介質障壁放電燈，係夾住放電電漿空間在電極之 間，存在有1片或2片之電介質。第1 9圖（a )係表示 存在有2片電介質5，6之電介質障壁放電燈1。蓋因， 於第1 9圖（a )係燈封體7爲兼做電介質5，6。 欲點燈電介質障壁放電燈1時，在其兩極之電極3 ’ 4，例如施加lCkHz〜200CkHz，2kV〜 l〇kV之高周波之交流電壓。 然而，因位於放電電漿空間2與電極3，4間之電介 質5，6，並非從電極3，4直接流電流於放電電獎空間 ^紙張尺度適月中國國家標準（CNS)A4規格（210 X 297公釐1 ~ " --------------裝--- > >·> (請先閱讀背面之注意事項再填頁) 訂： 線. 經濟部智慧財產局員工消費合作社印製 5447Tr A7 B7 五、發明說明（2 ) 2 ，由於電介質5，6爲發生電容器之作用而流動電流。 亦即，在各電介質5，6之放電電漿空間2側之面，與各 電極3，4側之面等量相反符號之電荷爲感應於電介質之 •分極，而在夾住放電電漿空間2所對向之電介質5 ’ 6之 面之間放電。 沿著電介質5，6之放電電漿空間2側之面電流不太 流動，在發生放電之部分，係感應於電介質5，6'之放電 .電漿空間2側之面之電荷，由於放電所移動之電荷受到中 禾口，致使放電電漿空間2之電場會減少。因此，即使繼續 對放電極3，4施加電壓，放電電流終究會停止。但是， 若對於電極3，4之施加電壓更上升時，放電電流將會持 續。 一旦發生放電之後，放電停止時，直到電極3 ，4所 施加之電壓之極性反相爲止，不會再放電。 例如封入氙之電介質障壁放電燈時，氙氣係由於放電 分離爲離子與電子，而變成氙電漿。在此電漿中，被激磁 到特定能量位準之氙就耦合，而形成受激準分子。氙受激 準分子經過某壽命時間時就會離解，但是此時所開放之能 量將成爲真空紫外波長之光子釋出。爲了欲將電介質障壁 放電燈作爲真空紫外光源有效率地動作時，就必須有效率 地形成受激準分子。 在此，放電時阻礙有效率之受激準分子形成之大的要 因，爲將電漿激磁成無助益於形成受激準分子之能量位準 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） -------!1-裝 i I (請先閱^背面之^拿項再頁) 訂： -·線· 經濟部智慧財產局員工消費合作社印製 -5-5447TS A7 ______B7 V. Description of the Invention (1) [Technical Field of the Invention] The present invention relates to, for example, a discharge lamp used as an ultraviolet light source for a photochemical reaction, and a stimulated quasi-fraction is formed by a dielectric barrier discharge lamp. A light source device including a so-called dielectric barrier discharge lamp using light emitted from the above excimer is included. [Preceding Technology] As a technical document that discloses a technology related to the dielectric barrier discharge lamp of the present invention, there is, for example, Japanese Patent Application Laid-Open No. 2-7 3 5 3. This publication describes a radiator (see Dielectric Barrier Discharge) in which a discharge gas that forms an excimer in a discharge capacitor is charged with a dielectric barrier to form an excimer, and the emitted light is taken out of the excimer (see Dielectric Barrier Discharge : Another name is ozone generator (ozonizer) or silent discharge. The Institute of Electrical Engineering issued a revised version of the "Discharge Manual." In a dielectric barrier discharge lamp, there is one or two dielectrics sandwiching a discharge plasma space between the electrodes. Fig. 19 (a) shows a dielectric barrier discharge lamp 1 having two dielectrics 5,6. The Gein, as shown in Fig. 19 (a), shows that the lamp envelope 7 serves as the dielectric 5, 6 as well. When the dielectric barrier discharge lamp 1 is to be lighted, an alternating voltage of high frequency of 1 CkHz to 200 CkHz and 2 kV to 10 kV is applied to the electrodes 3 ′ 4 of the two poles. However, the dielectrics 5, 6 located between the discharge plasma space 2 and the electrodes 3, 4 do not directly flow current from the electrodes 3, 4 to the discharge electricity award space. ^ The paper size is in accordance with the Chinese National Standard (CNS) A4 specification (210 X 297mm 1 ~ " -------------- install --- > > · > (Please read the notes on the back before filling in the pages) Order: Line. Economy 5447Tr A7 B7 printed by the Consumer Cooperatives of the Ministry of Intellectual Property Bureau. 5. Description of the Invention (2) 2, because the dielectrics 5, 6 flow the current for the capacitor effect. That is, the discharge plasma space 2 in each dielectric 5, 6 On the side surface, the charges of the opposite signs to the surfaces of the electrodes 3 and 4 are of the same magnitude and are induced in the dielectric • polarizing, and are discharged between the surfaces of the dielectric 5 ′ 6 that sandwich the discharge plasma space 2 opposite. The current flowing along the side of the plasma space 2 along the dielectric 5, 6 does not flow much, and the part where the discharge occurs is induced by the discharge of the dielectric 5, 6 '. The charge on the side of the plasma space 2 is due to the discharge The moving charge is subject to Zhonghekou, which causes the electric field in the discharge plasma space 2 to decrease. Therefore, even if the discharge continues, After the voltage is applied to electrodes 3 and 4, the discharge current will eventually stop. However, if the applied voltage to electrodes 3 and 4 rises, the discharge current will continue. Once the discharge occurs, the discharge will stop until the electrodes 3 and 4 are applied. The polarity of the voltage will not be discharged until the polarity is reversed. For example, when a xenon dielectric barrier discharge lamp is enclosed, the xenon gas is separated into ions and electrons by the discharge, and it becomes a xenon plasma. In this plasma, it is excited to a specific energy The xenon at the level is coupled to form an excimer. The xenon excimer will dissociate after a certain lifetime, but the energy released at this time will be released as a photon in the vacuum ultraviolet wavelength. In order to dielectric barrier When a discharge lamp operates efficiently as a vacuum ultraviolet light source, it is necessary to efficiently form excimer molecules. Here, the major factor that prevents the formation of efficient excimer molecules during discharge is to help plasma excitement helplessly. Benefit from the formation of the excimer energy level The paper size is applicable to the Chinese National Standard (CNS) A4 (210 X 297 mm) -------! 1-install i I (please read first ^ ^ Surface of the page and then take items) Order: - · cable · Ministry of Economic Affairs Intellectual Property Office employees consumer cooperatives printed -5-
544TW A7 B7 經濟部智慧財產局員工消費合作社印製 五、發明說明（3 ) 放電開始即後之放電電漿之電子運動爲集團性者，能 量雖然高但是溫度爲處於低之狀態。在此狀態下，放電電 漿，係遷移成欲形成受激準分子所需要之諧振狀態之機率 •爲高。但是，若放電時間變長時，電漿之電子狀態就逐漸 變成熱性，亦即，變成被稱爲麥克斯威爾一波耳茲曼（ Maxwell-Boltzmann’s )分布之熱平衡狀態，電紫溫度就上 升，遷移成變成不能形成受激準分子之高激磁狀態之機率 就變高。 並且，即使形成受激準分子之情形時，等待壽命時間 之經過，釋出所需光子自然地離解之前，由於後續之放電 ，有時受激準分子會受到破壞之情形發生。實際，氙受激 準分子之例，係從開始放電到真空紫外波長之光子釋出， 需要1 s程度之期間，在此期間內之後續放電或再放電 ，會降低受激準分子發光之效率。 亦即，一旦開始放電之後，後續之放電能量儘量變小 爲最重要之事。 即使放電時間短時，若在其放電期間所注入之能量太 大時，同樣地遷移到高激磁狀態之機率會上升。遷移至高 激磁狀態之電漿，係放射紅外線而緩和，只使燈溫上升， 而無助益於受激準分子之燈光。 亦即，必須進行抑制無助益於形成受激準分子之能量 位準之放電電漿之激磁之放電驅動。在此點，先前之電介 質障壁放電燈之’光源裝置爲不能獲得滿足。 提案欲達成包括電介質障壁之放電之所有由脈衝放電 (請先閱讀^面之如意事項頁) 裝 訂： 線. 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） -6 - 544爾 A7 __________ B7 五、發明說明（4 ) 之受激準分子發光之高效率化，有日本特開平 1 — 2 4 3 3 6 3號.公報。此係，依據下列條件者，即一 旦開始放電時，後續之放電能量必須儘量變小。但是，記 •載於此提案者，係關於究意依據那一參數調整才能使受激 準分子可達成高效率化。尤其，電介質障壁放電時，對於 放電電漿空間之施加電壓或電流注入，由於必須經由電介 質進行，所以，此電壓或電流之控制自由度爲低，欲找出 最佳條件爲非常困難之事。 作爲欲改善電介質障壁放電燈之效率之提案，係例如 有曰本特開平8 — 5 0 8 3 6 3號公報。但是，於此提案 ’爲了使上述受激準分子有效率地形成，毫無述及抑制對 於形成受激準分子沒有助益於能量位準之放電電漿之激磁 之達成真正有效之具體事項。/ 又，作爲改善關於利用電介質障壁放電之熒光燈之驅 動波形之提案，例如有日本特開平6 - 6 3 0 0 6號公報 〇 藉此，上述及藉由正負極性之矩形脈衝列或交流之矩 形波加以驅動，就可提升熒光燈之亮度。在此中，關於矩 形脈衝列或矩形波，相關於頻率或作用比（duty ratio )， 記載有對於施加電壓之變化亮度之變化之實驗結果，並沒 有說明與先前之正弦波驅動做比較之效率提升。 但是，於現實之供電裝置，包括有高電壓變壓器等， 欲施加理想之矩形脈衝列或矩形波爲不可能之事，由於供 電裝置之輸出阻抗與燈之阻抗之互相作用波形會鈍化，又 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） -------裝·-- (請先閱讀^背面之如意事項再頁) 訂： •線· 經濟部智慧財產局員工消費合作社印製 544716 A7 _ B7 五、發明說明（5 ) ，局部性係由於諧振會施加正弦波性電壓。 於此種現實之供電裝置，若從理想之矩形波形有偏移 時’偏移之任可成分都有害，除非可容許到那一種程度之 •偏移做明確交代，就不能設計，製作具有合乎經濟之實用 光源裝置。 本發明係鑑於上述事情所發明者，其目的係提供一種 有效率地生成受激準分子，作爲真空紫外光源可有效率地 動作之電介質障壁放電燈光源裝置。 〔解決問題之手段〕 爲了有效率地形成本發明問題之受激準分子，係在於 抑制無助益於形成受激準分子之能量位準對於放電電漿之 激磁。並且，爲此，燈施加電壓以有限之增加率上升，達 到開始放電電壓開始放電時，只要儘量迅速結束放電就可 以。 若將電介質障壁放電燈1之電路動作使用第1 9 ( b )圖說明。如第1 9圖（b )圖所示，放電電漿空間2之 放電路，將變成串聯連接電阻1 0與開關1 1者。又，在 電介質障壁放電燈1 ，在電極3，4與放電電漿空間2間 具有電介質5，6，此係電路上將成爲電容器發生其作用 。但是，若電介質爲2片時，可考慮分別將電容器串聯合 成之1個電容器1 3。 由於此電容器爲對於放電電漿空間2插入成串聯之構 造，在電介質障壁放電燈1係只有在燈施加電壓之極性變 -----------裝 i I (請先Mt?背面之於意事項再^^^頁) 訂·- --線 經濟部智慧財產局員工消費合作社印製 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） -8- 544716 A7 B7 五、發明說明（6 ) -------------裝--- 請先Μ讀#背面之#意事項再頁) 化即後之某期間內流動放電電流，即使具有不施加將燈施 加電壓實質上成爲零之停止期間之脈衝電壓，自然地會發 生放電之停止期間。 • 又，除非放電電漿空間2之電壓沒有達到開始放電電 壓，就不會發生放電。 放電電漿空間2本身也形成電容器1 2，當開始放電 時，由於充電於此電容器之大部分能量會花費於放電，所 .以，曉得供電裝置係在開始放電以後對於電介質障壁放電 燈1不必追加所需以上之電流加以流動就可以。 茲就燈壁面之每單位面積來加以思考。 --線· 放電開始電壓，係若氣體壓與與電間隙之間隔決定之 後就幾乎自動地決定。又，放電電漿空間所形成之電容器 1 2之靜電電容C 1，係由於电放電間隙所決定，所以開 始一次放電之後到結束爲止之期間給與電漿之最小能量， 係放電電漿空間所形成之電容器1 2所充電之電荷爲全部 放電之能量，此係由燈之構造所決定。 經濟部智慧財產局員工消費合作社印製 爲了有效率地形成受激準分子所需抑制不助益於形成 受激準分子之能量位準對於放電電漿之激磁，於此最小能 量之放電條件下，可最佳地達成。 然而，所謂此最小能量之放電條件，係使用具有極大 輸出阻抗之供電裝置，將燈施加電壓緩慢地上升，加以放 電，原理上就可實現。 但是，這種供電裝置係作爲實際之光源裝置應用時就 有問題。 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 544716 A7 B7 經濟部智慧財產局員工消費合作社印製 五、發明說明（7 ) 第1個問題，若輸出阻抗大時，就不能得到由於周期 性反復放電之高速動作速度。 第2個問題，係在此最小能量之放電條件下，會發生 •由於放電間隙間隔之燈內之位置不均均影響所引起之一個 燈內之放電不均勻性之點。 因此，使用具有將所需光量可實現之小輸出阻抗之供 電裝置，並且，於電介質障壁放電燈之所有壁面爲了使其 具有發生均勻放電之餘裕之實用性光源裝置等，必須較上 述最小能量之放電條件使燈施加電壓變高。但是，關於使 燈施加電壓變高之程度，必須依其受激準分子發光之效率 降低爲抑制到可容認之範圍。 亦即，燈施加電壓之尖峰値，係將放電不均勻實用上 可忽視之下限値作爲基準，抑Μ爲其2倍以下，較佳爲必 須抑制成1 · 5倍以下。又爲了可維持放電所需之下限値 作爲基準，抑制到其3倍以下，較佳爲必須抑制到2 · 5 倍以下。按，欲增加燈電力時，並非提高燈施加電壓，而 必須提高燈電源之驅動頻率。燈電流係因每當燈施加電壓 之反相時會流動一定量，所以燈電力將會比例於驅動頻率 。因此，藉提高上述驅動頻率，不會伴隨由於燈施加電壓 上升之效率惡化可增加燈電力。 將電介質障壁放電燈光源裝置之基本構成表示於第1 圖。於該圖，1係上述之電介質障壁放電燈，8係供電裝 置，供電裝置8係由電橋方式，推挽方式，或，飛馳方式 等之高周波交流電源9，與升壓變壓器丁 r所構成。茲將 -----1!!! t i I <請先閱讀，背面之#意事項再4^||4頁) ιδ -線· 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） -10- 544716 A7 經濟部智慧財產局員工消費合作社印製 _______B7____五、發明說明（8 ) 實用性供電裝置，燈施加電壓E ( t )，放電間隙電壓（ 亦即放電電漿空間2之電壓）V 1 ( t )，燈電流I s ( t)，及，放燈電流Id (t)之典型波形表示於第2圖 * (該圖係將全電橋方式之供電裝置作爲基本，將電路與燈 模型化由電腦模擬所求得之波形，於半電橋或推挽方式之 供電裝置基本上也相同）。 按，關於放燈電流I d ( t )，由於是流動於上述第 .1 9 ( b )圖之電阻1 〇之燈內電流，所以不能直接測定 其波形，但是若能夠測定燈施加電壓E ( t )與燈電流 I s ( t )之波形資料，就可由於上述第1 9 ( b )圖所 示放電電漿空間2之電容器1 2之靜電電容C 1 ，電介質 5，6之靜電電容C 2，並聯存在於電介質障壁放電燈之 浮游靜電電容C 3加以算出。__ 亦即，所以由放電電漿空間2之電容器1 2之靜電電 容C1，電介質5，6之靜電電容C2，及並聯存在於電 介質障壁放電燈之浮游靜電電容C 3所決定使用2個係數 F=1+C1/C2及Cv=Cl+C3時，放電電流波 形I d ( t )就可由下式（1 )求得。 Id(t) = F.Is(t)-Cv.dF(t)/dt ( 1 ) 此方法因使用數値微分，雖然所得到結果之波形中之 電流値之小領域之精度爲不太良好，但是，因開始放電時 會呈現迅速建立，所以，只要將此找出之目的使用時就沒 有問題。 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） -11 - (請先閱讀一背面之如意事項再 訂： i線- 544716 A7 _ B7 五、發明說明（9 ) 於第2圖，若燈施加電壓E ( t )極性急變時放電間 隙電壓V 1 ( t )也急變，而此達到放電開始電壓之點 G1就開始放電。當開始放電時，放電電流波形J 1 (參 ‘照第2圖之放燈電流I d ( t )波形）會快速地出現，其 結果，放電間隙V 1 ( t )會急驟地降低。因應此放電間 隙V 1 ( t )(亦即，放電電漿空間之電壓）之急驟降低 分量，燈施加電壓E (t)也降低，會發生彎曲點K。 對應於放電電流停止之點J 2之燈施加電壓波形上之 點，爲存在於其絕對値之極大點P 1，或存在於稍爲超過 其之處。對於實際光源裝置之評價，上述點係可視爲存在 於上述絕對値之極大點P 1。 以後，彎曲點K爲止之燈施加電壓波形之變化，係縮 小爲C 2 / ( C 1 + C 2 )倍，-而直接出現於放電間隙電 壓V 1 ( t )波形。 在此，C 1與C 2，係上述放電電漿空間2之電容器 1 2之靜電電容C1 ，與電介質5，6之電容器1 3之靜 電電容C2。若在電極3，4兩方存在有電介質5 ，6之 電介質障壁放電燈時，C 2係被認爲串聯合成各個電介質 之單獨之靜電電容。 在此，於實用性之供電裝置，在燈施加電壓會發生如 第2圖之彎曲點K之理由爲如下。因應上述放電間隙電壓 V 1 ( t )(亦即，放電電漿空間之電壓）之急聚降低分 量，燈施加電壓‘ E ( t )也欲降低。此燈施加電壓E ( t )降低分量爲將由供電裝置8加以補償，但是由於升壓變 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 請先閱讀‘背面之办意事項再υίΙΛ 頁) 言 經濟部智慧財產局員工消費合作社印製 -12- 544716 A7 _ B7 五、發明說明（10 ) 壓器τ Γ之磁通洩漏或電纜之阻抗所起因存在有感應性之 輸出阻抗，所以燈施加電壓降低分量之補償延遲，作爲其 結果，在絕對値大的方向會發生凸之彎曲點K。又，由於 •此感應性之輸出阻抗與電介質障壁放電燈1之靜電電容之 諧振，在彎曲點K之後會摻入對於燈施加電壓之振動成分 。其結果，在燈施加電壓波形上有時會發生絕對値之極小 點或絕對値之極大値。 以下，將在上述彎曲點K之後所發生之振動稱嗚鈴（ ringmg )，將其頻率稱爲嗚鈴頻率Fr。又，在上述彎曲 點K開始放電之後到燈施加電壓E ( t )之尖峰之時間視 爲！，出現於彎曲點K之後出現之尖峰P 1到下一尖峰 P 2 P 2之時間視爲丁 1 2。 本發明係注目於上述彎曲靼K以後之燈施加電壓波形 之變化，不至於降低紫外線發光效率，在放電電漿空間有 效投入電力者。 亦即，如上述由於燈施加電壓E ( t )波形發生急驟 上升或下降所發生時生成放電受激準分子，所生成之受激 準分子離解到發生紫外線爲爲止之期間，若再有追加放電 電壓，受激準分子就會被破壞。因此，快速地切斷放電電 流從紫外線發光效率上來說較佳。 然而，如第2圖所示，在上述彎曲點K開始放電之後 ，到燈施加電壓E ( t )達到第1尖峰會持續放電。因此 ，從開始放電之後到施加電壓達到尖峰之時間r爲長時， 結果來說紫外線會發生效率會降低。 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） --------------裝--- (請先閱讀，背面之ii·意事項再> · · 經濟部智慧財產局員工消費合作社印製 -13- 544716 Α7 Β7 五、發明說明（11 ) 又，在彎曲點K之後發生嗚鈴之狀態時，達到其電壓 尖峰爲止會持續放電電流。並且，若其嗚鈴頻率低時’到 放電電流停止爲止需要長時間，結果來說會降低紫外線發 •光效率。 亦即，縮短開始上述放電之後到施加電壓達到尖峰之 時間r，或，藉提高嗚鈴頻率F I*，就不至於降低紫外線 發光效率，就可使電介質障壁放電燈放電。 _ 於此，開始上述放電之後到施加電壓E ( t )達到尖 峰爲止之時間r及鳴鈴頻率F I·，係大槪由供電裝置8與 電介質障壁放電燈1所構成之電路阻抗L與靜電電容C所 決定，藉使這些値變少，就可縮短時間7：，又，可提高鳴 鈴頻率。 在此，因在通過第1尖峰P-1之處就結束放電，（亦 即，在此時點於上述第1 9 ( b )之開關1 1爲開啓）， 所以通過第1尖峰P1時，就如上述第19 (b)所示電 容器1 2，1 3之靜電電容與浮游電容，及由電路之阻抗 L所決定之振動頻率，施加電壓波形E ( t )就會振動性 地變化。 如上述，在通過第1尖峰P 1即後因放電已結束，所 以，到第1尖峰P1〜第2尖峰P2爲止之時間T 12， 係大槪相當於上述電容器1 2，1 3之靜電電容與浮游電 容，及電路之阻抗L所決定之振動頻率之周期。 一般，L C之諧振電路之諧振頻率係可由下式計算。 L C = 1 / ( 2 7Γ f ) 2 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 請 先 閱 讀 背 之 注 意 事 項 頁 經濟部智慧財產局員工消費合作社印製 •14- 544716 A7 B7 經濟部智慧財產局員工消費合作社印製 五、發明說明（12 ) 因此’將上述電路之阻抗視爲L，將靜電電容視爲C 時’上述鳴鈴頻率Fr，係大槪由ΐ/{27ΓΧν^(ίε )}所決定，因靜電電容C之値爲依存於電介質障壁放電 _燈1之靜電電容，所以，欲提高鳴鈴頻率F Γ (縮短時間 ^ )時’只要使上述阻抗L之値變小就可以。具體上爲藉 變小升壓變壓器T r之耦合阻抗，就可提高鳴鈴頻率f r 〇 . 依據上述考察，本發明人等，調查了上述時間r，到 尖峰P 1〜P 2之時間T 1 2與紫外線發光效率之關係， 及鳴鈴頻率之紫外線發光效率之關係。 其結果，如後述第8，9，1 0圖所示，將上述時間 i疋爲γ$2 · 1 // s ’將上述時間T1 2定爲T 1 2$ 3es，或，將鳴鈴頻率Fr定—爲Fr2300kHz時 ，就不至於降低紫外線發光效率，曉得了就可將電介質障 壁放電燈放電。 於此，如上述鳴鈴頻率F r因大槪可由1 / { 2 π X ，（：L C ) }所決定，所以，將上述L C値取爲L C $ 2.8x10 13〔C之單位爲F (Farad) ，L之單位 爲H ( Henry )〕就可以。 上述L C値因大槪由燈1之靜電電容與變壓器丁 rg 阻抗所決定，所以L C値能夠符合上述條件因應燈1之靜 電電容，來選定變壓器T r之阻抗就可以。 上述靜電電容C之測定，係將熄燈狀態之燈單體之_ 電電容由阻抗寺測疋就可以。又’關於L之測疋係依據點 -------------裝 請先閱讀r面之浴意事項再 頁) 訂·· •線· 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） -15 544716 A7 B7 五、發明說明（13 ) 燈時之放電結束即後之狀態，將變壓器T r之一次側狀態 模擬地再現之後，將二次側之阻抗由阻抗計等測定就可以 〇 ‘ 例如使用全電橋方式或半電橋方式之高周波汶流電源 時，將變壓器之一次側短路之狀態下，測定二次側之阻抗 就可以。又，推挽方式時，短路變壓器T I·之一次側中點^ 與一端，他端係開啓之狀態下，測定二次側之阻抗就可以 .。並且，返馳方式時，將變壓器T r之一次側開啓之狀態 下，測定二次側之阻抗就可以。 按，依所使用之供電裝置8，有時上述之彎曲點K爲 不會明確地出現於施加電壓波形之情形發生。尤其，使用 返馳方式之電源時，上述彎曲點K不會明確出現於施加電 壓波形上之情形居時。在此情形-時，如上述，算出放電電 流波形I d ( t )，只要推定其建立之驟陡部分具有彎曲 點就可以。 記載於本發明申請專利範圍第1〜第3項之發明，係 依據上述，規定將電介質障壁放電燈有效率地放電所需之 實用性條件者，藉滿足下面任何條件，就可有效率地放電 電介質障壁放電燈。 (1 )經過達到開始電介質障壁放電燈之電壓値之時 點後，達到最大電壓値之後達到下一最大電壓値爲止之時 間變成3 " S以下之電壓施加於電介質障壁放電燈。 (2 )達到開始電介質障壁放電燈之電壓値之後，接 著到施加新燈電壓爲止之期間變成最大電壓値之時間爲變 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公楚） (請先閱讀背面之注意事項再 -裝i · ίίΛ-頁： 經濟部智慧財產局員工消費合作社印製 -16- 544716 A7 B7 五、發明說明（14) 成2 · 1 # s之電壓施加於電介質障壁放電燈。 (請先閱讀背面之注意事項再填ΤΚφ頁) (3 )將由供電裝置與電介質障壁放電燈所構成之電 路阻抗視爲L，將靜電電容視爲C時，選定爲該阻抗L， •靜電電容C爲滿足下式。 LC = 2 · 8x10 — 13 〔發明之實施形態〕 茲就本發明之實施形態說明如下。 第3圖係表示本發明之實施例之電介質障壁放電燈點 燈電路一例之圖，該圖係表示使用全電橋方式之反相器電 路之電介質障壁放電燈之點燈電路之槪略構成。 第4圖係說明上述點燈電路動作之波形圖，該圖係表 示連接例如沒有變壓器之一次，_二次間洩漏阻抗不發生放 電現象之電容性之負荷時之波形以模式方式。於該圖， Q 1〜Q 4係開關元件（例如F E 丁） ，G 1〜G 4係開 關元件Q 1〜Q 4之閘訊號，V p係升壓變壓器T r (以 下，略稱爲變壓器T r )之一次側電壓，V s係變壓器 丁 r之二次側電壓。 經濟部智慧財產局員工消費合作社印製 將第3圖之點燈電路之動作依據第4圖說明如下。 (a )當第1閘訊號G 1 ，第4閘訊號G 4變成〇N 時，由閘驅動電路G D 1，G D 4，第1開關元件Q 1， 第4開關元件Q 4就變成導通狀態（該圖①），在變壓器 T r之一次側由直流電源D C施加直流電壓（該圖②）， 在變壓器丁 r之二次側發生電壓，對於電介質障壁放電燈 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 544716 A7 ___ B7 五、發明說明（15 ) 1施加電壓（該圖③）。 (b) 當第1閘訊號G1，第4閘訊號G4變成 OFF時（該圖④），第1開關元件Q1，第4開關元件 • Q 4就變成關斷狀態，變壓器丁 r之一次側電壓v p，變 壓器T r之二次側電壓Vs，從變壓器Tr之洩漏阻抗， 與變壓器T r之二次側靜電電容量所決定有關諧振頻率之 速度開始不安定變動（該圖⑤，⑤）。 (c) 當第2閘訊號G2，第3閘訊號G3變成 〇N，由閘驅動電路GD2，GD3，第2開關元件Q2 ，第3開關元件Q 3就變成導通狀態（該圖⑦），在變壓 器T I·之一次側與上述（a )相反之直流電源d C施加直 流電壓’在變壓器T r之二次側發生與上述（a )相反之 電壓’對於電介質障壁放電燈1_施加相反之電壓（該圖⑨ )0 經濟部智慧財產局員工消費合作社印製 (d )當第2閘訊號G 2，第3閘訊號G 3變成 〇F F時（該圖⑩），第2開關元件Q 2，第3開關元件 Q 3就變成關斷狀態，變壓器τ r之一次側電壓V p，變 壓器T r之二側側電壓v s ，係從變壓器τ r之洩漏阻抗 ’與變壓器T r之二次側靜電電容量所決定有關諧振頻率 之速度開始不安變成（該圖⑪，⑫）。 (e )以下，反復（a )〜（d )之動作。 於第5圖，第6圖係上述點燈電路之施加電壓波形E (t ) ’電流波’形I ( t )之實測資料。第6圖係放大第 5圖之區間Y 1部分者，上述波形係由下述條件所測定。 -18- ϋ ^ -I 1 _1 ϋ 1 ϋ ·1 lei ϋ · I · 1 ^ (請先閲讀^面之1意事項再填||^頁) i線· 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 544716 A7 ________ B7 五、發明說明（16 ) 按’此條件係可將第3圖之點燈電路最有效率地點燈之條 件。 請 先 閱 讀 r 面 之 注· 意 事 項 •頻率：33 · 9kHz * •變壓器T r 一次側阻抗：1 · 4 2 m Η 二次側阻抗：2 Ο 4 m Η 耦合阻抗 ：0.99955 •電介質障壁放電燈 訂544TW A7 B7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs. 5. Description of the invention (3) The electronic movement of the discharge plasma immediately after the start of discharge is a group, although the energy is high but the temperature is low. In this state, the probability that the discharge plasma will migrate to the resonance state required to form an excimer is high. However, if the discharge time becomes longer, the electronic state of the plasma will gradually become thermal, that is, it will become a state of thermal equilibrium called Maxwell-Boltzmann's distribution, and the temperature of the electric violet will rise. The probability of migration to a high-excitation state that cannot form an excimer becomes higher. In addition, even when the excimer is formed, waiting for the elapse of the life time before the required photons are naturally dissociated, the excimer may be destroyed due to subsequent discharge. In practice, the example of xenon excimer is from the start of discharge to the release of photons in the vacuum ultraviolet wavelength, which requires a period of 1 s. Subsequent discharge or re-discharge during this period will reduce the efficiency of excimer emission. . That is, once discharge is started, it is most important that the subsequent discharge energy be as small as possible. Even if the discharge time is short, if the energy injected during the discharge period is too large, the probability of migrating to a high-excitation state similarly increases. Plasma that migrates to a high-excitation state is irradiated with infrared light to relax it, which only increases the lamp temperature, and does not help the light of the excimer. That is, it is necessary to perform a discharge drive that suppresses the excitation of the discharge plasma which does not contribute to the formation of the excimer energy level. At this point, the 'light source device of the previous dielectric barrier discharge lamp cannot be satisfied. The proposal is to achieve all pulse discharges including the discharge of the dielectric barrier (please read the ^ page above). Binding: Thread. This paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) -6- 544 Seoul A7 __________ B7 V. Description of the Invention (4) The high efficiency of the excimer light emission is disclosed in Japanese Patent Application Laid-Open No. 1-2 4 3 3 6 3. Gazette. This system is based on the following conditions: once the discharge is started, the subsequent discharge energy must be as small as possible. However, it is noted that the proponent is concerned with deliberately adjusting that parameter in order to make the excimers highly efficient. In particular, when a dielectric barrier is discharged, the applied voltage or current injection to the discharge plasma space must be performed through a dielectric, so the degree of freedom in controlling this voltage or current is low, and it is very difficult to find the optimal conditions. As a proposal for improving the efficiency of a dielectric barrier discharge lamp, there is, for example, Japanese Patent Laid-Open No. 8-5 0 8 3 6 3. However, in order to make the above-mentioned excimer formation efficiently, there is no specific matter for suppressing the realization of the real effect of the excitation of the discharge plasma that does not contribute to the energy level of the excimer formation. / As a proposal for improving the driving waveform of a fluorescent lamp using a dielectric barrier discharge, for example, Japanese Patent Laid-Open Publication No. 6-6306, which is based on the above-mentioned and rectangular pulse trains of positive and negative polarities or rectangular rectangles of alternating current Driven by waves, the brightness of fluorescent lamps can be increased. Here, the rectangular pulse train or rectangular wave is related to the frequency or duty ratio, and the experimental results of the change in the brightness of the applied voltage are recorded. It does not explain the efficiency compared with the previous sine wave drive. Promotion. However, in practical power supply devices, including high-voltage transformers, it is impossible to apply the ideal rectangular pulse train or rectangular wave. The waveform of the interaction between the output impedance of the power supply device and the impedance of the lamp will be passivated. Paper size applies to China National Standard (CNS) A4 (210 X 297 mm) ------- installation ... (please read the ^ wishful wishes on the back and then the page) Order: • Lines • Ministry of Economic Affairs Intellectual Property Printed by the Bureau's Consumer Cooperatives 544716 A7 _ B7 5. Description of the Invention (5), the locality is due to the resonance will apply a sine wave voltage. In such a realistic power supply device, if there is an offset from the ideal rectangular waveform, any component of the offset is harmful. Unless a certain degree of offset is allowed to be explained, it cannot be designed and manufactured with the Economical practical light source device. The present invention has been made by the inventors in view of the foregoing, and an object thereof is to provide a dielectric barrier discharge lamp light source device which can efficiently generate excimer molecules and can operate efficiently as a vacuum ultraviolet light source. [Means of Solving the Problem] In order to efficiently form the excimer of the invention, the problem lies in suppressing the excitation of the discharge plasma by the energy level that does not contribute to the formation of the excimer. For this reason, the voltage applied to the lamp rises at a limited increase rate, and when the discharge voltage is started and the discharge is started, the discharge may be terminated as quickly as possible. If the circuit operation of the dielectric barrier discharge lamp 1 is described using FIG. 19 (b). As shown in Figure 19 (b), the discharge circuit of the discharge plasma space 2 will become a resistor 10 and a switch 11 connected in series. In addition, the dielectric barrier discharge lamp 1 has dielectrics 5, 6 between the electrodes 3, 4 and the discharge plasma space 2, and these circuits will act as capacitors to perform their functions. However, if the number of dielectrics is two, one capacitor 13 may be considered in which the capacitors are connected in series. Because this capacitor is inserted in series with the discharge plasma space 2, in the dielectric barrier discharge lamp 1 only the polarity of the voltage applied to the lamp changes ----------- install i I (please first Mt? (^^^ pages on the back of the matter of interest) Order ----Printed by the Intellectual Property Bureau Employee Consumer Cooperative of the Ministry of Economic Affairs This paper is printed in accordance with China National Standard (CNS) A4 (210 X 297 mm) -8- 544716 A7 B7 V. Description of the Invention (6) ------------- Installation --- Please read the #Issue on the back of the page and then the page) The discharge current will flow within a certain period of time, Even if the pulse voltage is not applied during a stop period in which the voltage applied to the lamp is substantially zero, a discharge stop period naturally occurs. • The discharge will not occur unless the voltage in the discharge plasma space 2 does not reach the start discharge voltage. The discharge plasma space 2 itself also forms a capacitor 12. When the discharge is started, most of the energy charged in this capacitor will be spent for discharge. Therefore, it is known that the power supply device does not have to be used for the dielectric barrier discharge lamp 1 after the discharge is started. It suffices to add more current than necessary to flow. Let us consider each unit area of the wall surface of the lamp. --The line / discharge start voltage is determined almost automatically after the gas pressure and the distance from the gap are determined. In addition, the electrostatic capacitance C 1 of the capacitor 12 formed in the discharge plasma space is determined by the electrical discharge gap. Therefore, the minimum energy given to the plasma during the period from the start of a discharge to the end is the discharge plasma space. The charge charged by the formed capacitor 12 is the energy of full discharge, which is determined by the structure of the lamp. Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs in order to efficiently form the excimer. The suppression required does not help the formation of the excimer energy level for the excitation of the discharge plasma. Under this minimum energy discharge condition Can best be achieved. However, the so-called minimum energy discharge condition can be realized in principle by using a power supply device with a large output impedance to slowly increase the voltage applied to the lamp and discharge it. However, there is a problem when such a power supply device is applied as an actual light source device. This paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) 544716 A7 B7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 5. Description of the invention (7) The first question, if the output impedance is large, It is not possible to obtain a high-speed operation speed due to the cyclical repeated discharge. The second problem is that under the discharge condition of the minimum energy, the point of uneven discharge in the lamp caused by the uneven position of the lamp in the gap between the discharge gaps. Therefore, it is necessary to use a power supply device with a small output impedance that can achieve the required amount of light, and all the wall surfaces of the dielectric barrier discharge lamp must have a practical light source device with a margin for uniform discharge. The discharge conditions increase the voltage applied to the lamp. However, the degree to which the voltage applied to the lamp becomes high must be reduced to a recognizable range in accordance with the efficiency of its excimer light emission. In other words, the peak value of the voltage applied to the lamp is based on the practically negligible lower limit value of the non-uniform discharge, which is 2 times or less, and preferably 1.5 times or less. In addition, the lower limit required for sustaining discharge can be used as a reference to suppress it to 3 times or less, and preferably to 2.5 or less. Press, if you want to increase the lamp power, it is not necessary to increase the voltage applied to the lamp, but you must increase the driving frequency of the lamp power supply. The lamp current will flow a certain amount every time the inversion of the voltage applied to the lamp, so the lamp power will be proportional to the driving frequency. Therefore, by increasing the above-mentioned driving frequency, the lamp power can be increased without accompanying the deterioration of the efficiency due to the increase in the voltage applied to the lamp. The basic structure of a light source device for a dielectric barrier discharge lamp is shown in FIG. 1. In the figure, 1 is a dielectric barrier discharge lamp as described above, 8 is a power supply device, and 8 is a high frequency AC power source 9 including a bridge method, a push-pull method, or a flying speed method, and a step-up transformer Dr. . I will ----- 1 !!! ti I < Please read first, #Issue on the back, then 4 ^ || page 4) ιδ -line · This paper size applies to China National Standard (CNS) A4 specification (210 X 297 mm) -10- 544716 A7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs _______B7____ V. Description of the invention (8) Practical power supply device, lamp applied voltage E (t), discharge gap voltage (that is, discharge The voltage of the plasma space 2) V 1 (t), the lamp current I s (t), and the typical waveforms of the lamp current Id (t) are shown in Figure 2 * (This figure is a full-bridge power supply The device is basic. The waveform obtained by computer simulation is modeled by the circuit and the lamp, which is basically the same for the power supply device of the half-bridge or push-pull method). As for the discharge current I d (t), the waveform of the lamp current I d (t) can be measured directly because it is the current flowing in the lamp 1 Ω of the above figure .19 (b). However, if the lamp applied voltage E ( t) and the waveform data of the lamp current I s (t) can be obtained due to the electrostatic capacitance C 1 of the capacitor 1 2 of the discharge plasma space 2 and the electrostatic capacitance C of the dielectrics 5 and 6 as shown in the above figure 19 (b). 2. The floating electrostatic capacitance C 3 existing in parallel with the dielectric barrier discharge lamp is calculated. __ That is to say, two coefficients F are determined by the electrostatic capacitance C1 of the capacitor 12 of the discharge plasma space 2, the electrostatic capacitance C2 of the dielectric 5, 6 and the floating electrostatic capacitance C 3 existing in parallel with the dielectric barrier discharge lamp. When = 1 + C1 / C2 and Cv = Cl + C3, the discharge current waveform I d (t) can be obtained by the following formula (1). Id (t) = F.Is (t) -Cv.dF (t) / dt (1) This method uses numerical differentiation, although the accuracy of the small area of current 中 in the resulting waveform is not very good. However, since it will quickly build up when starting to discharge, there is no problem as long as it is used for this purpose. This paper size is in accordance with Chinese National Standard (CNS) A4 (210 X 297 mm) -11-(Please read the items on the back of the book before ordering: i-line-544716 A7 _ B7 V. Description of the invention (9) on the 2nd In the figure, if the lamp applied voltage E (t) changes sharply when the polarity of the discharge gap voltage V 1 (t) also changes sharply, and this point reaches the discharge start voltage G1, the discharge starts. When the discharge starts, the discharge current waveform J 1 (see ' The discharge current I d (t) waveform according to FIG. 2 will appear quickly. As a result, the discharge gap V 1 (t) will decrease sharply. Accordingly, the discharge gap V 1 (t) (that is, the discharge current) The voltage of the plasma space) decreases sharply, the lamp applied voltage E (t) also decreases, and the bending point K will occur. The point on the waveform of the lamp applied voltage corresponding to the point at which the discharge current stops J 2 exists in its absolute value. The maximum point P 1 may exist slightly beyond it. For the evaluation of the actual light source device, the above point can be regarded as the maximum point P 1 existing at the absolute threshold. Thereafter, the waveform of the voltage applied to the lamp up to the point K The change is reduced to C 2 / (C 1 + C 2) times,- And it appears directly in the discharge gap voltage V 1 (t) waveform. Here, C 1 and C 2 are the electrostatic capacitance C1 of the capacitor 1 2 of the above-mentioned discharge plasma space 2 and the electrostatic capacitance of the capacitor 1 3 of the dielectric 5, 6 Capacitance C2. If there are dielectric barrier discharge lamps of dielectrics 5 and 6 on both electrodes 3 and 4, C 2 is considered to be a separate electrostatic capacitance of each dielectric in series. Here, in a practical power supply device, The reason that the voltage K applied to the lamp will occur at the bending point K as shown in Figure 2 is as follows. In response to the above-mentioned sharply decreasing component of the discharge gap voltage V 1 (t) (that is, the voltage of the discharge plasma space), the lamp voltage is applied. E (t) is also intended to be reduced. The reduced component of the applied voltage E (t) of this lamp is to be compensated by the power supply device 8, but as the step-up paper size is adapted to the Chinese National Standard (CNS) A4 specification (210 X 297 mm) Please read the 'Matters on the back' first, and then υΙΙΛ)) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs -12-544716 A7 _ B7 V. Description of the invention (10) Magnetic flux leakage of the voltage transformer τ Γ or the impedance of the cable There is a sense of the cause The output impedance, thus reducing the lamp voltage of the delay compensation component, as a result, a large absolute Zhi bent in a direction of projection points occur K. In addition, since this inductive output impedance resonates with the electrostatic capacitance of the dielectric barrier discharge lamp 1, a vibration component of a voltage applied to the lamp is added after the bending point K. As a result, an extremely small absolute point or an extremely large absolute value may occur on the waveform of the voltage applied to the lamp. Hereinafter, the vibration occurring after the above-mentioned bending point K is referred to as ringing (ringmg), and its frequency is referred to as ringing frequency Fr. In addition, the time from the start of discharge at the above-mentioned bending point K to the peak of the lamp applied voltage E (t) is regarded as! The time from the peak P1 appearing after the bending point K to the next peak P2P2 is regarded as Ding 1 2. The present invention pays attention to the change of the voltage waveform applied to the lamp after the above-mentioned bending ， K, so as not to reduce the ultraviolet luminous efficiency, and effectively input electricity in the discharge plasma space. That is, as described above, the discharge excimer is generated due to a sudden rise or fall in the waveform of the voltage E (t) applied to the lamp. During the period between the generated excimer dissociation and the occurrence of ultraviolet rays, if there is additional discharge, Voltage, the excimer is destroyed. Therefore, it is preferable in terms of ultraviolet light emission efficiency to quickly cut off the discharge current. However, as shown in FIG. 2, after the above-mentioned bending point K starts to discharge, the discharge is continued until the voltage E (t) of the lamp reaches the first peak. Therefore, when the time r from the start of discharge to the peak of the applied voltage is long, as a result, the ultraviolet generation efficiency is reduced. This paper size applies to China National Standard (CNS) A4 specification (210 X 297 mm) -------------- Loading --- (Please read first, the ii · intentions on the back, then> Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs-13- 544716 Α7 Β7 V. Description of the Invention (11) When the whimpering state occurs after the bending point K, the current will continue to be discharged until the voltage spike is reached. In addition, if the ringing frequency is low, it takes a long time until the discharge current stops, and as a result, the ultraviolet light emission and light efficiency will be reduced. That is, the time r after the discharge is started until the applied voltage reaches a peak, or Increasing the ringing frequency FI * will not reduce the ultraviolet luminous efficiency and discharge the dielectric barrier discharge lamp. _ Here, the time r and the ringing frequency FI after the start of the above discharge until the applied voltage E (t) reaches a peak. · It is determined by the circuit impedance L and the electrostatic capacitance C formed by the power supply device 8 and the dielectric barrier discharge lamp 1. By reducing these chirps, the time 7 can be shortened, and the ringing frequency can be increased. Here, because in Discharge ends at the first spike P-1 (that is, at this time, the switch 1 1 at the 19th (b) above is turned on), so when passing the first spike P1, it is the same as the 19th (b ) The electrostatic capacitance and floating capacitance of the capacitors 12 and 13 shown, and the vibration frequency determined by the impedance L of the circuit, the applied voltage waveform E (t) will change oscillatingly. P1 is because the discharge has ended, so the time T12 until the first peak P1 ~ the second peak P2 is equal to the capacitance and floating capacitance of the capacitors 1, 2, and 3, and the impedance of the circuit. The period of the vibration frequency determined by L. Generally, the resonance frequency of the resonant circuit of LC can be calculated by the following formula: LC = 1 / (2 7Γ f) 2 This paper size is applicable to China National Standard (CNS) A4 (210 X 297) (Mm) Please read the note on the back page printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs • 14-544716 A7 B7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 5. Description of the Invention (12) Therefore, The impedance is regarded as L, When viewed as C ', the above-mentioned ringing frequency Fr is determined by ΐ / {27Γχν ^ (ίε)}. Since the capacitance of C is dependent on the capacitance of the dielectric barrier discharge_lamp 1, the capacitance must be increased. When ringing frequency F Γ (shorten time ^) 'as long as the impedance of the above-mentioned impedance L is made small. Specifically, by reducing the coupling impedance of the step-up transformer T r, the ringing frequency fr can be increased 〇. According to the above In the investigation, the present inventors investigated the relationship between the above-mentioned time r, the time T 1 2 to the peak P1 to P2, and the relationship between the ultraviolet light emission efficiency and the ringing frequency and the ultraviolet light emission efficiency. As a result, as shown in FIGS. 8, 9, and 10 described later, the time i 疋 is set to γ $ 2 · 1 // s', the time T1 2 is set to T 1 2 $ 3es, or the ringing frequency Fr is set. When it is set to Fr2300kHz, the ultraviolet light emitting efficiency will not be reduced, and the dielectric barrier discharge lamp can be discharged if we know it. Here, as the above-mentioned ringing frequency F r can be determined by 1 / {2 π X, (: LC)}, the above-mentioned LC is taken as LC $ 2.8x10 13 [The unit of C is F (Farad ), The unit of L is H (Henry)]. The above L C 値 is determined by the electrostatic capacitance of the lamp 1 and the impedance of the transformer D rg, so the L C 符合 can meet the above conditions and select the impedance of the transformer T r according to the electrostatic capacitance of the lamp 1. The above-mentioned measurement of the electrostatic capacitance C is to measure the capacitance of the lamp unit in the off state by impedance measurement. And 'About the measurement of L is based on the point of ------------- Please read the bathing matters on the r side, and then page) Order · · • Line · This paper size applies to Chinese national standards ( CNS) A4 specification (210 X 297 mm) -15 544716 A7 B7 V. Description of the invention (13) After the discharge at the lamp is completed, the state immediately after the transformer T r is simulated and the secondary side is reproduced. The impedance can be measured by an impedance meter or the like. For example, when using a full-bridge or half-bridge high-frequency power supply, the primary side of the transformer can be short-circuited to measure the secondary side impedance. In the push-pull method, the middle point ^ and one end of the primary side of the short-circuit transformer T I · are connected, and the impedance of the secondary side can be measured. In the flyback method, it is sufficient to measure the impedance of the secondary side with the primary side of the transformer T r turned on. In some cases, depending on the power supply device 8 to be used, the above-mentioned bending point K may not appear clearly in the applied voltage waveform. In particular, when a flyback power supply is used, the above-mentioned bending point K does not clearly appear on the applied voltage waveform. In this case, when the discharge current waveform I d (t) is calculated as described above, it is only necessary to estimate that the steep part of the discharge current has a bending point. The inventions described in items 1 to 3 of the scope of patent application for the present invention are based on the above, and stipulate the practical conditions required for efficient discharge of a dielectric barrier discharge lamp. By satisfying any of the following conditions, the discharge can be efficiently performed Dielectric barrier discharge lamp. (1) After reaching the point 开始 when the voltage of the dielectric barrier discharge lamp is started, the time until the maximum voltage 値 is reached and the next maximum voltage 値 becomes 3 " S is applied to the dielectric barrier discharge lamp. (2) After reaching the voltage of the start of the dielectric barrier discharge lamp 値, the time until it becomes the maximum voltage before the application of the new lamp voltage 为 is the time to change the paper size to the Chinese National Standard (CNS) A4 specification (210 X 297 cm) (Please read the precautions on the back first-install i · ίΛ-page: printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs-16- 544716 A7 B7 V. Description of the invention (14) A voltage of 2 · 1 # s is applied to Dielectric barrier discharge lamp. (Please read the precautions on the back before filling the TKK page.) (3) Consider the impedance of the circuit formed by the power supply device and the dielectric barrier discharge lamp as L. When the electrostatic capacitance is regarded as C, select this impedance. L, • The electrostatic capacitance C satisfies the following formula. LC = 2 · 8x10 — 13 [Embodiments of the invention] The following describes the embodiments of the present invention. Fig. 3 shows the dielectric barrier discharge lamp points of the embodiment of the present invention. A diagram of an example of a lamp circuit, which is a diagram showing a schematic configuration of a lighting circuit of a dielectric barrier discharge lamp using an inverter circuit of a full-bridge method. FIG. 4 illustrates the operation of the above-mentioned lighting circuit. Waveform diagram, which shows, for example, the connection of a primary load without a transformer and a capacitive load that does not cause discharge between the secondary leakage impedance in a modal manner. In this figure, Q 1 ~ Q 4 series switching elements (eg FE D), G 1 ~ G 4 series switching signals Q 1 to Q 4, V p is the primary voltage of step-up transformer T r (hereinafter, referred to as transformer T r), and V s is transformer D r The secondary side voltage is printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs. The operation of the lighting circuit in Figure 3 is explained according to Figure 4. (a) When the first gate signal G 1 and the fourth gate signal G 4 When it becomes ON, the gate driving circuits GD 1, GD 4, the first switching element Q 1, and the fourth switching element Q 4 are turned on (the figure ①), and is applied by a DC power source DC on the primary side of the transformer T r DC voltage (the figure ②), the voltage occurs on the secondary side of the transformer D. For the paper size of the dielectric barrier discharge lamp, the Chinese national standard (CNS) A4 specification (210 X 297 mm) applies. 544716 A7 ___ B7 V. Invention Explanation (15) 1 Applied voltage (③ in the figure). (B) When When the first gate signal G1 and the fourth gate signal G4 are OFF (the figure ④), the first switching element Q1 and the fourth switching element • Q 4 are turned off, and the primary side voltage vp of the transformer T and the transformer T The secondary-side voltage Vs of r starts to fluctuate unsteadily from the leakage impedance of the transformer Tr and the speed of the resonant frequency determined by the secondary-side electrostatic capacitance of the transformer T r (the figures ⑤, ⑤). (c) When the first The second gate signal G2 and the third gate signal G3 become ON, and the gate driving circuit GD2, GD3, the second switching element Q2, and the third switching element Q3 are turned on (this figure ⑦). Once in the transformer TI · The DC power supply d C on the side opposite to the above (a) applies a DC voltage 'a voltage opposite to the above (a) occurs on the secondary side of the transformer T r' and applies the opposite voltage to the dielectric barrier discharge lamp 1_ (this figure ⑨) 0 Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs (d) When the second gate signal G 2 and the third gate signal G 3 become 0FF (the figure ⑩), the second switching element Q 2 and the third switching element Q 3 becomes the off state, the primary voltage V p of the transformer τ r, and the transformer T r The second side voltage v s starts from the leakage impedance of the transformer τ r and the secondary side electrostatic capacitance of the transformer T r, and the speed of the resonance frequency is disturbed (see the figure ⑪, ⑫). (e) Hereinafter, the operations (a) to (d) are repeated. In FIG. 5 and FIG. 6 are measured data of the applied voltage waveform E (t) 'current wave' shape I (t) of the lighting circuit described above. Fig. 6 is an enlarged part of the interval Y 1 in Fig. 5. The waveform is measured under the following conditions. -18- ϋ ^ -I 1 _1 ϋ 1 ϋ · 1 lei ϋ · I · 1 ^ (please read ^ the first 1 items before filling in || ^ pages) i-line · This paper size is applicable to Chinese national standards (CNS ) A4 specification (210 X 297 mm) 544716 A7 ________ B7 V. Description of the invention (16) Press' This condition is the condition that the lighting circuit in Figure 3 can be placed at the most efficient location. Please read the note on the r side. Notes • Frequency: 33 · 9kHz * • Transformer T r Primary impedance: 1 · 4 2 m Η Secondary impedance: 2 〇 4 m 耦合 Coupling impedance: 0.99955 • Dielectric barrier discharge lamp Order
電介質 ：石英玻璃厚度1mm 放電氣體：氙壓力33kPa 放電間隙：4 · 4 m m 非放電時之燈靜電電容：84pF 線 又，第7圖係於第5圖，第6圖，解析計算放電電流 波形I d ( t )，除了施加電壓波形E ( t ) ’電：流波形 I ( t )之外，表示放燈電流波形I d ( t )者’將第6 經濟部智慧財產局員工消費合作社印製 圖之區間Y 2部分放大表示。上述解析計算之條件係如下 •放電電漿空間之靜電電容：C1 : 97 · 2 PF •電介質之靜電電容：C2 : 607PF •浮游靜電電容：C3 : 70PF 於第7圖明確地出現彎曲點K，在此點T d由於放電 -19- 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 544716 A7 ---- B7 五、發明說明（17 ) 電流波形I d ( t )快速地建 始時點。又，從彎曲點K到下 上述之時間τ，從第1平面圖 •時間爲時間丁 1 2，上述第1 形E ( t )係振動性地變化。 於第3圖之點燈電路，對 阻抗調整鳴鈴頻率（時間r或 取發光效率。 茲在第8圖，第9圖，第 之發光效率，與時間r，時間 鈴頻率F r之關係。 又’在第1 1圖表示將鳴 之施加電壓波形E ( t )，電 從第8圖，第9圖，第1 2 .l#s以下，時間T12 或’鳴鈴頻率F r爲變成3〇 效率之觀點爲有效果。按，於 之曲線a · b . c係表不改變 力口電壓係將曲線a之施加電壓 電壓視爲V 2，將曲線c之施 V 1<V2<V3。又，其時 曲線b爲1 · 3 3，曲線c爲 第1 2圖係其他之燈施加 I s ( t )波形之實測資料， 立就曉得彎曲點K爲放電開 一第1尖峰P 1爲止之時間 P 1到第2尖峰P 2爲止之 尖峰P 1以後，施加電壓波 請 先 閲 讀 背， 面 之 注- 意 事Dielectric: Quartz glass thickness 1mm Discharge gas: Xenon pressure 33kPa Discharge gap: 4 · 4 mm Lamp non-discharge capacitance: 84pF Line, Figure 7 is based on Figure 5, Figure 6 shows the discharge current waveform I d (t), in addition to the applied voltage waveform E (t) 'electricity: current waveform I (t), indicates that the lighting current waveform I d (t)' will be printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs The interval Y 2 in the figure is partially enlarged. The conditions for the above analysis and calculation are as follows: • Electrostatic capacitance in the discharge plasma space: C1: 97 · 2 PF • Electrostatic capacitance in the dielectric: C2: 607PF • Floating electrostatic capacitance: C3: 70PF The bending point K appears clearly in Figure 7. At this point T d is due to the discharge -19- This paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) 544716 A7 ---- B7 V. Description of the invention (17) Current waveform I d (t) Build the start point quickly. The time τ from the bending point K to the bottom is from the first plan view. The time is time D 12. The first shape E (t) changes oscillatingly. In the lighting circuit of Fig. 3, adjust the ringing frequency (time r or the luminous efficiency) for the impedance. The relationship between the luminous efficiency of Fig. 8 and Fig. 9 and the time r and the time bell frequency F r is shown in Fig. 8. Also in FIG. 11, the applied voltage waveform E (t) of the ringing is shown in FIG. 8, FIG. 9, and 12. L # s or less, and the time T12 or 'ringing frequency F r becomes 3 〇 The view of efficiency is effective. According to, curve a · b. C indicates that the force voltage is not changed. The voltage applied to curve a is regarded as V 2, and the application of curve c is V 1 < V 2 < V 3. In addition, the curve b at this time is 1 · 3 3, and the curve c is the measured data of the waveform I s (t) applied by other lamps in Fig. 12. It is known that the bending point K is the first peak P 1 of the discharge opening. After the spike P 1 between the time P 1 to the second spike P 2, please read the back before applying the voltage wave, the note above-meaning
t !填，裝 頁I 訂 線 經濟部智慧財產局員工消費合作社印製 於變壓器T r之二次側追加 時間T 1 2 )加以點燈，求 1 0圖表示將如上述所求得 T 1 2，時間T 1 2 ，及鳴 鈴頻率降低 流波形I ( 0圖就可淸 時間T 1 2 〇Η z以上 第8圖，第 燈施加電壓 視爲V 1 ， 加電壓視爲 之相對光量 1.67° 電壓E ( t 該圖係表不 楚，將 爲3 // ，就曉 9圖， 時之效 將曲線 V 3時 係曲線 )波形 顯不開 Ο Η z時 時間r爲 s以下， 得從提高 第1 0圖 率，燈施 b之施加 就變成爲 a爲1 ’ ，電流 始放電之 本紙張尺度適用中國國家標準（CNS)A4規格（210x297公釐） -20- 544716 A7 _ B7 五、發明說明（18 ) 電壓之彎曲點K不會明確出現時之一例。 如上述若彎曲點K不會明確出現時，就如上述由放電 電漿空間2之電容器1 2之靜電電容c 1，電介質5，6 '之電容器1 3之靜電電容C 2，及並聯存在於電介質障壁 放電燈之浮游靜電電容C 3而從上述（1 )式求取放電電 流波形I d ( t )就可曉得放電開始時點。 第1 3圖係如上述解析計算放電電流波形I d ( t ) ’連同上述施加電壓E ( t )波形，電流I s ( t )波形 表示之圖。按，該圖之實驗條件及上述放電電流波形I d (t )之解析條件係如下。 •供電裝置之反相器方式：推挽方式 •解析條件t! Fill in and install the page I. The line is printed on the secondary side of the transformer T r by the consumer co-operative of the Intellectual Property Bureau of the Ministry of Economic Affairs. The additional time T 1 2) is turned on, and the figure 10 indicates that T 1 will be obtained as above. 2. Time T 1 2 and ringing frequency decrease flow waveform I (0 can be used for time T 1 2 〇 Η z Figure 8 above, the voltage applied to the lamp is regarded as V 1, and the relative light quantity when the voltage is applied is regarded as 1.67 ° Voltage E (t This picture is not very clear, it will be 3 //, as shown in Figure 9, the effect of time will be the curve of the time curve of V 3) 波形 显 z time z is below s, we can get from Increasing the 10th picture rate, the application of the lamp b will become a 1 ', and the paper size of the paper at the beginning of the current applies the Chinese National Standard (CNS) A4 specification (210x297 mm) -20- 544716 A7 _ B7 V. Description of the invention (18) An example when the voltage bending point K does not appear clearly. As mentioned above, if the bending point K does not appear clearly, as described above, the electrostatic capacitance c 1 of the capacitor 1 2 of the discharge plasma space 2 and the dielectric Capacitance C 2 of capacitors 5 and 6 ', and floating of the discharge lamp with dielectric barrier in parallel Capacitance C 3 can be obtained by calculating the discharge current waveform I d (t) from the above formula (1). Figure 13 shows the discharge current waveform I d (t) 'calculated with the above analysis and the applied voltage. E (t) waveform, the current I s (t) waveform. The experimental conditions of the figure and the analysis conditions of the discharge current waveform I d (t) are as follows. • Inverter mode of the power supply device: push Method and analysis conditions
放電電漿空間之靜電篆容：C 1 : 8 . 7 p F 電介質之靜電電容：C2 : 140pF 浮游靜電電容：C3 : 10pF 若觀看第1 3圖時於時間T d放電電流波形I d ( t )急驟建立，曉得此時點爲放電開始時點。因此，對應於 此時間T d之施加電壓E ( t )波形上之點爲相當於彎曲 點K，時間r爲測定從此彎曲點K到下一尖峰p 1之時間 就可求得。按，在此例，第1尖峰P1，第2尖峰P2爲 淸楚地出現，時間T 1 2爲可從施加電壓E ( t )波形立 即求得。 第1 4圖係表示將推挽方式之反相器電路使用於點燈 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 訂-· --線· 經濟部智慧財產局員工消費合作社印製 544716 A7 B7 經濟部智慧財產局員工消費合作社印製 五、發明說明（19) 電路之構成例之圖。又，第1 5圖係用來說明上述點燈電 路動作之波形圖，該圖係與上述同樣，例如沒有變壓器之 一次，二次間洩漏電感不發生放電現象連接有電容性負荷 •時之波形以模式表示。於該圖，G 1，G 2係開關元件 Q 1〜Q 2之閘訊號，V 1，V 2係變壓器T r之一次側 電壓，V s係變壓器T r之二次側電壓。茲將第3圖之點 燈電路之動作由第4圖說明。 _ ( a )若第1閘訊號G 1變成〇N時，就由閘驅動電 路G D 1使第1開關元件Q 1就變成導通狀態（該圖①） ，對於變壓器T r之一次側第1線圈L 1由直流電源D C 施加直流電壓（該‘圖②）。因變壓器一次側第1線圈L 1 與變壓器二次側線圈L s其方向爲相反，所以在變壓器二 次側線圈L s發生與變壓器一夂側第1線圈L 1相反方向 之電壓，施加電壓於電介質障壁放電燈1(該圖③）。 (b )若第1閘訊號G 1變成〇F F時，第1開關元 件Q 1就變成關斷狀態，變壓器一次側第1線圈電壓V 1 ，變壓器一次側第2線圈電壓V 2，變壓器二次側電壓 V s，係由有關變壓器丁 r之洩漏電感，與變壓器T I·之 二次側靜電電容所決定之諧振頻率之速度開始不安定變動 (該圖⑤，⑤）。 (c )若第2閘訊號G2變成〇N時，第2開關元件 Q 2就變成導通狀態（該圖⑦），在變壓器一次側第2線 圈L 2由直流電源D C施加直流電壓（該圖⑧）。因變壓 器一次側第2線圈L 2與變壓器二次側電壓L s其方向爲 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐) ?22 - (請先閲讀背面之注意事項再填頁) •裝 訂· 線 544716 A7 _ B7 五、發明說明（2〇 ) 丰目同，所以在變壓器二次側電壓L S發生與變壓器一次側 第2線圈L 2相同方向之電壓，施加電壓於電介質障壁放 電燈1 (該圖⑨）。 (d)若第2閘訊號G2變成OFF時，第2開關元 件Q 2變成關斷狀態（該圖⑩），變壓器一次側第1線圈 電壓VI，變壓器一次側第2線圈電壓V2，變壓器二次 側電壓V s ，係由有關變壓器丁 Γ之洩漏電感，與變壓器 T r之二次側靜電電容所決定之諧振頻率之速度開始不定 定變動（該圖⑪，⑬）。 由以上之說明就可淸楚，若作爲點燈電路使用推挽方 式之反相器電路時，施加於電介質障壁放電燈之電壓波形 係與上述使用全電橋方式之反相器電路時約略相同，與上 述同樣可求取時間r，時間T 1_ 2，及，鳴鈴頻率F r。 又，雖然沒有圖示，使用半電橋方式之反相器電路時也相 同。 第16圖係表示使用返馳方式之反相器電路之點燈電 路之構成例之圖，第1 7圖係使用返馳方式之反相器電路 之點燈電路時對於電介質障壁放電燈之施加電壓E ( t ) 波形，電流I s ( t )波形之實測資料。 如第1 7圖所示，作爲點燈電路使用返馳方式之反相 器電路時，對於電介質障壁放電燈之施加電壓E ( t )波 形，電流I s ( t )波形，係與使用上述全電橋’半電橋 ，推挽方式之反相器電路時大爲相異。然而，即使使用返 馳方式之反相器電路時，藉注目彎曲點κ以後之燈施加電 本^張尺度適用中國國家標準（CNS)A4規格（210 X 297公爱) - 23- --------------裝·！ (請先閱ttt面之>i'意事項再頁) ·. --線· 經濟部智慧財產局員工消費合作社印製 544716 A7 ___ B7 五、發明說明（21 ) 壓波形之變化，就與上述同樣可有效率地點燈。 茲由使用返馳方式之反相器電路之點燈電路點燈電介 質障壁放電燈之情形說明如下。 * 第18圖係將第17圖之波形及電路各部之波形由模 擬所求取以模式表示之圖。於該圖E(t)係於第16圖 變壓器T r之二次側電壓波形（電介質障壁放電燈施加電 壓波形），I s ( t )係燈電流波形，I d ( t )係由上 述解析計算所求取之放電電流波形，V q ( t )係施加於 開關元件（例如丁 F T ) Q之電壓波形，I q ( t )係流 動於開關元件Q之電流波形，I r ( t )係流動於二極體 D 1之電流波形，G ( t )係輸入於閘驅動電路G D之閘 訊號。 茲將第1 7圖所示之點燈霞路之動作由第1 8圖說明 如下。 (a )若閘訊號G ( t )只有時間t 1〜t 2之時段 變成Ο N時，流動於開關元件Q之電流I q ( t )爲約略 經濟部智慧財產局員工消費合作社印製 --------------裝 i — <請先閱讀扩面之1意事項再填H頁) --線- 直線性地增加，而在時間t 2突然被關斷。對應於關斷電 流I Q ( t )正前之電流，蓄存於變壓器T r磁心之磁性 會g量，係以變壓器T r之一次，二次側以電壓之形態出現 ，在變壓器T r之二次側，出現變壓器T r之捲比所升壓 之高電壓，而施加於電介質障壁放電燈1。 (b )若對於燈1施加高電壓時，在時間t a燈就放 電，在施加電壓飞（t )波形會發生彎曲點K 1 。但是， 於第1 8圖之曲點K 1沒有淸楚地出現。若發生放電時， 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） -24- 5447» A7 ____B7 五、發明說明（22 ) 放電空間之電壓爲快速地被中和，而幾乎變成零。 (請先閱讀背面之注意事項再頁) (c )由燈（1 )之靜電電容與變壓器丁 Γ之二次側 電感大約所決定之諧振頻率，燈施加電壓E ( t )將發生 •諧振振動。 · (d)若施加電壓E (t)變成低電壓時，起因於時 刻之放電與放電空間之電壓被中和，在放電空間會發生相 反方向之高電壓。藉此，於時刻Tb，發生再放電，發生 彎曲點K 2。但是，於第1 8圖不會淸楚地出現彎曲點 K 2。 (e )燈加電壓E ( t )之諧振振動，因也出現於變 壓器T r之一次側，所以，開關元件Q之電壓V q ( t ) ，係如第1 8圖所示發生變動。 (f )上述電壓V q ( t )_爲正之期間實質上在變壓 器T r之一次側不會流動電流。 經濟部智慧財產局員工消費合作社印製 但是，在開關元件Q並聯地連接有二極體D 1時，於 上述電壓VQ ( t )欲變成負之t 3〜t 4之期間Tz ， 在二極體D 1會流動電流。此係認爲變壓器之一次側之阻 抗爲大者急驟地變小所致。因此，燈施加電壓E ( t )之 自由諧振振動受到阻礙，對應於此，在電壓E ( t )，會 發生電壓變化之停止期間T r。 如以上，若返馳方式之點燈電路時，在燈施加電壓E (t )波形上雖然比較不會淸楚，但是放電電流I d ( t )之升起於急陡之時間T a ，T b開始放電’從此點就可 判別爲彎曲點K。 -25· 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 544716 A7 __ B7 五、發明說明（23) 亦即，即使使用返馳方式之反相器電路時，可由表示 開始放電之彎曲點K求取到下一尖峰之時間r，將上述時 間r如上述能夠變成2 · 1 # s以下，藉選定變壓器丁 Γ •之電感，就可有效率地點亮燈。 按，如上述，若使用連接有反並聯二極體（或內藏有 反並聯二極體）開關元件Q之返馳方式之點燈電路時，如 上述在第1尖峰Ρ 1與第2尖峰Ρ 2之間本質上沒有重要 性之電壓變化發生停止之期間T s。因此，上述之第1， 第2尖峰時間之時間Τ 1 2並不具意義，上述第9圖之關 係爲不成立。 如以上，在動作之途中若電路之阻抗變化時，適用本 發明就需要注意。按，使用附加有反並聯二極體（或內藏 )開關元件之全電橋方式，半氰橋方式，或由推挽方式之 反相器電路時，因變壓器之一次側，係經常以低阻抗連接 於電源，所以不會發生上述問題。 經濟部智慧財產局員工消費合作社印製 然而，閘訊號變成〇F F，不久，流動於反並聯二極 體之電流停止時，由於其後阻抗會變大，所以由燈之靜電 電容與二次側阻抗大約所決定之諧振頻率，燈施加電壓Ε (t )就開始諧振振動，而嗚鈴就會消失。 按，雖然可能發生即使通過第1尖峰放電也不會結束 之情形，但是，此時，Τ 1 2將會變成較其以後之嗚鈴周 期稍長。變長之程度係由燈之構造，亦即放電電漿空間2 之電容器1 2之靜電電容C 1 ，電介質5，6之電容器 1 3之靜電電容C 2之大小分配而相異。 -26- 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 544716 A7 B7 五、發明說明（24 ) 設若，即使是這種情形時，若光源裝置構成爲維持 t12S3azs時，其將較佳。 相反地，即使於這種情形沒有滿足T 1 2 S 3 // s之 條件，通過第1尖峰後之放電一般爲弱，因給與紫外線發 光效率之影響爲小，所以只要將光源裝置構成爲可滿足 或r$2 · 1//S之任一就可以 按，本發明係可適用於在放電容器內面沒有塗敷熒光 體而放射紫外線之電介質障壁放電燈及在放電容器內面塗 敷熒光體而放射可視光線之電介質障壁放電燈之任一。 請 先 閱 讀 背· Si 之 注- 意 事Electrostatic capacitance in the discharge plasma space: C 1: 8. 7 p F Electrostatic capacitance of the dielectric: C 2: 140 pF Floating electrostatic capacitance: C 3: 10 pF If you look at Figure 13 at time T d, the discharge current waveform I d (t ) Established rapidly, knowing that this point is the starting point of the discharge. Therefore, the point on the waveform of the applied voltage E (t) corresponding to this time T d is equivalent to the bending point K, and the time r can be obtained by measuring the time from this bending point K to the next peak p 1. In this example, the first spike P1 and the second spike P2 appear neatly, and the time T 1 2 can be obtained immediately from the waveform of the applied voltage E (t). Figure 14 shows the use of a push-pull inverter circuit for lighting. The paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm). Printed by employee consumer cooperatives 544716 A7 B7 Printed by employee consumer cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 5. Illustration of invention (19) Example of circuit configuration. Fig. 15 is a waveform diagram for explaining the operation of the lighting circuit described above. This diagram is the same as the above. For example, there is no discharge of the secondary leakage inductance between the primary and the secondary, and a waveform when a capacitive load is connected. Represented by mode. In this figure, G 1, G 2 are the switching signals of switching elements Q 1 to Q 2, V 1, V 2 are the primary voltage of transformer T r, and V s is the secondary voltage of transformer T r. The operation of the lighting circuit in FIG. 3 will be described with reference to FIG. 4. _ (a) When the first gate signal G 1 becomes ON, the gate driving circuit GD 1 causes the first switching element Q 1 to be turned on (the figure ①). For the first coil of the primary side of the transformer T r L 1 is supplied with a DC voltage by a DC power source DC (this' Figure ②). Since the primary coil L 1 of the transformer primary side and the secondary coil L s of the transformer have opposite directions, a voltage is generated in the secondary coil L s of the transformer in the opposite direction to the first coil L 1 of the primary side of the transformer, and a voltage is applied to Dielectric barrier discharge lamp 1 (Fig. ③). (b) When the first gate signal G1 becomes 0FF, the first switching element Q1 is turned off, and the first coil voltage V1 of the transformer primary side, the second coil voltage V2 of the transformer primary side, and the transformer secondary The side voltage V s is caused by the leakage inductance of the transformer T r and the resonance frequency determined by the secondary side capacitance of the transformer TI · to start to fluctuate unsteadily (Figures ⑤, ⑤). (c) When the second gate signal G2 becomes ON, the second switching element Q 2 is turned on (this figure ⑦), and a DC voltage is applied from the direct current power source DC to the second coil L 2 of the transformer primary side (this figure ⑧). ). Because the direction of the secondary coil L 2 of the transformer primary side and the voltage L s of the transformer secondary side are based on the paper standard, the Chinese National Standard (CNS) A4 specification (210 X 297 mm) is applicable. 22-(Please read the precautions on the back first (Refill sheet) • Binding · Line 544716 A7 _ B7 V. Description of the invention (2〇) The same purpose, so the voltage on the secondary side voltage LS of the transformer is the same as the voltage on the secondary side of the transformer, and the second coil L 2 is applied. Dielectric barrier discharge lamp 1 (this figure ⑨). (d) When the second gate signal G2 is turned OFF, the second switching element Q 2 is turned off (the figure ⑩), the first coil voltage VI of the transformer primary side, the second coil voltage V2 of the transformer primary side, and the transformer secondary The side voltage V s is the speed of the resonant frequency determined by the leakage inductance of the transformer DΓ and the secondary side electrostatic capacitance of the transformer T r indefinitely (the figure ⑪, ⑬). It can be understood from the above description that if a push-pull inverter circuit is used as the lighting circuit, the voltage waveform applied to the dielectric barrier discharge lamp is approximately the same as that when the inverter circuit using the full-bridge method is used. In the same way as above, time r, time T 1_ 2 and ringing frequency F r can be obtained. Although not shown, the same applies when an inverter circuit of the half-bridge method is used. Fig. 16 is a diagram showing a configuration example of a lighting circuit using an inverter circuit of a flyback method, and Fig. 17 is an application of a dielectric barrier discharge lamp when using a lighting circuit of an inverter circuit of a flyback method Measured data of voltage E (t) waveform and current I s (t) waveform. As shown in Figure 17, when a flyback inverter circuit is used as the lighting circuit, the voltage E (t) waveform and current I s (t) waveform applied to the dielectric barrier discharge lamp are the same as those described above. Bridges' half bridges, push-pull inverter circuits are quite different. However, even when the inverter circuit of the flyback method is used, the electric book is applied to the lamp after the attention of the bending point κ. The Chinese standard (CNS) A4 specification (210 X 297 public love) applies-23- --- ----------- Installed! (Please read the "&t; i 'Italian Matters on ttt" page first) ·. --- · Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 544716 A7 ___ B7 V. Description of the invention (21) The change of the voltage waveform is related to The above can also efficiently spot lights. The case where the dielectric barrier discharge lamp is turned on by the lighting circuit using the inverter circuit of the flyback method is described below. * Figure 18 shows the waveforms shown in Figure 17 and the waveforms of the various parts of the circuit by simulation. In this figure, E (t) is the secondary side voltage waveform (the voltage applied by the dielectric barrier discharge lamp) of the transformer T r in FIG. 16, I s (t) is the lamp current waveform, and I d (t) is the above analysis. Calculate the obtained discharge current waveform. V q (t) is the voltage waveform applied to the switching element (such as DFT) Q, I q (t) is the current waveform flowing through the switching element Q, and I r (t) is The waveform of the current flowing through the diode D 1, G (t) is the gate signal input to the gate drive circuit GD. The operation of lighting Xia Road shown in Fig. 17 is described below with reference to Fig. 18. (a) If the gate signal G (t) becomes 0 N only during the period of time t 1 to t 2, the current I q (t) flowing in the switching element Q is printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs- ------------ Install i — < Please read the first item of the expansion first, and then fill in page H) --Line-increases linearly, and is suddenly turned off at time t 2. The current corresponding to the current immediately before the turn-off current IQ (t) is stored in the transformer T r magnetic core g, which is once in the transformer T r and the secondary side appears as a voltage. It is in the transformer T r 2 On the secondary side, the transformer T r has a higher voltage than the boosted voltage, and is applied to the dielectric barrier discharge lamp 1. (b) If a high voltage is applied to the lamp 1, the lamp is discharged at time t a, and the bending point K 1 will occur at the applied voltage (t) waveform. However, the inflection point K 1 in Fig. 18 does not appear astutely. In the event of a discharge, the size of this paper applies the Chinese National Standard (CNS) A4 (210 X 297 mm) -24- 5447 »A7 ____B7 V. Description of the invention (22) The voltage in the discharge space is quickly neutralized, and Almost zero. (Please read the precautions on the back first) (c) The resonance frequency determined by the electrostatic capacitance of the lamp (1) and the secondary inductance of the transformer D1, and the voltage E (t) applied to the lamp will cause resonance vibration . · (D) If the applied voltage E (t) becomes low, the voltage caused by the discharge and the discharge space at that time is neutralized, and a high voltage in the opposite direction will occur in the discharge space. As a result, re-discharge occurs at time Tb, and a bending point K 2 occurs. However, the bending point K 2 does not appear neatly in FIG. 18. (e) The resonance vibration of the lamp-applied voltage E (t) also appears on the primary side of the transformer Tr. Therefore, the voltage Vq (t) of the switching element Q changes as shown in FIG. (f) During the period when the voltage V q (t) _ is positive, substantially no current flows on the primary side of the transformer T r. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs. However, when the diode D 1 is connected in parallel to the switching element Q, Tz is in the period between t 3 and t 4 when the voltage VQ (t) is to become negative. The body D 1 flows a current. This is because the primary impedance of the transformer is caused by the sudden decrease of the larger one. Therefore, the free resonance vibration of the lamp-applied voltage E (t) is hindered, and in response to this, the voltage E (t) has a stop period T r in which a voltage change occurs. As described above, if the flyback mode lighting circuit is relatively unobtrusive on the waveform of the lamp applied voltage E (t), the discharge current I d (t) rises at the steep times T a, T b 'Starting discharge' can be judged as the bending point K from this point. -25 · This paper size applies to China National Standard (CNS) A4 specification (210 X 297 mm) 544716 A7 __ B7 V. Description of the invention (23) That is, even when the inverter circuit of the flyback method is used, it can be expressed by The bending point K at the beginning of the discharge is to obtain the time r to the next peak, and the time r can be reduced to less than 2 · 1 # s as described above. By selecting the inductance of the transformer D ·, the lamp can be efficiently lit. As described above, if a flyback lighting circuit with an anti-parallel diode (or built-in anti-parallel diode) switching element Q is used, as described above, the first peak P 1 and the second peak The period T s during which the voltage change between P 2 is essentially non-essential. Therefore, the time T 1 2 of the first and second spike times described above is not meaningful, and the relationship in the above figure 9 is not established. As described above, if the impedance of the circuit changes during the operation, it is necessary to pay attention to the application of the present invention. When using the full-bridge method, half-cyanide bridge method or push-pull inverter circuit with anti-parallel diode (or built-in) switching elements, the primary side of the transformer is often low. The impedance is connected to the power supply, so the above problem does not occur. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs. However, the brake signal becomes 0FF. Soon, when the current flowing in the anti-parallel diode stops, the impedance will increase afterwards, so the electrostatic capacitance of the lamp and the secondary side The impedance is about the resonance frequency determined by the voltage, the lamp will start resonance vibration when the voltage E (t) is applied, and the chirp will disappear. Pressing, although it may happen that the discharge does not end even through the first spike, at this time, T 1 2 will become slightly longer than the subsequent ringing period. The length of the change is determined by the structure of the lamp, that is, the capacitance C 1 of the capacitor 12 of the discharge plasma space 2 and the capacitance C 2 of the capacitor 1 3 of the dielectric 5, 6 are different. -26- This paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) 544716 A7 B7 V. Invention description (24) If, even in this case, if the light source device is configured to maintain t12S3azs, It will be better. On the contrary, even if the condition of T 1 2 S 3 // s is not satisfied in this case, the discharge after passing the first spike is generally weak. Since the effect on the ultraviolet light emission efficiency is small, as long as the light source device is configured as It can be satisfied or you can press any of r $ 2 · 1 // S. The present invention is applicable to a dielectric barrier discharge lamp that emits ultraviolet rays without applying a phosphor on the inner surface of the discharge vessel and applying fluorescence on the inner surface of the discharge vessel. Any of a dielectric barrier discharge lamp that emits visible light in volume. Please read back · Si's Note-Meaning
項册 再I ||έ 頁I 經濟部智慧財產局員工消費合作社印製 訂 線 〔發明 如 壁放電 最大電 障壁放 直到變 間變成 ③由供 爲L ， 之效果〕 以上所說明，於本發 之電壓値之時點後， 壓値之時間爲變成3 電燈，0達到開始電 成施加下一新燈電壓 2 · l//s以下之電 電裝置與電介質障壁 將靜電電容視爲C時 定爲可滿足LC$2 . 8x 斷破壞受激準分子之放電電 提高電介質障壁放電燈之發 明，-① 將達到 // s以 介質障 爲止之 壓施加 放電燈 ，該電 1 0 ' 1 流，使 光效率 經過達到 最大電壓 下之電壓 壁放電之 期間之最 於電介質 所構成之 感L，靜 3，所以 用可實現 開始電 値到達 施加於 電壓値 大電壓 障壁放 電路之 電電容 ，可迅 之供電 介質障 到下一 電介質 之後， 値之時 電燈， 阻抗視 C因選 速地關 裝置來 -27- 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 544716 A7 B7 五、發明說明（25 ) 圖式之簡單說明 第1圖係表示電介質障壁放電燈光源裝置基本構成之 -------------^___ 請先Mttt面之主意事項再頁) 圖。 • 第2圖係表示實用性供電裝置之燈施加電壓E (t) ，放電間隙電壓V 1 ( t )，電流I s ( t )，放燈電流 I d ( t )之典型波形之圖。 第3圖係表示本發明之實施例之電介質障壁放電燈點 /燈電路（全電橋方式）一例之圖。 第4圖係用來說明第3圖之點燈電路動作之波形圖。 第5圖係表示於第3圖之點燈電路之施加電壓波形E (t )，電流波形I ( t )之實測資料之圖。 ;線. 第6圖係表示於第3圖之點燈電路之施加電壓波形E (t )，電流波形I ( t )之氲測資料之圖（放大圖）。 第7圖係放大第6圖之Y 2部分，追加由計算所求取 之放電電流波形I d ( t )之圖。 第8圖係表示時間r與發光效率7/之關係之圖。 第9圖係表示時間T 1 2與發光效率；？之關係之圖。 第1 0圖係表示鳴鈴頻率F I·與發光效率之關係之 經濟部智慧財產局員工消費合作社印製 圖。 第1 1圖係於第3圖之點燈電路，表示將鳴鈴頻率降 低到2 5 Ο Η z時之施加電壓波形E ( t )，電流波形I (t )之圖。 第1 2圖係表示其他燈之點燈波形之圖。 第1 3圖係放大第1 2圖之Z部分，追加由計算所求 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） .28 . 544716 A7 B7 五、發明說明（26) 取之放電電流波形Id(t)之圖。 第1 4圖係表示其他點燈電路之構成例（推挽方式） 之圖。 * 第1 5圖係用來說明第1 4圖之點燈電路動作之波形 圖。 第1 6係表示返馳方式之點燈電路構成例之圖。 第1 7圖係使用返馳方式之點燈電路時表示施加電壓 波形E ( t )，電流波形I ( t )之實測資料之圖。 第1 8圖係表示使用返馳方式之點燈電路時之各新波 形之圖。 第19圖係表示存在有2片電介質之電介質障壁放電 燈及電氣性動作之等値電路之圖。 〔符號之說明〕 G D 閘驅動電路 G D 1〜G D 4 閘驅動電路 D 1〜D 4 二極體 DC * 電源 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） ----------- --裝·-- (請先Mttf面之L意事項再填頁) · 1 電 介 質 障 壁 放 電 燈 2 放電電 漿 空 間 3， 4 電 極 5，6 電 介 質 7 燈 封 體 8 供 電 裝 置 9 局 周 波 交 流 電源 T r 升 壓 變 壓器 Q 1 〜Q 4 開 關 元 件（F E 丁） •線- 經濟部智慧財產局員工消費合作社印製 -29-Catalogue I || Page I Printed by the Consumers ’Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs [Invention of the largest electrical barrier such as wall discharge until the change becomes ③ The effect of supply is L.] As explained above, in this issue After the time point of the voltage, the time of the pressure becomes 3 electric lamps, 0 reaches the start of the application of the next new lamp voltage 2 · l // s, and the electric device and dielectric barrier are considered to be satisfied when the electrostatic capacitance is regarded as C. LC $ 2. 8x The invention that breaks the excimer discharge electricity and raises the dielectric barrier discharge lamp. -① The discharge lamp is applied at a pressure up to the dielectric barrier. During the discharge of the voltage wall at the maximum voltage, the dielectric sense L, static 3 is the most, so the capacitor that can start the electric current to reach the voltage applied to the large voltage barrier wall discharge circuit can quickly supply the dielectric barrier. After the next dielectric, at the moment the electric light, the impedance depends on the speed of the ground selection device -27- This paper size applies to China National Standard (CNS) A4 specifications (210 X 297 mm) 544716 A7 B7 V. Description of the invention (25) A brief description of the drawing Figure 1 shows the basic structure of a light source device for a dielectric barrier discharge lamp ------------- ^ ___ Please take the idea of Mttt first Matters on the next page) figure. • Figure 2 is a diagram showing typical waveforms of the applied voltage E (t), discharge gap voltage V 1 (t), current I s (t), and discharge current I d (t) of a practical power supply device. Fig. 3 is a diagram showing an example of a dielectric barrier discharge lamp lighting / lamp circuit (full bridge method) according to an embodiment of the present invention. Fig. 4 is a waveform diagram for explaining the operation of the lighting circuit of Fig. 3. Fig. 5 is a diagram showing measured data of an applied voltage waveform E (t) and a current waveform I (t) of the lighting circuit in Fig. 3. ; Line. Figure 6 is a diagram (enlarged view) showing the speculative data of the applied voltage waveform E (t) and the current waveform I (t) of the lighting circuit shown in Figure 3. Fig. 7 is a diagram in which Y 2 in Fig. 6 is enlarged, and a discharge current waveform I d (t) obtained by calculation is added. Fig. 8 is a graph showing the relationship between time r and luminous efficiency 7 /. Figure 9 shows time T 1 2 and luminous efficiency; Diagram of the relationship. Figure 10 is a graph printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs showing the relationship between the ringing frequency F I · and the luminous efficiency. Fig. 11 is a diagram of the lighting circuit in Fig. 3, which shows an applied voltage waveform E (t) and a current waveform I (t) when the ringing frequency is reduced to 2 5 0 Η z. Figure 12 is a diagram showing the lighting waveforms of other lamps. Figure 13 enlarges part Z of Figure 12 and adds the paper size calculated by calculation to the Chinese National Standard (CNS) A4 (210 X 297 mm). 28. 544716 A7 B7 V. Description of the invention (26 ) Take the graph of the discharge current waveform Id (t). FIG. 14 is a diagram showing a configuration example (push-pull method) of another lighting circuit. * Figure 15 is a waveform diagram for explaining the operation of the lighting circuit in Figure 14 Number 16 is a diagram showing an example of a lighting circuit configuration of a flyback method. Fig. 17 is a diagram showing the measured data of the applied voltage waveform E (t) and the current waveform I (t) when the flyback lighting circuit is used. Fig. 18 is a diagram showing each of the new waveforms when the fly-back lighting circuit is used. Fig. 19 is a diagram showing a dielectric barrier discharge lamp having two dielectrics and an isotropic circuit which is electrically operated. [Explanation of Symbols] GD Gate Drive Circuits GD 1 ~ GD 4 Gate Drive Circuits D 1 ~ D 4 Diode DC * Power Source This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) --- -------- --Installation-- (please fill in the first page of Mttf), 1 dielectric barrier discharge lamp 2 discharge plasma space 3, 4 electrodes 5, 6 dielectric 7 lamp seal 8 Power supply device 9 round-wave AC power supply T r Step-up transformer Q 1 ～ Q 4 Switching element (FE Ding) • Line-Printed by the Consumer Consumption Cooperative of Intellectual Property Bureau, Ministry of Economic Affairs-29-