TW543051B - Burning tool for electronic parts - Google Patents

Abstract

A burning tool for electronic parts is provided, which can reduce the burning time for a body to be burnt, and has a long service life. The burning tool for electronic parts is used for producing electronic parts by laminating the body to be burnt consisting of ceramic thereon, and burning the body to be sintered. The tool consists of a base material containing cordierite, or cordierite and alumina, and/or mullite, and at least one intermediate layer and a surface layer consisting of a material having low reactivity with the above body to be burnt.

Description

t 543051 V. Description of the invention (1) [Field of the invention] The present invention relates to a firing jig for electronic components (hereinafter referred to as π firing jig "), and more specifically, it can shorten the firing of the object to be fired. It has a long life and a long life firing jig for electronic components. [Background of the Invention] In the past, the firing of electronic components made of ceramics, such as ceramic capacitors, thermistors, and ferrites, was performed by placing the electronic components on a firing fixture (such as a positioner, a baking pot, and a flat plate) made of alumina. get on. This firing is performed by stacking multiple firing jigs, and firing jigs are used multiple times. This firing jig is composed of a base material made of aragonite and / or carbonized carbide and a surface layer of emulsified material, or a base material made of arborite and / or zirconia, and alumina silica. The intermediate layer and the surface layer of the hafnium oxide material (see Hei 10-1 5 8 0 8 No. 1, Hei 1 1-2 6 3 6 7 No. 1). In these firing jigs, since the base material is made of alumina silica material, carbonized carbide material, and oxidized material, it is very resistant to the firing speed of previous electronic components. If you want to shorten the firing time of electronic components, If the temperature rise and temperature decrease is higher than before, there is a problem of insufficient crack resistance and cracks in the firing fixture. The present invention is made in response to such a problem. An object of the present invention is to provide a firing jig for an electronic component, which has higher crack resistance than the premise, can shorten the firing time of the electronic component, and has a long life. SUMMARY OF THE INVENTION According to the present invention, a firing jig for an electronic component is provided.

543051 V. Description of the invention (2) The method of loading a fired body made of ceramic on the fired body to produce an electronic component is characterized in that it comprises cordierite, or cordierite and an oxide and It is composed of a base material of Fuming Andalusite, an intermediate layer of at least one layer, and a surface layer formed of a material having low reactivity with the fired body. At this time, it is desirable that the base material contains cordierite with an impurity amount of 2.5% by mass or less, or cordierite with an impurity amount of 2.5% by mass or less, and alumina and / or mullite, at least A single-layered intermediate layer and a surface layer formed of a material having low reactivity with the fired body. When the impurity is iron oxide (F e203), it is desirable that the amount of iron oxide (F e203) contained in cordierite is 1% by mass or less. Further, when the impurities are iron oxide (Fe2 03), sodium oxide (Na20), and potassium oxide (K20), it is desirable that iron oxide (Fe203), sodium oxide (Na20), and potassium oxide (K20) contained in cordierite. The amount accounts for less than 2% of the mass. At this time, it is desirable that the above-mentioned cordierite contained in the base material accounts for more than 50% by mass; and the intermediate layer contains a eutectic material selected from the group consisting of oxide oxide, Fuming andalusite, oxide oxide and oxide record, and oxide oxide and Fushao One or more of the group consisting of a mixture of andalusite; the surface layer contains zirconia. Moreover, it is desirable that the intermediate layer is formed by a spraying method or a spraying method; and the surface layer is formed by a spraying method or a spraying method. The spraying method is a water-stabilized plasma spraying method. [Summary of the Invention] The present invention is a firing jig for electronic components. It is used to load a fired body made of ceramics on the fired body, and fire the fired body to produce electronic components. Bluestone and Oxygen and / or Fuming Red Post

543051 V. Description of the invention (3) The base material of the stone is low in reactivity. At this time, the stone or mixed stigma andalusite is burned to reflect the present invention cordierite. The base material of the cordier firing fixture, can shrink the fixture, the temperature and the electronic bending and the surface here, the thermal expansion is small, the high-frequency electrical insulation is raw materials or firing at 1 40 ° C, and the temperature and the burned fruit This kind of bending is deformed. Even if it can be stacked, it has at least one intermediate layer and a surface layer made of materials. & The fired body is preferably composed of a base material containing cordierite and cordierite at a mass of 2 s and 2 s of mass, and at least one layer of intermediate sound, aluminum and / or A surface layer made of a material with low properties. # 舁 The above-mentioned firing jig 'is characterized in that the base material makes the purity of the bluestone high, and it becomes a temperature change and a high temperature. The invention's invention raises the temperature and reduces the temperature. From the short firing time of electronic components, this high purity is used. Cordierite base material II = strong performance compared with ί front ί ΐ ΐ strong resistance to rapid temperature rise, strong temperature resistance and crack resistance, and the hair is subject to rapid firing timing and flexibility, because it can suppress the deformation caused by the addition of components, and Can prevent welding j = f peeling, so long life. The chemical composition of 疋 n cordierite is 2Mg0 — 2A 丨 2〇3 — 5Si〇2, which has the advantages of strong thermal shock resistance, Nanducai acidity, endurance, π and and high. Blend kaolin, magnesite, sticky man-made raw materials such as alumina, magnesia, silica, etc. from 3,000 to 3,000. 1 Bending π is an expedient statement that if the firing jig is used repeatedly, it will lose its shape and sag due to the pressure firing of the fired body. If 眭 =, due to the large deformation of the firing jig, the fired body, ie the product, is usually stacked and used, but it cannot be stacked. The firing jig becomes unstable and easily occurs in the firing furnace. 543051 V. Invention Explanation (4) The accident that collapsed inside. The present invention is described in more detail below, but the present invention is not limited to the following examples. DETAILED DESCRIPTION (1) Firing jig for electronic components In this specification, the π firing jig for electronic components refers to the firing of ceramic capacitors, thermistors, ferrites, etc. The components used in the electronic component made of ceramics specifically include a positioner, a baking tray, a flat plate, and the like for placing a fired body. (2) Base material The firing jig of the present invention comprises a base material containing cordierite, or cordierite and alumina and / or mullite, an intermediate layer of at least one layer, and the fired body. A surface layer made of a material having low reactivity. At this time, it is desirable that the base material is composed of cordierite having an impurity amount of 2.5% by mass or less, or cordierite having an impurity amount of 2.5% by mass, and alumina and / or mullite. When the impurity is iron oxide (Fe2 03), it is desirable that the amount of iron oxide (Fe203) contained in cordierite is 1% by mass or less. If the amount of iron oxide (Fe203) exceeds 1% by mass or more, the generation of glass components becomes stronger, which is why the peel resistance of the surface layer decreases. Moreover, as the impurity, it is desirable that cordierite contains iron oxide (Fe2 03), sodium oxide (Na20), and potassium oxide (K20) in an amount of 2% by mass or less. The impurities contained in cordierite are mainly iron oxide (Fe2 03), sodium oxide (Na20), and if (K20). Although they also contain oxide (CaO) and titanium oxide (Ti02), they are referred to as impurities in the present invention.

543051 V. Description of the invention (5) Components other than A L2 03, S i 02, and M g 0. Such a component easily forms a low-melting substance, and a liquid phase is easily generated in a firing jig during firing. If cordierite contains many such impurities, the bending resistance of the base material and the peel resistance of the intermediate layer and the base material are reduced, and the characteristics of the fired body are adversely affected. Therefore, cordierite with less impurities must be used. Compared with low-purity cordierite, high-purity cordierite has better bending resistance, and compared with oxidized and Fuming andalusite, it has improved crack resistance and can improve crack resistance and Resistance to bending. The amount of impurities in cordierite is as shown in the examples below. The total amount of impurities accounts for less than 2.5% by mass. Iron oxide (Fe203), sodium oxide (Na20), and potassium oxide (K20) as the main impurities account for 2% by mass. The following is fine. In addition, the measurement of the impurities can be performed using a general wet analysis or the like, and for example, it can be performed according to the Japanese Industrial Standard R 2 2 1 2 (19 9 1). In the present invention, it is preferable that the cordierite contained in the base material accounts for 50% by mass or more. Crack resistance and bending resistance are strong. If the base material contains impurities total 2.5% or less, iron oxide (Fe203), sodium oxide (Na20) and potassium oxide (K20) as main impurities account for 2% by mass. Cordierite accounts for more than 50% of the mass. As shown in the examples below, the crack resistance of the base material is significantly improved, and cracks are unlikely to occur even after repeated firing, and a long life of the firing jig can be achieved. (3) Intermediate layer The intermediate layer referred to in the present invention is a layer located between the base material and the surface layer, and its thermal expansion coefficient is between that of the base material and that of the surface layer.

Page 8 543051 V. Description of the invention (6) Between expansion rates. If the intermediate layer is formed, the difference in thermal expansion coefficient between the base material and the surface layer is reduced, and there is an advantage that the surface layer can be prevented from peeling. In the firing jig of the present invention, it is desirable that the intermediate layer contains a group selected from the group consisting of oxidized indium, fuming andalusite, oxidized indium and oxidized eutectic, and a mixture of oxidized aluminum and mullite. More than one. Considering the influence on the characteristics of the fired body, it is desirable that the amount of Si 02 in the intermediate layer connected to the surface layer accounts for less than 20% by mass. If the intermediate layer in the present invention uses the above-mentioned compound as a material, it may be laminated on the surface of the base material by a conventional spraying method or a spraying method. For example, if a gas plasma spraying method is used, it is preferable that the film thickness of the intermediate layer is 50 micrometers (// m) to 100 micrometers (/ m). If a water-stabilized plasma spraying method is used, Preferably, the film thickness of the intermediate layer is at a level of 100 micrometers (// m) to 150 micrometers (/ zm). If a spraying method is used, it is desirable that the film thickness of the intermediate layer is 50 micrometers (// m) to 500 micrometers (wm). In the present invention, the intermediate layer may be composed of a plurality of layers, and the thermal expansion coefficient may be gradually changed. For example, the thermal expansion rate at 1000 ° C, cordierite is 0.2% 'Fuming andalusite is 0.4%' oxidation junction is 0.8% 'oxidation error is 0.9%, if burned The jigs are stacked in this order, and the difference in thermal expansion coefficient can be minimized, and the peeling stress between layers can be alleviated during firing. Here, the eutectic means a mixture of two or more substances that are simultaneously precipitated from a melt. Its various components are formed into subtle mixed groups

543051 V. Description of Invention (7) Weaving. Eutectics are different from other pure ^^ compounds in that they have a melting point. They have only solidification, melting points and advantages. in. It is the surface of the smallest dagger layer among the constituents of the conjugate system. When the J ::: ff film can be used to face the base material and the middle ore, it can be further immersed in the base material and easily dissolved. The eutectic contains spray in the mouth. Laminated with & x = convex and concave. Therefore, it is high and peeling is hard to occur. & Combinability of Materials and Intermediate Layers In the present invention, although alumina and aluminum oxide are used (mp, 2015. 〇oxidation error ~, 2 677 i: rf, osmium oxide refers to the second oxide without stabilization. The minimum melting point mGt is obtained at 6 o'clock, and the eutectic transformation is achieved at a ratio of 57.4: 42. (4) Surface layer Xia surface: 5 :: surface layer 'refers to the surface of the base material or the middle door :. If 杲 forms a surface layer, prevent contact between the base material and the intermediate layer :: Ground: The component material is in contact. The firing of the present invention has a low-response material core reaction: ideally, 电容 Γί capacitor, ideally choose Γ, which has low reactivity with barium titanate: rhenium oxide in the surface layer except for unstabilized Oxidation is wrong. 543051 V. Description of the invention (8) Stabilized stabilized zirconia such as calcium oxide (CaO), yttrium trioxide (Y203). Therefore, it is sufficient to appropriately select the most suitable zirconia considering the above reactivity. In addition, depending on the type of the electronic component, a spray-coated film containing a eutectic substance of an oxide name and an oxide weight may be used as the surface layer. The surface layer in the present invention can be laminated on the surface of the base material or the surface of the intermediate layer by using the aforementioned thermal spraying or spraying method using the aforementioned compound as a material. In the present invention, the thickness of the surface layer which can ensure the above-mentioned effects is not particularly limited. As described above, the firing jig of the present invention is particularly preferably such that the cordierite contained in the base material accounts for more than 50% by mass; the intermediate layer contains a eutectic selected from the group consisting of Shaoxing, Changming andalusite, oxidizing oxide, and oxidizing oxide. One or more of the group consisting of a mixture of oxides and fuming andalusite; the surface layer contains zirconia. (5) Manufacturing method The firing jig of the present invention can be manufactured by forming an intermediate layer on the surface of a base material having a desired shape using a spraying method or a spraying method, and then forming a surface layer. The so-called clock spray method is a method of heating a metal or ceramic fine powder (hereinafter referred to as π spray coating material π) to a semi-fused state, and spraying ore to form a spray coating on the surface of a coating object. Various methods exist depending on the heating method, such as a gas spray method using a combustion flame, an arc spray method using an electric arc, but in the present invention, it is preferable to form a thermal spray coating by a plasma spray method using a plasma nozzle.

543051 V. Description of the invention (9) In the present invention, the water release plating method in the plasma spraying method is more preferable. The most optimized plasma spraying method using a gas plasma spraying sub-body spraying a small film thickness of 20 microns (_) to 50 microns (") horizontal film can form the smallest water-stable surface bonding force. Ae The surface spraying method refers to spraying ceramic powder onto the slurry, flowing the slurry on the surface of the substrate, and then firing to form a spray coating. 2 The soil surface coating method is easier to form a thick film than the spray coating method, and spraying = ^ method The spray particle size is between 100 micrometers (V m) and 2000 micrometers (V m). The bismuth is sufficient, which can use the particle size of several micrometers to 500 micrometers (“m). The spray method therefore Compared with the spraying method and the spraying method, the coating can be made of two materials. Excellent properties such as hardness and surface roughness. Moreover, the + porosity porosity and comparison have the advantage of low cost. Concoction method and thermal spray method Next, the tool will be described in more detail using examples. The firing clips according to the present invention (Examples 1 to 3 'and Comparative Examples 1 to 3) were evaluated in Examples 1 to 3 and Comparative Examples 1 to 3. Examples 丨 3 and Benjamin's sintered clip material were made by using (a the base U in Example 3) containing (Fe203) 0.1% by mass, sodium oxide b) as a raw material (LO) accounts for 0.3% by mass, the content of other impurities and potassium oxide stones; (b) (Fe2O3) accounts for 2.7% by mass, Beirenli, 3% cordierine 3 sodium oxide (Na9 〇) 543051 V. Description of the invention (ίο) and potassium oxide (κ20) accounted for 1.4% by mass, and other impurities contained 1.7% by mass of cordierite. After mixing them, mixing them on a wheel mill, It was formed into a length of 150 cm (mm) x a width of 150 cm (mm) x a thickness of 4 cm (mm) by a hydraulic press under a pressure of 1 ton / cm2, and it was fired at 1,300 ° C for 3 hours. The amount of impurities contained in the cordierite base material is adjusted by appropriately mixing the above-mentioned (a) and (b) raw materials. The evaluation results of crack resistance and bending resistance according to Examples 1 to 3 and Comparative Examples 1 to 3 are shown in Table 1. The evaluation of crack resistance was performed by placing a firing jig of zirconia material having a size of 65% of the base material in the central portion of the produced base material, and then placing it in a small electric furnace from 3 5 ( TC starts to heat up 5 ° C (until 100 ° C), and then observes whether there are cracks when placed at normal temperature. At each temperature, it is heated for 1 hour. In Table 1, cracks occur when the temperature is less than 60 ° C. X is △, cracks occurred in the range from 600 ° C to less than 7 0 ° C, △, cracks occurred from 7 0 ° C to less than 8 0 0 ° C, 0, 8 0 No crack occurred at 0 ° C is ◎. The evaluation of bending resistance is completed by loading 4kg / cm2 in the central part of the produced base material and holding it at 120 0 ° C for 5 hours, and then removing the loading, Observe the amount of bending that occurs from before loading. In Table 1, the amount of bending greater than 1.5 cm (mm) is X, the amount of bending less than 1.5 cm (mm) is greater than 1.0 cm (mm) is △, and the amount of bending is less than 1.0 cm ( (mm) is greater than 0.5 centimeters (mm) is 0, and the amount of bending is less than 0.5 millimeters (mm) is ©).

543051 Anti-bending resistance 〇 〇 〇 & XX Crack resistance ◎ ◎ ◎ ◎ ◎ ◎ m ΕξΠΕ m Miscellaneous mass (%) Total 2. 3 1. 2 0. 7 Ο OO 00 CO ^ LO 〇 ^ ~ t Bu 〇1 ~ (1 ~ (A * + B 氺 CD 00 inch -η Ο Ο cy ^ r ~ ^ oi cvi ^ Bu inch CO Ο Ο 〇Oi O inch τ ~ < r ~ (0 · 9 0. 4 0. 1 Ν ⑦ rrH i-1 CS3 Material Cordierite Cordierite Cordierite Cordierite Cordierite Cordierite Cordierite Example 1 Example 2 Example 3 Comparative Example 1 Comparative Example 2 Comparative Example 3 (0 £) Sao ^ ¥ < *

Page 14 543051 V. Description of the invention (12) (Evaluation) It can be known from 1 that the total amount of impurities accounts for more than 2.5% by mass, and the main impurities are iron oxide (Fe2 03), sodium oxide (Na20) and oxidation_ (K20) The cordierite base material, which accounts for more than 2% by mass, has no cracks below 800 ° C and good crack resistance, but the bending amount is greater than 1.0 cm (mm), indicating that the bending resistance is insufficient. The total amount of impurities accounts for less than 2.5% by mass, and iron oxide (Fe2 03), sodium oxide (Na20), and potassium oxide (K20) as the main impurities account for less than 2% by mass of the cordierite matrix material. As a result, the crack resistance and Bend resistance is very good. Furthermore, in Examples 1 to 3 and Comparative Examples 1 to 3, results were obtained in which cracks did not occur even at 100 trc. (Examples 4 to 9 and Comparative Examples 4 and 5) Examples 4 to 9 and Comparative Examples 4 and 5 were the same as Examples 1 to 3, and the base material of the firing jig according to the present invention was evaluated. The base materials of Examples 4 to 9 were prepared as follows: ... using the cordierite (a), (b) and (c), (d), (e) as raw materials, and (c) the maximum particle diameter was Electrolytic fusion oxide (d) with a maximum particle diameter of 250 micrometers (// m) and 44 micrometers (/ m) and a maximum diameter of 150 micrometers (/ m) and 44 micrometers (/ m) The mullite (e) sintered alumina having an average particle diameter of 3 micrometers (/ m) was used as a raw material, molded into the same shape as in Examples 1 to 3, and fired at 1,450 ° C for 5 hours to prepare. In addition, the amount of oxidized chains, the amount of fuming andalusite, and the amount of impurities contained in the base material are adjusted by appropriately mixing the above-mentioned (a) to (e) raw materials. The base materials of Comparative Examples 4 and 5 were produced in the same manner as in Example 3 except that (c), (d), and (e) were used as raw materials. The evaluation results of crack resistance and bending resistance according to Examples 4 to 9 and Comparative Examples 4 and 5 are shown in Table 2.

Page 15 543051 V. Description of the invention (13) The evaluation of crack resistance and bending resistance is completed in the same phase 3-I · *-Examples of implementation and table 〇 ο ο ο ο ο 0 ◎ ◎◎◎ οο ◎

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Lo group 镒 Ή H potential 镒 ((5 ^ 0 霸 ^ _ < * M3〇5i V. Description of the invention (14) (evaluation)) As shown in Table 2, we can know that the total amount of impurities accounts for 2 π as the main Impurity of iron oxide (Fe: · 5% or less, U20) accounts for 2% or less of mass (Na2〇) f;,,,, f,,,, ί Anti-lice aluminum and rich cracks occur, so you can know the resistance; sub, is in _ (lean Example 10 ~ 19, Comparative Examples 6 ~ δ), insufficient clothing resistance. According to Example 1 〇 ～ 丨 9, Comparison 丨 3 extensive evaluations. Example 10, and the comparatively invented sintered plasma spraying method or sintering, sintering fixtures on the surface with water to stabilize the J sintering jig. Middle to middle. Interlayer, Then form the middle layer of the surface-acoustic temple with water stable = 3 thick and 100 microns (-Π). Test meters (㈣) ~ 15. Micron (J ore = material using a particle size of 75 f 'film pressure through spray coating : Under number ^ Emulsified aluminum and fused aluminum-rich red pillars ::: Easily sintered and oxidized oxidized. Also, the spraying material of the intermediate layer is 45 chain meters (^) or less, and the electrofusion oxidation is less than or equal to (s). Aluminum in time Encapsulated § alumina vermiculite, burned under HOO for 5 small surface water stabilization ~ (VnO ~ 150 μm (with a particle size of 75 μm sprayed with quart ion plasma through a spray lens: less than ^ 2, electric The second-order stabilized oxidized trioxide is oxidized, and the film thickness is less than 锨 meters (// m). Moreover, the surface spraying material is burned for 5 hours using 4 4. 4⑽.c

P.17 543051, description of the invention (15) In Example 1 2 to 15, the material of the intermediate layer is a mixture of alumina and alumina-rich pillared stone. In Example ^ 5 in which the spraying method was used for the intermediate layer, alumina and mullite with a particle size of 150 micrometers (#m) to 75 micrometers (vm) were mixed on a vibration mixer. Minutes to complete. Furthermore, Example i 2, 1 3 + using a spraying method was used for the layer, and a mullite powder having a particle size of 45 μm or less, an easily sintered alumina, and a particle size were combined. Micron (// ΠΠ fused aluminum oxide is properly blended and mixed during pulping .: The intermediate layer material is made of oxidized oxide and oxidized eutectic microsecondary oxide, and mixed with osmium oxide at a ratio of 1]. It is a mixed tissue material that is fine, thin, and fine. The evaluation results of confrontation according to Examples 1 to 9 and Comparative Examples 6 to 8 are shown in Table 3. The peel resistance and the anti-green resistance are shown in Table 3. Into the sintering jig, apply it to the bottom of the firing jig, and then repeatedly dissolve it in the small $ type electric shell under the condition of 2 hours until the intermediate layer or surface layer occurs from the base surplus, where in Table 3, The number of occurrences of peeling when less than 3 times is the number of times when x is separated. The number of occurrences of peeling within the range is Δ ', starting from 5 times, starting from 5 times and less than 5 times: 0: 8 times without peeling is ◎. Side- The anti-peeling resistance of humans was evaluated by repeated firing with anti-peeling resistance and then without a protection method> Table 3. In Table 3, the deflection amount of the deflection dendrite It Γ 1㈣ before ㈣. Centimeter (_) 2Γ is x, less than 2 cm (_) large ^ π is △, less than 1 cm (mm) is greater than 0.5 centimeter 丨 & is 0, less than 0.5 cm ( _) Is ◎. Not (_)

543051

Anti-reactivity 〇〇〇〇〇〇〇〇〇〇 ◎ 〇〇 &lt;] &lt; 1 fWtA broken) \ 1 ^ S '〇〇〇〇〇〇〇〇〇〇 ◎ 〇 &lt; 1 XX surface layer construction method Plating Spray Plating Sputtering Plating &lt; H ^ Spraying Plating I Plating 1 Plating Plating Beryllium Material Chromium Oxide Chromium Oxide Chromium Oxide Chromium Oxide Chromium zirconia intermediate layer —._ .. _ί Construction method Spraying spraying i Spraying 1 Spraying spraying spraying Spraying spraying spraying Spraying spraying spraying material 1 i Alumina | Alumina Alumina (50%) + Al-rich Andalusite (50%) | Alumina (15%) + mullite (85%) Alumina (50%) + mullite (50%) Alumina (15%) + mullite (85 %) Alumina alumina alumina i Alumina and zirconia eutectic alumina alumina alumina matrix material impurities (%) Total 1 CO CSI CSI r— ί 〇〇〇〇〇〇〇 〇 〇 CD 〇〇〇CO 〇00 LO Other d 〇CO 〇00 〇CO 〇〇〇〇 CO ο 〇〇〇〇CO 〇 CO 〇05 〇r— (r—ί bu 1 A * + B * ① T—Η 00 〇 inch 0 inch C? Inch 〇 inch 0 inch ο inch 0 inch ο inch d Γ—Η ⑦ cn〇τ— &lt; inch 〇〇 〇CO 〇00 〇CO d 〇〇ό CO d CO ό 〇0 ο co ο ⑦ d ο t ^ inch r— d inch 〇－1 〇T &quot; 1 〇 1-1 〇〇11 〇1— ^ 〇τ— ^ 〇 r— ^ 〇 CM T— <1 Bu Csl material cordierite I cordierite cordierite cordierite | cordierite I cordierite L cordierite cordierite | cordierite Bluestone Cordierite Cordierite Cordierite Cordierite Cordierite Example 10 Example 11 Example 12 Example 13 j Example 14 Example 15 Example 16 Example 17 Example 18 Example 19 Comparative Example 6 Comparative Example 7 | Comparison Example 8 1 coCDtx) so ffi sword Md ”剡 ff (: tH) (3) &amp; ^ M + (O ^ N) rEs} 嫲 #

543051 V. Description of the invention (17) (Evaluation) As shown in Table 3, it can be known that iron oxide (FeA), oxidation (NaJ), and potassium oxide (10), which are the main impurities, occupying 2 t Γ of the total amount of impurities, are used as the main impurities. Cordierite, which accounts for more than 2% of the mass, has insufficient forming resistance, insufficient peel resistance and resistance to reaction. When the mass is different, the total amount of impurities used in the base material and the intermediate layer accounts for less than 2.5% of the mass, = iron oxide (Fe2O3), sodium oxide (Na2O) '(less than 2% of cordierite base material has good sintering reactivity after firing, and the intermediate layer uses gasified aluminum, a mixture of betalite, and oxidation Aluminum and zirconium oxide s _ formed by plasma blasting method or nozzle coating method, core 3 = water-stabilized plasma spray chain method or nozzle with good performance after use. In particular, the surface layer passes two '1 = peel resistance Excellent results were obtained with anti-reaction. The layer formed by f and sprayed with water-stabilized plasma passed through 2 small pores. Such pores can absorb the layer. ^ The surface layer formed by spraying method is swelled on the surface. (Examples 20 to 25, Comparative Examples 9, 丨 〇) The small swelling was evaluated according to Examples 20 to 25, Comparative Examples 9, and 10. Example 20 is an intermediate layer made of alumina as a raw material on the surface of the substrate material used in the implementation. Then, the surface layer is formed by the water-stabilizing plating method using oxidation error as a raw material, and the firing jig is made. The intermediate layer and the surface sound • 5% of the steel base material is mixed if it is peeled off. The impurities) account for mass separation and In the case that anti-fuming red water stabilizing oxidation misconnection can be exerted, the spray method is more likely to contain the reason. Invention of the same way, spray method, plasma spray, formation and implementation

Page 20 543051 V. Description of the invention (18) Examples 10 to 19 are completed in the same manner. In Comparative Examples 9 and 10, an intermediate layer and a surface layer were formed on the surface of the base material produced in the same manner as in Examples 4 and 5 to form a firing jig in the same manner as in Examples 2 to 25. The film thickness of the intermediate layer and the surface layer is 100 micrometers (// m). Table 4 shows the evaluation results of anti-peeling and anti-reaction properties according to Examples 20 to 25 and Comparative Examples 9 and 10. Evaluation of peel resistance and reaction resistance was performed in the same manner as in Examples 10 to 19.

Page 21 543051 V. Description of the invention (19) Table 4

Anti-reaction 〇 ◎ ◎ 〇〇〇 ◎ 〇 Peeling resistance ◎ ◎ ◎ ◎ ◎ ◎ swollen 5 施工 swollen construction method 锧 ore mine stork 锧 锧 spray coating spraying meaning ^ R -ϋΠΙ -ijn φ-^ Ό.- ϋΐΐ &lt; m &lt; m &lt; m &lt; m &lt; m &lt; m &lt; m &lt; m alkali alkali alkali _ _ minus zirconia chromium oxide intermediate layer construction method 剡 剡 鐦 剡 剡 剡 spray spray 1 5g SS SS §g Si gg minus Decrease Jpf Decrease Alumina Alumina Impurity (%) ϊίϊπ LO CD 卜 LO 运 00 OOC? 〇 ^ 〇00 00 〇 〇 & 0. 3 0. 35 0. 4 0. 3 0. 35 0 · 4 CO CO ο 〇 * 0. 2 0. 25 0. 3 0 · 2 0. 3 0 · 4 LO ΙΩ ο 〇 Base material meaning &gt; ^ N 〇〇〇〇〇〇〇rH CO LO r— (〇〇LO Vw / QD QQ an na QD QD &lt; m &lt; na &lt; na &lt; hs ^ ^ ^ ^ ^ ^ ^ Minus Zang alkali M shout + + + + + + Tun K1 啐 啐 啐 啐 Dm: Hi: sorry | r | r Fine shop 4λ! ι1 · FREE • fee □ π an &lt; m &lt; m | nffi | nffi A A uu Example 20 Example 21 Example 22 Example 23 Example 24 Example 25 Comparative Example 9 Comparison Example 10 S-Ban »» 剡 »(Fang) (3) & ^ alkali + (0 #) ¥ &gt;«:? (0 ^ 0 paralysis mystery &lt; * page 22 543051 V. Description of the invention ( 20) (Evaluation) As shown in Table 4, it can be known that: and iron oxide 'as the main impurity; the amount of 20 accounts for 2.5% of the amount of f and potassium oxide (κ2〇) accounts for the mass of 2 2 3), sodium oxide The cyanite content of the firing clip of the base material set above 50 «/„ is qualitatively good. In the firing jig using alumina and aluminum-rich diisocyanate and reaction resistance, the same peel resistance The base material made of Nisangite is' ## shown in Table 2. The results are good. It is acceptable. There is a lack of crack resistance in materials (Examples 26 to 29, Comparative Examples u, 2) On the surfaces of the substrate materials prepared in the methods of Examples 26 and 27 and Comparative Example u, the materials shown in f = the same way as in Example 3, the water-stabilized plasma blasting method, or the materials shown in FIG. 5 were used. Oxidation error is used as a raw material to form a table by water ^ = 2 layers of intermediate layer spraying method, and made into a firing clip :: surface examples of the base material produced in the same manner as in the ion spraying method or Examples 4 to 9 ^, 29 with yes Solid material is shown, as in Example 1 with 26 and 27 'as shown in Table 5 using the layer made of the firing jig. Comparative example! 2 is made on the surface of the base material of the spot ratio ^ = intermediate layer and the surface, using ^, 乂 Example 4 to make ^. The intermediate layer and the surface layer are made into a firing clip. Furthermore, the intermediate layer is formed by spraying silver on the surface of the second layer and the second layer directly after the first layer spraying is completed by water-stabilized plasma. In addition, the middle layer passes; [: layer

Page 23, 543051 V. Description of the invention (21) After the first layer is sprayed, dry it at 80 ° C for 5 hours to remove the moisture from the sprayed layer, and then spray the second layer on the surface of the first layer The material is fired to the surface of the second layer. The formation of the surface layer was completed in the same manner as in Examples 10 to 19. The film thickness of the first intermediate layer is 50 micrometers (// m), the film thickness of the second intermediate layer is 100 micrometers (/ m), and the film thickness of the surface layer is 100 micrometers (vm). Table 5 shows the results of evaluating peel resistance and reaction resistance based on Examples 2 6 to 29 and Comparative Examples 1 and 12. Evaluation of peel resistance and reaction resistance was performed in the same manner as in Examples 10 to 19.

Page 24 543051 V. Description of the Invention (22)

1¾ 劫 〇〇 ◎ 〇 &lt; 3 ◎ &quot; Z = T &gt; rl-1_] ◎ 〇 ◎ ◎ X ◎ 剡 -0-0¾ 德 Η 响 # 螫 15 &lt; m VII 11 &lt; m materials ¥ Ιί Μ, 〇 〇 〇L〇Τ-Η 〇〇 〇LO T— (〇 〇LO Τ-Η 〇ο 〇LO T -— (〇〇 〇LO rH 〇〇 〇LO 11 1! 1¾ HS? 15 1 Paper aluminum ^ SS ^ SS Win 55 Win 58 • fe- §s §8 ^ SSAnn SSThis | π 田 called to win _ minus {IDE U inffi minus | π minus 3 LO _ * Inch d 〇CD 〇〇CD CO 00 〇 / -N / * N 〇 〇 Matrix material alumina (30% CO 4ϋ • fee SS 00 &lt; R η rH _ _ + twist + Gamma: _ Ο Ο 〇 SS! &## Twist # Γ CQ &lt; H ^ _ 舾 _ Ιί ① CNJ 00 CM Oi Cvl τ-Η rH C \! Swarm group S S Wei Weijian AJ (, n &&amp;, 1 paper) , SE-fr * iissi sc «_» "剡 So (¾) Page 25 543051 V. Description of the invention (23) As shown in 5, it can be known that the total amount of impurities used is less than 2.5% by mass, and the iron oxide (Fe2 03), sodium oxide (Na20), and potassium oxide (K20) as the main impurities account for less than 2% by mass of the cordierite matrix. The material and the intermediate layer are formed into a two-layer firing jig, and the results of peel resistance and reaction resistance are good. The intermediate layer is formed by using alumina and mullite by water-stabilized plasma spraying method or spraying method, respectively. Moreover, the surface layer is formed by water-stabilized plasma spraying method or spraying method using oxidation faults, and can also perform very well. The total amount of impurities used is less than 2.5%, and iron oxide (Fe203) is used as the main impurity. , Sodium oxide (Na20) and potassium oxide (K20) account for less than 2% by mass of the cordierite content and more than 50% by mass of the base material, the intermediate layer-formed into a two-layer firing jig, the same peel resistance and reaction resistance The results are all good. -It can be known that the total amount of impurities used is more than 2.5%, and the iron oxide (Fe2 03), sodium oxide (Na20), and potassium oxide (K20), which are the main impurities, account for more than 2% of the mass of the cordierite base material, the intermediate The layers were formed into a two-layer firing jig, and the peel resistance and reaction resistance results were not good enough. When the total amount of impurities accounts for more than 2.5% by mass, and iron oxide (Fe2 03), sodium oxide (Na20), and potassium oxide (K20) as the main impurities account for more than 2% by mass, even if the intermediate layer is formed as two Layer, nor can it obtain good characteristics. In addition, using a base material composed of oxide I and Fuming andalusite and an intermediate layer formed into a two-layer firing jig, both the peel resistance and the reaction resistance were good. However, as shown in Table 2, this base material has a drawback that the crack resistance is insufficient.

Page 543 051

Page 543051 Illustration

Page 28

Claims (1)

543051 VI. Application for patent scope 1. A firing jig for electronic components, for loading a fired body made of ceramics on it, and firing the fired body to make electronic components, characterized in that: The base material of cordierite, or cordierite, and oxidized and / or fuming andalusite, at least one intermediate layer, and a surface layer formed of a material having low reactivity with the fired body. 2. The firing jig for electronic components according to item 1 of the scope of the patent application, which is characterized by containing cordierite with an impurity amount of 2.5% or less, or an impurity amount of 2.5.5% or less. The base material of cordierite and oxidized and / or fused andalusite is composed of at least one intermediate layer and a surface layer formed of a material having low reactivity with the fired body. 3. The firing jig for electronic components according to item 1 or 2 of the scope of patent application, characterized in that the impurities contain iron oxide (Fe203), and the amount of iron oxide (Fe203) contained in the cordierite accounts for mass Less than 1%. 4. The firing jig for electronic components according to item 1 or 2 of the scope of the patent application, characterized in that the impurity contains iron oxide (Fe2 03), sodium oxide (Na20) and potassium oxide (K20), and the cord The amount of iron oxide FeO〇f sodium oxide (Na) and potassium oxide (K20) contained in the bluestone is 2% by mass or less. 5. The firing of electronic components according to item 1 or 2 of the scope of patent application. Page 29 543051 6. Scope of patent application The fixture is characterized in that the above-mentioned cordierite contained in the above-mentioned base material accounts for more than 50% of the mass. 6. The firing jig for electronic components according to item 1 or 2 of the scope of the patent application, wherein the intermediate layer contains a eutectic material selected from the group consisting of oxide oxide, Fuming andalusite, oxide oxide and oxide junction, And one or more of the group consisting of a mixture of oxide shao and Fuming andalusite, and the surface layer contains oxidation faults. 7. The firing jig for electronic components according to item 1 or 2 of the scope of the patent application, wherein the intermediate layer is formed by a spraying method or a spraying method, and the surface layer is formed by a spraying method or a spraying method. . 8. The firing jig for an electronic component according to item 7 of the scope of the patent application, wherein the thermal spraying method is a water-stabilized plasma spraying method. Page 30