TW540433U - Washing apparatus and wafer washing tank thereof - Google Patents
Washing apparatus and wafer washing tank thereofInfo
- Publication number
- TW540433U TW540433U TW91219456U TW91219456U TW540433U TW 540433 U TW540433 U TW 540433U TW 91219456 U TW91219456 U TW 91219456U TW 91219456 U TW91219456 U TW 91219456U TW 540433 U TW540433 U TW 540433U
- Authority
- TW
- Taiwan
- Prior art keywords
- washing
- wafer
- tank
- washing tank
- washing apparatus
- Prior art date
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW91219456U TW540433U (en) | 2002-06-07 | 2002-06-07 | Washing apparatus and wafer washing tank thereof |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW91219456U TW540433U (en) | 2002-06-07 | 2002-06-07 | Washing apparatus and wafer washing tank thereof |
Publications (1)
Publication Number | Publication Date |
---|---|
TW540433U true TW540433U (en) | 2003-07-01 |
Family
ID=29581667
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW91219456U TW540433U (en) | 2002-06-07 | 2002-06-07 | Washing apparatus and wafer washing tank thereof |
Country Status (1)
Country | Link |
---|---|
TW (1) | TW540433U (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107818937A (en) * | 2017-12-08 | 2018-03-20 | 上海大族富创得科技有限公司 | Fountain moisturizing is from robot walking |
-
2002
- 2002-06-07 TW TW91219456U patent/TW540433U/en not_active IP Right Cessation
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107818937A (en) * | 2017-12-08 | 2018-03-20 | 上海大族富创得科技有限公司 | Fountain moisturizing is from robot walking |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
GD4K | Issue of patent certificate for granted utility model filed before june 30, 2004 | ||
MK4K | Expiration of patent term of a granted utility model |