TW540433U - Washing apparatus and wafer washing tank thereof - Google Patents

Washing apparatus and wafer washing tank thereof

Info

Publication number
TW540433U
TW540433U TW91219456U TW91219456U TW540433U TW 540433 U TW540433 U TW 540433U TW 91219456 U TW91219456 U TW 91219456U TW 91219456 U TW91219456 U TW 91219456U TW 540433 U TW540433 U TW 540433U
Authority
TW
Taiwan
Prior art keywords
washing
wafer
tank
washing tank
washing apparatus
Prior art date
Application number
TW91219456U
Other languages
Chinese (zh)
Inventor
Yi-Chang Liu
Chia-Chen Chang
Yuan-Mou Dai
Original Assignee
Taiwan Semiconductor Mfg
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Taiwan Semiconductor Mfg filed Critical Taiwan Semiconductor Mfg
Priority to TW91219456U priority Critical patent/TW540433U/en
Publication of TW540433U publication Critical patent/TW540433U/en

Links

TW91219456U 2002-06-07 2002-06-07 Washing apparatus and wafer washing tank thereof TW540433U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW91219456U TW540433U (en) 2002-06-07 2002-06-07 Washing apparatus and wafer washing tank thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW91219456U TW540433U (en) 2002-06-07 2002-06-07 Washing apparatus and wafer washing tank thereof

Publications (1)

Publication Number Publication Date
TW540433U true TW540433U (en) 2003-07-01

Family

ID=29581667

Family Applications (1)

Application Number Title Priority Date Filing Date
TW91219456U TW540433U (en) 2002-06-07 2002-06-07 Washing apparatus and wafer washing tank thereof

Country Status (1)

Country Link
TW (1) TW540433U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107818937A (en) * 2017-12-08 2018-03-20 上海大族富创得科技有限公司 Fountain moisturizing is from robot walking

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107818937A (en) * 2017-12-08 2018-03-20 上海大族富创得科技有限公司 Fountain moisturizing is from robot walking

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Legal Events

Date Code Title Description
GD4K Issue of patent certificate for granted utility model filed before june 30, 2004
MK4K Expiration of patent term of a granted utility model