TW540074B - Manufacturing method of tunable concrete solenoid and the structure thereof - Google Patents

Abstract

The present invention provides a manufacturing method of tunable concrete solenoid and the structure thereof. The inventive method comprises firstly forming two bottom electrodes to adjust the inductance of solenoid; secondly, forming a plane-type solenoid having an inner end close to the center and an outer end of outer ring; then connecting the inner end and outer end of the plane-type solenoid to fabricate two bi-layered suspended metal arms, one end of the arm being fixed on the substrate respectively; and finally removing the sacrificial layer required in the whole process, and moving one end of the suspended arm connected to the solenoid away from the substrate by the residual stress, so that the suspended arm will extend the plane-type solenoid into a concrete solenoid, wherein a concrete circular or polygonal solenoid can be formed by designing the plane-type solenoid into circular or polygonal.

Description

540074 V. Description of the invention (1)

Application Field of the Invention J The present invention relates to a manufacturing method and structure of a solenoid as an inductance coil, and more particularly to a method using complementary metal-oxide semiconductor (CM0S) and micro-electromechanical system (MEMS). Manufacturing method and structure of tunable riser solenoid of inductance. [Background of the Invention] There are already two mechanical elements such as actuators (a.-), where 1 == !. Because the miniaturization of these devices will make it possible to expand a large number of devices. II i technical field. In addition, this is convenient for the computer. This new technical field is called micro-elect system (the micro-elect system). The development of the system has been extended to the semiconductor industry. However, it is also based on the production of flat structures. Too many # 材 # & plane structure elements in the manufacturing process are the starting point. For example, the deposition of transparent and evening layers of material, such as golden light, is used to form the desired edge layer temple, and then through etching, this "quotation required by the wind" The semiconductor structure of the semiconductor element: ^ the main process 'in fact, can not meet all the tubes or three-dimensional ^ reduction = such as' some three-dimensional elements, such as three-dimensional spiral plane semiconductors currently, with these layers The way to get to the top of the morning, evening, and rise structure is to make ^ g from the bottom mask (depending on the number of turns of the solenoid), and then pass through the multiple conduits, at least ㊆ · $ 如 '以 微 机电(MEMS) technology to make three-dimensional 嫘 and '^ 四 道 ^ photomask system name long dress long. In addition, in order to avoid the process when page 5 540074 V. Description of the invention (2)-^ _____; may occur in each Defects in the contact surface, the fine shoulders of the layers. Planar semiconductor technology to make three-dimensional solenoids can only produce rectangular (rectanguiar) three-dimensional solenoids. There is another problem. ^ The circular (three-dimensional) three-dimensional solenoids. However, g cannot be made official. From the semiconductor substrate, it is necessary to make a three-dimensional spiral and electroforming technology. In this way, a two-resistance layer in the process will be added, and such a three-dimensional solenoid (as an inductor), currently e = miscellaneous In particular, it is used in radio frequency (RF) U to communicate the inductance of i = ty factor), for example, applying high-quality filters, resonators, and 4 wave states. Both require inductors with a quality factor to maintain RF. 〇〇qiao In recent years, there is also a knowledge of the use of planar inductors. : Straight to the substrate. Such a planar inductor will generate an induced current in the United States: this, its market field soil plate, and then soil reflection (especially ground, will reduce its quality coefficient. Therefore, ^^ consumption, more advanced RF The circuit is not used. Because: the surface inductance, in the high element: (including resistors, capacitors and inductors on the chip) has not yet: ΓΠ phone, was ^ ^ on the chip, but assembled by the circuit board The integration of the components in the single wart occupies 90% of the circuit board area. Therefore, such passive components and active 7L components are integrated into a single unit to integrate these components. The circuit board surface is greatly reduced. In addition, because of process factors , Lc Α often deviates from the required frequency, due to the resonance of the two channels __ 'Inductance or electricity must be adjusted. Page 6 540074 V. Description of the invention (3) iid ”; circuit. At present, micro-electromechanical technology In terms of relatively high-efficiency electrical capacitors or adjustable capacitors, as for high-quality electrical α, especially adjustable inductors are more difficult. However, despite the difficulties in making adjustable inductors, there are still relevant technical achievements. For this purpose. US Patent No. 6 1 84755 The distance between the two coils is adjusted by 丄 ^^^ 丨 κ on the skin to change the effect of mutual induction, and then adjusted by +1. However, this invention changes the distance between the two coils, and changes. The change value of the inductance is non-linear. Moreover, it has the problem that the coil is in the form of a spiral coil, and therefore, the inductance value is not high. [Objective and Summary of the Invention] The present invention provides an adjustable MEMS technology that can be used. The invention also provides a method for manufacturing a three-dimensional spiral solenoid with a problematic solenoid manufactured by the above-mentioned conventional technology and a structure complementary metal oxide semiconductor technology to manufacture the same. Another object of the present invention is a manufacturing method of > 5 and Its structure can be combined automatically without the need for two: actuation or monitoring. Another object of the present invention is to provide an adjustable three-dimensional spiral 1 = manufacturing method and its structure, which can use complementary Based on metal oxide semiconductor technology, then lift the planar spiral inductor structure away from the substrate, and then open it into a three-dimensional coil. In order to achieve the above object, the present invention provides A method for manufacturing an adjustable three-dimensional solenoid includes the following steps: providing a pre-processed substrate; depositing a first insulating layer on the substrate; forming two bottom electrodes on the first insulating layer, and depositing a first Two insulating layers on the bottom electrode layer and the first insulating layer

Page 7 540074 V. Description of the invention (4); the second end is made of the second first metal; deposited on; the first post opening of the first coil covers the post and is deposited on top; Engraving the two first trenches so that the two are connected to form two cantilever sacrificial layers; engraving one cantilever to expose; two cantilever forming two arms); Finally = circle, the force so that the inductance wire residue should be at the bottom The electrode is a third gold through tube, on which two materials each having the first genus can form an inductance coil on the above-mentioned layer including a double-layer and a free insulating layer, and the inductance coil is provided with a first near the center. Terminal and a first sacrificial layer located on the periphery of the inductor coil and the second insulating layer sacrificial layer engraved two connection post openings to expose the electric subtraction terminal and the second terminal; a second metal is filled in the Two connecting caps on the first end and the second end to form two connecting second sacrificial layers on the two connecting pillars and the first sacrificial layer and a first trench on the second sacrificial layer , Each of which should be above the bottom electrode and whose tails should be located on the two Connected to the post, exposed to deposit a third metal on the two trenches to deposit a second sacrificial layer on the two cantilevers and the second ridge 5, and a second trench on the two cantilevers to Make the two belong to the two second trenches to be bi-layered suspended with the two-layered solids, and the second and third sacrificial layers to expose the core post and the two Double-layer cantilever structure, and produces a selection of another layer of core # structure warping. The metal f 'substrate can be silicon, germanium silicide, or gallium arsenide; Η can be Ming copper alloy; second metal can be tungsten; ^ The manufacturing process can be made of nickel or chromium.: 'You can make this, the invented adjustable three-dimensional spiral coil substrate, which has an insulating layer at its end. Layered suspended arms), ~ fixed end 'The fixed end is fixed to the substrate

54〇〇74 V. Description of the invention (5) On the insulating layer, the two double-layer cantilever structures are composed of a third metal ^ and a fourth metal layer on the bottom layer; one is formed by a first metal ^ : A solenoid officer having two ends respectively connected to the free ends of the two double cantilever structures, the two double cantilever structures lifting the solenoid into a warped shape; and two corresponding to the Two double-layer cantilever structures constitute two poles, which are buried in the insulating layer to generate an electrostatic force; = the warped state of the double-layer cantilever structure. In order to make the above and other objects, features, and advantages of the present invention clearer, it is easy to understand 'the following presents several preferred embodiments, and in conjunction with the accompanying drawings, a detailed description is as follows: [Detailed description of the invention] "Figure 1" is a top view of the three-dimensional solenoid of the present invention after the front-end process is completed. The plane spiral coil 10, the cantilever 8 and 20, and the pad 22 form a passive automatic combination method. The connecting posts 14, 16 are connected to the planar spiral coil 10 near the center and the outer part, respectively, and are connected to the cantilevers 18, 20, respectively. The cantilevers 18 and 20 are respectively connected to the pins 22 and 24 and are fixed on the substrate 12 through the pins 22 and 24. On both sides of the planar spiral coil, there are two wires 26, 28, which are fixed on the substrate 12 through pins 30, 32, 34, and 36, respectively. In addition, the pins 22, 24, 30, 32, and% are used to form a GSG (ground number-ground, grund-signai-at 0 cents) shape f 'can be applied to high-frequency measurement . The cantilever 丨 8, 2 0 and the wires 2 6, 2 8 can both conduct electrical signals. The shape of the planar spiral coil may be circular or polygonal 'so as to form a circular or polygonal three-dimensional solenoid. Among them, below the cantilever 18, 20, each has a bottom electrode buried on the substrate. Page 9 540074 V. Description of the invention (6) In the y dioxy-cutting layer, the bottom electrode and the cantilever 18 and the control system are located in the following. Further: the adjustment machine for the f-type three-dimensional solenoid η ^ yueyue uses aluminum-copper alloy 'to form a flat spiral coil, bottom thunder poles 13, 15 and cantilevers 18, 20, pins 22, ", 3, 32 U bottom: 'Line 26, 28. Connecting posts 14, 16/36 and temple are tungsten. The jw τ interlayer "1") is composed of the material "No. 2Α ~ 2Η" is produced according to the present invention = figure, which can be divided It is a two-stage process. The first step is the shape of the spiral shape. "Two γ = rear stage process" is the front stage process. "Figure 2G ~ 2H" is the beginning of the process. Please refer to "2A Douyi insulation layer, that is, -Gaer ~ b, Ma is deposited on the substrate 40: Jinxi layer 11. Next, on the edge layer of the dioxide dioxide layer 11 (same as the bottom electrodes 13, 15 with Λ,: Λ, and then deposit the first Two poles u, ^ VV are formed in two) 42 'Please refer to "Figure 2B". The bottom line is part of the actuator of the present invention. Sediment-genus (2C picture of the moon and the moon), which is the first picture on the second insulation layer 42 and then ^ 浐 °: gold (A1CU)) layer and defines the planar spiral coil Silly re / child accumulation-sacrificial layer 44. Out of flat: "5 circles, 2 pictures" "Deposit the second animal layer 5: 2 (: not made) with the metal (such as 鶬 (W)) definition to connect the pillars 46, 48, and then pass through to form IU :: (, R two,) / =, connecting column 46 ^^. Patterning, followed by deposition

V. Description of the invention (7) A kind of metal (Crane) in Kai 0 A, tungsten can be used with tr § to form the connecting pillars 46, 48. It is deposited by other suitable mesh deposition methods (CVD), or I. Please also refer to replacing tungsten. The animal layer is made of metal (such as the Shaoshan people), and through the patterning, the second sacrifice and the third sacrifice layer 56 (: 'f defines the cantilever 52, 54 and then deposits the polar part. Pingxi). 52, 54 are the power-on indication of the actuator. The last step of the 5th generation process is the "No. 2F picture" (such as Ming Tong He Jin, μ 七 aA # 一 ^ metal plating ( Nickel) required plating holes 58 fi ::: The sacrificial layer 56 defines non-electrical ΛΑ ^ forged holes 58, 60. The two plated holes are located directly above the two cantilevers 52, 54 to expose the cantilevers 52, 54. ”” 5 5 ^ Ming, in the embodiment cited, aluminum-copper alloy is used as the cantilever 52, 54 f metal layers 62, 64 above the arms 52, 54 can choose the height of the metal material 152, 54 Residual stress, low thermal expansion coefficient or high = should = (lntrlnsic stress) metal, such as nickel or chromium, etc. If you choose two, the process of rapid deposition deposition can use the metal plating method. The g of = :: to the When the stress is different, it will naturally form a warp shape, and the solenoid can be lifted off the substrate. The last step of the latter process is shown in Figure 2H, which is removed by etching. Remove the sacrificial layers 44, 50, and 56 (first to third sacrificial layers) around all the metals, leaving only the pins under the cantilever 52, 54 to fix ^ # 52, 54. The second insulating layer 42 is also reserved to bury the bottom electrodes 13, 15 therein. Then, the cantilever 52, 54 is left with residual stress, and the cantilever 52, 54 can be connected to the stress of the upper metal layers 62, 64. II II _ Page 11 540074 V. Explanation of the invention (8) Poor and natural Zhao Qu. Among them, Xi Xi 丨 broadcast ^ Si Ban, W "She: The method of sacrifice layer can use wet etching, ί ί sub etching technology ( reaCtive i ⑽ etching). Pins 22, 24, 30, and V lines 26, 28 in the "^^^" can be completed in the above process. The passive automatic combination method of the present invention uses non-electric mining Low stress = genus (such as nickel), together with the metal (aluminum-copper alloy) with high residual stress, form the main body of the cantilever 18, 20. When the county arm 18, ^ ^ 50 ^ 56 (i ® 41 «1〇 ^ County wall 1 s 9n. TC to the second sacrificial layer) After being removed by etching, the ends of # 18, 20 and the flat spiral coil 10 become From the end, the suspended ends of 8, 2 =: 22, 24 are fixed ends ... As long as the second step is taken in the back of the clothing, that is, the residual stress through the two layers of metal is different during the process of removing the sacrificial layer. , Can cause the warpage of the cantilever 18, 20, and; the potential force will pull the free-form planar spiral coil 10 away from the substrate 4 'and stretched to both sides. Because of geometric constraints, the planar spiral coil It will be restricted to a circular three-dimensional solenoid, and fixed to the base plate 40 by the pins 22, 24 at both ends of the cantilever 18, 20. Reference is made to "Figure 3", which is a schematic diagram after the three-dimensional solenoid of the present invention is completed. Among them, the three-dimensional circular solenoid 10a, the warped cantilever 18, 20, and the pins 2 2, 24 constitute a passive automatic combination method. The connecting posts 14 and 16 are used to connect the three-dimensional circular solenoid 10 and the cantilever 8 and 20. It can be known from the above process that in order to allow the cantilevers 18 and 20 to naturally warp, the present invention adopts a double-layer structure to make the cantilever. Through the two-layer metal structure of the cantilever 丨 8, 20, as long as the residual stress at the end of the process is different, the two can naturally form a kink structure after the end of the process, and then the plane spiral

540074 V. Description of the invention (9) The ring 10 lifts off the substrate and makes it spiral to form a three-dimensional circular solenoid 10 a. As for the height of the warpage, it can be adjusted by adjusting the component ratio of the double-layer metal structure of the cantilever 丨 8, 20. For example, the lower aluminum-copper alloy of cantilever 18, 20 is optional 0.8 micrometers, and the upper layer of chromium or nickel is 0.5 to 5 times the thickness of aluminum alloy. In the adjustable three-dimensional solenoid of the present invention, the adjustment method is adjusted by an actuator. "Figures 4A to 4B" illustrate the case of an actuator such as a thin second | full cantilever. ^ When the potential difference is applied to the upper electrode (cantilever 丨 8, 2) of the actuator > pole (bottom electrode 1 3, 1 5), the warped cantilever 丨 8, 2 〇 will be up and down Trend of exercise under power. As shown in "Figures 4A and 4B", when no or pressure is applied to the actuator, that is, a potential difference of two is applied to the cantilever 52 and the bottom electrode 5: such as "Figure 4A" and "Figure 4B" The electrostatic force is the same as that of ^, which makes the cantilever 52 warp upward to a degree that does not cause such warping. Please refer to "5A, 5B m &" for further details.

For the geometric relationship, when the cantilever 52, 54 moves upward, it stands 22. Since the distance between the solenoids is increased because the solenoid 10a is stretched outward, the shape of the solenoid is "L" at this time. ; When U moves, the three-dimensional circular solenoid 丨 〇a will be spaced inwardly and downwardly, as in the case of "Figure 5B", and at this time, the solenoid will be reduced to L0. The length of the line official will be as follows. By adjusting the length of the solenoid, the inductance value is shown in the formula: ㈢ 卩 在 之 _ 整 ， L = N2mA / 1

Page 13 540074 V. Description of the invention (ίο) The magnetic coefficient L is ί: 2 丄: the number of solenoids; m is the core's conductance; in addition, the cross-sectional area of the core is also used;] the length of the core. Party 3. f Germany, π will change the dynamic state to magnetic material, driven by magnetic force Η = 彳 can bring the cantilever 18, 20 and comb actuator or dr 1 ve to cause dynamic phase, shan a #right Actuating, extending these actuators will provide 218 directions of displacement movement with the elongation and compression of the solenoid pitch. [Effects of the invention] The vertical three-dimensional solenoid of β can be made into a polygon or a circle. == The process can use the negotiation process, and the latter process can produce complex effects. In addition, the present invention also has the following First of all, the adjustable three-dimensional screw of the present invention lifts off the substrate, so that the three-dimensional transmission through the two cantilever can increase the parasitic capacitance between the two. The distance between the spiral officer and the substrate is avoided. Second, the circular direction of the circle made by the invention is parallel to the substrate. Therefore, it is possible to reduce the energy loss due to the magnetic% of the magnetic field. The above two items are generated by generating an eddy current on the substrate < reducing the number of losses of the inductor so that it can be applied to high-frequency wireless communication. The quality of the k-direction inductor is third. The adjustable three-dimensional screw of the present invention is determined by the length of the cantilever, without the need for a thick photoresist, I, and the height being raised makes the process simpler. Fourth, the freezing-to-freeze aspect ratio electroplating process, fourthly, because the manufacturing process of the inductor and the radio frequency circuit of the present invention is the same,

$ 14 pages 540074 V. Description of the invention (11) Instead of the current external inductor, it can be integrated on a single chip to significantly reduce the area of the circuit board. Fifth, the adjustable three-dimensional solenoid of the present invention does not require additional active circuits, such as an amplifier (amp 1 ifier), a variable attenuator, and a variable phase shifter. Can greatly reduce the complexity of the circuit. Sixth, the adjustable three-dimensional solenoid of the present invention adjusts the inductance by changing the pitch of the solenoid, such square, noise, and dynamic range. The method will not change the phase of the original inductor. Seventh, the adjustable standing engraving 々 of the present invention changes at nearly equal distances, so the electricity & Finally, the work of the tunable capacitor in the tunable under-vibration circuit of the present invention can replace the current Lc, although the preferred implementation of the present invention: f shows the required resonance frequency. In order to limit the present invention, any person familiar with the subject is as described above, but it is not used within the spirit and scope. Those who can do something 蛰 shall be treated as described in this description without departing from the scope of patent protection of the present invention. Therefore, the present invention prevails. Defined in the scope of the attached patent application

540074 Brief Description of Drawings Figure 1 is the top view of the adjustable three-dimensional solenoid of the present invention after the previous process is completed, and Figures 2A to 2H are the sectional views of the process of the present invention; Figure 3 is the adjustable three-dimensional solenoid of the present invention Schematic diagram of the completed wire tube. Figures 4A ~ 4B are cross-sectional views of the adjustable three-dimensional solenoid of the present invention whose cantilever is adjusted by its power to warp; and Figures 5A ~ 5B are adjustable three-dimensional solenoids of the present invention. Sectional view of solenoid coil length (L) adjusted by power.

[Illustration of Symbols]

10 Flat solenoid 10a Three-dimensional circular solenoid 11 Dioxide layer 12 Substrate 13 Bottom electrode 14 Connection post 15 Bottom electrode 16 Connection post 18 Cantilever 20 Cantilever 22 Pin 24 Pin 26 Wire 28 Wire

Page 540 074

Page 17

Claims (1)

540074 6. Application scope 1. A method for manufacturing an adjustable three-dimensional solenoid, including the following steps: providing a pre-processed substrate; depositing a first insulating layer on the substrate; forming two on the first insulating layer Bottom electrodes; depositing a second insulating layer on the bottom electrode layer and the first insulating layer; forming an inductor coil on the second insulating layer, the inductor coil is made of a first metal and has a near center A first end and a second end located on the periphery; Depositing a first sacrificial layer on the inductor coil and the second insulating layer; engraving two connection post openings in the first sacrificial layer to expose the first end and the second end of the inductor coil; filling a A second metal is opened in the two connection pillars and covers the first end and the second end to form two connection pillars; a second sacrificial layer is deposited on the two connection pillars and the first sacrificial layer ; Engrave two first trenches (ΐrench) on the second sacrificial layer, each of the first trenches is located above the bottom electrode and its tail end is located on the two connection posts to expose the two connection posts ; Depositing a third metal on the two trenches to form two cantilevers; depositing a third sacrificial layer on the two cantilever arms and the second sacrificial layer; engraving two second trenches on the two cantilever arms Up to make the two hanging Page 18 VI. Application for Patent Scope The arm is exposed to deposit a fourth metal at the clinic to form two double-layer cantilever structures (2 two second grooves to connect with the two cantilever arms); and ^ layered suspended to remove the first First, the second rod > the circle, the two connecting posts and the third sacrificial layer to expose the inductance wire stress so that the two double-layered shields and the cantilever structure, and produce a residual 2. If you apply for a patent The range is warped. Method, wherein the first pass is deposited; ^ manufacturing of adjustable three-dimensional solenoid silicon. 2. The material of the second insulation layer is dioxide. 3. The method of ▲, as requested in the scope of the patent application, in which the first and second-generation cumulable three-dimensional solenoids are deposited. The material of the first and third sacrificial layers is 4. As in the method of the scope of patent application, the two three-dimensional solenoids (AlCu) are formed. -The material of the electrode is an aluminum-steel alloy. 5. If the method of the scope of the patent application, the first method, where the-all belongs to the system of τ 5 week three-dimensional solenoid = the scope of the patent application ^^ is ^ steel ^ small method Wherein, the manufacture of the second metal ϋ-type three-dimensional solenoid 7. If the scope of application for a patent] s is tungsten (w). Method 4 described in item 1 above, in which the manufacturing method (CVD) of the two connected pillars in the form of a χ 将 solenoid converts money into steps, which is based on the chemical #; Q, ^ tungsten Deposited on the two connected h-days to the lice phase 8. As the scope of the patent application for flute s U reverse connection opening. Adjustable limb solenoid system as described in Ji Yiwei brother 1 item 4 page 19 540074 Method 'wherein the third metal system is a copper alloy and the fourth metal system is nickel. '9 · The method for manufacturing an adjustable three-dimensional solenoid as described in item 丨 of the scope of patent application, wherein the third metal is an aluminum-copper alloy and the fourth metal is I 0 The manufacturing method of the adjustable three-dimensional solenoid described above, wherein the first, second, and third sacrificial layers are removed by a wet money engraving method. II · The manufacturing method of the adjustable three-dimensional solenoid as described in item 1 of the scope of the patent application, wherein the first, second, and third sacrificial layers are removed by using a reactive ion epitaxial technique (reactivei ο η, etching). 1 2. The method for manufacturing an adjustable three-dimensional solenoid as described in item 1 of the scope of the patent application, wherein the step of depositing the fourth metal is performed by depositing nickel on the second metal using an electroless plating technique. Trench. 1 3 · The method for manufacturing an adjustable three-dimensional solenoid as described in item 1 of the scope of patent application, wherein the step of depositing the fourth metal is to deposit chromium in the second trench using a metal sputtering process. groove. 1 4 · An adjustable three-dimensional solenoid comprising: a pre-treated substrate having an insulating layer thereon; 'two bi-lay e red suspended arms, each with a free end And a fixed end, the fixed end is fixed on the insulating layer of the substrate, and the two double-layer cantilever structures are composed of a first metal layer and a second metal layer located at the bottom; 540074 6. Scope of patent application ^ A solenoid formed of a third metal has two ends connected to the free ends of the two double-layer cantilever structures, respectively. The two double-layer cantilever structures connect the screw线 f 拓 _The substrate merges into a funky shape · and two bottom electrodes corresponding to the two double-layer cantilever structures are buried in the insulating layer to generate an electrostatic force to adjust the two double-layer cantilever structures Unlucky bend. Jade 5 • The adjustable three-dimensional solenoid as described in item 14 of the scope of patent application, wherein the material of the substrate is selected from silicon, germanium silicide and gallium arsenide ^ •. 16 · The adjustable three-dimensional solenoid as described in item 14 of the scope of patent application, wherein the material of the insulating layer is silicon dioxide. 17. The adjustable three-dimensional solenoid according to item 14 of the scope of patent application, wherein the electrostatic force source is a potential difference between the two double-layer cantilever structures and the two bottom electrodes. /, Μ 1 8 · The adjustable three-dimensional solenoid as described in item 14 of the scope of patent application, wherein the material of the "brother metal layer is a copper alloy and the material of the second metal ^ is brocade. 9 ^: The adjustable three-dimensional solenoid described in item 14 of the patent scope, wherein the material of the first metal layer is an aluminum-copper alloy and the material of the second M layer is chromium. The adjustable three-dimensional solenoid described in item 14 of the range, 2ΐ · such as ^ = The material of the two metal layer is aluminum copper alloy (AlCu). ^ The adjustable type described in item 14 of the range of fi For solid solenoids, the material used for the & pen connection is a copper alloy (A 1 Cu). Page 21 540074 6. Application for patent scope 2 2. Adjustable stereo as described in item 14 of patent scope The solenoid further includes two connecting posts for connecting the two double-layer cantilever structures and the solenoid. 2 3. The adjustable three-dimensional solenoid described in item 22 of the scope of patent application, The two connecting posts are made of a fourth metal. 2 4. The adjustable three-dimensional solenoid as described in item 23 of the scope of patent application The fourth metal system is a crane (W). 2 5. The adjustable three-dimensional solenoid as described in item 14 of the patent application scope, wherein the solenoid system is circular. 2 6. According to the patent application scope The adjustable three-dimensional solenoid according to item 14, wherein the solenoid is polygonal. Page 22