538206 五、發明說明（1 ) 【技術領域】 本發明係關於聯結器，尤其關於由於密合墊片之變形以 得到既定密封性。 【背景技術】 以往，作爲流體聯結器，已知有如第4圖所示者。於該 圖，環狀突起（41a)(42a)係設於對接面之第1及第2聯結 構件（4 1 )( 42 )，並經由密合墊片（43 )對接，藉栓緊螺接於 第1聯結構件（41)之杯形螺帽（cup nut)(44),密合墊片 (4 3 )就變形而可得到適當之密封力。（4 5 )係容易使杯形 螺帽（4 4 )迴轉之止推環（t h r u s t 1· i n g )。 於這種流體聯結器係決定由用手栓緊後之杯形螺帽（44 ) 之適當迴轉量，進行用手之預備栓緊與工模之正式栓緊以 便得到適當之密封力。又，爲了確保適當之密封力，計測 栓緊螺帽時之轉矩，而變成適當轉矩時就結束栓緊。 若依據以往之流體聯結器時，於實際之作業時，會發生 栓緊過頭之弊病，由於依作業者而發生偏差，即使，以爲守 住適當迴轉量或適當轉矩致使適當値之偏差變大，有脫離 適當栓緊度發生不良之問題。 本發明之目的，係提供一種不會發生栓緊過頭等栓緊不 良之流體聯結器。 【發明之揭示】 本發明之流體聯結器，係具有互相連通之流體通路之第 1及第2聯結構件，與位於兩聯結構件之對接兩端面間之 538206 五、發明說明（2) 圓環狀密合墊片，與連結兩聯結構件之螺絲裝置之流體耳緒 結器， 在各聯結構件Z對接辆面，設有圍住流體通路·且具^有底 面之環狀突起之環狀凹處，密合墊片係具有較環狀凹處之 直徑爲小之外徑部且位於兩聯結構件之突起間之密封部， 與具有可嵌合於環狀凹處之外徑且位於密封部外側之導 引部所成，適當栓緊時兩聯結構件之對接端面爲互相抵接 〇 若依據本發明之流體聯結器時，由於栓緊致使密合墊片 之密封部就變形而發生密封力，並且，藉持續栓緊，兩聯結 構件之對接端面就互相抵接，不能進行超過此之栓緊，不 僅防止栓緊過頭或栓緊不足。又，聯結構件之直徑方向之 偏移，將由導引部抑制於既定範圍。 密合墊片之密合部與導引部，既可成爲一體，但是，例如 由扣環連結成可分解較佳。亦即，在密封部之外周5受有运 狀溝，密合部與導引部爲由嵌合於此環狀溝之扣環連結較 佳。此時，使兩者之連結成爲牢固且使其可對於密封部之 導引部之徑方向之定位，在導引部內周也設有環狀溝較佳 〇 又，導引部係爲了使一方之聯結構件之環狀凹處無遊隙 互相嵌合之大徑部，他方之聯結構件之環狀:凹處鬆驰纟也互 相嵌合之小徑部所成之聯結構件較佳。這樣做時1 ’對於一 方之聯結構件之導引構件之徑方向之移動受到阻止’因對 538206 五、發明說明（3) 於導引構件之他方之聯結構件之徑方向之移動被抑制爲 既定範圍，所以可抑制位置偏移引起之密封性不良之發生 〇 爲了密合墊片不至於從聯結構件脫落，導引部爲由扣環 可分解地結合於聯結構件較佳。亦即，在導引部之大徑部 外周設有環狀溝，導引部與一方之聯結構件爲被嵌合於此 環狀溝之扣環所連結較佳。藉此，分解流體聯結器時，可 防止密合墊片冷不防地脫落。 【實施發明之最佳形態】 茲將本發明之實施形態，參照圖式說明如下。 本發明之流體聯結器，係具有：將2個聯結構件（1 )( 2 ) 流體互相密封地連結所用之構成，具有互相連通之流體通 路（1 a ) ( 2 a )之第1及第2之聯結構件（1 ) ( 2 )，與位於兩聯 結構件（1 )( 2 )之對接端面間之圓環狀密合墊片（1 0 )，與連 結兩聯結構件（1 )( 2 )之螺絲裝置（於此，雖然省略圖示，但 是使用例如第4圖所示構成等公知之手段）。 在第1聯結構件（1 )及第2聯結構件（2 )之各對接端面， 設有圍住流體通路（1 a ) ( 2a )開口之環狀凹處（3 ) ( 4 )，在各 凹處（3 ) ( 4 )底面，設有環狀突起（5 ) ( 6 )。 密合墊片（1 0 )係具有：位於兩聯結構件（3 )( 4 )之環狀突 起（5 ) ( 6 )間之環狀密封部（1 1 )，與在密封部（Π )外周安裝 扣環（13)之環狀導引部（12)。 密封部（1 1 )係不銹鋼製，具有與以往之密合墊片所具相 538206 五、發明說明（4) 同機能之部分，具有聯結構件（1 ) ( 2 )之環狀凹處（3 ) ( 4 )之 直徑較小外徑。兩聯結構件（3 ) ( 4 )之環狀突起（5 ) ( 6 )，係 被裝設成抵接於密封部（1 1 )之中間部分。 在密封部（1 1 )外周，設有嵌套扣環（1 3 )之環狀溝（1 4 )。 扣環（1 3 )係能夠具有彈性形成爲C狀，於自由狀態，其外 徑爲較導引部（1 2 )內徑爲大，藉向此扣環（1 3 )之徑方向擴 大之彈性力，來防止導引部（1 2 )從密封部（1 1 )脫落。環狀 溝（1 4 )之底面直徑，係較扣環（1 3 )之自由狀態之內徑爲小， 向扣環（1 3 )之徑方向內向之移動爲未被抑制。因此，導引 部（1 1 )與密封部（1 2 )，若從外未施加外力時，保持一體化 之狀態，藉施加較扣環（1 3 )之彈性力大的力量時，就可容 易分解。 導引部（1 2 )係不銹鋼製，在聯結構件（1 )( 2 )之環狀凹處 (3 )( 4 )之外徑，具有可嵌合於密封部（1 1 )外周之內徑。更 詳細係導引部（12)係與第1聯結構件（1)之環狀凹處（3) 無遊隙互相嵌合之大徑部（12a)，第2聯結構件（2)之環狀 凹處（4 )係由鬆驰嵌合之小徑部（1 2b )所構成。在大徑部 (1 2 a )外周設有嵌套扣環（1 5 )之環狀溝（1 6 )。扣環（1 5 )係 能夠具有彈性形成爲C狀，在自由狀態，其外徑係依照第1 聯結構件（1 )之環狀凹處（3 )之直徑較導引部（1 2 )之大徑 部（1 2 a )之外徑爲大，如第1圖所示，從導引部（1 2 )之大徑 部（1 1 a )向外方露出。並且，由欲向此扣環（1 5 )之徑方向 擴大時之彈性力，導引部（1 2 )爲保持於第1聯結構件（1 ) 538206 五、發明說明（5) 。環狀溝（1 6 )之底面徑，係較扣環（1 5 )之自由狀態內徑爲 小，向扣環（1 5 )之徑方向內方之移動爲未被抑制。因此， 分解聯結構件（1 )( 2 )時，從外未施加力量之期間，防止從 密合墊片（1 0 )之第1聯結構件（1 )脫落，藉施加較扣環（1 5 ) 之彈性力爲大的力量時，就可以些許力量’密合墊片（1 0 ) 就可從第1聯結構件（1 )取下。 在導引部（1 2 )內周，設有V字狀之淺溝（1 7 )’用以收容 將密封部（1 1 )與導引部（1 2 ) —體化之扣環（1 3 )外周部。 藉此，使導引部（1 2 )不容易從密封部（1 1 )脫落，並且，保證 對於密封部（1 1 )之導引部（1 2)之徑方向之定位。 第2圖係表示依據本發明之流體聯結器用手栓緊狀態 。於該圖，對於密合墊片（1 〇 )之密封部（1 1 )之全寬加上兩 聯結構件（1 ) ( 2 )之環狀突起（3 ) ( 4 )高度之値，係較將兩聯 結構件（1 ) ( 2 )之凹處（3 ) ( 4 )合起來之値稍大。因此，在兩 聯結構件（1 ) ( 2 )之對接端面（無凹處（3 ) ( 4 )之處）間，形成 有間隙（G )。 第3圖係表示依據本發明之流體聯結器栓緊成適當狀 態。於該圖，在第2圖之手栓緊狀態存在之間隙（G ),係剛 好成爲零。亦即，依據本發明之流體聯結器，係於手栓緊 狀態之兩聯結構件（1 )( 2 )之對接端面間之間隙（G)爲等於 適當栓緊量，使適當栓緊時兩聯結構件（1 )( 2 )之對接端面 互相能夠抵接。因此，使用工模進行栓緊時，首先，密合墊 片（1 0 )之密封部（1 1 )就變形發生密封力，並且，藉持續栓 538206 五、發明說明（6) 緊，兩兩聯結構件（1 )( 2 )之對接端面就抵接，不能超此之 栓緊，也可防止栓緊過頭或栓緊不足之情形發生。 按，於第2圖，第2聯結構件（2 )係並非導引部（1 2 )之大 徑部（1 2 a )而是小徑部（1 2b )嵌合之部分，可能稍爲向徑方 向偏移。然而，兩聯結構件（3 ) ( 4 )之環狀突起（5 ) ( 6 )，由 於使其抵接於密封部（1 1 )之中間部分，所以，這種程度之 偏移，環狀突起（5 )( 6 )不會從密封部（1 1 )脫落，完全不會 發生密封性降低等之問題。 【產業上之利用可能性】 依據本發明之流體聯結器，係例如於半導體製造裝置之 流體控制裝置，適合使用於將流體控制機器互相成流體密 地連結時之聯結器。 圖式之簡單說明 第1圖係表示依據本發明之流體聯結器之密合墊片之 圖。 第2圖係表示依據本發明之流體聯結器之縱剖面圖，表 示用手栓緊狀態之圖。 第3圖係係表示依據本發明之流體聯結器之縱剖面圖， 表示栓緊完成狀態之圖。 第4圖係表示習知流體聯結器之縱剖面圖。 元件符號對照表 2 聯結器構件 538206 五、發明說明（7) 1 a , 2 a 流體通路 3,4 環狀凹處 5,6 環狀突起 10 圓環狀密合墊片 11 密封部 12 環狀導引部 12a 大徑部 12b 小徑部 13,15 扣環 14,16 環狀溝 17 V字狀淺溝538206 V. Description of the invention (1) [Technical Field] The present invention relates to a coupling, and more particularly to obtaining a predetermined tightness due to the deformation of a close gasket. BACKGROUND ART Conventionally, as a fluid coupling, one shown in FIG. 4 is known. In this figure, the ring-shaped protrusions (41a) (42a) are provided on the first and second joint structural members (4 1) (42) of the abutting surface, and are docked through the close gasket (43), and the bolts are tightened by bolts. The cup nut (44) connected to the first structural member (41), the tight gasket (4 3) can be deformed to obtain an appropriate sealing force. (4 5) is a thrust ring (t h r u s t 1 · i n g) which is easy to turn the cup nut (4 4). In this fluid coupling, the proper amount of rotation of the cup nut (44) after being tightened by hand is determined, and the preliminary tightening by hand and the formal tightening of the mold are performed to obtain an appropriate sealing force. In addition, in order to ensure an appropriate sealing force, the torque at the time of tightening the nut is measured, and when the torque becomes an appropriate torque, the tightening is terminated. If the conventional fluid coupler is used, the problem of over-tightening will occur during actual operation, and the deviation will depend on the operator. Even if the proper rotation amount or torque is maintained, the deviation of the proper pressure will increase. There is a problem of detachment from proper tightening. It is an object of the present invention to provide a fluid coupling which does not cause over-tightening. [Disclosure of the invention] The fluid coupling of the present invention is the first and second structural members with fluid passages communicating with each other, and 538206 located between the two ends of the butt jointed structural members. 5. Description of the invention (2) Circle A ring-shaped close gasket, a fluid ear knot with a screw device connecting the two structural members, butt jointed with the structural surface Z of each structural member, is provided with a ring-shaped protrusion surrounding the fluid passage and having a bottom surface. The annular recess, the close gasket is a sealing portion having a smaller outer diameter portion than the annular recess and located between the protrusions of the two structural members, and has an outer diameter that can be fitted into the annular recess. It is formed by the guide part located outside the sealing part. When the bolts are properly bolted, the butt end faces of the two structural members are in abutment with each other. If the fluid coupling according to the present invention is used, the sealing part of the tight gasket is closed due to the bolt tightness The sealing force is generated due to deformation, and by continuous bolting, the butt end faces of the two structural members abut against each other, and the bolting beyond this cannot be prevented, which not only prevents the bolt from being over-tightened or insufficiently bolted. In addition, deviations in the diameter direction of the link structure will be suppressed by the guide portion to a predetermined range. The sealing portion and the guide portion of the sealing gasket may be integrated, but, for example, it is preferable that they are disassembled by being connected by a buckle. In other words, a transport groove is received on the outer periphery 5 of the sealing portion, and the sealing portion and the guide portion are preferably connected by a buckle fitted in the annular groove. At this time, it is better to make the connection between the two and to position it in the radial direction of the guide portion of the seal portion. It is also preferable to provide an annular groove on the inner periphery of the guide portion. The ring-shaped recesses of the interconnected structural parts are large-diameter parts that are fitted to each other without play, and the loop-shaped parts of the other-connected structural parts are better: the joints formed by the small-diameter parts that are loosely recessed and also fit into each other . In doing so, 1 'The movement in the radial direction of the guide member of one connected structural member is blocked' because of the 538206 V. Description of the invention (3) The movement in the radial direction of the other connected structural member of the guide member is suppressed It is a predetermined range, so the occurrence of poor sealing due to position shift can be suppressed. In order to prevent the gasket from falling off from the joint structure, it is preferable that the guide portion is detachably coupled to the joint structure by a buckle. That is, an annular groove is provided on the outer periphery of the large-diameter portion of the guide portion, and the associated structural member of the guide portion and one side is preferably connected by a retaining ring fitted into the annular groove. Thereby, when the fluid coupling is disassembled, the sealing gasket can be prevented from falling off coldly. [Best Mode for Carrying Out the Invention] An embodiment of the present invention will be described below with reference to the drawings. The fluid coupler according to the present invention has the first and the first components of the two coupling structural members (1) (2) which are used to fluidly connect to each other, and has fluid passages (1a) (2a) which communicate with each other. 2 joint structure (1) (2), and a ring-shaped close gasket (1 0) between the butt end faces of the two joint structure (1) (2), and the two joint structure (1) (2) a screw device (here, although not shown, a known means such as the structure shown in FIG. 4 is used). An annular recess (3) (4) surrounding the opening of the fluid passage (1a) (2a) is provided on each of the butt end faces of the first structural member (1) and the second structural member (2). The bottom surface of each recess (3) (4) is provided with a ring-shaped protrusion (5) (6). The sealing gasket (1 0) has a ring-shaped sealing portion (1 1) located between the ring-shaped protrusions (5) (6) of the two-piece structural member (3) (4), and the sealing portion (Π). An annular guide portion (12) of a retaining ring (13) is mounted on the outer periphery. The sealing part (1 1) is made of stainless steel, and has the same characteristics as the conventional close gasket. 538206 V. Description of the invention (4) The part with the same function, has a ring-shaped recess (1) (2) 3) The diameter of (4) is smaller than the outer diameter. The ring-shaped protrusions (5) (6) of the two-piece structural member (3) (4) are arranged to abut against the middle portion of the sealing portion (1 1). An annular groove (1 4) with a nested buckle (1 3) is provided on the outer periphery of the sealing portion (1 1). The buckle (1 3) can be formed into a C shape with elasticity. In a free state, its outer diameter is larger than the inner diameter of the guide portion (1 2). The elastic force prevents the guide portion (1 2) from falling off from the sealing portion (1 1). The diameter of the bottom surface of the annular groove (1 4) is smaller than the inner diameter of the free state of the retaining ring (1 3), and the inward movement toward the diameter direction of the retaining ring (1 3) is not suppressed. Therefore, if the guide part (1 1) and the seal part (1 2) are kept in an integrated state when no external force is applied from outside, it is possible to apply a force greater than the elastic force of the buckle (1 3). Easy to decompose. The guide part (1 2) is made of stainless steel, and has an outer diameter at the annular recess (3) (4) of the joint structure (1) (2), and can be fitted into the outer periphery of the seal part (1 1). path. In more detail, the guide portion (12) is a ring-shaped recess (3) of the first joint structure (1), and the large-diameter portion (12a) which is fitted to each other without play, and the second joint structure (2) The annular recess (4) is formed by a loosely fitted small diameter portion (12b). An annular groove (1 6) with a nested buckle (1 5) is provided on the outer periphery of the large-diameter portion (1 2 a). The buckle (1 5) can be formed into a C shape with elasticity. In a free state, its outer diameter is in accordance with the diameter of the annular recess (3) of the first structural member (1) than the guide portion (1 2). The outer diameter of the large-diameter portion (1 2 a) is large. As shown in FIG. 1, the large-diameter portion (1 1 a) of the guide portion (1 2) is exposed outward. In addition, due to the elastic force when expanding in the radial direction of the buckle (1 5), the guide portion (1 2) is held by the first link structural member (1) 538206. 5. Description of the invention (5). The diameter of the bottom surface of the annular groove (16) is smaller than the free state inner diameter of the retaining ring (15), and the movement inward of the diameter of the retaining ring (15) is not suppressed. Therefore, when the joint structure (1) (2) is disassembled, the first joint structure (1) of the close gasket (1 0) is prevented from falling off during a period when no force is applied from the outside. 5) When the elastic force is a large force, a small amount of force can be used to close the gasket (1 0) from the first joint structure (1). On the inner periphery of the guide portion (12), a V-shaped shallow groove (1 7) 'is provided to accommodate the sealing portion (1 1) and the guide portion (1 2)-a buckling ring (1) 3) The outer periphery. Thereby, the guide portion (1 2) is prevented from falling off from the seal portion (1 1) easily, and the positioning in the radial direction of the guide portion (12) of the seal portion (1 1) is ensured. Fig. 2 shows a state where the fluid coupling according to the present invention is fastened by hand. In this figure, the full width of the sealing part (1 1) of the close gasket (10) plus the height of the ring-shaped protrusions (3) (4) of the two-piece structure (1) (2) is It is slightly larger than the sum of the recesses (3) (4) of the two-piece structural members (1) (2). Therefore, a gap (G) is formed between the butt end faces (where there are no recesses (3) (4)) of the two structural members (1) (2). Fig. 3 shows the fluid coupling according to the present invention bolted into a proper state. In this figure, the gap (G) existing in the hand-tightened state of Figure 2 is just zero. That is, according to the fluid coupling of the present invention, the gap (G) between the butt end faces of the two coupling structural members (1) (2) in the hand-tightened state is equal to the proper tightening amount, so that The butt end faces of the connecting structural members (1) (2) can abut each other. Therefore, when using a mold for tightening, first, the sealing portion (1 1) of the close gasket (1 0) is deformed to produce a sealing force, and by continuing the bolt 538206 5. Invention Description (6) Tight, two two The butt end faces of the connecting structural parts (1) (2) are abutted, and the bolts cannot be tightened beyond this, and the situation of over-tightening or insufficient under-tightening can also be prevented. According to Figure 2, the second structural member (2) is not the large-diameter portion (12a) of the guide portion (12) but the small-diameter portion (12b) is fitted. It may be slightly Offset in the radial direction. However, since the ring-shaped protrusions (5) (6) of the two-piece structural member (3) (4) abut against the middle portion of the sealing portion (1 1), this degree of deviation, ring-shaped The protrusions (5) and (6) do not fall off from the sealing portion (1 1), and problems such as a decrease in sealing performance do not occur at all. [Industrial Applicability] The fluid coupling according to the present invention is, for example, a fluid control device for a semiconductor manufacturing apparatus, and is suitable for use when coupling fluid control devices to each other in a fluid-tight manner. Brief Description of the Drawings Fig. 1 is a view showing a close gasket of a fluid coupling according to the present invention. Fig. 2 is a longitudinal sectional view showing a fluid coupling according to the present invention, showing a state of being fastened by hand. Fig. 3 is a longitudinal sectional view showing a fluid coupling according to the present invention, and a diagram showing a state in which the bolt is tightened. Fig. 4 is a longitudinal sectional view showing a conventional fluid coupling. Component symbol comparison table 2 Coupling member 538206 V. Description of the invention (7) 1 a, 2 a Fluid passage 3, 4 Annular recess 5, 6, Annular protrusion 10 Annular close gasket 11 Sealing portion 12 Annular Guide 12a Large-diameter portion 12b Small-diameter portion 13,15 Buckle ring 14,16 Ring groove 17 V-shaped shallow groove