533469 五、發明說明(1) 本發明係有關於一種機台性能追蹤系統及方法,特別 有關於一種標準化機台性能追蹤系統,可更有效率地加入 新分析模組並進行不同機台間之性能比較。 機台性此追蹤平台系統(T〇〇i perf〇rmance Plat form)係用以在半導體製程中,透過SECS通訊協定格 式之訊息傳送,來監控及收集製造機台之執行動作及晶°圓 流向之相關資訊,並提供分析模組(analysis m〇dul曰曰以 找出效率較差之機台動作及流程。 第1圖顯示了一傳統機台性能追蹤系統。此處以二 機台為例,每一機台n、12、13各具有其專用之分析模组 U1、121、131、分析規則資料112、122、132及、寺1生,所 資料113、m、133。同時,針對每一機台n、12 t貝 亦需提供其專用之訊息格式分析工 parser)114、124、134,以提供分析模組^、丨533469 V. Description of the invention (1) The present invention relates to a machine performance tracking system and method, and in particular to a standardized machine performance tracking system, which can more efficiently add a new analysis module and perform analysis between different machines. Performance comparison. Machine performance This tracking platform system (T〇〇i perf〇rmance Plat form) is used to monitor and collect the manufacturing machine's execution actions and crystal flow direction in the semiconductor process through message transmission in the form of the SECS communication protocol. Relevant information, and provide an analysis module (analysis m〇dul) to find out the less efficient machine action and flow. Figure 1 shows a traditional machine performance tracking system. Here two machines as an example, each Each machine n, 12, 13 has its own dedicated analysis modules U1, 121, 131, analysis rule data 112, 122, 132, and Temple 1 students, data 113, m, 133. At the same time, for each machine Taiwan, 12 t also need to provide its dedicated message format parser) 114, 124, 134 to provide analysis modules ^, 丨
可分析之輸入資料。 1W :而’在傳統機台性能追蹤系統中,由於每 需有專用之分析模組進行性能分析, 々二: 或是分=組增加日寺,就必需重新建立一套新的2:力: 系統,Η需耗費大量時間與人力進行H 統間之差異增加了系統維護及更新之因難度 千:糸 於各平台糸統係獨立存在,盆八4 、 亦由 各機台間無法進行性能之比較:、、、°果沒有標準化’使得 為了解決上述問題,本發明 追蹤系統’可更有效率地加入新::J化機台性能 刀析杈組亚進仃不同機台Input data that can be analyzed. 1W: And 'In the traditional machine performance tracking system, since every dedicated analysis module is needed for performance analysis, 々2: Or if the number of groups is increased to increase the number of day temples, a new set of 2: force must be re-established: The system does not need to spend a lot of time with human labor. The difference between the systems increases the difficulty of system maintenance and update. Thousands: It exists independently on each platform. The system is independent, and the performance cannot be performed by each machine. Comparison: ",,, and ° are not standardized," so that in order to solve the above-mentioned problems, the tracking system of the present invention can be more efficiently added to the new :: J machine tool performance analysis group sub-machines into different machines
0503-7275TWF(N) ; TSMC2001·1213 ; Vincent.ptd 533469 五、發明說明(2) 間之性能比較 本發明之一目的在、曰 系統’用以分析複數機^:種,準化之機台性能 f自每-機台產生之訊括:-訊息轉譯;% 斋,接收該些標準訊息而產生二橾=訊息;—資料伺服 儲存該原始資料表、—纟且能,、始貢料表;—資料庫, 具有-資料分析器及分析及;=表;-作業平台, 資料表而產生該總結表, 八该-貝料分析器讀取該原始 表、組態表及總結表進行哕::ϊ :莫組使用該原始資料 本發明之另-目的台性能之分析。 蹤方法’用以分析複數機台之性.t種$:化之機台性能追 息而產生一原始資;;:澤! 一標準訊息"妾收該些標準訊 原始資料表、總結表及-組態* ;以及使;; 貝表、組態表及總結表進行該些機台性能之分析。 本發明利用標準化之平台系統,使機台::之 U示準化’並建立標準之組態表資料,使分析模組續取 標準化訊息並使用組態表進行分析動#,如此便由组 態表之增加或更新來完成分析模組之新增與更新動^ .同 時,由於資料之標準化,使得各機台性能之分析亦 以相互比較。 $ w j 實施例 第2圖顯示本發明一實施例中標準化之機台性能追蹤0503-7275TWF (N); TSMC2001 · 1213; Vincent.ptd 533469 V. Comparison of performance between inventions (2) One of the purposes of the present invention is to use the system to analyze plural machines ^: a kind of standardized machine The performance f includes the information generated by each machine:-message translation;% fast, receiving these standard messages and generating two 橾 = messages;-data servo storage of the original data table,-and can, and starting materials list ——- Data base with -Data analyzer and analysis and == table; -Operating platform, data table to generate the summary table, and the -shell material analyzer reads the original table, configuration table and summary table :: ϊ: Mo group uses the original data to analyze the performance of the present invention. Tracking method ’is used to analyze the properties of multiple machines. The t: $: chemical performance tracking of the machine generates an original capital;;: Ze! A standard message " receives the standard information original data table, summary table and-configuration *; and use ;; shell table, configuration table and summary table to analyze the performance of these machines. The present invention utilizes a standardized platform system to standardize the machine: and establish standard configuration table data, so that the analysis module continues to obtain standardized information and uses the configuration table for analysis. The addition or update of the table completes the addition and update of the analysis module ^ At the same time, due to the standardization of the data, the performance analysis of each machine is also compared with each other. $ w j Embodiment Figure 2 shows the performance tracking of a standardized machine in an embodiment of the present invention.
0503-7275TWF(N) · TSMC2001-1213 ; Vincent.ptd 第5頁 533469 五、發明說明(3) 系統。此處以二個機台2 1、2 2、2 3及三種分析模組2 4 a、 2 4 b、2 4 c為例。標準化之機台性能追蹤系統包括一訊息轉 換器2 5、資料伺服器2 6、資料庫2 7、作業平台2 8。訊息轉 譯器2 5,將自每一機台2 1、2 2、2 3經由S E C S傳送之訊息轉 譯為一標準訊息。資料伺服器2 6接收該些標準訊息而產生 一原始資料表271。資料庫27則儲存原始資料表(raw data table)271、組態表(configuration table) 272 及總結表 (summary table )273。作業平台28具有一資料分析器281 及分析模組24a、24b、24c。資料分析器281自資料庫27讀 取原始資料表2 7 1而產生總結表2 7 3,並存回資料庫2 7。分 析模組24a、24b、24c使用原始資料表271、組態“表27ι及 總結表2 7 3進行機台2 1、2 2、2 3性能之分析。 在上述之標準化機台性能追蹤系統中,標準訊息之格 式包括機台識別碼、箱爐群組名稱、箱爐識別碼、事件狀 態、事件資料時間、批號識別碼、製程參數識別碼及晶圓 識別碼。組態表272則使用了 「單元(箱爐)群組」(unit group)之概念,定義了單元組成、處理及等待時間計算規 則、00S檢查規則與範圍、以及晶圓處理速度(WPH)之總結 規則。此外’分析模組2 4 a、2 4 b、2 4 c可以是版頸及處理 速度分析模組、最高處理速度(Peak WPH)分析模組或是批 號資料(Lot Detail)分析模組。 本實施例之標準化機台性能追蹤系統可以在新增分析 模組時,將系統更新所需之時間由傳統系統的二個月縮短 為一週,任何新的分析模組亦可輕易地加入此平台中。系0503-7275TWF (N) · TSMC2001-1213; Vincent.ptd Page 5 533469 5. Description of the invention (3) System. Here take two machines 2 1, 2 2, 2 3 and three analysis modules 2 4 a, 2 4 b, 2 4 c as examples. The standardized machine performance tracking system includes a message converter 2 5, a data server 2 6, a database 2 7, and an operating platform 2 8. The message translator 25 converts the messages transmitted from each machine 21, 2, 2, and 3 through S EC C into a standard message. The data server 26 receives the standard messages and generates an original data table 271. The database 27 stores a raw data table 271, a configuration table 272, and a summary table 273. The operation platform 28 has a data analyzer 281 and analysis modules 24a, 24b, 24c. The data analyzer 281 reads the original data table 2 7 1 from the database 27, generates a summary table 2 7 3, and stores it back to the database 27. The analysis modules 24a, 24b, and 24c use the original data table 271, the configuration "table 27m, and the summary table 2 7 3 to analyze the performance of machine 2 1, 2 2, 2 3. In the above-mentioned standardized machine performance tracking system The standard message format includes machine identification code, box furnace group name, box furnace identification code, event status, event data time, batch number identification code, process parameter identification code, and wafer identification code. Configuration table 272 uses The concept of "unit (box furnace) group" (unit group) defines the unit composition, processing and waiting time calculation rules, 00S inspection rules and scope, and wafer processing speed (WPH) summary rules. In addition, the analysis module 2 4 a, 2 4 b, 2 4 c can be a neck and processing speed analysis module, a peak processing speed (Peak WPH) analysis module, or a lot detail analysis module. The standardized machine performance tracking system of this embodiment can reduce the time required for system update from two months to one week for a traditional system when adding an analysis module. Any new analysis module can also be easily added to this platform. in. system
0503-7275TWF(N) ; TSMC200M213 ; Vincent.ptd 533469 五、 發明說明(4) 統 之 維 護 及 更 新 遠較 傳 統 系 統容易 〇 同時 ,由 於 使 用 同 平 台 各 種 機 台 間之 分 析 結 果可以 進 行比 輕0 第 3圖顯示本發明- 只加例中標準化之機台性能追蹤 方 法 流 程 圖 〇 首 先 在 步 驟31 中 將 白每*一 機 台經 由 SECS 通 訊 協 定 傳 送 之 訊 息 轉 譯 為一 標 準 訊 息。 缺 後 在 步 驟3 2 中 , 接 收該些 標 準訊 息而 產 生 _一 原 始 資 料 表 〇 接 著 1 在 步 驟33 中 , 讀 取原始 資 料表 進行 資 料 分 析 而 產 生 —— 總 結 表 〇 再 者 在 步 驟34 中 儲 存原始 資 料表 、總 結 表 及 組 態 表 〇 組 態 表 使 用了 厂 單 元 (箱爐) 群 組」 之概 念 定 義 了 單 元 組 成 處 理 及等 待 時 間 計算規 則 、00S檢查規則與範 圍 、 以 及 晶 圓 處 理速 度(WPH)之總結規貝,j c > 最 後 在 步 驟3 5 中 使 用該原 始 資料 表、 組 態 表 及 總 結 表 進 行 該 些 機 台性 能 之 分 析。 在 上 述 之 標 準化 之 機 台 性能追 蹤 方法 中, 可 以 使 用 該 原 始 資 料 表 組 態表 及 總 結 表進行 該 些機 台性 能 之 瓶 頸 及 處 理 速 度 分 析 最高 處 理 速 度(Peak WPH) 分析 或 是 批 號 資 料(Lot De t ail) 分析 〇 綜 合 上 述 本發 明 提 供 一種標 準 化機 台性 能 追 蹤 系 統 1 使 機 台 送 出 之訊 息 標 準 化,並 建 立標 準之 組 態 表 資 料 使 分 析 模 組 讀取 標 準 化 訊息並 使 用組 態表 進 行 分 析 動 作 如 此 便 可 藉 由組 態 表 之 增加或 更 新來 完成 分 析 模 組 之0503-7275TWF (N); TSMC200M213; Vincent.ptd 533469 V. Description of the invention (4) Maintenance and update of the system are much easier than traditional systems. At the same time, the analysis results between various machines on the same platform can be lighter than the first. Fig. 3 shows a flowchart of a method for tracking performance of a standardized machine in the present invention-only example. First, in step 31, a message transmitted by a machine via the SECS protocol is translated into a standard message. After the absence, in step 32, the standard information is received to generate an original data table. Then, in step 33, the original data table is read for data analysis and generated. The summary table is stored in step 34. The original data table, summary table and configuration table. The configuration table uses the concept of factory unit (box furnace) group. It defines the unit composition processing and waiting time calculation rules, 00S inspection rules and scope, and wafer processing speed ( WPH) summary rules, jc > Finally, in step 3 5 use the original data table, configuration table and summary table to analyze the performance of the machines. In the above-mentioned standardized machine performance tracking method, the original data table configuration table and summary table can be used to perform bottleneck analysis and processing speed analysis of the performance of these machines. Peak WPH analysis or batch number data (Lot De t ail) analysis. Comprehensively, the present invention provides a standardized machine performance tracking system 1 to standardize the information sent by the machine, and establish standard configuration table data so that the analysis module reads the standardized information and uses the configuration table for analysis. In this way, the analysis module can be completed by adding or updating the configuration table.
0503-7275TWF(N) · TSMC2001 -1213 ; Vincent.ptd 第7頁 533469 五、發明說明(5) 新增與更新動作;同時,由於資料之標準化,使得各機台 性能之分析結果亦可以相互比較。如此便可更有效率地在 機台性能追蹤系統中加入新分析模組並進行不同機台間之 性能比較。 雖然本發明已以一較佳實施例揭露如上,然其並非用 以限定本發明,任何熟習此技藝者,在不脫離本發明之精 神和範圍内,當可作些許之更動與潤飾,因此本發明之保 護範圍當視後附之申請專利範圍所界定者為準。0503-7275TWF (N) · TSMC2001 -1213; Vincent.ptd Page 7 533469 V. Description of the invention (5) New and updated actions; At the same time, due to the standardization of the data, the analysis results of the performance of each machine can also be compared with each other . In this way, a new analysis module can be added to the machine performance tracking system more efficiently and the performance comparison between different machines can be performed. Although the present invention has been disclosed as above with a preferred embodiment, it is not intended to limit the present invention. Any person skilled in the art can make some modifications and retouching without departing from the spirit and scope of the present invention. The scope of protection of the invention shall be determined by the scope of the attached patent application.
0503-7275TWF(N) ; TSMC2001-1213 ; Vincent.ptd 第8頁 533469 圖式簡單說明 以下,就圖式說明本發明之一種標準化之機台性能追 蹤系統與方法實施例。 圖式簡單說明 第1圖顯示一傳統機台性能追蹤系統; 第2圖顯示本發明一實施例中標準化之機台性能追蹤 糸統, 第3圖顯示本發明一實施例中標準化之機台性能追蹤 方法流程圖。 [符號說明] 11、12、13、21、22、23〜機台; I 11、121、131、24a、24b、2 4c〜分析模組; II 2、1 2 2、1 3 2〜分析規則資料; 11 3、1 2 3、1 3 3〜特殊性質資料; 1 14、124、134〜訊息格式分析工具; 2 5〜訊息轉換器; 2 6〜資料伺服器; 2 7〜資料庫; 2 71〜原始資料表; 2 7 2〜組態表; 2 7 3〜總結表; 28〜作業平台。0503-7275TWF (N); TSMC2001-1213; Vincent.ptd Page 8 533469 Brief description of the drawings In the following, an embodiment of a standardized machine performance tracking system and method of the present invention will be described with reference to the drawings. Brief Description of the Drawings Figure 1 shows a conventional machine performance tracking system; Figure 2 shows a standardized machine performance tracking system in an embodiment of the invention; Figure 3 shows a standardized machine performance in an embodiment of the invention Flow chart of tracking method. [Symbol description] 11, 12, 13, 21, 22, 23 ~ machines; I 11, 121, 131, 24a, 24b, 2 4c ~ analysis modules; II 2, 1 2 2, 1 3 2 ~ analysis rules Data; 11 3, 1 2 3, 1 3 3 ~ special nature data; 1 14, 124, 134 ~ message format analysis tool; 2 5 ~ message converter; 2 6 ~ data server; 2 7 ~ database; 2 71 ~ original data sheet; 2 7 2 ~ configuration table; 2 7 3 ~ summary table; 28 ~ work platform.
0503-7275TWF(N) ; TSMC2001-1213 ; Vincent.ptd 第9頁0503-7275TWF (N); TSMC2001-1213; Vincent.ptd page 9