TW533112B - System for cleaning heating chamber - Google Patents

Abstract

A system for cleaning a heating chamber comprises installing an air pipe in the heating chamber. The air pipe is installed along the inner wall of the heating chamber in order to use the heat of the heating chamber to heat up the air for cleaning and flowing in the air pipe. The air pipe is connected to a nozzle installed corresponding to a heating plate so that the air for cleaning and flowing in the air pipe is heated by the heat source of the heating chamber, so that the air ejected from the nozzle will not cause a deformation on the heating plate due to a temperature difference.

Description

533112 V. Description of the invention (1) Knowing: 'In the industrial gas industry,' Wu Nanwen heating ★ Wuhe is often seen, that is, for the glass substrate coating operation of the display device, it must also be carried out through high temperature method '. In other industries, there are no shortage of occasions to work under high temperature environment. Taking the process of the TFT-LCD industry as an example, the coating of glass substrates in the plasma enhanced chemical vapor deposition (PECVD) process is taken as an example. Before the glass substrates are coated in the process chamber, they must be coated. Preheating is performed in a heat chamber, and the preheating temperature is controlled within a certain range, for example, 2 50 ~ 300. (: The staying time is about j ~ 20 minutes. In order to obtain the heat source, as shown in Figure 1, it is a cross-sectional view of a conventional heating chamber, which uses the inside of a metal cassette A (ffletai cassette). Several layers of heating sheets are heaters, and the glass substrate is placed between the layers of heating plates in the metal sheet EA for pre-heating; as the glass substrate is preheated in and out of the heating chamber, it is caused by the rise of the metal sheet box A or It is lowered and then sent in or out by a robot, which causes the glass substrate to vibrate and cause particle issues. Therefore, after preheating and removing the glass substrate, the heating chamber must be purified. The heating chamber is known as The purifying action is to input nitrogen (N2) into the heating chamber, and the temperature of the nitrogen is much lower than the preheating temperature of the heating chamber, and the temperature is, for example, 20 ° C. Therefore, if nitrogen is suddenly input to purify the heating chamber, However, because the temperature difference is too large, the heating plate will be instantly cooled, which will cause the material to deform and cause the life of the heating plate to be damaged. Therefore, in order to make the temperature difference not too large, the conventional method is to stop and take After coming out of the glass substrate, wait for a period of time for natural cooling. After cooling down, input nitrogen to purify it. The nitrogen system is

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V. Description of the invention (2) tm '^: input at the side input port b, and nitrogen is input: when the internal amount is too large, you must open the upper cover of the heating chamber to clear the heating skin type: ^ if the lack is here The standby time puts the heating chamber in the midsummer state, which naturally reduces the effective utilization of the heating chamber. In view of this cat: Please Renaiben has been engaged in process research and development and design for many years ϊ ::: Concentrated? In order to overcome the above-mentioned shortcomings, after repeated exploration, the "heating room purification system" in this case was made. Firstly, please refer to FIG. 1. This is a formula for further revealing the specific technical content of the case. Among them, FIG. 1 is a conventional sectional view of a heating chamber. FIG. 3 is a schematic diagram of the purification of the case. The gas pipe is connected to the bellows chamber with a conventional pipe, a bell jar, and the pipe goes up to the top along the inner wall of the bell jar, for example, by means of a screw ^. This is a heated gas pipe; The top end is connected to the spray s path, so that the position of the purified gas outlet is respectively aligned with the inlet of each slot of the metal sheet cassette. In order to improve the efficiency of purification, the number of nozzles at the outlet end can be added to several, and The nozzle is modified into a cone shape to increase the secondary flow rate and improve the dust purification effect. For example, when the inlet purification gas spirals around the inner wall of the bell-shaped cover, the heating plate heat source is used to heat the temperature of the purification gas, so that the temperature difference between the purification gas and the heating plate will not be too large, which will cause the deformation of the heating plate. The system performs cycle purge at high temperatures. The invention of the present invention can improve the heating chamber purification in the conventional technology. There is only one gas pipe inlet at the center of the heating chamber, which has a misaligned metal cassette.

IH1 Page 5 533112 V. Description of the invention (3) The present bucket & sigh meter at the entrance of the slot not only has the disadvantages of cyclic purification (cl η is poor) and waste of purified gas. With this effect, the purified gas can be used directly To remove the power from the heating plate, perform the cycle purification of the uranium rod box in the (CyCle P㈣e) main heating chamber to prevent the short cooling time. In the improved conventional technology, when the lamp is required to prevent the maintenance, it is necessary to When opening the heating chamber, it is necessary to prevent the maintenance time (PM) and the machine from the west. The main purpose of wasting the invention is to use the processing chamber itself to increase the temperature of the purified gas. The temperature of the self-nozzle spray body is similar to the temperature of the heating plate. Due to & It is based on the design of the air inlet pipe, so that the temperature of the purgeable gas that can be reduced by 4Γ ΛηLE can depend on the temperature of the heating plate, so as to shorten the cooling time of the heating chamber during preventive maintenance (PM). Lies in the improvement of the purification gas The pipeline and increase the efficiency of cycle purge. As shown in the second, the purification system of this case is located on the inner wall of the heating chamber, which is provided with a gas inlet pipe 1 of $ 10,000 and is connected with a number of gas injection pipes 2. Among them, = 二 = The setting in the heating chamber can be a suitable design that at least circulates around the inner wall of the heating chamber, H is placed on at least one of the inner walls, etc., and its detour length is sufficient to use the heat source itself to flow into the heating chamber. Those purifying the fluorine gas in the air pipe for heating. U Among them, 'the air pipe 1 can have an air pipe joint before entering the heating chamber'. When the interior of the heating chamber needs maintenance, it can be opened by separating this joint.

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Ｍ Page 6 533112 V. Description of the invention (4) Heating to the upper cover for maintenance works. The gas inlet pipe, previously mentioned, is looped upward on the inner wall of the upper cover of the heating chamber. During the detour, the gas used for purification: t gas :: is purified by the heating source in the heating chamber itself. Two = ί, when it detours to the highest point, the temperature of the purification gas flowing in the inlet gas ^ is already close to the temperature of the heating chamber, that is, the temperature difference between the preparation gas and the heating plate will not cause Purification material produces a quenching effect. · ,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,. In order to enhance the spraying force ', the nozzle 21 may have a tapered inner diameter. As shown in the embodiment of the present case, each nozzle is q nozzle 21, but not limited to this. ----- ^ :: Refer to the picture. When this case is implemented, when the preheated glass substrate is 8T and the heating chamber or heating plate needs to be cleaned, the input of gas, such as compressed dry air (CDA), etc. is started. Purify the gas; the input gas passes through ί: 2 1 夂 / spin: after it is over the heating chamber, and then is output through the air jet tube 2 and sprayed to each layer of heating plate to purify the heating plate and the heating chamber. The gas is discharged from the other end ac. Because the input gas has been preheated for the heating source of the heating chamber before it is sprayed to the force two hot plate, the temperature when the plate is sprayed is almost the same, which will not cause the material of the heating plate. Deformed. 1M, through the implementation of this case, it can effectively take out f from the glass substrate, which can be purified, the waiting time for cooling down after the line is known, and the heating source itself can be reused, which is a purification operation One big

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Breakthrough, and when 4 M is required to use N2 or other purification Weng II :, room maintenance and adjustment, this device can also help the room to quickly cool down, without UhMfOrce convection) to make the heating disclosed by the case shorten the cooling time. Or modified and originated from Benjai = "Example:-species, for example, local changes p. ^, Y I technical ideas of tea is easy for those who are familiar with the technology = knower's do not leave the patent right in this case Fan Zui .... Not surprisingly, this case shows that it is quite different from the known technical characteristics, and the bean was first created to be practical and also meet the patent requirements of the invention. I urge members ^ to check clearly and pray for the patent to be granted soon. Benefit society, real sense morality 0

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Claims (1)

533112 VI. Application patent scope 1. A heating chamber purification system, which is provided with an air inlet pipe in the heating room, and the air inlet pipe is arranged along the inner wall of the heating room to utilize the heat of the heating chamber to purify the gas flowing in the air inlet pipe It is heated and connected with a gas jet tube. The gas jet tube is provided corresponding to each layer of heating plates, so that the gas flowing in the gas inlet pipe is heated by the heat source of the heating chamber during the traveling, and the gas emitted from the gas jet pipe is discharged. Purified gas will not cause the heated plate to be deformed due to temperature difference. 2. The heating chamber purification system described in item 1 of the scope of the patent application, wherein the front end of the air inlet pipe is provided with an air inlet joint so that the upper cover of the heating room is separated from the heating room. 3. The heating chamber purification system as described in item 1 of the scope of the patent application, in which the jet tube is a nozzle. 4. The heating chamber purification system as described in item 1 of the scope of the patent application, in which the jet tubes corresponding to the heating plates of each layer must be a set of multiple. 5. The heating chamber purification system described in item 1 of the scope of the patent application, the purification gas system is nitrogen, or compressed dry air (CDA). 6. The heating chamber purification system described in item 3 of the scope of patent application, the nozzle has a tapered hole diameter and a tapered shape. Page 10