TW531674B - Method and apparatus for switching optical signals using rotatable optically transmissive microstructure - Google Patents

Abstract

This improved method and apparatus for switching optical signals uses a rotatable optically transmissive microstructure to change the optical paths of optical signals. The rotatable optically transmissive microstructure includes structures such as waveguides and waveguide networks which transmit optical signals. MEMS and micromachining technology are used to build an optical switch with a microstructure that rotates from one position to another position (e.g., laterally, vertically, rotationally) such that incoming optical signals align over a small air gap with different waveguides, or with different inputs to the waveguides, depending on the position of the microstructure. As a result, the optical signals travel different optical paths (e.g., straight pass-through or cross over) depending on the position of the microstructure. The waveguides can be fabricated, for example, by laying a cladding material on a substrate, forming a waveguide on the cladding material, and finally by overlaying a second cladding layer on top.

Description

531674

Related Applications Chunzhao This patent application is about and claims to apply for a method entitled "Meth〇df〇r switching optical signals using microstructures" on September 19, 2000 (Ying Wen

Hsu) 's provisional U.S. Patent Application Serial No. 60 / 233,672 priority and Xu Wenhuan's provisional U.S. patent application entitled "Method of Switching Optical Signals Using Microstructures" on October 20, 2000 The priority number is 60 / 241,762. BACKGROUND OF THE INVENTION Field of the Invention The field of the invention is generally related to switching a class of elements of an optical signal and integrating a series of these elements into a system. In particular, these components are manufactured using processes and materials that are compatible with common semiconductor manufacturing practices, thereby enabling large-scale production and low cost. Background In the telecommunications industry, the demand for extremely increased availability and faster communication systems, i.e., larger bandwidths, has made these components important. The main application examples that are driving this demand are the Internet, on-demand video / music, and common data storage. Existing telecommunications infrastructure, which has been widely developed in telephones, is now unable to meet the needs of new data communications applications. Many alternatives have been developed to meet this new need. These alternatives include wireless, optical, and accessible space laser communication technologies. The technology most promising to date to meet future planned bandwidth requirements is optical technology. In a network that is entirely optical, or a group of optical and electrical networks -4-This paper is suitable for household materials (CNS) A4_21Gx297 public love) 531674

The necessary components in the connection include a signal carrier medium (ie, optical fiber), a signal routing system, and a data control system. These signal routing systems have an element β for switching optical signals between optical fibers. In the prior art method, optical signal switching can be achieved by two main main methods: electrical and optical. Most systems currently use electrical switching. In these systems, at the network contacts, these optical signals must first be converted into electrical signals. Then, the converted electrical signal is switched to the designated channel by the integrated circuit. Finally, these k-numbers must be converted back to optical signals before being transmitted through the fiber to the next destination. These optical converters are more expensive than the rest of the transmission equipment. Electrical switching technology is reliable, inexpensive (except for optical converters), and can be reconditioned and monitored. The main disadvantages of the electrical switching system are the large number of contacts on the long-distance network and the very high total cost of the converter. In addition, more than 70% of the signals that reach a contact usually require a simple straight-through, and full signal conversion (down and up conversion) makes hardware use inefficient. System designers also anticipate that future systems will best utilize transparent optical switching; that is, the switching system can redirect the path of the optical signal regardless of the bit rate, data format, or wavelength of the optical signal between the input and output ports . Most electrical switching systems are designed for specific rates and formats and cannot be used for multiple and dynamic rates and formats. Future systems will also be required to be able to process optical signals with different wavelengths, which requires separate channels for each wavelength in the electrical switching network. The limitations of these electrical switching systems provide new opportunities to develop improved optical switching systems. Switchers that directly affect the direction of the light path are generally considered as optically interleaved -5-

531674 9ΐ ^ "Single member day bismuth positive / violent positive V. Description of the invention (3 ~~) " 'Connector (OXC). The traditional optical manufacturing technology using glass and other optical substrates cannot produce products that meet the performance and cost of data communication applications. Β is different from the electrical switching technology based on the mature integrated circuit technology. The optical switching (switching technology that can reach the number of Nanbu) depends on For newer technologies. The use of micromechanics is a new way. The project MEMS (Micro-Electro-Mechanical Systems) is used to describe components that are fabricated micro-mechanically (mostly on silicon wafers) using wafer processes. The MEMS batch process capabilities enable these components to be manufactured at low cost and high yield. MEMS-based optical switches can be divided into three categories: 丨) silicon mirrors, 2) mobile switches, and 3) thermo-optic switches. Mobile and thermo-optic switches have been shown, but these technologies lack the ability to amplify the number of channels or ports. The number of channels is important to effectively switch a large number of fibers at the junction. Until now, the use of silicon mirrors in three-dimensional (3D) space was the only way to achieve high port counts (for example, greater than 1000). Optical interleaving connectors using 3D silicon mirrors face great challenges. These systems require very tight beam path angle control and large unobstructed spatial distances between mirrors to produce a component with a high port count. Without active beam path control, the precise angle control required is generally not achieved. Now that every path has to be monitored and manipulated ... eventually the system becomes complex and costly. These systems also require extensive software and electrical (processing) sources to monitor and control the position of each mirror. Since the mirror can be moved in two directions through an infinite number of possible positions (ie, analog movements, the final candid acquisition and control system, the system will be very complex, especially for switching with a large number of numbers.) For example, 'such as recent developments The report states that Lucent Technologies-6-531674 Red Please A7

The smaller three-dimensional mirror switching prototype of (Lucent Technology) is equipped with a supporting device 'supporting a δX device occupying two full-size boxes with control electronics. Theoretically, an optical switch has the following main features: 1) its size can be adjusted to accommodate a large number of ports (greater than 1000 ports); 2) has reliability; 3) can be manufactured at low cost; 4) has low switching time 5) Has low insertion loss / crosstalk. If the three-dimensional Shixi mirror meets the needs of adjustable size, it cannot achieve other goals. Therefore, a new method is needed, in which the complex nature and analog control of the optical path in a three-dimensional accessible space can be replaced by a guided optical path and digital (two states) switching. This system can greatly simplify switching operations, enhance reliability and performance, and significantly reduce costs. The following section of this disclosure describes such a system. Summary of the Invention The present invention relates to a method and device for switching optical signals using a rotatable optical transmission microstructure formed by a lithography process on a substrate. Among them are substrates such as semiconductors, quartz, silica, or some other structure. The device uses a red-turnable microstructure to guide multiple optical paths. First, an individual aspect of the present invention is a device for switching optical signals by selectively rotating a movable optical transmission microstructure, wherein the optical signal transmission uses a set of paths when the microstructure is not rotated and is used when the microstructure is rotated Different groups of paths. Second, the individual point of view of the present invention is a method of selectively rotating a removable paper scale to apply the Chinese National Standard (CNS) A4 specification (210 × 297 mm) 531674 91 · 7. 25 ^ --- year '~~ ___ _ V. Description of the invention (5) ~~ ^ ~ A device for switching optical signals by moving optical transmission microstructures, in which optical signals adopt a set of paths when the microstructure is not rotated and different sets of paths when the microstructure is rotated. . '' A second aspect of the present invention is a device for switching optical signals, comprising a fixed input waveguide, at least two optical transmission waveguides embedded in a rotatable microstructure, and a fixed output waveguide. Fourth, an individual aspect of the present invention is a device for switching optical signals, including a rotatable optical transmission microstructure having an input and an output, wherein the input is closely adjacent (such as a small air gap)- A waveguide containing an incident optical signal is placed and the output is closely adjacent (for example, a small air gap) a waveguide carrying a outgoing optical signal. Fifth, an individual aspect of the present invention is a device for switching optical signals, which includes a microstructure that is mounted for rotation relative to a silicon wafer substrate, the microstructure carrying an optical transmission waveguide. Eighth, an individual aspect of the present invention is a device for switching optical signals, comprising a substrate of a wafer, a microstructure carrying an optical transmission waveguide and rotatably embedded in the substrate for rotation relative to the substrate, and a device A control substrate that rotates the microstructure relative to the substrate. A seventh aspect of the present invention is a device for switching an optical signal, comprising a wafer substrate, a support structure embedded in the substrate, a light transmission waveguide and a rotation support embedded in the support structure for relative to A microstructure for substrate movement, and a control structure for rotating the microstructure relative to the substrate. Eighth, an individual aspect of the present invention is a device for switching optical signals. -8-

91. ^ 1674 V. Description of the invention (6th correction / Chu 7zheng / _Supplement_charge — 58) There is a rotatable optical transmission micro-switching optical switch that switches optical signals in the XY dimension and _ has the z dimension An optical switch capable of switching a light-transmittable microstructure of an optical signal, so that the optical signal can be switched in a three-dimensional space. A ninth aspect of the present invention is a device for switching an optical signal including a device having a rotatable A micro-switching element that transmits a microstructure, the micro-switching element being capable of directing an optical signal from two inputs to any L of the two outputs. A tenth aspect of the present invention is a device for switching optical signals ^ 3 It can be seen that: rotary Optical transmission microstructure, correcting optical deviation by using a two-dimensional array of _dimensional array of photon π pieces placed on the interface from an optical output, tenth, an individual aspect of the present invention is a method for switching optical signals, including A step of selectively rotating a movable_light transmitting microstructure, wherein these optical signals adopt one set of paths when the microstructure is not rotated and another set of paths when the microstructure is rotated. An individual aspect of the invention is a method for switching optical signals, including the steps of providing a person with a light signal through a fixed-type magic leather guide, selectively introducing the light signals into at least two by selectively rotating the microstructure, and embedding them in One of a rotatable microstructured waveguide, and an optical signal is output through a fixed output waveguide. Eleventh, an individual aspect of the present invention is a method for switching an optical signal, including the step of placing a One input and one output of the rotatable light transmission microstructure makes the input close (for example, _ small air gap included in the 9 • this paper ruler home standard (CNS) A4 specification (21 () χ297 public love 531674 91. 7 · 25 at YYYY ^^ 4 ^ V. Description of the invention (a waveguide for an incident optical signal and an output next to a waveguide for carrying an outgoing optical signal. Tenth Fourth, an individual aspect of the present invention is a method for switching an optical signal including the step of 'setting a light transmission microstructure for rotation relative to the substrate of a Shi Xi wafer, the microstructure carrying an optical transmission waveguide. Fives An individual aspect of the present invention is a method for switching optical signals, comprising the steps of providing a wafer substrate and rotatably mounting a microstructure carrying an optical transmission waveguide on the substrate for rotation relative to the substrate 'and selecting The microstructure is rotated relative to the substrate to switch these optical signals. Sixteenth, an individual aspect of the present invention is a method for switching optical signals, including the steps of providing a support structure embedded in a wafer substrate, A microstructure carrying an optical transmission waveguide is rotatably embedded in the support structure for rotation relative to the substrate, and the microstructure is selectively rotated relative to the substrate to switch these optical signals. Seventeenth, the invention An individual point of view is a method for switching optical signals. The method includes the steps of providing an optical switcher that switches optical signals in the χ_γ dimension and providing an optical switcher that switches optical signals in the two dimensions, so it can be used in two dimensions. Switch the optical signal within. A tenth aspect of the present invention is a method for switching optical signals. The method includes the steps of providing a micro-switching element with a rotatable optical transmission microstructure capable of directing an optical signal from two inputs to either of two outputs. . The individual point of view of this month is a square paper ruler for switching optical signals. Applicable to China-10 531674 9 | · λ 25/25 / day correction / fanzheng / erchong-V. Description of the invention (8) method, including The steps are to selectively rotate an optical transmission microstructure to switch optical signals and correct optical deviations from a two-dimensional array of optical outputs by using a two-dimensional array of optical elements placed on the interface. Twentieth, an individual aspect of the present invention is a method for manufacturing a rotatable and fixed waveguide using a rotatable optical transmission microstructure. Twenty-first, an individual aspect of the present invention is a method for manufacturing rotatable and fixed waveguides using a rotatable optical transmission microstructure. The method includes the steps of integrating a simple switching element and forming a high-density optical signal at the same time. Switch from a two-dimensional input array to a two-dimensional output array. Twenty-second, an individual aspect of the present invention is a method of using a rotatable optical transmission microstructure to manufacture a waveguide. The method includes a step of surrounding the core with a coating material, wherein the refractive index of the coating material is slightly The refractive index is lower than the core. Twenty-three 'individual viewpoints of the present invention are the above-mentioned individual viewpoints, and these viewpoints are independent or in some combination. Other individual aspects of the invention can also be found independently or in combination in a system or method that practices any of the individual aspects described above. Those skilled in the bank will refer to the illustrations and detailed descriptions below to understand other systems, methods, features and advantages of the present invention. It is hoped that all these other systems, methods, features, and advantages are included in this description, are included in the scope of the present invention, and are protected by the scope of the attached patent application. The components in the illustration are not necessarily scaled. The focus is on the description of this paper-this paper is suitable for the standard (CNS "A4 specifications (21 () > < 297 public love 531674 _ &V; 2 # 日 改 " X, Invention Description D ~~) '--- The principle of the Ming. In addition, the same reference numbers in the drawings represent the corresponding parts in all the different drawings. Figure 1 describes one A block diagram of an exemplary embodiment of an optical switching system suitable for processing 1024 ports. Fig. 2 depicts an exploded conceptual diagram of an exemplary embodiment of an optical connector and 0xc block of Fig. 1. Fig. 3 A depicts Fig. 2 —Plane view of an exemplary embodiment of a single switching layer. FIG. 3B depicts FIG. 2 —Edge diagram of an exemplary embodiment of a single switching layer. FIGS. 4A to 4F depict different exemplary embodiments of a waveguide on a switching layer. Fig. 4G depicts different exemplary embodiments of a waveguide on a switching layer, in which a coating material surrounds the core of the waveguide. Fig. 5A depicts a plan view of an exemplary embodiment of a switching layer that can switch 8x8 ports. 5B describes Figure 5A-Switching Layer Figure 6A depicts-an exemplary embodiment of an optical connector, the optical base of the optical connector is formed with a convex spherical array. Figure 6B depicts how the optical connector of Fig. 6A is corrected-Fig. 7A depicts-has -An exemplary embodiment of the switching element of the movable optical transmission platform. Fig. 7B depicts the switching element when the movable platform in Fig. 7A is not moved. Fig. 70 illustrates the switching element when the movable platform in Fig. 7A is moved. -12- ^ Paper size applies to China National Standard (CNS) A4 specification (210X297 male ^ ----- ---- ^ W1674

Fig. 7D depicts an exemplary embodiment of a switching element having-a movable optical transmission platform and-a double-layer waveguide. Fig. 8A depicts an exemplary alternative embodiment of a switching element with a rotatable optical transmission platform, wherein the rotatable optical transmission platform moves parallel to the base plane. ® 8B describes alternative examples of switching elements for H rotatable or pivoting optical transmission platforms. Detailed Description of the Invention Fig. 1 depicts a block diagram of an exemplary embodiment of an optical switching system 10 suitable for processing 1024 ports by 1024 ports. The optical switching system 10 includes a three-dimensional waveguide. The optical switching system 10 shown in FIG. 1 uses a guided wave path (i.e., waveguide), digital switching, and is capable of processing 1024 ports. Two of the key elements of the optical switching system 10 are OXC blocks 12,14. OXC blocks 12, 14 are also considered switching blocks because these two blocks contain vertical and horizontal optical switches, respectively. The OXC box (Y) 12 is used to switch the beam in the vertical direction, and the OXC box (X) 14 is used to switch the beam in the horizontal direction. The two 0-shaped blocks (Y and X) 12, 14 are connected end-to-end such that all outputs of the first (Y) 0xc block 12 are connected to the inputs of the second (x) 0xc block 14. Since each OXC block 12, 14 is an assembly unit, some manufacturing tolerances are unavoidable. To handle the accumulation of these tolerances, an optical connector 16 is required to facilitate system assembly. Similarly, an optical connector 16 can be used at the input of the first 0xc block 12 and the output of the second 0xc block 14 to tolerate positioning errors at the interface connection. Alternatively, the optical connector 16 may be an optical-to-electrical-to-optical connector, a mirror surface in many barrier-free spaces. 13- This paper size applies to China National Standard (CNS) A4 specification (210X 297 mm) ) 531674

, A fiber optic tube bundle, or any kind of optical connector. The optical fiber 18 is connected to the input interface 20. The switching light signal is present in the output interface 22. For example, the input interface 20 and the output interface 22 may be mechanical interfaces to an optical fiber. The electrical signals used to control the individual switching elements are interconnected (layer-to-layer) in electrical parent connectors 24 on the sides of each OXC block 12,14. These wires are routed to the control electronics 30 and the interface adjacent to the 0xc blocks 2 and 14. The optical switching system 10 is mounted on a board 32. FIG. 2 illustrates an exploded conceptual view of an exemplary embodiment of the optical connectors 16A to 16C and 0xc blocks 12, 14 of FIG. 1. FIG. For the sake of clarity, the vertical switch blocks and OXC blocks 12 represent only the first and last switching layers 40, 42. For example, 'Each switching layer 40, 42 can switch 32 inputs to 32 outputs in the vertical direction. By putting 32 switching layers together, all 32 channels can be connected along a vertical plane. In order to complete all the functions of switching 32) < 32 channels, a mechanism for switching in the horizontal direction is required and this mechanism is realized by, for example, a second OXC block 14 (horizontal switching block). Figure 2 shows only the first and last switching layers 44, 46 of the second (X) 0xc block 14. Each of the switching layers 44, 46 can switch, for example, 32 inputs to any of the 32 outputs in the horizontal direction. By placing the 32 switching layers together, all 32 channels can be connected along a horizontal plane. Combined into the specific embodiment shown in Figure 2, the vertical and horizontal switching layers produce a 32x32 optical switch. The following embodiment describes how a signal located on channel (1, 1) (these numbers refer to the number of columns and rows, respectively) is routed to the output of channel (32, 32). Beam 50 (indicated by -14- this paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) arrow)) enters the (1,1) position, passes the first optical connector 16A, and enters the一 开关 层 40。 A switching layer 40. The switcher in the first switching layer 40 connects the light beam from (M) to the output of (1, 32). The optical signal leaves the vertical switching layer, passes through the second optical connector 16B, and realigns to the horizontal (X) switching layer at (1, 32). The beam is now wound from position (1, 32) to position (32, 32) 'and then re-aligned and exited via the third optical connector 16C. The optical switching system 10 may have an optical path network 202. The optical path network 202 includes at least one optical path, and the optical signal 50 can be transmitted along the optical path. For example, the optical path network 202 may include a mirror, waveguide, air gap, or other structure that provides an optical path. In an exemplary embodiment, the optical path network 202 is a waveguide network 202. An advantage of the three-dimensional waveguide included in the optical switching system 10 is that this approach makes it possible to reach a large number of ports without requiring precise and active control of the beam path. Since the beam chirp is captured inside the waveguide or waveguide network on each switching layer, only the end connections are critical. A waveguide network may include many waveguides, such as the waveguide network 202 shown in FIG. 8A. In fact, a waveguide network can include only a single waveguide if necessary. The specific embodiment here uses only one waveguide network. It should be understood that this specific embodiment may be replaced by a waveguide, and vice versa. Where alignment is critical, such as the interface, an optical connector 16 considers using conventional and inexpensive optical fibers to correct beam deviations. The simplification of the final three-dimensional waveguide and protection of the environment (such as sealing each switching layer) further enhances the reliability and rigor of the system, providing a beam path that is not affected by temperature, humidity, degradation and touch. FIG. 3A and FIG. 3B respectively describe a single switching layer of FIG. 2, for example, the switching layer 44 U0X297 mm) -15- 531674 --_ year month day amendment V. description of the invention (1 ~ '---, an exemplary specific implementation Example of a plan view and edge diagram. This example shows how 32 inputs are connected to u outputs via an array with simple switching elements 60. In the 32x32 port embodiment, there are go switching elements 60. The method of cross-linking Anyone who is familiar with signal routing design can use any method. The pioneering work in the routing theory completed by Bell Labs has shown that optical signals can be effective in a specific way by connecting simple switches (such as 2x2 components) Routing. With these routing guides below, it means that each input can be connected to any output without masking any connection. The switching layer 44 shown in FIGS. 3A and 3B includes a waveguide 64 and a switching element 60. Substrate 62. In this exemplary embodiment, the substrate 62 may be any semiconductor material, such as silicon. In order to protect these waveguides and the microstructure of the switching element, another (cap-shaped) wafer 63 may be used. Covers and seals the substrate 62. A cap-shaped wafer 63 can be attached to the substrate 62 by using any of a number of available technologies, including anodizing, melting, and eutectic bonding, to achieve effective sealing to exclude Contaminants and humidity. The optical signal 50 enters the switching layer 44 at one edge. It is best to smooth the edge and rotate its angle to provide a complete refraction of the beam 50. Depending on the optical coefficient of the interface medium (such as air or another optical element) (0ptical index), the angle of the edge can be designed to meet the complete refraction. Once the light beam 50 enters the waveguide 64, the light cannot leave the waveguide 64 due to the phenomenon known as complete internal reflection. The phenomenon is not caused by serious leakage. The switching action is controlled by the applied voltage. Each switching element 60 requires' for example, three electrical connections: an actuation electrode, a positioning sensing electrode, and electrical ground. Combine the electrical ground connection together so that -16- This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) V. Invention Ming (14) The electrical path has reached a minimum. Therefore, each switching element 60 has at least two electrical connections passing under the cap-shaped wafer 63 to intervene with the outside world. In FIG. 38, the electrical path 66 is shown to be vertical and horizontal in nature. The optical path ends at the lower margin and ends at the electrical connection foot pad 68. Of course, the actual layout of the electrical path 66, the connection foot pad 68, the input port, and the output cock can be modified from this embodiment. Figure 4 A to Figure 4 F describes various exemplary embodiments of the waveguide 64 on a switching layer. In order to maintain total internal reflection (TIR), the environment surrounding the waveguide 64 must have an optical refractive index lower than the refractive index of the waveguide 64. For example, the refractive index is The 1.5 glass can be coated with a material with a lower refractive index, or simply use a vacuum (refractive index is 丨 · 〇) or air as a medium. A wide range of gases can be used to ensure compatibility with wafer bonding processes. In a first specific embodiment, Fig. 4A depicts a cross-sectional view of a waveguide 64 made of glass in which the medium surrounding the waveguide 64 is in a vacuum or air. The carrier 70 can be made of glass or stone. In a second specific embodiment, FIG. 4B illustrates another waveguide 64, in which the upper and side surfaces of the waveguide 64 are in contact with a vacuum and the bottom surface thereof is connected to an intermediate material having a refractive index lower than that of the waveguide. The carrier 70 may be Made of glass or silicon. In the specific embodiment of FIGS. 4A and 4B, the upper substrate should be a material for transmitting optical signals, and the wavelengths of these optical signals are such as 0.82, 1.3, and 1.55 microns. These are the wavelengths generally used for optical fiber transmission, and the supporting equipment (such as the transmitter, carrier, and receiver are designed for processing. In these two specific embodiments, the material on the bottom (the carrier substrate 70) is mainly used To provide mechanical support to the structure. The actual switching mechanism will be explained below. Some waves are required. -17- This paper size applies Chinese National Standard (CNS) A4 specifications (210X297 cm) 531674 V · ¥ 5. Description of the invention (A7 _ Nippon Boshi 15) is guided to move vertically or laterally by applying an external force. The carrier substrate 70 can be made of glass, silicon, or any material compatible with micromechanics. Figure 4C and Figure 4D describe its kind A specific embodiment of a waveguide 64 using a substrate 70. Bridging the waveguide 64 to a small amount of material 72 adjacent to the material will cause some light leakage and design requirements to consider the trade-off between mechanical strength and optical leakage. Figure 4C and Figure 4D One of the advantages of the specific embodiments is that only a single-layer structure is required, and thus no wafer bonding is required. The detailed design using these other specific embodiments should include achieving the allowable manufacturing cost and waveguide The balance between mechanical and optical integration. Although the preferred embodiment of the optical switching system uses a waveguide, optical guidance using reflective surfaces or other known structures can also be used. Figure 4E shows a connection between two The ducts 78 made of wafers 80, 82 produce a closed optical duct 78. In order to enhance the reflectivity of the surface, a metal such as gold or metal (or any other material compatible with micromechanical processes;) may be used in It is deposited on the inner surface before joining. Another embodiment uses a microstructured vertical surface. As in traditional optical systems, this method requires tight vertical sidewall angle control to precisely control the beam. Figure 4F shows a The trench etched inside the wafer has a reflective surface with an upper cap 80 that forms a closed waveguide 78. As mentioned above, a metal coating can be applied to enhance reflectivity Figure 4G depicts another embodiment of a waveguide on a switching layer. A silicon (or glass substrate 62 is first covered with a coating material 300. A second deposition is produced The refractive index doped by the layer is slightly larger than the core material of the coating material 300 refractive index-18-This paper size applies the Chinese National Standard (CNS) A4 specification (21〇χ 297 mm) 531674 91 厶 25 A7 / Chu ^ 5. Description of the invention (16) material 302. Examples of compounds used for doping glass (silicon dioxide) for waveguide manufacture include phosphorus trihydrogen (PH3), diborane (B2H6), germanium tetrahydrogen ( GeH4), silicon tetrafluoride (SiF4), gadolinium (Er), and gadolinium (Yb). The core layer 302 is then patterned and etched to produce the final waveguide 302 shape. The next step includes applying another coating The core material 302 is covered with the covering material 304, so the core material 302 is completely surrounded by the coating materials 300, 304. The final product is a waveguide 302 with full internal reflection properties. Precise control of core and coating geometry, surface finish, and coefficients is required to facilitate single-mode optical transmission. The design and processing of waveguides are well known to those familiar with waveguide manufacturing. 5A and 5B illustrate a plan view and an edge view of an exemplary embodiment of a non-maskable switching layer 44 that performs an 8x8 port. In order to achieve the full switching function in this embodiment, 12 switching elements 90 are required. Each switching element 90 can perform 2x2 switching. Since the optical signal 50 always passes to the optical output side via certain optical paths, the switching layer 44 is non-maskable. The optical connector 16 is used to minimize the insertion loss caused by the optical fiber and the switching element 90 or the OXC block. In both cases, there is a geometric tolerance accumulation due to poor assembly, which should be corrected to minimize light leakage. The most common deviation is due to a combination of linear or angular displacement. FIG. 6A illustrates an optical connector 16 whose base is fabricated on both sides to have an array of convex spherical surfaces 100. One side of the spherical array is connected to a fiber optic tube bundle to receive the incident light beam 50. The reverse convex surface focuses the light beam to a small point and connects to these oxc blocks. For example, each port of the optical connector 16 to the optical switching system may have a spherical surface such as a spherical surface 100 (here, for example, 32 to 2 or 1024 -19-this paper size suitable financial @ g 家 料 (CNS ) Μ specifications (21Q > < 297 public love)

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Surface 100). FIG. 6B illustrates how the optical connector of FIG. 6A corrects an offset beam. Let us assume that as soon as the light beam 50 enters the left, it usually exceeds the range of entering the 0xc block or other optical path. Without correction, the beam 50 will not enter the entrance of the OXC block exactly. However, the deflected light beam 50 is corrected by the spherical surface of the optical connector 16 and then is emitted from the optical connector 16 focused on an image point 102. By placing the entrance mirror hole or fiber entrance of the 0xc block at or near the image point 102, the outgoing beam will be approximately focused and enter an optical path, such as the waveguide 64, at an incident angle, and be captured by a fully internal reflection procedure. Other surfaces than spherical can also be used to enhance the quality of the outgoing beam. For example, an array with curved lenses can also be used to parallel beams to remove angular errors without changing the focal point. The optical design of the optical connector 16 requires knowledge of error patterns due to manufacturing defects and acceptable correction methods in the final optical switching system. The detailed design of the optical surface and the selection of optical materials may include those known to those familiar with optical design. The optical connector 16 using the convex spherical surface 100 can be manufactured by using a series of spheres and fastening those spheres to a flat plate with machined holes. In order to fix these spheres, the simplest method is to shrink them in a cold basin (such as liquid nitrogen) and insert them into the holes in the flat plate. The plate can also be heated to expand the hole before inserting the sphere. Proper assembly methods will insert a large number of spheres simultaneously and precisely. Alternatively, the auto-aligned holes can be engraved on the plate to capture the spheres automatically. Yet another method is to use a convex abrasive drill to produce the desired array surface. There are many possible manufacturing technologies known and include those familiar with optical manufacturing. -20- This paper size βΓϊ® Home Standard (CNS) ▲ Grid (Momo 297)

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--- V. Description of the invention (A technique well known to those skilled in the art. Use the optical connector as described above to minimize the pressure. However, if the volume can be easily reached, the optical fiber array can be provided to connect each interface clamp to be clamped. Together. Although it is lower than the connector and lower cost. The final volume of the optical switching system can be made less important, using an earlier method of ordinary optical fiber. One can be designed, where each interface is not mechanically compact. An optical fiber can be easily constructed. FIG. 7A depicts an exemplary embodiment of a small switching element 60 manufactured by a micromechanical process. This exemplary embodiment is one because it has two inputs and two outputs. 2x2 switching element 60; Of course, the number of inputs and outputs can be increased or decreased. The specific embodiment of the switching element 60 has two waveguides integrated on the upper part of the carrier platform 110. This combined structure (waveguide and carrier) is connected to one Base 62 and its position such that the switching element 60 is suspended over an air gap 'or a cavity engraved on the base 62 previously l. The carrier platform no is best suspended at about 30 microns above the actuation electrode 112. The waveguides 14, U6 are generally less than 10 microns and in this embodiment 'a small channel size is required to ensure only a single mode light Signal transmission ° The size of the structure and the design of the support springs depend on the type of actuation mechanism used. This specific embodiment will use electrostatic attraction as the actuation method. For electrostatic actuation, the carrier platform 11 and Both of the fixed electrodes 112 and 126 must be able to conduct electricity, so that the carrier uo is moved to the electrodes 112 and 126, as shown in FIGS. 7B and 7C. If the carrier platform u0 is made of a dielectric material, it can be at the bottom (That is, the surface facing the fixed actuating electrode U2) Gold-21 covered with gold or nickel-This paper size applies Chinese National Standard (CNS) A4 specifications (21〇 × 297 mm) A7 B7 531674 7. 25 V.发明 说 # (l ----- is to make it conductive. If the carrier platform 1 10 is made of a semiconductor material such as silicon, it can be doped to improve the conductivity. The pattern on the bottom of the cavity 1 i 丨The fixed electrodes 112 and 126 are opposite to and parallel to the carrier platform 110 These electrodes 112 and 126 are connected to the upper part of the base 62 by a pattern on the inclined surface. Two fixed electrodes 112 and 126 are made in the recess 111, and one of the electrodes 112 is used to actuate the movement of the carrier platform no. The other electrode 126 is used to feedback the position of the carrier platform 110. The exemplary embodiment of the switching element 60 operates as follows. The light signal 50 enters the left side of the switching element 60 at positions A and B. The light signal 50 Due to the special structure of the waveguide of this embodiment, the waveguides 114, 116 enter and cross over. The optical signals 50 from positions A and B leave the switching elements 60 at positions d and C, respectively. The original optical signal 50 has crossed from A to D and from B to C. When the optical signal 50 is not required to cross in a specific embodiment, the electrical signal needs to be sent by the control hardware. By applying a voltage to the fixed electrode 112 on the substrate 62 and applying a different voltage to the electrode of the carrier platform 110, the voltage difference will generate an electrostatic attractive force. This attractive force will pull the carrier platform 11 (and the waveguides U4, 116 carried by the carrier platform 11) downward (here less than 10 microns) toward the fixed electrodes 112, 126 by the bending support spring 130, and thus The waveguides 114, 116 are removed from the optical path in this procedure. The optical signal 50 from the position A then directly goes (via the accessible space 120) to point C, and the optical signal 50 from the position B goes directly (via the P-free obstacle space 122) to position D. FIG. 7B depicts that the carrier platform 11 is in its resting state because no power is applied to the actuation electrode 112; here, the optical signals 50 from the positions A and B of the fixed waveguide located on the input side of the carrier platform 110 are incorporated into the movable type, respectively. Bird-22- This paper size applies to Chinese National Standard (CNS) A4 (210 X 297 mm) binding

Line 531674 is "Sundial Masaru / _________B7 V. Description of the invention (20) 114, 116 to the positions of the fixed waveguides d and c of the carrier platform 110, as the waveguides 114 and 116 move with the carrier platform 11o And mobile is regarded as “movable.” When power is applied to the actuation electrode 112, FIG. 7C depicts the final structure 'where the carrier platform n0 has moved to the actuation electrode 12; here, from the input located on the carrier platform 110 The photochemical numbers 50 at the positions A and b of the fixed waveguide on the side directly lead to the positions c and D of the fixed night guide at the output side of the carrier platform n0 through the barrier-free space, respectively. 1 i 6 has moved out of the range of optical signal 50. Other actuation methods can also be implemented. Fixed actuation is a better choice due to the simplicity of design and operation. The main disadvantage is the relatively low voltage required to operate the final component Due to large gaps, they generally fall in the range of 20 to 100 volts. Alternative actuation methods include magnetic and thermal techniques. These methods are well known to those familiar with micromechanical design. The substrate 62 Sense electrode 126 The method is used to detect the position of the carrier platform n0. The method is to sense the change in the capacitance between the electrode on the carrier platform 11 and the electrode 126. This change is caused by the change in the gap caused by the movement of the carrier platform u. Other sensing methods can also be implemented, such as piezoresistive, magnetic, optical architecture. The signal from the sensing electrode 126 is used (via closed-loop control) to accurately place the waveguides 114, 116 on the optical entrance and exit. Light The main signal loss will be at the entrance of the movable waveguide 114, u6 (on the carrier platform 110 of the switching element 60) and at the entrance of the fixed waveguide. Reduce the position between A / C and B / D The distance can minimize this kind of leakage. In order to minimize the leakage completely, but increase the complexity of reporting, an auxiliary waveguide 138, 140 can be designed on the bottom of the carrier platform 110. In -23- this paper size applies China National Standards (CNs) A4 Specification (210X297 Public Director) 531674

In this case, the opening between the fixed waveguide and the movable waveguides 144, 116 can be reduced below 2 microns, depending on the etching process. Figure 7D depicts a carrier platform 110 with waveguides 114, U6 above and waveguides 138, 140 'above the bottom, one of which is designed for linear transmission and the other for lateral transmission. As shown in the specific embodiment shown in FIG. 7D, in this case 'the carrier platform 110 is in a rest state because no power is applied to the actuation electrode U2' from the positions A and A of the fixed waveguide located on the input side of the carrier platform i The optical signal 50 of B passes through the movable waveguides 138 and ι40 to a fixed waveguide located on the output side of the carrier platform 110. Similarly, when power is applied to the actuation electrode 112, the 'carrier platform no moves to the actuation electrode 112, so the optical signals 50 from the positions A and b of the fixed waveguide located on the input side of the carrier platform 110 now pass through the carrier platform 11 〇 The waveguides 114 and n6 of the fixed waveguide on the output side pass because the movable waveguides 138 and 14 have moved out of the range of the optical signal 50 and the movable waveguides 114 and 116 have moved into the range of the optical signal 50. Of course, in a specific embodiment using two movable waveguides, as shown in the figure, the defaulter can pass straight or cross. In other words, the waveguides 14 and 116 can be used for linear transmission and the waveguides 138 and 14 can be used for lateral transmission, and vice versa. Now, another specific embodiment of a MEMS optical switching element 60 will be described. The movement of the switching element 60 is not limited to a switching element perpendicular to the vertical direction of the substrate 62. FIG. 8A illustrates an exemplary embodiment of a MEMS switching element, in which the actuation direction is transverse or substantially parallel to the plane of the substrate 62. Fig. 8B illustrates an exemplary embodiment of a MEMS switching element that relies on rotational movement. Of course, an optical switching system 10 can be produced in full accordance with -24- This paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm)

531674 9i 7. 2 i. Description of the invention f ^) Optical switching elements that move in the same way (such as all vertical movements, all horizontal movements, or all movements), or move in different ways (such as some vertical movements and other horizontal movements) (Or some vertical movement and other rotation movement, or some lateral movement and other rotation movement). The lateral movement can be generated by applying different voltages to the recombination (known as comb finger in MEMS) structure as shown in FIG. 8A. 8A, the MEMS switching element 60 includes a substrate Q. Suspended on the base a, such as-a hollow or other, is a _movable optical transmission platform 11. The platform 11 is stated to have "light transmission properties" because it has a structure that transmits optical signals or light beams 50 (such as the waveguide networks 200, 202); it is not intended to mean that the entire platform itself must have light transmission properties. One side of the platform 110 is coupled to the support spring 130 and the opposite ends of the support springs 130 are coupled or fixed to the base 62. The stage 110 has an electrode 204. In this embodiment, the electrode 204 and the actuation electrode 112 are in a bifurcated type. By applying different voltages to the actuation electrodes 112 and the electrodes 204 on one side of the platform 110, the platform 110 moves in a lateral or substantially horizontal manner relative to the plane of the substrate 62, as opposed to the other side of the platform 110. In FIG. 8A, this lateral movement means that the platform 10 moves upward or downward. The platform 110 carries the waveguide networks 200, 202. The optical path from the input side to the output side of the optical signal 50 varies depending on the position of the platform 110. For example, if the platform is in a first position (eg, a rest position), the alignment of the incident light signal 50 to the waveguide networks 200, 202 inputs A, B, C, and D is selected so that the optical signal 50 enters the input C And D. Due to the special structure of the waveguide networks 200 and 202 in this embodiment, the optical signals of C and D are entered into the waveguide networks 200 and 202 50 -25- This paper size applies to the Chinese National Standard (CNS) A4 specification (210 X 297 (Mm) Binding line 531674---^-knife day repair blood / n / touch five, invention description (23) -----merge and leave the output! ^ F. If the platform 11 is then moved to its second position, the incident light L number 50 will enter the input a * b and pass straight through the output lines respectively. The waveguide networks 200 and 202 are interchangeable and the internal line is determined to pass straight. The structure of the waveguide network can be in any shape or form to achieve any desired optical path. The lateral movement method shown in FIG. 8A has the advantage that a bottom electrode is not required, thereby reducing many steps in manufacturing. The disadvantage is that the area of the electrode area is limited due to the short height of the final structure, so a large amount of maggots is needed to generate sufficient and gravitational force. Figure 8A The electrode area required to operate the lateral movement switching element is larger than the vertical movement switching element in Figure 7A Much. Turning to Fig. 8B ', the movable optical transmission platform nG moves in a rotational or pivotal manner relative to the substrate. As shown in FIG. 8B, the platform 110 rotates in a substantially non-parallel manner with respect to the platform. ^ In order to achieve the purpose of rotational movement within a switching element 60, the same electrostatic attractive force as used in the preferred embodiment will work. In order to sense the position of the platform 110, a similar capacitive debt detection technique as described in the preferred embodiment will be applied. As illustrated, an exemplary embodiment of a rotating platform 10 makes the inputs A and B aligned when the platform 110 is in a first position. When the platform 110 is rotated to its second position, the inputs c and D are aligned with these optical signals. As with all embodiments, the structure of the waveguide and waveguide network can be any desired shape to achieve the desired optical path. Although various application specific embodiments have been described, it will be apparent to those skilled in the art that many more possible specific embodiments and implementations are within the scope of the subject invention. For example,-each feature of a specific embodiment can be mixed and implemented with other -26- this paper size applies to towels and household materials (CNS) A4 specifications (21GX297 public ^ -------- -531674 _ 年 Η 日 倐 正 _; _ 5. The other features shown in the description of the invention (24) are matched. The features known to those familiar with optical fiber can also be covered as required. Additionally and obviously Features can be added or removed as needed, and thus movable platforms with more than two sets of optical paths can be considered, where the platform moves to any one of three or more positions to make each position actuate a different set Optical path. As another embodiment, the optical switch can receive more than 2 inputs and provide more than 2 outputs. The optical switch can be combined to produce a larger optical switch with more ports. Therefore, the present invention Except according to the scope of the attached patent application and its equivalent, it is not limited. Description of component symbols 10 Optical switching system 64 Waveguide 12, 14 OXC box 66 Electrical path 16, 16a, 16b, 16c Optical connector 68 Electrical connection pin Pad 18 Optical fiber 70 Carrier 20 Input interface 72 Material 22 Output interface 78 Conduit 24 Electrical connector 80, 82 Wafer 30 Interface and control electronics 90 Switching element 32 Board 100 Spherical (spherical surface) 4〇, 42,44,46 Switching layer 102 Image point 50 Beam 110 Carrier platform 60 Switching element 111 Cavity 62 Base 112 Actuating electrode 63 Cap wafer 114, 116 Waveguide-27- Binding

The paper size of the paper is applicable to the Chinese National Standard (CNS) A4 specification (210X297 mm) 531674 91. 7 · 25 Β7-# = ~ fi ~~ 口 哆 正 / CORRECTION 5. Description of the invention (25) 120,122 Barrier-free space 126 Sensing electrode 130 Support spring 138, 140 Waveguide 200, 202 Optical path network 204 Electrode 300, 304 Coating material 302 Core material -28- This paper size applies to China National Standard (CNS) A4 (210 X 297 mm)

Claims (1)

6. Scope of patent application Light :: package-including the first, path switching " two optical circuit substrates; ί micro-mechanical platform formed by lithographic process on the micro-substrate, today I mechanical platform is suitable for rotation relative to the substrate ' An actuation mechanism that causes the platform to be positioned relative to the substrate from a first position; and a first-position and first-position foggy optical path network, which has a first input and a second input; 2 :: Path =: =: The first stage; the optical path network will change as Tian Pingkou is in the first position, the light will be pushed into the input—and entered in the optical path! The first optical path is transmitted. When f fΓ and the first position, the optical signal enters the second input and is transmitted along the second optical path in the optical path from the network. The first-to-do 2 · = 2 device of item 2 wherein the platform has a -optical signal position. Neutral in which the optical path does not propagate through the second optical path 3.2 The device in the scope of patent claim 2, wherein the optical path network is a waveguide network. 4. ^ Please refer to the device of the patent scope item 3, wherein the waveguide network includes a number of 5 · = Please refer to the patent scope device of the fourth item, wherein the many waveguides include the first and second waveguides. The position of the waveguide is such The rotation of the platform is selected between the first and second waveguides. 6. The device according to item 5 of the scope of patent application, in which the first and second waveguides are -29- this paper size, towel S @ 家 standard (CNS) A4 specification (210X297 public love) W year / month ^ day amendment / Owe Hereto 9. 11. The offset m2 is placed so that the rotation of the platform is chosen between the first and second guides. The installation according to item 1 of the patent scope further includes a support structure for suspending the platform above the base. 8. If the device according to item 1 of the patent scope is requested, wherein the base includes a recess or an air gap, the platform is suspended above the recess or the air gap. For example, the second device of the patent scope W further includes _ consumption to the substrate = into the fixed optical path structure and its placement position is to transmit the optical signal to the first input or the second input of the optical path network. ίο. According to the device of the scope of patent application, the device further includes a substrate-fixed output path structure and its placement position receives optical signals from the optical path network. For example, the device of item 9 of the patent application, further includes an output fixed optical path structure connected to the substrate and its placement position is to receive optical signals from the optical path network. A The device as claimed in the scope of patent application, wherein the optical path network includes a first output and a second output. 13. If the device of the scope of patent application is No. 12, further includes a fixed output optical path structure with a base and its placement position is to receive optical signals from the first output or the second output of the optical network. 14. The device of claim 9 in which the input fixed optical path structure is an input fixed waveguide. 15. The device of claim 1G, wherein the output fixed optical path structure is an output fixed waveguide. -30 · This paper size is applicable to Chinese National Standard (CNS) A4 specification (210X297 mm), patent application park 16. If the scope of patent application is the 13th technology # 全 士 _ ^ Wherein the output fixed optical circuit, , Ό system is an output fixed waveguide. Green patent range first! The device of this item further includes 1 to _: an active electrode and wherein the actuation mechanism includes-an actuating electrode, the electrode: the electrode is placed to electrostatically interact with the active electrode. 18. If the moving electrode of item 17 of the patent application is closed again. f. The actuating electrode and the device of the main patent application item No. 1 further include-an optical connector placed in an optical path and output by a human or an optical path network. 20. The device of claim 19, wherein the optical path network includes a waveguide. A device according to item 19 of the patent range, wherein the optical connector includes an alignment correction surface ', and the alignment correction surface correction—the optical signal's track error. 22. The device of claim 21, wherein the alignment correction surface is a spherical surface. 23. The device of claim 3, wherein the waveguide network includes a waveguide formed by surrounding a core material with a coating material, and the refractive index of the core material is greater than that of the coating material. 24. The device of claim 3, wherein the waveguide network includes a waveguide having a top, bottom, and sides, wherein the upper and sides of the waveguide are in contact with a vacuum or air and the bottom is in contact with An intermediate material is connected to π, wherein the refractive index of the relay material is lower than that of the waveguide. 6. The scope of patent application is 25. 26. The waveguide network includes an AND) and further includes a device for judging Pingru's patent application No. 3, and the substrate forms a unitary structure waveguide such as the patent application No. 1 Item of the device, the sensing electrode of the stage position. π If the device is the oldest in the scope of patent application, if the platform is in the-position, the optical signal is changed to the second optical path. If the platform is in the second position, the optical signal passes straight Optical path network. π As the oldest device in the scope of patent application, if the platform is in the first position, the optical signal passes straight through the optical path network, and if the platform is in the second position, then the light & number is transmitted through the optical path network Switch from first — optical path to second optical path. 29 · If the scope of patent application is the first! The device of item, wherein the platform has a neutral position and the platform rotates from the neutral position to the first position or the second position. 30. The device as claimed in the patent scope item}, wherein the actuation mechanism is formed by a lithography process on the substrate. 31. For the device under the scope of patent application, the optical path network is formed by a lithography process on a substrate. 32. The device of claim 31, wherein the actuation mechanism is formed by a lithography process on a substrate. 33. — An optical switching system, comprising: an optical switching layer containing: (a) — an optical switching element containing: (1) a substrate; -32- This paper size applies to the Chinese National Standard (CNS) A4 specification (210 X 297 mm), patent application Fan Yuanhuan-by using-lithographic materials on the substrate and the platform is suitable for rotation with respect to the base money; ten mouthpieces 3) an actuation mechanism, which enables The platform is turned from a first position to a second position relative to the substrate; and a rotatable optical network with three Li :, 彳 first inputs, and a second input relative to the substrate, the optical transfer network_connected to flat "Make the light path network rotate with the platform, where when the platform is in the first position, the person enters and passes along the first light = path in the optical path network, and when the platform is in the second position, the light signal Enter = the second input and pass along the qth learning path in the optical path network. (B) Many optical switching elements with input and output. ⑷ Many fixed input optical paths reduced to these many optical 输入 element inputs. Structure, these fixed input optical path structures convert optical signals To the optical switching elements; and (d) a plurality of fixed output optical path structures coupled to the outputs of the plurality of optical switching elements, the fixed output optical path structures receiving optical signals from the optical switching elements 34. The optical switching system according to item 33 of the patent application scope, further comprising: a first plurality of optical switching layers configured to change light signals in a first direction ^ a second plurality of optical switching layers configured Optical signals are switched in a second direction that is different from the first direction; and an optical connector that couples the first and second optical switching layers. -33- 531674 4 Year 1 / Automotive Correction / Man $ / Make up A8 35. The optical switching system according to item 34 of the patent application scope further includes an input optical connector which is placed in the first and many optical switching layers. 36. The optical switching system according to item 34 of the Shenyan patent scope further includes an output optical connector placed on the second and many optical switching layers. 37. As claimed: The optical switching system of item 34 in the patent scope, wherein the optical connector includes: ^ Positive-alignment correction plane for alignment error of optical signal. 38. The optical switching system of item 37 of the patent application, wherein the front surfaces of the alignment lenses are spherical. 39. The optical switching system of claim 35, wherein the input optical connection H includes an alignment track misalignment surface of the corrected optical signals. Instrument 40. ^ The optical switching system of the 39th scope of the patent application, wherein the front surfaces of the alignment lenses are spherical. 41. 42. If the optical switching system of the scope of patent application No. 35, the output in this case is the alignment surface of the connector containing the alignment track error of the correction optical signal. Optical switching system station # 丄 ^ Dry supply system, where the alignment correction surfaces are spherical. Binding 43. 44. 45. The optical switching system of item 33 of the patent application is formed on a substrate by a lithography process. Among them, the motivator is the optical switching system & in the patent application No. 33, wherein the optical wind path network is formed on a substrate by a lithography process. For example, if you apply for the optical switching system of the 44th scope of the patent, you should actuate the -34- Ϊ «Standards for Financial Standards (CNS) Α4_210 X 297 mm) ~ '~ ^: _______, patent scope system It is formed on a substrate by a lithography process. 46. The optical switching system of claim 33, wherein the platform is pivoted in a non-parallel manner with respect to the substrate. 47. The oldest device in the scope of patent application, wherein the micromechanical platform rotates in a non-parallel manner relative to the substrate. 48 .: A method for switching an optical signal from a first optical path to a second optical path control. The method includes the following steps: transmitting the optical signal to a platform suitable for rotation relative to a substrate, the flat : It is formed by a lithography process on a substrate. The platform includes eight waveguide networks with a first input and a second input. The waveguide network is connected to the platform to make the waveguide network. With the rotation of the platform, it is determined whether the optical signal propagates along the _ or the second optical path; A is used to selectively rotate the platform to a first position or = two position relative to the substrate, where when the platform is in the first At the-position, the optical signal enters the first input and passes along the first optical path in the waveguide network, and when the platform is in the second position, the optical signal enters the second input and follows the second optical path in the wave network. Path passing. 49. The 48th scope of the patent application further includes a step of correcting the alignment track error in the optical signal. 50. The method of claim 49 in the scope of patent application is a method in which the step of aligning orbital errors in the optical signal is corrected using a spherical surface to correct the errors. 5 1 · If item 48 of the scope of the patent application is applied, then the waveguide network includes the first and the first -couplings, which are placed perpendicular to each other, and the first one, so the rotation of the platform depends on This paper size applies to China National Standard (CNS) A4 (210X297 mm) 531674 47 years? / :) ¾㈡ 胗 ~, patent application scope A8 B8 C8 D8 Choose between the first and second waveguides based on the vertical position of the waveguide relative to the substrate. 52. The method of claim 48, wherein the waveguide network includes placing the first and second waveguides in a lateral direction with respect to each other, so that the rotation of the platform depends on the lateral position of the waveguides with respect to the substrate and between the first and second Choose between waveguides. 53. The method of claim 48, wherein the waveguide network includes first and second waveguides that are placed at an angular offset from each other, so that the rotation of the platform depends on the angular offset of the waveguides and is between the first and the second. Choose between two waveguides. 54. The method of claim 48, further comprising the step of sensing the position of the platform. 55. The oldest device in the scope of patent application, wherein the substrate is a semiconductor. 56. The optical switching system according to claim 33, wherein the substrate is a semiconductor. 57. The method of claim 48, wherein the substrate is a semiconductor. 58. The oldest device in the scope of patent application, wherein the substrate is quartz. 59. For example, the optical switching system according to item 33 of the patent, wherein the substrate is quartz. 60. The method of claim 48, wherein the substrate is quartz. 61. The oldest device in the scope of patent application, wherein the substrate is Shi Xitu. 62. The optical switching system according to item 33 of the patent application, wherein the substrate is silica. -36- 531674 A B c D 6. Scope of Patent Application 63. For the method of claim 48, the substrate is silica. 64. The optical switching system of claim 34, wherein the optical connector includes an optical-to-electrical-to-optical connector. 65. The optical switching system of claim 34, wherein the optical connector includes a fiber optic tube bundle. 66. The optical switching system of claim 34, wherein the optical connector includes a plurality of mirrors. -37- This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) 531674 Correction / requisition of the year and month of the year M No. 090123027 Patent Application Chinese Schematic Correction Page (July 91)