TW530834U - PECVD apparatus - Google Patents
PECVD apparatusInfo
- Publication number
- TW530834U TW530834U TW91213600U TW91213600U TW530834U TW 530834 U TW530834 U TW 530834U TW 91213600 U TW91213600 U TW 91213600U TW 91213600 U TW91213600 U TW 91213600U TW 530834 U TW530834 U TW 530834U
- Authority
- TW
- Taiwan
- Prior art keywords
- pecvd apparatus
- pecvd
- Prior art date
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW91213600U TW530834U (en) | 2002-08-30 | 2002-08-30 | PECVD apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW91213600U TW530834U (en) | 2002-08-30 | 2002-08-30 | PECVD apparatus |
Publications (1)
Publication Number | Publication Date |
---|---|
TW530834U true TW530834U (en) | 2003-05-01 |
Family
ID=28789530
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW91213600U TW530834U (en) | 2002-08-30 | 2002-08-30 | PECVD apparatus |
Country Status (1)
Country | Link |
---|---|
TW (1) | TW530834U (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105274499A (en) * | 2015-11-23 | 2016-01-27 | 上海卫星装备研究所 | Single-room multi-electrode type PECVD (plasma enhanced chemical vapor deposition) reaction chamber |
-
2002
- 2002-08-30 TW TW91213600U patent/TW530834U/en not_active IP Right Cessation
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105274499A (en) * | 2015-11-23 | 2016-01-27 | 上海卫星装备研究所 | Single-room multi-electrode type PECVD (plasma enhanced chemical vapor deposition) reaction chamber |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
GD4K | Issue of patent certificate for granted utility model filed before june 30, 2004 | ||
MM4K | Annulment or lapse of a utility model due to non-payment of fees |