525047 A7 ---— _B7___ 五、發明說明（/ ) 本發明係關於一種高純度化學品於容器之液位及液 體使用量之指示方法及裝置，尤其是一種適用於半導體製 私中化學氣相沈積或化學钱刻製程中，裝載高純度化學品 之容器的液位及液體使用量之準確偵測方法者。 半導體工業中製造矽晶圓上之基體電路或磊晶片（石申 化鎵等）上之元件的製程中，均大量使用到化學氣相沈積 製程及化學蝕刻製程。此類製程中須要用到許多高純度之 液態化學溶液作為沈積長膜所需之先驅體，製作時須要將 先驅物以冒泡方式（bubbling)將此液體的蒸氣隨著載氣 (carrier gas )注入薄膜成長機台來進行薄膜沈積製 私，或者直接以液體喷射方式（direct liquid injection)將液體用噴氣器（inject〇r)霧化喷入系統 中進行化學氣相沈積反應。由於此類製程所製之薄膜厚度 在數個ηιη到數百⑽之間，因此這些先驅物的使用量非$ 乂，因此其裝置此類化學先驅物的容器或發泡器化北以叶) 容量也就相對的小，大約在數十毫升到數十公升範圍内。 現階段此類容器中使用之偵測裝置多用浮球或光學的 液位警告器來顯示特定液位，大多為2個警告點，顯示低 )夜位與空液位，因此無法得知即時之使用狀況及液位點。 而且如果該警告點若失效，將難以察覺容器内液體之液位 2使晶片化學汽相沉積製程無法持續操作或因f目操作而 造成損失。此外，傳統的谓測裝置之靈敏度亦有一定之使 用限制，且差率大。以浮球式的傾測器而言，並不適用於 在於發泡器中晃動的液位或黏度高的液體；而光學式液位 ---------------------^---------^ (請先閱讀背面之注意事項再填寫本頁) 3 -— B7__ 五、發明說明（vo 警示器又不適用於顏色深或黏度高的液體。 (請先閱讀背面之注意事項再填寫本頁) 另一種偵測裝置為稱重方式來顯示其所剩於之化學溶 夜重里，然而機台管路的使用多為固定管，因此稱重無法 只月確加上相對於容器本身之重量，所用之化學溶液量少 所k成之重置比率過小，所以量測所得之誤差率極大，在 許多應用上亦無法實施。 與口綜t所述，因此半導體製程中一直存在著使用液體化 孥品計量上之困擾，相對造成使用上之困難。例如許多製 2必須以經驗法則推測用量，來做為停機更換或添加化學 f液之依據，往往造成化學品之浪費及機台稼動率降低或 造成產品不良率提高。因此對於現階段之半導體製程上， 種有效且即時的液位或使用量指示得方法及裝置，可說 是有迫切之須要。 本發明使用之主要目的在於··提供一種高純度化學品 於容器之液位及液體使用量之指示方法，其可達到即時而 準確地偵測出容器内部液體之液位或使用量的目的，以減 輕或克服上述偵測裝置之問題與缺點。 為達到上述目的，本發明中提供一種高純度化學品於 容器之液位及液體使用量之指示方法，該方法包括·· 感應偵測溶液之電容值，其中利用調整相對面積與相 對距離來放大所偵測的電容值； 讀取電容值，並轉化為數位資料； 類比校正數位資料以得到實際之液位高度Q 為使貴審查委員能更進一步瞭解本發明之特點與目 4 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 525047 A7 B7 五、發明說明（ 的，茲配合圖式詳細說明如下： (一）圖式部份·· 第一圖·係為本發明中液位及液體使用量指示裝置之 側視剖面示意圖。 第二圖：係為本發明中液位及液體使用量指示裝置沿 第一圖中2 — 2線之剖面上視圖。 ^ 第三圖：係為本發明中液位及液體使用量指示裝置之 實施示意圖。 t (二）圖號部份： (10)外槽 (2 0 )電容感應裝置 (3 2 )通氣孔 (3 6 )絕緣體 (3 6 4 )下蓋部 (12)導氣管 (3 0 )内槽 (3 4 )連通孔 (3 6 2 )上導 (4 0 )鋼瓶 (4 4 )輸出管 部 (4 2 )輸送管 (5 0 )訊號傳送及轉換和電腦處理系統 本發明之高純度化學品於容器之液位及液股饮 指示方法及裝置，其中該方法包括有下列之步驟： (1 )感應偵測溶液之電容值，其中利用調整相對面 積與相對距咸來放大所偵測的電容值； (2 )讀取電容值’並轉化為數位資料； (3 )類比杈正數位資料以得到實際之液位高度。 步驟一中，先利用一兩端具有電極之液位感應器，感 應容器内部之高純度化學溶液在兩電極之間之電容值，其 體使用量之 • IIIIIII — — — — — — · I I (請先閱讀背面之注意事項再填寫本頁) · --線· 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） B7525047 A7 ----- _B7___ 5. Description of the invention (/) The present invention relates to a method and device for indicating the level and liquid usage of a high-purity chemical in a container, especially a chemical vapor phase suitable for semiconductor manufacturing In the process of deposition or chemical engraving, the method of accurately detecting the liquid level and liquid usage of a container containing high-purity chemicals. In the semiconductor industry, a large number of processes for manufacturing a substrate circuit on a silicon wafer or a component on an epitaxial wafer (such as gallium carbide) are used in a chemical vapor deposition process and a chemical etching process. In this type of process, many high-purity liquid chemical solutions are used as precursors for the deposition of long films. The precursors need to be bubbling with the carrier gas during the production process. The film growth machine is injected into the thin film deposition system, or the liquid is sprayed directly into the system by direct liquid injection to inject a liquid into the system for chemical vapor deposition reaction. Because the thickness of films produced by this type of process is between several η and hundreds of 因此, the use of these precursors is not $ 乂, so the container or foamer that installs such chemical precursors (to the north of Yemen) The capacity is relatively small, in the range of tens of milliliters to tens of liters. At present, the detection devices used in such containers mostly use floats or optical liquid level warning devices to display specific liquid levels, most of which are 2 warning points, showing low) night and empty liquid levels, so it is impossible to know the real-time Usage status and liquid level. Moreover, if the warning point is invalid, it will be difficult to detect the liquid level of the liquid in the container. 2 The wafer chemical vapor deposition process cannot be continuously operated or caused by f-mesh operation. In addition, the sensitivity of traditional pre-measurement devices also has certain use limitations, and the difference is large. As for the float type tilting device, it is not suitable for the liquid level or high viscosity liquid in the foamer; and the optical level --------------- ------ ^ --------- ^ (Please read the precautions on the back before filling out this page) 3 -— B7__ 5. Description of the invention (vo warning device is not suitable for deep color or viscosity (Please read the precautions on the back before filling this page) Another detection device is a weighing method to display the remaining chemical solution, but the use of the machine's pipeline is mostly a fixed tube. Therefore, the weight cannot be added to the weight of the container relative to the weight of the container itself. The replacement ratio is too small due to the small amount of chemical solution used, so the error rate measured is extremely large and cannot be implemented in many applications. To sum up, the semiconductor manufacturing process has always been troubled by the use of liquid counterfeit products, which has caused relative difficulties in use. For example, many systems must use the rule of thumb to estimate the amount to be used for shutdown or replacement of chemical f liquid. The basis is often the waste of chemicals and the reduction of machine productivity or product failure. The rate is increased. Therefore, in the current semiconductor manufacturing process, an effective and instant method and device for indicating the liquid level or the use amount can be said to be urgently needed. The main purpose of the present invention is to provide a high-purity chemical The method of indicating the liquid level and the amount of liquid used in a container can achieve the purpose of real-time and accurate detection of the liquid level or the amount of liquid in the container, so as to reduce or overcome the problems and disadvantages of the above detection device. To achieve the above object, the present invention provides a method for indicating the liquid level and liquid usage of a high-purity chemical in a container. The method includes: · detecting the capacitance value of a solution, wherein the relative area and distance are adjusted to enlarge Capacitance detected; Read the capacitance value and convert it into digital data; Correct the digital data by analogy to get the actual liquid level height Q To enable your review committee to better understand the characteristics and objectives of the present invention 4 This paper is applicable to China National Standard (CNS) A4 specification (210 X 297 mm) 525047 A7 B7 V. Description of the invention It is as follows: (I) Schematic part ... The first figure is a schematic side sectional view of the liquid level and liquid usage indicating device in the present invention. The second image: is the liquid level and liquid usage indication in the present invention. The top view of the device along the line 2-2 in the first figure. ^ The third figure is a schematic diagram of the implementation of the liquid level and liquid usage indicating device in the present invention. T (II) Figure number part: (10) outside Slot (2 0), capacitance sensing device (3 2), ventilation hole (3 6), insulator (3 6 4), lower cover (12), air duct (3 0), inner slot (3 4), and communication hole (3 6 2). Guide (40) cylinder (44) output pipe section (42) conveying pipe (50) signal transmission and conversion and computer processing system The method for indicating the liquid level and liquid share of the high purity chemical in the container of the invention and Device, wherein the method includes the following steps: (1) sensing the capacitance value of the solution, wherein the detected capacitance value is amplified by adjusting the relative area and the relative distance; (2) reading the capacitance value 'and converting Is digital data; (3) Analog positive digital data to get the actual liquid level height. In step one, a liquid level sensor with electrodes at both ends is first used to sense the capacitance value of the high-purity chemical solution inside the container between the two electrodes, and its volume is used. • IIIIIII — — — — — — II ( Please read the precautions on the back before filling out this page) · --- · This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) B7
五、發明說明（（p 中電極為可導電實心管、片或塊等，甘 不鏽鋼、I呂、鈦、全 ，、材質可以是金屬如 高分子材質。 自金，或導電之特殊玻璃、陶:是或 利用改變兩電極之間之有效 電容之公式如下： 、相對面積，其中計算 PF = K 乂V. Description of the invention ((The electrode in p is a conductive solid tube, sheet or block, etc., the material is stainless steel, stainless steel, titanium, titanium, aluminum, etc., and the material can be metal such as polymer material. Since gold, or conductive glass, ceramic : Yes or use the formula for changing the effective capacitance between two electrodes as follows:, Relative area, where PF = K 乂
T pF(pico-farad):微微法拉 K:電容常數 A:相對面積 L:相對長度 中二 =積為第—電極及第二電極與液面接觸面積 而相對長度為第-電極與第二電極之間二•極ίΓ因此’根據上述公式可知，因第-電極及第 电/、液面接觸面積係隨液面高度改變而改 隨液面高度改變而改變，所以可藉由： 电谷值的改變，來推知液面之高度，又當調整相對面藉 與相對距離之tb值使其提高時，料加Α液體之電、 電容法拉值，當原本微量之電容值經過放大 〗才此較準確地讀出電容變化，藉此分析判斷液位之古 :::外，如果容器之内部若有載氣之現象，會造成液；二’為了董取k準確之電容值，須增加_穩定液位感 應杰之間液體之隔阻裝置’以增加信號的穩定性。 將讀取到的電容值經一轉化器轉化為數位資料，傳輸 (請先閱讀背面之注意事項再填寫本頁) -丨裝 • ϋ n n ----訂---------線------ 本紙張尺度適用中國國家標準（CNS)A4規格（21G χ_297公爱） 525047 A7 五、發明說明（S )T pF (pico-farad): Pico farad K: Capacitance constant A: Relative area L: Relative length Middle = product is the first electrode and the area where the second electrode is in contact with the liquid surface and the relative length is the first electrode and the second electrode Therefore, according to the above formula, it can be known that because the contact area of the -electrode and the electric / electrical surface changes with the height of the liquid surface and changes with the height of the liquid surface, it can be obtained by: Change to infer the height of the liquid surface, and when the tb value of the opposite surface and the relative distance are adjusted to increase it, the electricity and capacitance Farad values of the A liquid are added. When the original trace capacitance value is enlarged, it is compared. Accurately read out the change of capacitance to analyze and judge the ancient level of liquid level ::: outside, if there is a phenomenon of carrier gas inside the container, it will cause liquid; Second, in order to get the accurate capacitance value of k, it must be increased_stable The liquid level sensing device 'blocks liquid between the cells' to increase signal stability. The read capacitance value is converted into digital data by a converter, and transmitted (please read the precautions on the back before filling this page)-丨 Installation ϋ nn ---- Order --------- Line ------ This paper size applies to China National Standard (CNS) A4 specification (21G χ_297 public love) 525047 A7 V. Description of the invention (S)
f電腦中’將該電容值利用電腦作計算校正處理 貫際之液位，顯示於顯示器上。 于U 另外電容值之量測同時可配合體積、重量 方法，以達到雙重或多曹夕破1 ^ 里/則 出，以供使㈣參考，因此在化學溶液逐量 1 時’可同步顯示其重量、體積與液位之增減。1曰加 本發明之-符合上述發明步驟之液位及液體使用量之 指裝置如第一圖與第二圖所示，該裝置包含有： 一封閉之外槽（1 0)，與一放置於外槽（1 〇 )中 央之電容感應裝置（2 0)。 外匕（1 0 )為一封閉之空心圓柱體或容器，其容量 :勺為2 0 CC〜4 0 L之間，外槽（1 〇 )之材質可以為導 電^料以作為-第一電極與電容感應裝置（2 〇 )相配合 以里測電容。應用於載氣設備時，一導氣管（1 2 )須接 通外槽（10)，並延伸至外槽（1〇)槽底以通入載氣 與外槽（1 0 )内之液體混合反應。 5玄電容感應裝置（2 0 )為第二電極，装設於外槽 (1 0 )之中’可以量取其與外槽之間化學溶液之電容 值’並輸出至分析計算系統。此外，當載氣設備使用時， 由於封閉外槽（1 〇 )内之操作狀態可能處在真空狀態 下’通入的氣體會劇烈膨脹翻騰，讓外槽（1 〇 )内之溶 液不斷授動’無法量得一穩定之電容值。因此在外槽（1 0)與電容感應裝置（20)之間加設一内槽（30)， 以隔阻劇烈的波動，該内槽（3 0 )同樣以可導電之材質 (210x 297 公釐） --------------Μ--------^---------線 (請先閱讀背面之注意事項再填寫本頁) 525047 A7 B7 五、發明說明（t ) 製成之空心圓柱體，以取代原先外槽（1 〇 )之第一電極 進行量測，内槽（3 0 )槽體之上方設有一通氣孔（3 2 )以與外槽（1 〇 )氣體部份相通，内槽（3 〇 )槽體 之下方設有一連通孔（3 4)以與外槽（1 〇)之液體部 份相通，以達到内、外壓力平衡，而讓内、外槽（丄〇 ) (3〇)之液面高度一致，同時隔阻液體波動的效果，因 此可以量得一準確平穩之電容值。 此外，為避免内槽（30)與電容感應裝置（2〇) 之間有溶液沾附形成液膜，導致兩者通電影響電容值之穩 定，兩電極之間加設一絕緣體（3 6 )，以斷阻通電液膜 的形成，如第一圖所示，該絕緣體（3 6 )隔阻夾設於内 槽（30)與電容感應裝置（2〇)之間，並分為一上導 部（3 6 2 )與一下蓋部（3 6 4 )，其中上導部（3 6 2 )呈一中央高起，並向外縮小之碟狀，因此當溶液因攪 動翻騰沾附至上導部（3 6 2 )上曲面時，溶液會延著上 曲面之弧度流至上導部（3 6 2 )之邊緣滴落，無法形成 連通兩極之液膜。而下蓋部（3 6 4 )連接形成於上導部 (3 6 2 )下，同樣具有—上曲面以導落沾附的溶液。 接著明翏考第二圖所示，載氣系統操作時先將氣體自 -鋼叙（4 0 )或供氣系統藉由輸送管（4 2 )送入外槽 (1 〇 )中’與外槽（1 Q )中之化學溶液充份混合作 用，ί後再^一輸出管（4 4 )將混合後之氣體送至其它 Γ —進行’專膜'儿積反應。而操作過程中消耗的液體可藉 由電奋感應裝置（2 〇 )傳送至一訊號傳送及轉換和電腦 (210 x 297 公釐） Μ-----------------線 (請先閱讀背面之注意事項再填寫本頁) 525047 五、發明說明（1 ) 整理後’配合重量與體積等資料數 另外，為極大化所伯測之電容值，其第一電極與 “極之間之相對面積與相對距離之比 調整為最大，以求得最大之電容值。（八里 根據本發明可作之不同修正及變化對於熟習該項技術 者而言均顯然不會偏離本發明的範圍與精神。雖然:本發明 特定的偏好具體事實，必須瞭解的是本發明不應被 限制於該等特定具體事實上。事實上，在實施本發 明之已述模式方面，對於熟習該項技術者而言顯而易知: 不同修正亦被涵蓋於下列申請專利範圍之内。 #〜綜上所述，本發明利用電容值的偵測，由於電容值隨 =溶液液位之變化而變動，因此可於固^或變動時間間 ’對槽内溶液進行電容值的量測，而達到連續之谓測， 以隨時檢查槽内所剩之溶液，隨時調整補充，減少停機的 次數，同時，配合裝置本身之結構設計，以調整電極之間 之相對面積與相對距離之比值（A/L)，有效地放大電 f值，另外，增加内槽與絕緣體的設置，能穩定電容值之 變化與減少兩極通電的現象，讓電容值的量測更精確。 因此確能克服習用液位偵測裝置之缺點，有長足之進 步性，並可廣泛應用於相關業界之中，具有極佳的產業利 用性，符合發明專利條件，因此具文提出專利申請。f In computer, the capacitance value is calculated and corrected by the computer, and the interstitial liquid level is displayed on the display. At the same time, the measurement of the capacitance value in U can be combined with the volume and weight methods to achieve double or more Cao Xi break 1 ^ / / out for reference, so when the chemical solution is measured by 1 ', it can be displayed simultaneously Increase or decrease in weight, volume and liquid level. The first means of adding the present invention-the liquid level and the amount of liquid used in accordance with the above steps of the invention are shown in the first and second figures. The device includes: a closed outer tank (10), and a Capacitive sensing device (20) in the center of the outer tank (10). The outer dagger (1 0) is a closed hollow cylinder or container, its capacity: the spoon is between 20 CC and 40 L, and the material of the outer groove (1 〇) can be a conductive material for the first electrode Cooperate with capacitance sensing device (20) to measure capacitance. When applied to carrier gas equipment, an air pipe (12) must be connected to the outer tank (10) and extend to the bottom of the outer tank (10) to allow the carrier gas to mix with the liquid in the outer tank (1 0). reaction. The 5 xuan capacitance sensing device (20) is a second electrode, which is installed in the outer tank (1 0) and can be used to measure the capacitance value of the chemical solution between it and the outer tank and output it to the analysis and calculation system. In addition, when the carrier gas equipment is used, since the operating state in the closed outer tank (10) may be in a vacuum state, the gas that is passed in will swell and swell violently, allowing the solution in the outer tank (10) to be constantly activated 'Unable to measure a stable capacitance value. Therefore, an inner groove (30) is installed between the outer groove (10) and the capacitance sensing device (20) to block the sharp fluctuations. The inner groove (3 0) is also made of a conductive material (210x 297 mm). ) -------------- Μ -------- ^ --------- line (Please read the precautions on the back before filling this page) 525047 A7 B7 V. Description of the invention (t) The hollow cylinder made of the invention is used to measure the first electrode instead of the original outer groove (10), and an air hole (3 2) is provided above the inner groove (30). It communicates with the gas part of the outer tank (10), and a communication hole (34) is arranged under the tank body of the inner tank (30) to communicate with the liquid part of the outer tank (10), so as to reach the inner, The external pressure is balanced, so that the liquid levels of the inner and outer tanks (丄 〇) (30) are the same, and at the same time, the effect of blocking liquid fluctuations is blocked, so an accurate and stable capacitance value can be measured. In addition, in order to prevent the solution from adhering to form a liquid film between the inner tank (30) and the capacitance sensing device (20), causing the two to be energized to affect the stability of the capacitance value, an insulator (3 6) is added between the two electrodes. In order to form a liquid film with a blocking current, as shown in the first figure, the insulator (36) is sandwiched between the inner groove (30) and the capacitance sensing device (20), and is divided into an upper guide portion. (3 6 2) and the lower cover part (3 6 4), where the upper guide part (3 6 2) is a dish that rises in the center and shrinks outward, so when the solution is agitated and stirred, it adheres to the upper guide part ( 3 6 2) When the upper surface is curved, the solution will flow along the arc of the upper surface to the edge of the upper guide (3 6 2) and drip, and a liquid film connecting the two poles cannot be formed. The lower cover part (36) is formed under the upper guide part (36), and also has an upper curved surface to guide the attached solution. Next, as shown in the second picture of the Ming test, when the carrier gas system is in operation, the gas is first sent from the steel gang (40) or the gas supply system into the outer tank (10) through the delivery pipe (42). The chemical solution in the tank (1 Q) is fully mixed, and then the output gas (44) sends the mixed gas to other Γ-for the "special film" reaction. And the liquid consumed during the operation can be transmitted to the signal transmission and conversion and computer (210 x 297 mm) through the electric induction device (20). M --------------- --- line (please read the precautions on the back before filling this page) 525047 V. Description of the invention (1) After finishing the number of materials such as weight and volume, in addition, to maximize the measured capacitance value, the first electrode The ratio of the relative area and the relative distance between the poles is adjusted to the maximum to obtain the maximum capacitance value. (The different corrections and changes that Bali can make according to the present invention will obviously not deviate for those skilled in the technology. The scope and spirit of the present invention. Although: the specific preferences of the present invention are specific facts, it must be understood that the present invention should not be limited to those specific specific facts. In fact, in implementing the described modes of the present invention, it is familiar with It is obvious to those skilled in the art: Different corrections are also covered by the following patent applications. # ~ In summary, the present invention uses the detection of the capacitance value, because the capacitance value changes with the level of the solution. And changes, so can be fixed During the variation time, the capacitance value of the solution in the tank is measured, and the continuous measurement is achieved, so as to check the remaining solution in the tank at any time, adjust and replenish at any time, and reduce the number of shutdowns. At the same time, in accordance with the structure design of the device itself, By adjusting the ratio of the relative area between electrodes and the relative distance (A / L), the electrical f value can be effectively amplified. In addition, increasing the settings of the inner tank and the insulator can stabilize the change of the capacitance value and reduce the phenomenon that the two poles are energized. Capacitance measurement is more accurate. Therefore, it can overcome the shortcomings of conventional liquid level detection devices, has considerable progress, and can be widely used in related industries. It has excellent industrial applicability and meets the conditions of invention patents. Therefore, a patent application was filed.