TW522421B - Spraying method for display panel with low resistance and low reflectivity using ion sputtering - Google Patents

Spraying method for display panel with low resistance and low reflectivity using ion sputtering Download PDF

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Publication number
TW522421B
TW522421B TW90109324A TW90109324A TW522421B TW 522421 B TW522421 B TW 522421B TW 90109324 A TW90109324 A TW 90109324A TW 90109324 A TW90109324 A TW 90109324A TW 522421 B TW522421 B TW 522421B
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Taiwan
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information display
ion sputtering
display panel
transparent film
silicon dioxide
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TW90109324A
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Chinese (zh)
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Jiun-Min Hu
Yue-Ming Teng
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Chunghwa Picture Tubes Ltd
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Abstract

The present invention provides a spraying for information display with low resistance and low reflectivity using ion sputtering method, which uses the ion sputtering method to sputter forming an ITO transparent film on the outer wall of the display panel of an information display; next, using the ion sputtering method to sputter forming a silicon dioxide film on the outer surface of the ITO transparent film; thus, the low resistance characteristic of the ITO transparent film and the low reflectivity characteristic of the silicon dioxide film can be used to sequentially form an anti-electrostatic layer and an anti-reflective spraying layer on the outer wall surface of the display panel of the information display by a simple and non-polluted process.

Description

522421 經濟部智慧財產局員工消費合作社印製 A7 ___B7___ 五、發明說明) 發明背景: 本發明係關於一種資訊顯示器之抗靜電/抗反射塗佈,尤指一種利用離子擺 鍍法,於一資訊顯示器之顯示面板外壁上,依序濺鍍形成一1T0透明膜及一二氧 化矽膜,作爲該資訊顯示器之顯示面板上之一抗靜電及一抗反射塗佈層。 先前技藝: 按,一般視訊顯示器之陰極射線管(CRT)表面之反射光強度,約爲入射 光之4%〜8%,該等反射光對長時間之使用者而言,極易造成眼睛疲勞及傷害’ 且會降低視訊顯示器上應有之解析度及顏色對比,此外,在現今日趨普及之高解 晰度及高畫質顯示器中,由於其驅動電壓一般均高達25KV,極易於顯示器表面 上形成靜電壓,導致大氣中微塵粒子吸附在其表面,破壤了顯示器之畫質,且在 低濕度區域內使用該種顯示器時,亦容易令使用者遭受電擊。故一般爲解決上述 問題,令視訊顯示器符合相關之品質要求,均會在陰極射線管之顯示面板外壁表 面上,進行抗眩光(Anti-Glare )、抗反射(Anti-Reflection )及抗靜電(Anti_Static ) 等表面處理,俾藉塗佈複數層抗靜電及抗反射塗佈層,以有效減少光源反射作用 對視訊影像所造成之不良影響,並大幅降低其上所累積之靜電壓。近年來,由於 消費大眾對顯示器之影像畫質要求曰漸提高,視訊顯示器之業者莫不朝著以設計 製造出更高品質及水準之顯示器爲目標,正因如此,視訊顯示器之抗靜電及抗反 射效果之良窳,即成爲評鑑品質高低之一重要標準。 由於,目前在製作陰極射線管時,所使用之抗眩光(Anti-Glare)、抗反射 (Anti-Reflection)及抗靜電(Anti-Static)等塗佈處理,均係採用噴塗(spray) 或旋轉式塗佈(spin coating)方式,該等塗佈方式即一般所謂之「濕式塗佈法」, 該等溼式塗佈法在塗佈材料之硏究開發及實際施作上,必須仔細考慮所使用之塗 佈材料之材質分散性,及所添加之溶劑。一般言,傳統之塗佈材料主要包含一凝 -2- 本纸張尺度適用中國國家標準(CNS)A4規格(210 X 297公爱) (請先閱讀背面之注意事項再填寫本頁) n ϋ ϋ ϋ ϋ> 一a ϋ ϋ· ϋ H ϋ ϋ I » 522421 經濟部智慧財產局員工消費合作社印製 A7 B7 五、發明說明(2 ) 膠材料(gel materials,如:矽質凝膠,silica gel),其塗佈方法係利用一塗佈裝 置,將預先調配好之抗靜電及抗反射塗佈材料,藉該塗佈裝置上所設之噴嘴,以 噴塗或旋轉式塗佈方式,將該等材料以霧狀微粒之方式,均勻地噴塗至一資訊顯 示器之顯示面板外壁,以在該外壁表面上,依實際需求,形成一抗靜電及抗反射 塗佈層,或複數層之抗靜電及抗反射塗佈層。在此種所謂之「濕式塗佈」方式中, 由於各該抗靜電及抗反射塗佈材料之噴塗量及均勻性,較不易控制,故其抗反射 及抗靜電效果並不穩定,無法有效提昇視訊顯示器之視訊品質,且在該等「濕式 塗佈」之製程中,各該抗靜電及抗反射塗佈材料亦將造成回收困難及環境污染等 問題。 發明綱要·· 有鑑於前述傳統視訊顯示器在濕式塗佈製程中,各該抗靜電及抗反射塗佈 材料所造成之諸多問題,發明人乃硏究發明出一種「利用離子濺鍍法令資訊顯示 器具備低電阻及低反射率之塗佈」,期藉由離子濺鍍法,分別於一資訊顯示器之 顯示面板外壁上,依序濺鍍形成一ITO透明膜及一二氧化矽膜,作爲該資訊顯示 器之顯示面板上之一抗靜電及一抗反射塗佈層。 本發明之主要目的,係利用乾式塗佈法,在資訊顯示器之顯示面板外壁上, 依序形成一 ITO透明膜及一二氧化矽膜,俾透過簡單且無污染之製程,利用該ΙΤ0 膜之低電阻特性及該二氧化矽膜之低反射率特性,在該資訊顯示器之顯示面板外 壁表面上依序形成一抗靜電及一抗反射塗佈層。 圖式說明: 第1圖乃一傳統彩色陰極射線管之縱剖面示意圖; 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐) VII-----------訂·-------- (請先閱讀背面之注意事項再填寫本頁) 522421 經濟部智慧財產局員工消費合作社印製 A7 B7 五、發明說明) 第2圖乃將抗靜電塗佈層及抗反射塗佈層應用於一傳統彩色陰極射線管之 顯示面板上之局部剖面示意圖。 附圖之圖號說明: 玻璃管體 …·… ……12 顯示面板 ...... .......14、40 部 …… ......18 漏斗部 …… .......16 胃子槍 ……· ……20 螢光層 ...... .......24 抗靜電塗佈層…… ……46 抗反射塗佈層…… .......48 導電元件 …·… ……50 詳細說明: 按,一般傳統之彩色陰極射線管10,參閱第1圖所示,主要包括一密封 之玻璃管體(sealed glass envelope)12,該管體12設有一顯示面板(faceplate) 14、一管頸部(neck portion)18 及一中間漏斗部(intermediate funnel port ion) 16,該顯示面板14之內壁表面塗佈有螢光層(phosphor screen)24, 該螢光層24包括複數個可分別散發螢光之螢光單元,該密封玻璃管體12之管 頸部18內,則設有複數個呈直線排列之電子槍20,用以產生三色電子束22, 該等電子束22經一磁偏掃軛(magnetic deflection yoke)之控制,可沿水平 及垂直方向偏折,並焦聚於該螢光層24上,當該彩色陰極射線管10所產生之 三色電子束,焦聚在該顯示面板14內壁表面上之各該螢光單元時’該等單元將 散發出有色光,以在該顯示面板14上顯示視訊影像。 參閱第2圖所示,乃一傳統之彩色陰極射線管上顯示面板之局部剖面示意 圖,該顯示面板40之內壁表面塗佈有一螢光層42,其外壁表面則塗佈有一塗 佈層44。該螢光層42係由複數個彼此間隔且呈點狀(dot s)或帶狀(s t ripes) 分佈之螢光單元所組成。該塗佈層44包含內層之抗靜電塗佈層46及外層之抗 -4· 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐) (請先閱讀背面之注意事項再填寫本頁) --------訂--------- 522421 經濟部智慧財產局員工消費合作社印製 A7 B7 五、發明說明(j ) 反射塗佈層48,該抗靜電塗佈層46之表面接設有一導電元件50,俾藉該導電 元件50將該顯示面板40連接至接地端,以有效去除該顯示面板40外壁表面所 累積之靜電荷;該抗反射塗佈層48則係用以減少該顯示面板40外壁表面對外 界環境光之反射,俾該顯示面板14上能呈現更淸晰之視訊影像。 本發明主要係針對前述傳統抗靜電及抗反射塗佈層所使用之塗佈方法,而 改用離子濺鍍法,即所謂之「乾式塗佈法」,在本發明之一最佳實施例中,該塗 佈法係在一濺鍍室中,以氬氣之正離子(A〇對一銦錫氧化物(Indium Tin Oxide, 以下簡稱IT0)之靶材,進行撞擊,令該靶材中之IT0成份被撞擊出來,而均 勻地附著在一資訊顯示器之顯示面板外壁,並於其上形成一均勻之ΙΤΟ透明膜; 嗣,再利用離子濺鍍法,以氬氣之正離子(Ar+)對一二氧化矽(Si02)靶材進行撞擊, 令該靶材中之二氧化矽(Si02)成份被撞擊出來,均勻地附著在該資訊顯示器之顯 示面板外壁所形成之該IT0透明膜表面上,而形成一二氧化矽膜。 在本發明之另一實施例中,該塗佈法係在一濺鍍室中,以氬氣之正離子(A〇 對一銦-錫合金之靶材進行撞撃,令該祀材中之銦-錫成份被撞擊出來,並與該 濺鍍室中所導入之氧氣中之氧分子發生反應,而形成銦錫氧化物,均勻地附著在 一資訊顯示器之顯示面板外壁,於其上形成一均勻之IT0透明膜。 在本發明之又一實施例中,該塗佈法係利用離子濺鍍法,以氬氣之正離子 (Ar+)對一矽靶材進行撞擊,令該靶材中之矽(Si)成份被撞擊出來,而與濺鍍室 中所導入之氧氣中之氧分子發生反應,再均勻地附著在該資訊顯示器之顯示面板 外壁所形成之該IT0透明膜表面上,形成一二氧化矽膜。 在本發明中,由於該IT0透明膜具有低電阻之導電特性,故令該IT0透 明膜與該資訊顯示器之顯示面板外壁周緣所設之一導電元件相連接,即形成一抗 靜電塗佈層,該塗佈層可藉該導電元件將該顯示面板上所累積之靜電壓,導引至 與該導電元件相連接之一接地端,以有效消除靜電壓對該資訊顯示器所造成之 -5- 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公爱) (請先閱讀背面之注意事項再填寫本頁) 訂---------% 522421 A7 B7 五、發明說明(5 ) 不良影響。另,由於該二氧化矽膜具有硬度高、反射率低及穿透性高等物理特 性,故該二氧化矽膜將成爲該資訊顯示器之顯示面板外壁上之一抗反射塗佈層, 用以減少該顯示面板外壁表面對外界環境光之反射,俾該資訊顯示器上能呈現 更淸晰之視訊影像。 在本發明之一最佳實施例中,該資訊顯示器之顯示面板外壁表面上’所形 成之ITO透明膜,其厚度約在I8〜35腿(其中η=1〇!,公尺)範圍,而該ΙΤΟ 透明膜上所塗佈之二氧化矽膜,其厚度約在110〜14〇nm(其中ηΞΐ£! ’ m=公尺)範 圍,在該等可行之厚度範圍內,又以ITO透明膜厚度在20〜22nm,且二氧化砂 膜厚度在120〜125mn之範圍內,所製作出之資訊顯示器爲最佳。 以上所述,僅係本發明之較佳實施例,惟,本發明所主張之權利範圍,並 不局限於在彩色陰極射線管之顯示面板上之應用,按凡熟悉該項技藝人士,依 據本發明所揭露之技術內容,在其它資訊顯示器(如:電漿顯示器或液晶顯示器) 之顯示面板上可輕易思及之等效應用,均應屬不脫離本發明之保護範疇。 (請先閱讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐)522421 Printed by A7 ___B7___ of the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economics 5. Description of the Invention) Background of the Invention: The present invention relates to an antistatic / anti-reflective coating for an information display, especially an ion display method for an information display. On the outer wall of the display panel, a 1T0 transparent film and a silicon dioxide film are sequentially formed by sputtering, as an antistatic and an anti-reflection coating layer on the display panel of the information display. Previous technology: Press, the reflected light intensity on the surface of the cathode ray tube (CRT) of general video display is about 4% ~ 8% of the incident light. Such reflected light is likely to cause eye fatigue for long-time users. And damage ', and will reduce the resolution and color contrast that should be on video displays. In addition, in high-resolution and high-quality displays that are becoming popular today, the driving voltage is generally up to 25KV, which is very easy to form on the display surface. The static voltage causes the dust particles in the atmosphere to be adsorbed on the surface, which deteriorates the display quality of the display, and when the display is used in a low-humidity area, the user is also prone to electric shock. Therefore, in order to solve the above problems and make the video display meet the relevant quality requirements, anti-glare, anti-reflection and anti-static (Anti_Static) will be performed on the outer wall surface of the display panel of the cathode ray tube. ) And other surface treatments, by applying multiple layers of antistatic and anti-reflection coatings, to effectively reduce the adverse effects of light source reflection on the video image, and greatly reduce the static voltage accumulated thereon. In recent years, due to the increasing demand of consumers for the image quality of monitors, video display manufacturers are always aiming at designing and manufacturing higher-quality and higher-quality displays. Because of this, the anti-static and anti-reflection of video displays The good and bad effect is one of the important standards for evaluating quality. Due to the current anti-glare, anti-reflection and anti-static coating processes used in the manufacture of cathode ray tubes, they are all sprayed or rotated. Spin coating methods, these coating methods are generally known as "wet coating methods", these wet coating methods must be carefully considered in the research and development and practical application of coating materials The dispersibility of the coating materials used and the added solvents. Generally speaking, traditional coating materials mainly include Yi Ning-2- This paper size is applicable to Chinese National Standard (CNS) A4 (210 X 297 public love) (Please read the precautions on the back before filling this page) n ϋ »ϋ ϋ &一; a a ϋ ϋ · ϋ H ϋ ϋ I» 522421 Printed by the Consumers ’Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 B7 V. Description of the invention (2) Gel materials (such as silica gel, silica gel ), Its coating method uses a coating device to pre-configure antistatic and anti-reflection coating materials, and sprays or spins the coating method by means of a nozzle provided on the coating device. The material is uniformly sprayed on the outer wall of an information display panel in the form of mist particles, so as to form an antistatic and anti-reflective coating layer, or multiple layers of antistatic and anti- Reflective coating. In this so-called "wet coating" method, the anti-reflection and anti-static effects are not stable and cannot be effective because the spray amount and uniformity of each anti-static and anti-reflective coating material are difficult to control. Improving the video quality of video displays, and in these "wet coating" processes, each of the antistatic and anti-reflective coating materials will also cause problems such as recycling difficulties and environmental pollution. SUMMARY OF THE INVENTION In view of the many problems caused by the anti-static and anti-reflective coating materials in the wet coating process of the aforementioned traditional video display, the inventor has invented an "information display using ion sputtering method" "Coating with low resistance and low reflectance" is planned to form an ITO transparent film and a silicon dioxide film by sequential sputtering on the outer wall of an information display, respectively, by ion sputtering. An antistatic and an anti-reflection coating layer on the display panel of the display. The main purpose of the present invention is to use a dry coating method to sequentially form an ITO transparent film and a silicon dioxide film on the outer wall of the display panel of an information display. Through a simple and pollution-free process, the ITO film is used. The low-resistance characteristic and the low-reflectivity characteristic of the silicon dioxide film form an antistatic and an anti-reflective coating layer on the outer wall surface of the display panel of the information display in order. Description of the drawings: Figure 1 is a schematic longitudinal sectional view of a traditional color cathode ray tube; This paper size is applicable to China National Standard (CNS) A4 (210 X 297 mm) VII ----------- Order · -------- (Please read the precautions on the back before filling out this page) 522421 Printed by the Consumer Property Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 B7 V. Invention Description) Figure 2 is antistatic coating Layer and the anti-reflection coating layer are applied to a conventional color cathode ray tube display panel in a partial cross-sectional view. Description of the drawing number in the drawing: Glass tube body ... · ... ...... 12 Display panel ......... 14, 40 parts ......... 18 Funnel part ... ..... 16 Gastrointestinal Gun ...... · 20 Fluorescent Layer ............ 24 Antistatic Coating Layer ............ 46 Antireflection Coating Layer ....... ...... 48 Conductive element ... · ... ...... 50 Detailed description: According to the general traditional color cathode ray tube 10, see FIG. 1, which mainly includes a sealed glass envelope 12 The tube body 12 is provided with a display plate 14, a neck portion 18 and an intermediate funnel port ion 16. The inner wall surface of the display panel 14 is coated with a fluorescent layer. (phosphor screen) 24, the fluorescent layer 24 includes a plurality of fluorescent units capable of emitting fluorescence, and a plurality of electron guns 20 arranged in a straight line are provided in a neck portion 18 of the sealed glass tube body 12. In order to generate three-color electron beams 22, which are controlled by a magnetic deflection yoke, they can be deflected horizontally and vertically and focused on the fluorescent layer 24. When the three-color electron beams generated by the color cathode-ray tube 10 are focused on each of the fluorescent units on the inner wall surface of the display panel 14, the units will emit colored light for display on the display panel 14. Video image. Referring to FIG. 2, it is a schematic partial cross-sectional view of a display panel on a conventional color cathode ray tube. The inner wall surface of the display panel 40 is coated with a fluorescent layer 42, and the outer wall surface is coated with a coating layer 44. . The fluorescent layer 42 is composed of a plurality of fluorescent units spaced from each other and distributed in a dot s or st ripes pattern. The coating layer 44 includes an inner anti-static coating layer 46 and an outer layer of anti--4. This paper size is applicable to China National Standard (CNS) A4 specifications (210 X 297 mm) (Please read the precautions on the back before (Fill in this page) -------- Order --------- 522421 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 B7 V. Description of the invention (j) Reflective coating 48 A conductive element 50 is connected to the surface of the electrostatic coating layer 46. The conductive element 50 is used to connect the display panel 40 to a ground terminal to effectively remove the electrostatic charge accumulated on the outer wall surface of the display panel 40; the anti-reflection coating The layer 48 is used to reduce the reflection of the external wall surface of the display panel 40 to the external ambient light, so that the display panel 14 can present a clearer video image. The present invention is mainly directed to the coating methods used in the aforementioned conventional antistatic and anti-reflection coatings, and the ion sputtering method is used instead, the so-called "dry coating method". In one preferred embodiment of the present invention, The coating method involves striking a target in a sputtering chamber with positive ions of argon (A0 to an indium tin oxide (Indium Tin Oxide, hereinafter referred to as IT0)), so that The IT0 component was struck out and evenly attached to the outer wall of a display panel of an information display, and a uniform ITO transparent film was formed thereon. 嗣 Then, the ion sputtering method was used to align the positive ions (Ar +) with argon. The silicon dioxide (Si02) target is impacted, so that the silicon dioxide (Si02) component in the target is knocked out and evenly adhered to the IT0 transparent film surface formed on the outer wall of the display panel of the information display. A silicon dioxide film is formed. In another embodiment of the present invention, the coating method involves colliding a target of an indium-tin alloy with a positive ion of argon (A0) in a sputtering chamber. Plutonium, causing the indium-tin component in the sacrificial material to be knocked out, and The oxygen molecules in the oxygen introduced in the chamber react to form indium tin oxide, which is evenly attached to the outer wall of a display panel of an information display, and a uniform IT0 transparent film is formed thereon. In another implementation of the present invention In the example, the coating method uses an ion sputtering method to strike a silicon target with positive ions (Ar +) of argon, so that the silicon (Si) component in the target is impacted, and the sputtering Oxygen molecules in the oxygen introduced into the chamber react, and then uniformly adhere to the surface of the IT0 transparent film formed on the outer wall of the display panel of the information display to form a silicon dioxide film. In the present invention, since the IT0 The transparent film has a low-resistance conductive property, so that the IT0 transparent film is connected to a conductive element provided on the peripheral edge of the outer wall of the display panel of the information display to form an antistatic coating layer, and the coating layer can use the conductivity The component guides the static voltage accumulated on the display panel to a ground terminal connected to the conductive component, so as to effectively eliminate the static voltage caused to the information display. Home Standard (CNS) A4 Specification (210 X 297 Public Love) (Please read the precautions on the back before filling this page) Order ---------% 522421 A7 B7 V. Description of Invention (5) Adverse Impact In addition, since the silicon dioxide film has physical characteristics such as high hardness, low reflectance, and high permeability, the silicon dioxide film will become an anti-reflection coating layer on the outer wall of the display panel of the information display for Reduce the reflection of the external wall surface of the display panel to the external ambient light, so that the information display can display a clearer video image. In a preferred embodiment of the present invention, the information display is formed on the external wall surface of the display panel. The thickness of the ITO transparent film is about I8 ~ 35 legs (where η = 10 !, meters), and the thickness of the silicon dioxide film coated on the ITO transparent film is about 110 ~ 14nm. (Where ηΞΐ £! 'M = meter), within these feasible thickness ranges, the thickness of the ITO transparent film is 20 ~ 22nm, and the thickness of the sand dioxide film is within the range of 120 ~ 125mn. The information display is the best. The above description is only a preferred embodiment of the present invention. However, the scope of the claimed rights of the present invention is not limited to the application on the display panel of a color cathode ray tube. The technical contents disclosed in the invention, equivalent applications that can be easily considered on display panels of other information displays (such as plasma displays or liquid crystal displays), should all not depart from the protection scope of the present invention. (Please read the precautions on the back before filling out this page) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs This paper is in accordance with China National Standard (CNS) A4 (210 X 297 mm)

Claims (1)

522421 A8 B8 C8 D8 六、申請專利範圍 1、 二a利用離子濺鍍法令資訊顯示器具備低電阻及低反射率之塗佈,係於 一濺鍍室中,利用離子濺鍍法,在一資訊顯示器之顯示面板外壁上,先濺鍍形成 一 ITO透明膜,嗣,再利用離子濺鍍法,於該ITO透明膜之外側表面,濺鍍形 成一二氧化矽膜,俾在該資訊顯示器之顯示面板外壁表面上依序形成一抗靜電及 一抗反射塗佈層。 2、 如申請專利範圍第1項所述之利用離子濺鍍法令資訊顯示器具備低電阻 及低反射率之塗佈,其中該ΙΤ〇透明膜係以離子對一 ITO靶材進行撞擊,令該 靶材中之ΙΤΘ成份被撞擊出來,而均勻地附著在該訊顯示器之顯示面板外壁。 3、 如申請專利範圍第1項所述之利用離子濺鍍法令資訊顯示器具備低電阻 及低反射率之塗佈,其中該ITO透明膜係以離子對一銦-錫合金靶材進行撞擊, 令該靶材中之銦-錫成份被撞擊出來,而與該濺鍍室中所導入之氧氣中之氧分子 發生反應,形成銦錫氧化物,再均勻地附著在該資訊顯示器之顯示面板外壁。 4、 如申請專利範圍第1項所述之利用離子濺鍍法令資訊顯示器具備低電阻 及低反射率之塗佈,其中該二氧化矽膜係以離子對一二氧化矽靶材進行撞擊, 令該靶材中之二氧化矽成份被撞擊出來,均勻地附著在該ITO透明膜表面上。 5、 如申請專利範圍第1項所述之利用離子濺鍍法令資訊顯示器具備低電阻 及低反射率之塗佈,其中該二氧化矽膜係以離子對一矽靶材進行撞擊,令該耙 材中之矽成份被撞擊出來,而與該濺鍍室中所導入之氧氣中之氧分子發生反應, 再均勻地附著在該ITO透明膜表面上。 6、 如申請專利範圍第1項所述之利用離子濺鍍法令資訊顯示器具備低電阻 及低反射率之塗佈,其中該ITO透明膜之厚度約在18〜35nm範圍。 7、 如申請專利範圍第1項所述之利用離子濺鍍法令資訊顯示器具備低電阻 及低反射率之塗佈,其中該二氧化矽膜之厚度約在110〜140nm範圍。 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐) (請先閱讀背面之注意事項再填寫本頁) 訂---------線· 經濟部智慧財產局員Η消費合作社印製522421 A8 B8 C8 D8 6. Scope of patent application 1. Second a. Use the ion sputtering method to make the information display with low resistance and low reflectance coating. It is placed in a sputtering chamber. Ion sputtering is used in an information display. On the outer wall of the display panel, a ITO transparent film is firstly formed by sputtering, and then a silicon dioxide film is formed by sputtering on the outer surface of the ITO transparent film by ion sputtering, which is then placed on the display panel of the information display. An antistatic and an antireflection coating layer are sequentially formed on the outer wall surface. 2. Use the ion sputtering method described in item 1 of the patent application to make the information display with low resistance and low reflectance coating, where the ITO transparent film impacts an ITO target with ions to make the target The ΓΘ component in the material was struck out and evenly attached to the outer wall of the display panel of the information display. 3. The information display is coated with low resistance and low reflectance using the ion sputtering method as described in item 1 of the scope of the patent application, wherein the ITO transparent film is impacted by an ion against an indium-tin alloy target. The indium-tin component in the target material is knocked out, and reacts with oxygen molecules in the oxygen introduced in the sputtering chamber to form indium tin oxide, and then uniformly adheres to the outer wall of the display panel of the information display. 4. As shown in item 1 of the scope of the patent application, the information display is coated with low resistance and low reflectance by the ion sputtering method, wherein the silicon dioxide film is impinged on the silicon dioxide target with ions, so that The silicon dioxide component in the target material was impacted out and evenly adhered to the surface of the ITO transparent film. 5. As shown in item 1 of the scope of the patent application, the information display is coated with low resistance and low reflectance by using ion sputtering. The silicon dioxide film impacts a silicon target with ions to make the rake. The silicon component in the material is struck out, and reacts with the oxygen molecules in the oxygen introduced into the sputtering chamber, and then uniformly adheres to the surface of the ITO transparent film. 6. Use the ion sputtering method described in item 1 of the scope of the patent application to make the information display with low resistance and low reflectance coating, where the thickness of the ITO transparent film is about 18 ~ 35nm. 7. The information display is coated with low resistance and low reflectance by the ion sputtering method as described in item 1 of the scope of patent application, wherein the thickness of the silicon dioxide film is in the range of 110 ~ 140nm. This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) (Please read the precautions on the back before filling this page) Order --------- Line · Member of Intellectual Property Bureau, Ministry of Economic AffairsΗ Printed by Consumer Cooperatives
TW90109324A 2001-04-18 2001-04-18 Spraying method for display panel with low resistance and low reflectivity using ion sputtering TW522421B (en)

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