五、發明說明（I ) 【本發明之領域】 本發明係關於-種眞空凸緣連接管及零件的密封裝 置’更有關於-種〇型環定位及固持固定裝置供用於is〇_ NW型眞空凸緣管或零件。 【本發明之背景】 先前技藝之眞空凸緣〇型環中心環於典型上係由銘或 不銹鋼所製成，其被設計為當組裝及連接管使用在〗§〇_ N W眞殳始、封凸緣時固持一個彈性〇型環於定位。該中心 環只作用#平坦密封表面的凸、緣固持〇型冑於定位以及作 用於當管内氣體壓力小餘管外氣體壓力時防止〇型環往内 移動。 先前技藝之中心環設計有兩大缺點，這個缺點為中心 環内表面直徑無法與典型眞空管内表面直徑相符合，如 IS O-NW零件與眞空凸緣連接管。這個缺點在連接管或零 件中產生了 一個成梯狀的内表面，這個成梯狀的内表面產 生一個不穩定的氣體混亂流竄結果，由此可知會突然擴張 及/或犬然收縮。這種黏稠的氣體穿過這種類型的連接管 將會形成旋渦亂流及總氣體流量減少。這個缺點會導致氣 相反應、凝結、以及對一些機械式氣體管體造成提早故 障。 先前技藝之中心環設計之另一缺點係有關其，，直邊，，外 表面設計。在本發明中心環外環狀側表面與中心環環狀面 表面成直角，這產生了一個90。環肩其與密封凸緣配對管 本紙張尺制用中國國家標^cns)a4規格⑽x 297公爱） 五、發明說明（义） 口部仏相對合。先前技藝中心環9 0。環肩之設計，當組裝 中心裱及眞空管時，為了避免綁固，需要將密封凸緣之密 封表面相互接近平行的排列一起。 因此，需要改善眞空凸緣〇型環中心環，以有效消除 先則技藝眞空凸緣〇型環中心環之氣流亂流及綁固之 題。 【本發明之概述】 一固足裝置供於組裝或使用時用以圈圓及固持一彈性 〇型環使定位於眞空密封凸緣之間，具有義出一外表 面的環狀體和位於外表面作為固持一彈性〇型環之〇型環 固持凸緣。環狀體外表面定義出一對傾斜表面部分，當組 裝時其能夠使固定裝置插入眞空密封凸緣之間而不需2任 何實質的綁固。 而 本發明之一風貌，係有關一傾斜表面部位，其由0型 環固持元件向内變得細薄，其中傾斜表面部位從一垂直於 〇型壤固持it件之參考線測量以—大約1G度之角向内變得 傾斜表面部位定』 本發明之另一風貌，係有關一第 於固足裝置的外表面，第二傾斜表面部位從一 0型環固4 7G件足第二側邊以一大約丨〇度之角向内變得細薄，其係 一垂直於個別〇型環固持元件側邊之參考線測量。μ 本發明之更-風貌，環狀體定義出一圓柱内表面及--個密封凸緣定義出一個已先決定的圓柱内表面直徑，： 521133 A7 五、發明說明（$) 以有 環狀内表面具有一直徑與已先決定的直徑大致相同 效防止氣流亂流效應。 【圖式簡單説明】 第1圖係本發明眞空凸緣〇型環中心環之立體圖。 第2圖係第1圖的0型環中心環俯視圖。 第3 A圖係第2圖0型環中心環經3 A - 3 A線的剖示圖。 第3 B圖係顯示安裝一 〇型環於第3 a圖之〇型環中心環上。 第4 A圖係本發明之〇型環中心環應用到眞空管裝置之一具 體例之爆炸圖。 第4B圖係第4A圖眞空管裝置之立體組裝圖。 訂 第5 A圖係對第4B圖之眞空管裝置經5 a-5 A線的剖示圖。 第5 B圖係顯示本發明〇型環中心環當其應用到第5 a圖所 示元件之組裝時之自我校準風貌。 【圖號説明】 10 〇型環中心環 16 第二傾斜圓周 外表面 22環狀檔止表面 28第一環狀面表 面 12環狀體 14第一傾斜圓周外 表面 18 〇型環置放凸緣 20 0型環座表面 24環狀檔止表面 30第二環狀面表面 26内圓柱表面 32向度或厚度 A7 五、發明說明（今 3 4外直徑 40 寬 45參考線 51直徑V. Description of the invention (I) [Field of the invention] The present invention relates to a kind of sealing device for hollow flanged connecting pipes and parts, and more about a type O-ring positioning and holding fixing device for is0_NW type Empty the flanged tube or part. [Background of the present invention] The hollow flange O-ring center ring of the prior art is typically made of Ming or stainless steel. It is designed to be used when assembling and connecting pipes. An elastic O-ring is held in place for the flange. The center ring only acts on the #flat sealing surface of the convex, edge-holding type O for positioning and for preventing the type O ring from moving inward when the gas pressure in the pipe is small and the gas pressure outside the pipe. The prior art center ring design has two major shortcomings. This shortcoming is that the inner surface diameter of the center ring cannot match the inner diameter of a typical hollow tube, such as IS O-NW parts and hollow flange connecting tubes. This shortcoming creates a ladder-like inner surface in the connecting pipe or part. This ladder-like inner surface results in a chaotic flow of unstable gas, and it can be known that it will suddenly expand and / or contract. This viscous gas passing through this type of connecting pipe will create turbulent turbulence and reduce the total gas flow. This disadvantage can cause gas reaction, condensation, and early failure of some mechanical gas pipes. Another disadvantage of the prior art center ring design is related to its, straight edge, and outer surface design. In the present invention, the outer annular side surface of the central ring is at right angles to the surface of the central annular surface, which results in a 90. The ring shoulder is matched with the sealing flange. The paper rule is made with Chinese national standard ^ cns) a4 size (x 297). 5. Description of the invention (meaning) The mouth is opposite. Prior art center ring 9 0. The design of the ring shoulder, when assembling the center mounting and emptying the tube, in order to avoid binding, the sealing surfaces of the sealing flanges need to be arranged close to each other in parallel. Therefore, it is necessary to improve the central ring of the hollow flange o-ring to effectively eliminate the problem of turbulent flow and binding of the central ring of the hollow flange o-ring. [Summary of the present invention] A foot-fixing device is provided for rounding and holding an elastic O-ring so as to be positioned between hollow sealing flanges when assembled or used, and has a ring body defining an outer surface and is located outside The surface serves as a 0-ring retaining flange for holding an elastic O-ring. The annular outer surface defines a pair of inclined surface portions, which can enable the fixing device to be inserted between the hollow sealing flanges during assembly without any substantial binding. One aspect of the present invention relates to an inclined surface portion, which becomes thinner inward from the O-ring retaining element, wherein the inclined surface portion is measured from a reference line perpendicular to the 0-type soil retaining it-part to about 1G The angle of the degree becomes inward, and the inclined surface portion is fixed. ”Another aspect of the present invention relates to the outer surface of the first foot-fixing device, and the second inclined surface portion is fixed from a 0-shaped 4 7G foot second side. It becomes thinner inward at an angle of about 0 °, which is measured by a reference line perpendicular to the side of the individual O-ring retaining element. μ A more elegant aspect of the present invention, a ring-shaped body defines a cylindrical inner surface and a sealing flange defines a diameter of a cylindrical inner surface that has been determined in advance: 521133 A7 V. Description of the invention ($) The inner surface has a diameter approximately the same as the diameter determined in advance to prevent airflow turbulence. [Brief description of the drawings] FIG. 1 is a perspective view of the center ring of the hollow flange O-ring according to the present invention. Fig. 2 is a plan view of the center ring of the 0-ring in Fig. 1; Figure 3 A is a sectional view of the center ring of the 0-ring in Figure 2 taken along line 3 A-3 A. Figure 3B shows the installation of a type 10 ring on the center ring of the type 0 ring in Figure 3a. Fig. 4A is an exploded view of a specific example of the application of the O-ring central ring of the present invention to a plutonium air pipe device. FIG. 4B is a perspective assembly view of the air pipe device in FIG. 4A. Figure 5A is a cross-sectional view of the 眞 empty air traffic control device shown in Figure 4B through line 5a-5A. Figure 5B shows the self-calibration appearance of the O-ring central ring of the present invention when it is applied to the assembly shown in Figure 5a. [Illustration of figure number] 10 o-ring central ring 16 second inclined circumferential outer surface 22 annular stop surface 28 first annular surface surface 12 annular body 14 first inclined circumferential outer surface 18 o-ring placing flange 20 0 ring seat surface 24 ring stop surface 30 second ring surface 26 inner cylindrical surface 32 direction or thickness A7 5. Description of the invention (now 3 4 outer diameter 40 width 45 reference line 51 diameter
ί請先閱讀背面之注*事項再填寫本頁) 【車父佳具體實施例之詳細説明】 δ •丁 位 62可分夾環 68密封表面 74 配對管口 絰濟部智慧財產局員工消費合作社印製 ^ 併參閱第1、2及3 Α圖，一個依據本發明具體實 |(Please read the note on the back before filling in this page) [Detailed description of the specific embodiment of Chevujia] δ • Ding 62 62 separable clamp ring 68 sealing surface 74 Pairing nozzles Ministry of Economic Affairs Intellectual Property Bureau Staff Consumer Cooperative Print ^ and refer to Figures 1, 2 and 3 Α, a specific embodiment according to the present invention |
她例^ * 2凸緣Q型環中心環被顯示並經標示為數字1 G。 I 〇土％中、5衣1〇包括一具有一内圓柱表面％及第一和第二 ^ 傾斜圓周外表面14、16之環狀體12，其引導或融合有一 · 向外延伸之裱狀〇型環置放凸緣1 8。〇型環置放凸緣1 8定 | 減出對大髌上平坦之環狀檔止表面2 2、2 4及一個延伸 j ，其間之環狀凹陷之0型環座表面2G。環狀體12也定義& i 第一和第二環狀面表面28、3〇其分別延伸介於第一和第 j 二傾斜圓周外表面14、16以及内圓柱表面26之間。 j 0型環中心環10可以依所欲氣體暴露之應用而採用任 j 何適當的材質裝配，例如鋁或不銹鋼。在第丨、2及3 A圖 | 6 521133 經濟部智慧財產局員工消費合作社印4·/^ A7 --------— B7 ___ 五、發明說明（f ) 惑具體實施例中中係顯示一個尺寸為4〇釐米之Νψ_4〇ώ 緣，因此，中心環1 〇具有一外直徑3 6，其從第一和第二 傾斜圓周外表面14、16與〇型環置放凸緣18合併交接點 測量大約是i.614英吋，〇型環置放凸緣定義出一個約 1.73 0英吋之外直徑34，〇型環中心環1〇之内圓柱形表面 2 6足義出一個約1 · 3 7 0英吋的内直徑3 8。中心環丨〇具有一 咼度或厚度3 2，其從第一和第二環狀面表面2 8、3 〇之間 測量約0.3 24英吋；而每一個第一和第二環狀面表面具有 、、’勺0 · 1 0 8英叶之支4 0 ,母一個第一和第二傾斜圓周外表 面1 4、1 6有一約〇 · 〇 8 5英吋的高4 2，且其從與環狀檔止表 面2 2、2 4呈垂直之參考線4 5測量傾斜有一個約丨〇度之角 44。Ο型環座表面20具有一約ο·。4英吋的寬以及一約 0.104英吋的半徑，這足夠讓〇型環座2〇接納一個如第3b 圖所示之具有一約0.2 10英吋直徑51之彈性〇型環5〇。結 合至本發明中心環10之〇型環50，其製造可以依工作溫 度、氣ta的使用及系統之眞2度而選用石夕或任何其他適合 的彈性物質。 以上提供的尺寸僅提供説明為目的，本發明之〇型環 中心環可以依據此所示和描述之4 0釐米設計等比尺寸而延 伸至所有ISO-NW尺寸，這是可以被理解。 請參閱第4 A圖，顯示本發明之〇型環中心環丨〇被組 裝在分別具有第一和第二ISO-NW眞空凸緣54、58之第 一和第二眞空管部位52、56之間，54、58其被夾環裝置 60緊壓在一起，夾環裝置60包括有一可分夾環62及一央 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） ·1--------tTi—,---- (請先閱讀背面之注咅？事項再填寫本頁) »H33 經濟部智髮財產局員工消費合作社印製 A7 -—-— --§z__ —____ 五、發明說明（b ) 環拇指旋螺釘扣件64。這個ο型環中心環1〇將ο型環5 0定 位並固持在第一和第二IS0-NW眞空凸緣54、58之個別 的岔封表面6 6、6 8之間，眞空管部位5 2、5 6經完整組裝 顯示於第4 Β圖中。 請參閱第5 Α圖，顯示經完整組裝眞空管部位5 2、5 6 之第4 B圖中5 A - 5 A線之剖面圖，完整的顯示第4 B圖眞空 管部位5 2、5 6。由此可見，中心環丨〇的環狀内表面2 6與 ISO-NW凸緣管部位52、56的内表面70、72構成平整以 提供一個平坦的内徑通道穿過這個連接處。因此，本發明 < 〇型環中心環1 〇克服了一般氣體管體系統應用先前技藝 中心環於該等連結處所產生之突然擴張及/或突然收縮之 效應問題。 此外，第一和第二傾斜圓周外表面1 4、1 6實質上可 以防止中心環10當其被插入定義於IS〇_NW凸緣54、58 中之配對管口 7 4、7 6之中時所需要之綁固。更特別的， 於裝配時，中心環1 〇上之傾斜圓周外表面丨4、丨6在向配 對管口 7 4、7 6接觸操作時，可以自我校準中心環丨〇至相 對於配對管口 7 4、7 6之一中心位置，即使在最開始時凸 緣5 4、5 8未排列平行如第5 B圖所示。 每一個配對管口包括有一嚙合中心環之一傾斜表面部 位之圓柱配對管口表面，以及一垂直於圓柱配對管口表面 且間隙接觸中心環之一環狀表面之環狀配對管口表面。 請再參閲第5 A圖，〇型環凸緣丨8的環狀檔止表面 22、24嚙合凸緣54、58的密封表面66、68，如此當〇型 ^--------itrll· —ί---- (請先閱讀背面之注音？事項再填寫本頁)Her example ^ * 2 flange Q-ring central ring is shown and marked with the number 1 G. I 〇 soil%, 5 clothing 10 includes a ring body 12 having an inner cylindrical surface% and first and second ^ inclined circumferential outer surfaces 14,16, which guide or merge a · outwardly extending mounting O-ring placement flange 18. The 0-ring placing flange 18 is determined. The flat ring-shaped stop surface 2 2, 2 4 and an extension j on the large cymbal are subtracted, and the ring-shaped recessed 0-ring surface 2G in between. The annular body 12 is also defined & i first and second annular surface surfaces 28, 30 which extend between the first and j second inclined circumferential outer surfaces 14, 16 and the inner cylindrical surface 26, respectively. The j-ring central ring 10 can be assembled in any suitable material, such as aluminum or stainless steel, depending on the intended gas exposure application. Figures 丨, 2 and 3 A | 6 521133 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 4 · / ^ A7 --------— B7 ___ V. Description of the Invention (f) In the specific embodiment The system shows an Nψ_4〇 margin with a size of 40 cm. Therefore, the center ring 10 has an outer diameter of 36, which places the flange 18 from the first and second inclined circumferential outer surfaces 14, 16 and 0-ring. The combined junction measurement is approximately i.614 inches, and the O-ring placement flange defines a diameter of approximately 1.73 0 inches outside the 34, O-ring center ring 10 within the cylindrical surface 2 6 feet. An inner diameter of about 38 inches. The central ring has a degree or thickness of 32, which measures about 0.3 24 inches from between the first and second annular surface surfaces 28, 30; and each of the first and second annular surface surfaces With a spoon of 0, 1 0, 8 and 8 leaves, a first and second inclined circumferential outer surface of the female 1 4 and 16 have a height of 4 2 about 5 inches, and it is from A reference line 45 perpendicular to the ring-shaped stop surface 2 2, 2 4 has an angle 44 of about 0 ° when measured inclination. The O-ring seat surface 20 has an approx. The width of 4 inches and a radius of about 0.104 inches are sufficient for the O-ring seat 20 to receive an elastic O-ring 50 having a diameter of about 0.2 10 inches 51 as shown in Figure 3b. Combined with the O-ring 50 of the central ring 10 of the present invention, its manufacture can be made of Shi Xi or any other suitable elastic substance depending on the operating temperature, the use of the gas ta, and the degree of the system. The dimensions provided above are for the purpose of illustration only. The O-ring of the present invention can be extended to all ISO-NW dimensions according to the 40 cm design isometry shown and described here, which can be understood. Please refer to FIG. 4A, which shows that the O-ring center ring of the present invention is assembled at the first and second hollow tube portions 52, 56 having the first and second ISO-NW hollow flanges 54, 58 respectively. 54 and 58 are tightly pressed together by a clamping ring device 60. The clamping ring device 60 includes a separable clamping ring 62 and a central paper. Applicable to China National Standard (CNS) A4 (210 X 297 mm). 1 -------- tTi —, ---- (Please read the note on the back? Matters before filling out this page) »H33 Printed by the Consumer Cooperative of the Intellectual Property Office of the Ministry of Economic Affairs A7 -—-—- -§Z__ —____ 5. Description of the Invention (b) Ring thumb screw 64. This ο-ring central ring 10 positions and holds the ο-ring 50 between the individual bifurcation sealing surfaces 6 6 and 6 8 of the first and second IS0-NW hollow flanges 54 and 58 and the hollow tube portion 5 2, 5 and 6 are shown in Figure 4B after being completely assembled. Please refer to Figure 5 Α, which shows the fully assembled hollow tube section 5 2, 5 6 in section 4B in Figure 5 A-5 A, which shows the complete blank tube section 5 2, 5 6 . It can be seen that the annular inner surface 26 of the central ring and the inner surfaces 70, 72 of the ISO-NW flange tube portions 52, 56 are flat to provide a flat inner diameter passage through this connection. Therefore, the present invention < o-ring central ring 10 overcomes the problem of the sudden expansion and / or sudden contraction of the central ring at these connections caused by the application of the prior art center ring in the general gas pipe system. In addition, the first and second inclined circumferential outer surfaces 1 4 and 16 can substantially prevent the center ring 10 from being inserted into the mating orifices 7 4 and 7 6 defined in the IS0_NW flanges 54 and 58. Tie-in when needed. More specifically, during assembly, the inclined circumferential outer surface on the center ring 10, 4 and 6 can be self-calibrated when contacting the paired nozzles 7 4, 7 6 with respect to the paired nozzles. One of the center positions of 7 4, 7 6 even if the flanges 5 4 and 5 8 are not aligned in parallel at the beginning as shown in Fig. 5B. Each of the paired nozzles includes a cylindrical paired nozzle surface that engages an inclined surface portion of the center ring, and a ringed paired nozzle surface that is perpendicular to the surface of the cylindrical paired nozzle and gaps contact an annular surface of the center ring. Please refer to FIG. 5A again. The annular stop surfaces 22, 24 of the O-ring flange 丨 8 engage the sealing surfaces 66, 68 of the flanges 54 and 58. Therefore, when the O-type ^ ------- -itrll · —ί ---- (Please read the phonetic on the back? Matters before filling out this page)
本紙張尺度適用中國國家標準（CNS)A4規格（21〇 x 297公釐 五、發明說明（7) 環50被順應於密封表面66、68以提供緊密封時可以其防 止過度壓縮。如在先前技藝的設計一般，本發明之中心環 10作用也在防止〇型環50當管内氣體壓力低於管外氣體= 力時往内移動。 ： 本發明之Ο型環中心環丨0能夠被使用在所有不需修改 的則_腳型眞空凸緣管或零件組。這包含所有is〇⑽ 型凸緣銜接的眞空或氣體輸送系統，此系統不限於半導體 程序設備、化學蝕刻系統、原生質或相關的離子蝕刻系 統、薄膜化學蒸汽沈澱物或取向附生系統、以及中度的眞 空程序設備。 ^ 、 應可以瞭解的是此處之具體例僅係範例，因此一位熟 悉此項技藝之人士，可以利用等效元件對所揭露之具體^ 為各種之改變和修飾，對於前述之本發明為任何之改變和 修飾被包含於所附申請專利範圍之本發明之範圍内。This paper size applies the Chinese National Standard (CNS) A4 specification (21 × 297 mm) V. Description of the invention (7) The ring 50 is conformed to the sealing surfaces 66, 68 to provide a tight seal to prevent excessive compression. As in the previous The design of the technique is general. The function of the center ring 10 of the present invention also prevents the O-ring 50 from moving inward when the gas pressure in the tube is lower than the gas outside the tube = force.: The O-ring center ring of the present invention can be used in All do not need to be modified _ foot type hollow flange tube or parts set. This includes all is0⑽ flange flanged hollow or gas delivery systems, this system is not limited to semiconductor process equipment, chemical etching systems, protoplasts or related Ion etching systems, thin film chemical vapor deposits or oriented epiphysial systems, and moderate airborne program equipment. ^, It should be understood that the specific examples here are only examples, so a person familiar with this technology can The equivalent elements disclosed are various changes and modifications, and any changes and modifications to the foregoing invention are included in the scope of the attached patent Out of the range.
99