五 40 在 發明說明 發明之背景 h發明領域 詳而 月係有關於具有主流路與分岐流路之四通閥，更 σ之，有關於具有優越密封性能且流量特性優越之 通閥。 2·關聯技術之記載 汔7，在半導體產業之漿液管線，或各種化學藥液管 '字々,L體由主流路分岐供給之管線中，以防止漿液凝集， 固集或結晶析出等故障作為目㈤，設置有用以洗淨分岐管 線之s線。作為一般的方法係如在第7圖所示組合二通閥 與T形管兩個之方法及如在第8圖所示組合三通閥一艰 閥與T形管之方法。不過’前者之方法在第7圖中，有所謂 自T形官48到二通閥5〇之流路藥液滯留之問題及有所謂自 一通閥50到T形管49之流路不能充分洗淨之問題。又後者 之方法自三通閥60到T形管55之流路也無法充分洗淨而變 成問題。 作為解決該等問題，已提案如在第6圖所示四通閥。 依據第6圖，38係本體，在下部具有主流路39與在上部具有 閥室41。主流路39之上部與閥室41之底面中央以連通口 連通，連通口 40之閥室側開口部之角部變成閥座部料。— 本體38之側面設置有兩個分岐流路42，43分別連通闊室 之底面外周部。此外，由於主流路39與分岐流路42，43大 致同樣高度地形成。分岐流路42，43變成略為l字开；。_ 接合於本體38上部之驅動部47之操作，設置於隔膜45ίγ^ 本紙張尺度適用中國國家標準（CNS) Α4規格（210X297公釐） 兩 ，二通Five 40 in the description of the invention Background of the invention h Field of the invention The details are about the four-way valve with the main flow path and the branch flow path, and more specifically, about the through-valve with superior sealing performance and excellent flow characteristics. 2. Description of related technologies 汔 7. In the slurry line of the semiconductor industry, or various chemical liquid pipe 'character', the L body is supplied by the main stream branch to prevent the slurry from agglomerating, solidifying or crystallizing. Now, set the s line to clean the diverging pipeline. As a general method, a method of combining two two-way valves and a T-shaped pipe as shown in FIG. 7 and a method of combining a three-way valve and a T-shaped pipe as shown in FIG. However, the method of the former is shown in Fig. 7. There is a problem that the medicinal solution stays in the flow path from the T-shaped valve 48 to the two-way valve 50 and the flow path from the so-called one-way valve 50 to the T-tube 49 cannot be fully washed. Net problem. In the latter method, the flow path from the three-way valve 60 to the T-shaped pipe 55 cannot be sufficiently cleaned, which becomes a problem. To solve these problems, a four-way valve as shown in FIG. 6 has been proposed. According to Fig. 6, the 38 series body has a main flow path 39 in the lower part and a valve chamber 41 in the upper part. The upper part of the main flow path 39 communicates with the center of the bottom surface of the valve chamber 41 through a communication port, and the corner of the valve chamber-side opening of the communication port 40 becomes a valve seat material. — On the side of the main body 38, two branch flow paths 42, 43 are respectively connected to the outer peripheral portion of the bottom surface of the wide room. In addition, the main flow path 39 is formed at substantially the same height as the branch flow paths 42 and 43. The divergent flow paths 42, 43 become slightly l-shaped; _ The operation of the driving part 47 connected to the upper part of the body 38 is set on the diaphragm 45. The paper size is applicable to the Chinese National Standard (CNS) A4 specification (210X297 mm).
訂— (請先閲讀背面之注意事項再填寫本頁) 520428 A7 B7 五、發明説明（2 中央之閥體46藉與閥座部44壓接，離間以施行閥之開閉。 該四通闊之使用方法表示在第9圖。依照第9圖，關閉 二通閉61開啟四通閥65，由主流路62分岐供給流體時候， 雖變成流體滯留於二通閥61與四通閥6 5之間，但由四通閥 65開閉主流路62，62，開啟二通閥61施行洗淨時，滯留之 流體係朝下流推送，可洗淨四通閥65及分岐流路63。 發明概述 不過，由於在如此四通閥分岐流路變成L字形狀，在 閥開啟狀態或關閉狀態中，流體之流動彎曲流量特性差， 又由於閥室大也有所謂完全地排出殘留於閥室内之藥液花 費時間之問題。而且，當閥作成關閉狀態洗淨分岐流路時， 藉洗淨液之壓力，朝上方推上隔膜，離間閥體與閥座也有 所謂洗淨液朝主流路漏出或主流路之藥液朝分岐流路漏出 之問題。 本發明鑑於上述習知技術之爭執點，提供一種具有優 越密封性能且流量特性優越之四通閥作為目的。 為達成上述目的，本發明之四通閥包含有：本體，具 有主流路，閥室與一對分岐流路；氣缸本體，具有活塞在 密封狀態下可滑動自如地嵌插於内部之氣缸部；及氣缸 蓋，接合該氣缸本體上部而使其密閉，又，前述主流路係 直線狀地配置於該本體下部，前述閥室係藉與該主流路垂 直地設置之連通口來連通該主流路，且該連通口之周緣成 為閥座，而前述分岐流路則形成為其内徑之最下部位置成 為與閥室底面大致在同一平面上，另，在前述活塞下面中 (請先閲讀背面之注意事項再填寫本頁) 奉 -訂— :線丨Order — (Please read the precautions on the back before filling out this page) 520428 A7 B7 V. Description of the invention (2 The central valve body 46 is crimped to the valve seat 44 to separate the valve to open and close the valve. The usage method is shown in Fig. 9. According to Fig. 9, when the two-way valve 61 is closed and the four-way valve 65 is opened, and the fluid is supplied from the main flow path 62, the fluid remains between the two-way valve 61 and the four-way valve 65 However, the four-way valve 65 opens and closes the main flow paths 62 and 62, and when the two-way valve 61 is opened for cleaning, the detained flow system is pushed downward, and the four-way valve 65 and the branching flow path 63 can be cleaned. In such a four-way valve, the divergent flow path becomes an L-shape. In the open or closed state of the valve, the flow bending characteristics of the fluid are poor, and because the valve chamber is large, the so-called complete discharge of the medicinal solution remaining in the valve chamber takes time. In addition, when the valve is closed to clean the divergent flow path, the diaphragm is pushed upward by the pressure of the cleaning liquid, and the so-called cleaning liquid leaking toward the main flow path or the liquid of the main flow path is also leaked from the valve body and the valve seat. The problem of the leakage of the North Korean branch road In view of the disputed points of the above-mentioned conventional technology, the present invention provides a four-way valve with superior sealing performance and excellent flow characteristics as an object. In order to achieve the above-mentioned object, the four-way valve of the present invention includes: a main body, a main flow path, and a valve chamber. And a pair of divergent flow paths; a cylinder body having a cylinder portion in which a piston can be slidably inserted into the interior in a sealed state; and a cylinder head which is connected to the upper portion of the cylinder body to be closed, and the main flow path is linear It is arranged on the lower part of the body. The valve chamber communicates with the main flow path through a communication port perpendicular to the main flow path, and the periphery of the communication port becomes a valve seat, and the branched flow path is formed as the inner diameter of the main flow path. The lowermost position is approximately on the same plane as the bottom surface of the valve chamber. In addition, under the aforementioned piston (please read the precautions on the back before filling this page).
520428 A7 I" — -----— B7_______ 五、發明説明（3 ) 央突設有滑動自如地被支承於前述氣缸本體底部之桿部， 而在該桿部頂端設置有壓接，離間前述閥座之閥體，且該 閥體係連結於由前述本體與氣缸部所夾持之隔膜，又，在 前述氣缸本體之側面設置有一對用以使前述活塞上下作動 之作動流體供給口。 本發明較理想之實施態樣係於上述四通閥中，在活塞 之上面與氣缸蓋下面之間配置有賦與活塞向下方移動勢能 的彈簧。 匕 本發明其他較理想的實施態樣係於上述四通閥中，在 活塞之下面與氣缸部底面之間配置有賦與活塞向上方移動 勢能的彈簧。 而且又，在上述四通閥中，於相對主流路正交之方向 設置有一對分岐流路。 ° 圖式之簡單說明 第1圖表示本發明四通閥之關閉狀態縱截面圖。 第2圖表示第1圖四通閥開啟狀態縱截面圖。 第3圖係第1圖之四通閥本體斜視圖。 第4圖表示本發明四通閥之第二實施態樣縱截面圖。 第5圖表示本發明四通閥之第三實施態樣縱截面圖。 第6圖表示習知四通閥關閉狀態之部份截面圖。 | 第7圖表不使用一通閥之藥液分岐供給管線外觀圖。 | 第8圖表示使用三通閥之藥液分岐供給管線外觀圖。 第9圖表示使用四通閥之藥液分岐供給管線外觀圖。 較佳實施態樣之記載 ............ 1 —— __ 本紙張尺度適财關緒iMCNS) A4祕(210X297公爱) "-----_ ............ (請先閲讀背面之注意事項再填寫本頁} ir丨 参· 520428 A7 ____B7_ 五、發明説明（4 ) 關於在本發明之實施態樣參閱圖式說明之。 第1圖表示本發明四通閥關閉狀態縱截面圖。第2圖表 示第1圖之四通閥開啟狀態縱截面圖。第3圖係第1圖之本體 斜視圖。第4圖表示本發明之四通閥第二實施態樣縱戴面 圖。第5圖表示本發明之四通閥第三實施態樣縱截面圖。 在圖中1係本體，具有在下部與主流路6，在上部面對 主流路6垂直地設置之連通口 7所連通之閥室8，將該連通口 7開口部之周緣部作為閥座2〇。閥室8變成比連通口 7之開口 部及閥體17之外徑還大（參閱第3圖），閥之關閉狀態中，藉 洗淨液沖洗分岐流路9, 10可洗淨閥室8。又，在本體1之上 部側面’面對主流路6正交方向地設置有連通閥室8之一對 分岐流路9，10。分岐流路9，1〇係其内徑之最下部位置變 為形成與閥至8之底面大致成一面。此外，該分岐流路9， 10面對主流路6平行地設置也可，在該情形有需要作高本體 1之高度。 在本實施態樣其中，在其内部形成分岐流路9，10之 一對接頭部30，31整體的突出形成於本體丨之上部側面（參 閱第1圖）。在本體1固定配管套管35係在設置於接頭部29 外周之公螺紋部31鎖緊蓋螺母33之陰螺紋部34·,施行夾持 固定在接頭部29之頂端部32所嵌合配管套管35之端部方 法。此外，該四通閥用以配管之構造並不限定於本實施態 樣，只要可配管之構造任一種均可。 2係氣缸本體，在内部具有圓筒狀氣缸部u，在下部具 有圓柱狀突部12，設置有從氣缸部丨丨底面中央貫穿突部 本紙張尺度適用中國國家標準（CNS) A4規格（210X297公爱） 7 ------------------------裝..................訂，...............線· (請先閲讀背面之注意事項再填寫本頁) 520428 A7 B7 五、發明説明（ 那樣的貝穿孔13。在貫穿孔13之内周面嵌插〇型環27。而 且，在氣缸本體2側面設置有分別連通汽缸部n上方及下方 之一對作動流體供給口 23，24。 3係氣缸蓋，在底面具有嵌插〇型環28之圓柱狀突部 ，藉在氣缸部π上部透過〇型環28嵌插圓柱狀突部丨斗， 以螺板，螺母（圖未表示）接合氣缸本體2。 4係活塞，在外周面嵌插〇型環26，在氣缸本體2之氣 缸部11透過0型環上下滑動自如地嵌插著。在下端面中央 整體的設置有連桿部15用以滑動自如地貫穿突出氣缸本體 2之貫穿孔13，在連桿部15之頂端部，設置有接合隔膜5之 閥體17之接合部16。又，藉活塞4之上面，氣缸部丨丨之内周 面與氣缸蓋3之下面形成上部空隙21，藉活塞4之下面，連 才干°卩15外周面與氣缸部11之内周面及底面形成下部空隙 22 〇 隔膜5係在中央下面整體的設置壓接，離間於閥室8之 閥座20之閥體π，該閥體17接合活塞4之連桿部15頂端部。 在隔膜5之外周緣部設置有圓筒狀膜部18，而且在圓筒狀膜 口 (Π 8之上端部外周設置有環狀突部丨9。藉本體丨之閥室8内 周面與氣缸本體2之突部12外周面夾持圓筒狀膜部18，而 且，環狀突部19係嵌插於設置在閥室8内周面上部之高低差 部25，同時藉本體i之閥室8内周面與氣缸本體2之突部12 外周面所夾持固定。該隔膜7之形狀並不限定於本實施態 樣’只要具有藉本體1與氣缸部丨丨可夾持之膜部任一種都 可，波紋管形等形狀也佳。 本紙張尺度適用中國國家標準（CNS) Μ規格（21〇χ297公釐〉 …：Ί:ν----------#…： (請先閲讀背面之注意事項再填寫本頁) •訂| 520428 A7 B7 五、發明説明（ 此外，在本發明本體等構件，由於财藥品性優越，不 純物之溶出少，聚四氟乙烯（以下稱為pTFE)或四氟乙烯全 氟（代）烷基乙烯醚共聚合物（以下稱為pFA)等含氟樹脂雖 可適合的使用，但多氣聯乙烯基、聚丙烯等其他塑料或金 屬也好並非特別的限定。又，隔膜材質雖適合的使用 PTFE、PFA等含氟樹脂，但也不特別的限定橡膠及金屬。 接著就本實施態樣四通閥之作動說明之。 第1圖雖表示閥之關閉狀態，但此時流體係流向主流 路6、未朝分岐流路9、1〇流。設在該狀態下自作動流體供 給口 24由外部注入作動流體（譬如壓縮空氣等）至下部空 隙，由於以該作動流體之壓力可推上活塞4,與這所接合之 連桿部15朝上方提升，接合於連桿部15下端部之閥體17也 離間閥座20朝上方提升，閥變成開啟狀態（第2圖狀態），流 體自主流路6朝分岐流路9，10流出。此時，與習知之閥相 較，由於流體之流動變成直線狀，壓力損失較少，可得優 越之流量特性。 一方面，在第2圖狀態，設自作動流體供給口 23注入 作動流體至上部空隙21，可推下活塞4，伴隨它，接合於連 桿部15與其下端部之閥體也朝下方推下壓接閥座2〇，閥就 變成關閉狀態（第1圖之狀態）。 在閥之開閉狀態（第1狀態），安裝於一方分岐流路侧， 譬如設開啟洗淨液供給用閥，則殘留於閥室8之流體藉洗淨 液推出，自他方之分岐流路排出施行分岐流路之洗淨。 時，由於設計分岐流路内徑之最下部位置變成與閥室8底 此 面 (請先閲讀背面之注意事項再填寫本頁) —裝— •訂— :線丨 衣紙張尺度適用中國國家標準（CNS) A4規格（210X297公爱） 9 520428 A7 _____B7 五、發明説明（7 ) 大致面一，流路變成直線狀，壓力損失較少，流量特性優 越，可有效地排出閥室内之藥液。而且，與習知之閥相較， 閥室8有簡化，又由於隔膜5之受壓面積也變小，隔膜$即使 洗淨液之壓力上升也不易朝上方推上，不易引起所謂離間 閥體17與閥座20而洗淨液朝主流路6漏出，或主流路6之藥 液朝分岐流路9，10漏出之問題。 第4圖表示本發明之第二實施態樣縱截面圖。與前述 第一實施態樣不同之點係在上部空隙21内配置彈簧36這一 點。活塞4藉彈簧之反發力推下，閥變成關閉狀態。設在該 狀態下自作動流體供給口 24由外部注入作動流體至下部空 隙22,由於以該作動流體壓力可推上活塞4，與這個接合之 連桿部15朝上方提升，接合於連桿部15下端部之閥體丨了也 朝上方提升’閥變成開啟狀態，流體自主流路朝分岐流路 9, 10流出。此時彈簣36雖被壓縮，但只要可排出下部空隙 22内之作動流體，闊再度變為關閉狀態。 第5圖表示本發明第三實施態樣之縱截面圖。與前述 第一實施態樣不同之點係在下部空隙22内配置彈簧37這一 點。活塞4藉彈簧37之反發力推上，閥變成開啟狀態，設在 該狀態下由外部自作動流體供給口 23注入作動流體至上部 空隙21 ’由於以該作動流體之壓力可推下活塞4，與這個所 接合之連桿部15朝下方推下，接合於連桿部15下端部之閥 體17也朝下方推下壓接閥座20，閥變成關閉狀態，遮斷自 流體之主流路6朝分岐流路9，1 〇之流入。此時彈簧17雖被 壓縮’但只要可排出上部空隙21内之作動流體，閥再度變 本紙張尺度適用中國國家標準（CNS) A4規格（210X297公釐） 10 (請先閲讀背面之注意事項再填寫本頁) 訂- 520428 A7 B7 五、發明説明（8 ) _ 成開啟狀態，流體自主流路6朝分岐流路9，10流出。 本發明就如以上說明之構造，藉使用此構造可獲得以 下優越之效果。 (1) 在全閉時，洗淨液沖洗分岐流路時，由於分岐流路 形成壓力損失少，流量特性優越之形狀，亦即流路變成直 線狀，可有效地洗淨排出存留於閥室内之藥液，其結果， 能大幅縮短分岐流路之洗淨時間。 (2) 由於閥室簡化且隔膜之受壓面積小，洗淨液之壓力 即使上升隔膜也不易朝上方推上，不易引起所謂闊體與閥 座離間，洗淨液朝主流路漏出，或主流路之藥液朝分岐流 路漏出之問題。 (3) 在全開時，由於分岐流路變成直線狀，流量特性優 越，可比習知之閥流送出更多的流體，也可使用於含淤漿 之藥液。 (4) 設作為本體及隔膜之原料使用PTFE、PFA等含氟樹 脂，則耐藥品性變高，又由於朝流體之不純物溶出也少， 也可適合的使用於半導體產業中之超純水管線或各種化學 藥液管線。 (請先閲讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家標準（CNS) A4規格（210X297公釐） 11 520428 A7 B7 五、發明説明（9 ) 元件標號對照 1…本體 31…接頭部公螺紋部 2···氣缸本體 32…頂端部 4…活塞 33…蓋螺母 5…隔膜 34…陰螺紋部 6…主流路 35…配管套管 7…連通口 36，37…彈簧 8…閥室 38…本體 9，10…分岐流路 39…主流路 11…氣缸部 40…連通口 12…突部 41…閥室 13…貫穿孔 42，43…分岐流路 14…圓柱狀突部 44…閥座部 15…桿部 45…隔膜 16…接合部 46…閥體 17…閥體 47···驅動部 18…膜部 48，49···Τ形管 19…環狀突部 50…二通閥 20…閥座 55…Τ形管 21…上部空隙 60…三通閥 22…下部空隙 61…二通閥 23，24…作動流體供給口 62…主流路 25…高低差部 63…分岐流路 26，28···0型環 65…四通閥 29，30···接頭部 ---------蠢------------------、可----------------0 (請先閲讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家標準（CNS) A4規格（210X297公釐） 12520428 A7 I " — -----— B7_______ V. Description of the invention (3) The central protrusion is provided with a rod part slidably supported at the bottom of the cylinder body, and a crimp is provided at the top end of the rod part to separate the aforementioned A valve body of a valve seat, the valve system is connected to a diaphragm sandwiched by the main body and a cylinder portion, and a pair of operating fluid supply ports for moving the piston up and down are provided on a side surface of the cylinder body. A preferred embodiment of the present invention is the above-mentioned four-way valve. A spring imparting potential energy to the piston to move downward is arranged between the upper surface of the piston and the lower surface of the cylinder head. Another preferred embodiment of the present invention is the above-mentioned four-way valve. A spring imparting potential energy to the piston to move upward is arranged between the lower surface of the piston and the bottom surface of the cylinder portion. Furthermore, in the four-way valve described above, a pair of branched and branched flow paths are provided in a direction orthogonal to the main flow path. ° Brief Description of Drawings Fig. 1 is a longitudinal sectional view showing a closed state of the four-way valve of the present invention. Fig. 2 is a longitudinal sectional view of the four-way valve in the opened state of Fig. 1; Fig. 3 is a perspective view of the four-way valve body of Fig. 1. Fig. 4 is a longitudinal sectional view showing a second embodiment of the four-way valve of the present invention. Fig. 5 is a longitudinal sectional view showing a third embodiment of the four-way valve of the present invention. Fig. 6 is a partial sectional view showing a closed state of a conventional four-way valve. Figure 7 Appearance of the chemical liquid branch supply line without a one-way valve. Figure 8 shows the external view of a chemical liquid branch supply line using a three-way valve. FIG. 9 shows an external view of a chemical liquid branch supply line using a four-way valve. Records of the preferred implementation style ............ 1 __ This paper size is suitable for financial affairs iMCNS) A4 secret (210X297 public love) " -----_ ... ......... (Please read the precautions on the back before filling out this page} ir 丨 ref. 520428 A7 ____B7_ V. Description of the invention (4) For the implementation of the present invention, please refer to the schematic description. Fig. 1 shows a longitudinal sectional view of the four-way valve in the closed state of the present invention. Fig. 2 shows a longitudinal sectional view of the four-way valve in the opened state of Fig. 1. Fig. 3 is a perspective view of the main body of Fig. 1. Fig. 4 shows the present invention. A longitudinal sectional view of the second embodiment of the four-way valve. Fig. 5 shows a longitudinal sectional view of the third embodiment of the four-way valve of the present invention. In the figure, the 1-series body has a lower part and a main flow path 6, and an upper part. The valve chamber 8 communicated with the communication port 7 vertically disposed facing the main flow path 6, and the peripheral portion of the opening of the communication port 7 is regarded as the valve seat 20. The valve chamber 8 becomes larger than the opening of the communication port 7 and the valve body 17. The outer diameter is also large (see Figure 3). In the closed state of the valve, the valve manifold 8 can be cleaned by flushing the manifold flow paths 9, 10 with the cleaning solution. Also, the side of the upper part of the main body 1 faces the main flow path 6 positive A pair of branched flow paths 9, 10 communicating with the valve chamber 8 are provided in the intersection direction. The branched flow path 9, 10 is the lowest position of the inner diameter of the branched flow path 9 and 10, and is formed to be substantially the same as the bottom surface of the valve to 8. In addition, the The branched flow paths 9, 10 may be arranged parallel to the main flow path 6, in which case it is necessary to make the height of the main body 1. In this embodiment, a pair of joints of the branched flow paths 9, 10 are formed inside. The whole of the parts 30 and 31 protrudes from the upper side of the main body 丨 (see Fig. 1). The piping sleeve 35 is fixed to the main body 1 on the male screw portion 31 provided on the outer periphery of the joint portion 29 and the female screw of the cap nut 33 is locked. The portion 34 · is used to clamp and fix the end portion of the piping sleeve 35 fitted to the top portion 32 of the joint portion 29. In addition, the structure of the four-way valve for piping is not limited to this embodiment, as long as it can be Any type of piping structure is acceptable. The 2 series cylinder body has a cylindrical cylinder portion u inside, and a cylindrical protrusion portion 12 at the lower portion. The cylinder portion is provided to penetrate the protrusion from the center of the bottom surface. Standard (CNS) A4 specification (210X297 public love) 7 ---------- -------------- Installation ............ Order, ............ Thread (Please read the precautions on the back before filling in this page) 520428 A7 B7 V. Description of the invention (Such shell perforation 13. Insert the O-ring 27 into the inner peripheral surface of the through-hole 13. Also, in the cylinder body 2 A pair of working fluid supply ports 23 and 24 are provided on the side to communicate with one of the upper and lower pairs of the cylinder portion n, respectively. The 3 series cylinder head has a cylindrical projection on the bottom surface which is fitted with an o-ring 28, and passes through the upper portion of the cylinder portion π. The mold ring 28 is inserted into the cylindrical protrusion 丨 bucket, and the cylinder body 2 is joined with a screw plate and a nut (not shown). The 4-series piston is fitted with an O-ring 26 on the outer peripheral surface, and is inserted into the cylinder portion 11 of the cylinder body 2 to slide up and down through the O-ring. A link portion 15 is integrally provided at the center of the lower end surface so as to slidably penetrate through the through hole 13 of the cylinder body 2. A protruding portion 16 of the valve body 17 which joins the diaphragm 5 is provided at the top end portion of the link portion 15. In addition, the upper surface of the piston 4 forms an upper gap 21 between the inner peripheral surface of the cylinder portion 丨 and the lower surface of the cylinder head 3, and the outer peripheral surface of the cylinder portion 11 and the inner peripheral surface and the bottom surface of the cylinder portion 11 are formed by the lower surface of the piston 4. The lower gap 22 is formed. The diaphragm 5 is integrally provided with a crimp under the center, and is separated from the valve body π of the valve seat 20 of the valve chamber 8. The valve body 17 engages the top end portion of the connecting rod portion 15 of the piston 4. A cylindrical membrane portion 18 is provided on the outer peripheral portion of the diaphragm 5, and an annular protrusion 丨 9 is provided on the outer periphery of the upper end portion of the cylindrical membrane opening (Π 8). The inner peripheral surface of the valve chamber 8 of the main body 丨 and The cylindrical membrane portion 18 is sandwiched between the outer peripheral surface of the projection 12 of the cylinder body 2 and the annular projection 19 is inserted into the step portion 25 provided at the upper portion of the inner peripheral surface of the valve chamber 8 and the valve of the body i The inner peripheral surface of the chamber 8 and the outer peripheral surface of the protrusion 12 of the cylinder body 2 are clamped and fixed. The shape of the diaphragm 7 is not limited to this embodiment, as long as it has a membrane portion that can be clamped by the body 1 and the cylinder portion 丨 丨Either one is acceptable, and the shape of the corrugated tube is also good. The paper size applies the Chinese National Standard (CNS) M specification (21〇297297 mm) ...: Ί: ν ---------- # ...: (Please read the precautions on the back before filling in this page) • Order | 520428 A7 B7 V. Description of the invention (In addition, the components of the present invention, etc., have excellent properties due to their properties, and have less elution of impurities. Polytetrafluoroethylene (below It is called pTFE) or tetrafluoroethylene perfluoro (substituted) alkyl vinyl ether copolymer (hereinafter referred to as pFA). It can be used, but other plastics or metals such as multi-gas-linked vinyl and polypropylene are not particularly limited. Although the material of the separator is suitably a fluorine-containing resin such as PTFE or PFA, rubber and metal are not particularly limited. The operation of the four-way valve according to this embodiment will be described. Although FIG. 1 shows the closed state of the valve, the flow system flows to the main flow path 6, but not to the branch flow path 9, and 10 at this time. It is set to operate automatically in this state. The fluid supply port 24 injects an operating fluid (such as compressed air) from the outside into the lower space. The piston 4 can be pushed up by the pressure of the operating fluid, and the connecting rod portion 15 is lifted upward to be connected to the connecting rod portion. 15 The valve body 17 at the lower end is also lifted upward from the intermediate valve seat 20, and the valve is opened (the state shown in FIG. 2), and the fluid autonomous flow path 6 flows toward the branched flow paths 9, 10. At this time, compared with the conventional valve As the flow of the fluid becomes linear, the pressure loss is small, and excellent flow characteristics can be obtained. On the one hand, in the state of Fig. 2, the operating fluid supply port 23 is set to inject the operating fluid into the upper gap 21, and the piston 4 can be pushed down. , Companion Along with this, the valve body connected to the connecting rod portion 15 and its lower end portion also pushes down the crimp valve seat 20, and the valve is closed (the state shown in Fig. 1). In the valve opening and closing state (the first state) It is installed on the side of one branch flow path. For example, if a valve for supplying the cleaning liquid is opened, the fluid remaining in the valve chamber 8 is pushed out by the cleaning liquid and discharged from the branch flow path of the other side to perform the cleaning of the branch flow path. Because the lowermost position of the inner diameter of the diverging flow path is designed to be the same as the bottom of the valve chamber 8 (please read the precautions on the back before filling this page) —installation — • order —: line 丨 paper size applies to Chinese national standards (CNS ) A4 specification (210X297 public love) 9 520428 A7 _____B7 5. Description of the invention (7) Roughly, the flow path becomes straight, the pressure loss is small, the flow characteristics are superior, and the liquid medicine in the valve chamber can be effectively discharged. In addition, compared with the conventional valve, the valve chamber 8 is simplified, and the pressure area of the diaphragm 5 is also reduced. Even if the pressure of the cleaning liquid increases, it is not easy to push upward, and it is not easy to cause the so-called separation valve body 17 There is a problem that the cleaning solution leaks toward the main flow path 6 with the valve seat 20, or the chemical solution leaks toward the branch flow paths 9, 10 of the main flow path 6. Fig. 4 shows a longitudinal sectional view of a second embodiment of the present invention. The difference from the first embodiment is that a spring 36 is arranged in the upper gap 21. The piston 4 is pushed down by the reverse force of the spring, and the valve is closed. In this state, the self-actuating fluid supply port 24 is used to inject the actuating fluid from the outside into the lower gap 22, and the piston 4 can be pushed up by the actuating fluid pressure. 15 The valve body at the lower end also lifts upwards; the valve becomes open, and the fluid autonomous flow path flows toward the sub-flow path 9, 10. At this time, the bomb 36 is compressed, but as long as the working fluid in the lower gap 22 can be discharged, it will be closed again. Fig. 5 is a longitudinal sectional view showing a third embodiment of the present invention. The difference from the first embodiment is that the spring 37 is arranged in the lower gap 22. The piston 4 is pushed up by the reverse force of the spring 37, and the valve is opened. In this state, the operating fluid is injected from the external self-actuating fluid supply port 23 into the upper gap 21 '. The piston 4 can be pushed down by the pressure of the acting fluid. When the connecting rod portion 15 engaged with this is pushed downward, the valve body 17 connected to the lower end portion of the connecting rod portion 15 is also pushed downward to press the valve seat 20, the valve becomes closed, and the main flow path from the fluid is blocked. The 6 flows into the divergent flow path 9,10. At this time, although the spring 17 is compressed, as long as the working fluid in the upper gap 21 can be discharged, the valve will be changed again. The paper size will apply the Chinese National Standard (CNS) A4 specification (210X297 mm). 10 (Please read the precautions on the back first) (Fill in this page) Order-520428 A7 B7 V. Description of the invention (8) _ In the open state, the fluid autonomous flow path 6 flows toward the sub-flow paths 9, 10. The present invention has a structure as described above, and the following superior effects can be obtained by using this structure. (1) When fully closed, when the washing liquid flushes the manifold flow path, the manifold flow path forms a shape with less pressure loss and excellent flow characteristics, that is, the flow path becomes linear, which can be effectively cleaned and discharged and stored in the valve chamber. As a result, the medicinal solution can drastically shorten the cleaning time of the divergent flow path. (2) Because the valve chamber is simplified and the pressure area of the diaphragm is small, even if the pressure of the cleaning liquid rises, the diaphragm is not easy to push upwards, which is not likely to cause the so-called wide body to separate from the valve seat, and the cleaning liquid leaks toward the mainstream, or the mainstream The problem of the leakage of the medicine from the road towards the divergent flow path. (3) When it is fully opened, the divergent flow path becomes straight, and the flow characteristics are superior. It can send more fluid than the conventional valve flow, and can also be used for slurry-containing medicinal solution. (4) The use of fluorinated resins such as PTFE and PFA as the raw material of the body and the diaphragm will increase the chemical resistance and reduce the dissolution of impurities into the fluid. It can also be used in ultrapure water pipelines in the semiconductor industry. Or various chemical liquid pipelines. (Please read the notes on the back before filling in this page) This paper size is applicable to the Chinese National Standard (CNS) A4 specification (210X297 mm) 11 520428 A7 B7 V. Description of the invention (9) Component number comparison 1 ... body 31 ... connector Thread part 2 ... Cylinder body 32 ... Tip part 4 ... Piston 33 ... Cap nut 5 ... Diaphragm 34 ... Female threaded part 6 ... Main flow path 35 ... Piping sleeve 7 ... Communication port 36, 37 ... Spring 8 ... Valve Chamber 38 ... Body 9, 10 ... Divided flow path 39 ... Main flow path 11 ... Cylinder part 40 ... Communication port 12 ... Protrusion 41 ... Valve chamber 13 ... Through holes 42, 43 ... Divided flow path 14 ... Cylinder-shaped projection 44 ... Valve seat portion 15 ... Rod portion 45 ... Diaphragm 16 ... Joint portion 46 ... Valve body 17 ... Valve body 47 ... Drive portion 18 ... Membrane portion 48, 49 ... T-shaped tube 19 ... Ring-shaped protrusion 50 ... Two Port valve 20 ... seat 55 ... T-tube 21 ... upper gap 60 ... three-way valve 22 ... lower gap 61 ... two-way valve 23, 24 ... actuating fluid supply port 62 ... main flow path 25 ... height difference portion 63 ... split flow Road 26, 28 ... 0-ring 65 ... Four-way valve 29, 30 ... Connectors --------- Stupid ----------------- - ， 可 ---------------- 0 (Please read the notes on the back before filling in this page) This paper size applies to China National Standard (CNS) A4 (210X297 mm) 12