TW517446B - Servomotor controller - Google Patents
Servomotor controller Download PDFInfo
- Publication number
- TW517446B TW517446B TW090108249A TW90108249A TW517446B TW 517446 B TW517446 B TW 517446B TW 090108249 A TW090108249 A TW 090108249A TW 90108249 A TW90108249 A TW 90108249A TW 517446 B TW517446 B TW 517446B
- Authority
- TW
- Taiwan
- Prior art keywords
- coefficient
- speed
- memory
- servo
- interference suppression
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B5/00—Anti-hunting arrangements
- G05B5/01—Anti-hunting arrangements electric
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
- G05B19/404—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by control arrangements for compensation, e.g. for backlash, overshoot, tool offset, tool wear, temperature, machine construction errors, load, inertia
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/41—Servomotor, servo controller till figures
- G05B2219/41145—Digital filter for compensation of servo loop
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/41—Servomotor, servo controller till figures
- G05B2219/41166—Adaptive filter frequency as function of oscillation, rigidity, inertia load
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/41—Servomotor, servo controller till figures
- G05B2219/41232—Notch filter
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Automation & Control Theory (AREA)
- Human Computer Interaction (AREA)
- Manufacturing & Machinery (AREA)
- Control Of Position Or Direction (AREA)
- Control Of Electric Motors In General (AREA)
- Numerical Control (AREA)
- Feedback Control In General (AREA)
Abstract
Description
517446 A7 B7517446 A7 B7
五、發明說明（1 ) [技術領域] 本發明係_採科來干❹㈣ 的共振頻率或振動的料較μ t κ卩便在機械 經濟鄭智慧財產局員工消費合作社印製 械系統之共振，並：==亦可抑制工作機械等機 亚徒阿響應性之伺服控制裝 [背景技術] 第1圖為表示具有以去除因德 矛、因機械系統固有振動數等而 形成之共振或振動為目# 嫌 ，、 機械/、振抑制濾波器的習用伺 服控制裝置之控制方塊圖。 ^ , 隹弟1圖中，1為位置指令產 生邛，2為位置控制部，3為 马迷度控制部，4係為了去除機 械系統之固有振動數等所形成 ^ _ 乂97〆、振或振動而插入之機械 共振控制濾波器，5為雪、户批生 ι 為瓜控制部，6為作為電流驅動裝置 :例如功率放大電路’ 7為驅動機機系統之伺服馬達，8 :、檢出伺服馬達7之旋轉位置之編碼器(encode)，9為 將編碼器8之輸出位置檢出信號，予以微分而算出速度之 :分裝置。以編碼器8及微分裝置9可構成馬達速度之檢 出，置。1〇為位置指令產生部1輸出之位置指令，η為編 碼器8輸出之位置回授作赛 1口就12為位置控制部2輸出之速 度指令’ 13為微分裝置9輸出之速度檢出信號（速度回授 W)’ 14為速度指令12與速度檢出信號13的差分之速 度偏差信號，15為速度控制部3輪出之電流指令。16為經 過機械共振抑制渡波器而再產生之遽波器輸出電流指令， Η為表不流經伺服馬達7的電流之電流回授芦號。 該伺服控制裝置係以編碼器8所檢出的伺服馬達7之 位置回授信號U追蹤調整位置指令產生部i所輸出的位置 ^紙張\度適用中關家標準（CNS)A4規格（21G X 297公 ^---------^ (請先閱讀背面之注意事項再填寫本頁) 312525 517446 五、發明說明（2 ) 指令信號1〇的方式使祠服馬達7轉動。又，為了使該動作 高速穩定，使位置控制部2依據位置指令信號1〇與位置回 授信號11間之偏差信號產生速度指令12，再以利用微分 裝置9將位置回授信號η微分而產生的 追縱調整該速度指…方式，使速度控制部二= 達7輸出電流指令15。為機械共振抑制遽波器4輸出之 電流指令。電流控制部5及功率放大器6以使表示流經飼 服馬達7的電流值的電流回授17追蹤調整電流指令“之 方式，控制流入飼服馬達7的電流。而]8為飼服馬達7 所驅動之機械系統，因而產生的反作用力19作用於飼服馬 達7的輸出。 訂 在本伺服控制裝置中，如果為了提高對飼服馬達7之 指令的追縱性，而使位置指令10至位置回授信號u之位 置迴圈(―)之響應性’或本身為速度指令12至速度回授 信號u的響應性之速度迴圈的響應性提高，則會因飼服馬 w㈣動之機械系統18中存在的固有振動數而產生機械 共振或振動。所以’不只使機㈣18之動作不穩定，而且 使伺服馬達7之控制迴圈本身亦不穩定。 上述飼服控制裝置為了減低機械共振或振動’可在速 度控制部3與電流控制部5之間插入機械共 …種機械共振抑制遽波器4需使用多個用以去= :::率成份之陷波渡波器(n〇tch mter)。在機械系統i 8 /有振動數較高’伺服控制系統不能充份響應之頻率帶 域’使用此種機械共振抑制濾波器4雖有效’但在機械系 本紙I度適 312525 517446 A7 五、發明說明（ 統U之固有振動數較低，機械之共振頻率或振動頻率較低 時’機械共振抑制濾波器4有在所設定的頻率之響應性降 低之缺點。因此’以追縱指令為目的之飼服控制系統，具 有不能使用該種機械共振抑制濾波器之缺點。 事 項 再 填杜 寫裝 本 · 頁 又’機械共振抑制遽波由可去除固定頻率成份之 陷波遽波器構成時，為了應用在成為問題的固有振動數低 的機械系，统，則有將許多電流指令之舊取樣數據，記憶於 記憶體之必要。近來數位取樣週期愈往高速化發展，愈產 生必須使記憶體容量增大之問題。 因此，本發明以獲得在較低頻率產生機械共振或振動 時，可抑制機械共振，提高響應性，並可減少用以保存數 據之記憶體的記憶容量之伺服控制裝置為目的。 [發明之概述] 線 慧 財 產 局 員 工 消 費 合 作 社 印 製 本發明之伺服控制裝置係一種使用伺服馬達而對機械 系統進行驅動控制之伺服控制裝置，具備··用以檢出伺服 馬達的位置之位置檢出裝置；用以檢出前述伺服馬達之速 度的速度檢出裝置；依據對前述伺服馬達的位置指令與上 述位置檢出裝置所輪出的位置回授之差分產生速度指令之 位置控制部，依據前述速度指令與前述速度檢出裝置所輸 出的速度回授信號之差分產生電流指令之速度控制部；及 依據別述電流指令，對前述伺服馬達施行電流控制之電流 控制部’其特徵為：在前述速度控制部與電流控制部之間， 配置具有前述機械系統的轉移函數之逆轉移函數之頻率特 性的外部干擾抑制濾波器，以該外部干擾抑制濾波器修正 7446V. Description of the invention (1) [Technical Field] The present invention is that the resonance frequency or vibration of the material which is dried up from the branch is more than μ t κ 卩, and it is in the resonance of the printing machinery system of the employee consumer cooperative of the Zheng Zhizhi Property Bureau. And: == Servo control device that can also suppress the responsiveness of working machines and other machines [Background Technology] The first figure shows the resonance or vibration formed by removing the German spear and the natural vibration number of the mechanical system.目 # Control block diagram of a conventional servo control device for mechanical and / or vibration suppression filters. ^, In the picture of 1st brother, 1 is the position command generation, 2 is the position control unit, 3 is the horse degree control unit, 4 is formed to remove the natural vibration number of the mechanical system, etc. _ 乂 97〆, 或 or The mechanical resonance control filter inserted by vibration, 5 is snow, household approval, melons control section, 6 is as a current drive device: for example, power amplifier circuit '7 is the servo motor of the driving machine system, 8 :, detection The encoder (encode) of the rotation position of the servo motor 7 is a signal for detecting the output position of the encoder 8 and differentiating it to calculate the speed: the dividing device. The encoder 8 and the differential device 9 can be used to detect and set the motor speed. 10 is the position command output by the position command generating unit 1, η is the position feedback output from the encoder 8 for the match 1 and 12 is the speed command output by the position control unit 2 '13 is the speed detection signal output by the differential device 9 (Speed feedback W) '14 is the speed deviation signal of the difference between the speed command 12 and the speed detection signal 13, and 15 is the current command issued by the speed control unit 3 rounds. 16 is an output current command of the oscillating wave generator which is regenerated through the mechanical resonance suppression wave crossing, and Η is a current feedback indicating the current flowing through the servo motor 7. The servo control device uses the position feedback signal U of the servo motor 7 detected by the encoder 8 to track and adjust the position output by the position command generation unit ^ paper \ degree. Applicable to Zhongguanjia Standard (CNS) A4 specification (21G X 297 male ^ --------- ^ (Please read the notes on the back before filling this page) 312525 517446 V. Description of the invention (2) The command signal 10 makes the shrine clothing motor 7 rotate. Also, In order to make the operation stable at high speed, the position control unit 2 generates a speed command 12 based on the deviation signal between the position command signal 10 and the position feedback signal 11, and then uses the differentiating device 9 to differentiate the position feedback signal η. Vertically adjust the speed finger mode, so that the speed control unit 2 = reaches 7 to output the current command 15. It is the current command output by the mechanical resonance suppression wave filter 4. The current control unit 5 and the power amplifier 6 make the indication flow through the feeding motor The current feedback of the current value of 7 and the tracking and adjustment of current command 17 control the current flowing into the feeding motor 7. And] 8 is the mechanical system driven by the feeding motor 7, and the reaction force 19 generated thereby acts on the feeding Output of motor 7 In this servo control device, if the response of the position command 10 to the position loop (―) of the position feedback signal u is increased in order to improve the followability of the command of the feeding motor 7, or the speed command itself From 12 to the response of the speed feedback signal u, the responsiveness of the speed loop will increase, and mechanical resonance or vibration will occur due to the number of natural vibrations existing in the mechanical system 18 that feeds the horse w. So 'not only make the machine 18 The operation is unstable, and the control loop of the servo motor 7 itself is also unstable. In order to reduce the mechanical resonance or vibration of the feeding control device, a kind of machinery can be inserted between the speed control unit 3 and the current control unit 5 ... The resonance suppressing wave filter 4 needs to use a plurality of notch wave filters (n0tch mter) to remove = :: rate components. In the mechanical system i 8 / high vibration number, the servo control system cannot fully respond Frequency band 'Although this type of mechanical resonance suppression filter 4 is effective', but the degree of mechanical paper is 312525 517446 A7 V. Description of the invention (The natural vibration number of the system is low, and the resonance frequency or vibration frequency of the machine is lower than The 'mechanical resonance suppression filter 4 has the disadvantage of reducing the response at the set frequency. Therefore, the feed control system for the purpose of chasing commands has the disadvantage of not being able to use this kind of mechanical resonance suppression filter. Refilled pages · When the "mechanical resonance suppression chirp wave" is composed of a trap wave resonator that can remove fixed frequency components, it is necessary to apply a large amount of current to a mechanical system with a low natural vibration number, which is a problem. The old sampling data of the instruction is necessary to be memorized in the memory. Recently, the digital sampling cycle has been developed at a high speed, and the problem that the memory capacity must be increased is increased. Therefore, the present invention can obtain mechanical resonance or vibration at a lower frequency. In this case, the purpose of the servo control device is to suppress mechanical resonance, improve responsiveness, and reduce the memory capacity of the memory used to save data. [Overview of the Invention] The servo control device printed by the line consumer property cooperative of the Wisdom Property Bureau is a servo control device that uses a servo motor to drive and control a mechanical system, and has a position for detecting the position of the servo motor. A speed detection device for detecting the speed of the servomotor; a position control unit that generates a speed instruction based on a difference between the position command of the servomotor and the position feedback from the position detection device, A speed control unit that generates a current command based on the difference between the speed command and the speed feedback signal output by the speed detection device; and a current control unit that performs current control on the servo motor according to another current command, which is characterized by: Between the speed control unit and the current control unit, an external interference suppression filter having a frequency characteristic of the inverse transfer function of the transfer function of the mechanical system is disposed, and the external interference suppression filter is used to correct 7446.
經濟部智慧財產局員工消費合作社印製 五、發明說明（4 ) 前述速度控制部之電流指令， 制部。 …、後將之輸出至前述電流控 數二：發明’將具有機械系統的轉移函數之逆轉移函 數的頻率特性之外來干擾抑 1 u 愿疫15插入伺服控制系統， 來干擾抑制濾波器之特性盥 1 /、機械系統之頻率特性相 抵，可抑制特別是在低頻率 Λ < /、振，而提高響應性。 /、次之發明係在上述發明 w ^月肀則述外來干擾抑制濾波 m以記憶前述速度控制部所產生的電流指令值之 取樣週期前的數據之第！記憶體；用以記憶前述速度控 制部所產生的電流指令值的兩取樣週期前的數據之第2記 憶體；將前述第！記憶體之記憶數據乘以係數&的乘積、 前述第2記憶數據乘以係數&的乘積及前述速度控制部此 次產生之電流指令值乘以係數Bq的乘積相加之第i加法 益，用以記憶前述外來干擾抑制濾波器的輸出的一取樣週 期前的數據之第3記憶體；用以記憶前述外來干擾抑制濾 波器的輸出之兩取樣週期前的數據之第4記憶體；將前述 第1記憶體之記憶數據乘以係數A!的乘積、前述第2記惟 體之記憶數據乘以係數A:的乘積、前述速度控制部此次產 生之電流指令值乘以係數Bg的乘積及前述第1加法器之輸 出相加，將該相加結果做為外來干擾抑制濾波器之輸出而 使之輸入前述電流控、制部之第2加算器。 依照此發明，使外來干擾抑制濾波器之頻率特性為機 械系統的轉移函數之逆轉移函數，而且，以如下式所示之 二次之轉移函數，設定外來干擾抑制濾波器之特性。 本紙張尺度適用中國國家標準（CNS)A4規格（210 x 297公釐） 312525 (請先閱讀背面之注意事項再填寫本頁) I *1111 — I —訂.I I I I-- _ 517446Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs. 5. Description of the Invention (4) The current instruction of the speed control department and the production department. ..., and then output it to the aforementioned current control number two: Invention 'Insert the frequency characteristic of the inverse transfer function of the transfer function of the mechanical system to suppress the interference 1 u Wish 15 is inserted into the servo control system to interfere with the characteristics of the suppression filter The frequency characteristics of the washing machine 1 and the mechanical system are offset, which can suppress the vibration especially at low frequencies and improve the responsiveness. / The second invention is the first invention in the above-mentioned invention w ^ month 滤波 described external interference suppression filtering m to memorize the data before the sampling period of the current command value generated by the speed control section! Memory; the second memory used to memorize the data before the two sampling cycles of the current command value generated by the speed control section; The product of the memory data multiplied by the coefficient & the product of the second memory data multiplied by the coefficient & the product of the current command value generated by the speed control unit multiplied by the coefficient Bq and added to the i-th addition benefit A third memory for storing data before one sampling period of the output of the external interference suppression filter; a fourth memory for storing data before two sampling periods of the output of the external interference suppression filter; The product of the memory data of the first memory multiplied by the coefficient A !, the product of the memory data of the second unique memory multiplied by the coefficient A :, and the product of the current command value generated by the speed control unit by the coefficient Bg. And the output of the first adder is added, and the result of the addition is used as the output of the external interference suppression filter to be input to the second adder of the current control and control unit. According to this invention, the frequency characteristic of the external interference suppression filter is the inverse transfer function of the transfer function of the mechanical system, and the characteristic of the external interference suppression filter is set as a quadratic transfer function as shown in the following formula. This paper size applies to China National Standard (CNS) A4 (210 x 297 mm) 312525 (Please read the notes on the back before filling this page) I * 1111 — I —Order. I I I I-_ 517446
五、發明說明（5 F(z)： (請先閲讀背面之注意事項再填寫本頁) 接下來的發明係在上述發明中， 剝嗜咕哭& A, 丹在則迷外來干擾抑 制濾波剛述電流控制部之間，插入可只去除外來干擾 抑制遽波器的輪出之預定頻率成份的機械共振抑制遽波 器。 〜/ 依T此發明，在高頻率域的機械共振細機械共振抑 制濾、波器加以抑制，而在低頻率域之機械共振1以外來 干擾抑制濾波器加以抑制。 、 再下來之發明係在上述發明中，具備依據前述機械系 統固有的共振頻率W、反共振頻率ωη、共振的衰減係數 t C、反共振的衰減係數Γ η，而以使前述外來干擾抑制濾 波器的輸出成為前述機械系統的轉移函數之逆轉移函數的 方式，演算用於前述外來干擾濾波器之係數Α广係數、 係數Β〇、係數B1及係數β2之演算器。 經濟#智慧財產局員工消費合作社印製 依照此發明，具備以使外來干擾抑制濾波器之輸出成 為該機械系統固有的轉移函數之逆轉移函數的方式進行計 算之演算器，可依據外部輸入的共振頻率^^、反共振頻率 ωπ、共振的衰減係數^〇及反共振衰減係數演算用 於外來干擾抑制濾波器之係數Al、係數a2、係數Bq、係 數及係數B2。 再其次之發明係在上述發明中，具備檢出前述機械系 統之加速度或速度的檢出裝置；依據該檢出裝置之檢出信 312525 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 517446 經濟部智慧財產局員工消費合作社印製 A7 五、發明說明（6 ) 號，解析機械系統之共振頻率W、反共振頻率㈣、共振 衰減係及反共振衰減係數&之第1演算部，·依據該 第1演异部之演算結果，而以使前述外來干擾抑制遽波器 的輸出成為前述機械系統的轉移函數之逆轉移函數的方 式，演异用於前述外來干擾抑制濾波器的係數A!、係數 A,係數BG、係數Βι及係數B2,再以該演算結果設定前 述外來干擾抑制濾波器之各係數值的第2演算部。 依照此發明，第！演算部可依據飼服馬達所驅動的機 械系統之加速度或速度之檢出資訊，求得機械系統之共振 頻率、反共振頻率6；11、共振衰減係數及反共振衰 減係數Γ η。而且，第2演算部可依據第〗演算部之演算結 果，以使外來干擾抑制濾波器之輸出成為前述機械系統的 轉移函數之逆轉移函數的方式，演算用於前述外來干擾抑 制濾波斋之係數八丨、係數A,係數Β〇、係數\及係數β2， 並以該演算結果設定前述外來干擾抑制濾、波器。 再下一個發名係在上述發明中，前述機械系統具有以 複數個伺服馬達驅動之伺服驅動軸；前述檢出裝置具備分 別用以檢出前述機械系統之各伺服驅動軸方向之加速度或 速度之複數個檢出器；前述第1演算部係就各個伺服驅動 軸解析前述機械系統之共振頻率uc、反共振頻率ωη、共 振衰減係數Γ c及反共振衰減係數（η ;而前述第2演算部 則就各祠服驅動軸演算用於外來干擾抑制渡波器之係數 Α!、係數Α2、係數Β。、係數h及係數Β2。 依照此發明，將伺服馬達驅動的各伺服驅動軸方向之 衣纸張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 312525 . --------^---------AW. (請先閱讀背面之注意事項再填寫本頁) 517446 五、發明說明（7 ) 機械的加速度或速度一一拾 切 檢出，以該檢出資訊求出設於各 伺服驅動軸的伺服驅動系^ ^ ^ ^ ^ 、 轉移函數。 卜來干擾抑制遽波ϋ可用的逆 再下一發明為在上述發明中，前述機械系統具有以複 數個伺服馬達驅動的複數個飼服驅動轴；前述檢出裝置為 用以檢出前述機械系統的移動方向之加速度或速度的單： 檢出器，·前述第2演算部係將前述第夏演算部之演算結果V. Description of the invention (5 F (z): (Please read the notes on the back before filling in this page) The next invention is in the above invention, Peel the Cuckoo & A, Dan is in the foreign interference suppression filter As mentioned earlier, a mechanical resonance suppression resonator that removes only the predetermined frequency components of the external interference suppression suppression wave generator is inserted between the current control units. ~ / According to the invention, the mechanical resonance fine mechanical resonance in the high frequency range The suppression filter and the wave filter are suppressed, and the interference suppression filter is suppressed outside the mechanical resonance 1 in the low-frequency domain. The next invention is the above-mentioned invention, which includes the resonance frequency W and antiresonance that are inherent to the aforementioned mechanical system. The frequency ωη, the attenuation coefficient of resonance t C, and the attenuation coefficient of anti-resonance Γ η are calculated for the external interference filtering in such a way that the output of the external interference suppression filter becomes the inverse transfer function of the transfer function of the mechanical system. Calculator of coefficient A, coefficient B0, coefficient B1, and coefficient β2. Economy # INTELLIGENT PROPERTY BUREAU Staff Consumption Cooperative Printed in accordance with this invention, has The calculator that calculates the output of the external interference suppression filter as the inverse transfer function of the transfer function inherent to the mechanical system, can be based on the externally input resonance frequency ^^, antiresonance frequency ωπ, resonance attenuation coefficient ^ 〇 and The anti-resonance attenuation coefficient calculation is used for the coefficients Al, coefficient a2, coefficient Bq, coefficient, and coefficient B2 of the external interference suppression filter. The second invention is the above invention, which includes the detection of the acceleration or speed of the mechanical system. Device; detection letter based on the detection device 312525 This paper size is applicable to Chinese National Standard (CNS) A4 (210 X 297 mm) 517446 Printed by the Consumers ’Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 5. Description of the invention (6) No., analyzes the first calculation unit of the resonance frequency W, the anti-resonance frequency ㈣, the resonance attenuation system, and the anti-resonance attenuation coefficient & of the mechanical system, so as to suppress the above-mentioned external interference based on the calculation result of the first different portion The method in which the output of the wave filter becomes the inverse transfer function of the transfer function of the aforementioned mechanical system, and is used differently for the aforementioned external interference suppression filtering Coefficient A !, coefficient A, coefficient BG, coefficient Bι, and coefficient B2, and then use the calculation result to set the second calculation unit of each coefficient value of the aforementioned external interference suppression filter. According to this invention, the! Calculation unit can be based on The detection information of the acceleration or speed of the mechanical system driven by the feeding motor is to obtain the resonance frequency and anti-resonance frequency of the mechanical system 6; 11, the resonance attenuation coefficient and the anti-resonance attenuation coefficient Γ η. Moreover, the second calculation unit may According to the calculation result of the calculation section, the coefficients for coefficient 8 and coefficients A of the external interference suppression filter are calculated in such a way that the output of the external interference suppression filter becomes the inverse transfer function of the transfer function of the aforementioned mechanical system. The coefficient B0, the coefficient \, and the coefficient β2, and the aforementioned external interference suppression filter and wave filter are set based on the calculation result. The next name is in the above invention, the mechanical system has a servo drive shaft driven by a plurality of servo motors; the detection device is provided with a means for detecting acceleration or velocity in the direction of each servo drive shaft of the mechanical system, respectively. A plurality of detectors; the first calculation unit analyzes the resonance frequency uc, the anti-resonance frequency ωη, the resonance attenuation coefficient Γ c, and the anti-resonance attenuation coefficient (η of the mechanical system) of each of the servo drive shafts; and the second calculation unit Then calculate the coefficients A !, coefficient A2, coefficient B., coefficient h, and coefficient B2 for the external interference suppression wave drive of each temple service drive shaft. According to this invention, the servo paper driven by the servo motor is driven in the direction of the clothes paper. Zhang scale is applicable to China National Standard (CNS) A4 (210 X 297 mm) 312525. -------- ^ --------- AW. (Please read the notes on the back before filling (This page) 517446 V. Description of the invention (7) The acceleration or speed of the machine is detected one by one, and the servo drive system provided on each servo drive shaft is calculated based on the detected information. ^ ^ ^ ^ ^, Transfer function. To interfere with ϋAn inverse and next invention that is usable is that in the above invention, the mechanical system has a plurality of feeding clothes drive shafts driven by a plurality of servo motors; the detection device is used to detect accelerations in the moving direction of the mechanical system or Speed sheet: Detector, the second calculation unit is the calculation result of the first summer calculation unit
分解為各伺服控制軸方向之而旦士 A 乃门之向里成份，而依據該分解出之 各軸方向之共振頻率㈣、反共振頻率…、共振衰減係數 Tc及反共振衰減係數Γη之資訊，就各飼服驅動軸演算用 於前述外來干擾抑制濾波器之係數\、係數A,係數Β〇、 係數Β!及係數Β2。 依照此發明，解析機械振動之各伺服驅動軸方向之向 量成份，依據該解析資訊，使各伺服驅動軸的伺服控制裝 置之外來干擾抑制濾波器的輸出，成為該機械系統固有的 轉移函數之逆轉移函數。 經濟，部智慧財產局員工消費合作社印製 其次之發明係一種使用伺服馬達而對機械系統進行驅 動控制之伺服控制裝置，具備：用以檢出伺服馬達的位置 之位置檢出裝置；用以檢出前述伺服馬達之速度的速度檢 出裝置；依據對前述伺服馬達之位置指令與上述位置檢出 裝置所輸出的位置回授信號之差分產生速度指令之位置控 制部·’依據前述速度指令及前述速度檢出裝置所輸出的速 度回授信號的差分產生電流指令之速度控制部；及依據前 述電流指令對刖述词服馬達施行電流控制之電流控制部， 本紙張尺度適用中國國家標準（CNS)A4規格（210x 297公釐） 517446 A7 經 濟 部 智 慧 財 產 局 員 工 消 費 合 作 社 印 製 五、發明說明（8 其特徵為具備修正前述速度控制部之電流指令，然後將之 輸出至前述電流控制部之外來干擾抑制濾波器。 該外來干擾抑制濾波器具備：用以記憶前述速度控制 部所產生的電流指令值之一取樣週期前之數據的第丨記憶 體，用以記憶前述速度控制部所產生的電流指令值之兩取 樣週期前之數據的第2記憶體；將前述第丨記憶體之記憶 數據乘以B!的乘積，前述第2記憶體之記憶數據乘以係數 B2的乘積及前述速度控制部此次產生的電流指令值乘以 係數B0的乘積相加之第}加法器；用以記憶前述外來干擾抑制濾波器的輸出之一取樣週期前的數據之第3記憶體·， 用以a己憶則述外來干擾抑制遽波器的輸出之兩取樣週期前 之數據的第4記憶體；將前述第i記憶體之記憶數據乘以 係數Ai的乘積，前述第2記憶體之記憶數據乘以係數、 的乘積，前述速度控制部此次產生之電流指令值乘以係數 Bo的乘積及前述第！加法器之輸出相加，將該相加結果做 為外來干擾抑制濾波器之輸出而使之輸入前述電流控制部 之第2加法器。 依照此發明，可以如下式所示之二次轉移函數設定外 來干擾抑制濾波器之特性。 [圖式簡單說明] 第1圖為使用傳統機械共振抑制遽波器時的祠服控制 ΓΠ553 (請先閱讀背面之注意事項再填寫本頁) --- 訂---------線一 本紙張尺度適用中國國家標準（CNS)A4規X 997公f 517446 A7 - ----—__ Β7 _ 五、發明說明（9 ) ^ ------ 裝置之方塊圖，第2圖為將依照本發明之外來干擾抑制遽 波器裝組進入時的飼服控制裝置之方塊圖；第3圖為依： 本發明之飼服控制裝置之外來干擾抑制遽波器之說明圖； 第4圖為表示依照本發明之伺服控制裝置的第ι實施形態 之構成的說月圖，第5圖為使用本發明的外來干擾抑制遽 波to之、果例，第6圖為依照本發明之飼服控制裝置之第 2實施形態的構成之說明圖，·第7圖為依照本發明之伺服 控制裝置的第3實施形態的構成之說明圖；第8圖為依照 ^--------1---------^ (請先閱讀背面之注意事項再填寫本頁) 本發明之伺服控制裝置的第4實施形態的構成之說明圖。 [元件符號說明] 經濟部智慧財產局員工消費合作社印製 1 位置指令產生部 2 位置控制部 3 速度控制部 4 機械共振控制濾波器 5 電流控制部 6 功率放大電路 7 伺服馬達 8 > 70 、71編碼器 9 微分裝置 10 位置指令 11 位置回授信號 12 速度指令 13 速度回授信號· 14 速度偏差信號 15 電流指令 16 濾波器輪出電流指令 16^ 外來干擾抑制濾波器 的輸出 17 電流回授信號 18 機械系統 19 反作用力 20 外來干擾抑制濾波器 26至 29 數據 30 第1加法器 31 第2加法器 32 第1記憶體 33 第2記憶體 34 第3記憶體It is decomposed into the direction of each servo control axis and Danshi A is the inward component of the door, and according to the information of the resonance frequency ㈣, anti-resonance frequency, resonance attenuation coefficient Tc and anti-resonance attenuation coefficient Γη of each axis direction decomposed. The coefficients \, coefficients A, coefficients B !, coefficients B !, and coefficients B2 for the aforementioned external interference suppression filters are calculated for each feed drive shaft. According to this invention, the vector components in the directions of the servo drive shafts of the mechanical vibration are analyzed, and the output of the interference suppression filter outside the servo control device of each servo drive shaft is made into the inverse of the transfer function inherent to the mechanical system based on the analysis information. Transfer function. Economic, printed by the Intellectual Property Bureau employee consumer cooperative. The second invention is a servo control device that uses a servo motor to drive and control the mechanical system. It has a position detection device to detect the position of the servo motor; Speed detection device for outputting the speed of the aforementioned servo motor; Position control section for generating a speed command based on the difference between the position command of the aforementioned servo motor and the position feedback signal output by the position detection device · 'According to the aforementioned speed command and the aforementioned The speed control unit that generates the current command based on the difference of the speed feedback signal output by the speed detection device; and the current control unit that performs current control on the predicate servo motor according to the aforementioned current command. This paper size applies the Chinese National Standard (CNS) A4 specifications (210x 297 mm) 517446 A7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 5. Description of the invention (8 It is characterized by having a current command to amend the speed control unit, and then output it outside the current control unit Interference suppression filter The device is provided with: a memory for storing data before one sampling cycle of the current command value generated by the speed control section, and for storing data before two sampling cycles of the current command value generated by the speed control section Second memory; multiplying the memory data of the aforementioned memory by the product of B !, multiplying the memory data of the second memory by the product of the coefficient B2, and multiplying the current command value generated by the speed control unit by the coefficient The third adder of the addition of the product of B0; the third memory used to store the data before one sampling period of the output of the aforementioned external interference suppression filter; The fourth memory of the data before the two sampling cycles is output; the memory data of the i-th memory is multiplied by the product of the coefficient Ai, and the memory data of the second memory is multiplied by the product of the coefficient and. The product of the current command value multiplied by the coefficient Bo and the output of the aforementioned! Adder are added, and the result of the addition is used as the output of the external interference suppression filter to input the aforementioned current. The second adder of the control unit. According to this invention, the characteristics of the external interference suppression filter can be set by the quadratic transfer function shown in the following formula. [Simplified description of the figure] Figure 1 shows the case of using a traditional mechanical resonance suppression chirper. Ancestral clothing control ΓΠ553 (Please read the precautions on the back before filling this page) --- Order --------- line 1 paper size applies Chinese National Standard (CNS) A4 regulations X 997 male f 517446 A7-----__ Β7 _ V. Description of the invention (9) ^ ------ Block diagram of the device, Figure 2 is a diagram showing the feeding of the wave suppression device when it is interfered with according to the present invention. 3 is a block diagram of a servo control device according to the present invention; FIG. 4 is an explanatory diagram of an interference suppression wave filter outside the feeding control device of the present invention; and FIG. 4 is a view showing a structure of a first embodiment of a servo control device according to the present invention. Fig. 5 is a diagram showing an example of the use of the external interference suppression wave to of the present invention, and Fig. 6 is an explanatory diagram of the structure of the second embodiment of the feeding control device according to the present invention. The figure illustrates the structure of the third embodiment of the servo control device according to the present invention. Figure 8 is in accordance with ^ -------- 1 --------- ^ (Please read the notes on the back before filling this page) The fourth embodiment of the servo control device of the present invention Illustrative diagram of the composition. [Description of component symbols] Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 1 Position command generation unit 2 Position control unit 3 Speed control unit 4 Mechanical resonance control filter 5 Current control unit 6 Power amplifier circuit 7 Servo motor 8 > 70, 71 Encoder 9 Differential device 10 Position command 11 Position feedback signal 12 Speed command 13 Speed feedback signal 14 Speed deviation signal 15 Current command 16 Filter wheel output current command 16 ^ Output of external interference suppression filter 17 Current feedback No. 18 Mechanical system 19 Reaction force 20 External interference suppression filter 26 to 29 Data 30 First adder 31 Second adder 32 First memory 33 Second memory 34 Third memory
本紙張尺度適用中國國家標準(CNS)A4規格（210 X 297公爱） 9""""" --3125U 517446 A7 慧 局 員 工 消 費 Ϊ 五、發明說明（1G ) 35 第4記憶體 4 41 NC裝置 4 43 解析結果 4 50 係數演算器 6 62、63、80 感測器 6 66 Y 軸 6 68 X 軸 6 72、73、81 信號 [發明之最佳實施形態] 以參照附圖，詳細說明本發明 實施形態。 月之伺服控制裝置的最々 第1實施形| 第2圖為具備以去除因機械系統之固有振動數等 生之共振或振動為目的的外來干 T復抑制濾波器2() 伺服控制裝置之控制方塊圖。此 以批制τ於祕U 疋機械系統可假想為斥 乂控制作機械、驅動裝置的進給輛之位置的袭置， 在第2圖中’ i為位置指令產生部，2為位 3為速度控制部，4為以去除因機械系統的固=制部’ 產生的共振或振動為 ，’ 有振動數等而 “支“ 的而插入之機械共振抑制滹、法哭 】P 為作為電流驅動裝置之例如β^ 電路。7為驅動機赫法 例如功率放大 勒機械系統18之伺服馬達， 服馬達7的轉動仞班+⑭ 為用以檢出伺 幻轉動位置之編碼器。9為將 哭 置檢出信號微分以曾出、# ^ 輸出之位 裝置9構成，達二出速度之微分裝置。編碼器8及微分 __^達速度之檢出裝置。〗。為位置指令產生部i (請先閱讀背面之注意事項再填寫本頁) ，·裝 ----訂---------線- * n β— - 本紙張尺度適用 312525 517446 五、發明說明（11 ) 輸出之位置指令。u為編 為位置控制部2輸出之速度指令。…心 速度檢出信號（速度回授信號） 刀置9輸出之 出…之差分的速度偏差)信號為==速度檢 出之電流指令，“為機械共振抑制、，：二控制部3輸 哭笼、4 %认山 „ ，慮波器（例如陷波濾波 =二:=_電流指令，表示流經伺服 2:出電流回授信號。16,為外來干擾抑制濾波器 經濟“部智慧財產局員工消費合作社印製 此伺服控制裝置係以編碼器8所檢出的飼服馬達7之 位置回授信號U追縱調整位置指令產生部！所輪出之位置 指令信號1G的方式使㈣馬達7旋轉。而且，為使該動作 高速敎運行，使位置控制部2依據位置指令信號ι〇與位 置回授信號11之偏差信號產生速度指令12，再以利用微 分裝置9將位置回授信號η微分而產生的速度回授信號 13追縱調整該速度指令12的方式，使速度控制部3向伺 服馬達7輸出電流指令15。電流控制部5及功率放大電路 6係以表示流經伺服馬達7的電流值的電流回授信號丨7追 蹤調整電流指令1 6之方式，控制流入伺服馬達7之電流。 1 8為以伺服馬達7驅動之機械系統，因而產生的反作用力 1 9則作用於伺服馬達7之輸出。 在該伺服控制裝置中，為了提高對伺服馬達7之指令 的追縱性，如果將位置指令10至位置回授信號11的位置 迴圈的響應性，或速度指令1 2至速度回授信號1 3之速度 迴圈之響應性提高，則會因伺服馬達7所驅動之機械系統 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 11 312525 517446 經濟部智慧財產局員工消費合作社印製 五、發明說明（！2 ) 18中存在的固有振動 是機械系統u之動作，生機械共振或振動，如此不只 穩定。飼服控制系絲服馬達7之控制迴圏本身亦會不 共振點時，使用以較少:響應之在高頻帶的 波器20,即可抑制機械共：構成：外來干擾抑制遽 處理時間，以機械並据女、而可以更間單的構成，較短 高響應性。 振抑制波器4抑制機械共振，而提 1所^疋#在機械之共振頻率或振動頻率低的情況下，如 刖所述，使用機械共振 ^ 如 率之響應性會降低。此I本:日、，則在所設定的頻 械系統18固有 、’在本第1實施形態，插入使機制遽波器20,心抑制/成為疋轉移函數之外來干擾抑 域之響應性提高Π:低=之共振及振動且使在低頻 ,.^ M 4 、5之，此時，在高頻帶之機械共振係 機械八振抑制濾波器4加以抑制，而在低 械妓 振則以外來干擾抑制濾波器2。加以抑制。 械a 第3圖表不外來干擾濾波器20之方塊圖。其中，該外 ^ Γ擾抑制;慮;皮器20具有用以保存速度控制部3所產生的 指令值15的一取樣週期前之數據26的第丨記憶體32，及 用以保存速度控制部3所產生的指令值丨5之兩取樣週期前 的數據27之第2記憶體33，還具有將第1記憶體32所保 存的一取樣週期前的數據26乘以係數Βι的乘積，第2記 憶體33所保存的兩取樣週期前之數據27乘以係數B2的乘 積，及此次速度控制部3所產生指令值i 5乘以係數的 乘積相加之第1加法器3 0。 請 先 閱 讀 背 〇6This paper size applies to China National Standard (CNS) A4 specifications (210 X 297 public love) 9 " " " " " --3125U 517446 A7 Consumption of employees of the Bureau of Intellectual Property Ϊ 5. Description of invention (1G) 35 No. 4 memory Body 4 41 NC device 4 43 Analysis result 4 50 Coefficient calculator 6 62, 63, 80 Sensor 6 66 Y axis 6 68 X axis 6 72, 73, 81 Signal [Best Embodiment of the Invention] To refer to the drawings The embodiments of the present invention will be described in detail. The first embodiment of the servo control device of the month | FIG. 2 is a diagram of the external dry T complex suppression filter 2 () equipped with an external dry T complex suppression filter for the purpose of removing resonance or vibration caused by the natural vibration number of the mechanical system. Control block diagram. The batch τ Yu Mi U 于 mechanical system can be assumed to be used to control the position of the feed vehicle for the mechanical and driving devices. In the second figure, 'i is the position command generation unit, 2 is the bit 3, and Speed control unit, 4 is to remove the resonance or vibration caused by the solid part of the mechanical system. The mechanical resonance suppression is inserted when there are "supports" such as the number of vibrations. P is used as a current drive. Devices such as β ^ circuits. 7 is a drive motor. For example, the servo motor of the power amplification Le mechanical system 18, the rotation of the motor 7 + + is an encoder used to detect the position of the servo rotation. 9 is a device for differentiating the detection signal of the crying device with the position of the previous output and # ^ output. Encoder 8 and detection device for differential speed. 〖. For the position command generation unit i (please read the precautions on the back before filling in this page), · binding ---- binding --------- line- * n β--this paper size applies 312525 517446 5 2. Description of invention (11) Position command output. u is the speed command output by position control unit 2. … Heart speed detection signal (speed feedback signal) The difference between the speed deviation of the output of the knife 9 output signal is == the current command of the speed detection, “for mechanical resonance suppression,” the second control unit 3 loses tears Cage, 4% recognition of the mountain, wave filter (such as notch filter = two: = _ current command, which means that the current flows through the servo 2: output current feedback signal. 16, for external interference suppression filter economy "Ministry of Intellectual Property The servo control device printed by the employee consumer cooperative uses the position feedback signal U of the feeding motor 7 detected by the encoder 8 to track and adjust the position command generation unit! The position command signal 1G is turned out to make the motor 7 In addition, in order to make the operation run at high speed, the position control unit 2 generates a speed command 12 based on the deviation signal between the position command signal ι0 and the position feedback signal 11, and then uses the differentiation device 9 to differentiate the position feedback signal η. The generated speed feedback signal 13 follows the way of adjusting the speed command 12 so that the speed control unit 3 outputs a current command 15 to the servo motor 7. The current control unit 5 and the power amplifier circuit 6 indicate the flow through the servo motor 7. The current feedback signal of the current value 丨 7 tracks and adjusts the current command 16 to control the current flowing into the servo motor 7. 18 is a mechanical system driven by the servo motor 7, so the reaction force 19 generated acts on the servo motor Output of 7. In this servo control device, in order to improve the followability of the instructions of servo motor 7, if the position loop response of position command 10 to position feedback signal 11 or speed command 12 to speed The feedback response of the speed loop of the feedback signal 1 3 will be improved, because the mechanical system driven by the servo motor 7 will conform to the Chinese National Standard (CNS) A4 specification (210 X 297 mm). 11 312525 517446 Ministry of Economic Affairs wisdom Printed by the Consumer Cooperative of the Property Bureau V. Invention Description (! 2) The inherent vibration in 18 is the action of the mechanical system u, which generates mechanical resonance or vibration, so it is not only stable. The feeding control system is the control of the wire motor 7 When the resonance point itself is not used, it is possible to suppress mechanical interference by using less: responding to the wave device 20 in the high frequency band: composition: external interference suppression, processing time, mechanical Female, but can be more simple, short and highly responsive. Vibration suppression wave filter 4 suppresses mechanical resonance, and mention 1 ^^ # in the case of low mechanical resonance frequency or vibration frequency, as described in 刖, The use of mechanical resonance ^ If the response rate will be reduced. In this case: the day, then the frequency system 18 is set, "In the first embodiment, the mechanism wave filter 20 is inserted, and the heart is suppressed / becoming之外 Increase the response of the suppression domain outside the transfer function Π: Low = resonance and vibration and make it at low frequencies,. ^ M 4, 5, at this time, the mechanical resonance system in the high frequency band mechanical eight vibration suppression filter 4 Suppress, while outside the low-mechanical prostitute interference suppression filter 2. Suppress. The third chart is a block diagram of the external interference filter 20. Among them, the external interference suppression is considered; the leather device 20 has a memory 32 for storing the data 26 before a sampling period of the command value 15 generated by the speed control section 3, and for storing the speed control section The command value generated by 3 丨 the data 2 before the two sampling periods 27 and the second memory 33 also have a product of the data 26 before a sampling period held by the first memory 32 and the product of the coefficient Bι, the second The data 27 before the two sampling periods stored in the memory 33 is multiplied by the product of the coefficient B2 and the product of the command value i 5 generated by the speed control unit 3 by the coefficient is multiplied by the first adder 30. Please read it first 〇6
意 事 項 再 填 寫裝 本衣 頁I 訂 線 本紙張尺度適用中關家規格⑵Q χ 297_公餐） 12 312525 517446 經净部智慧財產局員工消費合作社印製 A7 B7 五、發明說明（13 ) 又，外來干擾抑制濾波器20具有用以保存外來干擾抑 制濾波器20所輸出的電流指令16，之一取樣週期前的數據 28之第3記憶體34，及用則呆存外來干擾抑制遽波器2〇 所輸出的電流指令16，的兩取樣週期前之數據29的第4記 憶體35 ’還具有將第3記憶體34所保存的輸出電流指令 之一取樣週期前之數據28乘以係數、的乘積，第4記憶 體3 5所保存的輪出電流指令之兩取樣週期前之數據2 9乘 以奋數八2的乘積’及第j加法器3〇之輸出相加以作成電 流指令1 6 ’之第2加法器3 1。 因此’在下式所示的外來干擾抑制濾波器2 0之轉移函 數中，代入係數Al、係數a2、係數B〇、係數Βι、係數& 之值，以調整外來干擾抑制濾波器20之特性，而抑制共振 並提高響應性。 ' t . -I , -2 第4圖顯示本發明之外來干擾抑制濾波器20之轉移函 數之各係數，由]S[C(numerical control)裝置41輸入時之系 統構成圖。利用外部輸入裝置40將係數Ai、係數a2、係 數B。、係數Βι及係數I輸入裝置41。NC裝置41將 係數Ai、係數人2、係數B()、係數&及係數輸入外來 干擾抑制濾波器20，而藉由調整這些係數值來調整伺服控 制裝置42之外來干擾抑制濾波器2〇之特性，以提高響應 性0 " III --------^ --------- (請先閱讀背面之注意事項再填寫本頁) 本紙張尺度翻家標準297公餐） 13 312525 517446 A7 __ B7 五、發明說明（14 ) "~"~" --- 第5圖為使用本發明的模擬結果之一例所示之 (Bode)圖。第 5fj,、未- ^ 圖U)表不共振模型之增益特性及相位特 ' 圖（b)為第5圖（a)之共振模型之速度迴圈響應波 形。第5圖⑷表示本發明所用的外來干擾抑制遽波哭 之增益特性及相位特性’具有大致與第5圖⑷之共振模型 特^的延轉移函數對應之特性。第5圖⑷為對第5圖⑷ 之共振模型使用第5圖⑷之外來干擾濾-波器20之模擬 (随ulatlon)結果。如第5圖⑷所示插入本發明之外來干 擾抑制濾波器2G’可將速度迴圈之響應性在全帶域都 定。 w 如上所述的此種第丨實施形態，將具有機械系統Μ 的轉移函數之逆轉移函數的頻率特性之外來干擾抑制濾波 器20插入伺服控制系統内，以·、外來干擾抑制濾波器之特性 抵消機械系統18之頻率特性，可抑制特別是在低頻域之共 振且提高響應性。X ’由於也使用只去除預定頻率成份的 機械共振抑制濾波器4，所以，可以抑制在高頻域之機械 共振。又，由於係藉由使用速度控制部3所產生的指令值 之一取樣週期前之數據及兩取樣週期前之數據，外來干擾 抑制濾波器20的輸出之一取樣週期前之數據，及兩取樣週 期前之數據的2次轉移函數，設定外來干擾抑制濾波器2 〇 之特性，所以只要有保存兩取樣週期前之數據的記憶體， 即已足夠’故可使用較少之數位濾波器用之記憶體容量。 蕖2實施形Μ 第6圖表示將係數演算器5 〇組裝入祠服控制裝置4 2 (請先閱讀背面之注意事項再填寫本頁) 裝 訂---------線- 經濟部智慧財產局員工消費合作社印製 本纸張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 14 312525 517446 經净部智慧財產局員工消費合作社印製Please fill in the pages of the clothing I. Alignment. The paper size is applicable to Zhongguanjia specifications (Q χ 297_Public meal). 12 312525 517446 Printed by the Consumer Property Cooperative of the Intellectual Property Bureau of the Ministry of Commerce. The alien interference suppression filter 20 has a third memory 34 for storing the current command 16 output by the alien interference suppression filter 20, data 28 before one sampling period, and an alien interference suppression wave filter. The output current command 16 and the second memory 35 ′ of the data 29 before the two sampling periods are further provided by multiplying the data 28 before the sampling period of one of the output current commands stored in the third memory 34 by a coefficient, Multiplied by the product of the fourth current cycle command stored in the fourth memory 35 and the data 2 9 times the product of the multiplied number eight 2 'and the output of the j-th adder 30 to add the current command 1 6 '之 第 2ADDER 3 1． Therefore, in the transfer function of the alien interference suppression filter 20 shown in the following formula, the values of the coefficient Al, coefficient a2, coefficient B0, coefficient Bι, coefficient & are adjusted to adjust the characteristics of the alien interference suppression filter 20, It suppresses resonance and improves responsiveness. 't. -I, -2. Fig. 4 shows the system configuration when the coefficients of the transfer function of the interference suppression filter 20 outside the present invention are input by the [S (C) (numerical control) device 41. The coefficient Ai, the coefficient a2, and the coefficient B are used by the external input device 40. The coefficient Bι and the coefficient I are input into the device 41. The NC device 41 inputs the coefficient Ai, the coefficient person 2, the coefficient B (), the coefficient & and the coefficient into the foreign interference suppression filter 20, and adjusts these coefficient values to adjust the interference suppression filter outside the servo control device 42. Characteristics to improve responsiveness 0 " III -------- ^ --------- (Please read the precautions on the back before filling out this page) The standard of this paper is 297 Meal) 13 312525 517446 A7 __ B7 V. Description of the invention (14) " ~ " ~ " --- Figure 5 is a (Bode) diagram shown as an example of the simulation results using the present invention. Figure 5fj, Wei- ^ Figure U) shows the gain characteristics and phase characteristics of the resonance model. Figure (b) is the velocity loop response waveform of the resonance model in Figure 5 (a). Fig. 5 (a) shows the gain characteristics and phase characteristics of the external interference suppression wave used in the present invention ', which have characteristics corresponding to the delay transfer function of the resonance model characteristic of Fig. 5 (a). Fig. 5 (a) is a simulation result (with ulatlon) of the resonance model of Fig. 5 (a) using the outside of Fig. 5 (a) to interfere with the filter-wave 20; As shown in Fig. 5 (i), the interference suppression filter 2G 'inserted outside the present invention can fix the response of the speed loop in the entire band. w In the first embodiment described above, the interference suppression filter 20 is inserted into the servo control system in addition to the frequency characteristics of the inverse transfer function of the transfer function of the mechanical system M, so that the characteristics of the external interference suppression filter Cancelling the frequency characteristics of the mechanical system 18 can suppress resonance particularly in the low frequency region and improve responsiveness. Since X 'also uses a mechanical resonance suppression filter 4 which removes only a predetermined frequency component, it is possible to suppress mechanical resonance in a high frequency range. In addition, because the data before one sampling period and the data before two sampling periods are used by the command value generated by the speed control section 3, the data before the sampling period of the output of the external interference suppression filter 20 and the two samples are used. The second-order transfer function of the data before the cycle sets the characteristics of the external interference suppression filter 2 〇, so as long as there is a memory to store the data before the two sampling cycles, it is enough 'so you can use less memory for digital filters Body capacity.蕖 2 Implementation form Figure 6 shows the assembly of the coefficient calculator 5 〇 into the shrine clothing control device 4 2 (Please read the precautions on the back before filling this page) Binding --------- Line-Ministry of Economic Affairs Printed by the Intellectual Property Bureau Staff Consumer Cooperatives This paper is scaled to Chinese National Standard (CNS) A4 (210 X 297 mm) 14 312525 517446 Printed by the Intellectual Property Bureau Staff Consumer Cooperatives
•2aT A7 五、發明說明（I5 ) 時的，統構成。本伺服系統所控制的機械系統18之固有共 振頻率OC、反共振頻率011、共振衰減係數及反共振 衰減係數Γ 11，以外部輸入裝置40輸入NC裝置41。Nc 裝置41再將這些與機械系統之共振有關資訊輸入係數演 算器5〇。係數演算器50依據所輸入之共振頻率^&、反共 振頻率ωη、共振衰減係數rc及反共振衰減係數，以 使外來干擾抑制遽波器20之輸出成為機械系統Μ固有的 轉移函數係逆轉移函數的方式，計算外來干擾遽波器2〇 之係數A!、係數A2、係數Bq、係數Βι及係數該係數 演算器50之計算内容，表示如下。 假定機械系統之固有的轉移函數之逆轉移函數為： (l/coj s +2^Λ(ΐ/ωη)Γ+ι 則所求的外來干擾抑制濾波器20之轉移函數為· 5 +5ζ +丑 ζ F(Z):J——4- 1 + A z 十Λ z 1 1 其中： A ^ cos (bT) = e2ar B〇 ^(^n/ue)2(l + AT)• 2aT A7 V. When the invention is explained (I5), the system is composed. The natural resonance frequency OC, anti-resonance frequency 011, resonance attenuation coefficient, and anti-resonance attenuation coefficient Γ 11 of the mechanical system 18 controlled by the servo system are input to the NC device 41 through an external input device 40. The Nc device 41 then inputs the information related to the resonance of the mechanical system into the coefficient calculator 50. The coefficient calculator 50 uses the input resonance frequency ^ &, the anti-resonance frequency ωη, the resonance attenuation coefficient rc, and the anti-resonance attenuation coefficient so that the output of the external interference suppression wave filter 20 becomes the transfer function system inherent to the mechanical system M. The transfer function method calculates the coefficient A !, coefficient A2, coefficient Bq, coefficient Bι, and coefficient calculator 50 of the external interference waver 20, as shown below. Assume that the inverse transfer function of the inherent transfer function of the mechanical system is: (l / coj s + 2 ^ Λ (ΐ / ωη) Γ + ι. Then the obtained transfer function of the external interference suppression filter 20 is · 5 + 5ζ + Ugly ζ F (Z): J——4- 1 + A z ten Λ z 1 1 where: A ^ cos (bT) = e2ar B〇 ^ (^ n / ue) 2 (l + AT)
Bi = (u yu J2 {BTsin(bT}ATcos(bTy2cos(bT)ye -r B2 -(un/ucf*e 312525 n n n n n I n n n n n —i I ϋ n i n n n d 一-eJt n n i— n i n n I (請先閱讀背面之注意事項再填寫本頁) 517446Bi = (u yu J2 {BTsin (bT) ATcos (bTy2cos (bT) ye -r B2-(un / ucf * e 312525 nnnnn I nnnnn —i I ϋ ninnnd 一 -eJt nni— ninn I (Please read the back (Please fill out this page again)
B A7 B7 五、發明說明（16 此時： A = 2(Cc^c"Ca^n> 〇ACtta?n ω 將此係數演算器50組裝入伺服控制裝置42，、么 輸入裝置4。爾£41，本飼料、統所控制的機=由 18之固有的共振頻率ωο、反共振頻率⑺ 並 、 ，、很农減係數 Γ c、反共振衰減係數（η輸入係數演曾 讯◊、t 15 50，即可自動 算外來干擾抑制濾波器20之係數Αι、係數a2、係數b °、 係數h及係數Sr以調整外來干擾抑制濾波器2〇。 〇' 此種第2實施形態具借以使夕卜& ^B A7 B7 V. Description of the invention (16 At this time: A = 2 (Cc ^ c " Ca ^ n > 〇ACtta? N ω) This coefficient calculator 50 is assembled into the servo control device 42, and the input device 4. Here. 41. The machine controlled by this feed system = the natural resonance frequency ωο, the anti-resonance frequency 并 union of 18, the non-farm reduction coefficient Γ c, the anti-resonance attenuation coefficient (η input coefficient, Zeng Xun◊, t 15 50, the coefficient Aι, coefficient a2, coefficient b °, coefficient h, and coefficient Sr of the external interference suppression filter 20 can be automatically calculated to adjust the external interference suppression filter 20. 〇 'This second embodiment has the advantage of &Amp; ^
文r求干擾抑制濾波器2Q 之輸出成為該機械系統18的固有隸兹 秀轉移函數之逆轉移函數 之演异器。可省去調整轉移函數的係數值的勞力 第3實施形熊 町 第7圖表示第3實施形態之系統構成。在本第 形態中，假想本祠服系統所控制之機械系統… (table)65〇XY平台65之X軸卜、交诛總上 口 釉（滾珠螺桿）6δ以Χ軸馬達69 驅動，Υ軸（滾珠螺桿）66以γ軸 △ 5以 袖馬達67驅動，而在XY方 向文到驅動。伺服控制裝置42 . λ軸馬達69及Y軸馬達 67各別具有如第2圖所示之伺服控制系統。 安裝在X軸馬達69及Υ軸 7〇 , 2 Η . ^ 馬達67上之編碼器71、 7對應於第圖之編碼器8，將所& ώ ^兮所榀出的伺服馬達6 9、 (請先閱讀背面之注意事項再填寫本頁) 1 --------訂·-------- 經 濟 部 智 慧 財 產 局 員 工 消 費 合 作 社 印 製 312525 517446 經濟部智慧財產局員工消費合作社印製 A7 五、發明說明（l7 ) 67之位置回授信號，輸入各軸之伺服控制系統。 感測器02為了檢出X軸伺服馬達69所驅動之沿χ軸 8之軸方向的χγ平台之加速度或速度而直接安裝在χγ 平台65上之加速度感測器，或速度感測器。感測器〇為 為了檢出Υ軸伺服馬達67所驅動之沿Υ軸66之軸方向的 ΧΥ平台65之加速度或速度，而直接安裝在又¥平台 上之加速度感測器或速度感測器。演算器61具備可將感測 斋62、63之輸出信號72、73以高速輸入之感測信號輸入 部，以依據該感測器62、63之檢出信號資訊，分別就各軸 (X軸、Υ軸）解析ΧΥ平台65之共振頻率、反共振頻率 ω η '共振衰減係數：、反共振衰減係數：n。演算部61 之解析結果43輸入NC裝置41。 組裝入伺服控制裝置42之係數演算器5()，依據經由 裝置41輸入之演算部61的演算結果，亦即χγ平台 65之各軸的共振頻率、反共振頻率、共振衰減係數 tc、反共振衰減係數Γη之資訊44,以使各軸的伺服控制 系統的外來干擾抑制滤波器20之輸出分別成為該機械^ 統（ΧΥ平台65)固有的轉移函數之逆轉移函數的方式，計 算各軸（X軸、Υ軸）之係數Al、係數A,係數、係數& 及係數B2，再將所算出之各係數，輸入設定各軸的伺服控 制系統之外來干擾抑制濾波器20。 此種第3實施形態依據伺服馬達所驅動的機械系統之 加速度或速度之檢出資訊’可自動且精確地設定外來干擾 抑制遽波器20之轉移函數’亦可即時（realtime)更新設 n m m n n m 1 n I— tmm§ n I 0 n ϋ n an n i n 訂---------線 (請先閱讀背面之注意事項再填寫本頁)The text r finds that the output of the interference suppression filter 2Q becomes a differentiator of the inverse transfer function of the intrinsic transfer function of the mechanical system 18. The labor for adjusting the coefficient value of the transfer function can be omitted. Fig. 7 shows the system configuration of the third embodiment. In this embodiment, the mechanical system controlled by the ancestral clothing system is assumed. (Table) 65 × XY platform 65's X axis and cross-section glaze (ball screw) 6δ are driven by the X-axis motor 69 and the y-axis (Ball screw) 66 is driven by the sleeve motor 67 in the γ axis Δ 5 and is driven in the XY direction. The servo control device 42. The λ-axis motor 69 and the Y-axis motor 67 each have a servo control system as shown in FIG. 2. The encoders 71 and 7 on the motor 67 correspond to the encoder 8 shown in the figure, and the servo motor 6 out of the & (Please read the precautions on the back before filling out this page) 1 -------- Order · -------- Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 312525 517446 Employees of the Intellectual Property Bureau of the Ministry of Economic Affairs The consumer cooperative prints A7 V. Invention description (l7) 67 The position feedback signal is input to the servo control system of each axis. The sensor 02 is an acceleration sensor or speed sensor directly mounted on the χγ stage 65 in order to detect the acceleration or speed of the χγ stage driven by the X-axis servo motor 69 in the direction of the χ-axis 8 axis. The sensor 〇 is an acceleration sensor or speed sensor directly mounted on the platform in order to detect the acceleration or speed of the XY platform 65 driven by the y-axis servo motor 67 along the axis of the y-axis 66. . The calculator 61 is provided with a sensing signal input section capable of inputting the output signals 72 and 73 of the sensor 62 and 63 at a high speed, and based on the detected signal information of the sensors 62 and 63, respectively for each axis (X axis (, Y-axis) Analyze the resonance frequency and anti-resonance frequency ω η 'of the XY platform 65: resonance attenuation coefficient :, anti-resonance attenuation coefficient: n. The analysis result 43 of the calculation unit 61 is input to the NC device 41. The coefficient calculator 5 () incorporated in the servo control device 42 is based on the calculation result of the calculation unit 61 input through the device 41, that is, the resonance frequency, anti-resonance frequency, resonance attenuation coefficient tc, and anti-resonance of each axis of the χγ platform 65 The information 44 of the attenuation coefficient Γη is such that each axis ’s output is calculated in such a way that the output of the external interference suppression filter 20 of the servo control system of each axis becomes the inverse transfer function of the transfer function inherent to the mechanical system (XYZ platform 65). X-axis, Y-axis) coefficients Al, coefficient A, coefficient, coefficient & and coefficient B2, and input the calculated coefficients outside the servo control system for each axis to set the interference suppression filter 20. This third embodiment is based on the detection information of the acceleration or speed of the mechanical system driven by the servo motor. 'The transfer function of the external interference suppression wave filter 20 can be set automatically and accurately.' It can also be updated in real-time (nmmnnm 1). n I— tmm§ n I 0 n ϋ n an nin order --------- line (Please read the precautions on the back before filling this page)
經濟部智慧財產局員工消費合作社印製 517446 A7 _________ B7 五、發明說明（18) 疋。又’因其係將驅動各伺服馬達的各伺服驅動軸方向之 機械的加速度或速度一一檢出，再以這些檢出資訊就設於 各伺服驅動軸之伺服驅動系統之外來干擾抑制濾波器 20，求出其逆轉移函數，所以可以更正確地自動設定外來 干擾抑制濾波器之轉移函數。 第4實施形錐 第8圖表示第4實施形態之系統構成。在該實施形態 中’假想本伺服系統所控制之機械系統1 8為XY平台65。 伺服控制裝置42與第7圖之實施形態相同，各χ軸馬達 69及Y軸馬達67分別具有第2圖所示之伺服控制系統。 編碼器71、70對應第2圖之編碼器8，將檢出之伺服馬達 69、67之位置回授信號輸入各軸之伺服控制系統。 此第4實施形態為了檢出成為各伺服馬達67、69所驅 動的XY平台65之性能上的問題之機械振動，將用以檢出 XY平台65的移動方向的加速度或速度之感測器8〇，直接 安裝在XY平台上。 演异部61具備可將感測器80之輸出信號81高速輸入 之感測信號輸入部，以依據感測器8〇之檢出信號資訊，解 析XY平台65之共振頻率、反共振頻率011、共振衰減 係數Γ c及反共振衰減係數（n。演算部6丨之解析結果43 輸入NC裝置41。 組裝入伺服控制裝置42之係數演算器5〇，將經由NC 裝置41輸入的演算部61之演算結果，亦即χγ平台65之 固有共振頻率we、反共振頻率ωι1、共振衰減係數rc、反 本紙張尺度適用中國國家標準（CNS)A4規格（210 χ 297公釐） 線· (請先閱讀背面之注意事項再填寫本頁) -a·— n n —fl n flu J 1 · n· n ·ϋ n 1« —e n < 言 517446 五、發明說明（19) 共振衰減係數Γ η之資訊44，分解為振動之各伺服控制軸 (X軸、Υ軸）方向之向量成份。然後，數演算器5〇依據分 解得到的各軸方向的共振頻率6JC、反共振頻率ωιι、共振 衰減係數Γ c及反共振衰減係數f η之資訊，以使各軸飼服 控制系、统的外來干擾抑制濾、波器2〇之輸出分別成為該機 械系統（ΧΥ平台65)之固有的轉移函數之逆轉移函數之方 式，計算用於各外來干擾抑制濾波器2〇之係數、係數 A?、係數BG、係數Β!及係數Β2，再以所算出之各係數輸 入設定各軸之伺服控制系統之外來干擾抑制濾波器2〇。 此種第4實施形態依，據伺服馬達所驅動之機械系統的 加速度或速度之檢出資訊，可自動且精確地設定外來干擾 抑制濾波20之轉移函數，亦可以即時更新設定。又，因 其解析機械振動在各伺服驅動軸方向之向量成份，再依據 該解析貝訊，使設於各伺服驅動軸的伺服控制裝置之外來 干擾抑制濾波器之輸出成為該機械系統固有的轉移函數之 逆轉移函數，所以，可用較少的感測器自動設定外來干擾 抑制濾、波器之轉移函數。 經濟，部智慧財產局員工消費合作社印製 又，本發明中第2圖之伺服控制裝置亦可省略機械共 振抑制濾波态4。X，本發明之伺服控制裝置之控制對象 不限於XY table，亦可用於任意Nc裝置，或產業機械手 臂（robot)等任意機械系統。 所it 本發明係將具有機械系統的轉移函數之逆 τ!:函數的頻率特性之外來干擾抑制濾波器，插入伺服控 制尔統内，使機械系統之頻率特性與外來干擾抑制濾波器 312525 本Μ；張尺度適財關(21G χ 297公爱）---------- 517446 A7 _B7 五、發明說明（2〇 之特性相抵消，可抑制转 θ 提高。 抑制特別疋在低頻域之共振’使響應性 其次之發明係以使用速度控制部所產 取樣週期前之數攄、兩雨接、 Μ日7值的 滹波哭 、，週期前之數據及外來干擾抑制 f =輸出之—取樣週期前之數據、兩週期前之數據的二 :人㈣函數，設定外來抑制遽波器之特性，所以只要有可 體呆=取樣週期前的數據之記憶體即足夠，可減少記憶 裝 丘接Γ其次之發明同時使用可僅去除預定頻率成份之機械 -F制濾波Is ’所以’在高頻域之機械共振可以 振抑制遽波器加以抑制，而在低頻域之機械共振可以絲 訂 ::抑制濾波器加以抑制，因此可提高伺服控制 應性。 據從外部 的輸入成 式進行計 之勞力和 服馬達所 動且精確 時更新設 馬達所驅 一檢出， 服驅動系 以可自動 本氏廣尺久適用中國國家標準（CNS)A4規格（210x 297公髮 再其次之發明具有根 訊而以使外來干擾濾波器 移函數之逆轉移函數的方 省調整轉移函數的係數值 再其次之發明依據伺 度或速度之檢出資訊，自 波器之轉移函數，亦可即 再其次之發明將伺服 之機械的加速度或速度一 出設於各伺服驅動軸之伺 盗所用之逆轉移函數。所 輸入之與振動有關的資 為該機械系統固有的轉 之硬鼻器’因此可節 時間。 驅動的機械系統之加速 地設定外來干擾抑制濾 定。 動之各飼服驅動軸方向 再由這些檢出的資訊求 統的外來干擾抑制濾波 而正確地設定外來干擾 312525 517446 A7 五、發明說明（21 ) 抑制濾波斋之轉移函數，並可即時更新設定。 再其-人之發明解析機械振動之各伺服驅動軸方向之向 里成伤，再依據該解析資訊，以使設於各伺服驅動軸之伺 服控制裝置之外來干擾抑制遽波器之輸出成為該機械系統 固有的轉移函數之逆轉移函數，β以可用較少的感測器自 動設定外來干擾抑制濾波器之轉移函數，而且亦可即時更 新設定。 再其次之發明具備第1至第4記憶體，並使用速度控 制部所產生的指令值的一取樣週期前之數據、兩週期間之 數據、外來干擾抑制濾波器的輸出的一取樣週期前之數 據、及其兩取樣週期前之數據，設定外來干擾抑制遽波器 之特性，所以只要有可保存至兩取樣週期前為止的數據之 圮憶體即已足夠，故可減少使用記憶體之容量。 [產業上之可利用性] 綜上所述，本發明之伺服控制裝置作為工作機械之共 振對策具有相當好的效果，可以外來干擾抑制濾波器，使 即使在機械共振頻率或振動頻率低時，亦可提高響應性。 I I 1----—II---· I I--I I I — — II I I I I I (請先閱讀背面之注意事項再填寫本頁) 經濟知智慧財產局員工消費合作社印製 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公爱)'-------^Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 517446 A7 _________ B7 V. Description of Invention (18) 疋. Also, because it detects the acceleration or speed of the machine in the direction of each servo drive shaft driving each servo motor, and then uses these detection information to set the interference suppression filter outside the servo drive system of each servo drive shaft. 20. Find the inverse transfer function, so the transfer function of the external interference suppression filter can be set more automatically. Shaped Cone of Fourth Embodiment FIG. 8 shows the system configuration of the fourth embodiment. In this embodiment, it is assumed that the mechanical system 18 controlled by the servo system is an XY stage 65. The servo control device 42 is the same as the embodiment shown in FIG. 7, and each of the x-axis motor 69 and the Y-axis motor 67 has a servo control system shown in FIG. The encoders 71 and 70 correspond to the encoder 8 in Fig. 2 and input the detected position feedback signals of the servo motors 69 and 67 to the servo control system of each axis. In the fourth embodiment, in order to detect mechanical vibration that is a problem in the performance of the XY stage 65 driven by each of the servo motors 67 and 69, a sensor 8 for detecting acceleration or speed in the moving direction of the XY stage 65 is used. 〇, directly installed on the XY platform. The differentiating unit 61 includes a sensing signal input unit capable of inputting the output signal 81 of the sensor 80 at a high speed to analyze the resonance frequency, the anti-resonance frequency 011 of the XY platform 65 based on the detected signal information of the sensor 80. The resonance attenuation coefficient Γ c and the anti-resonance attenuation coefficient (n. Analytical result 43 of the calculation unit 6 丨 are input to the NC device 41. The coefficient calculator 50 incorporated into the servo control device 42 will be input to the calculation unit 61 input via the NC device 41. The calculation result, that is, the natural resonance frequency we of the χγ platform 65, the anti-resonance frequency ωι1, the resonance attenuation coefficient rc, and the anti-paper size apply the Chinese National Standard (CNS) A4 specification (210 χ 297 mm). Line · (Please read first Note on the back page, please fill in this page again) -a · — nn —fl n flu J 1 · n · n · ϋ n 1 «—en < Yan 517446 V. Description of the invention (19) Information on resonance attenuation coefficient Γ η 44 , Is decomposed into vector components in the direction of each servo control axis (X-axis, Y-axis) of vibration. Then, the digital calculator 50 calculates the resonance frequency 6JC, anti-resonance frequency ωι, and resonance attenuation coefficient Γ c in each axis direction according to the decomposition. Anti-resonance attenuation coefficient The information of f η is calculated in such a way that the external interference suppression filter and the output of the wave filter 20 of each axis feeding control system and system become the inverse transfer functions of the inherent transfer function of the mechanical system (XYZ platform 65). Coefficients, coefficients A ?, coefficients BG, coefficients B !, and coefficients B2 used for each external interference suppression filter 20, and the calculated coefficients are used to set the interference suppression filter 2 outside the servo control system of each axis. According to this fourth embodiment, the transfer function of the external interference suppression filter 20 can be automatically and accurately set according to the acceleration or speed detection information of the mechanical system driven by the servo motor, and the setting can also be updated in real time. It analyzes the vector component of the mechanical vibration in the direction of each servo drive axis, and then according to the analysis, the output of the interference suppression filter outside the servo control device of each servo drive axis becomes the inverse of the transfer function inherent to the mechanical system. Transfer function, so fewer sensors can be used to automatically set the transfer function of the external interference suppression filter and wave filter. Employees of the Ministry of Economic Affairs, Intellectual Property Bureau Printed by Fei Cooperative, and the servo control device in the second figure of the present invention can also omit the mechanical resonance suppression filter state 4. X, the control object of the servo control device of the present invention is not limited to XY table, and can also be used for any Nc device, or Any mechanical system such as an industrial robot (robot). Therefore, the present invention is to insert the interference suppression filter in addition to the frequency characteristic of the transfer function of the mechanical system into the servo control system to make the mechanical system Frequency characteristics and external interference suppression filter 312525 M; Zhang Jiu Shi Shi Cai Guan (21G χ 297 public love) ---------- 517446 A7 _B7 V. Description of the invention (the characteristics of 20 can be offset, but Suppression increases θ. Suppression of special resonance in the low-frequency region 'makes the response second. The invention is to use the number before the sampling period produced by the speed control unit, the two rain, the 7-day value of the wave, cry, the data before the period and the foreign Interference suppression f = output—data before the sampling period, two of the data before the two periods: human function, set the characteristics of the external suppression wave filter, so as long as there is memory = data before the sampling period Enough, can reduce the memory installation, and then use the second invention. At the same time, the mechanical-F filter Is is used to remove only the predetermined frequency components. Therefore, the mechanical resonance in the high frequency range can be suppressed by the vibration suppression chirper, and in the low frequency range. The mechanical resonance can be fixed with a :: suppression filter, so the servo control response can be improved. According to the external input formula, the labor force of the kimono motor is calculated and updated when the motor is driven. The kimono drive system is automatically adapted to the Chinese National Standard (CNS) A4 specification (210x 297). Gongfa secondly has the invention to adjust the coefficient value of the transfer function so that the inverse transfer function of the inverse transfer function of the external interference filter can be adjusted. The second invention is based on the detection information of the servo or speed, and the transfer from the wavelet The function can also be the invented second transfer function of the servo machine's acceleration or speed out of the servo drive shaft. The input of the vibration-related information is inherent to the mechanical system. The “hard nose device” can save time. The mechanical system of the drive accelerates the setting of the external interference suppression filter. The direction of the moving drive shaft of the clothing is based on the detected external interference suppression filter to correctly set the external interference. 312525 517446 A7 V. Description of the invention (21) The transfer function for suppressing the filter fast, and the setting can be updated in real time. The inward direction of each servo drive shaft is injured, and then based on the analysis information, the interference suppression wave output of the servo control device installed outside each servo drive shaft becomes the inverse of the transfer function inherent to the mechanical system. Transfer function, β can automatically set the transfer function of the external interference suppression filter with fewer sensors, and can also update the setting in real time. Secondly, the invention has the first to fourth memories and uses the speed control unit. The data of the command value of one sampling period, the data of two weeks, the data of the output of the external interference suppression filter before the sampling period, and the data of the two sampling periods before, set the characteristics of the external interference suppression wave filter. Therefore, as long as there is a memory that can save data up to two sampling periods before, the capacity of the memory can be reduced. [Industrial Applicability] In summary, the servo control device of the present invention As a countermeasure for the resonance of the working machine, it has a very good effect. It can suppress the external interference filter, even at the mechanical resonance frequency or vibration frequency. When it is low, it can also improve the responsiveness. II 1 ----— II --- · I I--III — — II IIIII (Please read the precautions on the back before filling this page) Economic and intellectual property bureau staff consumption The paper size printed by the cooperative is applicable to China National Standard (CNS) A4 (210 X 297 public love) '------- ^
Claims (1)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/JP2001/002799 WO2002082194A1 (en) | 2001-03-30 | 2001-03-30 | Servo control device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TW517446B true TW517446B (en) | 2003-01-11 |
Family
ID=11737208
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW090108249A TW517446B (en) | 2001-03-30 | 2001-04-06 | Servomotor controller |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP4664576B2 (en) |
| TW (1) | TW517446B (en) |
| WO (1) | WO2002082194A1 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI470384B (en) * | 2011-12-12 | 2015-01-21 | Mitsubishi Electric Corp | Positioning device and plc system |
| TWI508425B (en) * | 2010-03-05 | 2015-11-11 | Sanyo Electric Co | Motor controlling method and motor controlling apparatus |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7327437B2 (en) * | 2004-12-07 | 2008-02-05 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
| WO2009031654A1 (en) * | 2007-09-07 | 2009-03-12 | National University Corporation Yokohama National University | Drive control method, drive control apparatus, stage control method, stage control apparatus, exposure method, exposure apparatus and measuring apparatus |
| JP6474460B2 (en) * | 2017-06-21 | 2019-02-27 | ファナック株式会社 | Motor control device |
| KR102589984B1 (en) * | 2018-08-31 | 2023-10-16 | 주식회사 디엔솔루션즈 | Resonance suppression control device of machine tool and method thereof |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59208615A (en) * | 1983-05-12 | 1984-11-27 | Mitsubishi Heavy Ind Ltd | Operation control device of vibration board |
| FR2564660B1 (en) * | 1984-05-21 | 1994-06-10 | Enertec | RESONANT DIGITAL FILTER |
| JP2954378B2 (en) * | 1991-04-25 | 1999-09-27 | 三菱電機株式会社 | Control device for motor servo system |
| JPH07152429A (en) * | 1993-11-29 | 1995-06-16 | Mitsubishi Heavy Ind Ltd | Parameter identifying device |
| JPH07261853A (en) * | 1994-03-23 | 1995-10-13 | Komatsu Ltd | Vibration reduction device for robot |
| JP3360935B2 (en) * | 1994-06-09 | 2003-01-07 | 株式会社安川電機 | Machine resonance detection device and vibration suppression control device in motor control system |
| JPH08234822A (en) * | 1995-02-27 | 1996-09-13 | Fanuc Ltd | Method and device for controlling vibration of machine tool |
| JPH11118661A (en) * | 1997-10-20 | 1999-04-30 | Isuzu Motors Ltd | Vibration characteristics analyzer |
| JP3975537B2 (en) * | 1997-12-19 | 2007-09-12 | ソニー株式会社 | Control device and control method |
| JP2000148225A (en) * | 1998-11-09 | 2000-05-26 | Hitachi Ltd | Method and device for variable sampling control |
-
2001
- 2001-03-30 WO PCT/JP2001/002799 patent/WO2002082194A1/en active Application Filing
- 2001-03-30 JP JP2002580097A patent/JP4664576B2/en not_active Expired - Fee Related
- 2001-04-06 TW TW090108249A patent/TW517446B/en not_active IP Right Cessation
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI508425B (en) * | 2010-03-05 | 2015-11-11 | Sanyo Electric Co | Motor controlling method and motor controlling apparatus |
| TWI470384B (en) * | 2011-12-12 | 2015-01-21 | Mitsubishi Electric Corp | Positioning device and plc system |
Also Published As
| Publication number | Publication date |
|---|---|
| JP4664576B2 (en) | 2011-04-06 |
| JPWO2002082194A1 (en) | 2004-07-29 |
| WO2002082194A1 (en) | 2002-10-17 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP6431017B2 (en) | Human cooperative robot system with improved external force detection accuracy by machine learning | |
| Wang et al. | A comparison study of advanced state observer design techniques | |
| Xu et al. | Adaptive robust precision motion control of linear motors with negligible electrical dynamics: theory and experiments | |
| Verghese et al. | Observers for flux estimation in induction machines | |
| Phan et al. | Improvement of observer/Kalman filter identification (OKID) by residual whitening | |
| JP4231544B1 (en) | Motor control device | |
| Ohba et al. | Sensorless force control for injection molding machine using reaction torque observer considering torsion phenomenon | |
| JP4802838B2 (en) | Active vibration damping device and control method of active vibration damping device | |
| TW517446B (en) | Servomotor controller | |
| US10261520B2 (en) | Motor controller and industrial machine | |
| JP2006202019A (en) | Control device | |
| WO1988008640A1 (en) | Device for controlling speed of servo motor | |
| WO1990004882A1 (en) | Servo control apparatus | |
| JP2004005469A (en) | Control method and control device for electric motor | |
| CN107181441B (en) | Motor control device, motor control method, and recording medium | |
| WO1986004159A1 (en) | Interface system for a servo controller | |
| CN103616848B (en) | Improve filtering method and the system of the sef-adapting filter of velocity feed forward | |
| Tang et al. | A novel unknown-input estimator for disturbance estimation and compensation | |
| JPH0694734A (en) | Drift cancel system and apparatus for angular velocity detecting sensor | |
| WO1990008987A1 (en) | Servo control method by the disturbance estimation observer | |
| WO1994002988A1 (en) | Method for estimating inertia and disturbance torque, and method for detecting abnormal load | |
| JPS61251902A (en) | Noise eliminating device | |
| Kobayashi et al. | An analysis of parameter variations of disturbance observer for haptic motion control | |
| Phuong et al. | Wideband Sensorless Force Control Based on Singular Spectrum Analysis and Dither Periodic Component Elimination Kalman Filter | |
| CN115243813A (en) | Control system, motor control device, and machine learning device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GD4A | Issue of patent certificate for granted invention patent | ||
| MM4A | Annulment or lapse of patent due to non-payment of fees |