TW515967B - Method for dispatching estimation by tool performance - Google Patents

Abstract

The present invention uses tool performance for dispatching estimation in a semiconductor factory. When several lots of item waiting for manufacturing are separately scheduled to undergo a same process or different processes, all the stand-by tools that meet the item process requirements should first be located from a manufacture execution system (MES). By means of a dispatching performance estimation module, all the possible tool-item combinations should be determined. Then, the dispatching performance estimation module should use the tools provided by a tool performance tracking platform (TP2) to calculate the wafers per hour (WPH) of each process and estimate the longest process time and the total wafers per hour (TWPH) of each tool-item combination. Based on the longest process time of each combination, the total wafers of each combination (CWPH) can be estimated. The combination of both maximum CWPH and maximum TWPH should be selected to have the highest dispatching priority.

Description

515967 V. Description of the invention (1) Field of the invention The present invention relates to the use of machine effects. BACKGROUND OF THE INVENTION The distribution efficiency of factories. Generally, the production capacity of the machine is empty. The manufacturing execution system is based on the order among the goods. In addition to the online order, usually (capability) (Queue time), but the dispatch process, the consideration of the batch of goods is focused on the appropriate machine, and appropriate. In assessing the problem, it is mainly included in the dispatching process to consider various factors and the action of the manufacturing efficiency of the object. Regarding a method of dispatching a factory, it is particularly related to a method for estimating dispatch. (Dispatching) system, which often affects the production process of semiconductor manufacturing. Usually when an online "quote comes out, according to the machine's capabilities and restrictions, it searches for a suitable batch list of goods, and then Based on the order in the list or the experience of the online staff, when the dispatcher's dispatch time is determined, in addition to the priority of the cargo batch (10t), the currently available equipment models, machine capabilities, and machine restrictions are also considered. (Constrains) and waiting for the machine and so on. In addition to considering the conditions of the goods themselves, such as the manufacturing capacity required for manufacturing priority, etc., another manufacturing machine is dispatched. In the scheduled dispatch schedule, whether there are appropriate machine manufacturing capabilities and machine constraints, among other machine factors, it is often difficult to monitor machine performance without considering machine performance, so it is difficult to integrate Machine performance. However, due to the difference in manufacturing efficiency between different machines. The quality of manufacturing efficiency affects the goods, so the manufacturing efficiency of the machine also affects subsequent dispatches. Brief description of the invention

0503-6459TOF; TS ^ 2001 -0366; peggy. P t d

515967 V. Description of the invention (2) In order to dispatch workers, the purpose of the present invention is to provide a g J = machine manufacturing efficiency, the method of estimation 'can be based on the effectiveness of the machine performance table Another object of the present invention is the result of dispatch. Dispatching results to increase total manufacturing output. Based on the performance evaluation of the machine, ί 乃 Ming is to estimate the dispatch of work according to the performance of the machine, #XI; find the symbol in the manufacturing execution system of the factory: goods system =; Efficiency estimation model waiting for freighter: facing ΪΠΪ; combining: then dispatching the performance estimation module profit = ^ main σ to perform performance data (WPH) of each process, although each group of people in the restraint time is still far away f rp w DU, ,,, and 口 are in the morning and estimated in each machine-cargo combination = 5 =; two. Based on the longest process time of each group, estimate each group first Hi) 'Select the group with the highest CWPH as the best test, if there are multiple combinations with the highest CWPH at the same time, then choose the total output per unit time (TWPH) The group with the maximum value is considered as the priority for dispatch. "、 With the present invention, the machine performance can be effectively introduced. The performance of various machine and cargo dispatching combinations is estimated first, and then the group with the best estimated performance is selected as a reference for actual dispatching. The improvement of work efficiency can further increase the manufacturing efficiency, thereby increasing the overall throughput. In order to make the above-mentioned objects, features, and advantages of the present invention more comprehensible, the following detailed description is given in conjunction with the accompanying drawings: Brief descriptionΗ Ιί ^^ Ι 0503-6459TW; TSMC2001 -0366; peggy. Ptd p. 515967

515967

V. Description of the invention (4) Table 1 A B C D Number of wafers 3 4 3 3 Float range R1 R2 R3 R3 Refer to FIG. 1, which shows a system architecture diagram according to an embodiment of the present invention. With reference to Fig. 2, a method for estimating dispatched work according to an embodiment of the present invention will be described. First go to Step 2 2 ··· Find the standby machine that meets the requirements of the goods manufacturing process. Since the four batches require different process technology, they must start with the manufacturing plant.

In the Manufacturing Execution System (MES) 10 in China, the ability to search for the machines in the factory can simultaneously meet the requirements of the current four batches of goods processing process and are available in standby mode. In one embodiment, as a result of searching for brothers, it is found that the currently suitable machines in the factory are η, T2, and M, all of which can perform the processes of R1, R2, and R3. ′, ^ Then proceed to step 204: Query the machine performance when each available machine performs each process. That is, find out the machine performance when Ti, T2, and T3 perform the processes of Ri, R2, and R3, respectively. Machine performance can be calculated using the current equipment performance monitoring platform = 〇〇1 Performance Tracking piatf〇rm, τρ2) 14

Calculated, TP2 is mainly designed for semiconductor factories, which can be used as a tool to measure the production efficiency of 104 semiconductor factories = manufacturing equipment 12. τρ2 can continuously record and monitor the production time, waiting time, cycle count, interrupt time and other related manufacturing equipment of each batch of goods on the machine according to the process flow and the batch of goods data. So available

515967 V. Description of the invention (5) --- Each machine obtained by the TP2 system is in a process. After the time for manufacturing the goods and the amount of goods produced, calculate the wafers produced by the machine in the process. The number of wafers (wafer per hour, WPH) is used to determine the production efficiency of the machine. It is used to indicate that the performance records of the T1, Ding 2 and Ding 3 machines R2 and R3 were found in the TP2 system 14, respectively. The results are shown in Table 2 below. Table 2, "WPH R1 R2 R3 T1 2 2 2 T2 2 1 _ 3 T3 1 2 3

-From Table 2, it can be seen that the efficiency of the three processes of T1 is 2 tablets per hour, and the efficiency of T2 and Y is the highest in the R3 process, which can reach 3 tablets per hour. 9 After the required machine performance information, proceed to step 206:

The number of machines and the corresponding combination of goods are determined by the number of machines and the number of goods. A dispatch performance estimation module 16 is used to arrange various dispatch combinations between the cargo and the machine, and the dispatch performance estimation module 16 can be executed by a computer host or a server. From the MES system 10, it is found that there are currently four groups of goods a, B, C, and E) dedicated to manufacturing, and the currently available machines in the factory are Ti, D2, and T3. Therefore, the dispatcher performance estimation module 16 can use P (4, 3) to arrange 24 dispatcher combinations (A-T1_R1, B-T2-R2, C-T3-R3) and so on. Then calculate the various rows

Mi) 967 5. Description of invention (6) The total number of pieces produced by the combination of columns. Taking (A-Π-Rl) as an example, since this batch chooses to produce A (3 pieces), ′ B (4 pieces) and U pieces, the total number of pieces produced is i 0 pieces. Then proceed to step 208: estimate the total output in the unit of each combination by the production efficiency. Taking (A-T1-R1 'B_T2_R2, c — T3_R3) as an example, the output within a bit time (t〇tal wafer, — .Η), according to the manufacturing efficiency, can be produced per hour under the τι-R1 state 2 pieces of A goods, '6 pieces of cymbals can be produced per hour under the T2-R2 state, and T3_R3M | j II:!: C goods' Therefore, the total number of manufactured pieces of this combination per hour, proceed to step 21〇: The longest process time required for each group of machine_goods, and a is estimated by production efficiency. Taking (Α 一 n—R1, B—T2_R2, C T3 R3) as examples, the manufacturing time required for two batches of goods on three machines is: number of pieces of goods / WPH, which is (3/2 = 1 · 5, 4/1 = 4, 3/3 = 1). = This, on three machines, B—T2—R2 takes the longest time to complete the manufacturing process. It takes 4λ1, h, j: D is (A — T1 — R1, b — T2 — R2, C — T3 — R3]. ) The longest process time. After obtaining the longest process time, use this as a reference to proceed to step 212: Calculate the unit time capacity (ΐ〇ΐ & wafers of combination / the longest process time of combination, CWPH) in the longest process time. In this combination (A_T1_R1, B T2 r2, c t3 r3), the longest process time is 4 hours, and the total amount of the three batches of A and B is ί, so the unit time capacity of the longest process time (cw⑻preliminary) Estimated to be 10/4 = 2.5 tablets / hour.

Page 9 0503-6459TWF; TSMC2001-0366; peggy.ptd 515967 V. Description of the invention (7) Use the dispatch performance estimation module 16 to place the four batches of eight-Rl, B-R2, 〇R3, and D-R3 in The results of all 24 combinations of the three machines T1, τ 2 and T 3 are calculated to obtain the third table. '' Table 3 Combination Nie Long Process Time CWPH, TWPH A-TlfB-T2.CT ^ 5 10 Max (3/2, 4/1, 3/3 > 4 2.5 6 A-TlfB-T3.C.T9 10 Max (3/2, 4 / 2,3 / 3) = 2 5 7 A-mTl.CH 10 Max (3 / 2,4 / 2,3 / 3) = 2 5 7 A-T2, B-T3.C -Tl ~ 10 Max (3 / 2,4 / 2,3 / 2 > = 2 5 6 A-T3, B-T1.C-T9 10 Max (3/1, 4 / 2,3 / 3) = 3 3.3 6 A-TJ, B-TKC.T1 10 Max (3/1, 4/1, 3 / 2M 2.5 4 A: Tl, B-T2.D-fT ~ 10 Wfax (3 / 2,4 / l, 3/3 &4; 4 2.5 6 A-T1, B-T3.D-T9 10 Max (3 / 2,4 / 2,3 / 3 > 2 5 7 A-THTl.Dm 10 Max (3/2, 4 / 2,3 / 3 > 2 5 7 A-TAb-T3.D-T1 10 Wfex (3 / 2,4 / 2,3 / 2 > 2 5 6 Al ^, b-Tl.D-T9 10 Max (3 / 1, 4/2, 3/3) = 3 303 6 A-T3, B-T2.D-T1 10 Max (3 / 1,4 / 1,3 / 2M 2.5 4 A-Tl, C-T2m 9 Max (3/2, 3 / 3,3 / 3) = 1.5 6 8 A-T1, C-T3.D-T9 9 Max (3/2, 3 / 3.3 / 3M.5 6 8 Α-Τ ^, ϋ-Tl.DT ^ 9 3/2, 3/2, 3/3 > = 1.5 6 7 A- li!, U-T3.D.T1 9 _3 / 2, 3/3, 3 / 2W.5 6 7 A- i J, U-T1.D-T9 9 Max (3 / l, 3 / 2,3 / 3 > = 3 3 6 A- T 3, CT 2.DT 1 9 Max (3 / l, 3 / 3,3 / 2 > 3 3 6 BT 1, C-T2, DT ^ 10 Max (4/2, 3/3. 3/3 > = 2 5 8 ΰ- i 1, U-T3.D-T9 4 10 Max (4/2, 3 / 3.3 / 3 ^ 2 5 8 B-T2, C-T1, D-T3 10 Max (4/1, 3 / 2,3 / 3 > 4 2.5 6 B-T2, C- T3, D-T1 10 Max (4/1, 3/3. 3/2 > = 4 2.5 6 B-T3, C-T1.D-T5 10 MaK (4/2, 3 / 2.3 / 3 > 2 5 7 B-T3, C-T2.D-T1 10 丨 _4 / 2, 3/3 · 3/2 > 2 5 7

Then proceed to step 214: find the combination with the highest CWPH value as the basis for dispatching. Using the dispatch performance estimation module 16 to find out of the 24 combinations, the one with the highest CWPH value is used as the priority for dispatch. The cwpH value reflects the time required for manufacturing. The larger the CPWH, the higher the three sets of machines. The more the rate of happiness is, take Table 3 as an example, there are four groups with a cwpH value of 6,

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515967-. Description of the invention (8) ^-Go to step 216 ·························································································································································································· In Find the combination with the highest TWPH value. As can be seen from Table 3, comparing the TWpH values of the four groups, the two groups with the highest TWpH values are (A-T1, C-T2, D-T3) and (A-T1, C_T3, D-T2). combination. When the CPWH value reaches the maximum value, the TWPH value reflects the total manufacturing efficiency of the group of machines. When the TWPH value is larger, the number of pieces that can be produced in a single time is greater. When the values of cwpH and "" reach the highest position, the manufacturing efficiency of this combination is the best and the manufacturing time required is the shortest. Therefore, online personnel can be (A-Tl, C-T2, D-T3) and ugly. According to other conditions, the 'most advanced' in the combination is selected as the most suitable group for dispatch manufacturing. According to the method of machine ordering according to the present invention, the online personnel can be effectively assisted, and the best dispatching combination can be found out quickly and in real time. Because the manufacturing efficiency of the machine is known through Tp2 and other systems, the machine performance can be obtained, and the efficiency can be obtained. The machine performance can be used as the basis for dispatching workers. J = Machine upgrade, and closer to the current situation, effectively improve manufacturing. 2Effectiveness of dispatching workers Although the present invention is disclosed in the preferred embodiment above, the present invention can be determined. Anyone who is familiar with the art can do some changes and adjustments within the limits and scope. The scope of protection of the invention is defined by the scope of the attached patent application

Claims (1)

515967 VI. The scope of patent application is applicable to multiple batches, etc .: semiconductors, dispatching methods, and the same or different manufacturing processes, including the following: Wait for the goods to be scheduled separately to find out which matches the multiple batches Each stand-by machine performs the "Chengjin machine; combined;-the number of machine ports and the number of negative objects determines the complex array machine-the cargo corresponding group estimates the production within A between the corresponding production efficiency, and the population of each site machine △ machine? 4 Do not combine the unit time; and select the group of machine-goods combinations for the longest process required in the machine combination, and use the group with the maximum total production capacity at that early time as the system time estimate When there are multiple groups with the maximum value, select ς, and when the total output is the largest, use it as a reference for dispatch. Yield in the middle, early, and early stages 2. According to the method described in item 丨 of the scope of the patent application, beans are a collection of multiple manufacturing steps in a 'specific order'. Eight middle names, one right 3 · According to the method described in item 1 of the scope of the patent application, the corresponding production efficiency of each process in 1 :: Taiwan is the hourly production rate: The method described in item 2 of the patent scope 'Where the number of machines: number /, the number of known things determine the complex array machine-goods corresponding combination, and so on can be: 2: 2 with the goods and people to arrange and combine to obtain all possible: Taiwan-k thing corresponding combinations. 5. The method described in item 1 of the scope of patent application, wherein the 12th tribute of each group is 0503-6459TW; TSMC2001 -0366; peggy. Ptd 515967. 6. The unit time within the scope of the patent application is the number of units in the combination. The total number of wafers that the machine can produce per hour. 6. The method according to item 1 of the scope of patent application, wherein the estimated total production capacity per unit time of the longest process time is the total number of wafers to be produced by each batch of goods in the combination and the longest process time. quotient. 0503 -6459TW JSMC2001 -0366; peggy.ptd p. 13